CN101306793B - Micro-actuating fluid supply machine - Google Patents
Micro-actuating fluid supply machine Download PDFInfo
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- CN101306793B CN101306793B CN2007101063510A CN200710106351A CN101306793B CN 101306793 B CN101306793 B CN 101306793B CN 2007101063510 A CN2007101063510 A CN 2007101063510A CN 200710106351 A CN200710106351 A CN 200710106351A CN 101306793 B CN101306793 B CN 101306793B
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Abstract
The invention relates to a micro-actuated fluid supplier, which comprises a substrate having a cavity for storing a fluid; a vibrating plate fixedly arranged on the substrate to seal one side of the cavity; a plurality of fixed blocks connected with two side edges of the vibrating plate; a transmission block arranged among the plurality of fixed blocks and connected with the vibrating plate; an adapter plate connected with the transmission block and having both sides thereof extended to and fixed on the plurality of fixed blocks; and an actuating element arranged on the adapter plate and among the plurality of fixed blocks. Under the action of an electrical field, the actuating element drives the adapter plate to generate deformation and push the transmission block and the vibrating plate to change the volume of the cavity, thereby pushing the fluid in the cavity to flow.
Description
Technical field
The invention relates to a kind of micro-actuating fluid supply machine, refer to a kind of micro-actuating fluid supply machine that is applicable to micro-pump structure and ink gun structure especially.
Background technology
In each field, no matter be industry such as medicine, computer technology, printing, the energy at present, product all develops towards sophistication and microminiaturization direction, wherein the fluid supplying structure that products such as Micropump, sprayer, ink gun, industrial printing equipment comprised is its key technology, therefore, how to break through its technical bottleneck, be the important content of development by innovation structure.
See also Fig. 1 (a), it is the structural representation of existing micro-actuating fluid supply machine, as shown in the figure, existing micro-actuating fluid supply machine 10 comprises substrate 11, oscillating plate 12 and actuation element 13, wherein 11 of two substrates form a cavity 14, be mainly used to storaging liquid, and the two ends of oscillating plate 12 are fixedly arranged on the substrate 11 and one side closed with cavity 14, are the positions that are arranged on the oscillating plate 12 and correspond to this cavity 14 as for actuation element 13.
Existing micro-actuating fluid supply machine 10 can be by applying suitable electric field on actuation element 13, so that actuation element 13 produces a deformation, the i.e. direction deformation of X and Y direction indication shown in Fig. 1 (b), these actuation element 13 connections are positioned oscillating plate 12 again, and oscillating plate 12 both sides are fixed on the substrate 11, and then make oscillating plate 12 interlocks of connection and follow deformation, because the piezoelectricity amount of contraction that actuation element 13 produces and the deflection of oscillating plate 12 have difference, to cause whole micro-actuating fluid supply machine 10 to produce the flowing mode of doing of crooked (bend) form, promptly as the crooked deformation of the direction of arrow indication dotted line of Fig. 1 (b) label A, oscillating plate 12 will produce up-down vibration because of bending shape, therefore changed the volume of cavity 14 by the deformation of oscillating plate 12, make the fluid that cavity 14 originally prestored, flow to other predefined spaces, to reach the purpose of supplying with fluid.
Though the structure of existing micro-actuating fluid supply machine 10 can be along with the thickness of the thickness of the size of cavity 14, actuation element 13 and oscillating plate 12 and is influenced the volume change of its cavity 14, but no matter above-mentioned condition how to change equal because of the restriction that is subjected to the border bigger, and the size of existing actuation element 13 needs along with the size of cavity 14 is dwindled and dwindled, so that the location is more difficult and increase technologic difficulty, and the effect that causes overall structure to promote is limited.
In order to make micro-actuating fluid supply machine can reach the demand of bigger actuating benefit, therefore the manufacturer of this industry provides micro-actuating fluid supply machine 20 as shown in Figure 2, as shown in the figure, micro-actuating fluid supply machine 20 comprises actuation element 21, oscillating plate 22, substrate 23, drive block 25 and fixed block 26, wherein, 23 of substrates form a cavity 24, the two ends of oscillating plate 22 are fixedly arranged on the substrate 23 and one side closed with cavity 24,26 of drive block 25 and fixed blocks are fixedly arranged on oscillating plate 22, the mode of existing micro-actuating fluid supply machine 20 improvement is to set up drive block 25 in the below of actuation element 21, and the two ends of actuation element 21 are individually fixed on the fixed block 26, by applying suitable electric field on actuation element 21, make actuation element 21 produce a deformation, and drive block 25 is connected in actuation element 21 belows, so drive block 25 also will follow interlock and and then deformation, and then promotes (push) oscillating plate 22 and produce displacements, impel the volume of cavity 24 to be changed, reach the purpose of supplying with fluid.
Because the two ends of actuation element 21 all link fixing with fixed block 26, dotted line place as the direction of arrow indication of Fig. 2 label B, when actuation element 21 is subjected to electric field action, though can produce deformation, but its both end sides is fixed, and produces the inhibition that the deformation meeting is subjected to both end sides relatively, and then makes actuation element 21 deformation meetings be subjected to certain restriction, the displacement that can produce the promotion oscillating plate thus is with limited, and overall structure can't reach good usefulness.
Therefore, how to develop a kind of micro-actuating fluid supply machine that overcomes above-mentioned prior art disappearance, real in pressing for the problem of solution at present.
Summary of the invention
Main purpose of the present invention is to provide a kind of micro-actuating fluid supply machine, mainly actuation element is fixedly arranged on the keyset and corresponding being arranged between a plurality of fixed blocks, and the two ends of keyset are connected on the fixed block, make that the two ends of actuation element are a free end, be subjected to electric field action following time can not only produce deformation at actuation element, and it is bigger that its two ends are that free end can produce deformation quantity relatively, so the whole deformation quantity that produces more is not restricted, can promote the displacement that promotes oscillating plate, be fixed because of the both end sides of actuation element to solve existing micro-actuating fluid supply machine, can be subjected to the inhibition of both end sides when producing deformation when electric field action, make the deformation of actuation element restricted, the displacement that can produce the promotion oscillating plate is with limited, and the limited shortcoming of effect that causes overall structure to promote.
For reaching above-mentioned purpose, of the present invention one implements the sample attitude for a kind of micro-actuating fluid supply machine is provided than broad sense, and it comprises: substrate forms cavity, in order to store fluid; Oscillating plate is fixedly arranged on the substrate, with a side of closed cavity; A plurality of fixed blocks are connected in the dual-side of oscillating plate; Drive block is arranged between a plurality of fixed blocks and with oscillating plate and is connected; Keyset is connected on the drive block and the both sides extension is fixedly arranged on a plurality of fixed blocks; And actuation element, be arranged on the keyset and corresponding being arranged between a plurality of fixed blocks, it is under electric field action, drive keyset and produce deformation, to push drive block and oscillating plate, make cavity produce Volume Changes, be squeezed and flow so that be stored in fluid in the cavity.
According to conception of the present invention, wherein the area that contacts with keyset of drive block is to be smaller than and the oscillating plate contact area.
According to conception of the present invention, wherein the area that contacts with keyset of drive block is equal in fact and the oscillating plate contact area.
According to conception of the present invention, wherein drive block is a convex structure.According to conception of the present invention, wherein drive block is a trapezium structure.
According to conception of the present invention, wherein actuation element is a piezoelectric element, and it drives keyset down in electric field action and produces deformation.
According to conception of the present invention, wherein the polarised direction of actuation element is parallel to each other with direction of an electric field.
According to conception of the present invention, wherein the electrode of actuation element is the both sides up and down that are arranged at its thickness direction.
For reaching above-mentioned purpose, the present invention provides a kind of micro-pump structure in addition, and in order to transmit fluid and to have exit passageway and access road, it comprises: substrate, form cavity, and cavity is that exit passageway and access road are connected; Oscillating plate is fixedly arranged on the substrate, with a side of closed cavity; A plurality of fixed blocks are connected in the dual-side of oscillating plate; Drive block is arranged between a plurality of fixed blocks and with oscillating plate and is connected; Keyset is connected on the drive block and the both sides extension is fixedly arranged on a plurality of fixed blocks; And actuation element, be arranged on the keyset and corresponding being arranged between a plurality of fixed blocks, it is under electric field action, drive keyset and produce deformation, to push drive block and oscillating plate, make cavity produce Volume Changes, be squeezed and flow out via exit passageway so that be stored in fluid in the cavity via access road.
According to conception of the present invention, wherein the area that contacts with keyset of drive block is to be smaller than and the oscillating plate contact area.
According to conception of the present invention, wherein the area that contacts with keyset of drive block is equal in fact and the oscillating plate contact area.
According to conception of the present invention, wherein actuation element is a piezoelectric element, and it drives keyset down in electric field action and produces deformation.
According to conception of the present invention, wherein the polarised direction of actuation element is parallel to each other with direction of an electric field.
According to conception of the present invention, wherein the electrode of actuation element is arranged at the both sides up and down of its thickness direction.
For reaching above-mentioned purpose, the present invention provides a kind of ink gun structure again, has in order to receive the access road of ink, and it comprises: substrate forms cavity, and has a plurality of spray orifices; Oscillating plate is fixedly arranged on the substrate, with a side of closed cavity; A plurality of fixed blocks are connected in the dual-side of oscillating plate; Drive block is arranged between a plurality of fixed blocks and with oscillating plate and is connected; Keyset is connected on the drive block and the both sides extension is fixedly arranged on a plurality of fixed blocks; And actuation element, be arranged on the keyset and corresponding being arranged between a plurality of fixed blocks, it is under electric field action, drive keyset and produce deformation, to push drive block and oscillating plate, make cavity produce Volume Changes, so that be stored in that ink in the cavity is squeezed and from a plurality of spray orifices ejections.
According to conception of the present invention, wherein the area that contacts with keyset of drive block is to be smaller than and the oscillating plate contact area.
According to conception of the present invention, wherein the area that contacts with keyset of drive block is equal in fact and the oscillating plate contact area.
According to conception of the present invention, wherein actuation element is a piezoelectric element, and it drives keyset down in electric field action and produces deformation.
According to conception of the present invention, wherein the polarised direction of actuation element is parallel to each other with direction of an electric field.
According to conception of the present invention, wherein the electrode of actuation element is arranged at the both sides up and down of its thickness direction.
According to conception of the present invention, wherein substrate is a nozzle plate, has a plurality of spray orifices.
For reaching above-mentioned purpose, the present invention provides a kind of micro-actuating fluid supply machine again, and it comprises: substrate forms cavity, in order to store fluid; Oscillating plate is fixedly arranged on the substrate; A plurality of fixed blocks are connected in oscillating plate; Drive block, it is connected with oscillating plate; Keyset is connected on the drive block and the edge extension is fixedly arranged on a plurality of fixed blocks; And actuation element, be arranged on the keyset, actuation element can with the electric field electrical function.
Description of drawings
Fig. 1 (a) is the structural representation of existing micro-actuating fluid supply machine.
Fig. 1 (b) is the structural representation of Fig. 1 (a) deformation.
Fig. 2 is the schematic diagram that develops another the existing micro-actuating fluid supply machine that for the shortcoming of improving Fig. 1 (a).
Fig. 3 (a) is the structural representation of the micro-actuating fluid supply machine of the present invention's first preferred embodiment.
Fig. 3 (b) is the deformation schematic diagram of the actuation element shown in Fig. 3 (a).
Fig. 4 is the structural representation of the micro-actuating fluid supply machine of the present invention's second preferred embodiment.
Fig. 5 is the structural representation of the micro-actuating fluid supply machine of the present invention's the 3rd preferred embodiment.
Fig. 6 is for being applied to micro-actuating fluid supply machine of the present invention the generalized section of micro-pump structure.
Fig. 7 is for being applied to micro-actuating fluid supply machine of the present invention the generalized section of ink gun structure.
The specific embodiment
Some exemplary embodiments that embody characteristics of the present invention and advantage will be described in detail in the explanation of back segment.Be understood that the present invention can have various variations on different aspects, its neither departing from the scope of the present invention, and explanation wherein and to be shown in be when the usefulness that explain in essence, but not in order to restriction the present invention.
See also Fig. 3 (a), it is the structural representation of the micro-actuating fluid supply machine of the present invention's first preferred embodiment, as shown in the figure, micro-actuating fluid supply machine 30 of the present invention is given birth to skill applicable to medicine, computer technology, industry such as the printing or the energy, mainly by substrate 301, oscillating plate 302, a plurality of fixed blocks 303, drive block 304, keyset 305 and actuation element 306 are formed, wherein 301 of substrates form a cavity 3011, be mainly used to store fluid, to make that the volume of cavity 3011 is changed because of the deformation influence of oscillating plate 302, and oscillating plate 302 is fixedly arranged on the substrate 301, can be used to the side sealing with cavity 3011.
A plurality of fixed blocks 303 are arranged at the dual-side of oscillating plate 302, and drive block 304 is arranged on the oscillating plate 302 equally and between these a plurality of fixed blocks 303 and correspond to cavity 3011 setting, and keyset 305 its be to be connected on the drive block 304 and both sides are extended respectively and are fixedly arranged on the fixed block 303, as for, actuation element 306 is a piezoelectric element, can adopt the piezoelectricity powder manufacturing of lead zirconate titanate (PZT) series of high tension electricity coefficient to form, it is arranged on the keyset 305 and corresponding being arranged between a plurality of fixed blocks 303, the two ends of actuation element 306 are that free end is not fixed by keyset 305, promptly as the dotted line place of the direction of arrow indication of Fig. 3 (a) label D indication.
In present embodiment, the area that drive block 304 contacts with keyset 305 is equal to the area that contacts with oscillating plate 302 in fact, and the polarised direction of actuation element 306 is its thickness direction, be the direction of arrow of Fig. 3 (a) label Z indication, upside at the thickness direction of actuation element 306 has a signal electrode 3061 in addition, can be positive electrode, downside then has an earth electrode 3062 relatively, can be negative electrode.
When a voltage acts on the both sides signal electrode 3061 of actuation element 306 and earth electrode 3062, can produce an electric field that is directed downwards, be the direction of arrow of Fig. 3 (a) label C indication, because the polarised direction Z of direction of an electric field C and actuation element 306 is parallel to each other, so actuation element 306 can produce a deformation effect under this effect of electric field, the i.e. direction deformation of X and Y direction indication shown in Fig. 3 (b), because of the bottom of actuation element 306 is to be connected on the keyset 305, the both sides of keyset 305 then are fixed on two fixed blocks 303, the centre then is connected with drive block 304, can allow keyset 305 produce interlock and and then deformation, promptly as the deformation of the direction of arrow indication dotted line of Fig. 3 (b) label E, make the drive block 304 that is positioned at keyset 305 belows the thrust that keyset 305 is produced can be passed to oscillating plate 302, produce the actuating displacement to promote oscillating plate 302, promptly as the deformation of the direction of arrow indication dotted line of Fig. 3 (b) label F, and then the volume of change cavity 3011, make the fluid that cavity 3011 originally prestored, flow to other predefined spaces, reach the purpose of supplying with fluid.
Micro-actuating fluid supply machine 30 of the present invention mainly is connected and fixed by a bottom and a keyset 305 with actuation element 306, and these keyset 305 two ends are connected and fixed on the fixed block 303, but actuation element 306 bottoms are connected in and also are considered as a deformable body on the keyset 305 relatively, so the two ends of actuation element 306 can be considered a free end, direction of arrow indication dotted line place as Fig. 3 (a) label D, please consult Fig. 3 (a) and Fig. 2 again, the present invention and existing structure are compared with regard to the displacement relation of actuation element, can find out because the two ends of actuation element 21 shown in Figure 2 all link fixing with fixed block 26, dotted line place as the direction of arrow indication of label B, therefore when actuation element 21 is subjected to electric field action, its both end sides is fixed, produce the inhibition that the deformation meeting is subjected to both end sides relatively, and the two ends of the actuation element 306 of present embodiment are not connected and fixed on and can be considered a free end on the keyset 305, when actuation element 306 is subjected to electric field action, it can not only produce deformation, and its both end sides is a free end, it is bigger to produce deformation quantity relatively, so the whole deformation quantity that produces more is not restricted, and then can produce the displacement of promotion oscillating plate 302 and the displacement of comparison case promotion oscillating plate 12 relatively is big.
In addition, the technology of the present invention and existing no keyset is with regard to actual experiment is analyzed the comparison of oscillating plate displacement relation, because of both actuation element cross-over connections different basis on the substrate of tool cavity, therefore only analyzing can be with regard to the comparison of getting off of the condition of span between identical cavity, identical drive block diameter and thickness, identical actuation element thickness and identical two fixed blocks, so that no keyset and the oscillating plate displacement difference results that actuation element was caused that has keyset to carry to be described out.
Below just under the same terms with the drive block of the actuation element of the cavity of wide 8mm, the oscillating plate of 10 μ m, thick 200 μ m, the thick 100 μ m of diameter 4mm, through resolved the maximum displacement result such as the following table one of both oscillating plates with the finite element analysis method:
Table one
Can find out with above-mentioned analysis data, the present invention is under the condition of span between identical cavity, identical drive block diameter and thickness, identical actuation element thickness and identical two fixed blocks, maximum displacement that its oscillating plate obtains is big than the maximum displacement that oscillating plate obtains of comparison case all, and span is bigger when between both two fixed blocks, and to obtain the maximum displacement gap more obvious bigger for both oscillating plates relatively.
Certainly, in order to increase the volume change of oscillating plate 302, the width of drive block 304 is healed better wide, but the width of this drive block 304 is wideer, to make itself and keyset 305 contacts area also bigger, and also can limit the bending displacement amount that keyset 305 is produced relatively, therefore, the design of drive block 304 needs to match with the size of keyset 305 and oscillating plate 302, so that oscillating plate 302 obtains best displacement and volume change thereof.See also Fig. 4 and Fig. 5, it is the structural representation of the micro-actuating fluid supply machine of second and third preferred embodiment of the present invention, micro-actuating fluid supply machine 40 and 50 structure and the type of drive of actuation element 306 are similar to first preferred embodiment, discrepancy is that the shape of Fig. 4 and drive block shown in Figure 5 is respectively a convex structure 307 and a trapezium structure 308 that presents " protruding " font, the area that convex structure 307 and trapezium structure 308 contact with keyset 305 is to be smaller than and oscillating plate 302 contacts area, can allow keyset 305 be subjected to less restriction, make keyset 305 produce bigger actuating displacement, and the bigger main purpose of area of convex structure 307 and trapezium structure 308 and oscillating plate 302 side contacts is to allow the equivalent volume of oscillating plate 302 change quantitative change greatly.
See also Fig. 6, it is in the generalized section of micro-pump structure with micro-actuating fluid supply machine structure applications of the present invention, as shown in the figure, micro-pump structure 60 has an access road 61 and an exit passageway 62, be mainly used to transmit a fluid, be by substrate 301 equally, cavity 3011, oscillating plate 302, fixed block 303, drive block 304, keyset 305 and actuation element 306 are formed, as for substrate 301, cavity 3011, oscillating plate 302, fixed block 303, drive block 304, the structure of keyset 305 and actuation element 306 and type of drive and effect have been specified in first preferred embodiment, therefore repeat no more.
When a voltage acts on two lateral electrodes of actuation element 306, actuation element 306 can produce a deformation effect under this effect of electric field, and allow keyset 305 produce interlock and and then deformation, and the drive block 304 that is positioned at keyset 305 belows can be passed to the thrust that keyset 305 is produced oscillating plate 302, produce the actuating displacement to promote oscillating plate 302, the volume of cavity 3011 will be changed, make that being stored in fluids in the cavity 3011 via access road 61 is squeezed and flows out to other predefined spaces via exit passageway 62, to reach the purpose of supplying with fluid.
See also Fig. 7, it is the generalized section that micro-actuating fluid supply machine of the present invention is applied to ink gun structure, as shown in the figure, ink gun structure 70 both sides all have an access road 71, mainly receive by the stored ink of an ink cartridges (not shown) and with it and eject via access road 71, so that a paper is printed, ink gun structure 70 of the present invention is by substrate, oscillating plate 302, fixed block 303, drive block 304, keyset 305 and actuation element 306 are formed, as for oscillating plate 302, fixed block 303, drive block 304, the structure of keyset 305 and actuation element 306 and type of drive and effect have been specified in first preferred embodiment, therefore repeat no more.
In present embodiment, substrate is a nozzle piece 72, it forms a cavity 721 and has the spray orifice 722 that a plurality of arrays are arranged, when a voltage acts on two lateral electrodes of actuation element 306, actuation element 306 can produce a deformation effect under this effect of electric field, and allow keyset 305 produce interlock and and then deformation, and the drive block 304 that is positioned at keyset 305 belows can be passed to the thrust that keyset 305 is produced oscillating plate 302, produce the actuating displacement to promote oscillating plate 302, the volume of cavity 721 will be changed, make via access road 71 be stored in that inks in the cavity 721 are squeezed and via a plurality of drops of spray orifice 722 ejections of nozzle piece 72 to corresponding paper, to reach the purpose of inkjet printing.
In sum, micro-actuating fluid supply machine of the present invention mainly is connected and fixed by bottom and keyset with actuation element, and these keyset two ends are connected and fixed on two fixed blocks, but make keyset under the drive of actuation element, also can be considered a deformable body, and the two ends of actuation element are not connected and fixed on and can be considered a free end on the fixed block, when actuation element is subjected to electric field action, actuation element can not only produce deformation, and its both end sides is a free end, it is bigger to produce deformation quantity relatively, so the whole deformation quantity that produces more is not restricted, and then can promote the displacement that promotes oscillating plate, and micro-actuating fluid supply machine of the present invention can be applicable on micro-pump structure and the ink gun structure, and therefore, micro-actuating fluid supply machine of the present invention has the value of industry.
Claims (22)
1. micro-actuating fluid supply machine, it comprises:
One substrate forms a cavity, in order to store a fluid;
One oscillating plate is fixedly arranged on this substrate, to seal a side of this cavity;
A plurality of fixed blocks are connected in the dual-side of this oscillating plate;
One drive block is arranged between these a plurality of fixed blocks and with this oscillating plate and is connected;
One keyset is connected on this drive block and the both sides extension is fixedly arranged on these a plurality of fixed blocks; And
One activates element, be arranged on this keyset and corresponding being arranged between these a plurality of fixed blocks, it is under an electric field action, drive this keyset and produce deformation, to push this drive block and this oscillating plate, make this cavity produce Volume Changes, be squeezed and flow so that be stored in this fluid in this cavity;
Wherein, the drive block that is positioned at the keyset below can be passed to the thrust that keyset produced oscillating plate, produces the actuating displacement to promote oscillating plate, will change the volume of cavity.
2. micro-actuating fluid supply machine as claimed in claim 1 is characterized in that the area that this drive block contacts with this keyset is to be smaller than and this oscillating plate contact area.
3. micro-actuating fluid supply machine as claimed in claim 1 is characterized in that the area that this drive block contacts with this keyset is equal in fact and this oscillating plate contact area.
4. micro-actuating fluid supply machine as claimed in claim 1 is characterized in that this drive block is a convex structure.
5. micro-actuating fluid supply machine as claimed in claim 1 is characterized in that this drive block is a trapezium structure.
6. micro-actuating fluid supply machine as claimed in claim 1 is characterized in that this actuation element is a piezoelectric element, and it drives this keyset down in this electric field action and produces deformation.
7. micro-actuating fluid supply machine as claimed in claim 1, the polarised direction that it is characterized in that this actuation element are parallel to each other with this direction of an electric field.
8. micro-actuating fluid supply machine as claimed in claim 1 is characterized in that the electrode of this actuation element is arranged at the both sides up and down of its thickness direction.
