^28522 _ ’ 細7日修·耀[ » *— _ _ - ——-— 九、發明說明： % ； 【發明所屬之技術領域】 本案係關於/種微致動流體供應器，尤指一種適用於 微幫浦結構及喷墨頭結構之微致動流體供應器。 【先前技術】 φ 目前於各領域中無論是醫藥、電腦科技、列印、能源 等工業’產品均朝精緻化及微小化方向發展，其中微幫 浦、噴霧器、喷墨頭、工業列印裝置等產品所包含之流體 、應、’·〇構為其關鍵技術，是以，如何藉創新結構突破其技 術瓶頸，為發展之重要内容。 請參閱第一圖（a)，其係為習知微致動流體供應器之 結構示意圖，如圖所示，習知微致動流體供應器10包含 基板11、振動板12及致動元件13，其中兩基板11間形 φ 成一腔體14’主要用來儲存液體，而振動板12的兩端係 固設於基板11上並將腔體14的一側封閉，至於致動元件 13係設置於振動板12上且相對應於該腔體14的位置。 習知微致動流體供應器1〇可藉由施加適當的電場（例 如正極時）於致動元件13上，以使致動元件13產生一形 變’即如第一圖（b)所示X及γ方向所指的方向形變’又 該致動元件13連接定位於振動板12，且振動板12兩侧係 固定於基板11上，進而使連接之振動板12連動並且跟著 形變，由於致動元件13產生之壓電收縮量與振動板12之 6 1328522 ___ 為 ㈣7日修_蓮 ^ 變形量具有差異，將造成整個微致動流體供應器10產生 .* 彎曲（bend)型態之作動方式’即如第一圖（b)標號A之箭 ； 頭方向所指虛線的彎曲形變’振動板12將會因彎曲型態 而產生上下振動’亦即藉由施加適當的電場（例如負極時） 於致動元件13上’促使整個微致動流體供應器1〇產生彎 曲（bend)型態作動而與標號A箭頭方向所指虛線相反的彎 曲變形（向上拼起變形）’因此藉由振動板12之形變得以 改變腔體14之體積’使得腔體14原先預存之流體，向其 他預先設定之空間流動’以達到供給流體的目的。 雖然習知微致動流體供應器10的結構可隨著腔體14 的尺寸、致動元件13的厚度以及振動板丨2的厚度而影響 其腔體14的體積變化量’但是無論上述的條件如何改變 均因受到邊界的限制較大，且習知的致動元件13的尺寸 需隨著腔體14的尺寸縮小而縮小，以致定位更困難而增 加製程上的困難’將造成整體結構所能提昇的功效有限。 • 為了使微致動流體供應器能達到較大致動效益的需 求，此產業的薇商因此提供了如第二圖所示之微致動流體 供應器20 ’如圖所示，微致動流體供應器2〇係包含致動 元件21、振動板22、基板23、傳動塊25以及固定塊26， 其中，基板23間形成一腔體24,振動板22的兩端係固設 於基板23上並將腔體24的一側封閉，傳動塊25以及固 定塊26則固設於振動板22,習知微致動流體供應器2〇改 良的方式係於致動元件21的下方增設傳動塊25，且致動 元件21的兩端分別固定於固定塊26上，藉由施加適當的 7 1328522 電場於致動元件21上，使致躲件21產生— ^塊25連接於致動元件21下方因此傳動塊25也將跟 者連動且跟著形變’進而推動（push)振動板 22產生位移， 使腔體24之體積得以改變，達到供給流體之目的。 由於致動兀件21的兩端均與固定塊26連結固定如 B之箭頭方向所指的虛線處，當致動元件Η :產：二：、1雖能產生形變’但其兩端側被固定住’相 磁 二〜日x到兩端侧的抑制，進而使致動元件21形 直將有it =限制如此—來能夠產生推動振動板的位移 里將有限’整體結構無法達職好的效能。 動如何發展—種可改善上述習知技術缺失之微致 〜H ’實為目前迫切需要解決之問題。 【發明内容】 I蔣魏-I要目的在於提供—雖軸讀供應器，主 mi %件111設於轉接板上且相對應設置於複數個固 株的誠a而轉接板的兩端連接於111定塊上，使得致動元 ，自由端，在致動元件受電場作用下時不僅能 整體產切^㈣Μ㈣㈣可產生形變量較A ’故 量，俾解㈣^载制，缺㈣動振純的位移 者知微致動流體供應器因致動元件的兩端側被 使^動元=場作用而產生形變時會受到兩端側的抑制， 變受㈣’能夠產生推動振動板的位移量 8 1328522 將有限’而造成整體結構所能提昇的功效有限的缺點。 為達上述目的，本案之一較廣義實施樣態為提供一種 微致動流體供應器，其係包含：基板，形成腔體，用以儲 存流體，振動板，固設於基板上，以封閉腔體之一側·複 數個固定塊，連接於振動板之兩側邊；傳動塊，設置於複 數個固定塊之間且與振動板相連接；轉接板’連接於傳動 塊上且兩側延伸固設於複數個固定塊上；以及致動元件， 設置於轉接板上且相對應設置於複數個固定塊之間其係 於電場作訂’帶動轉接板產生形變，以推擠傳動塊及振 動板使腔體產生體積變化，俾使儲存於腔體内之流體受 擠壓而流動。 根據本案之構想，其中傳動塊與轉接板接觸之面積係 較小於與振動板接觸面積。 根據本案之構想，其中傳動塊與轉接板接觸之面積實 質上係等同於與振動板接觸面積。 根據本案之構想，其中傳動塊為一凸形結構。根據本 案之構想’其中傳動塊為一梯形結構。 根據本案之構想，其中致動元件係為壓電元件其係 於電場作用下帶動轉接板產生形變。 根據本案之構想，其中致動元件的極化方向係與電場 方向互相平行。 根據本案之構想，其中致動元件的電極係設置於其厚 度方向之上下兩側。 為達上述目的，本案另提供一種微幫浦結構，用以傳 9 1328522 伽月？日修魅耀^28522 _ ' Fine 7 days repair · Yao [ » * - _ _ - ——- - IX, invention description: %; [Technical field of invention] This case is related to / kind of microactuated fluid supply, especially a kind A microactuated fluid supply for micro-pull structures and inkjet head structures. [Prior Art] φ In the fields of medicine, computer technology, printing, energy and other industries, the products are in the direction of refinement and miniaturization. Among them, micro-pumps, sprayers, inkjet heads, industrial printing devices The fluids, applications, and technologies included in the products are the key technologies. How to break through the technical bottlenecks through innovative structures is an important part of development. Please refer to the first figure (a), which is a schematic structural view of a conventional micro-actuated fluid supply device. As shown, the conventional micro-actuated fluid supply 10 includes a substrate 11, a vibration plate 12 and an actuating element 13 The two substrates 11 are shaped like a cavity 14' to mainly store liquid, and both ends of the vibration plate 12 are fixed on the substrate 11 and one side of the cavity 14 is closed, and the actuating element 13 is arranged. On the vibrating plate 12 and corresponding to the position of the cavity 14. The conventional microactuated fluid supply device 1 can be deformed by the application of an appropriate electric field (for example, when the positive electrode is applied to the actuating member 13), that is, as shown in the first figure (b). And the direction change indicated by the γ direction, and the actuating element 13 is connected and positioned on the vibrating plate 12, and the vibrating plate 12 is fixed on the substrate 11 on both sides, so that the connected vibrating plate 12 is interlocked and deformed due to actuation. The amount of piezoelectric contraction generated by the element 13 is different from the amount of deformation of the vibrating plate 12 by 13 1328522 ___, which causes the entire microactuated fluid supply 10 to generate a .* bend mode. 'As in the first figure (b) arrow A; the curved direction of the dotted line in the head direction 'the vibration plate 12 will vibrate up and down due to the bending pattern', that is, by applying an appropriate electric field (for example, when the negative electrode) On the actuating element 13 'promotes the entire microactuated fluid supply 1 〇 to produce a bend type of motion and a bending deformation opposite the indicated dashed line in the direction of the arrow (upward deformation) 'and thus by means of a vibrating plate The shape of 12 becomes to change the cavity 14 Volume 'previously stored so that the fluid chamber 14, the space to which the flow set in advance his' for the purpose of supplying fluid. Although the structure of the conventional microactuated fluid supply 10 can affect the volume change amount of the cavity 14 with the size of the cavity 14, the thickness of the actuating member 13, and the thickness of the vibrating plate 2, but regardless of the above conditions How the change is limited by the boundary, and the size of the conventional actuating element 13 needs to be reduced as the size of the cavity 14 is reduced, so that the positioning is more difficult and the difficulty in the process is increased, which will result in the overall structure. The effectiveness of the upgrade is limited. • In order to enable the microactuated fluid supply to achieve greater actuation efficiency, the industry's Weishang thus provides a microactuated fluid supply 20' as shown in the second figure, as shown, microactuated fluid The carrier 2 includes an actuating member 21, a vibrating plate 22, a substrate 23, a transmission block 25, and a fixing block 26, wherein a cavity 24 is formed between the substrates 23, and both ends of the vibrating plate 22 are fixed on the substrate 23. The one side of the cavity 24 is closed, and the transmission block 25 and the fixing block 26 are fixed to the vibration plate 22. The modified micro-actuating fluid supply 2 is modified in such a manner as to add a transmission block 25 below the actuation element 21. And the two ends of the actuating element 21 are respectively fixed on the fixing block 26, and by applying an appropriate electric field of the 7 1328522 to the actuating element 21, the blocking member 21 is generated - the block 25 is connected below the actuating element 21. The transmission block 25 will also be linked to the follower and follow the deformation 'and push the diaphragm 22 to shift, so that the volume of the cavity 24 can be changed to supply the fluid. Since both ends of the actuating member 21 are fixed to the fixed block 26 and fixed by a broken line indicated by the direction of the arrow B, when the actuating element is: produced: two: 1, although it can be deformed 'but its both ends are Fix the 'phase magnetic two ~ day x to the end side of the suppression, so that the actuating element 21 straight will have it = limit so - can produce a displacement that pushes the vibrating plate will be limited 'the whole structure can not get a good job efficacy. How to develop - a kind of nuance that can improve the above-mentioned lack of conventional technology ~H </ /> is an urgent problem to be solved. [Summary of the Invention] I Jiang Wei-I aims to provide - although the axis reading supplier, the main mi % 111 is set on the adapter plate and correspondingly set to a plurality of solid plants and the two ends of the adapter plate Connected to the 111 block, so that the actuating element, the free end, can not only produce the whole product when the actuating element is subjected to the electric field. (4) Μ (4) (4) The shape variable can be generated compared with A ', the amount is solved, the solution is (4), the carrier system is lacking (4) The dynamically vibrating displacement knows that the microactuated fluid supply is restrained by both ends when the two ends of the actuating element are deformed by the action of the moving element = field. The displacement of 8 1328522 will be limited to the shortcomings of the limited effectiveness of the overall structure. In order to achieve the above object, a generalized embodiment of the present invention provides a microactuated fluid supply device comprising: a substrate, a cavity for storing a fluid, a vibration plate, and a fixed plate on the substrate to close the cavity One side of the body and a plurality of fixed blocks are connected to both sides of the vibration plate; the transmission block is disposed between the plurality of fixed blocks and connected to the vibration plate; the adapter plate is connected to the transmission block and extends on both sides Fixed on a plurality of fixed blocks; and an actuating element, disposed on the transfer plate and correspondingly disposed between the plurality of fixed blocks, is tied to the electric field to make a deformation of the adapter plate to push the transmission block And the vibrating plate causes a volume change of the cavity, so that the fluid stored in the cavity is squeezed and flows. According to the concept of the present