TWI372312B - Method for forming anti-reflective coating - Google Patents

Method for forming anti-reflective coating

Info

Publication number
TWI372312B
TWI372312B TW094137061A TW94137061A TWI372312B TW I372312 B TWI372312 B TW I372312B TW 094137061 A TW094137061 A TW 094137061A TW 94137061 A TW94137061 A TW 94137061A TW I372312 B TWI372312 B TW I372312B
Authority
TW
Taiwan
Prior art keywords
reflective coating
forming anti
forming
reflective
coating
Prior art date
Application number
TW094137061A
Other languages
English (en)
Chinese (zh)
Other versions
TW200622499A (en
Inventor
Peng-Fei Fu
Eric Scott Moyer
Craig Rollin Yeakle
Original Assignee
Dow Corning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning filed Critical Dow Corning
Publication of TW200622499A publication Critical patent/TW200622499A/zh
Application granted granted Critical
Publication of TWI372312B publication Critical patent/TWI372312B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/04—Polysiloxanes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Silicon Polymers (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Paints Or Removers (AREA)
TW094137061A 2004-12-17 2005-10-21 Method for forming anti-reflective coating TWI372312B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63695804P 2004-12-17 2004-12-17

Publications (2)

Publication Number Publication Date
TW200622499A TW200622499A (en) 2006-07-01
TWI372312B true TWI372312B (en) 2012-09-11

Family

ID=35759377

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094137061A TWI372312B (en) 2004-12-17 2005-10-21 Method for forming anti-reflective coating

Country Status (7)

Country Link
US (1) US8025927B2 (enExample)
EP (1) EP1825330B1 (enExample)
JP (1) JP4995096B2 (enExample)
KR (1) KR101253487B1 (enExample)
CN (1) CN101073038B (enExample)
TW (1) TWI372312B (enExample)
WO (1) WO2006065316A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7756384B2 (en) * 2004-11-08 2010-07-13 Dow Corning Corporation Method for forming anti-reflective coating
JP4688882B2 (ja) 2004-12-17 2011-05-25 ダウ・コーニング・コーポレイション 反射防止膜の形成方法、レジスト画像の形成方法、パターンの形成方法及び電子デバイスの製造方法
KR101191098B1 (ko) 2004-12-17 2012-10-15 다우 코닝 코포레이션 실록산 수지 피복물
KR101324052B1 (ko) 2006-02-13 2013-11-01 다우 코닝 코포레이션 반사방지 코팅 재료
US8026035B2 (en) 2007-03-30 2011-09-27 Cheil Industries, Inc. Etch-resistant disilane and saturated hydrocarbon bridged silicon-containing polymers, method of making the same, and method of using the same
CN101910255B (zh) 2008-01-08 2013-07-10 道康宁东丽株式会社 倍半硅氧烷树脂
US9023433B2 (en) * 2008-01-15 2015-05-05 Dow Corning Corporation Silsesquioxane resins and method of using them to form an antireflective coating
JP5581225B2 (ja) * 2008-03-04 2014-08-27 ダウ・コーニング・コーポレイション シルセスキオキサン樹脂
CN101970540B (zh) * 2008-03-05 2014-07-23 陶氏康宁公司 倍半硅氧烷树脂
WO2010068336A1 (en) * 2008-12-10 2010-06-17 Dow Corning Corporation Silsesquioxane resins
US20110236835A1 (en) * 2008-12-10 2011-09-29 Peng-Fei Fu Silsesquioxane Resins
US8999625B2 (en) 2013-02-14 2015-04-07 International Business Machines Corporation Silicon-containing antireflective coatings including non-polymeric silsesquioxanes
CN103305036B (zh) * 2013-06-18 2016-09-14 武汉绿凯科技有限公司 一种含poss减反射膜镀膜液及其制备方法与应用
US9598586B2 (en) 2014-07-14 2017-03-21 Enki Technology, Inc. Coating materials and methods for enhanced reliability
US9399720B2 (en) 2014-07-14 2016-07-26 Enki Technology, Inc. High gain durable anti-reflective coating
WO2016064494A2 (en) * 2014-09-17 2016-04-28 Enki Technology, Inc. Multi-layer coatings
WO2017142648A1 (en) * 2016-02-19 2017-08-24 Dow Corning Corporation Aged polymeric silsesquioxanes
TWI742160B (zh) 2016-09-30 2021-10-11 美商道康寧公司 橋接聚矽氧樹脂、膜、電子裝置及相關方法
TWI747956B (zh) 2016-09-30 2021-12-01 美商道康寧公司 橋接聚矽氧樹脂、膜、電子裝置及相關方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4056492A (en) * 1976-06-24 1977-11-01 General Electric Company Process for the production of a bodied silicone resin without the use of a catalyst
US5320923A (en) * 1993-01-28 1994-06-14 Hewlett-Packard Company Reusable, positive-charging organic photoconductor containing phthalocyanine pigment, hydroxy binder and silicon stabilizer
DE4414653A1 (de) * 1993-05-13 1994-11-17 Gen Electric Schneller klebende Silicon-Klebstoffzusammensetzungen
JP3542185B2 (ja) * 1995-02-02 2004-07-14 ダウ コーニング アジア株式会社 シリコーンレジン、これを含む組成物およびその硬化方法
KR100479984B1 (ko) * 1995-08-15 2005-07-25 다우 코닝 아시아 리미티드 경화성폴리메틸실세스키옥산,그경화방법및그경화물
US5861472A (en) * 1996-07-05 1999-01-19 Dow Corning Corporation Method of making silicone pressure sensitive adhesives
US6177143B1 (en) * 1999-01-06 2001-01-23 Allied Signal Inc Electron beam treatment of siloxane resins
US6824879B2 (en) * 1999-06-10 2004-11-30 Honeywell International Inc. Spin-on-glass anti-reflective coatings for photolithography
US6890448B2 (en) * 1999-06-11 2005-05-10 Shipley Company, L.L.C. Antireflective hard mask compositions
US6420088B1 (en) * 2000-06-23 2002-07-16 International Business Machines Corporation Antireflective silicon-containing compositions as hardmask layer
US20030176614A1 (en) * 2000-06-30 2003-09-18 Nigel Hacker Organohydridosiloxane resins with high organic content
US20030096090A1 (en) * 2001-10-22 2003-05-22 Boisvert Ronald Paul Etch-stop resins
US6842577B2 (en) * 2002-12-02 2005-01-11 Shipley Company L.L.C. Photoimageable waveguide composition and waveguide formed therefrom
KR101191098B1 (ko) 2004-12-17 2012-10-15 다우 코닝 코포레이션 실록산 수지 피복물
JP4688882B2 (ja) 2004-12-17 2011-05-25 ダウ・コーニング・コーポレイション 反射防止膜の形成方法、レジスト画像の形成方法、パターンの形成方法及び電子デバイスの製造方法
CN101073039B (zh) 2004-12-17 2011-12-14 陶氏康宁公司 形成抗反射涂层的方法

Also Published As

Publication number Publication date
KR20070088703A (ko) 2007-08-29
JP2008524650A (ja) 2008-07-10
US8025927B2 (en) 2011-09-27
US20080014335A1 (en) 2008-01-17
WO2006065316A1 (en) 2006-06-22
KR101253487B1 (ko) 2013-04-11
TW200622499A (en) 2006-07-01
JP4995096B2 (ja) 2012-08-08
EP1825330A1 (en) 2007-08-29
EP1825330B1 (en) 2019-04-24
CN101073038B (zh) 2010-05-05
CN101073038A (zh) 2007-11-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees