TWI346638B - A purging valve and a wafer container having the purging valve - Google Patents

A purging valve and a wafer container having the purging valve

Info

Publication number
TWI346638B
TWI346638B TW097150796A TW97150796A TWI346638B TW I346638 B TWI346638 B TW I346638B TW 097150796 A TW097150796 A TW 097150796A TW 97150796 A TW97150796 A TW 97150796A TW I346638 B TWI346638 B TW I346638B
Authority
TW
Taiwan
Prior art keywords
purging valve
wafer container
purging
valve
wafer
Prior art date
Application number
TW097150796A
Other languages
English (en)
Other versions
TW201024184A (en
Inventor
Chin Ming Lin
Pao Yi Lu
Original Assignee
Gudeng Prec Industral Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gudeng Prec Industral Co Ltd filed Critical Gudeng Prec Industral Co Ltd
Priority to TW097150796A priority Critical patent/TWI346638B/zh
Priority to US12/431,071 priority patent/US7950524B2/en
Publication of TW201024184A publication Critical patent/TW201024184A/zh
Application granted granted Critical
Publication of TWI346638B publication Critical patent/TWI346638B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/14—Check valves with flexible valve members
    • F16K15/144—Check valves with flexible valve members the closure elements being fixed along all or a part of their periphery
    • F16K15/147—Check valves with flexible valve members the closure elements being fixed along all or a part of their periphery the closure elements having specially formed slits or being of an elongated easily collapsible form
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7879—Resilient material valve
    • Y10T137/788—Having expansible port
    • Y10T137/7882—Having exit lip
TW097150796A 2008-12-26 2008-12-26 A purging valve and a wafer container having the purging valve TWI346638B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW097150796A TWI346638B (en) 2008-12-26 2008-12-26 A purging valve and a wafer container having the purging valve
US12/431,071 US7950524B2 (en) 2008-12-26 2009-04-28 Wafer container having the purging valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097150796A TWI346638B (en) 2008-12-26 2008-12-26 A purging valve and a wafer container having the purging valve

Publications (2)

Publication Number Publication Date
TW201024184A TW201024184A (en) 2010-07-01
TWI346638B true TWI346638B (en) 2011-08-11

Family

ID=42283571

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097150796A TWI346638B (en) 2008-12-26 2008-12-26 A purging valve and a wafer container having the purging valve

Country Status (2)

Country Link
US (1) US7950524B2 (zh)
TW (1) TWI346638B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI504543B (zh) * 2014-02-27 2015-10-21 Yao Lien Technology Co Ltd 隔離式搬運盒之濾膜組件

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US7328727B2 (en) * 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway
EP2122014A4 (en) * 2007-02-28 2014-09-17 Entegris Inc CLEANING SYSTEM FOR A SUBSTRATE CONTAINER
US8215510B2 (en) * 2008-03-24 2012-07-10 Taiwan Semiconductor Manufacturing Company, Ltd. Photomask storage apparatus
TW201251567A (en) * 2011-06-15 2012-12-16 Wistron Corp Cover module
TWM449886U (zh) * 2012-09-26 2013-04-01 Gudeng Prec Ind Co Ltd 充氣逆止閥及具有充氣逆止閥的精密元件收納裝置
US9997388B2 (en) 2012-11-20 2018-06-12 Entegris, Inc. Substrate container with purge ports
CN104937709B (zh) * 2013-03-05 2017-05-31 村田机械株式会社 测量单元及净化气体的流量测量方法
WO2015118775A1 (ja) * 2014-02-07 2015-08-13 村田機械株式会社 ガス注入装置及び補助部材
JP5776828B1 (ja) * 2014-08-08 2015-09-09 Tdk株式会社 ガスパージユニット、ロードポート装置およびパージ対象容器の設置台
TWI712098B (zh) * 2014-12-01 2020-12-01 美商恩特葛瑞斯股份有限公司 基板容器、用於基板容器之閥總成、沖洗模組及其替換方法
JP6565336B2 (ja) * 2015-05-28 2019-08-28 Tdk株式会社 ガスパージユニット、ロードポート装置およびパージ対象容器の設置台
US10062599B2 (en) 2015-10-22 2018-08-28 Lam Research Corporation Automated replacement of consumable parts using interfacing chambers
US9881820B2 (en) * 2015-10-22 2018-01-30 Lam Research Corporation Front opening ring pod
US20170115657A1 (en) 2015-10-22 2017-04-27 Lam Research Corporation Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ
US10124492B2 (en) 2015-10-22 2018-11-13 Lam Research Corporation Automated replacement of consumable parts using end effectors interfacing with plasma processing system
US11139188B2 (en) * 2017-04-28 2021-10-05 Sinfonia Technology Co., Ltd. Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus
CN110870056B (zh) * 2017-07-14 2023-07-07 信越聚合物股份有限公司 基板收纳容器
TWM587714U (zh) * 2018-01-11 2019-12-11 家登精密工業股份有限公司 快拆式氣閥及應用其之基板容器
JP7125000B2 (ja) * 2018-03-13 2022-08-24 信越ポリマー株式会社 基板収納容器
JP7147116B2 (ja) * 2018-03-28 2022-10-05 信越ポリマー株式会社 基板収納容器
JP6882706B2 (ja) * 2020-01-07 2021-06-02 シンフォニアテクノロジー株式会社 パージノズルユニット、ロードポート

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534389A (en) 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US4532970A (en) 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
JP3191392B2 (ja) * 1992-04-07 2001-07-23 神鋼電機株式会社 クリーンルーム用密閉式コンテナ
US5472086A (en) * 1994-03-11 1995-12-05 Holliday; James E. Enclosed sealable purgible semiconductor wafer holder
US5879458A (en) * 1996-09-13 1999-03-09 Semifab Incorporated Molecular contamination control system
TW511650U (en) * 2001-09-12 2002-11-21 Ind Tech Res Inst Ventilator device for cleaning container
KR100607302B1 (ko) * 2002-10-25 2006-07-31 신에츠 폴리머 가부시키가이샤 기판 수납 용기
US7201276B2 (en) * 2003-11-07 2007-04-10 Entegris, Inc. Front opening substrate container with bottom plate
US7328727B2 (en) * 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI504543B (zh) * 2014-02-27 2015-10-21 Yao Lien Technology Co Ltd 隔離式搬運盒之濾膜組件

Also Published As

Publication number Publication date
US7950524B2 (en) 2011-05-31
US20100163452A1 (en) 2010-07-01
TW201024184A (en) 2010-07-01

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