invention, the area in which the transmission block contacts the adapter plate is smaller than the contact area with the vibration plate. According to the concept of the present invention, the area in which the transmission block is in contact with the adapter plate is substantially equivalent to the contact area with the vibration plate. According to the concept of the present case, the transmission block is a convex structure. According to the concept of the present invention, the transmission block has a trapezoidal structure. According to the concept of the present invention, the actuating element is a piezoelectric element which is driven by an electric field to drive the adapter plate to deform. According to the concept of the present invention, the direction of polarization of the actuating elements is parallel to the direction of the electric field. According to the concept of the present invention, the electrode system of the actuating element is disposed on both sides above the thickness direction. In order to achieve the above objectives, the case also provides a micro-push structure for transmitting 9 1328522 galaxies? Japanese enchanting
設於基板上，以封閉腔體之一 振動板之兩側邊，傳動塊，設置於複數個固定塊之間且與 振動板相連接，轉接板，連接於傳動塊上且兩侧延伸固設 於複數個固疋塊上；以及致動元件，設置於轉接板上且相 對應設置於複數低固定塊之間，其係於電場作用下，帶動 魯轉接板產生形變，以推擠傳動塊及振動板，使腔體產生體 積變化’俾使經由入口通道儲存於腔體内之流體受擠壓而 入口通道相連通；振動板，固 一側；複數個固定塊，連接於 經由出口通道流出。 根據本案之構想，其中傳動塊與轉接板接觸之面積係 較小於與振動板接觸面積。 根據本案之構想，其中傳動塊與轉接板接觸之面積實 質上係等同於與振動板接觸面積。 根據本案之構想’其中致動元件係為壓電元件，其係 % 於電場作用下帶動轉接板產生形變。 根據本案之構想，其中致動元件的極化方向係與電場 方向互相平行。 根據本案之構想，其中致動元件的電極係設置於其厚 度方向之上下兩側。 為達上述目的’本案又提供一種喷墨頭結構，具有用 以接收墨水之入口通道’其係包含：基板，形成腔體，且 具有複數個喷孔；振動板，固設於基板上，以封閉腔體之 一側；複數個固定塊，連接於振動板之兩側邊；傳動塊， 1328522 - 尸W日修鑑纓The utility model is disposed on the substrate to close the two sides of the vibration plate of the cavity, and the transmission block is disposed between the plurality of fixing blocks and connected to the vibration plate, and the adapter plate is connected to the transmission block and extends on both sides. The device is disposed on the plurality of solid blocks; and the actuating element is disposed on the transfer plate and correspondingly disposed between the plurality of low fixed blocks, and is driven by the electric field to drive the deformation plate to deform and push The transmission block and the vibration plate cause a volume change of the cavity 俾 so that the fluid stored in the cavity through the inlet channel is squeezed and the inlet passage is connected; the vibration plate is fixed to the side; the plurality of fixed blocks are connected to the outlet The channel flows out. According to the concept of the present invention, the area in which the transmission block contacts the adapter plate is smaller than the contact area with the vibration plate. According to the concept of the present invention, the area in which the transmission block is in contact with the adapter plate is substantially equivalent to the contact area with the vibration plate. According to the concept of the present invention, the actuating element is a piezoelectric element which is driven by an electric field to cause deformation of the adapter plate. According to the concept of the present invention, the direction of polarization of the actuating elements is parallel to the direction of the electric field. According to the concept of the present invention, the electrode system of the actuating element is disposed on both sides above the thickness direction. In order to achieve the above object, the present invention further provides an ink jet head structure having an inlet passage for receiving ink, comprising: a substrate, forming a cavity, and having a plurality of nozzle holes; and a vibration plate fixed on the substrate to One side of the closed cavity; a plurality of fixed blocks connected to both sides of the vibrating plate; transmission block, 1328522 - 尸W日修鉴缨
- ----- -.4^-—J ^ 設置於複數個固定塊之間且與振動板相連接；轉接板，連 . 接於傳動塊上且兩側延伸固設於複數個固定塊上；以及致 / 動元件’設置於轉接板上且相對應設置於複數個固定塊之 間’其係於電場作用下，帶動轉接板產生形變，以推擠傳 動塊及振動板’使腔體產生體積變化，俾使儲存於腔體内 之墨水受擠壓而從複數個噴孔喷出。 根據本案之構想，其中傳動塊與轉接板接觸之面積係 馨 較小於與振動板接觸面積。 根據本案之構想，其中傳動塊與轉接板接觸之面積實 質上係等同於與振動板接觸面積。 根據本案之構想，其中致動元件係為壓電元件，其係 於電場作用下帶動轉接板產生形變。 根據本案之構想’其中致動元件的極化方向係與電場 方向互相平行。 根據本案之構想，其中致動元件的電極係設置於其厚 書 度方向之上下兩側。 根據本案之構想，其中基板係為喷嘴板，具有複數個 喷孔。 為達上述目的，本案又提供一種微致動流體供應器， 其係包含：基板，形成腔體，用以儲存流體；振動板，固 設於基板上；複數個固定塊，連接於振動板；傳動塊，係 於振動板相連接；轉接板，連接於傳動塊上且邊緣延伸固 6又於複數個固定塊上；以及致動元件，設置於轉接板上， 致動元件可與電場電性作用β 1328522 __ ’【實施方式】 \ 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細欽述。應理解的是本案能夠在不同的熊、樣上且 有各種的變化，其皆不脫離本案的範圍，且其中的說明& 圖示在本質上係當作說明之用，而非用以限制本案。 請參閱第三圖（a)，其係為本案第一較佳實施例之微 致動流體供應器之結構示意圖，如圖所示，本案之微致動 • 流體供應器30可適用於醫藥生技、電腦科技、列印或是 能源等工業’主要由基板301、振動板302、複數個固定 塊303、傳動塊304、轉接板305以及致動元件3〇6所組 成，其中基板301間形成一腔體3011，主要用來儲存流體， 將因振動板302之形變影響而使得腔體3011之體積受到 改變，而振動板302係固設於基板301上，可用來將腔體 3 011的一側邊封閉。 複數個固定塊303係設置於振動板302的兩側邊，而 ® 傳動塊304同樣設置於振動板302上且位於該複數個固定 塊303之間並相對應於腔體3011設置，而轉接板305其 係連接於傳動塊304上且兩側分別延伸固設於固定塊303 上’至於，致動元件306係為一壓電元件，可採用高壓電 係數之鍅鈦酸鉛（PZT)系列的壓電粉末製造而成，其係 設置於轉接板305上且相對應設置於複數個固定塊303之 間’致動元件306的兩端為自由端並未被轉接板305固定 住’即如第三圖（a)標號D所指之箭頭方向所指的虛線處。 12 1328522 • 於本實施例中，傳動塊304與轉接板305接觸之面積 . 實質上等同於與振動板302接觸之面積’且致動元件306 ·· 的極化方向為其厚度方向’即第三圖（a)標號Z所指之箭 頭方向’另外在致動元件306的厚度方向的上側具有一訊 號電極3061 ’可為正電極’而相對下側則具有一接地電極 3062，可為負電極。 當一電壓作用在致動元件306的兩側訊號電極3061 • 及接地電極3062時，會產生一方向向下之電場，即第三 圖（a)標號C所指之箭頭方向，由於電場方向c和致動元 件306的極化方向Z互相平行，所以致動元件306在此訊 號電極3061接受到正極之電場作用下會產生形變作用， 即如第三圖（b)所示X及Y方向所指的方向形變，因致動 元件306的底部係連接於轉接板305上，轉接板305的兩 側則固定於兩固定塊303上’而中間則與傳動塊304連 接，可讓轉接板305產生連動且跟著形變，即如第三圖（b) # 標號E之箭頭方向所指虛線的形變，使得位於轉接板305 下方的傳動塊304能將轉接板305所產生的推力傳遞至振 動板302，以推動振動板302產生致動位移量，即如第三 圖（b)標號F之箭頭方向所指虛線的形變，進而改變腔體 3011之體積，使得腔體3011原先預存之流體，向其他預 先設定之空間流動，達到供給流體之目的。相對的，當致 動元件306在此接地電極3062接受到負極之電場作用下 會產生形變作用，即如第三圖（b)標號β之箭頭方向所指 虛線的相反方向形變（向上拱起形變，未圖示），因致動元 1328522 ·· ㈣月7日_播頁 , 件306的底部係連接於轉接板305上，轉接板305的兩侧 則固定於兩固定塊303上’而中間則與傳動塊304連接， 可讓轉接板305產生連動且跟著形變，使得位於轉接板305 下方的傳動塊304能將轉接板305所產生的拉力傳遞至振 動板302’以牽動振動板302產生向上棋起之致動位移量， 進而改變腔體3011之體積’使得腔體3011原先預存之流 體，向其他預先設定之空間流動，達到供給流體之目的。 鲁 本案之微致動流體供應器30主要藉由將致動元件306 的底部與一轉接板305連接固定，而該轉接板305兩端連 接固定於固定塊303上’相對致動元件306底部連接於轉 接板305上也視為一可形變體’如此致動元件306的兩端 可視為一自由端’如第三圖（a)標號D之箭頭方向所指虛 線處，請再參閱第三圖（a)及第二圖，本案與習知結構就 致動元件的位移量關係進行比對，即可看出由於第二圖所 示之致動元件21的兩端均與固定塊26連結固定’如標號 • B之箭頭方向所指的虛線處，因此當致動元件21受電場作 用時’其兩端側被固定住’相對產生形變會受到兩端側的 抑制，而本實施例之致動元件3〇6的兩端並未連接固定於 轉接板305上可視為一自由端，當致動元件306受電場作 用時，其不僅能產生形變，且其兩端側為自由端，相對可 產生形變量較大，故整體產生形變量較不受到限制，進而 能產生推動振動板302的位移量與比對案推動振動板22 的位移量比較為大。 另外’本案與習知無轉接板之技術就實際實驗分析振 1328522 動板位移量關係比對而言，因兩者致動元件跨 之基板上不同的基礎’因此分析僅能就相同^腔^腔體 的傳動塊直控及厚度、相同的致動元件厚度以及相同 兩固定塊間跨距的條件下來比對，以說明^無轉接的 轉接板承載之致動元件所導致的振動板位移量差異結=有 以下就以寬8咖之腔體、10//1„之振動板、厚=〇 。 之致動元件、直徑4咖厚100#m之傳動塊的相同條件 經以有限it素分析法所解析兩者振動板的最大位移量結 果如下表一： 本發明 (有轉 接板） 11 10 ------- >Γ夕里V Μ川7 6.29 13 12 8.29 17 16 13 9 10 6.87 11 12 12.1 15 16 18.3 表一 的傳=分5據可看出，本發明在相同的腔體、相同- ----- -.4^--J ^ is set between a plurality of fixed blocks and connected to the vibration plate; the adapter plate is connected to the transmission block and the two sides are extended and fixed to a plurality of fixed And the actuator/actuator element is disposed on the adapter plate and correspondingly disposed between the plurality of fixed blocks, which is driven by the electric field to drive the adapter plate to deform to push the transmission block and the vibration plate. The volume of the cavity is changed, and the ink stored in the cavity is squeezed to be ejected from the plurality of orifices. According to the concept of the present invention, the area in which the transmission block contacts the adapter plate is less than the contact area with the vibration plate. According to the concept of the present invention, the area in which the transmission block is in contact with the adapter plate is substantially equivalent to the contact area with the vibration plate. According to the concept of the present invention, the actuating element is a piezoelectric element which is driven by an electric field to drive the adapter plate to deform. According to the concept of the present invention, the polarization direction of the actuating element is parallel to the direction of the electric field. According to the concept of the present invention, the electrode system of the actuating element is disposed on both sides above the thickness direction of the document. According to the concept of the present invention, the substrate is a nozzle plate having a plurality of orifices. In order to achieve the above object, the present invention further provides a microactuated fluid supply device, comprising: a substrate, forming a cavity for storing a fluid; a vibration plate fixed on the substrate; and a plurality of fixed blocks connected to the vibration plate; The transmission block is connected to the vibration plate; the adapter plate is connected to the transmission block and the edge extension 6 is on the plurality of fixed blocks; and the actuating element is disposed on the transfer plate, and the actuating element can be connected to the electric field Electrical Effects β 1328522 __ '[Embodiment] Some typical embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can be varied on different bears, samples, and variations without departing from the scope of the present invention, and that the descriptions & illustrations are used in nature for illustrative purposes, and are not intended to be limiting. The case. Please refer to the third figure (a), which is a schematic structural view of the microactuated fluid supply device of the first preferred embodiment of the present invention. As shown in the figure, the micro actuating fluid supply device 30 of the present invention can be applied to medical students. The industries such as technology, computer technology, printing or energy are mainly composed of a substrate 301, a vibration plate 302, a plurality of fixing blocks 303, a transmission block 304, an adapter plate 305, and an actuating element 3〇6, wherein the substrate 301 is interposed. A cavity 3011 is formed, which is mainly used for storing a fluid, and the volume of the cavity 3011 is changed due to the deformation of the vibration plate 302, and the vibration plate 302 is fixed on the substrate 301, and can be used for the cavity 3 011. One side is closed. A plurality of fixing blocks 303 are disposed on both sides of the vibration plate 302, and the transmission block 304 is also disposed on the vibration plate 302 and located between the plurality of fixing blocks 303 and corresponding to the cavity 3011, and is transferred. The plate 305 is connected to the transmission block 304 and extends on both sides of the fixing block 303. The actuating element 306 is a piezoelectric element, and the high-voltage electric coefficient lead bismuth titanate (PZT) can be used. The series of piezoelectric powders are manufactured and disposed on the adapter plate 305 and correspondingly disposed between the plurality of fixing blocks 303. The two ends of the actuating member 306 are free ends and are not fixed by the adapter plate 305. 'That is the dotted line indicated by the direction of the arrow indicated by the symbol D in the third figure (a). 12 1328522 • In the present embodiment, the area of the transmission block 304 in contact with the adapter plate 305 is substantially equivalent to the area of contact with the vibration plate 302 and the polarization direction of the actuating element 306·· is its thickness direction. The direction of the arrow indicated by the reference sign (a) in the third figure (a) has a signal electrode 3061' on the upper side in the thickness direction of the actuating element 306, which may be a positive electrode' and a ground electrode 3062 on the lower side, which may be negative. electrode. When a voltage is applied to the signal electrode 3061 and the ground electrode 3062 on both sides of the actuating element 306, a downward electric field is generated, that is, the direction of the arrow indicated by the symbol C in the third figure (a), due to the direction of the electric field c The polarization direction Z of the actuating element 306 is parallel to each other, so that the actuating element 306 deforms when the signal electrode 3061 receives the electric field of the positive pole, that is, the X and Y directions as shown in the third figure (b). The direction of the finger is deformed, because the bottom of the actuating element 306 is connected to the adapter plate 305, the two sides of the adapter plate 305 are fixed on the two fixing blocks 303, and the middle is connected with the transmission block 304, which can be transferred. The plate 305 is interlocked and deformed, that is, the deformation of the dotted line indicated by the arrow direction of the third figure (b) #. E, so that the transmission block 304 located below the adapter plate 305 can transmit the thrust generated by the adapter plate 305. To the vibrating plate 302, to push the vibrating plate 302 to generate an actuation displacement amount, that is, the deformation of the dotted line indicated by the arrow direction of the label F in the third figure (b), thereby changing the volume of the cavity 3011, so that the cavity 3011 is pre-stored. Fluid, to other pre-set spaces Flow to achieve the purpose of supplying fluid. In contrast, when the actuating element 306 is subjected to the electric field of the negative electrode by the ground electrode 3062, deformation occurs, that is, the opposite direction of the dotted line indicated by the arrow direction of the reference numeral β in the third figure (b) (upward arching deformation) , not shown), due to the actuating element 1328552 · (4) 7th _ broadcast page, the bottom of the piece 306 is connected to the adapter plate 305, the two sides of the adapter plate 305 are fixed on the two fixed blocks 303 ' The middle portion is connected to the transmission block 304, so that the adapter plate 305 can be interlocked and deformed, so that the transmission block 304 located under the adapter plate 305 can transmit the tension generated by the adapter plate 305 to the vibration plate 302' to be moved. The vibrating plate 302 generates an actuation displacement amount for the upward movement, thereby changing the volume of the cavity 3011, so that the previously pre-stored fluid of the cavity 3011 flows to other predetermined spaces for the purpose of supplying the fluid. The microactuated fluid supply 30 of the Ruben case is mainly fixed by connecting the bottom of the actuating member 306 to an adapter plate 305, and the two ends of the adapter plate 305 are fixedly connected to the fixed block 303. The bottom portion is connected to the adapter plate 305 and is also regarded as a deformable body. Thus, both ends of the actuating member 306 can be regarded as a free end. As shown by the arrow in the direction of the arrow D in the third figure (a), please refer to In the third figure (a) and the second figure, the present invention compares the displacement relationship of the actuating element with the conventional structure, and it can be seen that both ends of the actuating element 21 and the fixed block are shown in the second figure. 26 is fixed by the dotted line indicated by the arrow direction of the label B. Therefore, when the actuating element 21 is subjected to an electric field, 'the both ends thereof are fixed', and the deformation is relatively suppressed by the both ends, and this embodiment is suppressed. For example, the two ends of the actuating element 3〇6 are not connected and fixed to the adapter plate 305 and can be regarded as a free end. When the actuating element 306 is subjected to an electric field, it can not only deform but also have free ends. At the end, the relative shape variable can be generated, so the overall shape variable is Without limitation, the amount of displacement that causes the vibrating plate 302 to be pushed is larger than the amount of displacement of the vibrating plate 22 by the comparison. In addition, the technology of this case and the conventional non-interchange board is the actual experimental analysis of the vibration of the 1328552 moving plate displacement relationship. Because the two actuate the components across the different bases on the substrate, the analysis can only be the same. ^ The direct control of the transmission block of the cavity and the thickness, the thickness of the same actuating element and the span between the two fixed blocks are compared to illustrate the vibration caused by the actuating element carried by the adapter plate without the transfer Plate displacement difference knot = the following conditions are used for the cavity of the width of 8 coffee, the vibration plate of 10//1, the thickness of the actuator, the transmission block of the diameter of 4, and the transmission block of 100#m thick The results of the maximum displacement of the two vibration plates analyzed by the finite-item analysis method are shown in the following Table 1: The present invention (with adapter plate) 11 10 ------- >Γ夕里V Μ川7 6.29 13 12 8.29 17 16 13 9 10 6.87 11 12 12.1 15 16 18.3 The transmission of Table 1 = 5 shows that the invention is in the same cavity, the same
振動板最大位 Π 度、相同的致動元件厚度、以及相同的 較比對條件下，其振動板所獲得最大位移量皆 案之振動板所獲得最大位移量為大而且#兩者兩 15 1328522 * Imimm ‘ 固定塊間跨距愈大’相對兩者振動板所獲得最大位移量差 .距更明顯更大。 當然，為了增加振動板302的體積變化量，傳動塊304 的寬度愈寬愈好’但該傳動塊304之寬度愈寬，將使其與 轉接板305接觸面積也愈大，相對也會限制轉接板3〇5所 產生之彎曲位移量，因此，傳動塊304的設計需與轉接板 305及振動板302的尺寸相配合，以使振動板3〇2得到最 鲁 佳的位移量及其體積變化量。請參閱第四圖及第五圖，其 係為本案第二及第三較佳實施例之微致動流體供應器之 結構示意圖’微致動流體供應器40及50的結構及致動元 件306的驅動方式係與第一較佳實施例相似，差異點在於 第四圖及第五圖所示之傳動塊的形狀分別為呈現“凸” 字形之凸形結構307及一梯形結構308，凸形結構307及 梯形結構308與轉接板305接觸的面積係較小於與振動板 302接觸面積’可讓轉接板305受到較少的限制，使轉接 φ 板305產生較大的致動位移量，而凸形結構307及梯形結 構308與振動板302側接觸的面積較大的主要目的是讓振 動板302的等效體積變化量變大。 請參閱第六圖’其係為將本案之微致動流體供應器結 構應用於微幫浦結構之剖面示意圖，如圖所示，微幫浦結 構60係具有一入口通道61及一出口通道62,主要用來傳 送一流體，同樣係由基板3〇1、腔體3011、振動板302、 固定塊303、傳動塊304 '轉接板305以及致動元件306 所組成，至於基板301、腔體3011、振動板302、固定塊 1328522 ^ 难⑽日修她 y 303、傳動塊304、轉接板305以及致動元件306的結構及 驅動方式及功效係已詳述於第一較佳實施例中，因此不再 贅述。 當一電壓作用在致動元件306的兩侧電極時，致動元 件306在此電場的作用下會產生一形變作用，並讓轉接板 305產生連動且跟著形變’而位於轉接板305下方的傳動 塊304能將轉接板305所產生的推力傳遞至振動板302， 鲁 以推動振動板302產生致動位移量，將改變腔體3011的 體積’使得經由入口通道61儲存於腔體3011内的流體受 擠壓而經由出口通道62流出至其他預先設定之空間’以 達到供給流體的目的。 請參閱第七圖，其係將本案之微致動流體供應器應用 於嘴墨頭結構之刮面示意圖，如圖所示，喷墨頭結構70 兩側均具有一入口通道71，主要經由入口通道71接收由 一墨水匣（未圖示）所儲存之墨水並將其喷射出去，以對 • 一紙張進行列印，本案之噴墨頭結構70係由基板、振動 板302、固定塊303、傳動塊304、轉接板305以及致動元 件306所組成’至於振動板3〇2、固定塊303、傳動塊304、 轉接板305以及致動元件306的結構及驅動方式及功效係 已詳述於第一較佳實施例中，因此不再贅述。 於本實施例中，基板係為一噴嘴片72，其係形成一腔 體721且具有複數個陣列式排列的喷孔722，當一電壓作 用在致動元件306的兩側電極時，致動元件306在此電場 的作用下會產生一形變作用，並讓轉接板305產生連動且 17 1328522 _ - 卜月?日讀猶歴1 , 跟著形變’而位於轉接板305下方的傳動塊i〇4能將^接 • 板305所產生的推力傳遞至振動板3〇2,以推動振動板302 產生致動位移量，將改變腔體721的體積，使得經由入口 通道71儲存於腔體721内的墨水受擠壓而經由喷嘴片72 之喷孔722噴出複數個液滴至相對應的紙張上，以達到噴 墨列印的目的。 綜上所述，本案之微致動流體供應器主要藉由將致動 元件的底部與轉接板連接固定，而該轉接板兩端連接固定 於兩固定塊上，使得轉接板在致動元件的帶動下亦可視為 一可形變體，且致動元件的兩端並未連接固定於固定塊上 可視為一自由端，當致動元件受電場作用時，致動元件不 僅月產生形變，且其兩端側為自由端，相對可產生形變量 較大，故整體產生形變量較不受到限制，進而能提昇推動 振動板的位移量1本案之微致動流體供應器可應用於微 幫浦結構及嘴墨頭結構上，是以，本案之微致動流體供應 鲁 器極具產業之價值’轰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 18 1328522 _ I _|^Μ·ΙΙ·_· I I I I I I I I 1Γ - I I ' ™ * ^ 【圖式簡單說明】 第一圖（a):其係為習知微致動流體供應器之結構示意圖。 第一圖（b):其係為第一圖（a)形變之結構示意圖。 第二圖：其係為了改善第一圖（a)之缺點所發展出的另一 習知微致動流體供應器之示意圖。 第三圖（a):其係為本案第一較佳實施例之微致動流體供 應器之結構示意圖。 0 第三圖（b):其係為第三圖（a)所示之致動元件之形變 示意圖。 第四圖：其係為本案第二較佳實施例之微致動流體供應器 之結構不意圖。 第五圖：其係為本案第三較佳實施例之微致動流體供應器 之結構示意圖。 第六圖：其係為將本案之微致動流體供應器應用於微幫浦 結構之剖面示意圖。 φ 第七圖：其係為將本案之微致動流體供應器應用於喷墨頭 結構之剖面示意圖。 1328522 【主要元件符號說明】 微致動流體供應器：10、20、30、40、50 基板：11、23、301 振動板：12、22、302 致動元件：13、21、306 腔體：14、24、3011 傳動塊：25、304 轉接板：305 接地電極：3062 梯形結構：308 入口通道：61、71 喷墨頭結構：70 腔體：721 固定塊：26、303 訊號電極：3061 凸形結構：307 微幫浦結構：60 出口通道：62 喷嘴片：72 喷孔：722 A:振動板之彎曲形變 B:致動元件之兩端與固定塊連結處 C :電場方向 φ D:致動元件之兩自由端 E :轉接板之彎曲形變 F :振動板之彎曲形變 X:致動元件之水平形變方向 Y:致動元件之垂直形變方向 Z :致動元件之極化方向 20The maximum displacement of the vibrating plate, the thickness of the same actuating element, and the same comparative condition, the maximum displacement of the vibrating plate obtained by the vibrating plate is large and the maximum displacement is large and #两两15 1328522 * Imimm 'The larger the span between the fixed blocks', the larger the difference in displacement between the two vibrating plates. The distance is more obvious. Of course, in order to increase the volume change of the vibrating plate 302, the width of the transmission block 304 is as wide as possible. However, the wider the width of the transmission block 304, the larger the contact area with the interposer plate 305, and the relative limitation. The amount of bending displacement generated by the adapter plate 3〇5, therefore, the design of the transmission block 304 needs to match the size of the adapter plate 305 and the vibration plate 302, so that the vibration plate 3〇2 obtains the most excellent displacement amount and Its volume change amount. Please refer to the fourth and fifth figures, which are schematic structural diagrams of the microactuated fluid supply device of the second and third preferred embodiments of the present invention, the structure of the microactuated fluid supply devices 40 and 50 and the actuating element 306. The driving manner is similar to that of the first preferred embodiment. The difference is that the shapes of the transmission blocks shown in the fourth and fifth figures are respectively a convex structure 307 and a trapezoidal structure 308, which are convex. The area where the structure 307 and the trapezoidal structure 308 are in contact with the adapter plate 305 is smaller than the contact area with the vibrating plate 302, which allows the adapter plate 305 to be less restricted, resulting in a larger actuation displacement of the transfer φ plate 305. The main purpose of the larger area of the convex structure 307 and the trapezoidal structure 308 in contact with the vibrating plate 302 side is to increase the equivalent volume change amount of the vibrating plate 302. Please refer to the sixth figure, which is a schematic cross-sectional view of the micro-actuator fluid supply structure of the present invention applied to the micro-push structure. As shown, the micro-push structure 60 has an inlet passage 61 and an outlet passage 62. It is mainly used to transport a fluid, and is also composed of a substrate 3〇1, a cavity 3011, a vibration plate 302, a fixed block 303, a transmission block 304' adapter plate 305, and an actuating element 306. As for the substrate 301 and the cavity 3011, the vibrating plate 302, the fixing block 1328522 ^ difficult (10) repair her y 303, the transmission block 304, the adapter plate 305 and the actuating element 306 structure and driving mode and function are detailed in the first preferred embodiment Therefore, I will not repeat them. When a voltage is applied to the electrodes on both sides of the actuating element 306, the actuating element 306 generates a deformation under the action of the electric field, and causes the adapter plate 305 to be interlocked and deformed 'below the adapter plate 305. The transmission block 304 can transmit the thrust generated by the adapter plate 305 to the vibration plate 302 to push the vibration plate 302 to generate an actuation displacement amount, which will change the volume of the cavity 3011 so that it is stored in the cavity 3011 via the inlet passage 61. The fluid inside is squeezed and flows out through the outlet passage 62 to other predetermined spaces 'to achieve the purpose of supplying the fluid. Referring to the seventh figure, the microactuated fluid supply device of the present invention is applied to the scraping surface of the nozzle head structure. As shown, the ink jet head structure 70 has an inlet passage 71 on both sides thereof, mainly through the inlet. The channel 71 receives the ink stored by an ink cartridge (not shown) and ejects it to print a sheet of paper. The ink jet head structure 70 of the present invention is composed of a substrate, a vibrating plate 302, a fixing block 303, The structure, driving mode and function of the transmission block 304, the adapter plate 305 and the actuating element 306 as for the vibrating plate 3〇2, the fixed block 303, the transmission block 304, the adapter plate 305 and the actuating element 306 are detailed It is described in the first preferred embodiment, and therefore will not be described again. In this embodiment, the substrate is a nozzle piece 72, which is formed with a cavity 721 and has a plurality of arrays of orifices 722. When a voltage acts on the electrodes on both sides of the actuation element 306, actuation is performed. The element 306 generates a deformation effect under the action of the electric field, and causes the adapter plate 305 to generate a linkage and a transmission block i located below the adapter plate 305 following the deformation. The 〇4 can transmit the thrust generated by the slab 305 to the vibrating plate 3〇2 to push the vibrating plate 302 to generate an actuation displacement amount, which will change the volume of the cavity 721 so as to be stored in the cavity 721 via the inlet passage 71. The ink inside is squeezed to eject a plurality of droplets onto the corresponding paper through the orifice 722 of the nozzle sheet 72 for inkjet printing. In summary, the microactuated fluid supply of the present invention is mainly fixed by connecting the bottom of the actuating element and the adapter plate, and the two ends of the adapter plate are fixedly connected to the two fixed blocks, so that the adapter plate is The movable component can also be regarded as a deformable body, and the two ends of the actuating component are not connected and fixed on the fixed block as a free end. When the actuating component is subjected to an electric field, the actuating component not only deforms monthly. And the two ends are free ends, the relative deformation can be relatively large, so the overall shape variable is not limited, and thus the displacement of the vibrating plate can be increased. 1 The microactuated fluid supply of the present case can be applied to micro The structure of the pump and the structure of the ink head are based on the fact that the micro-actuated fluid supply of the case is extremely valuable in the industry. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 18 1328522 _ I _|^Μ·ΙΙ·_· I I I I I I I IΓ I I ' TM * ^ [Simple description of the diagram] Figure 1 (a): This is a schematic diagram of the structure of a conventional microactuated fluid supply. First figure (b): It is a schematic structural view of the deformation of the first figure (a). Second Figure: A schematic view of another conventional microactuated fluid supply developed to improve the disadvantages of Figure 1(a). Fig. 3(a) is a schematic view showing the structure of the microactuated fluid supply device of the first preferred embodiment of the present invention. 0 Fig. 3(b): This is a schematic diagram of the deformation of the actuating element shown in the third figure (a). Fourth Figure: It is a schematic construction of the microactuated fluid supply of the second preferred embodiment of the present invention. Fig. 5 is a schematic view showing the structure of the microactuated fluid supply device of the third preferred embodiment of the present invention. Figure 6 is a schematic cross-sectional view of the microactuator fluid supply of the present invention applied to the micro-push structure. φ Fig. 7 is a schematic cross-sectional view showing the application of the microactuated fluid supply of the present invention to the structure of the ink jet head. 1328522 [Explanation of main component symbols] Microactuated fluid supply: 10, 20, 30, 40, 50 Substrate: 11, 23, 301 Vibrating plate: 12, 22, 302 Actuating components: 13, 21, 306 Cavity: 14, 24, 3011 Transmission block: 25, 304 Adapter plate: 305 Grounding electrode: 3062 Trapezoidal structure: 308 Inlet channel: 61, 71 Inkjet head structure: 70 Cavity: 721 Fixed block: 26, 303 Signal electrode: 3061 Convex structure: 307 Micro-pull structure: 60 Outlet channel: 62 Nozzle piece: 72 Nozzle: 722 A: Bending deformation of the vibrating plate B: Joint of the two ends of the actuating element and the fixed block C: Electric field direction φ D: Two free ends of the actuating element E: bending deformation of the adapter plate F: bending deformation of the vibrating plate X: horizontal deformation direction of the actuating element Y: vertical deformation direction of the actuating element Z: polarization direction of the actuating element 20