TWI223007B - Coating apparatus - Google Patents

Abstract

A coating apparatus includes a motive unit, a transition mechanism, a monitor mechanism, a substrate holding mechanism and a coating source. In this case, the motive unit has a rotation axle. The transition mechanism has a first gear and a second gear. Even more, the first gear is pivoted on the rotation axle and the second gear engages with the first gear. The center of the second gear has a first opening. The monitor mechanism has at least two testing units. The substrate holding mechanism that is connected with the second gear has a second opening. The second opening is set opposite to the first opening. The monitor mechanism sets through the first gear and the second gear through the first and second openings. The coating source sets corresponding to the substrate holding mechanism and the testing units.

Description

1223007

(1) [Technical field to which the invention belongs] In particular, the present invention relates to a coating device with a process monitoring function. 2.) [Previous technology], its application fields are cross-industry and other fields. Due to the recent rapid development of coating technology in the semiconductor and optoelectronic industries, the coating process has a wide range of applications in the industry. Great progress has been made in the metal processing industry, semiconductor industry and optoelectronic industry. As shown in Figure 1, 'the conventional coating equipment 3 series includes a motor 31, _ umbrella-shaped substrate supporting mechanism 3 2, a test piece fixing mechanism 3 3, and a coating source 3 4 ° of which' umbrella-type substrate supporting mechanism 3 2 is usually composed of a plurality of substrate supporting bases 321, and the umbrella-type substrate supporting mechanism 32 is provided on the axis of the motor 31. The money film source 3 4 is opposite to the umbrella-type substrate supporting mechanism 3 2 and is tested. The sheet fixing mechanism 33 includes a fixing plate 331 and a fixing frame 332. One end of the fixing frame 3 3 2 is connected to the fixing plate 3 3 1. The fixing plate 3 3 1 is opposite to the coating source 34. Among them, the fixing plate The plate 33 1 is usually provided on the periphery of the umbrella-type substrate supporting mechanism 32 or above the coating source 34 to avoid affecting the coating effect of the coating equipment 3. When the coating device 3 is operated, a plurality of substrates 3 5 are usually placed on the umbrella-shaped substrate holder 3 2 1 and the test element 3 6 is fixed on the fixed plate 3 3 1. Then, the coating device 3 is started. The umbrella-type substrate supporting mechanism 32 is rotated with the motor 31, and finally the plating material of the coating source 3 4 is plated on the substrate 3 5 by means of vacuum evaporation or key splashing, as described above. By observation

1223007 V Description of the invention (2) __________ Test element 36 to determine the age 屮 A R λα quality. < Show the coating situation of substrate 35 'to ensure that the coating product π is on the substrate. In other words, the frequency of the film will be familiar with the increase in coating growth and the thickness of the coating. In other words, the test component changes with the quartz measurement, and the quartz measurement changes when the forging is increased, which can push the technology and the speed of the mine down; a more than 30 layers are not reliable and have their limitations. The calculation is based on the calculation of the plating, and the film accumulates freely. When the force is rf0 =, the quality of the selected test element is usually increased at any time. This is measured by quartz, and the thickness of the film is measured by the growth rate of quartz. The "plating property calculated in practice" is the single-quartz quartz test. The test coatings and coating test components of the test components that are coated due to the force are measured. When the stone film grows, the test component quartz drops. The thickness and frequency of the accumulated quartz are used to monitor the test speed of the coating film and the glass or glass test component to increase the plating. Degree. Where the calculated number of layers on the calculated number of layers is allowed, FIG. 2 shows another conventional coating equipment 4, which includes a motor 4, a row of substrate support mechanisms 4, a test piece fixing mechanism 4 3, and a Coating source 44. The planetary substrate supporting mechanism 42 is composed of a mother gear 42 ι, a plurality of sub-gears 4 2 2 and a plurality of substrate bearing seats 4 2 3, wherein the mother gear 4 2 1 is provided with a shaft at the center of the motor 41 'child gear The 4 2 2 series are respectively meshed with the mother gear 4 2 1 'the substrate bearing seat 4 2 3 series are respectively arranged on the axis of the sub gear 4 2 2, and the ore film source 44 is opposite to the planetary substrate bearing mechanism 42. The test piece fixing mechanism 43 includes a fixing plate 4 31 and a fixing frame 432. One end of the fixing frame 432 is connected to the fixing plate 431. The fixing plate "I series is opposite to the coating source 44 and

