TWI372271B - Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor device - Google Patents
Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor deviceInfo
- Publication number
- TWI372271B TWI372271B TW095131738A TW95131738A TWI372271B TW I372271 B TWI372271 B TW I372271B TW 095131738 A TW095131738 A TW 095131738A TW 95131738 A TW95131738 A TW 95131738A TW I372271 B TWI372271 B TW I372271B
- Authority
- TW
- Taiwan
- Prior art keywords
- optical element
- manufacturing
- optical
- holder
- element holder
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US71661905P | 2005-09-13 | 2005-09-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200717058A TW200717058A (en) | 2007-05-01 |
TWI372271B true TWI372271B (en) | 2012-09-11 |
Family
ID=37307279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095131738A TWI372271B (en) | 2005-09-13 | 2006-08-29 | Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor device |
Country Status (4)
Country | Link |
---|---|
US (1) | US7729065B2 (zh) |
JP (2) | JP2009508344A (zh) |
TW (1) | TWI372271B (zh) |
WO (1) | WO2007031412A1 (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005049731A1 (de) * | 2005-10-14 | 2007-04-19 | Cube Optics Ag | Optischer Aufbau mit elastischer Aufhängung und Verfahren zur Herstellung eines solchen |
EP2444829A1 (en) * | 2006-09-14 | 2012-04-25 | Carl Zeiss SMT GmbH | Optical element unit and method of supporting an optical element |
DE102007047109A1 (de) * | 2007-10-01 | 2009-04-09 | Carl Zeiss Smt Ag | Optisches System, insbesondere Projektionsobjektiv der Mikrolithographie |
DE102007047186B4 (de) * | 2007-10-02 | 2014-01-09 | Carl Zeiss Sms Gmbh | Aufnahmevorrichtung zur Aufnahme einer Photolithographiemaske |
US20090219497A1 (en) * | 2008-02-28 | 2009-09-03 | Carl Zeiss Smt Ag | Optical device with stiff housing |
NL1036701A1 (nl) * | 2008-04-15 | 2009-10-19 | Asml Holding Nv | Apparatus for supporting an optical element, and method of making same. |
JP5317624B2 (ja) * | 2008-10-17 | 2013-10-16 | キヤノン株式会社 | 保持装置、望遠鏡および光学装置 |
DE102009005954B4 (de) * | 2009-01-20 | 2010-10-21 | Carl Zeiss Smt Ag | Dämpfungsvorrichtung |
JP5458246B2 (ja) * | 2009-06-11 | 2014-04-02 | 富士フイルム株式会社 | 光学部品保持部材およびその作製方法 |
JP5271820B2 (ja) * | 2009-06-11 | 2013-08-21 | 富士フイルム株式会社 | 光学部品保持部材およびその作製方法 |
DE102009045163B4 (de) * | 2009-09-30 | 2017-04-06 | Carl Zeiss Smt Gmbh | Optische Anordnung in einer mikrolithographischen Projektionsbelichtungsanlage |
DE102011087331A1 (de) * | 2011-11-29 | 2013-01-10 | Carl Zeiss Smt Gmbh | Temperaturempfindliches optisches Element aus SiSiC-Verbund und Halterung hierfür sowie Verfahren zu seiner Herstellung |
DE102012202170A1 (de) * | 2012-02-14 | 2013-06-13 | Carl Zeiss Smt Gmbh | Positionsmanipulator für ein optisches Bauelement |
DE102012218769B4 (de) | 2012-10-15 | 2018-09-06 | Trumpf Laser Gmbh | Optikanordnung |
DE102013109185B3 (de) * | 2013-08-23 | 2014-05-22 | Jenoptik Optical Systems Gmbh | Optische Baugruppe mit einer Fassung mit Verbindungseinheiten gerichteter Nachgiebigkeit |
US11204559B2 (en) | 2018-05-16 | 2021-12-21 | Asml Holdings N.V. | High stability collimator assembly, lithographic apparatus, and method |