9. micro-pump structure, in order to transmit a fluid and to have an exit passageway and an access road, it comprises:
One substrate forms a cavity, and this cavity is that this exit passageway and this access road are connected;
One oscillating plate is fixedly arranged on this substrate, to seal a side of this cavity;
A plurality of fixed blocks are connected in the dual-side of this oscillating plate;
One drive block is arranged between these a plurality of fixed blocks and with this oscillating plate and is connected;
One keyset is connected on this drive block and the both sides extension is fixedly arranged on these a plurality of fixed blocks; And
One activates element, be arranged on this keyset and corresponding being arranged between these a plurality of fixed blocks, it is under an electric field action, drive this keyset and produce deformation, to push this drive block and this oscillating plate, make this cavity produce Volume Changes, be squeezed and flow out via this exit passageway so that be stored in this fluid in this cavity via this access road;
Wherein, the drive block that is positioned at the keyset below can be passed to the thrust that keyset produced oscillating plate, produces the actuating displacement to promote oscillating plate, will change the volume of cavity.
10. micro-pump structure as claimed in claim 9 is characterized in that the area that this drive block contacts with this keyset is to be smaller than and this oscillating plate contact area.
11. micro-pump structure as claimed in claim 9 is characterized in that the area that this drive block contacts with this keyset is equal in fact and this oscillating plate contact area.
12. micro-pump structure as claimed in claim 9 is characterized in that this actuation element is a piezoelectric element, it drives this keyset down in this electric field action and produces deformation.
13. micro-pump structure as claimed in claim 9, the polarised direction that it is characterized in that this actuation element are parallel to each other with this direction of an electric field.
14. micro-pump structure as claimed in claim 9 is characterized in that the electrode of this actuation element is arranged at the both sides up and down of its thickness direction.
15. an ink gun structure has in order to receive an access road of an ink, it comprises:
One substrate forms a cavity, and has a plurality of spray orifices;
One oscillating plate is fixedly arranged on this substrate, to seal a side of this cavity;
A plurality of fixed blocks are connected in the dual-side of this oscillating plate;
One drive block is arranged between these a plurality of fixed blocks and with this oscillating plate and is connected;
One keyset is connected on this drive block and the both sides extension is fixedly arranged on these a plurality of fixed blocks; And
One activates element, be arranged on this keyset and corresponding being arranged between these a plurality of fixed blocks, it is under an electric field action, drive this keyset and produce deformation, to push this drive block and this oscillating plate, make this cavity produce Volume Changes, so that be stored in that this ink in this cavity is squeezed and from these a plurality of spray orifices ejections;
Wherein, the drive block that is positioned at the keyset below can be passed to the thrust that keyset produced oscillating plate, produces the actuating displacement to promote oscillating plate, will change the volume of cavity.
16. ink gun structure as claimed in claim 15 is characterized in that the area that this drive block contacts with this keyset is to be smaller than and this oscillating plate contact area.
17. ink gun structure as claimed in claim 15 is characterized in that the area that this drive block contacts with this keyset is equal in fact and this oscillating plate contact area.
18. ink gun structure as claimed in claim 15 is characterized in that this actuation element is a piezoelectric element, it drives this keyset down in this electric field action and produces deformation.
19. ink gun structure as claimed in claim 15, the polarised direction that it is characterized in that this actuation element are parallel to each other with this direction of an electric field.
20. ink gun structure as claimed in claim 15 is characterized in that the electrode of this actuation element is arranged at the both sides up and down of its thickness direction.
21. ink gun structure as claimed in claim 15 is characterized in that this substrate is a nozzle plate, has this a plurality of spray orifices.
22. a micro-actuating fluid supply machine, it comprises:
One substrate forms a cavity, in order to store a fluid;
One oscillating plate is fixedly arranged on this substrate;
A plurality of fixed blocks are connected in this oscillating plate;
One drive block, it is connected with this oscillating plate;
One keyset is connected on this drive block and the edge extension is fixedly arranged on these a plurality of fixed blocks; And
One activates element, be arranged on this keyset, this actuation element can with an electric field electrical function;
Wherein, the drive block that is positioned at the keyset below can be passed to the thrust that keyset produced oscillating plate, produces the actuating displacement to promote oscillating plate, will change the volume of cavity.
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| CN101306793A (en) | 2008-11-19 |
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