TWI372461B - Parallel field effect transistor structure having a body contact - Google Patents
Parallel field effect transistor structure having a body contactInfo
- Publication number
- TWI372461B TWI372461B TW095112005A TW95112005A TWI372461B TW I372461 B TWI372461 B TW I372461B TW 095112005 A TW095112005 A TW 095112005A TW 95112005 A TW95112005 A TW 95112005A TW I372461 B TWI372461 B TW I372461B
- Authority
- TW
- Taiwan
- Prior art keywords
- fet
- field effect
- effect transistor
- body contact
- transistor structure
- Prior art date
Links
- 230000005669 field effect Effects 0.000 title abstract 2
- 239000004020 conductor Substances 0.000 abstract 3
- 230000003071 parasitic effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78612—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
- H01L29/78615—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect with a body contact
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Thin Film Transistor (AREA)
- Junction Field-Effect Transistors (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/907,796 US7084462B1 (en) | 2005-04-15 | 2005-04-15 | Parallel field effect transistor structure having a body contact |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200731531A TW200731531A (en) | 2007-08-16 |
TWI372461B true TWI372461B (en) | 2012-09-11 |
Family
ID=36710532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095112005A TWI372461B (en) | 2005-04-15 | 2006-04-04 | Parallel field effect transistor structure having a body contact |
Country Status (8)
Country | Link |
---|---|
US (1) | US7084462B1 (zh) |
EP (1) | EP1872402B1 (zh) |
JP (1) | JP4395192B2 (zh) |
CN (1) | CN100495704C (zh) |
AT (1) | ATE454714T1 (zh) |
DE (1) | DE602006011595D1 (zh) |
TW (1) | TWI372461B (zh) |
WO (1) | WO2006113395A2 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8035140B2 (en) | 2007-07-26 | 2011-10-11 | Infineon Technologies Ag | Method and layout of semiconductor device with reduced parasitics |
US8921190B2 (en) * | 2008-04-08 | 2014-12-30 | International Business Machines Corporation | Field effect transistor and method of manufacture |
US7893494B2 (en) * | 2008-06-18 | 2011-02-22 | International Business Machines Corporation | Method and structure for SOI body contact FET with reduced parasitic capacitance |
CN102148158B (zh) * | 2010-02-09 | 2013-03-27 | 中国科学院微电子研究所 | 一种体接触器件结构及其制造方法 |
CN103258813B (zh) * | 2013-04-24 | 2016-08-24 | 上海华虹宏力半导体制造有限公司 | 部分耗尽soi mosfet的测试结构及其形成方法 |
US8933746B1 (en) | 2013-07-10 | 2015-01-13 | Astronics Advanced Electronic Systems Corp. | Parallel FET solid state relay utilizing commutation FETs |
FR3038775A1 (fr) | 2015-07-09 | 2017-01-13 | St Microelectronics Sa | Prise de contact substrat pour un transistor mos dans un substrat soi, en particulier fdsoi |
US10096708B2 (en) | 2016-03-30 | 2018-10-09 | Stmicroelectronics Sa | Enhanced substrate contact for MOS transistor in an SOI substrate, in particular an FDSOI substrate |
FR3053834B1 (fr) | 2016-07-05 | 2020-06-12 | Stmicroelectronics Sa | Structure de transistor |
US10424664B2 (en) * | 2016-12-14 | 2019-09-24 | Globalfoundries Inc. | Poly gate extension source to body contact |
CN112349784B (zh) * | 2020-11-05 | 2022-07-29 | 武汉新芯集成电路制造有限公司 | 半导体器件及其制造方法 |
CN113327983B (zh) * | 2021-05-26 | 2023-05-05 | 武汉新芯集成电路制造有限公司 | 半导体器件及其制造方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5185280A (en) | 1991-01-29 | 1993-02-09 | Texas Instruments Incorporated | Method of fabricating a soi transistor with pocket implant and body-to-source (bts) contact |
USH1435H (en) | 1991-10-21 | 1995-05-02 | Cherne Richard D | SOI CMOS device having body extension for providing sidewall channel stop and bodytie |