DE102019112224A1 (de) * | 2019-05-10 | 2020-11-12 | Carl Zeiss Smt Gmbh | Abstützung eines optischen Elements |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4953176A (en) * | 1989-03-07 | 1990-08-28 | Spectra-Physics | Angular optical cavity alignment adjustment utilizing variable distribution cooling |
NL9100421A (nl) * | 1991-03-08 | 1992-10-01 | Asm Lithography Bv | Ondersteuningsinrichting met een kantelbare objecttafel alsmede optisch lithografische inrichting voorzien van een dergelijke ondersteuningsinrichting. |
KR0151453B1 (ko) * | 1994-04-30 | 1998-12-15 | 배순훈 | 광로조절장치 및 그 제조방법 |
US5537502A (en) * | 1995-02-10 | 1996-07-16 | Opto Power Corporation | Laser package with permanently aligned critical components |
JP3224718B2 (ja) * | 1995-08-15 | 2001-11-05 | レーザーテック株式会社 | 干渉計 |
JPH1114876A (ja) * | 1997-06-19 | 1999-01-22 | Nikon Corp | 光学構造体、その光学構造体を組み込んだ投影露光用光学系及び投影露光装置 |
JP3574560B2 (ja) * | 1998-01-30 | 2004-10-06 | 京セラ株式会社 | 半導体露光装置用支持部材および半導体露光装置 |
DE19825716A1 (de) * | 1998-06-09 | 1999-12-16 | Zeiss Carl Fa | Baugruppe aus optischem Element und Fassung |
DE19933248A1 (de) * | 1999-07-15 | 2001-02-15 | Zeiss Carl Fa | Athermalisiertes Teleskop |
US6239924B1 (en) * | 1999-08-31 | 2001-05-29 | Nikon Corporation | Kinematic lens mounting with distributed support and radial flexure |
JP2001124968A (ja) * | 1999-10-25 | 2001-05-11 | Canon Inc | 光学素子保持方法および光学素子保持機構、ならびに該光学素子保持機構により保持された光学素子群を利用する露光装置 |
JP4809987B2 (ja) * | 2000-03-30 | 2011-11-09 | キヤノン株式会社 | 光学要素の支持構造、それを用いた露光装置及び半導体デバイスの製造方法 |
JP4945845B2 (ja) * | 2000-03-31 | 2012-06-06 | 株式会社ニコン | 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。 |
JP2002173719A (ja) * | 2000-12-01 | 2002-06-21 | Taiheiyo Cement Corp | 光学系支持部材 |
DE10115914A1 (de) * | 2001-03-30 | 2002-10-02 | Zeiss Carl | Vorrichtung zur Lagerung eines optischen Elementes in einer Optik |
DE10140608A1 (de) * | 2001-08-18 | 2003-03-06 | Zeiss Carl | Vorrichtung zur Justage eines optischen Elements |
EP1310829B1 (en) * | 2001-11-07 | 2007-05-02 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2003348462A (ja) * | 2002-05-27 | 2003-12-05 | Olympus Optical Co Ltd | カメラ及び撮像素子ユニット |
JP2004064554A (ja) * | 2002-07-30 | 2004-02-26 | Olympus Corp | カメラ及びこれに用いる撮像素子ユニット |
US7019434B2 (en) * | 2002-11-08 | 2006-03-28 | Iris Ao, Inc. | Deformable mirror method and apparatus including bimorph flexures and integrated drive |
JP2004184882A (ja) * | 2002-12-06 | 2004-07-02 | Taiheiyo Cement Corp | 光学用部材 |
JP3805323B2 (ja) * | 2003-05-21 | 2006-08-02 | キヤノン株式会社 | 露光装置、収差低減方法及び光学部材調整機構 |
KR101209540B1 (ko) * | 2003-07-09 | 2012-12-07 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
JP4237755B2 (ja) * | 2003-10-02 | 2009-03-11 | カール・ツァイス・エスエムティー・アーゲー | 半導体リソグラフィにおける光学的半組立品及び投射対物レンズ |
-
2006
- 2006-08-29 TW TW095131738A patent/TWI372271B/zh not_active IP Right Cessation
- 2006-08-31 WO PCT/EP2006/065891 patent/WO2007031412A1/en active Application Filing
- 2006-08-31 JP JP2008530467A patent/JP2009508344A/ja active Pending
-
2008
- 2008-03-12 US US12/046,605 patent/US7729065B2/en not_active Expired - Fee Related
-
2013
- 2013-02-15 JP JP2013028112A patent/JP2013145892A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
TW200717058A (en) | 2007-05-01 |
US7729065B2 (en) | 2010-06-01 |
US20080218721A1 (en) | 2008-09-11 |
JP2009508344A (ja) | 2009-02-26 |
JP2013145892A (ja) | 2013-07-25 |
WO2007031412A1 (en) | 2007-03-22 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |