TWI359454B - - Google Patents

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Publication number
TWI359454B
TWI359454B TW96113277A TW96113277A TWI359454B TW I359454 B TWI359454 B TW I359454B TW 96113277 A TW96113277 A TW 96113277A TW 96113277 A TW96113277 A TW 96113277A TW I359454 B TWI359454 B TW I359454B
Authority
TW
Taiwan
Prior art keywords
layer
nitride
dielectric layer
semiconductor
nitride layer
Prior art date
Application number
TW96113277A
Other languages
English (en)
Chinese (zh)
Other versions
TW200842967A (en
Inventor
Wei I Lee
Hsin Hsiung Huang
Hung Yu Zeng
Original Assignee
Univ Nat Chiao Tung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Chiao Tung filed Critical Univ Nat Chiao Tung
Priority to TW96113277A priority Critical patent/TW200842967A/zh
Publication of TW200842967A publication Critical patent/TW200842967A/zh
Application granted granted Critical
Publication of TWI359454B publication Critical patent/TWI359454B/zh

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  • Weting (AREA)
TW96113277A 2007-04-16 2007-04-16 Method of etching nitride semiconductor TW200842967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96113277A TW200842967A (en) 2007-04-16 2007-04-16 Method of etching nitride semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96113277A TW200842967A (en) 2007-04-16 2007-04-16 Method of etching nitride semiconductor

Publications (2)

Publication Number Publication Date
TW200842967A TW200842967A (en) 2008-11-01
TWI359454B true TWI359454B (https=) 2012-03-01

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ID=44822169

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96113277A TW200842967A (en) 2007-04-16 2007-04-16 Method of etching nitride semiconductor

Country Status (1)

Country Link
TW (1) TW200842967A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201237963A (en) 2011-03-08 2012-09-16 Univ Nat Chiao Tung Method of semiconductor manufacturing process

Also Published As

Publication number Publication date
TW200842967A (en) 2008-11-01

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MM4A Annulment or lapse of patent due to non-payment of fees