TWI352189B - - Google Patents

Download PDF

Info

Publication number
TWI352189B
TWI352189B TW96148227A TW96148227A TWI352189B TW I352189 B TWI352189 B TW I352189B TW 96148227 A TW96148227 A TW 96148227A TW 96148227 A TW96148227 A TW 96148227A TW I352189 B TWI352189 B TW I352189B
Authority
TW
Taiwan
Prior art keywords
scanning
photodetector
signal
light
signal processing
Prior art date
Application number
TW96148227A
Other languages
English (en)
Chinese (zh)
Other versions
TW200928287A (en
Original Assignee
Univ Nat Formosa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Formosa filed Critical Univ Nat Formosa
Priority to TW96148227A priority Critical patent/TW200928287A/zh
Publication of TW200928287A publication Critical patent/TW200928287A/zh
Application granted granted Critical
Publication of TWI352189B publication Critical patent/TWI352189B/zh

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
TW96148227A 2007-12-17 2007-12-17 Scanning triangulation system and method thereof TW200928287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96148227A TW200928287A (en) 2007-12-17 2007-12-17 Scanning triangulation system and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96148227A TW200928287A (en) 2007-12-17 2007-12-17 Scanning triangulation system and method thereof

Publications (2)

Publication Number Publication Date
TW200928287A TW200928287A (en) 2009-07-01
TWI352189B true TWI352189B (ja) 2011-11-11

Family

ID=44863976

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96148227A TW200928287A (en) 2007-12-17 2007-12-17 Scanning triangulation system and method thereof

Country Status (1)

Country Link
TW (1) TW200928287A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI614513B (zh) * 2016-12-22 2018-02-11 量測移動平台之多自由度誤差之方法及裝置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI614513B (zh) * 2016-12-22 2018-02-11 量測移動平台之多自由度誤差之方法及裝置

Also Published As

Publication number Publication date
TW200928287A (en) 2009-07-01

Similar Documents

Publication Publication Date Title
TW201839354A (zh) 光學式轉軸多自由度誤差檢測裝置與方法(二)
CN101363725B (zh) 表面粗糙度检测装置
CN103542813B (zh) 一种基于边界微分和环境光自校准的激光测径仪
CN101576376A (zh) 激光检测料面形状的方法和系统
TW201531693A (zh) 用於光學檢測之非成像相干線掃描系統和方法
CN112485805A (zh) 一种激光三角位移传感器及其测量方法
CN109655015B (zh) 一种非接触式样品加工表面倾角及厚度微小变化测量方法
Tong et al. A novel laser-based system for measuring internal thread parameters
JP4215220B2 (ja) 表面検査方法及び表面検査装置
TWI352189B (ja)
TWI472712B (zh) Vertical and parallelism detection system and its detection method
CN201322610Y (zh) 表面粗糙度检测装置
Tong et al. The research of screw thread parameter measurement based on position sensitive detector and laser
JP2008175604A (ja) 光変位センサー及びそれを用いた変位測定装置
JP2012002548A (ja) 光波干渉測定装置
TWI287614B (en) System and method is used with theory of optical aberration for measuring free camber
CN108362210A (zh) 具有直线结构的单透镜激光位移测头
CN201034613Y (zh) 激光垂准仪的检定装置
Liu et al. Development of a nanometer resolution flatness measurement system for the ceramic surface by using Blue-ray optical pickup
JP2021139689A (ja) 情報処理装置、及び情報処理プログラム
TWI247095B (en) Optical revolving spindle error measurement device
JP2001165629A (ja) 形状測定装置及び形状測定方法
TWI270659B (en) Optical device using a reflection principle to measure levelness
JP7428492B2 (ja) 検査方法および補正方法
Hattuniemi et al. A calibration method of triangulation sensors for thickness measurement

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees