200944677 九、發明說明： •【發明所屬之技術領域】 本案係關於一種流體輸送裝置，尤指一種具有流道板 之流體輸送裝置。 【先前技術】 目前於各領域中無論是醫藥、電腦科技、列印、能源 $ 等工業，產品均朝精緻化及微小化方向發展，其中微泵 浦、喷霧器、喷墨頭、工業列印裝置等產品所包含之流體 輸送結構為其關鍵技術，是以，如何藉創新結構突破其技 術瓶頸，為發展之重要内容。 請參閱第一圖，其係為習知微泵浦結構之結構示意 圖，習知微泵浦結構10係由閥體座11、閥體蓋體12、閥 體薄膜13、微致動器14及蓋體15所組成，其中，閥體薄 I 膜13係包含入口閥門結構131及出口閥門結構132,閥體 座11包含入口通道111及出口通道112、閥體蓋體12與 微致動器14間定義形成一壓力腔室123，閥體薄膜13設 置在閥體座11與閥體蓋體12之間。 當一電壓作用在微致動器14的上下兩極時，會產生 一電場，使得微致動器14在此電場之作用下產生彎曲， 當微致動器14朝箭號X所指之方向向上彎曲變形，將使 • 得壓力腔室123之體積增加，因而產生一吸力，使閥體薄 * 膜13之入口閥門結構131開啟，使液體可自閥體座11上 6 200944677 .之入口通道111被吸取進來，並流經閥體薄膜13之入口 ,閥門結構131及閥體蓋體12上之入口閥片通道121而流 入壓力腔室123内，反之當微致動器14因電場方向改變 而朝箭號X之反方向向下彎曲變形時，則會壓縮壓力腔室 123之體積，使得壓力腔室123對内部之流體產生一推力， 並使閥體薄膜13之入口閥門結構131、出口閥門結構132 承受一向下推力，而出口閥門結構132將開啟，並使液體 _ 由壓力腔室123經由閥體蓋體12上之出口閥門通道122、 閥體薄膜13之出口閥門結構132，而從閥體座Π之出口 通道112流出微泵浦結構10外，因而完成流體之傳輸過 程0 雖然習知微泵浦結構10能夠達到輸送流體的功能， 但是其係使用單一致動器配合單一壓力腔室、單一流通管 道、單一進出口以及單一對的閥門結構設計，若要使用微 泵浦結構10來提升流量，必須利用銜接機構將多個微幫 Φ 浦結構10進行連接並堆疊設置，然而此種連接方式除了 需額外耗費銜接機構之成本外，多個微泵浦結構10所組 合起來的體積將過大，使得最終產品之體積增加而無法符 合微小化之趨勢。 因此，如何發展一種可改善上述習知技術缺失之具有 流道板之流體輸送裝置，實為目前迫切需要解決之問題。 - 【發明内容】 • 本案之主要目的在於提供一種具有流道板之流體輸 7 200944677 -送裝置’俾解決以習知微泵浦結構來提升流量時，必須利 .用銜接機構將多個微幫浦結構進行連接並堆疊設置，將額 外耗費銜接機構之成本’且多個微泵浦結構所組合起來的 體積過Λ ’無法符合產浼微小化之趨勢等缺點。 為達上述目的，本索之一較廣義實施樣態為提供一種 具有流道板之流體輸送浆置’用以傳送流體，其係包含： 閥體座，其係具有至少〆出口通道及至少一入口通道；流 道板，其係具有兩侧面，以及貫穿兩側面之複數個入口分 ® 流道及複數個出口匯流道；閥體蓋體，其與流道板相互堆 疊結合；閥體薄膜，其係設置於流道板及閥體蓋體之間， 且具有複數個閥門結構；複數個暫存室，設置於閥體薄膜 與閥體蓋體之間，以及於閥體薄膜與流道板之間；以及振 動裝置’其係具有振動薄膜及至少一致動器，且週邊係固 設於閥體蓋體，並與閥艘蓋體定義出至少一壓力腔室。 為達上述目的，本案之另一較廣義實施樣態為提供一 參 種具有流道板之流體輸送裝置’用以傳送流體’其係包 含：闕體摩’其係具有出口通道及入口通道；流道板’其 係具有兩供I面’以及貫穿兩侧面之入口分流道及出口匯流 道；閥體墓體，其與流道板相互堆疊結合上；闕體薄臈， 其係設置於流道板及閥體蓋體之間，且異有第/閥門結構 及第二閥門結搆；複數個暫存室，設置於閥體薄膜與閥體 蓋體之間，以及於閥體薄膜與流道板之間；以及振動裝 置，其係兵有振動薄膜及單一致動器，且週邊係固設於閥 -體蓋體，拉與闕體蓋體定義出單一壓力腔室。 8 200944677 •【實施方式】 * 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 本案之流體輸送裝置可適用於醫藥生技、電腦科技、 列印或是能源等工業，且可為但不限為輸送氣體或是液 參 體，主要係藉由增加流道板的設計可擴充成一進一出、多 進一出、一進多出以及多進多出的形式，較易使流體均勻 提供至入口分流道，並能使出口流體有效匯集至出口通 道。除此之外，流體輸送裝置整體設計採用長條形艙體， 其對應長條形之振動薄膜及致動器，可使流速及揚程大為 增加，非常適合用於流速及揚程需求相對較高之應用場 合。 請參閱第二圖A，其係為本案第一較佳實施例之流體 ® 輸送裝置之結構示意圖，如圖所示，本實施例之流體輸送 裝置20係為使用一進一出的實施態樣，流體輸送裝置20 主要係由閥體座21、闕體蓋體22、閥體薄膜23、複數個 暫存室、致動裝置24、蓋體25及流道板26所組成，其中 在閥體蓋體22及致動裝置24之間形成一壓力腔室226(如 第二圖C所示），主要用來儲存流體。 . 流體輸送裝置20之組裝方式係將流道板26設置於閥 體座21與閥體薄膜23之間，而閥體薄膜23則設置於流 9 200944677 -道板26及閥體蓋體22之間，並使閥體薄膜23與流道板 ,26及閥體蓋體22相對應設置，且在閥體薄膜23與閥體蓋 體22之間形成一第一暫存室，而在閥體薄膜23與流道板 26之間形成一第二暫存室，並且於閥體蓋體22上之相對 應位置更設置有致動裝置24，致動裝置24係由一振動薄 膜241以及一致動器242組裝而成（如第三圖A及第四圖 A所示），用以驅動流體輸送裝置20之作動，最後，依序 巍 將閥體座21、流道板26、閥體薄膜23、閥體蓋體22、致 動裝置24及蓋體25相對應堆疊設置，以完成流體輸送裝 置20之組裝（如第二圖F所示）。 其中，閥體座21、流道板26及閥體蓋體22係為本案 流體輸送裝置20中導引流體進出之主要結構，請參閱第 二圖A並配合第三圖A及第四圖A，其中第三圖A係為第 二圖F所示之流體輸送裝置組裝完成之A-A剖面圖，第四 圖A係為第二圖F示之流體輸送裝置組裝完成之B-B剖面 ❿ 圖，如圖所示，閥體座21係具有一個入口通道211以及 出口通道212，入口通道211係用以使外部之流體輸送至 流體輸送裝置20内，而出口通道212則是將流體由流體 輸送裝置20之内部傳送至外部。 請參閱第二圖A、第二圖B並配合第三圖A及第四圖 A，其中第二圖B係為第二圖A所示之流道板的背面結構 示意圖，如圖所示，流道板2 6係具有單一個入口分流道 261以及單一個出口匯流道262，且入口通道211與入口 * 分流道261相連通（如第三圖A所示），而出口通道212 200944677 則與出口匯流道262連通（如第四圖A所杀換言之’ 當流體輸送裝置2G組裝完成時’入口分流3^ 261可透過 入口通道211與外界連通，<將流體由外界输人’而出口 匯流道262則可透過出口通道212與外界連通，可將流體 由流體輸送裝置20内部輸出系外界。 龙且，於本實施例中，闕體薄膜23及流道板26之間 所形成的第二暫存室即為圖中所示之出口暫存腔263 ’ ί ❿ 不以此為限，其係由流道板26之下表面2m 、曾⑽相對應之位置產生部分凹陷而形成’炎 ^出口通道212相連通，該出口暫存腔263係用以暫時儲 在U使該流體由出Π暫存腔263㈣^出口匯流道 二輸送至出口通道212’再流出間體座21 :外。二: 在泣道板26上更具有複數個凹槽結構’用以供一密封環 27^第三圖Α及第四圖Α所示）設置於其上，於本實施例 中，流道板26之下表面㈣有環繞人口分流道261週邊 之凹槽265，及環繞於出口暫存腔263週邊之凹槽264。 噴參聞第二® aU c並配合第三®八及第四圖 A，其中第二圖C係為第二圖A所示之闕體蓋體之背面結 構示意圖，如圖所示，闕體蓋體22係具有^上表面220 及一下表面228,以及在闕體蓋座22上亦具有貫穿上表面 220裏下表面228之第〆閥門通道及一第二_通道，於 本實施例中’第-閥門通道係為-入口闊門通道221 ’第 二_通道係為-出口闕通道222，真該入口闕門通道 221係設置於與流道板26之入口分流道261相對應之位 200944677 置，而出口闕門通道222則設置於與流道板26之出口暫 存腔263内之出口匯流道262相對應之位置，並且，於本 實施例中’閥體薄膜23及閥體蓋體22之間所形成之第一 暫存室即為圖中所示之入口暫存腔223，且不以此為限’ 其係由閥體蓋體22之上表面220於與入口間門通道221 相對應之位置產生部份凹陷而形成，且其係連通於入口閥 門通道221。200944677 IX. Description of the invention: • [Technical field to which the invention pertains] The present invention relates to a fluid delivery device, and more particularly to a fluid delivery device having a flow channel plate. [Prior Art] At present, in various fields, such as medicine, computer technology, printing, energy, etc., the products are developing in the direction of refinement and miniaturization, among which micro pump, sprayer, inkjet head, industrial column The fluid transport structure contained in products such as printing devices is its key technology. It is how to break through its technical bottleneck with innovative structure and is an important part of development. Please refer to the first figure, which is a schematic structural view of a conventional micro-pump structure. The conventional micro-pump structure 10 is composed of a valve body seat 11, a valve body cover 12, a valve body film 13, a microactuator 14 and The cover body 15 is composed of a valve body thin film 13 including an inlet valve structure 131 and an outlet valve structure 132. The valve body seat 11 includes an inlet passage 111 and an outlet passage 112, a valve body cover 12 and a microactuator 14. A pressure chamber 123 is defined therebetween, and a valve body film 13 is disposed between the valve body seat 11 and the valve body cover 12. When a voltage is applied to the upper and lower poles of the microactuator 14, an electric field is generated, causing the microactuator 14 to bend under the action of the electric field, as the microactuator 14 is directed upward in the direction indicated by the arrow X. The bending deformation will increase the volume of the pressure chamber 123, thereby generating a suction force, so that the inlet valve structure 131 of the membrane body is opened, so that the liquid can be supplied from the valve body seat 6 to the inlet passage 111 of the 200944677. It is sucked in and flows through the inlet of the valve body film 13, the valve structure 131 and the inlet valve passage 121 on the valve body cover 12 to flow into the pressure chamber 123, and vice versa when the microactuator 14 changes direction due to the electric field. When the deformation is downwardly deformed in the opposite direction of the arrow X, the volume of the pressure chamber 123 is compressed, so that the pressure chamber 123 generates a thrust to the internal fluid, and the inlet valve structure 131 and the outlet valve of the valve body film 13 are opened. The structure 132 is subjected to a downward thrust, and the outlet valve structure 132 will open and allow the liquid to pass from the pressure chamber 123 through the outlet valve passage 122 on the valve body cover 12, the outlet valve structure 132 of the valve body membrane 13, and the slave valve Body outlet The passage 112 exits the micropump structure 10, thereby completing the fluid transfer process. 0 Although the conventional micropump structure 10 is capable of delivering fluid, it uses a single actuator to fit a single pressure chamber, a single flow conduit, A single inlet and outlet and a single pair of valve structure design, in order to use the micro-pump structure 10 to increase the flow, the connection mechanism must be used to connect and stack multiple micro-pull structures 10, however, this connection requires additional In addition to the cost of the connection mechanism, the combined volume of the plurality of micropump structures 10 will be too large, so that the volume of the final product increases and cannot meet the trend of miniaturization. Therefore, how to develop a fluid transporting device having a flow path plate which can improve the above-mentioned conventional techniques is an urgent problem to be solved. - [Summary of the Invention] • The main purpose of this case is to provide a fluid transfer with a runner plate. 200944677 - Delivery device '俾 When solving the conventional micro-pump structure to increase the flow rate, it must be beneficial to use the connection mechanism to multi-micro The connection and stacking of the pump structure will cost the additional cost of the connection mechanism 'and the volume of the multiple micro-pumped structures combined' cannot meet the shortcomings of miniaturization. In order to achieve the above object, a generalized embodiment of the present invention provides a fluid transport slurry having a flow path plate for transferring a fluid, comprising: a valve body seat having at least an exit passage and at least one An inlet passage; a flow passage plate having two sides, and a plurality of inlet points and a plurality of outlet channels extending through the two sides; a valve body cover stacked on the flow path plate; the valve body film, The utility model is disposed between the flow channel plate and the valve body cover body and has a plurality of valve structures; a plurality of temporary storage chambers are disposed between the valve body film and the valve body cover body, and the valve body film and the flow channel plate And a vibrating device that has a vibrating membrane and at least an actuator, and the periphery is fixed to the valve body cover and defines at least one pressure chamber with the valve cover. In order to achieve the above object, another broad aspect of the present invention provides a fluid transport device having a flow path plate for transferring a fluid. The system includes: a body body having an outlet passage and an inlet passage; The board has two inlets I and a two-side inlet and outlet manifolds; the valve body is stacked on the flow channel; the body is thin and the system is disposed on the runner And the valve body cover body, and has a different valve structure and a second valve structure; a plurality of temporary storage chambers are disposed between the valve body film and the valve body cover body, and the valve body film and the flow path plate And the vibration device, which has a vibrating membrane and a single actuator, and the periphery is fixed to the valve body cover, and the pull and the body cover define a single pressure chamber. 8 200944677 • [Embodiment] * Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of The fluid delivery device of the present invention can be applied to industries such as medical technology, computer technology, printing or energy, and can be, but is not limited to, a gas or a liquid body, which is mainly expanded by increasing the design of the flow channel plate. In the form of one-in-one-out, one-in-one-out, one-in-out-out, and multiple-in and multiple-out, it is easier to uniformly supply fluid to the inlet splitter and enable the outlet fluid to be efficiently collected to the outlet passage. In addition, the overall design of the fluid conveying device adopts a long-shaped cabin, which corresponds to the long-shaped diaphragm and actuator, which can greatly increase the flow rate and the lift, and is very suitable for the flow rate and the head with relatively high demand. Application. Please refer to FIG. 2A , which is a schematic structural view of a fluid® conveying device according to a first preferred embodiment of the present invention. As shown in the figure, the fluid conveying device 20 of the present embodiment is an embodiment using one in and one out. The fluid delivery device 20 is mainly composed of a valve body seat 21, a body cover body 22, a valve body film 23, a plurality of temporary storage chambers, an actuating device 24, a cover body 25 and a flow channel plate 26, wherein the valve body cover A pressure chamber 226 (shown in Figure 2C) is formed between the body 22 and the actuator 24 for storing fluid. The fluid delivery device 20 is assembled by disposing the flow channel plate 26 between the valve body seat 21 and the valve body film 23, and the valve body film 23 is disposed in the flow 9 200944677 - the track plate 26 and the valve body cover 22 And the valve body film 23 is disposed corresponding to the flow path plate 26 and the valve body cover 22, and a first temporary storage chamber is formed between the valve body film 23 and the valve body cover 22, and the valve body is formed A second temporary storage chamber is formed between the membrane 23 and the flow channel plate 26, and an actuator 24 is further disposed at a corresponding position on the valve body cover 22. The actuation device 24 is composed of a vibrating membrane 241 and an actuator. 242 assembled (as shown in FIG. 3A and FIG. AA) for driving the fluid conveying device 20, and finally, the valve body seat 21, the flow path plate 26, the valve body film 23, The valve body cover 22, the actuating device 24 and the cover body 25 are correspondingly stacked to complete the assembly of the fluid delivery device 20 (as shown in the second Figure F). The valve body seat 21, the flow channel plate 26 and the valve body cover 22 are the main structures for guiding fluid in and out of the fluid transport device 20 of the present invention. Please refer to the second figure A and cooperate with the third figure A and the fourth figure A. The third figure A is the AA cross-sectional view of the assembly of the fluid transport device shown in FIG. F, and the fourth figure A is the BB cross-section of the fluid transport device shown in FIG. As shown, the valve body seat 21 has an inlet passage 211 for delivering external fluid to the fluid delivery device 20 and an outlet passage 212 for fluid flow from the fluid delivery device 20. Transfer to the outside internally. Please refer to the second figure A and the second figure B and cooperate with the third figure A and the fourth figure A, wherein the second figure B is a schematic view of the back structure of the flow channel board shown in the second figure A, as shown in the figure. The runner plate 26 has a single inlet runner 261 and a single outlet runner 262, and the inlet passage 211 is in communication with the inlet * split runner 261 (as shown in Figure 3A), while the outlet passage 212 200944677 is The outlet manifold 262 is connected (as in the fourth diagram A, in other words, when the fluid delivery device 2G is assembled), the inlet diversion 3^ 261 can communicate with the outside through the inlet passage 211, <the fluid is exchanged from the outside and the outlet is converged. The passage 262 can communicate with the outside through the outlet passage 212, and the fluid can be discharged from the inside of the fluid delivery device 20 to the outside. In this embodiment, the second formed between the body film 23 and the flow channel plate 26 is formed. The temporary storage chamber is the outlet temporary storage chamber 263' ί ❿ shown in the figure, which is not limited thereto, and is formed by a partial depression of the lower surface 2m of the flow passage plate 26 and the position corresponding to the previous (10). The outlet passage 212 is connected, and the outlet temporary storage chamber 263 is used for temporarily Stored in the U to transport the fluid from the exit buffer chamber 263 (four) ^ exit manifold 2 to the outlet channel 212' and then out of the block seat 21: outside. 2: more than a plurality of groove structures on the weeping plate 26 In the present embodiment, the lower surface (4) of the flow channel plate 26 has a groove 265 around the periphery of the population branching channel 261, in which the sealing ring 27^3 and the fourth figure are disposed. And a groove 264 surrounding the periphery of the exit temporary cavity 263. Spray the second ® aU c and cooperate with the third ® 8 and the fourth figure A, wherein the second figure C is the back structure of the carcass cover shown in the second figure A, as shown in the figure, the carcass The cover 22 has an upper surface 220 and a lower surface 228, and also has a second valve passage and a second passage through the lower surface 228 of the upper surface 220 on the body cover 22, in this embodiment The first valve passage is an inlet wide passage 221 'the second passage is an outlet passage 222, and the inlet passage 221 is disposed at a position corresponding to the inlet bypass 261 of the flow passage plate 26 200944677 The outlet shutter passage 222 is disposed at a position corresponding to the outlet manifold 262 in the outlet temporary chamber 263 of the flow passage plate 26, and in the present embodiment, the valve body film 23 and the valve body cover The first temporary storage chamber formed between the two is the inlet temporary storage chamber 223 shown in the figure, and is not limited thereto. The upper surface 220 of the valve body cover body 22 is connected to the inlet door passage 221 The corresponding position is partially recessed and is connected to the inlet valve passage 221.
