200846192 • 九、發明說明： 【發明所屬之技術領域】 本案係關於一種微致動流體供應器，尤指一種適用於 微幫浦結構及喷墨頭結構之微致動流體供應器。 【先前技術】 目前於各領域中無論是醫藥、電腦科技、列印、能源 等工業，產品均朝精緻化及微小化方向發展，其中微幫 浦、噴霧器、喷墨頭、工業列印裝置等產品所包含之流體 供應結構為其關鍵技術，是以，如何藉創新結構突破其技 術瓶頸，為發展之重要内容。 請參閱第一圖（a)，其係為習知微致動流體供應器之 結構示意圖，如圖所示，習知微致動流體供應器10係由 壓電元件101、鎳板102以及基板103所構成，壓電元件 參 101係為一壓電基板，可採用高壓電係數之錯鈦酸鉛（PZT) 系列的壓電粉末製造而成，鎳板102的兩端則分別與基板 103相連接，可將兩基板103間所形成之壓力艙1〇4封閉， 至於壓電元件101係設置於鎳板102上且相對應於該壓力 艙104的位置。 習知的微致動流體供應器10可藉由施加適當的電場 於壓電元件101上，以使壓電元件10】產生一形變，進而 使結合之鎳板102連動並且跟著形變，至於，鎳板1〇2形 - 變之方式將根據壓電元件101的結構而定，其功能一般是 6 200846192 _ 藉錄板102如第一圖（b)標號a之箭頭方向所指虛線的 幫曲形變，因此藉由鎳板102之形變得以改變壓力艙104 之體積’使得壓力艙104原先預存之流體，向其他預先設 定之空間流動，以達到供給流體的目的。 雖然習知微致動流體供應器川的結構可隨著壓力艙 1〇4的尺寸、壓電元件1〇1的厚度以及鎳板1〇2的厚度而 影響其墨力艙104的體積變化量，但是無論上述的條件如 • 何改變均因受到邊界的限制較大，且習知的壓電元件101 的尺寸需隨著壓力艙1〇4的尺寸縮小而縮小，以致定位更 困難而增加製程上的困難，將造成整體結構所能提昇的功 效有限。 因此’如何發展一種可改善上述習知技術缺失之微致 動流體供應器及其所適用之微幫浦結構及喷墨頭結構，實 為目前迫切需要解決之問題。 φ 【發明内容】 本案之主要目的在於提供一種微致動流體供應器及 其所適用之微幫浦結構及喷墨頭結構，藉由將微致動器連 接於傳動塊上且將微致動器的兩側延伸固設於複數個固 定端上，使微致動器於-電場作用下，帶動傳動塊產生形 變，以推擠隔層膜，使由基板所構成之壓縮室產生體積變 .化’使儲存於壓縮室内之液體受擠壓而流動，俾解決微致 ，動流體供應器因受到邊界的限制較大，而造成整體結構所 能提昇的功效有限的缺點。 200846192 、 為達上述目的，本案之一較廣義實施樣態為提供/禮 微致動流體供應器，其係包含：基板，形成壓縮室，用以 儲存液體，隔層膜，固設於基板上，以封閉壓縮室之一側， 複數個固定端，連接於隔層膜之兩侧邊；傳動塊，設置於 複數個固定端之間且與隔層膜相連接；以及微致動器，連 接於傳動塊上且兩側延伸固設於複數個固定端上，其係於 一電場作用下，帶動傳動塊產生形變，以推擠隔層膜，使 • 壓縮室產生體積變化，俾使儲存於壓縮室内之液體受擠壓 而流動。 根據本案之構想，其中傳動塊與微致動器接觸之面積 係較小於與隔層膜接觸面積。 根據本案之構想，其中傳動塊與微致動器接觸之面積 實質上係等同於與隔層膜接觸之面積。 根據本案之構想，其中傳動塊為一凸塊結構。 根據本案之構想，其中微致動器係為壓電元件，其係 • 於電場作用下帶動傳動塊產生形變。 根據本案之構想，其中微致動器的極化方向係與電場 方向垂直。 根據本案之構想，其中微致動器的電極係設置於其厚 度方向之上下兩侧。 為達上述目的，本案另提供一種微幫浦結構，用以傳 • 送液體且具有出口通道及入口通道，其係包含：基板，形 成壓縮室，壓縮室係出口通道及入口通道相連通；隔声 膜，固設於基板上，以封閉壓縮室之一側；複數個固定端胃， 8 200846192 連接於隔層膜之兩侧邊； 二 間且與隔層膜相連接；及功，设置於複數個固定端之 兩側延伸固設於複數個二=係，動塊上且 動傳動塊產生形變，以 ，、糸於作用下，帶 化，俾使經由入口通道儲，隔層膜’使麗縮室產生體積變 由出口通道流出。子於廢縮至内之液體受擠壓而經 根據本案之構想，其中傳動塊 而 係較小於與隔層臈接觸面積。 動时接觸之面積 於電場作用下帶:二器係為壓電元件，其係 方向2本案之構想，其中微致動器的極化方向係與電場 根據本案之構想，复抑 度方向之上下兩側。^微致動㈣電極係設置於其厚 以接1=二二案:提供-種噴墨頭結構，具有用 且具有複數個噴孔二M係包含·基板’形成壓縮室， 室之一側；複數個固設於基板上，以封閉屋縮 塊7置於複數個固定傳動 致動态，連接於傳動塊 /、 、 '及微 上’其係於一電場作用下:=伸固設於複數個固定蠕 隔層膜，使壓縮室產生傳:塊產生形變， 生肢和變化，俾使儲存於壓縮室内之 200846192 籌 . 墨水受擠壓而從複數個喷孔喷出。 根據本案之構想，其中傳動塊與微致動器接觸之面積 係較小於與隔層膜接觸面積。 根據本案之構想，其中傳動塊與微致動器接觸之面積 實質上係等同於與隔層膜接觸之面積。 根據本案之構想，其中微致動器係為壓電元件，其係 於電場作用下帶動傳動塊產生形變。 | 根據本案之構想，其中微致動器的極化方向係與電場 方向垂直。 根據本案之構想，其中微致動器的電極係設置於其厚 度方向之上下兩側。 根據本案之構想，其中基板係為喷嘴板，具有複數個 喷孔。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 請參閱第二圖（a)，其係為本案第一較佳實施例之微 致動結構之結構示意圖，如圖所示，本案之微致動流體供 應器20主要由一基板21、一隔層膜22、複數個固定端23、 傳動塊24以及微致動器25所構成，其中基板21間形成 200846192 -壓縮室211，主要用來儲存液體，將因隔層膜22之形變 影響而使得壓縮室211之體積受到改變，而隔層膜22係 固設於基板21上’可用來將i縮室211的—側邊封閉。 後數個固定端23係設置於隔層膜22的兩侧邊，而傳 動塊24同樣設置於隔層膜22上且位於該複數個固定端23 之間並相對應於該慶縮室211設置，至於，微致動器24 係為-屢電元件’ tr採用高壓電係數之錯鈦酸錯（ρζτ)200846192 • Nine, invention description: [Technical field of the invention] The present invention relates to a microactuated fluid supply, and more particularly to a microactuated fluid supply suitable for a micro-pull structure and an ink jet head structure. [Prior Art] At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization, among which micro-pull, sprayer, inkjet head, industrial printing device, etc. The fluid supply structure contained in the product is its key technology. It is how to break through its technical bottleneck with innovative structure and is an important part of development. Please refer to the first figure (a), which is a schematic structural view of a conventional microactuated fluid supply device. As shown, the conventional microactuated fluid supply 10 is composed of a piezoelectric element 101, a nickel plate 102 and a substrate. In the configuration of 103, the piezoelectric element reference 101 is a piezoelectric substrate, and can be fabricated by using a piezoelectric powder of a high-voltage electric coefficient lead (PZT) series, and both ends of the nickel plate 102 are respectively connected to the substrate 103. When connected, the pressure chamber 1〇4 formed between the two substrates 103 can be closed, and the piezoelectric element 101 is disposed on the nickel plate 102 and corresponds to the position of the pressure chamber 104. The conventional micro-actuated fluid supply 10 can deform the piezoelectric element 10 by applying an appropriate electric field to the piezoelectric element 101, thereby causing the combined nickel plate 102 to be linked and deformed. As for nickel The shape of the board 1 〇 2 - depending on the structure of the piezoelectric element 101, its function is generally 6 200846192 _ the borrowing plate 102 as shown in the arrow (a) of the first figure (b) Therefore, by changing the volume of the pressure chamber 104 by the shape of the nickel plate 102, the fluid pre-stored by the pressure chamber 104 flows to other predetermined spaces to achieve the purpose of supplying the fluid. Although the structure of the conventional microactuated fluid supply device can affect the volume change of the ink tank 104 with the size of the pressure chamber 1〇4, the thickness of the piezoelectric element 1〇1, and the thickness of the nickel plate 1〇2. However, regardless of the above conditions, the change is limited by the boundary, and the size of the conventional piezoelectric element 101 needs to be reduced as the size of the pressure chamber 1〇4 is reduced, so that the positioning is more difficult and the process is increased. The difficulty of the above will result in limited effectiveness of the overall structure. Therefore, how to develop a micro-actuator fluid supply and a micro-push structure and an ink-jet head structure which can improve the above-mentioned conventional techniques are urgently needed to be solved. Φ [Summary of the Invention] The main object of the present invention is to provide a microactuated fluid supply device and a micro-pull structure and ink jet head structure applicable thereto, which are micro-actuated by connecting a microactuator to a transmission block. The two sides of the device are extended and fixed on a plurality of fixed ends, so that the microactuator drives the transmission block to deform under the action of the electric field to push the interlayer film to cause volume change of the compression chamber formed by the substrate. The liquid stored in the compression chamber is squeezed and flows, and the solution is microscopic. The dynamic fluid supply is limited by the boundary, which has the disadvantage that the overall structure can be improved. 200846192, in order to achieve the above purpose, one of the more general aspects of the present invention is to provide a microactuator fluid supply device comprising: a substrate, a compression chamber for storing a liquid, a barrier film, and a substrate. a side of the closed compression chamber, a plurality of fixed ends connected to both sides of the interlayer film; a transmission block disposed between the plurality of fixed ends and connected to the interlayer film; and a microactuator, connected The drive block is extended on both sides of the transmission block and fixed on a plurality of fixed ends, which are driven by an electric field to drive the transmission block to deform, so as to push the interlayer film, so that the compression chamber generates a volume change and is stored in the The liquid in the compression chamber is squeezed and flows. According to the concept of the present invention, the area in which the transmission block is in contact with the microactuator is smaller than the area in contact with the interlayer film. According to the concept of the present invention, the area in which the transmission block is in contact with the microactuator is substantially equivalent to the area in contact with the interlayer film. According to the concept of the present case, the transmission block is a bump structure. According to the concept of the present invention, the microactuator is a piezoelectric element which is driven by an electric field to cause deformation of the transmission block. According to the concept of the present invention, the polarization direction of the microactuator is perpendicular to the direction of the electric field. According to the concept of the present invention, the electrode system of the microactuator is disposed on both sides above the thickness direction. In order to achieve the above object, the present invention further provides a micro-pump structure for transmitting liquid and having an outlet passage and an inlet passage, which comprises: a substrate, forming a compression chamber, and the compression chamber is connected to the outlet passage and the inlet passage; The sound film is fixed on the substrate to close one side of the compression chamber; a plurality of fixed end stomachs, 8 200846192 are connected to both sides of the interlayer film; two are connected to the interlayer film; The two sides of the plurality of fixed ends are extended and fixed on a plurality of two=systems, and the movable transmission block is deformed, and the belt is deformed under the action, and is stored in the inlet passage, and the interlayer membrane is made The volume change of the condensing chamber is discharged from the outlet channel. The liquid that has been shrunk to the inside is squeezed according to the concept of the present invention, wherein the transmission block is smaller than the contact area with the interlayer. The area of the dynamic contact is under the action of the electric field: the two is a piezoelectric element, which is the direction of the case. The polarization direction of the microactuator and the electric field are based on the concept of the case, and the direction of resilience is above On both sides. ^Micro-actuation (four) electrode system is set to its thickness to connect 1 = two two cases: provide a type of inkjet head structure, has a plurality of nozzles, two M-systems, a substrate, and a compression chamber, one side of the chamber a plurality of fixings are fixed on the substrate, and the closed house block 7 is placed in a plurality of fixed transmission dynamics, and is connected to the transmission block /, 'and micro on' to be under an electric field: A plurality of fixed vent membranes are generated to cause deformation of the compression chamber, deformation, limbs and changes, and the ink stored in the compression chamber is squeezed and ejected from a plurality of orifices. According to the concept of the present invention, the area in which the transmission block is in contact with the microactuator is smaller than the area in contact with the interlayer film. According to the concept of the present invention, the area in which the transmission block is in contact with the microactuator is substantially equivalent to the area in contact with the interlayer film. According to the concept of the present invention, the microactuator is a piezoelectric element that drives the transmission block to deform under the action of an electric field. According to the concept of the present invention, the polarization direction of the microactuator is perpendicular to the direction of the electric field. According to the concept of the present invention, the electrode system of the microactuator is disposed on both sides above the thickness direction. According to the concept of the present invention, the substrate is a nozzle plate having a plurality of orifices. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of Please refer to the second figure (a), which is a schematic structural view of the microactuation structure of the first preferred embodiment of the present invention. As shown in the figure, the microactuated fluid supply 20 of the present invention is mainly composed of a substrate 21 and a partition. The layer film 22, the plurality of fixed ends 23, the transmission block 24 and the microactuator 25 are formed, wherein the substrate 21 forms a 200846192 - compression chamber 211 for storing liquid, which is caused by the deformation of the interlayer film 22. The volume of the compression chamber 211 is changed, and the interlayer film 22 is fixed to the substrate 21 to be used to close the side of the i-contraction chamber 211. The plurality of fixed ends 23 are disposed on both sides of the interlayer film 22, and the transmission block 24 is also disposed on the interlayer film 22 and located between the plurality of fixed ends 23 and corresponding to the celebration chamber 211. As for the microactuator 24, the electric component 'tr' uses the high-voltage electric coefficient of the wrong titanic acid error (ρζτ).
系列的壓電粉末製造而成’其係連接於傳動塊沾上且兩 側分別延伸固設於固定端23上。 於本實施财，傳動塊24與微致動器25接觸之面積 貫質上等同於與隔賴22接觸之面積，且微致動器烈的 :化方向刀別攸墨縮室211 #中心到兩侧固定端23，如第 =⑴標號Β所指的箭頭方向，另外在微致動器烈的 Ζ方向的上侧具有—訊號電極25卜可為正電極，而相 、下侧則具有一接地電極252，可為負電極。 接地I —電壓作用在微致動11 25的兩側訊號電極251及 2電極252時，會產生一方向向上之電場，由於電場^ ^微致動器25的極化方向B互相垂直，因此微致動器 一此電場的作用下係以剪切的方式向隔層膜22及廢縮 =211方向移動，由於微致動器烈的兩侧係固設於固定 端上且傳動塊24係連接於微致動器25與隔層膜22之 口此傳動塊24能夠將微致動器25所產生的推力傳遞 至^層膜22，使得隔層膜22也跟著被擠壓變形，即產^ 如弟二圖（b)標號C之箭頭方向所指虛線的形變，這將 11 200846192 籌 、 改變壓縮室211的體積，使得原本儲存於屢縮室2i 1内, 的液體’向其他預先設定之空間流動，以達到供給流體的 目的。 本案之微致動流體供應器20主要藉由傳動塊24來連 接微致動器25及隔層膜22,以將微致動器25所產生的推 力傳遞至隔層膜22，而改變壓縮室211的體積，使得原本 儲存於壓縮室211内部的液體，向其他預先設定之空間流 鲁 動，可使微致動為2 5受到邊界的限制較少，以產生較大 的位移量。 當然，本案之微致動器25並不侷限於剪切式壓電元 件，亦可為一彎曲型壓電元件，即電場方向和微致動器的 極化方向互相平行。 明參閱弟二圖（a)，其係為本案第二較佳實施例之微 致動體供應器之結構不意圖’本實施例之微致動流體供 應裔20的結構及微致動器25的驅動方式係與第一較佳實 ❿施例相似，差異點在於本實施例之傳動塊的形狀傣為一凸 形之凸塊結構26，其與微致動器25接觸的面積係較小於 與隔層膜22接觸面積，主要的目的是讓微致動器25受到 較少的限制，使微致動器25產生較大的致動位移量，而 凸塊結構26與隔層膜22側接觸的面積較大的主要目的是 讓隔層膜22的等效體積變化量變大。 . 當—電壓作用在微致動器25的兩側訊號電極251及 接也包極252時，微致動器25在此電場的作用下係以剪 切的方式向隔層膜22及壓縮室211方向移動，凸塊結構 12 200846192 • 26能夠將微致動器25所產生的推力傳遞至隔層膜22，使 得隔層膜22也跟著被擠壓變形，即產生如第三圖（b)標 號D之箭頭方向所指虛線的形變，由第二圖（b)與第三 圖（b)中相較可知，本實施例的傳動塊使用凸塊結構26 的設計，微致動器25推擠隔層膜22的位移量較大，在相 同的操作條件下可降低驅動電壓。 請參閱第四圖（a)，其係為將本案之微致動流體供應 • 器應用於微幫浦結構或是噴墨頭結構之上視圖，請配合參 閱第四圖（b)，其係為將本案之微致動流體供應器應用於 微幫浦結構之A-A剖面圖，如圖所示，微幫浦結構40係 具有一入口通道（inlet) 41及一出口通道（outlet) 42， 主要用來傳送一液體，同樣係由基板21、壓縮室211、隔 層膜22、複數個固定端（未圖示）、傳動塊24以及微致動 器25所構成，至於基板21、壓縮室211、隔層膜22、複 數個固定端（未圖示）、傳動塊24以及微致動器25的結 鲁 構及驅動方式及功效係已詳述於第一較佳實施例中，因此 不再贅述。 當一電壓作用在微致動器25的兩側電極時，微致動 器25在此電場的作用下係以剪切的方式向隔層膜22及壓 縮室211方向移動，傳動塊24能夠將微致動器25所產生 的推力傳遞至隔層膜22，使得隔層膜22也跟著被擠壓變 形（如第四圖（c)所示），將改變壓縮室2 Π的體積，使 得經由入口通道41儲存於壓縮室211内的液體受擠壓而 經由出口通道42流出至其他預先設定之空間，以達到供 13 200846192 給流體的目的。 微幫浦結構40的實施態樣可為具有複數個流體入口 通道41搭配單個流體入口通道42(如第五圖（a)所示）； 複數個流體出口通道42與單個流體入口通道41 (如第五 圖（b)所示），或是複數個微幫浦結構40的出口通道42 或入口通道41連結在一起（如第五圖（c)及（d)所示）。 請參閱第四圖（a)並配合參閱第六圖（a)及（b)， 其中第六圖（a)及（b)係分別為將本案之微致動流體供 應器應用於喷墨頭結構之第四圖（a)之A-A及B-B剖面 圖，如圖所示，喷墨頭結構50兩侧均具有一入口通道51， 主要經由入口通道51接收由一墨水匣（未圖示）所儲存 之墨水並將其喷射出去，以對一紙張進行列印，本案之喷 墨頭結構50係由基板、隔層膜22、複數個固定端23、傳 動塊24以及微致動器25所構成，至於隔層膜22、複數個 固定端（未圖示）、傳動塊24以及微致動器25的結構及 驅動方式及功效係已詳述於第一較佳實施例中，因此不再 贅述。 於本實施例中，基板係為一喷嘴片52，其係形成一壓 縮室521且具有複數個陣列式排列的喷孔522，當一電壓 作用在微致動器25的兩侧電極時，微致動器25在此電場 的作用下將向隔層膜22及壓縮室521方向移動，傳動塊 24能夠將微致動器25所產生的推力傳遞至隔層膜22，使 得隔層膜22也跟著被擠壓變形（如第六圖（b)及（c) 所示），將改變壓縮室521的體積，使得經由入口通道41 14 200846192 麝 • 儲存於壓縮室211内的墨水受擠壓而經由噴嘴片52之喷 孔522喷出複數個液滴523至相對應的紙張上，以達到噴 墨列印的目的。 貝 綜上所述，本案之微致動流體供應器主要藉由傳動塊 來連接微致動器及隔層膜，以將微致動器所產生的推力傳 遞至隔層膜，而改變壓縮室的體積，使得原本儲存於壓縮 室内部的液體，向其他預先設定之空間流動，可使微致動 φ 器受到邊界的限制較少，並可應用於微幫浦結構或是噴墨 頭結構上。 是以，本案之微致動流體供應器及其所適用之微幫浦 結構及喷墨頭結構極具產業之價值，爰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。A series of piezoelectric powders are manufactured which are attached to the drive block and are attached to the fixed ends 23 on both sides. In the present implementation, the area of the transmission block 24 in contact with the microactuator 25 is substantially equivalent to the area in contact with the spacer 22, and the microactuator is strong: the direction of the knife is different from the ink chamber 211 # center to The fixed ends 23 on both sides have the direction of the arrow indicated by the reference numeral (1), and the upper side of the micro-actuator has a signal electrode 25 which can be a positive electrode and a phase on the lower side. The ground electrode 252 can be a negative electrode. When the grounding I-voltage is applied to the signal electrodes 251 and 2 electrodes 252 on both sides of the micro-actuator 11 25, an electric field in a direction is generated, and the polarization direction B of the micro-actuator 25 is perpendicular to each other due to the electric field. The actuator is moved in a shearing manner to the interlayer film 22 and the scraping direction 211 by the electric field, and the two sides of the microactuator are fixed on the fixed end and the transmission block 24 is connected. At the mouth of the microactuator 25 and the interlayer film 22, the transmission block 24 can transmit the thrust generated by the microactuator 25 to the film 22, so that the interlayer film 22 is also pressed and deformed, that is, the product is produced. If the arrow in the direction of the arrow C of the second figure (b) is deformed by the dotted line, this will increase the volume of the compression chamber 211 by 11 200846192, so that the liquid originally stored in the retractable chamber 2i 1 is set to other presets. The space flows to achieve the purpose of supplying fluid. The microactuated fluid supply 20 of the present invention mainly connects the microactuator 25 and the interlayer film 22 by the transmission block 24 to transmit the thrust generated by the microactuator 25 to the interlayer film 22, thereby changing the compression chamber. The volume of 211 causes the liquid originally stored in the compression chamber 211 to be rusted to other predetermined spatial streams, so that the micro-actuation is less limited by the boundary to generate a larger displacement. Of course, the microactuator 25 of the present invention is not limited to the shearing piezoelectric element, and may be a curved piezoelectric element in which the direction of the electric field and the polarization direction of the microactuator are parallel to each other. Referring to FIG. 2(a), the structure of the microactuator supply of the second preferred embodiment of the present invention is not intended to be the structure of the microactuated fluid supply 20 of the present embodiment and the microactuator 25. The driving method is similar to that of the first preferred embodiment. The difference is that the shape of the transmission block of the embodiment is a convex bump structure 26, and the area of contact with the microactuator 25 is small. In contact with the interlayer film 22, the primary purpose is to subject the microactuator 25 to less restriction, causing the microactuator 25 to produce a greater amount of actuation displacement, while the bump structure 26 and the barrier film 22 The main purpose of the larger area of the side contact is to increase the equivalent volume change of the interlayer film 22. When the voltage acts on the signal electrodes 251 and the packaged poles 252 on both sides of the microactuator 25, the microactuator 25 is sheared to the interlayer film 22 and the compression chamber by the electric field. Moving in the 211 direction, the bump structure 12 200846192 • 26 can transmit the thrust generated by the microactuator 25 to the interlayer film 22, so that the interlayer film 22 is also pressed and deformed, that is, as shown in the third figure (b). The deformation of the arrow indicated by the arrow direction of the reference D is compared with that of the second figure (b) and the third figure (b). The transmission block of the present embodiment uses the design of the bump structure 26, and the microactuator 25 pushes The amount of displacement of the extruded interlayer film 22 is large, and the driving voltage can be lowered under the same operating conditions. Please refer to the fourth figure (a), which is to apply the microactuated fluid supply device of the present case to the micro-pull structure or the top view of the inkjet head structure. Please refer to the fourth figure (b). To apply the microactuated fluid supply of the present invention to the AA profile of the micro-pump structure, as shown, the micro-push structure 40 has an inlet 41 and an outlet 42 . The liquid is used to transport a liquid, and is also composed of a substrate 21, a compression chamber 211, a barrier film 22, a plurality of fixed ends (not shown), a transmission block 24, and a microactuator 25. As for the substrate 21 and the compression chamber 211 The structure and function of the interlayer film 22, the plurality of fixed ends (not shown), the transmission block 24, and the microactuator 25 are detailed in the first preferred embodiment, and thus are no longer detailed. Narration. When a voltage acts on the electrodes on both sides of the microactuator 25, the microactuator 25 moves in a shearing manner toward the interlayer film 22 and the compression chamber 211 by the electric field, and the transmission block 24 can The thrust generated by the microactuator 25 is transmitted to the interlayer film 22, so that the interlayer film 22 is also pressed and deformed (as shown in the fourth figure (c)), which will change the volume of the compression chamber 2 , so that The liquid stored in the compression chamber 211 of the inlet passage 41 is squeezed and flows out through the outlet passage 42 to other predetermined spaces to achieve the purpose of supplying fluid for 13 200846192. Embodiments of the micro-pump structure 40 can have a plurality of fluid inlet passages 41 associated with a single fluid inlet passage 42 (as shown in Figure 5(a)); a plurality of fluid outlet passages 42 and a single fluid inlet passage 41 (e.g. The fifth (b) is shown, or the outlet channels 42 or the inlet channels 41 of the plurality of micro-push structures 40 are joined together (as shown in Figures 5(c) and (d)). Please refer to the fourth figure (a) and refer to the sixth figure (a) and (b). The sixth figure (a) and (b) are respectively applied to the inkjet head of the present invention. AA and BB cross-sectional views of the fourth diagram (a) of the structure, as shown in the figure, the ink jet head structure 50 has an inlet passage 51 on both sides thereof, and is mainly received by an ink cartridge (not shown) via the inlet passage 51. The stored ink is ejected to print a sheet of paper. The ink jet head structure 50 of the present invention is composed of a substrate, a barrier film 22, a plurality of fixed ends 23, a transmission block 24, and a microactuator 25. The structure, driving mode and function of the interlayer film 22, the plurality of fixed ends (not shown), the transmission block 24 and the microactuator 25 have been described in detail in the first preferred embodiment, and therefore will not be described again. . In the present embodiment, the substrate is a nozzle piece 52 which is formed into a compression chamber 521 and has a plurality of arrays of orifices 522. When a voltage is applied to the electrodes on both sides of the microactuator 25, The actuator 25 is moved in the direction of the interlayer film 22 and the compression chamber 521 by the electric field, and the transmission block 24 can transmit the thrust generated by the microactuator 25 to the interlayer film 22, so that the interlayer film 22 is also Following the squeezing deformation (as shown in Figures 6(b) and (c)), the volume of the compression chamber 521 is changed such that the ink stored in the compression chamber 211 is squeezed through the inlet passage 41 14 200846192 而A plurality of droplets 523 are ejected through the nozzle holes 522 of the nozzle sheet 52 onto the corresponding sheets for inkjet printing. In the above, the microactuated fluid supply of the present invention mainly connects the microactuator and the interlayer membrane by the transmission block to transmit the thrust generated by the microactuator to the interlayer membrane, and change the compression chamber. The volume of the liquid originally stored in the compression chamber flows into other pre-set spaces, which makes the micro-actuator φ less limited by the boundary and can be applied to the micro-push structure or the ink-jet head structure. . Therefore, the microactuated fluid supply device of the present invention and the micro-push structure and the ink jet head structure to which it is applied have great industrial value, and the application is made according to law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.
