TWI352189B - - Google Patents
Download PDFInfo
- Publication number
- TWI352189B TWI352189B TW96148227A TW96148227A TWI352189B TW I352189 B TWI352189 B TW I352189B TW 96148227 A TW96148227 A TW 96148227A TW 96148227 A TW96148227 A TW 96148227A TW I352189 B TWI352189 B TW I352189B
- Authority
- TW
- Taiwan
- Prior art keywords
- scanning
- photodetector
- signal
- light
- signal processing
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW96148227A TW200928287A (en) | 2007-12-17 | 2007-12-17 | Scanning triangulation system and method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW96148227A TW200928287A (en) | 2007-12-17 | 2007-12-17 | Scanning triangulation system and method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200928287A TW200928287A (en) | 2009-07-01 |
TWI352189B true TWI352189B (ja) | 2011-11-11 |
Family
ID=44863976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW96148227A TW200928287A (en) | 2007-12-17 | 2007-12-17 | Scanning triangulation system and method thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200928287A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI614513B (zh) * | 2016-12-22 | 2018-02-11 | 量測移動平台之多自由度誤差之方法及裝置 |
-
2007
- 2007-12-17 TW TW96148227A patent/TW200928287A/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI614513B (zh) * | 2016-12-22 | 2018-02-11 | 量測移動平台之多自由度誤差之方法及裝置 |
Also Published As
Publication number | Publication date |
---|---|
TW200928287A (en) | 2009-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW201839354A (zh) | 光學式轉軸多自由度誤差檢測裝置與方法(二) | |
CN101363725B (zh) | 表面粗糙度检测装置 | |
CN103542813B (zh) | 一种基于边界微分和环境光自校准的激光测径仪 | |
CN101576376A (zh) | 激光检测料面形状的方法和系统 | |
TW201531693A (zh) | 用於光學檢測之非成像相干線掃描系統和方法 | |
CN112485805A (zh) | 一种激光三角位移传感器及其测量方法 | |
CN109655015B (zh) | 一种非接触式样品加工表面倾角及厚度微小变化测量方法 | |
Tong et al. | A novel laser-based system for measuring internal thread parameters | |
JP4215220B2 (ja) | 表面検査方法及び表面検査装置 | |
TWI352189B (ja) | ||
TWI472712B (zh) | Vertical and parallelism detection system and its detection method | |
CN201322610Y (zh) | 表面粗糙度检测装置 | |
Tong et al. | The research of screw thread parameter measurement based on position sensitive detector and laser | |
JP2008175604A (ja) | 光変位センサー及びそれを用いた変位測定装置 | |
JP2012002548A (ja) | 光波干渉測定装置 | |
TWI287614B (en) | System and method is used with theory of optical aberration for measuring free camber | |
CN108362210A (zh) | 具有直线结构的单透镜激光位移测头 | |
CN201034613Y (zh) | 激光垂准仪的检定装置 | |
Liu et al. | Development of a nanometer resolution flatness measurement system for the ceramic surface by using Blue-ray optical pickup | |
JP2021139689A (ja) | 情報処理装置、及び情報処理プログラム | |
TWI247095B (en) | Optical revolving spindle error measurement device | |
JP2001165629A (ja) | 形状測定装置及び形状測定方法 | |
TWI270659B (en) | Optical device using a reflection principle to measure levelness | |
JP7428492B2 (ja) | 検査方法および補正方法 | |
Hattuniemi et al. | A calibration method of triangulation sensors for thickness measurement |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |