叫）57 九、發明說明： 【發明所屬之技術領域】 尤指一種具有流道板 本案係關於種流體輸送裳置 之流體輸送裝置。 【先前技術】 鲁 目前於各領域中無論是醫藥、電腦科技、列印、能源 工業’產品均朝精緻化及微小化方向發展，其中微系 浦1霧器、喷墨頭、工業列印裝置等產品所包含之 構i其關鍵技術，是以’如何藉創新結構突破其技 術瓶頸’為發展之重要内容。 請參閱第一圖，其係為習知微泵浦結構之結構示音 圖’習知微泵浦結構10係由閥體座n、閥體蓋體12、^ 體薄膜13、微致動器14及蓋體15所組成，其中，閥體薄 • 膜13係包含入口閥門結構131及出口闕門結構132，閥體 座11包含入口通道U1及出口通道112、閥體蓋體12與 微致動器14間定義形成一壓力腔室123，閥體薄膜13設 置在閥體座11與閥體蓋體12之間。 當一電壓作用在微致動器14的上下兩極時，會產生 一電場，使得微致動器14在此電場之作用下產生彎曲， 當微致動器14朝箭號X所指之方向向上彎曲變形，將使 得壓力腔至123之體積增加，因而產生一吸力，使閥體薄 膜13之入口閥門結構131開啟，使液體可自閥體座u上 6 1332557 - 之入口通道111被吸取進來，並流經閥體薄膜13之入口 閥門結構131及閥體蓋體12上之入口閥片通道121而流 入壓力腔室123内，反之當微致動器14因電場方向改變 而朝箭號X之反方向向下彎曲變形時，則會壓縮壓力腔室 123之體積，使得壓力腔室123對内部之流體產生一推力， 並使閥體薄膜13之入口閥門結構131、出口閥門結構132 承受一向下推力，而出口閥門結構132將開啟，並使液體 I 由壓力腔室123經由閥體蓋體12上之出口閥門通道122、 閥體薄膜13之出口閥門結構132，而從閥體座11之出口 通道112流出微泵浦結構10外，因而完成流體之傳輸過 程。 雖然習知微泵浦結構10能夠達到輸送流體的功能， 但是其係使用單一致動器配合單一壓力腔室、單一流通管 道、單一進出口以及單一對的閥門結構設計，若要使用微 泵浦結構10來提升流量，必須利用銜接機構將多個微幫 Φ 浦結構10進行連接並堆疊設置，然而此種連接方式除了 需額外耗費銜接機構之成本外，多個微泵浦結構10所組 合起來的體積將過大，使得最終產品之體積增加而無法符 合微小化之趨勢。 因此，如何發展一種可改善上述習知技術缺失之具有 流道板之流體輸送裝置，實為目前迫切需要解決之問題。 【發明内容】 本案之主要目的在於提供一種具有流道板之流體輸 7 1332557 ，送裝置，俾解決以習知微泵浦結構來提升流量時，必須利 用銜接機構將多個微幫浦結構進行連接並堆疊設置，將額 外耗費銜接機構之成本，且多個微泵浦結構所組合起來的 體積過大，無法符合產品微小化之趨勢等缺點。 為達上述目的，本案之一較廣義實施樣態為提供一種 具有流道板之流體輸送裝置，用以傳送流體，其係包含： 閥體座，其係具有至少一出口通道及至少一入口通道；流 ^ 道板，其係具有兩侧面，以及貫穿兩側面之複數個入口分 流道及複數個出口匯流道；閥體蓋體，其與流道板相互堆 疊結合；閥體薄膜，其係設置於流道板及閥體蓋體之間， 且具有複數個閥門結構；複數個暫存室，設置於閥體薄膜 與閥體蓋體之間，以及於閥體薄膜與流道板之間；以及振 動裝置，其係具有振動薄膜及至少一致動器，且週邊係固 設於閥體蓋體，並與閥體蓋體定義出至少一壓力腔室。 為達上述目的，本案之另一較廣義實施樣態為提供一 φ 種具有流道板之流體輸送裝置，用以傳送流體，其係包 含：閥體座，其係具有出口通道及入口通道；流道板，其 係具有兩側面，以及貫穿兩側面之入口分流道及出口匯流 道；閥體蓋體，其與流道板相互堆疊結合上；閥體薄膜， 其係設置於流道板及閥體蓋體之間，且具有第一閥門結構 及第二閥門結構；複數個暫存室，設置於閥體薄膜與閥體 蓋體之間，以及於閥體薄膜與流道板之間；以及振動裝 ’ 置，其係具有振動薄膜及單一致動器，且週邊係固設於閥 ' 體蓋體，並與閥體蓋體定義出單一壓力腔室。 8 1332557 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 本案之流體輸送裝置可適用於醫藥生技、電腦科技、 列印或是能源等工業，且可為但不限為輸送氣體或是液 體，主要係藉由增加流道板的設計可擴充成一進一出、多 進一出、一進多出以及多進多出的形式，較易使流體均勻 提供至入口分流道，並能使出口流體有效匯集至出口通 道。除此之外，流體輸送裝置整體設計採用長條形艙體， 其對應長條形之振動薄膜及致動器，可使流速及揚程大為 增加，非常適合用於流速及揚程需求相對較高之應用場 合0 請參閱第二圖A，其係為本案第一較佳實施例之流體 輸送裝置之結構示意圖，如圖所示，本實施例之流體輸送 裝置20係為使用一進一出的實施態樣，流體輸送裝置20 主要係由閥體座21、閥體蓋體22、閥體薄膜23、複數個 暫存室、致動裝置24、蓋體25及流道板26所組成，其中 在閥體蓋體22及致動裝置24之間形成一壓力腔室226(如 第二圖C所示），主要用來儲存流體。 流體輸送裝置20之組裝方式係將流道板26設置於閥 體座21與閥體薄膜23之間，而閥體薄膜23則設置於流 9 1332557 .道板26及閥體蓋體22之間，並使閥體薄膜23與流道板 26及閥體蓋體22相對應設置，且在閥體薄膜23與閥體蓋 體22之間形成一第一暫存室，而在閥體薄膜23與流道板 26之間形成一第二暫存室，並且於閥體蓋體22上之相對 應位置更設置有致動裝置24 ’致動裝置24係由一振動薄 膜241以及一致動器242組裝而成（如第三圖A及第四圖 A所示），用以驅動流體輸送裝置2〇之作動，最後，依序 φ 將閥體座21、流道板26、閥體薄膜23、閥體蓋體22、致 動裝置24及蓋體25相對應堆疊設置，以完成流體輸送裝 置20之組裝（如第二圖F所示）。 其中，閥體座21、流道板26及閥體蓋體22係為本案 流體輸送裝置20中導引流體進出之主要結構，請參閱第 二圖A並配合第三圖A及第四圖a，其中第三圖a係為第 二圖F所示之流體輸送裝置組裝完成之A_A剖面圖，第四 圖A係為第二圖F示之流體輸送裝置組裝完成之B_B剖面 • 圖，如圖所示，閥體座21係具有一個入口通道211以及 出口通道212，入口通道211係用以使外部之流體輸送至 流體輸送裝置20内，而出口通道212則是將流體由流體 輸送裝置20之内部傳送至外部。 请參閱第二圖A、第二圖B並配合第三圖a及第四圖 A，其中第一圖B係為第二圖A所示之流道板的背面結構 示意圖，如圖所示，流道板26係具有單一個入口分流道 261以及單一個出口匯流道262，且入口通道211與入口 分流道261相連通（如第三圖A所示），而出口通道212 1332557 則與出口匯流道262連通（如第四圖A所示）’換言之’ 當流體輸送裝置20組襄完成時’入口分流道261可透過 I 口通道211與外界連通，可將流體由外界輸入’而出口 匯流道262則可透過出口通道212與外界連通’可將流體 由流體輸送裝置20内部輸出至外界。 並且，於本實施例中’閥體薄膜23及流道板26之間 所形成的第二暫存室即為圖中所示之出口暫存腔263，但 不以此為限，其係由流道板26之下表面266與出口匯流 道262相對應之位置產生部分凹陷而形成’並與闕體座21 之出口通道212相連通’該出口暫存腔263係用以暫時儲 存流體，益使該流體由出口暫存腔263經由一出口匯流道 262而輸送至出口通道212 ’再流出闕體座21之外。以及’ 在流道板26上更具有複數個凹槽結構’用以供一密封環 27(如第三圖Α及第四圖Α所示）設置於其上’於本實施例 中，流道板26之下表面係具有環繞入口分流道261週邊 之凹槽265，及環繞於出口暫存腔263週邊之凹槽264 ° 古青參閱第二圖A，第一圖C並配合第二圖A及第四圖 A，立中第二圖C係為第二圖A所示之閥體蓋體之背面結 構示意圖，如圖所示’闕體蓋體22係具有一上表面220 及一下表面228，以及在閥體蓋座22上亦具有貫穿上表面 220至下表面228之第一閥門通道及一第二閥門通道，於 本實施例中，第一閥門通道係為一入口閥門通道221，第 二閥門通道係為一出口閥門通道222 ’且該入口閥門通道 221係設置於與流道板26之入口分流道261相對應之位 11 1332557 .置，而出口閥門通道222則設置於與流道板26之出口暫 存腔263内之出口匯流道262相對應之位置，並且，於本 實施例中’閥體薄膜23及閥體蓋體22之間所形成之第一 暫存室即為圖中所示之入口暫存腔223，且不以此為限， 其係由閥體蓋體22之上表面220於與入口閥門通道221 相對應之位置產生部份凹陷而形成，且其係連通於入口閥 門通道221。 0 請再參閱第二圖C，如圖所示，閥體蓋體22之下表面 228係部份凹陷，以形成一壓力腔室226，其係與致動裝 置24之致動器242相對應設置，壓力腔室226係經由入 口閥門通道221連通於入口暫存腔223，並同時與出口閥 門通道222相連通，因此，當致動器242受電壓致動使致 動裝置24朝蓋體25方向凸出變形，造成壓力腔室226之 體積膨脹而產生負壓差，可使流體經入口閥門通道221流 至壓力腔室226内（如第三圖A及第四圖A所示），其後， φ 當施加於致動器242的電場方向改變後，致動器242將使 致動裝置24朝閥體蓋體22方向凹陷變形，壓力腔室226 將收縮而體積減小，使壓力腔室226與外界產生正壓力 差，促使流體由出口閥門通道222流出壓力腔室226之 外，於此同時，同樣有部分流體會流入入口閥門通道221 及入口暫存室223内，然而由於此時的入口閥門結構231 係為使受壓而關閉的狀態，故該流體不會通過入口閥片 .2313而產生倒流的現象（如第三圖C所示），至於暫時儲 ' 存於入口暫存腔223内之流體，則於致動器242再受電壓 12 1332557 • 致動，重複使致動裝置24再變形而增加壓力腔室226體 積時，再由入口暫存腔223經至入口閥門通道221而流入 壓力腔室226内，以進行流體的輸送。 另外，閥體蓋體22上同樣具有複數個凹槽結構，以 本實施例為例，在閥體蓋體22之下表面228係具有環繞 壓力腔室226而設置之凹槽227，而在上表面220上則具 有環繞設置於入口暫存腔223之凹槽224、環繞設置於出 I 口閥門通道222之凹槽225，同樣地，上述凹槽結構係用 以供一密封環28(如第三圖A及第四圖A所不）設置於其 中〇 請參閱第二圖A並配合第二圖D及第二圖E，其中第 二圖D其係為第二圖A所示之入口閥門結構開啟示意圖， 第二圖E其係為第二圖A所示之出口閥門結構開啟示意 圖，如第二圖A所示，閥體薄膜23主要係以傳統加工、 或黃光蝕刻、或雷射加工、或電鑄加工、或放電加工等方 φ 式製出，且為一厚度實質上相同之薄片結構，其上係具有 第一閥門結構以及第二閥門結構，於本實施例中，第一閥 門結構係為入口閥門結構231，而第二閥門結構係為出口 閥門結構232，其中，入口閥門結構231係具有入口閥片 2313以及複數個環繞入口閥片2313週邊而設置之鏤空孔 洞2312，另外，在孔洞2312之間更具有與入口閥片2313 相連接之延伸部2311，當閥體薄膜23承受一自壓力腔室 • 226傳遞而來向上之應力時，如第三圖C所示，入口閥門 ' 結構231係整個向上平貼於流道板26之上，此時入口閥 13 1332557 •片2313會緊靠凹槽265上密封環27突出部分，而密封住 流道板26上之入口分流道261，且其外圍的鏤空孔洞2312 及延伸部2311則順勢浮貼於流道板26之上，故因此入口 閥門結構231之關閉作用，使流體無法流出。 而當閥體薄膜23受到壓力腔室226體積增加而產生 之吸力作用下，由於設置於流道板26之凹槽265内的密 封環27已提供入口閥門結構231 —預力（Preforce)，因 I 而入口閥片2313可藉由延伸部2311的支撐而產生更大之 預蓋緊效果，以防止逆流，當因壓力腔室226之負壓而使 入口閥門結構231往下產生位移（如第二圖D所示），此 時，流體則可經由鏤空之孔洞2312由流道板26流至閥體 蓋體22之入口暫存腔223，並經由入口暫存腔223及入口 閥門通道221傳送至壓力腔室226内，如此一來，入口閥 門結構231即可因應壓力腔室226產生之正負壓力差而迅 速的開啟或關閉，以控制流體之進出，並使流體不會回流 φ 至流道板26上。 同樣地，位於同一閥體薄膜23上的另一閥門結構則 為出口閥門結構232,其中之出口閥片2323、延伸部2321 以及孔洞2322之作動方式均與入口閥門結構231相同， 因而不再贅述，惟出口閥門結構232週邊之密封環28設 置方向係與入口閥門結構231之密封環27反向設置，如 第二圖E及第四圖A所示，因而當壓力腔室226壓縮而產 生一推力時，設置於閥體蓋體22之凹槽225内的密封環 ' 28將提供出口閥門結構232 —預力（Preforce)，使得出口 1332557 -閥片2323可藉由延伸部2321之支撐而產生更大之預蓋緊 效果，以防止逆流，當因壓力腔室226之正壓而使出口閥 門結構232往上產生位移，此時，流體則可經由鏤空之孔 洞2322由壓力腔室226經閥體蓋體22而流至流道板26 之出口暫存腔263内，並可經由出口匯流道262及出口流 道212排出，如此一來，則可經由出口閥門結構232開啟 之機制，將流體自壓力腔室226内洩出，以達到流體輸送 ^ 之功能。 請參閱第三圖A及第四圖A，其中第三圖A係為本案 第二圖F所示之流體輸送裝置之未作動狀態之A-A剖面示 意圖，第四圖A係為本案第二圖F所示之流體輸送裝置之 未作動狀態之B-B剖面示意圖，於本實施例中，所有的凹 槽結構224、225、227分別設置密封環28，而凹槽264、 265内亦分別設置密封環27，其材質係為可耐化性佳之橡 膠材料，且不以此為限，其中，設置於流道板26上之凹 _ 槽265内的密封環27可為一圓環結構，其厚度係大於凹 槽265深度，使得設置於凹槽265内之密封環27係部分 凸出於流道板26之下表面266構成一微凸結構，因而使 得貼合設置於流道板26上之閥體薄膜23之入口閥門結構 231之入口閥片2313因密封環27之微凸結構而形成一向 下隆起，而閥體薄膜23之其餘部分係與閥體蓋體22相抵 頂，如此微凸結構對入口閥門231頂推而產生一預力 " (Preforce)作用，有助於產生更大之預蓋緊效果，以防止 逆流，且由於密封環27隆起之微凸結構係位於閥體薄膜 15 1332557 23之入口閥門結構231處，故使入口閥門結構231在▲作 動時使入口閥片2313與流道板26之下表面266之間具有 一間隙，同樣地，當密封環28設置於環繞出口閥門通道 222之凹槽225内時，由於其密封環28係設置於閥體蓋體 22之上表面220，因而該密封環28係使閥體薄膜23之出 口閥門結構232向上凸出而形成一向上隆起於閥體蓋體22 之微凸結構，此微凸結構僅其方向與形成於入口閥門結構 231之微凸結構係為反向設置，然而其功能均與前述相 同，因而不再贅述。至於其餘分別設置於凹槽結構224、 227及264及213内之密封環28及27及29，主要用來分 別使閥體座21與流道板26、閥體薄膜23、閥體薄膜23 與閥體蓋體22以及閥體蓋體22與致動裝置24之間緊密 貼合時，防止流體外洩。 當然，上述之微凸結構除了使用凹槽及密封環來搭配 形成外，於一些實施例中，流道板26及閥體蓋體22之微 凸結構亦可採用半導體製程，例如：黃光蝕刻或鍍膜或電 鑄技術，直接在流道板26及閥體蓋體22上形成。 請同時參閱第三圖A、B、C及第四圖A、B、C，如圖 所示，當蓋體25、致動裝置24、閥體蓋體22、閥體薄膜 23、密封環27、28、流道板26以及閥體座21彼此對應組 裝設置後，閥體座21上之入口通道211係與流道板26之 入口分流道26卜閥體薄膜23上之入口閥門結構231以及 閥體蓋體22上之入口閥門通道221相對應（如第三圖A 所示），且閥體座21上之出口通道212係與流道板26之 16 1332557 出口匯流道262、閥體薄膜23上之出口閥門結構232·以及 閥體蓋體22上之出口閥門通道222相對應（如第四圖A 所不並且’由於密封環27設置於凹槽265内，使得闊 體薄膜23之入口閥門結構231微凸起於流道板26之下表 面266，並藉由位於凹槽265内之密封環27頂觸闕體薄麟 23而產生一預力（（Preforce)作用’使得入口閥門結構 在未作動時於流道板26之下表面266形成一間隙，同掾 地，出口閥門結構232亦藉由將密封環28設至於四槽225 中的相同方式與闊體蓋體22之上表面22〇形成一間隙。 當以一電壓驅動致動器242時’致動裝置24虞生變 曲變形，如第三圖B所示’致動裝置24係朝箭號a户斤扣 之方向向下彎曲變形’使得壓力腔室226之體積增加’ 而產生一吸力，使闕體薄膜23之入口閥門結構231、出口 闕門結構232承受一向下之拉力，並使已具有一預力 (Preforce)之入口闕門結構231之入口閥片2313迅速開 啟（如第三圖B所系）’使液體可大量地自閥體座21上之 入口通道211被吸取進來’並流經流道板26之入口分流 道26卜閥體薄膜23上之入口閥門結構231之孔洞2312、 闕體蓋體22上之入口暫存腔223、入口閥門通道221而流 八壓力腔室226之内’此時’由於閥體薄膜23之入口閥 鬥結構231、出口闕卩〗結構232承受該向下拉力，故位於 为一端之出口閥門結構232係因該向下拉力使得位於閥體 薄膜23上之出口閥片2323密封住出口閥門通道222，而 使得出口閥門結構232關閉，因而可達到防止流體逆流（如 17 1332557 第四圖B所示）。 當致動裝置24因電場方向改變而如第四圖C所示之 箭號b向上彎曲變形時，則會壓縮壓力腔室226之體積， 使得壓力腔室226對内部之流體產生一推力，並使閥體薄 膜23之入口閥門結構231、出口閥門結構232承受一向上 推力，此時，設置於凹槽225内之密封環28上出口閥門 結構232的出口閥片2323其可迅速開啟（如第四圖C所 示），並使液體瞬間大量宣洩，由壓力腔室226經由閥體 蓋體22上之出口閥門通道222、閥體薄膜23上之出口閥 門結構232之孔洞2322、流道板26上之出口暫存腔263 及出口匯流道262、閥體座21上之出口通道212而流出流 體輸送裝置20之外，因而完成流體之傳輸過程，同樣地， 此時由於入口閥門結構231係承受該向上之推力，因而使 得入口閥片2313密封住入口分流道261，因而關閉入口閥 門結構231，使得流體不逆流（如第三圖C所示），並且， 藉由入口閥門結構231及出口閥門結構232配合設置於流 道板26及閥體蓋體22上之凹槽265、225内的密封環27、 28之設計，可使流體於傳送過程中不會產生回流的情形， 達到高效率之傳輸。 請參閱第五圖A，其係為本案第二較佳實施例之流體 輸送裝置之結構示意圖，如圖所示，本實施例之流體輸送 裝置50係為使用一進一出的實施態樣，流體輸送裝置50 主要係由閥體座51、閥體蓋體52、閥體薄膜53、複數個 暫存室、致動裝置54、蓋體55及流道板56所組成，於本 1332557 實施例中，流體輸送裝置50的組裝方式同樣係依序‘將閥 體座51、流道板56、閥體薄膜53、閥體蓋體52、致動裝 置54及蓋體55相對應堆疊設置，以完成流體輸送裝置50 之組裝（如第五圖B所示）。 請再參閱第五圖A並配合第六圖A及第七圖A，其中 第六圖A係為第五圖B之A-A剖面圖，第七圖A係為第五 圖B之B-B剖面圖，如圖所示，閥體蓋體52及致動裝置 54之間同樣形成一壓力腔室526，主要用來儲存流體，致 動裝置54係由一振動薄膜541以及一致動器542組裝而 成，閥體座51係具有一個入口通道511以及出口通道 512,入口通道511係用以使外部之流體輸送至流體輸送 裝置50内，而出口通道512則是將流體由流體輸送裝置 50之内部傳送至外部。流道板56具有複數個入口分流道 561以及複數個出口匯流道562，且入口通道511與複數 個入口分流道561相連通（如第六圖A所示），而出口通 道512則與複數個出口匯流道562連通（如第七圖A所示） 閥體薄膜53及流道板56之間形成複數個出口暫存腔 563，並與闊體座51之出口通道512相連通，可使該流體 由出口暫存腔563經由一出口匯流道562而輸送至出口通 道512，再流出閥體座51之外，以及，在流道板56上具 有環繞入口分流道561週邊之凹槽565，及環繞於出口暫 存腔563週邊之凹槽564,用以供一密封環57(如第六圖A 及第七圖A所示）設置於其上。 閥體蓋座52上亦具有貫穿上表面至下表面之複數個 1332557 •入口間門通道521及複數個出口闕門通道522，且每一入 口閥門通道521係設置於與流道板56之每一入口分流道 561相對應之位置，而每一出口閥門通道522則設置於與 流道板56之每一出口暫存腔563内之出口匯流道562相 對應之位置，並且’於本實施例中，閥體薄膜53及閥體 蓋體52之間係形成複數個入口暫存腔523，且不以此為 限，其係由閥體蓋體52之上表面於與入口閥門通道521 相對應之位置產生部份凹陷而形成，且其係連通於複數個 入口閥門通道521。 壓力腔室526係與致動裝置54之致動器542相對應 設置，壓力腔室526係經由複數個入口閥門通道521連通 於複數個入口暫存腔523，並同時與複數個出口閥門通道 522相連通。 另外，在閥體蓋體52之下表面528係具有環繞壓力 腔室526而設置之凹槽527，而在上表面上則具有環繞設 置於複數個入口暫存腔523之凹槽524、環繞設置於出口 閥門通道522之凹槽525，同樣地，上述凹槽結構係用以 供一密封環58(如第六圖A及第七圖A所示）設置於其中。 請與參閱第五圖A，閥體薄膜53上係具有複數個入口 閥門結構531以及複數個出口閥門結構532，其中，複數 個入口闊門結構531係分別具有入口閥片5313以及複數 個環繞入口閥片5313週邊而設置之鏤空孔洞5312’另外’ 在孔洞5312之間更具有與入口閥片5313相連接之延伸部 5311，而複數個出口閥門結構532則具有出口閥片5323、 1332557 延伸部5321以及孔洞5322，惟本實施例之入口閥門‘結構 531以及出口閥門結構532的組成結構及作動方式均已詳 述於第一較佳實施例中，因而不再贅述。 設置於流道板56上之凹槽565内的密封環57厚度係 大於凹槽565深度，使得設置於凹槽565内之密封環57 係部分凸出於流道板56之下表面構成一微凸結構，同樣 地，當密封環58設置於環繞出口閥門通道522之凹槽525 内時，由於其密封環58係設置於閥體蓋體52之上表面， 因而該密封環58係使閥體薄膜53之出口闊門結構532向 上凸出而形成一向上隆起於閥體蓋體52之微凸結構。至 於其餘分別設置於凹槽結構524、527及564及513内之 密封環58及57及59，主要用來分別使閥體座51與流道 板56、閥體薄膜53、閥體薄膜53與閥體蓋體52以及閥 體蓋體52與致動裝置54之間緊密貼合時，防止流體外洩。 請同時參閱第六圖A、B、C及第七圖A、B、C，如圖 所示，當蓋體55、致動裝置54、閥體蓋體52、閥體薄膜 53、密封環57、58、流道板56以及閥體座51彼此對應組 裝設置後，閥體座51上之入口通道511係與流道板56之 複數個入口分流道561、閥體薄膜53上之複數個入口閥門 結構531以及閥體蓋體52上之複數個入口閥門通道521 相對應（如第六圖A所示），且閥體座51上之出口通道512 係與流道板56之複數個出口匯流道562、閥體薄膜53上 之複數個出口閥門結構532以及閥體蓋體52上之複數個 出口閥門通道522相對應（如第七圖A所示），並且，由 21 1332557 .於密封環57設置於凹槽565内’使得閥體薄膜53之入口 閥門結構531微凸起於流道板56之下表面，並藉由位於 凹槽565内之密封環57頂觸閥體薄膜53而產生一預力 ((Preforce)作用，使得複數個入口閥門結構531在未作 動時於流道板56之下表面形成一間隙，同樣地，出口閥 門結構532亦藉由將密封環58設至於凹槽525中的相同 方式與閥體蓋體52之上表面形成一間隙。 當以一電壓驅動致動器542時，致動裝置54產生彎 曲變形’如第六圖B所示，致動裝置54係朝箭號a所指 之方向向下彎曲變形’使得壓力腔室526之體積增加，因 而產生一吸力’使閥體薄膜53之入口閥門結構531、出口 閥門結構532承受一向下之拉力，並使已具有一預力 (Preforce)之入口閥門結構531之入口閥片5313迅速開 啟（如第六圖B所示），使液體可大量地自閥體座51上之 入口通道511被吸取進來，並流經流道板56之複數個入 口分流道561、閥體薄膜53上之複數個入口閥門結構531 之孔洞5312、閥體蓋體52上之複數個入口暫存腔523、 複數個入口閥門通道521而流入壓力腔室526之内，此 時’由於閥體薄膜53之複數個入口閥門結構531、複數個 出口閥門結構532承受該向下拉力，故位於另一端之複數 個出口閥門結構532係因該向下拉力使得位於閥體薄膜53 上之複數個出口閥片2323密封住所對應之出口閥門通道 522，而使得所有的出口閥門結構532關閉，因而可達到 防止流體逆流（如第七圖B所示）。 22 1332557 當致動裝置54因電場方向改變而如第七圖C所示之 箭號b向上彎曲變形時，則會壓縮壓力腔室526之體積， 使得壓力腔室526對内部之流體產生一推力，並使閥體薄 膜53之複數個入口閥門結構531、複數個出口閥門結構 532承受一向上推力，此時，設置於凹槽525内之密封環 58上出口閥門結構532的出口閥片5323其可迅速開啟（如 第七圖C所示），並使液體瞬間大量宣洩，由壓力腔室526 分別經由閥體蓋體52上之複數個出口閥門通道522、閥體 薄膜53上之複數個出口闊門結構532之孔洞5322、流道 板56上之複數個出口暫存腔563及複數個出口匯流道 562，使得匯集之流體經由閥體座51上之出口通道512而 流出流體輸送裝置50之外，因而完成流體之傳輸過程， 且因應流道板56具有複數個入口分流道561及複數個出 口匯流道562的結構，能夠使流體輸送裝置50整體流速 及揚程大為增加。 同樣地，此時由於複數個入口閥門結構531係承受該 向上之推力，因而使得入口閥片5313密封住所對應之入 口分流道561，因而關閉入口閥門結構531，使得流體不 逆流（如第六圖C所示），並且，藉由複數個入口閥門結 樽531及複數個出口閥門結構532配合設置於流道板56 及閥體蓋體52上之凹槽565、525内的密封環57、58之 設計，可使流體於傳送過程中不會產生回流的情形，達到 高效率之傳輸。 請參閱第八圖、第九圖A及第十圖A，其中第八圖係 23 1332557 為本案第三較佳實施例之流體輸送裝置之組裝完成後之 結構示意圖，第九圖A係為第八圖之A-A剖面圖，第十圖 A係為第八圖之B-B剖面圖，如圖所示，本實施例之流體 輸送裝置80係為使用多進多出的實施態樣，流體輸送裝 置80主要係由閥體座81、閥體蓋體52、閥體薄膜53、複 數個暫存室、致動裝置84、蓋體85及流道板56所組成， 且組裝方式同樣係依序將閥體座81、流道板56、閥體薄 膜53、閥體蓋體52、致動裝置84及蓋體85相對應堆疊 設置，以完成流體輸送裝置80之組裝。 其中，本實施例所揭露之閥體蓋體52、閥體薄膜53 及流道板56的組成結構及作動方式係與第五圖A所示之 第二較佳實施例相同，因而不再贅述。 於本實施例中，閥體座81係具有複數個入口通道811 以及複數個出口通道512，且複數個入口通道811彼此之 間不相連通，複數個出口通道512彼此之間亦不相連通， 流道板56具有複數個入口分流道561以及複數個出口匯 流道562，且每一入口通道811僅與單一入口分流道561 相連通（如第九圖A所示），而每一出口通道812同樣僅 與單一出口匯流道562連通（如第十圖A所示）。 閥體薄膜53及流道板56之間所形成之複數個出口暫 存腔563係分別與闊體座81之一出口通道812相連通， 閥體蓋座52上所具有之複數個入口閥門通道521及複數 個出口閥門通道522，每一入口閥門通道521係設置於與 流道板56之每一入口分流道561相對應之位置，而每一 1332557 •出口閥門通道522則設置於與流道板56之每J 口暫存 腔563内之出口匯流道562相對應之位置，並真，於本實 施例中，閥體薄臈53及閥體蓋體52之間係形成旅數個入 口暫存腔523’其係分別連通於複數個入口閥門通道521。 請再參閱第九圖A及第十圖A，致動裝置84係由一振 動薄膜841以及複數個致動器842組裝而成，使得閥體蓋 體52及致動裝置84之間形成複數個壓力腔室526,其中’ 複數個壓力腔室526彼此之間並不相連通，進而使得本實 施例之流體輸送裝置8〇可被分為複數個如第三圖A及第 四圖A所示之致動腔體，其中，本實施例之流體輸送裝置 80可被分為6個獨立的致動腔體，且每一致動器842係受 相同振動頻率之電壓驅動。 請參閱第九圖B及第十圖B，當以相同振動頻率之電 壓驅動所有致動器842時，致動裝置84產生彎曲變形， 如第九圖B所示’致動裝置84係朝箭號a所指之方向向 下驚曲變形’使得每一壓力腔室526之體積增加，將導致 所有的入口閥門結構531開啟，並經對應之入口通道811 JL . 口分流道562汲取流體進入腔體（如第九圖b所示）， 此時出口閥門結構532更為緊閉，避免流體回流（如第十 β 命ί* *、 叮不）’至於詳細的作動關係已於上述第三圖Β及第 四圖Β中提出說明，於此不再贅述。 置反之’請再參閲第九圖C及第十圖C，當所有致動裝 84因電場方向改變而如第十圖C所示之箭號b向上彎 曲鐵Ά, db y、’則會壓縮每一塵力腔室526之體積，使得壓力 25 1332557 - 腔室526對内部之流體產生一推力，將導致所有的出口閥 門結構532開啟，並並經對應之、出口暫存腔563、出口 匯流道562及出口通道812排出流體（如第十圖C所示）， 此時所有入口閥門結構531更為緊閉（如第九圖C所示）， 避免流體回流，至於詳細的作動關係已於上述第三圖B及 第四圖B中提出說明，於此不再贅述。 综上所述，本案之具有流道板之流體輸送裝置主要係 0 利用流道板可擴充成一進一出、多進一出、一進多出以及 多進多出的形式，較易使流體均勻提供至入口分流道，並 能使出口流體有效匯集至出口通道。除此之外，流體輸送 裝置整體設計採用長條形艙體，其對應長條形之振動薄膜 及致動器，可使流速及揚程大為增加。 另外，流道板結構配合多個入口分流道、多個出口匯 流道或暫存腔及其多個閥門結構之配置概念，可提供流體 多個進出腔體之通道，減少流體留在腔體内部循環，使致 φ 動器動能有較高效率轉換為流體輸送裝置之流體的流出 動能。 是以，本案之具有流道板之流體輸送裝置極具產業之 價值，爰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 26 1332557 【圖式簡單說明】 第圖：其係為習知微泵浦結構之結構示意圖。 圖A:其係為本案第—較佳實施例之流體輪 仝解結構示意圖。 1之 結構示意 第圖B·其係為第二圖a所示之流道板的背面 I同〇) 发明 发明 发明 发明 57 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明[Prior Art] Lu is currently developing in various fields, such as medicine, computer technology, printing, and energy industry. The products are in the direction of refinement and miniaturization. Among them, the micro-system Pu mist, inkjet head, industrial printing device The key technologies included in such products are the important content of 'how to break through its technical bottlenecks with innovative structure'. Please refer to the first figure, which is a structural sound diagram of a conventional micro-pump structure. The conventional micro-pump structure 10 is composed of a valve body seat n, a valve body cover 12, a body film 13, and a microactuator. 14 and a cover body 15, wherein the valve body thin film 13 comprises an inlet valve structure 131 and an outlet door structure 132. The valve body seat 11 includes an inlet passage U1 and an outlet passage 112, a valve body cover 12 and a micro-body A pressure chamber 123 is defined between the actuators 14, and a valve body film 13 is disposed between the valve body seat 11 and the valve body cover 12. When a voltage is applied to the upper and lower poles of the microactuator 14, an electric field is generated, causing the microactuator 14 to bend under the action of the electric field, as the microactuator 14 is directed upward in the direction indicated by the arrow X. The bending deformation will increase the volume of the pressure chamber to 123, thereby generating a suction force, so that the inlet valve structure 131 of the valve body film 13 is opened, so that the liquid can be sucked in from the inlet passage 111 of the valve body seat 6 1332557. And flowing through the inlet valve structure 131 of the valve body film 13 and the inlet valve passage 121 on the valve body cover 12 to flow into the pressure chamber 123, and vice versa when the microactuator 14 changes toward the direction of the electric field due to the change of the electric field direction When the reverse direction is bent downward, the volume of the pressure chamber 123 is compressed, so that the pressure chamber 123 generates a thrust to the internal fluid, and the inlet valve structure 131 and the outlet valve structure 132 of the valve body film 13 are subjected to a downward pressure. The thrust, and the outlet valve structure 132 will open, and the liquid I will pass from the pressure chamber 123 through the outlet valve passage 122 on the valve body cover 12, the outlet valve structure 132 of the valve body membrane 13, and the outlet from the valve body seat 11. Channel 11 2 Flows out of the micropump structure 10, thus completing the fluid transfer process. Although the conventional micropump structure 10 is capable of transporting fluids, it uses a single actuator with a single pressure chamber, a single flow conduit, a single inlet and outlet, and a single pair of valve configurations for use with micropumps. The structure 10 is used to increase the flow rate, and the plurality of micro-pump Φ structures 10 must be connected and stacked by using the connection mechanism. However, in addition to the cost of the connection mechanism, the multiple micro-pump structures 10 are combined. The volume will be too large, so that the volume of the final product will increase and it will not be able to meet the trend of miniaturization. Therefore, how to develop a fluid transporting device having a flow path plate which can improve the above-mentioned conventional techniques is an urgent problem to be solved. SUMMARY OF THE INVENTION The main purpose of the present invention is to provide a fluid transfer 7 13332557 with a flow channel plate, and to send a device to solve the problem of using a conventional micro-pump structure to increase the flow rate, the multi-push structure must be carried out by using the connection mechanism. The connection and stacking arrangement will cost the additional connection mechanism, and the combined volume of the multiple micro-pump structures will be too large to meet the shortcomings of miniaturization of the product. In order to achieve the above object, a broader aspect of the present invention provides a fluid delivery device having a flow channel for transferring a fluid, comprising: a valve body having at least one outlet passage and at least one inlet passage The flow channel board has two sides, and a plurality of inlet split channels and a plurality of outlet bus passages running through the two sides; the valve body cover body and the flow channel plate are stacked on each other; the valve body film is set Between the flow channel plate and the valve body cover body, and having a plurality of valve structures; a plurality of temporary storage chambers are disposed between the valve body film and the valve body cover body, and between the valve body film and the flow channel plate; And a vibration device having a vibrating membrane and at least an actuator, and the periphery is fixed to the valve body cover and defines at least one pressure chamber with the valve body cover. In order to achieve the above object, another generalized embodiment of the present invention provides a fluid transporting device having a flow path plate for conveying a fluid, comprising: a valve body seat having an outlet passage and an inlet passage; a flow channel plate having two sides, and an inlet and an outlet flow passage extending through the two sides; a valve body cover stacked on the flow path plate; and a valve body film disposed on the flow path plate and Between the valve body cover body, and having a first valve structure and a second valve structure; a plurality of temporary storage chambers are disposed between the valve body film and the valve body cover body, and between the valve body film and the flow channel plate; And a vibration device, which has a vibrating membrane and a single actuator, and the periphery is fixed to the valve body cover and defines a single pressure chamber with the valve body cover. 8 1332557 [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of The fluid delivery device of the present invention can be applied to industries such as medical biotechnology, computer technology, printing or energy, and can be, but is not limited to, transporting gas or liquid, mainly by increasing the design of the flow channel plate to expand into one. Out, one in, one out, one out and one out, it is easier to provide fluid evenly to the inlet shunt and to effectively collect the outlet fluid to the outlet channel. In addition, the overall design of the fluid conveying device adopts a long-shaped cabin, which corresponds to the long-shaped diaphragm and actuator, which can greatly increase the flow rate and the lift, and is very suitable for the flow rate and the head with relatively high demand. Application 0 Please refer to FIG. 2A, which is a schematic structural view of a fluid transport device according to a first preferred embodiment of the present invention. As shown in the figure, the fluid transport device 20 of the present embodiment is implemented by using one in and one out. In one aspect, the fluid delivery device 20 is mainly composed of a valve body seat 21, a valve body cover 22, a valve body film 23, a plurality of temporary storage chambers, an actuating device 24, a cover body 25 and a flow channel plate 26, wherein A pressure chamber 226 (shown in Figure 2C) is formed between the valve body cover 22 and the actuator 24 for storing fluid. The fluid delivery device 20 is assembled in such a manner that the flow channel plate 26 is disposed between the valve body seat 21 and the valve body membrane 23, and the valve body membrane 23 is disposed in the flow 9 1332557. Between the land plate 26 and the valve body cover 22, the valve body film 23 is disposed corresponding to the flow path plate 26 and the valve body cover 22, and a first portion is formed between the valve body film 23 and the valve body cover 22. a temporary storage chamber, and a second temporary storage chamber is formed between the valve body film 23 and the flow path plate 26, and an actuator device 24 is provided at a corresponding position on the valve body cover 22. It is assembled by a vibrating membrane 241 and an actuator 242 (as shown in FIG. 3A and FIG. AA) for driving the fluid transport device 2, and finally, the valve body seat 21 is sequentially φ. The flow path plate 26, the valve body film 23, the valve body cover 22, the actuating device 24, and the cover body 25 are correspondingly stacked to complete assembly of the fluid delivery device 20 (as shown in Fig. F). The valve body seat 21, the flow channel plate 26 and the valve body cover 22 are the main structures for guiding fluid in and out of the fluid transport device 20 of the present invention. Please refer to the second figure A and cooperate with the third figure A and the fourth figure a. The third figure a is the A_A cross-sectional view of the assembly of the fluid transport device shown in FIG. F, and the fourth figure A is the B_B profile of the fluid transport device shown in FIG. As shown, the valve body seat 21 has an inlet passage 211 for delivering external fluid to the fluid delivery device 20 and an outlet passage 212 for fluid flow from the fluid delivery device 20. Transfer to the outside internally. Please refer to the second figure A and the second figure B and cooperate with the third figure a and the fourth figure A, wherein the first figure B is a schematic view of the back structure of the flow channel board shown in the second figure A, as shown in the figure. The runner plate 26 has a single inlet splitter 261 and a single outlet header 262, and the inlet passage 211 is in communication with the inlet splitter 261 (as shown in Figure 3A), while the outlet passage 212 1332557 is connected to the outlet. The passage 262 is connected (as shown in FIG. 4A). In other words, when the fluid delivery device 20 is completed, the inlet passage 261 can communicate with the outside through the I port 211, and the fluid can be input from the outside and the outlet is connected. 262 can communicate with the outside through the outlet passage 212 to discharge fluid from the interior of the fluid delivery device 20 to the outside. Further, in the present embodiment, the second temporary storage chamber formed between the valve body film 23 and the flow path plate 26 is the outlet temporary storage chamber 263 shown in the drawing, but not limited thereto. The lower surface 266 of the flow channel plate 26 is partially recessed to form a portion and is in communication with the outlet passage 212 of the body block 21. The outlet temporary cavity 263 is used for temporarily storing fluid. The fluid is delivered from the outlet storage chamber 263 via an outlet manifold 262 to the outlet passage 212' and out of the bowl seat 21. And 'there is a plurality of groove structures on the flow path plate 26' for a sealing ring 27 (shown as shown in FIG. 3 and FIG. 4A) to be disposed thereon. In this embodiment, the flow path The lower surface of the plate 26 has a groove 265 around the periphery of the inlet shunt 261, and a groove 264 around the periphery of the outlet temporary cavity 263. See Figure 2A, the first figure C and the second figure A. And the fourth figure A, the second figure C of the center is a schematic view of the back structure of the valve body cover shown in the second figure A. As shown in the figure, the body cover 22 has an upper surface 220 and a lower surface 228. And a first valve passage and a second valve passage extending through the upper surface 220 to the lower surface 228 on the valve body cover 22, in the embodiment, the first valve passage is an inlet valve passage 221, The two valve passages are an outlet valve passage 222' and the inlet valve passage 221 is disposed at a position 11 1332557 corresponding to the inlet runner 261 of the flow passage plate 26. The outlet valve passage 222 is disposed at a position corresponding to the outlet manifold 262 in the outlet temporary chamber 263 of the flow passage plate 26, and in the present embodiment, the valve body film 23 and the valve body cover 22 The first temporary storage chamber formed between the two is the inlet temporary storage chamber 223 shown in the figure, and is not limited thereto. The upper surface 220 of the valve body cover 22 corresponds to the inlet valve passage 221. The position is partially recessed and communicated with the inlet valve passage 221. 0 Referring again to FIG. 2C, as shown, the lower surface 228 of the valve body cover 22 is partially recessed to form a pressure chamber 226 that corresponds to the actuator 242 of the actuator 24. It is provided that the pressure chamber 226 is in communication with the inlet temporary chamber 223 via the inlet valve passage 221 and simultaneously communicates with the outlet valve passage 222, so that when the actuator 242 is actuated by the voltage, the actuator 24 is directed toward the cover 25 The direction is convexly deformed, causing the volume of the pressure chamber 226 to expand to generate a negative pressure difference, so that the fluid can flow into the pressure chamber 226 through the inlet valve passage 221 (as shown in FIG. 3A and FIG. AA). Thereafter, φ, when the direction of the electric field applied to the actuator 242 is changed, the actuator 242 will deform the actuator 24 toward the valve body cover 22, and the pressure chamber 226 will contract to reduce the volume, thereby making the pressure chamber The chamber 226 creates a positive pressure differential with the outside, causing fluid to flow out of the pressure chamber 226 from the outlet valve passage 222. At the same time, some of the fluid will also flow into the inlet valve passage 221 and the inlet temporary chamber 223, however The inlet valve structure 231 is designed to be pressurized The closed state, so the fluid will not pass through the inlet valve. 2313 causes a backflow phenomenon (as shown in FIG. 3C), and as for temporarily storing the fluid stored in the inlet temporary chamber 223, the actuator 242 is again subjected to the voltage 12 1332557 • is actuated to repeat the actuation. When the device 24 is deformed to increase the volume of the pressure chamber 226, it flows from the inlet temporary chamber 223 to the inlet valve passage 221 into the pressure chamber 226 for fluid delivery. In addition, the valve body cover 22 also has a plurality of groove structures. In the embodiment, the lower surface 228 of the valve body cover 22 has a recess 227 disposed around the pressure chamber 226. The surface 220 has a groove 224 disposed around the inlet temporary cavity 223 and surrounding the groove 225 of the valve channel 222. Similarly, the groove structure is used for a sealing ring 28 (eg, The three figures A and the fourth figure A are not provided), please refer to the second figure A and cooperate with the second figure D and the second figure E, wherein the second figure D is the inlet valve shown in the second figure A FIG. 2 is a schematic diagram showing the opening of the outlet valve structure shown in FIG. 2A. As shown in FIG. 2A, the valve body film 23 is mainly processed by conventional processing, or yellow etching, or laser. Processing, or electroforming processing, or electric discharge machining, etc., and a sheet structure having substantially the same thickness, having a first valve structure and a second valve structure thereon, in this embodiment, the first The valve structure is the inlet valve structure 231 and the second valve structure is the outlet The door structure 232, wherein the inlet valve structure 231 has an inlet valve piece 2313 and a plurality of hollow holes 2312 disposed around the periphery of the inlet valve piece 2313, and further has an extension connecting the inlet valve piece 2313 between the holes 2312. In the portion 2311, when the valve body film 23 is subjected to an upward pressure transmitted from the pressure chamber 226, as shown in FIG. 3C, the inlet valve 'structure 231 is entirely flatly attached to the flow path plate 26, At this time, the inlet valve 13 1332557 • the piece 2313 will abut against the protruding portion of the sealing ring 27 on the groove 265, and seal the inlet branching passage 261 on the flow path plate 26, and the hollow hole 2312 and the extension portion 2311 of the periphery thereof will float. It is attached to the flow channel plate 26, so that the closing function of the inlet valve structure 231 prevents the fluid from flowing out. When the valve body film 23 is subjected to the suction generated by the volume increase of the pressure chamber 226, the seal ring 27 disposed in the groove 265 of the flow path plate 26 has provided the inlet valve structure 231 - Preforce, because I and the inlet valve piece 2313 can produce a larger pre-covering effect by the support of the extension portion 2311 to prevent backflow, and the inlet valve structure 231 is displaced downward due to the negative pressure of the pressure chamber 226 (eg, 2D), at this time, the fluid can flow from the flow channel plate 26 to the inlet temporary storage chamber 223 of the valve body cover 22 via the hollow hole 2312, and is transmitted through the inlet temporary storage chamber 223 and the inlet valve passage 221 Into the pressure chamber 226, the inlet valve structure 231 can be quickly opened or closed according to the positive and negative pressure difference generated by the pressure chamber 226 to control the ingress and egress of the fluid and prevent the fluid from flowing back to the flow path. On board 26. Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232, wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus will not be described again. However, the sealing ring 28 around the outlet valve structure 232 is disposed in a direction opposite to the sealing ring 27 of the inlet valve structure 231, as shown in FIG. 2E and FIG. 4A, so that when the pressure chamber 226 is compressed, a Upon thrust, the seal ring '28 disposed in the recess 225 of the valve body cover 22 will provide the outlet valve structure 232 - Preforce, such that the outlet 1332557 - the valve plate 2323 can be produced by the support of the extension 2321 A larger pre-tightening effect to prevent backflow, when the outlet valve structure 232 is displaced upward due to the positive pressure of the pressure chamber 226, at this time, the fluid can be passed from the pressure chamber 226 to the valve via the hollow hole 2322. The body cover 22 flows into the outlet temporary cavity 263 of the flow channel plate 26 and can be discharged through the outlet manifold 262 and the outlet flow channel 212. Thus, the fluid can be opened via the mechanism of the outlet valve structure 232. from The pressure chamber 226 is vented to achieve the function of fluid delivery. Please refer to the third figure A and the fourth figure A, wherein the third figure A is a schematic view of the AA cross section of the fluid delivery device shown in the second drawing F of the present case, and the fourth figure A is the second figure F of the present case. In the embodiment of the present invention, all of the groove structures 224, 225, and 227 are respectively provided with a seal ring 28, and the grooves 264, 265 are respectively provided with a seal ring 27, respectively. The material is a rubber material which is excellent in chemical resistance, and is not limited thereto. The sealing ring 27 disposed in the concave groove 265 on the flow channel plate 26 may be a ring structure having a thickness greater than The depth of the groove 265 is such that the sealing ring 27 disposed in the groove 265 protrudes from the lower surface 266 of the flow path plate 26 to form a micro-convex structure, thereby fitting the valve body film disposed on the flow path plate 26. The inlet valve piece 2313 of the inlet valve structure 231 of 23 forms a downward bulge due to the micro-convex structure of the sealing ring 27, and the remaining part of the valve body film 23 abuts against the valve body cover 22, so that the micro-convex structure pairs the inlet valve 231 pushes to generate a pre-force " (Preforce) effect, Helping to create a greater pre-covering effect to prevent backflow, and because the micro-convex structure of the sealing ring 27 is located at the inlet valve structure 231 of the valve body film 15 1332557 23, the inlet valve structure 231 is actuated when ▲ There is a gap between the inlet valve piece 2313 and the lower surface 266 of the flow path plate 26, and similarly, when the sealing ring 28 is disposed in the groove 225 surrounding the outlet valve passage 222, since the sealing ring 28 is disposed on the valve The upper surface 220 of the body cover 22, such that the sealing ring 28 causes the outlet valve structure 232 of the valve body film 23 to protrude upward to form a micro-convex structure that rises upwardly from the valve body cover 22, and the micro-convex structure only The direction is opposite to the micro-convex structure formed in the inlet valve structure 231, however, the functions thereof are the same as those described above, and thus will not be described again. The remaining seal rings 28 and 27 and 29 respectively disposed in the groove structures 224, 227, and 264 and 213 are mainly used to respectively make the valve body seat 21 and the flow path plate 26, the valve body film 23, and the valve body film 23 When the valve body cover 22 and the valve body cover 22 are in close contact with the actuating device 24, fluid leakage is prevented. Of course, the above-mentioned micro-convex structure is formed by using a groove and a sealing ring. In some embodiments, the micro-convex structure of the flow channel plate 26 and the valve body cover 22 can also be a semiconductor process, for example, yellow etching. Or coating or electroforming technology is formed directly on the flow channel plate 26 and the valve body cover 22. Please also refer to the third drawing A, B, C and the fourth drawing A, B, C. As shown, when the cover body 25, the actuating device 24, the valve body cover 22, the valve body film 23, the sealing ring 27 28, the runner plate 26 and the valve body seat 21 are assembled correspondingly to each other, the inlet passage 211 on the valve body seat 21 and the inlet branch passage 26 of the flow passage plate 26, the inlet valve structure 231 on the valve body film 23, and The inlet valve passage 221 on the valve body cover 22 corresponds to (as shown in FIG. 3A), and the outlet passage 212 on the valve body seat 21 is connected to the flow passage plate 26, 16 1332557, the outlet manifold 262, and the valve body film. The outlet valve structure 232 on the 23 and the outlet valve passage 222 on the valve body cover 22 correspond to each other as shown in Fig. A and because the seal ring 27 is disposed in the recess 265, the entrance of the wide body film 23 is made. The valve structure 231 is slightly raised on the lower surface 266 of the flow channel plate 26, and a pre-force (Preforce action) is created by the seal ring 27 located in the groove 265. A gap is formed on the lower surface 266 of the flow channel plate 26 when not actuated, and the outlet valve structure 232 is also The same manner as the sealing ring 28 is provided in the four slots 225 forms a gap with the upper surface 22 of the wide body cover 22. When the actuator 242 is driven by a voltage, the actuator device 24 is deformed and deformed, such as the third. In Fig. B, the 'actuating device 24 is bent downward in the direction of the arrow a button to make the volume of the pressure chamber 226 increase' to generate a suction force, so that the inlet valve structure 231 and the outlet of the body film 23 are formed. The pedal structure 232 is subjected to a downward pulling force, and the inlet valve piece 2313 of the inlet door structure 231 having a pre-force (Preforce) is quickly opened (as shown in FIG. 3B) to make the liquid large enough from the valve. The inlet passage 211 on the body seat 21 is sucked in and flows through the inlet branch passage 26 of the flow passage plate 26, the hole 2312 of the inlet valve structure 231 on the valve body film 23, and the inlet temporary cavity on the body cover 22 223, the inlet valve passage 221 and the flow chamber 226 within the pressure chamber 226 'at this time' because the inlet valve body structure 231 of the valve body membrane 23, the outlet 阙卩 structure 232 receives the pull-down force, so the outlet valve is located at one end Structure 232 is located in the valve body due to the downward pulling force The outlet valve plate 2323 on the membrane 23 seals the outlet valve passage 222, causing the outlet valve structure 232 to be closed, thereby preventing backflow of fluid (as shown in Fig. 14 1332557, fourth panel B). When the actuator 24 changes due to the direction of the electric field When the arrow b shown in the fourth figure C is bent upward, the volume of the pressure chamber 226 is compressed, so that the pressure chamber 226 generates a thrust to the internal fluid, and the inlet valve structure of the valve body film 23 is formed. 231. The outlet valve structure 232 is subjected to an upward thrust. At this time, the outlet valve piece 2323 of the outlet valve structure 232 disposed on the seal ring 28 in the recess 225 can be quickly opened (as shown in FIG. 4C), and The liquid instantaneously vents a large amount, and the pressure chamber 226 passes through the outlet valve passage 222 on the valve body cover 22, the hole 2322 of the outlet valve structure 232 on the valve body film 23, the outlet temporary chamber 263 and the outlet on the flow path plate 26. The manifold 262 and the outlet passage 212 on the valve body seat 21 flow out of the fluid delivery device 20, thereby completing the fluid transfer process. Similarly, since the inlet valve structure 231 is subjected to the upward thrust Thus, the inlet valve piece 2313 seals the inlet runner 261, thereby closing the inlet valve structure 231 such that the fluid does not flow backwards (as shown in FIG. 3C), and is configured by the inlet valve structure 231 and the outlet valve structure 232. The design of the seal rings 27, 28 in the grooves 265, 225 of the flow passage plate 26 and the valve body cover 22 allows the fluid to be reflowed during the transfer to achieve efficient transfer. Please refer to FIG. 5A, which is a schematic structural view of a fluid transport device according to a second preferred embodiment of the present invention. As shown in the figure, the fluid transport device 50 of the present embodiment is an embodiment using a flow in and out, fluid. The conveying device 50 is mainly composed of a valve body seat 51, a valve body cover 52, a valve body film 53, a plurality of temporary storage chambers, an actuating device 54, a cover body 55 and a flow channel plate 56. In the embodiment of the present disclosure, in the example of 1332557 The fluid delivery device 50 is assembled in the same manner to sequentially stack the valve body seat 51, the flow path plate 56, the valve body film 53, the valve body cover 52, the actuating device 54, and the cover body 55 to complete Assembly of the fluid delivery device 50 (as shown in Figure 5B). Please refer to FIG. 5A together with the sixth figure A and the seventh figure A, wherein the sixth figure A is the AA cross-sectional view of the fifth figure B, and the seventh figure A is the BB cross-sectional view of the fifth figure B. As shown, a pressure chamber 526 is also formed between the valve body cover 52 and the actuating device 54 for storing fluid. The actuating device 54 is assembled from a vibrating membrane 541 and an actuator 542. The valve body seat 51 has an inlet passage 511 for conveying external fluid into the fluid delivery device 50 and an outlet passage 512 for transferring fluid from the interior of the fluid delivery device 50 to external. The flow channel plate 56 has a plurality of inlet flow channels 561 and a plurality of outlet flow channels 562, and the inlet channels 511 are in communication with a plurality of inlet flow channels 561 (as shown in FIG. 6A), and the outlet channels 512 are plural The outlet manifold 562 is connected (as shown in FIG. 7A). A plurality of outlet temporary storage chambers 563 are formed between the valve body film 53 and the flow channel plate 56, and communicate with the outlet passage 512 of the wide body seat 51. The fluid is delivered from the outlet storage chamber 563 to the outlet passage 512 via an outlet manifold 562, and then out of the valve body seat 51, and has a groove 565 around the inlet runner passage 561 on the flow passage plate 56, and A groove 564 is formed around the periphery of the outlet temporary chamber 563 for providing a seal ring 57 (as shown in Figures 6A and 7A). The valve body cover 52 also has a plurality of 1332557 through the upper surface to the lower surface, an inlet door passage 521 and a plurality of outlet door passages 522, and each inlet valve passage 521 is disposed on each of the flow passage plates 56. An inlet branch passage 561 corresponds to a position, and each outlet valve passage 522 is disposed at a position corresponding to the outlet manifold 562 in each of the outlet temporary chambers 563 of the flow passage plate 56, and 'in this embodiment A plurality of inlet temporary storage chambers 523 are formed between the valve body film 53 and the valve body cover 52, and are not limited thereto. The upper surface of the valve body cover 52 corresponds to the inlet valve passage 521. The position is partially recessed and is connected to a plurality of inlet valve passages 521. The pressure chamber 526 is disposed corresponding to the actuator 542 of the actuator 54 that is coupled to the plurality of inlet chambers 523 via a plurality of inlet valve passages 521 and simultaneously with the plurality of outlet valve passages 522 Connected. In addition, the lower surface 528 of the valve body cover 52 has a groove 527 disposed around the pressure chamber 526, and the upper surface has a groove 524 disposed around the plurality of inlet temporary storage chambers 523, and a surrounding arrangement. In the groove 525 of the outlet valve passage 522, the groove structure is similarly provided for a sealing ring 58 (as shown in FIG. 6A and FIG. 7A). Referring to FIG. 5A, the valve body film 53 has a plurality of inlet valve structures 531 and a plurality of outlet valve structures 532. The plurality of inlet valve structures 531 respectively have an inlet valve piece 5313 and a plurality of surrounding inlets. The hollow hole 5312' provided around the valve plate 5313 is further provided with an extension portion 5311 connected to the inlet valve piece 5313 between the holes 5312, and the plurality of outlet valve structures 532 have an outlet valve piece 5323, 1332557 extension portion 5321 And the hole 5322, but the composition and operation of the inlet valve 'structure 531 and the outlet valve structure 532 of the present embodiment have been described in detail in the first preferred embodiment, and thus will not be described again. The thickness of the seal ring 57 disposed in the groove 565 of the flow path plate 56 is greater than the depth of the groove 565, so that the seal ring 57 disposed in the groove 565 protrudes from the lower surface of the flow path plate 56 to form a micro The convex structure, similarly, when the seal ring 58 is disposed in the groove 525 surrounding the outlet valve passage 522, since the seal ring 58 is disposed on the upper surface of the valve body cover 52, the seal ring 58 is a valve body The outlet wide door structure 532 of the film 53 projects upward to form a micro-convex structure that rises upwardly from the valve body cover 52. The remaining seal rings 58 and 57 and 59 respectively disposed in the groove structures 524, 527, and 564 and 513 are mainly used to respectively form the valve body seat 51 and the flow path plate 56, the valve body film 53, and the valve body film 53. When the valve body cover 52 and the valve body cover 52 are in close contact with the actuating device 54, the fluid is prevented from leaking out. Please refer to the sixth figure A, B, C and the seventh figure A, B, C. As shown, when the cover body 55, the actuating device 54, the valve body cover 52, the valve body film 53, the sealing ring 57 The inlet passage 511 on the valve body seat 51 and the plurality of inlet distributor passages 561 of the flow passage plate 56 and the plurality of inlets on the valve body film 53 are assembled. The valve structure 531 and the plurality of inlet valve passages 521 on the valve body cover 52 correspond to each other (as shown in FIG. 6A), and the outlet passage 512 on the valve body seat 51 is connected to the plurality of outlets of the flow passage plate 56. Lane 562, a plurality of outlet valve structures 532 on valve body membrane 53 and a plurality of outlet valve passages 522 on valve body cover 52 (as shown in Figure 7A), and are designated by 21 1332557. The sealing ring 57 is disposed in the groove 565' such that the inlet valve structure 531 of the valve body film 53 is slightly protruded from the lower surface of the flow path plate 56, and the valve body film is contacted by the sealing ring 57 located in the groove 565. 53 generates a pre-force (Preforce) effect, such that a plurality of inlet valve structures 531 form a gap on the lower surface of the flow passage plate 56 when not actuated. Similarly, the outlet valve structure 532 is also provided by the seal ring 58. The same manner as in the recess 525 forms a gap with the upper surface of the valve body cover 52. When the actuator 542 is driven by a voltage, the actuator 54 is bent and deformed as shown in Fig. B, actuated The device 54 is bent downwardly in the direction indicated by the arrow a so that the volume of the pressure chamber 526 is increased, thereby generating a suction force, so that the inlet valve structure 531 of the valve body film 53 and the outlet valve structure 532 are subjected to a downward pulling force. And opening the inlet valve piece 5313 of the inlet valve structure 531 having a pre-force (Preforce) (as shown in FIG. 6B), so that the liquid can be sucked in a large amount from the inlet passage 511 on the valve body seat 51. Come in and flow through the runner plate 56 An inlet shunt 561, a plurality of inlet valve structures 531 on the valve body film 53, a plurality of inlet temporary storage chambers 523, a plurality of inlet valve passages 521, and a plurality of inlet valve passages 521 flow into the pressure chamber 526. At this time, because the plurality of inlet valve structures 531 and the plurality of outlet valve structures 532 of the valve body film 53 are subjected to the downward pulling force, the plurality of outlet valve structures 532 at the other end are located at the valve due to the downward pulling force. A plurality of outlet valve plates 2323 on the body membrane 53 seal the corresponding outlet valve passages 522 such that all of the outlet valve structures 532 are closed, thereby preventing backflow of fluid (as shown in Figure 7B). When the moving device 54 is bent upward and deformed as the arrow b shown in FIG. 7C changes due to the change of the electric field direction, the volume of the pressure chamber 526 is compressed, so that the pressure chamber 526 generates a thrust to the internal fluid and causes the valve The plurality of inlet valve structures 531 and the plurality of outlet valve structures 532 of the body film 53 are subjected to an upward thrust. At this time, the sealing ring 58 disposed in the groove 525 is connected to the outlet valve structure 532. The outlet valve piece 5323 can be quickly opened (as shown in FIG. 7C), and the liquid is instantaneously vented, and the pressure chamber 526 passes through the plurality of outlet valve passages 522 and the valve body film respectively on the valve body cover 52. A plurality of outlets 532 of the outlet door structure 532, a plurality of outlet temporary storage chambers 563 and a plurality of outlet manifolds 562 on the flow path plate 56, such that the collected fluid passes through the outlet passage 512 on the valve body seat 51. The fluid delivery device 50 is out of the fluid delivery device 50, thereby completing the fluid transfer process, and the flow channel plate 56 has a plurality of inlet flow channels 561 and a plurality of outlet flow channels 562, so that the overall flow rate and lift of the fluid delivery device 50 can be greatly increased. increase. Similarly, at this time, since the plurality of inlet valve structures 531 are subjected to the upward thrust, the inlet valve piece 5313 is sealed to the corresponding inlet branch passage 561, thereby closing the inlet valve structure 531 so that the fluid does not flow backward (as shown in the sixth figure). C shows), and the sealing rings 57, 58 disposed in the grooves 565, 525 of the flow path plate 56 and the valve body cover 52 are engaged by a plurality of inlet valve knots 531 and a plurality of outlet valve structures 532. The design enables the fluid to flow without reflow during the transfer process, achieving high efficiency transmission. Please refer to the eighth figure, the ninth figure A and the tenth figure A, wherein the eighth figure is a structure of the fluid transport device of the third preferred embodiment of the present invention, and the ninth figure is the first 8A is a cross-sectional view of the AA, and FIG. 10A is a BB cross-sectional view of the eighth embodiment. As shown in the figure, the fluid delivery device 80 of the present embodiment is an embodiment in which multiple fluids are used, and the fluid delivery device 80 is used. Mainly consists of a valve body seat 81, a valve body cover 52, a valve body film 53, a plurality of temporary storage chambers, an actuating device 84, a cover body 85 and a flow channel plate 56, and the assembly method is also to sequentially valve The body block 81, the flow path plate 56, the valve body film 53, the valve body cover 52, the actuating device 84, and the cover body 85 are correspondingly stacked to complete the assembly of the fluid transfer device 80. The structure and operation of the valve body cover 52, the valve body film 53 and the flow channel plate 56 disclosed in this embodiment are the same as those of the second preferred embodiment shown in FIG. A, and thus will not be described again. . In this embodiment, the valve body seat 81 has a plurality of inlet passages 811 and a plurality of outlet passages 512, and the plurality of inlet passages 811 are not in communication with each other, and the plurality of outlet passages 512 are not in communication with each other. The runner plate 56 has a plurality of inlet runners 561 and a plurality of outlet headers 562, and each inlet channel 811 is in communication with only a single inlet runner 561 (as shown in FIG. 9A), and each outlet passage 812 It is also only in communication with a single outlet manifold 562 (as shown in Figure 11A). The plurality of outlet temporary storage chambers 563 formed between the valve body film 53 and the flow path plate 56 are respectively connected to one of the outlet passages 812 of the wide body seat 81, and the plurality of inlet valve passages on the valve body cover 52 521 and a plurality of outlet valve passages 522, each inlet valve passage 521 is disposed at a position corresponding to each inlet branch passage 561 of the flow passage plate 56, and each 1332557 • outlet valve passage 522 is disposed at the flow passage The position of the outlet manifold 562 in the temporary storage chamber 563 of the plate 56 corresponds to the position, and in the present embodiment, the valve body thin 臈 53 and the valve body cover 52 form a plurality of entrances. The reservoir 523' is in communication with a plurality of inlet valve passages 521, respectively. Referring to FIG. 9A and FIG. 10A again, the actuating device 84 is assembled from a vibrating membrane 841 and a plurality of actuators 842 such that a plurality of valve body covers 52 and the actuating device 84 are formed. The pressure chamber 526, wherein the plurality of pressure chambers 526 are not in communication with each other, so that the fluid delivery device 8 of the present embodiment can be divided into a plurality of parts as shown in FIG. 3A and FIG. The actuator chamber 80, wherein the fluid delivery device 80 of the present embodiment can be divided into six independent actuation chambers, and each actuator 842 is driven by a voltage of the same vibration frequency. Referring to the ninth diagram B and the tenth diagram B, when all the actuators 842 are driven at the same vibration frequency, the actuator 84 generates a bending deformation, as shown in the ninth diagram B, the actuator unit 84 is directed toward the arrow. The direction indicated by the number a is stunned downwards so that the volume of each pressure chamber 526 is increased, which will cause all of the inlet valve structures 531 to open and pass through the corresponding inlet passage 811 JL . The port runner 562 draws fluid into the cavity (as shown in Figure IX), at which point the outlet valve structure 532 is more tightly closed to avoid fluid backflow (e.g., tenth beta *, 叮 not)' The actuating