1223007 V. Description of the invention (3) Set the clam test piece fixing mechanism 4 3 However, when using the relative position of the conventional film source and the difference of the base (as described above), due to the error, the result will result in a film thickness outside: single The accuracy of the coating test required in the film production process of the test element, and how to break through it is the heavy system in the current coating technology to fix the test element 4 6. In the case of the mineral film equipment, the relative position of the test element, the board and the coating source has a considerable distance = the coating condition of the test element and the substrate will = the monitoring accuracy cannot be effectively improved; the number of clock film layers may not be sufficient Multiple trips. Therefore, how to increase the limit of the number of coating layers of a single test device for coating equipment is one of the important issues. '(' [Invention: In view of the similarity between the upper test element and the coating, the test element of the present invention is used to monitor the present invention and has at least two edges. It is a power unit and a source of money. In the present invention, the moving mechanism is Including the shaft is installed in the power coupling, and the second content is the subject mentioned above. The other purpose of the relative thickness monitoring of the original source is to measure the quality of the coating. The characteristics are the test elements. To achieve the above purpose, the transmission mechanism, a first gear unit The purpose of the central invention of the rotating gear is to provide a coating device capable of measuring and the accuracy of the relative position of the substrate and the source of the mineral film. To provide a coating device that can use two or more coating devices in sequence. In the bearing mechanism, 'the coating device system according to the present invention includes a monitoring mechanism, a substrate bearing mechanism and a power unit having a rotation axis; and a second gear, wherein the first gear axis and the second The gear train has a first opening with the first gear;

Page 8 Lu V. Description of the invention (4) There are at least two tests and a second opening. The relative position of the structure is similar to that of _. With the components mentioned, it is the number of coating layers; and the accuracy with the coating source. Therefore, it is accurate and reliable: the burdock substrate supporting mechanism is connected to the second gear and has a first opening, which is relatively historical relative to the first opening, the monitoring machine-opening and the second opening +, so that the test element and the The phase of each substrate and money source carried by the coating source substrate carrier; the coating source is opposite to the substrate bearing mechanism and the test element, because the coating equipment according to the present invention is not limited to having at least two test film processes A single test element allows the relative position of the test element to the coating source and the substrate pair position to be similar, so it can improve the accuracy of film thickness monitoring, effectively increase production yield and reduce costs, and can monitor the execution of the coating process. (IV) [Embodiment] The following is a description of a zhengzhuang related diagram to describe a cymbal plating apparatus according to a preferred embodiment of the present invention. ′ Please refer to FIG. 3, a coating device 1 according to a preferred embodiment of the present invention includes a tongue-and-groove unit 11, a transmission mechanism 12, a monitoring mechanism 13, a substrate carrying mechanism 14, and a coating source 15. The power unit 11 has a rotation axis 11. In this embodiment, the moving port 11 early element 11 is a motor, and it may have a speed control element 丨 2 timely torque protection element 11 3, the speed control element 112 may be a conventional control, 'for Control the speed of the power unit 丨 1; Torque protection element 丨 丨 3 series can be used—Coupling with torque limit (Coup 1 er) to connect the rotation axis

1223007 V. Description of the invention (5) 111 and transmission mechanism 12, torque protection element 11 3 When the torque is greater than the rated torque range of the power unit 11, the rotating shaft center 111 and the transmission mechanism 12 will be converted from the connected state to the separated state. , Causing the rotating shaft center 111 to idle, so as to prevent the power unit 11 from being damaged due to excessive torque. The transmission mechanism 12 includes a first gear 121 and a second gear 122, wherein the 'first gear 1 2 1' is a shaft provided with a torque protection element 113 of the power unit 11 'and the axis of the second descending wheel 122 is fixed. With the first gear κι

The center of the second gear 122 has a first opening 1221. Among them, the axis fixing method of the second gear 122 has various embodiments, for example, a gear seat (not shown in the figure) carries the second gear. 122, so that the second gear 122 can rotate on a fixed axis. In this embodiment, the speed of the second gear 122 mechanism 14 is lower than the speed of the power unit 丨 丨. The monitoring mechanism 13 has at least two test elements 131, and the monitoring system is arranged in the transmission mechanism 12 and the substrate bearing mechanism 14 so that the positions of I ′ and the mineral film source 15 are aligned with the pure bearing mechanism u and the mineral film source. The relative position of 15 is similar. In this embodiment, the carrier 13 has six test elements 131. In addition, the monitoring agency 13

A masking portion 132, which is provided in the test element and a room; the masking portion 132 is provided with a hole 1321 (as in the case, the mineral film source 15: the masking portion 132 is exposed through the hole 1321) A test element does not) 'and other test elements 131 W ^ = 131 that are not opposed to the hole 1321, and in the mask, there is only one test element at each point in time 丨 31 will be applied to the coating process, the mask part The 132 series is rotatable, so when ^ = upper film layer. Required; · Tian ..., Zhuokou P1 3 2 when turning,

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V. Description of the invention (6) The hole 1321 can be moved to a position opposite to another test element 131, so that the test element 1 3 1 is sequentially exposed; therefore, when a certain number of coatings are accumulated on a test element j 3 i After causing it to be unreliable, the mask portion 132 will rotate in order to continue to use another test element 31 for film thickness monitoring. In addition, the test element 1 31 of this embodiment is a conventional quartz test element; in addition, the test element 1 31 may be far from a glass substrate or other conventional test elements. Please refer to FIG. 3 again. In this embodiment, the substrate carrying mechanism 丨 4 is an umbrella-type substrate carrying mechanism, which is used to carry more than one substrate 16 and is connected to the second gear 122 and has一 second opening 141. In the present invention, the second opening 141 is opposite to the first opening 1221, the monitoring device \ 13 is disposed in the first opening 1221 and the second opening 141, and the test element 131 is approximately the same as the substrate carrying mechanism 1 The substrates 6 carried by 4 are set at similar positions, so that the test element 131 and the substrate 6 have similar coating conditions with respect to the coating source 15. First, please refer to FIG. 3, the coating source 15 is opposite to the substrate supporting mechanism 丨 4 and the test element 1 3 1. In this embodiment, the coating source 5 may be any conventional coating material; and the coating equipment 1 may have a plurality of coating sources (not shown in the figure). In addition, the relative height of the test element 1 31 and the substrate supporting mechanism 14 is adjustable. In this embodiment, the adjustment range of the height of the test element 31 is between the outer edge and the center of the substrate supporting seat 14. In between, the test element 丨 31 can obtain a coating effect similar to that of the substrate 16 during the coating process to achieve the best monitoring effect. Here, the adjustment method of the relative height of the test element 131 and the substrate carrying mechanism 14 can be replaced by a monitoring mechanism of a different size or other

1223007

Way reached. In addition, those who are familiar with this technology know that the above-mentioned substrate carrier 2: Second, other types of substrate bearing mechanism, for example, it can be-line mother / soil plate bearing mechanism. Please refer to FIG. 5, the dry sound diagram of the coating device 2 of the first display, the magical spoon # :: Example only W 扪 Do not think of the diagram, it includes a power unit 1 1, a drive only 1 2, a monitoring mechanism 丨3. A substrate supporting mechanism 24 and a coating source 15. In the Ming, the power unit U, the transmission mechanism 12 (including the first gear ΐ2ι and j two gears 122), the monitoring mechanism 13 and the coating source 15 are the same as the film shown in FIG. ; And the substrate bearing of the coating equipment 2 = 24: is a planetary substrate bearing mechanism, here, the substrate bearing mechanism 24 is composed of a mother gear 241, a plurality of sub-gears 242, a plurality of substrate holders 243, and a rotary connection The element 244 is composed of a plurality of bearing elements 245. One end of the rotary connecting element 244 is connected to the second gear 122, and each bearing element 2 4 5 is symmetrically disposed on the rotary connecting element 2 4 4 (as shown in FIG. (Shown), the two ends of the bearing element 245 are respectively connected to the sub-gear 242 and the base bearing seat 243, and the sub-gear 242 and the substrate bearing seat 243 are shaft-mounted on the bearing element 245, so that the sub-gear 242 and the substrate bearing seat are connected 243 can rotate synchronously. Here, the bearing element 2 4 5 series can be ball bearings, needle bearings, roller bearings or other types of bearings. In this embodiment, the mother gear 24 i series is fixed and does not follow the coating. Movement or rotation of device 2 Each of the sub-gears 242 is coupled to the mother gear 241. Therefore, when the rotation connecting element 244 ^ is driven by the second gear 122 to rotate, the sub-gears 2 42 are respectively revolved around the mother gear 241 and correspond to each other. The bearing element 245 rotates, which in turn drives each substrate carrier 2 4 3 to perform revolutions and rotations.

1223007 V. Description of the invention (8) According to the above description, when the coating device according to the preferred embodiment of the present invention is in operation, the substrate is first placed on the substrate carrying mechanism, and the test element is placed in the monitoring mechanism. The coating equipment is started and the rotating shaft passes through the torque protection element and the transmission mechanism to drive the substrate bearing mechanism. Finally, the substrate and the test element are coated by the coating source. The monitoring mechanism uses the test element to monitor the coating process, and when necessary, The mask can be rotated so that when the number of coating layers exceeds the allowable value of a single test element, different test elements are used in order to monitor the coating process. Less two test elements, due to the coating conditions of the coating layer allowed by the device according to the coating design of the present invention, and can be used for more than just because the coating equipment according to the present invention has so far not limited to a single test during the coating process The element number and the test element are located at a position similar to the substrate 'to improve the accuracy of the film thickness monitoring. Therefore, the equipment can effectively improve the production yield and reduce the cost. The multi-layer coating process allowed by the test device. The above description is only exemplary, rather than limiting the spirit and scope of the present invention, and the same is applied to it: without departing from, it should be included in the scope of the attached patent application. > Text or. Chu more, both

1223007 Schematic description (five), [Schematic description] Figure 1 is a schematic diagram showing a schematic diagram of a conventional coating equipment; Figure 2 is a schematic diagram showing another schematic diagram of a mineral coating equipment; Figure 3 is a A schematic view showing the intent of the coating device according to a preferred embodiment of the present invention. FIG. 4 is a schematic view showing a detailed view of area A in FIG. 3, which is a schematic view of the mask portion, and FIG. 5 is a schematic view. A schematic diagram of a coating apparatus according to another preferred embodiment of the present invention is shown, which has a planetary substrate carrying mechanism. Explanation of component symbols 1 Coating equipment 11 Momentum unit 111 Rotating shaft center 112 Rotational speed control element 113 Torque protection element 12 Transmission mechanism 121 The first gear wheel 122 The second gear wheel 1221 The first opening of the α 13 Monitoring and control mechanism 131 The test hole component 13 The 13 shielding cover

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Brief description of drawings on page 15 14 Substrate carrying mechanism 141 Second open V 15 Coating source 16 Substrate 2 Coating equipment 24 Substrate carrying mechanism 241 Mother gear 242 Sub gear 243 Substrate carrier 244 Rotary connection element 245 Bearing element 3 Coating equipment 31 Motor 32 Umbrella-type substrate carrying mechanism 321 Substrate bearing seat 33 Fixing mechanism 331 Fixing plate 332 Fixing frame 34 Coating source 35 Substrate 36 Test element 4 Coating equipment 41 Motor 42 Planetary substrate carrying mechanism 1223007

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Claims (1)

1223007 6. Scope of patent application 1. A coating equipment, including: a power unit having a rotating shaft center; a transmission mechanism including a first gear and a second gear, the first gear system shaft is provided at The rotation axis, the second gear train is meshed with the first gear, a center of the second gear has a first opening; a monitoring mechanism, which has at least two test elements, and the monitoring mechanism is provided in The first opening; a substrate bearing mechanism, which is connected to the second gear and has a second opening, the second opening is opposite to the first opening, and the monitoring mechanism is passed through the second opening; An opening; and a coating source, which is 0 opposite to the substrate bearing mechanism and the test elements 2. As described in item 1 of the scope of patent application, there is a mask portion, the mask test element and the coating source In the meanwhile, as in the first item of the scope of the patent application, the "rotary type" coating device for making the hole repeat "is used in the monitor, wherein the monitoring unit has a hole and is located in the measuring hole for exposure. Such tests The coating device described in the component, wherein the mask part is moved to expose the other coating devices described in item j of the patent application scope and the substrate bearing mechanism item, wherein the relative positions of the tests are Adjustable. Brother 17 Page 1223007 6. The scope of patent application 5. The coating equipment as described in item 1 of the scope of patent application, wherein the power unit has a speed control element. 6. The coating equipment according to item 1 of the scope of patent application, wherein the substrate supporting mechanism is a planetary substrate supporting mechanism. 7. The coating equipment according to item 1 of the scope of patent application, wherein the substrate supporting mechanism is an umbrella-type substrate supporting mechanism. 8. The coating equipment as described in item 1 of the scope of patent application, wherein the test elements are quartz test elements. 9. The coating equipment as described in item 1 of the patent application scope, wherein the test elements are glass substrates. 10. The coating device according to item 1 of the scope of patent application, wherein the power unit has a torque protection element. Page 18