請再參閱第二圖C，如圖所示，閥體蓋體22之下表面 228係部份凹陷，以形成一壓力腔室226，其係與致動裝 置24之致動器242相對應設置，壓力腔室226係經由入 口閥門通道221連通於入口暫存腔223 ’並同時與出口閥 門通道222相連通，因此，當致動器242受電壓致動使致 動裝置24朝蓋體25方向凸出變形’造成壓力腔室226之 體積膨脹而產生負壓差，玎使流體經入口閥門通道221流 至壓力腔室226内（如第三圖A及第四圖A所示），其後’ 當施加於致動器242的電場方向改變後，致動器242將使 致動裝置24朝閥體蓋體22方向凹陷變形，壓力腔室226 將收縮而體積減小，使壓力腔室226與外界產生正壓力 差，促使流體由出口_通道222流出壓力腔室226之 外，於此同時，同樣有部分流體會流入入明門通道如 及入口暫存室223 N，然而由於此時的入口閥門結構如 係為使受壓而關閉的狀態’故該流會通過入口閥片 2313而產生倒流的現象二至於暫時儲 存於入π暫存腔223内之_，則於致動$ 242再受電壓 12 200944677 - 致動，重複使致動裝置24再變形而增加壓力腔室226體 •積時，再由入口暫存腔223經至入口閥門通道221而流入 壓力腔室226内，以進行流體的輸送。 另外，閥體蓋體22上同樣具有複數個凹槽結構，以 本實施例為例，在閥體蓋體22之下表面228係具有環繞 壓力腔室226而設置之凹槽227，而在上表面220上則具 有環繞設置於入口暫存腔223之凹槽224、環繞設置於出 Φ 口閥門通道222之凹槽225，同樣地，上述凹槽結構係用 以供一密封環28(如第三圖A及第四圖A所示）設置於其 中〇 請參閱第二圖A並配合第二圖D及第二圖E，其中第 二圖D其係為第二圖A所示之入口閥門結構開啟示意圖， 第二圖E其係為第二圖A所示之出口闊門結構開啟示意 圖，如第二圖A所示，閥體薄膜23主要係以傳統加工、 或黃光蝕刻、或雷射加工、或電鑄加工、或放電加工等方 φ 式製出，且為一厚度實質上相同之薄片結構，其上係具有 第一閥門結構以及第二閥門結構，於本實施例中，第一闊 門結構係為入口閥門結構231，而第二閥門結構係為出口 閥門結構232，其中，入口閥門結構231係具有入口閥片 2313以及複數個環繞入口閥片2313週邊而設置之鏤空孔 洞2312，另外，在孔洞2312之間更具有與入口閥片2313 相連接之延伸部2311，當閥體薄膜23承受一自壓力腔室 226傳遞而來向上之應力時，如第三圖C所示，入口閥門 * 結構231係整個向上平貼於流道板26之上，此時入口閥 13 200944677 .片2313會緊靠凹槽265上密封環27突出部分’而密封住 流道板26上之入口分流道261，且其外圍的鏤空孔洞2312 及延伸部231丨則順勢浮貼於流道板26之上’故因此入口 閥門結構231之關閉作用，使流體無法流出。 而當閥體薄膜23受到壓力腔室226體積增加而產生 之吸力作用下’由於設置於流道板26之凹槽265内的密 封環27已提供入口閥Π結構23! 一預力（Preforce)，因 而入口闕片2313可藉由延伸部2311的支撐而產生更大之 β預蓋緊蛛果，以防止逆流，當因慶力腔室226之負壓而使 入口闕門結構231往下產生位择（如第二圖D所不）’此 時，流雜則可經由鏤空之孔洞23丨2由流道板26流至闊體 蓋體22之入口暫存腔223,並鎵由入口暫存腔223及入口 閥門通道221傳送至壓力腔室226内，如此一來，入口閥 門結構231即可因應壓力腔室226產生之正負壓力差而迅 速的開啟或關閉，以控制流體之進出，並使流體不會回流 參 至流道板26上。 同樣地，位於同一闕體薄勝23上的另一閥門結構則 為出cj閥門結構232,其中之出口閥片2323、延伸部2321 以及孔洞2322之作動方式均與八口閥門結構231相同’ 因而不再贅述’惟出口閥門結構232週邊之密封環28設 置方向係與入口閥門結構231之密封環27反向設置，如 第二_ 第四圖A所示，因而當壓力腔室226壓縮而產 生一推力時，設置於閥體蓋體22之凹槽225内的密封環 • 28將提供出口閥門結構232 —确力（Preforce) ’使得出口 200944677 -閥片2323可藉由延伸部2321之支撐而產生更大之預蓋緊 效果’以防止逆流’當因壓力腔室226之正壓而使出口閥 門結構232往上產生位移’此時，流體則可經由鏤空之孔 洞2322由>1力腔室226經閥體蓋體22而流至流道板26 之出口暫存腔263内，並可經由出口匯流道262及出口流 道212排出，如此一來，則可經由出口閥門結構232開啟 之機制，將流體自壓力腔室226内洩出，以達到流體輸送 I 之功能。 請參閱第三圖A及第四圖A’其中第三圖A係為本案 第二圖F所示之流體輸送裝置之未作動狀態之A-A剖面示 意圖，第四圖A係為本案第二圖F所示之流體輸送裝置之 未作動狀態之B-B剖面示意圖’於本實施例中，所有的凹 槽結構224、225、227分別設置密封環28，而凹槽264、 265内亦分別設置密封環27，其材質係為可耐化性佳之橡 膠材料，且不以此為限，其中，設置於流道板26上之凹 ❹ 槽265内的密封環27可為一圓環結構’其厚度係大於凹 槽265深度，使得設置於凹槽265内之密封環27係部分 凸出於流道板26之下表面266構成一微凸結構，因而使 得貼合設置於流道板26上之閥體薄膜23之入口閥門結構 231之入口閥片2313因密封環27之微凸結構而形成一向 下隆起，而閥體薄膜23之其餘部分係與閥體蓋體22相抵 頂，如此微凸結構對入口閥門231頂推而產生一預力 (Preforce)作用，有助於產生更大之預蓋緊效果，以防止 逆流，且由於密封環27隆起之微凸結構係位於閥體薄膜 15 200944677 -23之入口閥門結構231處，故使入口閥門結構231在未作 .動時使入口閥片2313與流道板26之下表面266之間具有 一間隙，同樣地，當密封環28設置於環繞出口閥門通道 222之凹槽225内時，由於其密封環28係設置於閥體蓋體 22之上表面220，因而該密封環28係使閥體薄膜23之出 口閥門結構232向上凸出而形成一向上隆起於閥體蓋體22 之微凸結構，此微凸結構僅其方向與形成於入口閥門結構 Α 231之微凸結構係為反向設置，然而其功能均與前述相 擊 同，因而不再贅述。至於其餘分別設置於凹槽結構224、 227及264及213内之密封環28及27及29，主要用來分 別使閥體座21與流道板26、閥體薄膜23、閥體薄膜23 與閥體蓋體22以及閥體蓋體22與致動裝置24之間緊密 貼合時，防止流體外洩。 當然，上述之微凸結構除了使用凹槽及密封環來搭配 形成外，於一些實施例中，流道板26及閥體蓋體22之微 φ 凸結構亦可採用半導體製程，例如：黃光蝕刻或鍍膜或電 鑄技術，直接在流道板26及閥體蓋體22上形成。 請同時參閱第三圖A、B、C及第四圖A、B、C，如圖 所示，當蓋體25、致動裝置24、閥體蓋體22、閥體薄膜 23、密封環27、28、流道板26以及閥體座21彼此對應組 裝設置後，閥體座21上之入口通道211係與流道板26之 入口分流道26卜閥體薄膜23上之入口閥門結構231以及 ' 閥體蓋體22上之入口閥門通道221相對應（如第三圖A ^ 所示），且閥體座21上之出口通道212係與流道板26之 16 200944677 ΦReferring again to FIG. 2C, as shown, the lower surface 228 of the valve body cover 22 is partially recessed to form a pressure chamber 226 that is disposed corresponding to the actuator 242 of the actuator 24. The pressure chamber 226 communicates with the inlet temporary chamber 223' via the inlet valve passage 221 and simultaneously communicates with the outlet valve passage 222. Thus, when the actuator 242 is actuated by the voltage, the actuator 24 is directed toward the cover 25. The bulging deformation causes the volume of the pressure chamber 226 to expand to create a negative pressure differential, causing fluid to flow through the inlet valve passage 221 into the pressure chamber 226 (as shown in Figure 3A and Figure A below), thereafter When the direction of the electric field applied to the actuator 242 is changed, the actuator 242 will sag the actuator 24 toward the valve body cover 22, and the pressure chamber 226 will contract to reduce the volume, causing the pressure chamber 226 A positive pressure difference is generated from the outside, causing the fluid to flow out of the pressure chamber 226 from the outlet_channel 222. At the same time, some of the fluid will also flow into the open door channel, such as the inlet temporary chamber 223 N, but due to this time The inlet valve structure is in a state of being closed to be pressed Therefore, the flow will pass through the inlet valve piece 2313 to generate a reverse flow phenomenon 2 to temporarily store in the π temporary storage chamber 223, and then actuate the $ 242 and then be actuated by the voltage 12 200944677 - to repeatedly actuate the actuating device 24 When the deformation of the pressure chamber 226 is increased, the inlet chamber 223 passes through the inlet valve passage 221 and flows into the pressure chamber 226 to carry out fluid transportation. In addition, the valve body cover 22 also has a plurality of groove structures. In the embodiment, the lower surface 228 of the valve body cover 22 has a recess 227 disposed around the pressure chamber 226. The surface 220 has a groove 224 disposed around the inlet temporary cavity 223 and a groove 225 disposed around the Φ port valve passage 222. Similarly, the groove structure is used for a sealing ring 28 (eg, The three figures A and the fourth figure A are disposed therein. Please refer to the second figure A and cooperate with the second figure D and the second figure E, wherein the second figure D is the inlet valve shown in the second figure A. FIG. 2 is a schematic diagram showing the opening of the outlet wide door structure shown in FIG. A. As shown in FIG. 2A, the valve body film 23 is mainly processed by conventional processing, or yellow etching, or thunder. The first valve structure and the second valve structure are formed by the first valve structure and the second valve structure, in the embodiment, the first valve structure and the second valve structure are formed by the film processing, or the electroforming process, or the electric discharge machining. A wide door structure is an inlet valve structure 231, and a second valve structure is an outlet The valve structure 232, wherein the inlet valve structure 231 has an inlet valve piece 2313 and a plurality of hollow holes 2312 disposed around the periphery of the inlet valve piece 2313, and further has an extension connecting the inlet valve piece 2313 between the holes 2312. The portion 2311, when the valve body film 23 is subjected to an upward pressure transmitted from the pressure chamber 226, as shown in FIG. 3C, the inlet valve* structure 231 is entirely flatly attached to the flow path plate 26, When the inlet valve 13 200944677. The piece 2313 will abut the protruding portion of the sealing ring 27 on the groove 265 to seal the inlet branching passage 261 on the flow channel plate 26, and the hollow hole 2312 and the extension portion 231 of the periphery thereof will float. It is attached to the flow path plate 26 so that the closing action of the inlet valve structure 231 prevents the fluid from flowing out. When the valve body film 23 is subjected to the suction generated by the volume increase of the pressure chamber 226, the inlet valve Π structure 23 is provided by the seal ring 27 provided in the groove 265 of the flow path plate 26! A preforce Therefore, the inlet cymbal 2313 can generate a larger β pre-covering spider by the support of the extension 2311 to prevent backflow, and the inlet shovel structure 231 is generated downward due to the negative pressure of the qingli chamber 226. Position selection (as shown in the second figure D) 'At this time, the flow can be flowed from the flow channel plate 26 to the inlet temporary cavity 223 of the wide body cover 22 via the hollow hole 23丨2, and the gallium is temporarily opened by the inlet. The chamber 223 and the inlet valve passage 221 are transferred into the pressure chamber 226, so that the inlet valve structure 231 can be quickly opened or closed according to the positive and negative pressure difference generated by the pressure chamber 226 to control the flow in and out of the fluid, and The fluid is not allowed to flow back onto the flow channel plate 26. Similarly, another valve structure located on the same body thin win 23 is a cj valve structure 232 in which the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the eight-port valve structure 231. It is no longer described that the sealing ring 28 around the outlet valve structure 232 is disposed in the opposite direction to the sealing ring 27 of the inlet valve structure 231, as shown in the second to fourth Figure A, and thus is generated when the pressure chamber 226 is compressed. Upon a thrust, the seal ring 28 disposed within the recess 225 of the valve body cover 22 will provide the outlet valve structure 232 - Preforce ' such that the outlet 200944677 - the valve plate 2323 can be supported by the extension 2321 Producing a greater pre-covering effect 'to prevent backflow' when the outlet valve structure 232 is displaced upward due to the positive pressure of the pressure chamber 226', at which point the fluid can be forced through the hollow hole 2322 by > The chamber 226 flows through the valve body cover 22 into the outlet temporary cavity 263 of the flow channel plate 26 and can be discharged through the outlet manifold 262 and the outlet flow channel 212. Thus, the chamber 232 can be opened via the outlet valve structure 232. Mechanism, fluid The escape of the pressure chamber 226 to achieve the function I of fluid delivery. Please refer to the third figure A and the fourth figure A', wherein the third figure A is a schematic view of the AA cross-section of the fluid transport device shown in the second figure F of the present case, and the fourth figure A is the second figure F of the present case. BB cross-sectional view of the unactuated state of the fluid delivery device shown. In this embodiment, all of the groove structures 224, 225, 227 are respectively provided with a sealing ring 28, and a sealing ring 27 is also provided in the grooves 264, 265, respectively. The material is a rubber material which is excellent in chemical resistance, and is not limited thereto. The sealing ring 27 disposed in the recessed groove 265 of the flow path plate 26 may be a ring structure whose thickness is larger than The depth of the groove 265 is such that the sealing ring 27 disposed in the groove 265 protrudes from the lower surface 266 of the flow path plate 26 to form a micro-convex structure, thereby fitting the valve body film disposed on the flow path plate 26. The inlet valve piece 2313 of the inlet valve structure 231 of 23 forms a downward bulge due to the micro-convex structure of the sealing ring 27, and the remaining part of the valve body film 23 abuts against the valve body cover 22, so that the micro-convex structure pairs the inlet valve 231 pushes and produces a Preforce effect, which helps A greater pre-covering effect is produced to prevent backflow, and since the micro-convex structure of the seal ring 27 is located at the inlet valve structure 231 of the valve body film 15 200944677-23, the inlet valve structure 231 is not actuated. When there is a gap between the inlet valve piece 2313 and the lower surface 266 of the flow path plate 26, similarly, when the sealing ring 28 is disposed in the groove 225 surrounding the outlet valve passage 222, since the sealing ring 28 is disposed on The upper surface 220 of the valve body cover 22, such that the sealing ring 28 projects the outlet valve structure 232 of the valve body film 23 upward to form a micro-convex structure that rises upwardly from the valve body cover 22, and the micro-convex structure only The direction is opposite to that of the micro-convex structure formed on the inlet valve structure 231, however, the functions thereof are the same as those described above, and thus will not be described again. The remaining seal rings 28 and 27 and 29 respectively disposed in the groove structures 224, 227, and 264 and 213 are mainly used to respectively make the valve body seat 21 and the flow path plate 26, the valve body film 23, and the valve body film 23 When the valve body cover 22 and the valve body cover 22 are in close contact with the actuating device 24, fluid leakage is prevented. Of course, the above-mentioned micro-convex structure is formed by using a groove and a sealing ring. In some embodiments, the micro-φ convex structure of the flow path plate 26 and the valve body cover 22 can also be a semiconductor process, for example, yellow light. Etching or coating or electroforming techniques are formed directly on the runner plate 26 and the valve body cover 22. Please also refer to the third drawing A, B, C and the fourth drawing A, B, C. As shown, when the cover body 25, the actuating device 24, the valve body cover 22, the valve body film 23, the sealing ring 27 28, the runner plate 26 and the valve body seat 21 are assembled correspondingly to each other, the inlet passage 211 on the valve body seat 21 and the inlet branch passage 26 of the flow passage plate 26, the inlet valve structure 231 on the valve body film 23, and 'The inlet valve passage 221 on the valve body cover 22 corresponds (as shown in the third figure A ^), and the outlet passage 212 on the valve body seat 21 and the flow passage plate 26 are 16 200944677 Φ
出口匯流道262、閥體薄膜23上之出口閥門結構232以及 閥體蓋體22上之出口閥η通道222相對應（如第四® Α 所示），並且，由於密封環27設置於凹槽265内，使得闕 禮薄膜23之入口閥門結構231微凸起於流道板26之下表 面266,並藉由位於凹槽265内之密封環27頂觸闕雜薄膜 23而產生一預力（（Preforce)作用，使得入口閥門結構231 在未作動時於流道板26之下表面266形成一間隙，同樣 地’出口閥門結構232亦藉由將密封環28設至於四槽225 中的相同方式與閥體蓋體22之上表面220形成一間隙° 當以一電壓驅動致動器242時，致動裝置24產生變 曲變形’如第三圖B所示，致動裝置24係朝箭號a所指 之方向向下彎曲變形’使得壓力腔室226之體積增加，因 而產生一吸力，使闊體薄膜23之入口閥門結構231、出口 閥門結構232承受一向下之拉力，並使已具有一預力 (Preforce)之入口閥門結構231之入口閥片2313迅速開 啟（如第三圖B所示），使液體可大量地自閥體座21上之 入口通道211被吸取進來，並流經流道板％之入口分流 道26卜閥體薄膜23上之入口閥門結構231之孔洞2312、 闕體蓋體22上之入口暫存腔223、入口間門通道221而流 入壓力腔t 226之内，此時’由於閥體薄膜23之入口闕 鬥結構231、出口閥門結構232承受該向下拉力，故位於 另一端之出口閥門結構232係因該向下拉力使得位_ 薄膜23上之出口閥片2323密封住出口閥門通道222， 使得出口閥門結構232關閉，因而可達到防止济體逆流（ 17 200944677 •第四圖B所示）。 錄而如第四圖C所示之 當致動裝置24因電場方向改^腔多226之體積， 箭號b向上彎曲變形時，則會歷縮一力，並使閥體薄 使得壓力腔室226對内部之流艘承受一向上 膜23之入口閥門結構23卜出口 十"0 28上出口閥門 推力，此時，設置於凹槽22^二如第四圖c所 結構232的出口閥片2323其926經由閥體 . 出廢力腔多Z ’ 龜 示），並使液體瞬間大量宣洩’由戌 之出口閥 蓋號22上之出口閥門通道薄戚ϋ存腔263 門結構232之孔洞2322、流道板 212而流出流 及出口匯流道262、閥體座21上之出口通^扣η搞咏， 體輪送裝置20之外，因而完成流艘之得糊 . 此時由於入口閥門結構231係承受該向上之推力 得入口閥片2313密封住入口分流道261，因而關閉入口闕 門結構231，使得流體不逆流（如第三圖C所示），並且’ ® 藉由入口閥門結構231及出口閥門結構232配合設置於流 道板26及閥體蓋體22上之凹槽265、225内的密封環27、 28之設計’可使流體於傳送過程中不會產生回流的情形’ 達到高效率之傳輸。 、請參閱第五®A，其係為本案第二較佳實施例之流體 $送裝置之結構示意圖，如圖所示，本實施例之流禮輸送 . 置50係為使用一進一出的實施態樣，流體輸送裝置50 •主要係由閥體座5卜閥體蓋體52、閥體薄膜53、複數個 暫存室、致動裝置54、蓋體55及流道板56所組成，於本 18 200944677 實施例中’流體輸送裝置50的組裝方式同樣係依序將閥 體座51、流道板56、閥體薄膜53、閥體蓋體52、致動裝 置54及蓋體55相對應堆疊設置，以完成流體輸送裝置5〇 之組裝（如第五圖B所示）。 請再參閱第五圖A並配合第六圖A及第七圖A，其中 第六圖A係為第五圖B之A-A剖面圖，第七圖A係為第五 圖B之B-B剖面圖，如圖所示，閥體蓋體52及致動裝置The outlet manifold 262, the outlet valve structure 232 on the valve body membrane 23, and the outlet valve η passage 222 on the valve body cover 22 correspond to each other (as shown in the fourth page Α), and since the seal ring 27 is disposed in the groove 265, the inlet valve structure 231 of the slap film 23 is slightly raised on the lower surface 266 of the flow channel plate 26, and a pre-force is generated by the sealing ring 27 located in the groove 265 contacting the doped film 23 ( (Preforce) acts such that the inlet valve structure 231 forms a gap in the lower surface 266 of the flow passage plate 26 when not in operation, and likewise the 'outlet valve structure 232 is also provided in the same manner as the sealing ring 28 is disposed in the four slots 225. Forming a gap with the upper surface 220 of the valve body cover 22. When the actuator 242 is driven by a voltage, the actuating device 24 is deformed as shown in FIG. 3B, and the actuating device 24 is directed to the arrow The direction indicated by a is bent downwardly deformed' such that the volume of the pressure chamber 226 is increased, thereby generating a suction force, so that the inlet valve structure 231 of the wide body film 23 and the outlet valve structure 232 are subjected to a downward pulling force and have a Preforce inlet valve structure 231 The inlet valve piece 2313 is quickly opened (as shown in the third drawing B), so that the liquid can be sucked in a large amount from the inlet passage 211 on the valve body seat 21, and flows through the inlet plate 26 of the flow path plate. The hole 2312 of the inlet valve structure 231 on the film 23, the inlet temporary cavity 223 on the body cover 22, and the inlet door passage 221 flow into the pressure chamber t 226, at this time 'because of the inlet of the valve body film 23阙The bucket structure 231 and the outlet valve structure 232 are subjected to the downward pulling force, so that the outlet valve structure 232 at the other end is such that the downward pulling force causes the outlet valve piece 2323 on the film 23 to seal the outlet valve passage 222, so that the outlet valve The structure 232 is closed, so that the countercurrent of the body can be prevented (17 200944677 • shown in the fourth figure B). As shown in the fourth figure C, when the actuating device 24 changes the volume of the cavity by the direction of the electric field, the arrow When the number b is bent upward and deformed, it will shrink and force the valve body to make the pressure chamber 226 bear the entrance valve structure of the upper diaphragm 23 to the inner flow boat 23, and the outlet valve thrust of the outlet 10" At this time, set in the groove 22^2 The outlet valve piece 2323 of the structure 232 of the fourth figure c is 926 via the valve body. The waste force chamber is multi-Z' tortoise), and the liquid is instantaneously vented in a large amount by the outlet valve passage on the outlet bonnet number 22 of the 戌The hole 232 of the door structure 232, the flow hole plate 23, the outflow flow and the outlet flow path 262, and the outlet on the valve body seat 21 are smashed, and the body transfer device 20 is completed. At this time, since the inlet valve structure 231 is subjected to the upward thrust, the inlet valve piece 2313 seals the inlet branch passage 261, thereby closing the inlet door structure 231 so that the fluid does not flow backward (as shown in FIG. 3C). And the design of the seal rings 27, 28 disposed in the grooves 265, 225 of the flow passage plate 26 and the valve body cover 22 by the inlet valve structure 231 and the outlet valve structure 232 can be used to make the fluid A situation in which no reflow occurs during the transfer process' achieves efficient transmission. Please refer to the fifth page AA, which is a schematic structural view of the fluid dispensing device of the second preferred embodiment of the present invention. As shown in the figure, the flow of the gift delivery device of the present embodiment is set to use one in one out. In the embodiment, the fluid delivery device 50 is mainly composed of a valve body seat 5, a valve body cover 52, a valve body film 53, a plurality of temporary storage chambers, an actuating device 54, a cover body 55 and a flow channel plate 56. In the embodiment of the present invention, the fluid delivery device 50 is assembled in the same manner as the valve body block 51, the flow path plate 56, the valve body film 53, the valve body cover 52, the actuating device 54, and the cover body 55. The stacking is done to complete the assembly of the fluid delivery device 5 (as shown in Figure 5B). Please refer to FIG. 5A together with the sixth figure A and the seventh figure A, wherein the sixth figure A is the AA cross-sectional view of the fifth figure B, and the seventh figure A is the BB cross-sectional view of the fifth figure B. As shown, the valve body cover 52 and the actuating device
54之間同樣形成一壓力腔室526，主要用來儲存流體，致 動裝置54係由一振動薄膜541以及一致動器542組裝而 成，閥體座51係具有一個入口通道511以及出口通道 512，入口通道511係用以使外部之流體輸送至流體輸送 裝置50内，而出口通道512則是將流體由流體輸送裝置 50之内部傳送至外部。流道板56具有複數個入口分流道 561以及複數個出口匯流道562，且入口通道511與複數 個入口分流道561相速通（如第六圖A所示）’而出口通 , 逋流道562連通（如第七圖A所示） 道512則與複數個出口虞州 56之間形成複數個出口暫存腔 閥體薄膜53及流道板口通道512相連通，可使該流體 563 ’並與間體座51 I ώ 口匯流道562而輸送至出口通 由出口暫存腔563經由了 以及，在流道板56上具 道512，再流出閥體座51 邊认从山 旛之凹槽565，及環繞於出口暫 有環繞入口分流道561週 必私^ *A pressure chamber 526 is also formed between 54 for storing fluid. The actuator 54 is assembled from a diaphragm 541 and an actuator 542 having an inlet passage 511 and an outlet passage 512. The inlet passage 511 is for conveying external fluid into the fluid delivery device 50, while the outlet passage 512 is for transferring fluid from the interior of the fluid delivery device 50 to the exterior. The flow channel plate 56 has a plurality of inlet flow passages 561 and a plurality of outlet flow passages 562, and the inlet passages 511 are fast-passed with a plurality of inlet flow passages 561 (as shown in FIG. 6A), and the outlet passages, the bypass passages 562 is connected (as shown in FIG. 7A). The channel 512 is connected with a plurality of outlets 虞州56 to form a plurality of outlet temporary storage valve body membranes 53 and a flow passage opening 512, so that the fluid 563 ' And the intermediate body 51 I is connected to the outlet 562 and is transported to the outlet through the outlet temporary storage chamber 563, and has a passage 512 on the flow passage plate 56, and then flows out of the valve body seat 51 to recognize the concave of the mountain. Slot 565, and around the exit temporarily surround the inlet shunt 561 weeks will be private ^ *
用以供〆密封核57(如第六圖A 存腔563週邊之凹槽 及第七圖A所示）設置於其上 *品E ^ ， 紊貫穿上表面至下表面之複數個 閥體蓋座52上邡異有負 200944677 通道522，且聲一入 •入口閥門通道U1及複數個出口闞f ^之每一入口分流道 口閥門通道521係設置於與流道板5 561相對應之位置，而每—出口閥門通道522則設ί ;與 流道板56之每一出口暫存腔563内之出口匯流道Μ2相 對應之位置，並且，於本實施例中，閥體薄膜53及閥體 蓋體52之間係形成複數個入口暫存腔523，且不以此為 限’其係由閥體蓋體52之上表面於與入口閥門通道521 φ 相對應之位置產生部份凹陷而形成，且其係連通於複數個 入口閥門通道521。 壓力腔室526係與致動裝置54之致動器542相對應 没置’壓力腔室526係經由複數個入口閥門通道521連通 於複數個入口暫存腔523，並同時與複數個出口閥鬥通道 522相連通。 另外’在閥體蓋體52之下表面528係具有環繞壓力 腔室526而設置之凹槽527，而在上表面上則具有環繞設 © 置於複數個入口暫存腔523之凹槽524、環繞設置於出口 閥Π通道522之凹槽525，同樣地，上述凹槽結構係用以 供一密封環58(如第六圖Α及第七圖Α所示）設置於其中。 請再參閱第五圖A，閥體薄膜53上係具有複數個入口 閥Π結構531以及複數個出口閥門結構532，其中，複數 個入口閥門結構531係分別具有入口閥片5313以及複數 個環繞入q閥片5313週邊而設置之鏤空孔洞5312,另外， 在孔洞5312之間更具有與入口閥片5313相連接之延伸部 5311 ’而複數個出口閥門結構532則具有出口閥片5323、 200944677 延伸部5321以及孔洞5322，惟本實施 531以及出〇閥門結構咖的組成結構及σ閥門結構 述於第-較佳實施例中，因而不再贅述。方式均已詳The sealing body 57 for sealing (such as the groove around the cavity 563 of FIG. A and the seventh drawing A) is disposed on the upper surface of the upper surface to the lower surface of the valve body cover. The seat 52 has a negative negative negative 200944677 channel 522, and each of the inlet and outlet valve passages U1 and the plurality of outlet ports φf ^ are disposed at a position corresponding to the flow channel plate 5 561. Each of the outlet valve passages 522 is provided at a position corresponding to the outlet manifold Μ2 in each of the outlet temporary chambers 563 of the flow passage plate 56, and in the present embodiment, the valve body film 53 and the valve body A plurality of inlet temporary storage chambers 523 are formed between the cover bodies 52, and are not limited thereto. The upper surface of the valve body cover 52 is partially recessed by a position corresponding to the inlet valve passage 521 φ. And it is connected to a plurality of inlet valve passages 521. The pressure chamber 526 is not corresponding to the actuator 542 of the actuator 54. The pressure chamber 526 is connected to the plurality of inlet temporary chambers 523 via a plurality of inlet valve passages 521, and simultaneously with a plurality of outlet valves. Channels 522 are in communication. In addition, the lower surface 528 of the valve body cover 52 has a groove 527 disposed around the pressure chamber 526, and the upper surface has a groove 524 disposed on the plurality of inlet temporary storage chambers 523. The groove 525 is disposed around the outlet valve channel 522. Similarly, the groove structure is used to provide a sealing ring 58 (as shown in FIG. 6 and FIG. 7). Referring to FIG. 5A again, the valve body film 53 has a plurality of inlet valve structures 531 and a plurality of outlet valve structures 532. The plurality of inlet valve structures 531 respectively have an inlet valve piece 5313 and a plurality of surrounding inlets. The hollow hole 5312 is provided around the valve plate 5313. Further, between the holes 5312, there is an extension portion 5311' connected to the inlet valve piece 5313, and the plurality of outlet valve structures 532 have extension portions of the outlet valve piece 5323 and 200944677. 5321 and the hole 5322, but the configuration of the present embodiment 531 and the venting valve structure and the σ valve structure are described in the first preferred embodiment, and thus will not be described again. The methods are detailed
設置於流道板56上之凹槽565内的密封環5 大於凹槽565深度，使得設置於凹槽565内之密封環又57 係部分凸出於流道板56之下表面構成_微凸結構，同樣 地’當密封環58設置於環繞出口閥門通道522之凹槽525 内時，由於其密封環58係設置於閥體蓋體52之上表面， 因而該密封環58係使閥體薄膜53之出口閥門結構532向 上凸出而形成一向上隆起於閥體蓋體52之微凸結構。至 於其餘分別設置於凹槽結構524、527及564及513内之 密封環58及57及59 ’主要用來分別使閥體座51與流道 板56、閥體薄膜53、闕體薄膜53與閥體蓋體52以及閥 體蓋體52與致動裝置54之間緊密貼合時，防止流體外茂。 請同時參閱第六圖A、B、C及第七圖A、B、C’如圖 所示，當蓋體55、致動裝置54、閥體蓋體52、閥體薄膜 53、密対環57、58、流道板56以及閥體座51彼此對應組 裝設置後，閥體# 51上之入口通道511係與流道板56之 複數個A 口分流道561、闕體該53Jl之複數個入口闕門 灶構531以及闕雖蓋體52上之複數個入口閥門通道521 二耕靡（如第六_人所示），且閥體座51上之出口通道 係與^板56之複數個出口匯流道562、閥體薄膜53上 之複數#出口閥門結構532以及閥體蓋體52上之複數個 出口閥fl通道522相對應（如第七圖A所示），•，由 21 200944677 .於密封環57設置於凹槽565内，使得閥體薄膜53之入口 ,閥門結構531微凸起於流道板56之下表面，並藉由位於 凹槽565内之密封環57頂觸閥體薄膜53而產生一預力 ((Preforce)作用，使得複數個入口閥門結構531在未作 動時於流道板56之下表面形成一間隙，同樣地，出口閥 門結構532亦藉由將密封環58設至於凹槽525中的相同 方式與閥體蓋體52之上表面形成一間隙。 ❹ 當以一電壓驅動致動器542時，致動裝置54產生彎 曲變形，如第六圖B所示，致動裝置54係朝箭號8所指 之方向向下彎曲變形，使得壓力腔室526之體積增加，因 而產生一吸力，使閥體薄臈53之入口閥門結構531、出口 閥門結構532承觉一向下之拉力，並使已具有一預力 (Preforce)之入口閥門結構531之入口閥片5313迅速開 啟（如第六圖B所示），使液體可大量地自閥體座51上之 入口通道511被吸取進來，並流經流道板56之複數個入 © 口分流道561、閥體薄膜53上之複數個入口閥門結構531 之孔洞5312、閥體蓋體52上之複數個入口暫存腔523、 複數個入口閥門通道521而流入壓力腔室526之内，此 時’由於閥體薄膜53之複數個入口閥門結構531、複數個 出口閥門結構532承受該向下拉力，故位於另一端之複數 個出口閥門結構532係因該向下拉力使得位於閥體薄膜53 上之複數個出口閥片2323密封住所對應之出口閥門通道 522 ’而使得所有的出口閥門結構532關閉，因而可達到 防止流體逆流（如第七圖B所示）。 22 200944677 ‘ 當致動裝置54因電場方向改變而如第七圖C所示之 .箭號b向上彎曲變形時，則會壓縮壓力腔室526之體積’ 使得壓力腔室526對内部之流體產生一推力，並使閥體薄 膜53之複數個入口闊門結構531、複數個出口閥門結構 532承受一向上推力’此時，設置於凹槽525内之密封環 58上出口閥門結構532的出口閥片5323其可迅速開啟（如 第七圖C所示），並使液體瞬間大量宣洩，由壓力腔室526 參 分別經由閥體蓋體52上之複數個出口閥門通道522、閥雜 薄膜53上之複數個出口閥門結構532之孔洞5322、流道 板56上之複數個出口暫存腔563及複數個出口匯流道 562，使得匯集之流體經由閥體座51上之出口通道512而 流出流體輸送裝置50之外，因而完成流體之傳輸過程’ 且因應流道板56具有複數個入口分流道561及複數個出 口匯流道562的結構，能夠使流體輸送裝置50整體流速 及揚程大為增加。 ❹ 同樣地，此時由於複數個入口閥門結構531係承受該 向上之推力，因而使得入口閥片5313密封住所對應之入 口分流道561 ’因而關閉入口閥門結構531 ’使得流體不 逆流（如第六圖C所示），並且，藉由複數個入口閥門結 構531及複數個出口閥門結構532配合設置於流道板56 及閥體蓋體52上之凹槽565、525内的密封環57、58之 設計’可使流體於傳送過程中不會產生回流的情形，達到 高效率之傳輸。 請參閱第八圖、第九圖A及第十圖A，其中第八圖係 23 200944677 ^ 為本案第三較佳實施例之流體輸送裝置之組裝完成後之 •結構示意圖，第九圖A係為第八圖之a-A剖面圖，第十圖 A係為第八圖之B-B剖面圖，如圖所示，本實施例之流體 輸送裝置80係為使用多進多出的實施態樣，流體輸送裝 置80主要係由閥體座81、闊體蓋體52、闕體薄膜53、複 數個暫存室、致動裝置84、蓋體85及流道板56所組成， 且組裝方式同樣係依序將閥體座81、流道板56、閥體薄 ^ 膜53、閥體蓋體52、致動裝置84及蓋艨85相對應堆疊 設置，以完成流體輸送裝置80之組裝。 其中，本實施例所揭露之閥體蓋體52、閥體薄膜53 及流道板56的組成結構及作動方式係與第五圖A所示之 第二較佳實施例相同，因而不再贅述。 於本實施例中，閥體座81係具有複數個入口通道811 以及複數個出口通道512 ’且複數個入口通道811彼此之 間不相連通，複數個出口通道512彼此之間亦不相連通， 〇 流道板56具有複數個入口分流道561以及複數個出口匯 流道562，且每一入口通道811僅與單一入口分流道561 相連通（如第九圖A所示）’而每一出口通道812同樣僅 與單一出口匯流道562連通（如第十圖A所示）。 閥體薄膜53及流道板56之間所形成之複數個出口暫 存腔563係分別與闕體座81之一出口通道812相連通， 閥體蓋座52上所具有之複數個入口閥門通道521及複數 個出口閥門通道522 ’每一入口閥門通道521係設置於與 . 流道板56之每一入口分流道561相對應之位置，而每一 24 200944677 ^ 出口閥門通道522則設置於與流道板56之每一出口暫存 ，腔563内之出口匯流道562相對應之位置，並且，於本實 施例中，閥體薄膜53及閥體蓋體52之間係形成複數個入 口暫存腔523，其係分別連通於複數個入口閥門通道521。 請再參閱第九圖A及第十圖A，致動裝置84係由一振 動薄膜841以及複數個致動器842組裝而成，使得閥體蓋 體52及致動裝置84之間形成複數個壓力腔室526,其中， A 複數個壓力腔室526彼此之間並不相連通，進而使得本實 施例之流體輸送裝置80可被分為複數個如第三圖A及第 四圖A所示之致動腔體，其中，本實施例之流體輸送裝置 80可被分為6個獨立的致動腔體，且每一致動器842係受 相同振動頻率之電壓驅動。 請參閱第九圖B及第十圖B，當以相同振動頻率之電 壓驅動所有致動器842時，致動裝置84產生彎曲變形， 如第九圖B所示，致動裝置84係朝箭號a所指之方向向 ❹ 下彎曲變形，使得每一壓力腔室526之體積增加，將導致 所有的入口閥門結構531開啟，並經對應之入口通道811 及入口分流道562汲取流體進入腔體（如第九圖B所示）， 此時出口閥門結構532更為緊閉，避免流體回流（如第十 圖B所示），至於詳細的作動關係已於上述第三圖B及第 四圖B中提出說明，於此不再贅述。 反之，請再參閱第九圖C及第十圖C，當所有致動裝 ' 置84因電場方向改變而如第十圖C所示之箭號b向上彎 • 曲變形時，則會壓縮每一壓力腔室526之體積，使得壓力 25 200944677 - 腔室526對内部之流體產生一推力，將導致所有的出口閥 .門結構532開啟，並並經對應之、出口暫存腔563、出口 匯流道562及出口通道812排出流體（如第十圖C所示）， 此時所有入口閥門結構531更為緊閉（如第九圖C所示）， 避免流體回流，至於詳細的作動關係已於上述第三圖B及 第四圖B中提出說明，於此不再贅述。 综上所述，本案之具有流道板之流體輸送裝置主要係 利用流道板可擴充成一進一出、多進一出、一進多出以及 多進多出的形式，較易使流體均勻提供至入口分流道，並 能使出口流體有效匯集至出口通道。除此之外，流體輸送 裝置整體設計採用長條形艙體，其對應長條形之振動薄膜 及致動器，可使流速及揚程大為增加。 另外，流道板結構配合多個入口分流道、多個出口匯 流道或暫存腔及其多個閥門結構之配置概念，可提供流體 多個進出腔體之通道，減少流體留在腔體内部循環，使致 〇 動器動能有較高效率轉換為流體輸送裝置之流體的流出 動能。 是以，本案之具有流道板之流體輸送裝置極具產業之 價值，爰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 26 200944677 -【圖式簡單說明】 第一圖：其係為習知微泵浦結構之結構示意圖。 第一圖A:其係為本案第一較佳實施例之流體輪送裝置之 分解結構示意圖。 第一圖B.其係為第二圖a所示之流道板的背面結構示意 圖0 · 第一圖C:其係為第二圖人所示之閥體蓋體之背面結構示 鲁 意圖。 第圖D·其係為第二圖a所示之入口閥門結構開啟示意 圖。 *、 第一圖E ··其係為第二圖A所示之出口閥門結構開啟示竜 TS1 國。 第=圖F:其係為第二圖A之組裝完成後之結構示意圖。 第f圖A係為本案第二圖F所示之流體輸送裝置之未作動 狀態之A-A剖面示意圖。 β帛^圖B:其係為第三圖A之壓力腔室膨脹狀態示意圖。 第三圖C:其係為第三圖A之壓力腔室壓縮狀態示意圖。 第四圖A·其係為本案第二圖ρ所示之流體輸送裝置之未 作動狀態之B-B剖面示悫圖。 第四圖B:其係為第四圖a之壓力腔室壓縮狀態示意圖。 第四圓C:其係為第四圖a之壓力腔室膨脹狀態示意圖。 第五圖A:其係為本案第二較佳實施例之流體輸送裝置之 分解結構示意圖。 第五圖B:其係為第五圖a之組裝完成後之結構示意圖。 27 200944677 '第六圖4係為本案第五圖B所示之流體輸送裝置之未作動 - 狀態之A-A剖面示意圖。 第六圖B:其係為第六圖a之壓力腔室膨脹狀態示意圖。 第六圖C:其係為第六圖a之壓力腔室壓縮狀態示意圖。 第七圖A:其係為本案第五圖b所示之流體輸送裝置之未 作動狀態之B-B剖面示意圖。 第七圖B:其係為第七圖a之壓力腔室壓縮狀態示意圏。 φ 第七圖C:其係為第七圖A之壓力腔室膨脹狀態示意圖。 第八圖：其係為本案第三較佳實施例之流體輸送裝置之結 構示意圖。 第九圖A:其係為本案第八圖所示之流體輸送裝置之未作 動狀態之A-A剖面示意圖。 第九圖B:其係為第九圖a之壓力腔室膨脹狀態示意圖。 第九圖C:其係為第九圖a之壓力腔室壓縮狀態示意圖。 第十圖A:其係為本案第八圖所示之流體輸送裝置之未作 ⑩ 動狀態之B-B剖面示意圖。 第十圖B:其係為第十圖A之壓力腔室壓縮狀態示意圖。 第十圖C:其係為第十圖a之壓力腔室膨脹狀態示意圖。 28 200944677The sealing ring 5 disposed in the groove 565 of the flow path plate 56 is larger than the depth of the groove 565, so that the sealing ring disposed in the groove 565 is further protruded from the lower surface of the flow path plate 56 to form a micro convex. The structure, similarly, when the seal ring 58 is disposed in the recess 525 surrounding the outlet valve passage 522, since the seal ring 58 is disposed on the upper surface of the valve body cover 52, the seal ring 58 is a valve body film. The outlet valve structure 532 of 53 projects upwardly to form a micro-convex structure that rises upwardly from the valve body cover 52. The remaining seal rings 58 and 57 and 59' respectively disposed in the groove structures 524, 527, and 564 and 513 are mainly used to respectively form the valve body seat 51 and the flow path plate 56, the valve body film 53, and the body film 53. When the valve body cover 52 and the valve body cover 52 are in close contact with the actuating device 54, the fluid is prevented from being exposed. Please refer to the sixth figure A, B, C and the seventh figure A, B, C' as shown in the figure, when the cover body 55, the actuating device 54, the valve body cover 52, the valve body film 53, the dense ring 57, 58, the flow channel plate 56 and the valve body seat 51 are assembled and arranged correspondingly, the inlet passage 511 on the valve body #51 is a plurality of A port shunt passages 561 of the flow channel plate 56, and the plurality of 53 Jl of the carcass body The entrance door cooker 531 and the plurality of inlet valve passages 521 on the cover 52 are erected (as indicated by the sixth person), and the plurality of outlet passages on the valve body seat 51 and the plurality of plates 56 The outlet manifold 562, the plurality #outlet valve structure 532 on the valve body film 53, and the plurality of outlet valves fl channel 522 on the valve body cover 52 correspond to each other (as shown in FIG. 7A), •, by 21 200944677 . The sealing ring 57 is disposed in the groove 565 such that the inlet of the valve body film 53 is slightly raised on the lower surface of the flow path plate 56, and the valve body is touched by the sealing ring 57 located in the groove 565. The film 53 produces a pre-force effect such that a plurality of inlet valve structures 531 form a gap on the lower surface of the flow channel plate 56 when not in operation. Similarly, the outlet valve structure 532 also forms a gap with the upper surface of the valve body cover 52 in the same manner that the seal ring 58 is disposed in the recess 525. 致 When the actuator 542 is driven at a voltage, actuation The device 54 produces a bending deformation. As shown in the sixth drawing B, the actuating device 54 is bent downwardly in the direction indicated by the arrow 8, so that the volume of the pressure chamber 526 is increased, thereby generating a suction force and making the valve body thin. The inlet valve structure 531 and the outlet valve structure 532 of the crucible 53 sense a downward pulling force and quickly open the inlet valve piece 5313 of the inlet valve structure 531 having a pre-force (as shown in FIG. 6B). The liquid can be sucked in a large amount from the inlet passage 511 on the valve body seat 51, and flows through the plurality of inlet port runners 561 of the flow channel plate 56 and the plurality of inlet valve structures 531 on the valve body film 53. a plurality of inlet temporary storage chambers 523 and a plurality of inlet valve passages 521 on the valve body cover 52 flow into the pressure chamber 526. At this time, due to the plurality of inlet valve structures 531 of the valve body film 53, a plurality Outlet valve structure 532 bearing The pull-down force is such that the plurality of outlet valve structures 532 at the other end are caused by the pull-down force so that the plurality of outlet valve pieces 2323 located on the valve body film 53 seal the corresponding outlet valve passages 522' to make all the outlets The valve structure 532 is closed so that fluid backflow prevention can be achieved (as shown in Figure 7B). 22 200944677 'When the actuator 54 changes due to the direction of the electric field as shown in Figure 7C. The arrow b bends upwards. The volume of the pressure chamber 526 is compressed so that the pressure chamber 526 generates a thrust to the internal fluid, and the plurality of inlet valve structures 531 and the plurality of outlet valve structures 532 of the valve body film 53 are subjected to an upward thrust. At this time, the outlet valve piece 5323 of the outlet valve structure 532 disposed on the seal ring 58 in the recess 525 can be quickly opened (as shown in FIG. 7C), and the liquid is instantaneously vented by the pressure chamber 526. A plurality of outlet valve passages 522 on the valve body cover 52, a plurality of outlet valve structures 532 on the valve membrane 53, and a plurality of outlet temporary chambers 563 on the flow passage plate 56. The plurality of outlet manifolds 562 are such that the collected fluid exits the fluid delivery device 50 via the outlet passage 512 on the valve body seat 51, thereby completing the fluid transfer process' and the flow channel plate 56 has a plurality of inlet runners 561. The configuration of the plurality of outlet manifolds 562 can greatly increase the overall flow rate and head of the fluid delivery device 50. Similarly, at this time, since the plurality of inlet valve structures 531 are subjected to the upward thrust, the inlet valve piece 5313 is sealed to the corresponding inlet branch passage 561' and thus the inlet valve structure 531' is closed so that the fluid does not flow backward (such as the sixth As shown in FIG. C), the sealing rings 57, 58 disposed in the grooves 565, 525 of the flow path plate 56 and the valve body cover 52 are engaged by a plurality of inlet valve structures 531 and a plurality of outlet valve structures 532. The design 'allows the fluid to not flow back during the transfer process, achieving high efficiency transmission. Please refer to the eighth figure, the ninth figure A and the tenth figure A, wherein the eighth figure is 23 200944677 ^ The structural schematic diagram of the fluid delivery device of the third preferred embodiment of the present invention is completed, and the ninth figure A is 8A is a BB cross-sectional view of the eighth figure. As shown in the figure, the fluid transport device 80 of the present embodiment is a multi-input and multi-out embodiment, fluid transport. The device 80 is mainly composed of a valve body seat 81, a wide body cover 52, a body film 53, a plurality of temporary storage chambers, an actuating device 84, a cover body 85 and a flow channel plate 56, and the assembly method is also sequential. The valve body seat 81, the flow path plate 56, the valve body film 53, the valve body cover 52, the actuating device 84, and the cover 85 are correspondingly stacked to complete the assembly of the fluid delivery device 80. The structure and operation of the valve body cover 52, the valve body film 53 and the flow channel plate 56 disclosed in this embodiment are the same as those of the second preferred embodiment shown in FIG. A, and thus will not be described again. . In this embodiment, the valve body seat 81 has a plurality of inlet passages 811 and a plurality of outlet passages 512 ′ and the plurality of inlet passages 811 are not in communication with each other, and the plurality of outlet passages 512 are not in communication with each other. The choke plate 56 has a plurality of inlet shunts 561 and a plurality of outlet chutes 562, and each inlet passage 811 is only in communication with a single inlet shunt 561 (as shown in FIG. 9A) and each outlet passage 812 is also only in communication with a single outlet manifold 562 (as shown in Figure 11A). The plurality of outlet temporary storage chambers 563 formed between the valve body film 53 and the flow path plate 56 are respectively connected to one of the outlet passages 812 of the body block 81, and the plurality of inlet valve passages on the valve body cover 52 are provided. 521 and a plurality of outlet valve passages 522 'each of the inlet valve passages 521 are disposed at positions corresponding to each of the inlet runners 561 of the runner plate 56, and each of the 24 200944677 ^ outlet valve passages 522 is disposed at Each outlet of the flow channel plate 56 is temporarily stored, and the outlet manifold 562 in the cavity 563 is correspondingly positioned. In the present embodiment, a plurality of inlets are formed between the valve body film 53 and the valve body cover 52. A reservoir 523 is coupled to the plurality of inlet valve passages 521, respectively. Referring to FIG. 9A and FIG. 10A again, the actuating device 84 is assembled from a vibrating membrane 841 and a plurality of actuators 842 such that a plurality of valve body covers 52 and the actuating device 84 are formed. The pressure chamber 526, wherein A plurality of pressure chambers 526 are not in communication with each other, so that the fluid delivery device 80 of the present embodiment can be divided into a plurality of figures as shown in FIG. 3A and FIG. The actuator chamber 80, wherein the fluid delivery device 80 of the present embodiment can be divided into six independent actuation chambers, and each actuator 842 is driven by a voltage of the same vibration frequency. Referring to the ninth diagram B and the tenth diagram B, when all the actuators 842 are driven at the same vibration frequency, the actuation device 84 generates a bending deformation. As shown in the ninth diagram B, the actuation device 84 is directed toward the arrow. The direction indicated by the number a is bent and deformed downward, so that the volume of each pressure chamber 526 is increased, which will cause all the inlet valve structures 531 to open, and draw fluid into the cavity through the corresponding inlet passage 811 and inlet splitter 562. (As shown in Figure IXB), the outlet valve structure 532 is now tighter to avoid fluid backflow (as shown in Figure 10B). The detailed actuation relationship is shown in Figure 3 and Figure 4 above. The description is given in B, and will not be described here. On the contrary, please refer to the ninth figure C and the tenth figure C. When all the actuators 84 are bent due to the change of the electric field direction and the arrow b shown in the tenth figure C is bent upwards, the compression is performed. The volume of a pressure chamber 526 is such that the pressure 25 200944677 - chamber 526 produces a thrust on the internal fluid that will cause all of the outlet valve. door structure 532 to open and correspondingly, the outlet temporary chamber 563, the outlet confluence Lane 562 and outlet passage 812 discharge fluid (as shown in Figure 10C), at which point all inlet valve structures 531 are more tightly closed (as shown in Figure 9C), avoiding fluid backflow, as detailed actuation relationships have been The above description is given in the third figure B and the fourth figure B, and details are not described herein again. In summary, the fluid conveying device with the flow channel plate in the present invention mainly utilizes the flow channel plate to be expanded into one-in-one-out, multiple-in-one-out, one-in-out-out, and multiple-in and multiple-out forms, and the fluid is more easily supplied to the uniformity. The inlet splits the passage and allows the outlet fluid to be efficiently collected to the outlet passage. In addition, the overall design of the fluid transfer device uses a long-shaped cabin, which corresponds to a long strip of vibrating membrane and actuators, which greatly increases the flow rate and lift. In addition, the flow channel plate structure cooperates with a plurality of inlet split channels, a plurality of outlet bus channels or a temporary storage cavity and a plurality of valve structure configurations thereof, and can provide a plurality of fluid passages into and out of the cavity, reducing fluid remaining inside the cavity The circulation causes the kinetic energy of the actuator to be converted to kinetic energy of the fluid of the fluid delivery device with higher efficiency. Therefore, the fluid conveying device with the runner plate in this case is of great industrial value, and the application is made according to law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 26 200944677 - [Simple description of the diagram] The first picture: it is a schematic diagram of the structure of the conventional micro-pump structure. First Figure A is a schematic exploded view of the fluid transfer device of the first preferred embodiment of the present invention. Fig. B. is a schematic view showing the structure of the back surface of the flow path plate shown in Fig. a. Fig. 0: Fig. C is a schematic view showing the structure of the back surface of the valve body cover shown by the second figure. Figure D is a schematic diagram showing the opening of the inlet valve structure shown in Figure 2a. *, the first figure E · · is the opening valve structure shown in the second figure A to open the show TS1 country. Fig. F: Fig. F is a schematic structural view of the second figure A after assembly is completed. Figure f is a schematic cross-sectional view of the A-A of the fluid delivery device shown in Figure F of the present invention. β帛^图B: This is a schematic diagram of the expansion state of the pressure chamber of the third figure A. Figure 3C is a schematic view showing the compression state of the pressure chamber of Figure 3A. Fig. 4A is a B-B cross-sectional view showing the unactuated state of the fluid transporting device shown in Fig. 2 of the second embodiment. Figure 4B is a schematic view showing the compression state of the pressure chamber of the fourth diagram a. The fourth circle C: is a schematic diagram of the expansion state of the pressure chamber of the fourth diagram a. Figure 5A is a schematic exploded view of the fluid delivery device of the second preferred embodiment of the present invention. Figure 5B is a schematic view of the structure after the assembly of the fifth figure a is completed. 27 200944677 'The sixth figure 4 is a schematic view of the A-A section of the unactuated state of the fluid delivery device shown in Fig. B of the present invention. Figure 6B is a schematic view showing the state of expansion of the pressure chamber of Figure 6a. Figure 6C is a schematic view showing the compression state of the pressure chamber of Figure 6a. Figure 7A is a schematic cross-sectional view of the B-B of the fluid transport device shown in Figure 5b of the present invention. Figure 7B: This is a state of compression of the pressure chamber of Figure 7a. φ Figure 7C: This is a schematic diagram of the expansion state of the pressure chamber of Figure 7A. Figure 8 is a schematic view showing the structure of the fluid transporting device of the third preferred embodiment of the present invention. Fig. 9A is a schematic cross-sectional view of the A-A of the fluid delivery device shown in the eighth diagram of the present invention. Figure 9B is a schematic view showing the state of expansion of the pressure chamber of the ninth diagram a. Figure 9C is a schematic view showing the compression state of the pressure chamber of the ninth diagram a. Fig. A is a schematic view showing the B-B cross section of the fluid transporting device shown in Fig. 8 of the present invention. Fig. B is a schematic view showing the compression state of the pressure chamber of Fig. A. Fig. C is a schematic view showing the state of expansion of the pressure chamber of the tenth diagram a. 28 200944677
GG
【主要元件符號說明】 微泵浦結構：10 閥體座：11、21、51、81 入口通道：111、211、511、811 出 口通道：112、212、512、812 閥體蓋體：12、22、52 入口閥片通道：121 出口閥片通道：122 壓力腔室：123、226、526 閥體薄膜*.13、23、53 微致動器：14 入口閥門結構：131、231、531 出口閥門結構：132、232、532 蓋體：15、25、55、85 流體輸送裝置：20、50、80 上表面：220、260 下表面：228、266 入口閥門通道：221、521 出口閥門通道：222、522 入口暫存腔：223、523 入口閥片：2313、5313 凹槽·· 224、225、227、264、265、213、513、524、525、 527、564、565 出 口閥片：2323、5323 致動裝置：24、54、84 延伸部：2311、2321、5311、5321 孔洞：2312、2322、5312、5322 振動薄膜：241、541、841 致動器：242、542、842 流道板：26、56 入口分流道：261、561 出口匯流道：262、562 出口暫存腔：263、563 密封環：27、28、29、57、58、59 方向：a、b、X 29[Main component symbol description] Micro-pump structure: 10 valve body seat: 11, 21, 51, 81 inlet channel: 111, 211, 511, 811 outlet channel: 112, 212, 512, 812 body cover: 12, 22, 52 inlet valve channel: 121 outlet valve channel: 122 pressure chamber: 123, 226, 526 valve body film *. 13, 23, 53 micro actuator: 14 inlet valve structure: 131, 231, 531 outlet Valve structure: 132, 232, 532 Cover: 15, 25, 55, 85 Fluid conveying device: 20, 50, 80 Upper surface: 220, 260 Lower surface: 228, 266 Inlet valve passage: 221, 521 Outlet valve passage: 222, 522 inlet temporary storage chamber: 223, 523 inlet valve plate: 2313, 5313 groove · · 224, 225, 227, 264, 265, 213, 513, 524, 525, 527, 564, 565 outlet valve: 2323 5323 Actuator: 24, 54, 84 Extension: 2311, 2321, 5311, 5321 Hole: 2312, 2322, 5312, 5322 Vibration film: 241, 541, 841 Actuator: 242, 542, 842 Channel plate : 26, 56 inlet runner: 261, 561 exit manifold: 262, 562 exit temporary storage cavity: 263, 563 Sealing ring: 27, 28, 29, 57, 58, 59 Direction: a, b, X 29