relationship has been described in the above third figure and the fourth figure, and will not be described again here. Otherwise, please refer to the ninth figure C and the tenth figure C. When all the actuators 84 change the direction of the electric field, the arrow b shown in the tenth figure C bends the shovel upwards, db y, ' Compressing the volume of each of the dust chambers 526 such that the pressure 25 1332557 - chamber 526 produces a thrust on the internal fluid that will cause all of the outlet valve structures 532 to open and correspondingly, exit the temporary chamber 563, the outlet The manifold 562 and the outlet passage 812 discharge fluid (as shown in FIG. 10C), at which time all inlet valve structures 531 are more tightly closed (as shown in FIG. 9C), avoiding fluid backflow, and the detailed actuation relationship has been The description is given in the above FIG. 3B and the fourth figure B, and details are not described herein again. In summary, the fluid conveying device with the flow channel plate in the present case is mainly 0. The flow channel plate can be expanded into one-in-one-out, multiple-in-one-out, one-in-out-out, multi-in and multi-out forms, and the fluid is more easily provided. To the inlet runner and enable the outlet fluid to be efficiently collected into the outlet passage. In addition, the overall design of the fluid transfer device uses a long-shaped cabin, which corresponds to a long strip of vibrating membrane and actuators, which greatly increases the flow rate and lift. In addition, the flow channel plate structure cooperates with a plurality of inlet split channels, a plurality of outlet bus channels or a temporary storage cavity and a plurality of valve structure configurations thereof, and can provide a plurality of fluid passages into and out of the cavity, reducing fluid remaining inside the cavity The cycle causes the kinetic energy of the φ actuator to be converted to kinetic energy of the fluid of the fluid delivery device with higher efficiency. Therefore, the fluid conveying device with the runner plate in this case is of great industrial value, and the application is made according to law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 26 1332557 [Simple description of the diagram] Figure: It is a schematic diagram of the structure of the conventional micro-pump structure. Figure A is a schematic view showing the same structure of the fluid wheel of the first preferred embodiment of the present invention. Structure of Figure 1 Figure B. It is the back side of the runner plate shown in Figure 2a.
第一圖C.其係為第二圖A所示之閥體蓋體之 社 意圖。 η叫、.，〇攝不 第一圓D.其係為第二圖Α所示之入口閥門結構開啟示意 閥門結構開啟示意 第二圖E:其係為第二圖A所示之出口 圖0 第=圖F:其係為第二圖a組裝完成後之結構示意圖。 第，圖a係為本案第二圖示之流體輸送裝置之未作動 狀態之A-A剖面示意圖。 第二圓B:其係為第三圖A之壓力腔室膨脹狀態示意圖。 第三圖C:其係為第三圖A之壓力腔室壓縮狀態示意圖。 第四圖A.其係為本案第二圖f所示之流體輸送裝置之未 作動狀態之B-B剖面示惠圖。 第四圖B:其係為第四圖4之壓力腔室壓縮狀態示意圖。 第四圖C:其係為第四圖4之壓力腔室膨脹狀態示意圖。 第五圖A.其係為本案第二較佳實施例之流體輸送裝置之 分解結構示意圖。 第五圖B:其係為第五圖A之組裝完成後之結構示意圖。 27 U32557 第/、圖A係為本案第五圖b所示之流體輸送裝置之未作動 狀態之A-A剖面示意圖。 第六圖B:其係為第六圖a之壓力腔室膨脹狀態示意圖。 第六圖C:其係為第六圖a之壓力腔室壓縮狀態示意圖。 第七:圖A·其係為本案第五圖b所示之流體輸送裝置之未 作動狀態之B-B剖面示意圖。 第七圖B:其係為第七圖a之壓力腔室壓縮狀態示意圖。 • 第七圖C:其係為第七圖A之壓力腔室膨脹狀態示意圖。 第八圖：其係為本案第三較佳實施例之流體輸送裝置之結 構示意圖》 第九圖A:其係為本案第八圖所示之流體輸送裝置之未作 動狀態之A-A剖面示意圖。 第九圖B:其係為第九圖a之壓力腔室膨脹狀態示意圖。 第九圖C:其係為第九圖A之壓力腔室壓縮狀態示意圖。 第十圖A:其係為本案第八圖所示之流體輸送裝置之未作 鲁動狀態之B-B剖面示意圖。 第十圖B:其係為第十圖a之壓力腔室壓縮狀態示意圖。 第十圖C:其係為第十圖a之壓力腔室膨脹狀態示意圖。 28 1332557The first figure C. is the intention of the valve body cover shown in Fig. A. η叫,.,〇〇不第一第一圆 D. It is the inlet valve structure shown in the second figure 开启Opening the schematic valve structure opening diagram second diagram E: it is the exit diagram shown in the second diagram A Fig. F: Fig. F is a schematic structural view of the second figure a after assembly. Figure a is a schematic cross-sectional view of the A-A of the unactuated state of the fluid delivery device of the second embodiment of the present invention. Second circle B: It is a schematic diagram of the expansion state of the pressure chamber of the third figure A. Figure 3C is a schematic view showing the compression state of the pressure chamber of Figure 3A. Fig. 4A is a B-B cross-sectional view showing the unactuated state of the fluid delivery device shown in Fig. f of the second embodiment of the present invention. Figure 4B is a schematic view showing the compression state of the pressure chamber of the fourth Figure 4. Figure 4C is a schematic view showing the state of expansion of the pressure chamber of the fourth Figure 4. Figure 5 is a schematic exploded view of the fluid delivery device of the second preferred embodiment of the present invention. Figure 5B is a schematic view of the structure after the assembly of the fifth figure A is completed. 27 U32557 Section /, Figure A is a schematic view of the A-A section of the fluid delivery device shown in Figure 5b of the present case. Figure 6B is a schematic view showing the state of expansion of the pressure chamber of Figure 6a. Figure 6C is a schematic view showing the compression state of the pressure chamber of Figure 6a. Seventh: Fig. A is a schematic cross-sectional view of the B-B of the fluid transporting device shown in Fig. 5b of the present invention. Figure 7B is a schematic view showing the compression state of the pressure chamber of Figure 7a. • Figure 7C: This is a schematic diagram of the expansion of the pressure chamber in Figure 7A. Fig. 8 is a schematic view showing the structure of the fluid transporting device of the third preferred embodiment of the present invention. Fig. 9A is a schematic cross-sectional view showing the A-A of the fluid transporting device shown in Fig. 8 of the present invention. Figure 9B is a schematic view showing the state of expansion of the pressure chamber of the ninth diagram a. Figure 9C is a schematic view showing the compression state of the pressure chamber of Figure 9A. Fig. A is a schematic view showing the B-B cross section of the fluid transporting device shown in Fig. 8 of the present invention in an unruled state. Figure 11B is a schematic view showing the compression state of the pressure chamber of the tenth diagram a. Fig. C is a schematic view showing the state of expansion of the pressure chamber of the tenth diagram a. 28 1332557
【主要元件符號說明】 微果浦結構·· 1 〇 閥體座：11、21、51、81 入口通道：111、211、511、811 出 口通道：112、212、512、812 閥體蓋體：12、22、52 入口閥片通道：121 出口閥片通道：122 壓力腔室.·123、226、526 閥體薄膜：13、23、53 微致動器：14 入口閥門結構：131、231、531 出口閥門結構：132、232、532 蓋體：15、25、55、85 流體輸送裝置：20、50、80 上表面·· 220、260 下表面：228、266 入口閥門通道：221、521 出口閥門通道：222、522 入口暫存腔：223、523 入口閥片：2313、5313 凹槽：224、225、227、264、265、213、513、524、525、 527、564、565 出 口閥片：2323、5323 致動裝置：24、54、84 延伸部=2311、2321、5311、5321 孔洞：2312、2322、5312、5322 振動薄膜：241、54卜841 致動器：242、542、842 流道板：26、56 入口分流道：261、561 出口匯流道.262、562 出口暫存腔：263、563 密封環：27、28、29、57、58、59 方向·· a、b、X 29[Main component symbol description] Micro-Pore structure·· 1 〇 Valve body seat: 11, 21, 51, 81 Entrance channel: 111, 211, 511, 811 Exit channel: 112, 212, 512, 812 Body cover: 12, 22, 52 inlet valve channel: 121 outlet valve channel: 122 pressure chamber. · 123, 226, 526 valve body film: 13, 23, 53 micro actuator: 14 inlet valve structure: 131, 231, 531 Outlet valve structure: 132, 232, 532 Cover: 15, 25, 55, 85 Fluid conveying device: 20, 50, 80 Upper surface · · 220, 260 Lower surface: 228, 266 Inlet valve passage: 221, 521 Exit Valve channel: 222, 522 inlet temporary cavity: 223, 523 inlet valve plate: 2313, 5313 groove: 224, 225, 227, 264, 265, 213, 513, 524, 525, 527, 564, 565 outlet valve : 2323, 5323 Actuator: 24, 54, 84 Extensions = 2311, 2321, 5311, 5321 Holes: 2312, 2322, 5312, 5322 Vibration film: 241, 54 841 Actuator: 242, 542, 842 flow Road board: 26, 56 inlet runner: 261, 561 exit manifold. 262, 562 exit temporary cavity: 263, 56 3 Sealing ring: 27, 28, 29, 57, 58, 59 direction ·· a, b, X 29