US5298773A (en) | 1992-08-17 | 1994-03-29 | United Technologies Corporation | Silicon-on-insulator H-transistor layout for gate arrays |
US5317181A (en) | 1992-09-10 | 1994-05-31 | United Technologies Corporation | Alternative body contact for fully-depleted silicon-on-insulator transistors |
US5635745A (en) * | 1994-09-08 | 1997-06-03 | National Semiconductor Corporation | Analog multiplexer cell for mixed digital and analog signal inputs |
EP0739097B1 (en) | 1995-04-21 | 2004-04-07 | Nippon Telegraph And Telephone Corporation | MOSFET circuit and CMOS logic circuit using the same |
US5821575A (en) * | 1996-05-20 | 1998-10-13 | Digital Equipment Corporation | Compact self-aligned body contact silicon-on-insulator transistor |
JP3638377B2 (ja) | 1996-06-07 | 2005-04-13 | 株式会社ルネサステクノロジ | 半導体装置 |
US5811855A (en) | 1997-12-29 | 1998-09-22 | United Technologies Corporation | SOI combination body tie |
TW432545B (en) | 1998-08-07 | 2001-05-01 | Ibm | Method and improved SOI body contact structure for transistors |
US6387739B1 (en) | 1998-08-07 | 2002-05-14 | International Business Machines Corporation | Method and improved SOI body contact structure for transistors |
US6323522B1 (en) | 1999-01-08 | 2001-11-27 | International Business Machines Corporation | Silicon on insulator thick oxide structure and process of manufacture |
US6154091A (en) | 1999-06-02 | 2000-11-28 | International Business Machines Corporation | SOI sense amplifier with body contact structure |
US6399989B1 (en) | 1999-08-03 | 2002-06-04 | Bae Systems Information And Electronic Systems Integration Inc. | Radiation hardened silicon-on-insulator (SOI) transistor having a body contact |
US6307237B1 (en) | 1999-12-28 | 2001-10-23 | Honeywell International Inc. | L-and U-gate devices for SOI/SOS applications |
US6255694B1 (en) | 2000-01-18 | 2001-07-03 | International Business Machines Corporation | Multi-function semiconductor structure and method |
US6433587B1 (en) | 2000-03-17 | 2002-08-13 | International Business Machines Corporation | SOI CMOS dynamic circuits having threshold voltage control |
JP4614522B2 (ja) | 2000-10-25 | 2011-01-19 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
JP5001494B2 (ja) | 2001-08-28 | 2012-08-15 | セイコーインスツル株式会社 | 絶縁性基板上に形成された電界効果トランジスタ |
US6905919B2 (en) | 2003-07-29 | 2005-06-14 | Chartered Semiconductor Manufacturing Ltd. | Method of forming a partially depleted silicon on insulator (PDSOI) transistor with a pad lock body extension |
-
2005
- 2005-04-15 US US10/907,796 patent/US7084462B1/en not_active Expired - Fee Related
-
2006
- 2006-04-04 TW TW095112005A patent/TWI372461B/zh active
- 2006-04-13 DE DE602006011595T patent/DE602006011595D1/de active Active
- 2006-04-13 CN CNB2006800085198A patent/CN100495704C/zh not_active Expired - Fee Related
- 2006-04-13 EP EP06758334A patent/EP1872402B1/en not_active Not-in-force
- 2006-04-13 AT AT06758334T patent/ATE454714T1/de not_active IP Right Cessation
- 2006-04-13 WO PCT/US2006/013987 patent/WO2006113395A2/en active Application Filing
- 2006-04-13 JP JP2008506717A patent/JP4395192B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7084462B1 (en) | 2006-08-01 |
WO2006113395A2 (en) | 2006-10-26 |
EP1872402A4 (en) | 2008-06-11 |
CN101142679A (zh) | 2008-03-12 |
DE602006011595D1 (de) | 2010-02-25 |
TW200731531A (en) | 2007-08-16 |
WO2006113395A3 (en) | 2007-03-08 |
EP1872402A2 (en) | 2008-01-02 |
CN100495704C (zh) | 2009-06-03 |
JP2008537339A (ja) | 2008-09-11 |
EP1872402B1 (en) | 2010-01-06 |
ATE454714T1 (de) | 2010-01-15 |
JP4395192B2 (ja) | 2010-01-06 |
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