TWI351070B - Method for marking wafer, method for marking failed die, method for aligning wafer and wafer test equipment - Google Patents

Method for marking wafer, method for marking failed die, method for aligning wafer and wafer test equipment

Info

Publication number
TWI351070B
TWI351070B TW096128053A TW96128053A TWI351070B TW I351070 B TWI351070 B TW I351070B TW 096128053 A TW096128053 A TW 096128053A TW 96128053 A TW96128053 A TW 96128053A TW I351070 B TWI351070 B TW I351070B
Authority
TW
Taiwan
Prior art keywords
wafer
marking
test equipment
aligning
failed die
Prior art date
Application number
TW096128053A
Other languages
English (en)
Other versions
TW200905774A (en
Inventor
Kuang Wen Cheng
Original Assignee
King Yuan Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by King Yuan Electronics Co Ltd filed Critical King Yuan Electronics Co Ltd
Priority to TW096128053A priority Critical patent/TWI351070B/zh
Priority to JP2007225823A priority patent/JP2009038329A/ja
Priority to KR1020070092557A priority patent/KR100915418B1/ko
Publication of TW200905774A publication Critical patent/TW200905774A/zh
Application granted granted Critical
Publication of TWI351070B publication Critical patent/TWI351070B/zh

Links

TW096128053A 2007-07-31 2007-07-31 Method for marking wafer, method for marking failed die, method for aligning wafer and wafer test equipment TWI351070B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW096128053A TWI351070B (en) 2007-07-31 2007-07-31 Method for marking wafer, method for marking failed die, method for aligning wafer and wafer test equipment
JP2007225823A JP2009038329A (ja) 2007-07-31 2007-08-31 ウエハーのマーキング方法、次品ダイスのマーキング方法、ウエハーの位置決め方法及びウエハー検査機
KR1020070092557A KR100915418B1 (ko) 2007-07-31 2007-09-12 웨이퍼 마킹 방법, 불량 다이의 마킹 방법, 웨이퍼 정렬방법 및 웨이퍼 검사 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096128053A TWI351070B (en) 2007-07-31 2007-07-31 Method for marking wafer, method for marking failed die, method for aligning wafer and wafer test equipment

Publications (2)

Publication Number Publication Date
TW200905774A TW200905774A (en) 2009-02-01
TWI351070B true TWI351070B (en) 2011-10-21

Family

ID=40439953

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096128053A TWI351070B (en) 2007-07-31 2007-07-31 Method for marking wafer, method for marking failed die, method for aligning wafer and wafer test equipment

Country Status (3)

Country Link
JP (1) JP2009038329A (zh)
KR (1) KR100915418B1 (zh)
TW (1) TWI351070B (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5415780B2 (ja) 2009-02-20 2014-02-12 健一 原川 電力供給システム、及びそのための可動体と固定体
TWI421962B (zh) * 2009-12-09 2014-01-01 Mpi Corp Light emitting diode wafer sorting method
JP5534038B2 (ja) * 2011-01-06 2014-06-25 日立金属株式会社 炭化珪素単結晶基板への識別マークの形成方法、及び炭化珪素単結晶基板
TWI498993B (zh) * 2011-11-09 2015-09-01 I Hsing Tsai 首顆晶粒之自動定位方法
TWI494560B (zh) * 2013-11-12 2015-08-01 Mpi Corp 晶粒選擇方法及壞晶地圖產生方法
KR101563165B1 (ko) * 2014-06-26 2015-10-26 주식회사 이오테크닉스 웨이퍼 다이들의 마킹방법
CN109103134B (zh) * 2018-09-01 2021-07-30 余晓飞 芯片的标签流水化制备设备
CN109545678B (zh) * 2018-11-12 2021-04-02 紫光宏茂微电子(上海)有限公司 晶圆切割工艺
KR102216351B1 (ko) * 2020-08-21 2021-02-17 (주)네온테크 반도체 칩 세정 장치 및 이를 사용한 반도체 칩의 제조 방법
CN113380651A (zh) * 2020-11-12 2021-09-10 吉林瑞能半导体有限公司 半导体晶圆电子坐标图与墨点的识别方法
WO2023157223A1 (ja) * 2022-02-18 2023-08-24 三菱電機株式会社 半導体チップのマーキング方法、半導体チップの製造方法および半導体チップ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613962B2 (ja) * 1985-08-14 1994-02-23 日立電子株式会社 Ｉｃウエハの自動位置決め装置
JPH067561B2 (ja) * 1986-11-27 1994-01-26 東京エレクトロン株式会社 半導体ウエハチツプの位置合わせ方法
JPH0715921B2 (ja) * 1987-03-25 1995-02-22 山形日本電気株式会社 多チツプ同時測定用マ−キング装置
JPH05144891A (ja) * 1991-11-20 1993-06-11 Nec Kyushu Ltd 半導体装置用マツピングデータ・マーキングユニツト
JPH11274272A (ja) * 1998-03-23 1999-10-08 Nkk Corp 認識用マーク付きウェハ
JP2000124271A (ja) * 1998-10-15 2000-04-28 Sony Corp 欠陥検査装置
JP4180325B2 (ja) * 2002-08-15 2008-11-12 日立建機株式会社 レーザーマーキング装置およびレーザーマーキング方法
JP4581800B2 (ja) * 2005-04-04 2010-11-17 株式会社デンソー マーク認識システム

Also Published As

Publication number Publication date
KR20090012977A (ko) 2009-02-04
JP2009038329A (ja) 2009-02-19
KR100915418B1 (ko) 2009-09-03
TW200905774A (en) 2009-02-01

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MM4A Annulment or lapse of patent due to non-payment of fees