15 200846192 【圖式简單說明】 第一圖（a):其係為習知微致動流體供應器之結構示意圖。 第一圖（b) :其係為第一圖（a)形變之結構示意圖。 第二圖（a):其係為本案第一較佳實施例之微致動流體供 應器之結構不意圖。 第二圖（b):其係為第二圖（a)所示之致動元件之形變示 意圖。 第三圖（a):其係為本案第一較佳實施例之微致動流體供 應器之結構示意圖。 第三圖（b):其係為第三圖（a)所示之微致動器之形變示 意圖。 第四圖（a):其係為將本案之微致動流體供應器應用於微 幫浦結構或是喷墨頭結構之上視圖。 第四圖（b):其係為將本案之微致動流體供應器應用於徵 幫浦結構之A-A剖面圖。 第四圖（c):其係為第四圖（b)所示之微致動器之形變 示意圖。 第五圖（a)〜（d):其係為第四圖（b)所示之微幫浦結 構的實施態樣示意圖。 第六圖（a):其係為將本案之微致動流體供應器應用於喷 墨頭結構之第四圖（a)之A-A剖面圖。 第六圖（a):其係為將本案之微致動流體供應器應用於喷 墨頭結構之第四圖（a)之微致動器發生形變之B-B剖面 200846192 第六圖（c):其係為第六圖（a)所示之喷墨頭結構之微 致動器之形變示意圖 【主要元件符號說明 〇 】 微致動流體供應器： 10、20 壓電元件：101 鎳板：102 基板：103、21 壓力艙：104 壓縮室：211、521 隔層膜：22 固定端：23 傳動塊：24 微致動器：25 訊號電極：251 接地電極· 2 5 2 凸塊結構：26 微幫浦結構：40 入口通道：41、51 出口通道：42 喷墨頭結構：50 喷嘴片：52 液滴523 喷孔：522 1715 200846192 [Simple description of the diagram] Figure 1 (a): This is a schematic diagram of the structure of a conventional microactuated fluid supply. First figure (b): It is a structural diagram of the deformation of the first figure (a). Second Figure (a): This is not intended to be the structure of the microactuated fluid supplier of the first preferred embodiment of the present invention. Fig. 2(b): This is a schematic illustration of the deformation of the actuating element shown in Fig. 2(a). Fig. 3(a) is a schematic view showing the structure of the microactuated fluid supply device of the first preferred embodiment of the present invention. Third figure (b): This is the deformation indication of the microactuator shown in the third figure (a). Figure 4 (a): This is a view of applying the microactuated fluid supply of the present invention to a micro-push structure or an ink-jet head structure. Figure 4 (b): This is a cross-sectional view of the A-A of the pumping structure applied to the microactuator fluid supply of the present invention. Figure 4 (c): This is a schematic diagram of the deformation of the microactuator shown in the fourth figure (b). Fifth (a) to (d): This is a schematic view of an embodiment of the micro-pull structure shown in the fourth diagram (b). Fig. 6(a) is a cross-sectional view taken along line A-A of the fourth diagram (a) of the microactuator fluid supply of the present invention applied to the ink jet head structure. Figure 6 (a): This is the BB profile of the microactuator in which the microactuator fluid supply of the present invention is applied to the fourth diagram (a) of the ink jet head structure. Figure 46192, sixth figure (c): It is a schematic diagram of the deformation of the microactuator of the ink jet head structure shown in the sixth figure (a) [Main component symbol description] Microactuated fluid supply: 10, 20 Piezoelectric element: 101 Nickel plate: 102 Substrate: 103, 21 Pressure chamber: 104 Compression chamber: 211, 521 Interlayer membrane: 22 Fixed end: 23 Transmission block: 24 Microactuator: 25 Signal electrode: 251 Grounding electrode · 2 5 2 Bump structure: 26 micro Pump structure: 40 inlet channel: 41, 51 outlet channel: 42 inkjet head structure: 50 nozzle piece: 52 droplet 523 orifice: 522 17