TWI339861B - Method for etching single wafer - Google Patents
Method for etching single waferInfo
- Publication number
- TWI339861B TWI339861B TW096103355A TW96103355A TWI339861B TW I339861 B TWI339861 B TW I339861B TW 096103355 A TW096103355 A TW 096103355A TW 96103355 A TW96103355 A TW 96103355A TW I339861 B TWI339861 B TW I339861B
- Authority
- TW
- Taiwan
- Prior art keywords
- single wafer
- etching single
- etching
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02019—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006021900 | 2006-01-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200739718A TW200739718A (en) | 2007-10-16 |
TWI339861B true TWI339861B (en) | 2011-04-01 |
Family
ID=38327334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096103355A TWI339861B (en) | 2006-01-31 | 2007-01-30 | Method for etching single wafer |
Country Status (8)
Country | Link |
---|---|
US (1) | US8466071B2 (zh) |
EP (1) | EP1981072A4 (zh) |
JP (1) | JP4974904B2 (zh) |
KR (1) | KR20080082010A (zh) |
CN (1) | CN101379599B (zh) |
MY (1) | MY148726A (zh) |
TW (1) | TWI339861B (zh) |
WO (1) | WO2007088755A1 (zh) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7368285B2 (en) | 2001-03-07 | 2008-05-06 | Senomyx, Inc. | Heteromeric umami T1R1/T1R3 taste receptors and isolated cells that express same |
US7955982B2 (en) * | 2006-01-20 | 2011-06-07 | Sumco Corporation | Method for smoothing wafer surface and apparatus used therefor |
JP2008218545A (ja) * | 2007-03-01 | 2008-09-18 | Sumco Corp | ウェーハの枚葉式エッチング装置 |
JP2010003847A (ja) * | 2008-06-19 | 2010-01-07 | Sumco Corp | 半導体ウェーハの製造方法 |
JP5026356B2 (ja) * | 2008-06-26 | 2012-09-12 | Sumco Techxiv株式会社 | 拡散ウェーハの製造方法 |
JP2012186187A (ja) * | 2009-07-08 | 2012-09-27 | Sharp Corp | エッチング方法およびエッチング処理装置 |
JP6064875B2 (ja) * | 2013-11-25 | 2017-01-25 | 東京エレクトロン株式会社 | 液処理装置、液処理方法及び記憶媒体 |
JP6027523B2 (ja) * | 2013-12-05 | 2016-11-16 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法並びに基板処理プログラムを記録した記録媒体 |
US9837259B2 (en) | 2014-08-29 | 2017-12-05 | Sunpower Corporation | Sequential etching treatment for solar cell fabrication |
TWI611507B (zh) * | 2014-10-23 | 2018-01-11 | Acm Res Shanghai Inc | 矽通孔背面露頭的方法和裝置 |
US10332761B2 (en) | 2015-02-18 | 2019-06-25 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus |
US10403517B2 (en) | 2015-02-18 | 2019-09-03 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus |
JP6504540B2 (ja) * | 2015-02-25 | 2019-04-24 | 株式会社Screenホールディングス | 基板処理装置 |
JP6509583B2 (ja) * | 2015-02-25 | 2019-05-08 | 株式会社Screenホールディングス | 基板処理装置 |
JP6485904B2 (ja) * | 2015-03-03 | 2019-03-20 | 株式会社Screenホールディングス | 基板処理装置 |
US10283384B2 (en) * | 2015-04-27 | 2019-05-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for etching etch layer and wafer etching apparatus |
JP6603487B2 (ja) * | 2015-06-22 | 2019-11-06 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP2018147908A (ja) * | 2015-07-27 | 2018-09-20 | 東京エレクトロン株式会社 | 基板処理方法および基板処理装置 |
TWI629720B (zh) * | 2015-09-30 | 2018-07-11 | 東京威力科創股份有限公司 | 用於濕蝕刻製程之溫度的動態控制之方法及設備 |
KR20180013327A (ko) * | 2016-07-29 | 2018-02-07 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
JP6304364B2 (ja) * | 2016-12-26 | 2018-04-04 | 東京エレクトロン株式会社 | 液処理装置、液処理方法及び記憶媒体 |
JP6910164B2 (ja) * | 2017-03-01 | 2021-07-28 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
KR101977386B1 (ko) * | 2017-06-30 | 2019-05-13 | 무진전자 주식회사 | 웨이퍼 식각 장치 및 이를 사용하는 방법 |
CN111081585B (zh) * | 2018-10-18 | 2022-08-16 | 北京北方华创微电子装备有限公司 | 喷淋装置及清洗设备 |
JP7329391B2 (ja) | 2019-08-23 | 2023-08-18 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理システム |
US11518937B2 (en) * | 2019-12-25 | 2022-12-06 | Tokyo Ohka Kogyo Co., Ltd. | Etching solution and method for manufacturing semiconductor element |
US20230066183A1 (en) * | 2021-08-30 | 2023-03-02 | Taiwan Semiconductor Manufacturing Company Ltd. | Method of fabricating a semiconductor structure and semiconductor structure obtained therefrom |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5846643A (ja) | 1981-09-12 | 1983-03-18 | Mitsubishi Electric Corp | ウエハ処理法 |
TW346649B (en) * | 1996-09-24 | 1998-12-01 | Tokyo Electron Co Ltd | Method for wet etching a film |
JPH11135464A (ja) | 1997-10-30 | 1999-05-21 | Komatsu Electron Metals Co Ltd | 半導体ウェハの製造方法 |
KR100271769B1 (ko) | 1998-06-25 | 2001-02-01 | 윤종용 | 반도체소자의 제조방법, 이를 위한 반도체소자 제조용 식각액조성물 및 반도체소자 |
US6232228B1 (en) * | 1998-06-25 | 2001-05-15 | Samsung Electronics Co., Ltd. | Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method |
EP1313135A1 (en) * | 2000-06-29 | 2003-05-21 | Shin-Etsu Handotai Co., Ltd | Method for processing semiconductor wafer and semiconductor wafer |
KR20030021183A (ko) * | 2000-06-30 | 2003-03-12 | 엠이엠씨 일렉트로닉 머티리얼즈 인코포레이티드 | 실리콘 웨이퍼 에칭 공정 |
JP2002064079A (ja) * | 2000-08-22 | 2002-02-28 | Disco Abrasive Syst Ltd | エッチング装置 |
JP2004006672A (ja) * | 2002-04-19 | 2004-01-08 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
JP2004111668A (ja) * | 2002-09-19 | 2004-04-08 | Citizen Watch Co Ltd | 基板処理装置及び基板処理方法 |
JP2004335923A (ja) * | 2003-05-12 | 2004-11-25 | Sony Corp | エッチング方法およびエッチング装置 |
FR2886053B1 (fr) * | 2005-05-19 | 2007-08-10 | Soitec Silicon On Insulator | Procede de gravure chimique uniforme |
EP1927130A1 (en) | 2005-09-13 | 2008-06-04 | Nxp B.V. | A method of and an apparatus for processing a substrate |
JP5134774B2 (ja) * | 2006-01-16 | 2013-01-30 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP4708243B2 (ja) * | 2006-03-28 | 2011-06-22 | 東京エレクトロン株式会社 | 液処理装置および液処理方法ならびにコンピュータ読取可能な記憶媒体 |
-
2007
- 2007-01-24 JP JP2007556821A patent/JP4974904B2/ja active Active
- 2007-01-24 US US12/162,829 patent/US8466071B2/en active Active
- 2007-01-24 MY MYPI20082637A patent/MY148726A/en unknown
- 2007-01-24 WO PCT/JP2007/051034 patent/WO2007088755A1/ja active Application Filing
- 2007-01-24 EP EP07707285A patent/EP1981072A4/en not_active Ceased
- 2007-01-24 KR KR1020087019037A patent/KR20080082010A/ko not_active Application Discontinuation
- 2007-01-24 CN CN2007800041391A patent/CN101379599B/zh active Active
- 2007-01-30 TW TW096103355A patent/TWI339861B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
MY148726A (en) | 2013-05-31 |
EP1981072A1 (en) | 2008-10-15 |
CN101379599B (zh) | 2011-05-04 |
EP1981072A4 (en) | 2009-01-21 |
JP4974904B2 (ja) | 2012-07-11 |
KR20080082010A (ko) | 2008-09-10 |
US20090004876A1 (en) | 2009-01-01 |
WO2007088755A1 (ja) | 2007-08-09 |
CN101379599A (zh) | 2009-03-04 |
TW200739718A (en) | 2007-10-16 |
US8466071B2 (en) | 2013-06-18 |
JPWO2007088755A1 (ja) | 2009-06-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |