200846191 九、發明說明： w 【發明所屬之技術領域】 本案係關於一種微致動流體供應器，尤指一種適用於 微幫浦結構及喷墨頭結構之微致動流體供應器。 【先前技術】 _ 目前於各領域中無論是醫藥、電腦科技、列印、能源 寺工業’產品均朝精緻化及微小化方向發展，其中微幫 浦、喷霧器、喷墨頭、工業列印裝置等產品所包含之流體 供應結構為其關鍵技術，是以，如何藉創新結構突破其技 術瓶頸，為發展之重要内容。 請參閱第一圖（a)，其係為習知微致動流體供應器之 結構示意圖，如圖所示，習知微致動流體供應器1〇包含 基板Π、振動板12及致動元件13，其中兩基板11間形 ⑩ 成一腔體14，主要用來儲存液體，而振動板12的兩端係 固設於基板Π上並將腔體14的一側封閉，至於致動元件 13係設置於振動板12上且相對應於該腔體14的位置。 習知微致動流體供應器10可藉由施加適當的電場於 致動元件13上，以使致動元件13產生一形變，即如第一 圖（b)所不X及γ方向所指的方向形變，又該致動元件13 • 連接定位於振動板12，且振動板12兩侧係固定於基板η ν 上，進而使連接之振動板12連動並且跟著形變，由於致 動兀件13產生之壓電收縮量與振動板12之變形量具有差 6 200846191 異，將造成整個微致動流體供應器10產生彎曲（bend)型 ’ 態之作動方式’即如弟一圖（b)標號A之箭頭方向所指虛 線的彎曲形變，振動板12將會因彎曲型態而產生上下振 動，因此藉由振動板12之形變得以改變腔體14之體積， 使得腔體14原先預存之流體’向其他預先設定之空間流 動，以達到供給流體的目的。 雖然習知微致動流體供應器10的結構可隨著腔體14 的尺寸、致動元件13的厚度以及振動板12的厚度而影響 其腔體14的體積變化量，但是無論上述的條件如何改變 均因受到邊界的限制較大，且習知的致動元件13的尺寸 需隨著腔體14的尺寸縮小而縮小，以致定位更困難而增 加製程上的困難，將造成整體結構所能提昇的功效有限。 為了使微致動流體供應器能達到較大致動效益的需 求’此產業的廠商因此提供了如第二圖所示之微致動流體 供應器20，如圖所示，微致動流體供應器2〇係包含致動 • 元件21、振動板22、基板23、傳動塊25以及固定塊26， 其中，基板23間形成一腔體24，振動板22的兩端係固設 於基板23上並將腔體24的一侧封閉，傳動塊25以及固 定塊26則固設於振動板22,習知微致動流體供應器2〇改 良的方式係於致動元件21的下方增設傳動塊25，且致動 元件21的兩端分別固定於固定塊26上，藉由施加適當的 . 電場於致動元件21上，使致動元件21產生一形變，而傳 v 動塊25連接於致動元件21下方，因此傳動塊25也將跟 著連動且跟著形變，進而推動（push)振動板22產生位移， 7 200846191 促使腔體24之體積得以改變，達到供給流體之目的。 ^於致動元件21的兩端均與固定塊26連結固定，如 號B之箭頭方向所指的虛線處，#致動元件21 :::作用時：雖能產生形變’但其兩端側被固定住，相 綠合^變會受到兩端側的抑制’進而使致動元件Μ形 =-定的限制’如此―來能夠產生推動振動板的位移 里將有限，整體結構錄相良好的效能。 ^此’如何發展一種可改善上述習知技術缺失之微致 動〜體供應器，實為目前迫切需要解決之問題。 【發明内容】 本本之主要目的在於提供一種微致動流體供應器，主 要將致動元件目設於轉接板上且㈣應設置於複數個固 定塊之間’㈣接板的兩端連接於峡塊上，使得致動元 件的兩端為-自由端’在致動元件受電場作用下時不僅能 產生形變’且其兩端為自由端相對可產生形變量較大，故 ，體產生形變量較不受到限制，能提昇推動振動板的位移 篁，俾解決習知微致㈣體供應器目⑽元件的兩端側被 固疋住’田a場作用而產生形變時會受到兩端侧的抑制， 使致動膽⑽變受_，能夠產生推祕純的位移量 將有限而成整體結構所能提昇的功效有限的缺點。 為達上述目的’本案之一較廣義實施樣態為提供一種 微致動流體供應H，其純含：基板，形成腔體，用以儲 200846191 ‘ 存流體；振動板，固設於基板上，以封閉腔體之一侧；複 * 數個固定塊，連接於振動板之兩側邊；傳動塊，設置於複 數個固定塊之間且與振動板相連接；轉接板，連接於傳動 塊上且兩側延伸固設於複數個固定塊上；以及致動元件， 設置於轉接板上且相對應設置於複數個固定塊之間，其係 於電場作用下，帶動轉接板產生形變，以推擠傳動塊及振 動板’使腔體產生體積變化，俾使儲存於腔體内之流體受 I 擠壓而流動。 根據本案之構想，其中傳動塊與轉接板接觸之面積係 較小於與振動板接觸面積。 根據本案之構想，其中傳動塊與轉接板接觸之面積實 質上係等同於與振動板接觸面積。 根據本案之構想，其中傳動塊為一凸形結構。根據本 案之構想，其中傳動塊為一梯形結構。 根據本案之構想，其中致動元件係為壓電元件，其係 • 於電場作用下帶動轉接板產生形變。 根據本案之構想，其中致動元件的極化方向係與電場 方向互相平丁。 根據本案之構想，其中致動元件的電極係設置於其厚 度方向之上下兩侧。 為達上述目的，本案另提供一種微幫浦結構，用以傳 - 运流體且具有出口通道及入口通道，其係包含：基板，形 。 成腔體，腔體係出口通道及入口通道相連通；振動板，固 设於基板上，以封閉腔體之一側，·複數個固定塊，連接於 200846191 振動板之兩側邊；傳動塊，設置於複數_定塊之間且與 *振動板相連接；轉接板，連接於傳動塊上且兩侧延伸固設 於複數個固定塊上；以及致動元件，設置於轉接板上且相 對應設置於複數個固定塊之間，其係於電場作用下，帶動 轉ί板產生形變，以推播傳動塊及振動板，使腔體產生體 積變化，俾使經由入口通道儲存於腔體内之流體受播壓而 經由出口通道流出。 • 根據本案之構想，其中傳動塊與轉接板接觸之面積係 較小於與振動板接觸面積。 積糸 根據本案之構想，其中傳動塊與轉接板接觸之面積實 質上係等同於與振動板接觸面積。 根據本案之構想，其中致動元件係為壓電元件，其係 於電場作用下帶動轉接板產生形變。 八’、 根據本案之構想，其中致動元件的極化方向係與電場 方向互相平行。 • 根據本案之構想，其中致動元件的電極係設置於其厚 度方向之上下兩側。 為達上述目的，本案又提供一種喷墨頭結構，具有用 、接收墨水之入口通道，其係包含：基板，形成腔體，且 具有複數個噴孔；振動板，固設於基板上，以封閉腔體之 一側；複數個固定塊，連接於振動板之兩侧邊；傳動塊， ， 設置於複數個固定塊之間且與振動板相連接；轉接板，連 ^ 接於傳動塊上且兩側延伸固設於複數個固定塊上；以及致 動兀件’設置於轉接板上且相對應設置於複數個固定塊之 200846191 間，其係於電場作用下，帶動轉接板產生形變，以推擠傳 動塊及振輯，使腔體產生體積變化，俾使儲存於腔體内 之墨水文松屋而從複數個喷孔喷出。 根據本案之構想，其中傳動塊與轉接板接觸之面積係 較小於與振動板接觸面積。 ，、 所根ί本案之構想，其中傳動塊與轉接板接觸之面積實 貝上係等同於與振動板接觸面積。 、、 ，據本案之構想，其中致動元件係域電元件，其係 於電場作用下帶動轉接板產生形變。 “ μ根f本案之構想’其㈣動元件的極化方向係與電場 方向互相平4丁。 其中致動元件的電極係設置於其厚 其中基板係為噴嘴板，具有複數個 根據本案之構想 度方向之上下兩側。 根據本案之構想 喷孔。 ^上述目的，本案又提供—種微致動流體供應器， :糸〇 3.基板，形成腔體，用以儲存流體；振動板 設於基板上；複數個固定塊，連接於振動板；傳動塊，係 於振動板相連接；轉接板，連接於傳動塊上且邊緣延伸固 設於複數個固定塊上；以及致動元件，設置於轉接板上， 致動元件可與電場電性作用。 11 200846191 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細敘述。應理解的是本案能夠在不同的態樣2具 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 請參閱第三圖（a)，其係為本案第一較佳實施例之微 致動體供應為之結構示意圖，如圖所示，本案之微致動 • 流體供應器3〇可適用於醫藥生技、電腦科技、列印或是 能源等工業，主要由基板301、振動板302、複數個固定 塊303、傳動塊304、轉接板305以及致動元件306所組 成’其中基板301間形成一腔體3011，主要用來儲存流體， 將因振動板302之形變影響而使得腔體3011之體積受到 改變，而振動板302係固設於基板301上，可用來將腔體 3011的一侧邊封閉。 複數個固定塊3 0 3係設置於振動板3 0 2的兩側邊，而 傳動塊304同樣設置於振動板302上且位於該複數個固定 塊303之間並相對應於腔體3011設置，而轉接板305其 係連接於傳動塊304上且兩側分別延伸固設於固定塊303 上，至於，致動元件306係為一壓電元件，可採用高壓電 係數之錘鈦酸鉛（PZT)系列的壓電粉末製造而成，其係 設置於轉接板305上且相對應設置於複數個固定塊303之 J 間，致動元件306的兩端為自由端並未被轉接板305固定 - 住，即如第三圖（a)標號D所指之箭頭方向所指的虛線處。 12 200846191 於本實施例中，傳動塊304與轉接板305接觸之面積 … 實質上等同於與振動板302接觸之面積，且致動元件306 的極化方向為其厚度方向，即第三圖（a)標號z所指之箭 頭方向，另外在致動元件306的厚度方向的上側具有一訊 號電極3061，可為正電極，而相對下侧則具有一接地電極 3062，可為負電極。 當一電壓作用在致動元件306的兩側訊號電極3061 _ 及接地電極3062時，會產生一方向向下之電場，即第三 圖（a)標號C所指之箭頭方向，由於電場方向c和致動元 件306的極化方向z互相平行，所以致動元件306在此電 場的作用下會產生一形變作用，即如第三圖（b)所示X及γ 方向所指的方向形變，因致動元件306的底部係連接於轉 接板305上，轉接板305的兩侧則固定於兩固定塊303上， 而中間則與傳動塊304連接，可讓轉接板305產生連動且 跟著形變’即如第三圖（b)標號E之箭頭方向所指虛線的 • 形變，使得位於轉接板305下方的傳動塊304能將轉接板 305所產生的推力傳遞至振動板302，以推動振動板3Q2 產生致動位移量，即如第三圖（b)標號F之箭頭方向所指 虛線的形變，進而改變腔體3〇11之體積，使得腔體3〇11 原先預存之流體，向其他預先設定之空間流動，達到供給 流體之目的。 ， 本案之微致動流體供應器30主要藉由將致動元件306 - 的底部與一轉接板305連接固定，而該轉接板3〇5兩端連 接固定於固定塊303上，相對致動元件306底部連接於轉 13 200846191 接板305上也視為一可形變體，如此致動元件306的兩& 可視為一自由端，如第三圖（a)標號D之箭頭方向所於卢 線處’請再參閱第三圖（a)及第二圖，本案與習知結 — 霉ύ尤 致動元件的位移量關係進行比對，即可看出由於第二圖 示之致動元件21的兩端均與固定塊26連結固定，如扭。 邓說200846191 IX. Description of the invention: w [Technical field to which the invention pertains] The present invention relates to a microactuated fluid supply, and more particularly to a microactuated fluid supply suitable for a micro-pull structure and an ink jet head structure. [Prior Art] _ At present, in all fields, whether it is medicine, computer technology, printing, energy temple industry, the products are developing in the direction of refinement and miniaturization, among which micro-pull, sprayer, inkjet head, industrial column The fluid supply structure included in products such as printing devices is its key technology. It is how to break through its technical bottlenecks through innovative structures and is an important part of development. Please refer to the first figure (a), which is a schematic structural view of a conventional micro-actuated fluid supply device. As shown, the conventional micro-actuated fluid supply device 1 includes a substrate raft, a vibration plate 12 and an actuating element. 13, wherein the two substrates 11 are formed into a cavity 14 for storing liquid, and the two ends of the vibration plate 12 are fixed on the substrate raft and one side of the cavity 14 is closed, and the actuating element 13 is It is disposed on the vibrating plate 12 and corresponds to the position of the cavity 14. The conventional microactuated fluid supply 10 can be deformed by actuating the actuating element 13 by applying an appropriate electric field, that is, as indicated by the X and γ directions of the first figure (b). The direction is deformed, and the actuating element 13 is connected to the vibrating plate 12, and the vibrating plate 12 is fixed on the substrate η ν on both sides, so that the connected vibrating plate 12 is interlocked and deformed, since the actuating element 13 is generated. The difference between the amount of piezoelectric contraction and the amount of deformation of the vibrating plate 12 is different from the amount of deformation of the vibrating plate 12, which will cause the entire microactuated fluid supply 10 to produce a bent type 'state of operation', that is, as shown in FIG. In the direction of the arrow, the curved line of the dotted line is deformed, and the vibrating plate 12 will vibrate up and down due to the curved shape. Therefore, the shape of the vibrating plate 12 becomes changed to change the volume of the cavity 14, so that the previously pre-stored fluid of the cavity 14 Other pre-set spaces flow to achieve the purpose of supplying fluid. Although the structure of the conventional microactuated fluid supply 10 can affect the volume change of the cavity 14 with the size of the cavity 14, the thickness of the actuating element 13, and the thickness of the vibrating plate 12, regardless of the above conditions The change is mostly limited by the boundary, and the size of the conventional actuating element 13 needs to be reduced as the size of the cavity 14 is reduced, so that the positioning is more difficult and the difficulty in the process is increased, which will cause the overall structure to be improved. The efficacy is limited. In order to enable the microactuated fluid supply to achieve greater operational efficiency requirements, manufacturers in this industry have thus provided a microactuated fluid supply 20 as shown in the second figure, as shown, a microactuated fluid supply The cymbal system includes an actuator 21, a vibrating plate 22, a substrate 23, a transmission block 25, and a fixing block 26, wherein a cavity 24 is formed between the substrates 23, and both ends of the vibrating plate 22 are fixed on the substrate 23 and The one side of the cavity 24 is closed, and the transmission block 25 and the fixing block 26 are fixed to the vibration plate 22. The modified micro-actuating fluid supply 2 is modified in such a manner that a transmission block 25 is added below the actuation element 21, And the two ends of the actuating element 21 are respectively fixed on the fixing block 26, and by applying an appropriate electric field to the actuating element 21, the actuating element 21 is deformed, and the transmitting block 25 is connected to the actuating element. Below 21, the drive block 25 will also follow the deformation and follow the deformation, thereby pushing the diaphragm 22 to produce displacement, 7 200846191 causes the volume of the cavity 24 to be changed to achieve the purpose of supplying fluid. ^ Both ends of the actuating element 21 are fixedly coupled to the fixed block 26, as indicated by the dotted line indicated by the direction of the arrow B, #actuating element 21 ::: when acting: although deformation can be produced 'but both ends When it is fixed, the green phase change will be inhibited by both ends, and the actuator element will be deformed to a certain limit. This will result in a limited displacement of the diaphragm and a good overall structure. efficacy. ^ How to develop a micro-actuator-body supply that can improve the above-mentioned conventional technology, which is an urgent problem to be solved. SUMMARY OF THE INVENTION The main object of the present invention is to provide a microactuated fluid supply device, which mainly has an actuating element disposed on an adapter plate and (4) is disposed between a plurality of fixed blocks. On the gland, the two ends of the actuating element are - the free end 'when the actuating element is subjected to the electric field, not only can the deformation be made, and the two ends of the actuating end are relatively large in shape, so that the shape is large. The variables are not limited, and the displacement of the vibrating plate can be increased. The two ends of the element (10) are fixed to the end of the field. The suppression, which causes the actuating biliary (10) to be subjected to _, can produce the drawback that the amount of displacement that is purely pure will be limited to a limited effect that the overall structure can be improved. In order to achieve the above objectives, one of the more general embodiments of the present invention provides a microactuated fluid supply H which contains: a substrate, a cavity for storing the 200846191 'storage fluid; a vibrating plate fixed on the substrate, One side of the closed cavity; a plurality of fixed blocks connected to both sides of the vibration plate; the transmission block is disposed between the plurality of fixed blocks and connected to the vibration plate; the adapter plate is connected to the transmission block The upper and the two sides are extended and fixed on the plurality of fixed blocks; and the actuating element is disposed on the transfer plate and correspondingly disposed between the plurality of fixed blocks, and is driven by the electric field to drive the deformation of the adapter plate In order to push the transmission block and the vibration plate to make a volume change of the cavity, the fluid stored in the cavity is squeezed by I to flow. According to the concept of the present invention, the area in which the transmission block contacts the adapter plate is smaller than the contact area with the vibration plate. According to the concept of the present invention, the area in which the transmission block is in contact with the adapter plate is substantially equivalent to the contact area with the vibration plate. According to the concept of the present case, the transmission block is a convex structure. According to the concept of the present invention, the transmission block has a trapezoidal structure. According to the concept of the present invention, the actuating element is a piezoelectric element which is driven by an electric field to drive the adapter plate to deform. According to the concept of the present invention, the polarization direction of the actuating element is symmetrical with the direction of the electric field. According to the concept of the present invention, the electrode system of the actuating element is disposed on both sides above the thickness direction. In order to achieve the above object, the present invention further provides a micro-pump structure for transferring fluid and having an outlet passage and an inlet passage, which comprise: a substrate, a shape. Forming a cavity, the outlet channel of the cavity system and the inlet channel are connected; the vibration plate is fixed on the substrate to close one side of the cavity, and a plurality of fixed blocks are connected to both sides of the 200846191 vibration plate; the transmission block, The utility model is disposed between the plurality of blocks and connected to the vibration plate; the adapter plate is connected to the transmission block and extends on both sides to be fixed on the plurality of fixing blocks; and the actuating element is disposed on the transfer plate and Correspondingly disposed between a plurality of fixed blocks, which are driven by an electric field to drive the deformation of the rotating plate to push the transmission block and the vibration plate to cause volume change of the cavity, so that the cavity is stored in the cavity through the inlet channel. The fluid inside is discharged through the outlet passage by the weaving pressure. • According to the concept of the present case, the area in which the transmission block is in contact with the adapter plate is smaller than the area in contact with the vibration plate. Accumulation According to the concept of the present case, the area in which the transmission block contacts the adapter plate is substantially equivalent to the contact area with the vibration plate. According to the concept of the present invention, the actuating element is a piezoelectric element which is driven by an electric field to drive the adapter plate to deform. Eight, according to the concept of the present case, wherein the polarization direction of the actuating element is parallel to the direction of the electric field. • According to the concept of the present invention, the electrode system of the actuating element is disposed on both sides above the thickness direction. In order to achieve the above object, the present invention further provides an ink jet head structure having an inlet passage for receiving and receiving ink, comprising: a substrate, forming a cavity, and having a plurality of spray holes; and a vibration plate fixed on the substrate to One side of the closed cavity; a plurality of fixed blocks connected to both sides of the vibrating plate; a transmission block, disposed between the plurality of fixed blocks and connected to the vibrating plate; and an adapter plate connected to the transmission block The upper and the two sides are extended and fixed on the plurality of fixed blocks; and the actuating element is disposed on the transfer plate and correspondingly disposed between the plurality of fixed blocks 200846191, which is driven by the electric field to drive the adapter plate A deformation is generated to push the transmission block and the vibration to cause a volume change of the cavity, and the ink stored in the cavity is ejected from the plurality of nozzles. According to the concept of the present invention, the area in which the transmission block contacts the adapter plate is smaller than the contact area with the vibration plate. The concept of the case is that the area in contact with the transmission plate and the adapter plate is equivalent to the contact area with the vibration plate. According to the concept of the present invention, the actuating component is a domain electrical component, which is driven by an electric field to drive the adapter plate to deform. "μ根fThe concept of the case" (4) The polarization direction of the moving element is parallel to the direction of the electric field. The electrode of the actuating element is set in its thickness, wherein the substrate is a nozzle plate, and there are a plurality of concepts according to the present case. The upper and lower sides of the degree direction. According to the concept of the present invention, the orifice is provided. ^ The above object, the present invention provides a microactuated fluid supply device, 糸〇 3. a substrate, forming a cavity for storing a fluid; a plurality of fixed blocks connected to the vibration plate; the transmission block is connected to the vibration plate; the adapter plate is connected to the transmission block and the edge extension is fixed on the plurality of fixed blocks; and the actuating element is arranged On the transfer plate, the actuating element can be electrically connected to the electric field. 11 200846191 [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can be different. The embodiment 2 has various changes without departing from the scope of the present invention, and the descriptions and illustrations thereof are used for illustrative purposes in nature, and are not intended to limit the case. Figure (a) is a schematic view showing the structure of the microactuator supplied to the first preferred embodiment of the present invention. As shown in the figure, the micro actuating fluid supply device 3 of the present invention can be applied to medical technology and computer. The industries of science and technology, printing or energy are mainly composed of a substrate 301, a vibration plate 302, a plurality of fixing blocks 303, a transmission block 304, an adapter plate 305 and an actuating element 306, wherein a cavity 3011 is formed between the substrates 301. Mainly used for storing the fluid, the volume of the cavity 3011 is changed due to the deformation of the vibration plate 302, and the vibration plate 302 is fixed on the substrate 301, and can be used to close one side of the cavity 3011. The fixing blocks 300 are disposed on both sides of the vibrating plate 310, and the driving block 304 is also disposed on the vibrating plate 302 and located between the plurality of fixing blocks 303 and corresponding to the cavity 3011. The adapter plate 305 is connected to the transmission block 304 and extends on both sides of the fixing block 303. The actuating element 306 is a piezoelectric element, and the high-voltage electric coefficient of lead titanate can be used. PZT) series of piezoelectric powders, the system is set On the adapter plate 305 and correspondingly disposed between the plurality of fixing blocks 303, the two ends of the actuating member 306 are free ends and are not fixed by the adapter plate 305, that is, as shown in the third figure (a) D is the dotted line indicated by the direction of the arrow. 12 200846191 In the present embodiment, the area of the transmission block 304 in contact with the adapter plate 305 is substantially equivalent to the area in contact with the vibration plate 302, and the actuation element 306 The direction of polarization is the direction of the thickness, that is, the direction of the arrow indicated by the reference z in the third figure (a), and the signal electrode 3061 on the upper side in the thickness direction of the actuating element 306 can be the positive electrode and the lower side. There is a ground electrode 3062, which can be a negative electrode. When a voltage is applied to the signal electrode 3061 _ and the ground electrode 3062 on both sides of the actuating element 306, a downward electric field is generated, that is, the direction of the arrow indicated by the symbol C in the third figure (a), due to the direction of the electric field c And the polarization direction z of the actuating element 306 is parallel to each other, so that the actuating element 306 generates a deformation under the action of the electric field, that is, the direction indicated by the X and γ directions as shown in the third figure (b), Since the bottom of the actuating member 306 is connected to the adapter plate 305, the two sides of the adapter plate 305 are fixed to the two fixing blocks 303, and the middle portion is connected with the transmission block 304, so that the adapter plate 305 can be linked and Following the deformation, that is, the deformation of the dotted line indicated by the arrow direction of the third figure (b), the transmission block 304 located below the adapter plate 305 can transmit the thrust generated by the adapter plate 305 to the vibration plate 302. The displacement of the vibrating plate 3Q2 is generated, that is, the deformation of the dotted line indicated by the arrow direction of the symbol F of the third figure (b), thereby changing the volume of the cavity 3〇11, so that the cavity 3〇11 pre-stored fluid , flow to other pre-set spaces to achieve supply The purpose of the body. The micro-actuated fluid supply 30 of the present invention is mainly fixed by connecting the bottom of the actuating element 306 - to an adapter plate 305 , and the two ends of the adapter plate 3 〇 5 are fixedly connected to the fixed block 303. The bottom of the moving element 306 is connected to the turn 13 200846191. The connecting plate 305 is also regarded as a deformable body, so that the two & actuating element 306 can be regarded as a free end, as indicated by the arrow direction of the third figure (a) At the Lu line, please refer to the third figure (a) and the second picture. In this case, the relationship between the displacement and the amount of displacement of the mold-like actuator is compared. It can be seen that the second figure is activated. Both ends of the element 21 are fixedly coupled to the fixing block 26, such as twisted. Deng said
B之箭頭方向所指的虛線處，因此當致動元件21受電場作 用時，其兩端侧被固定住，相對產生形變會受到兩端甸的 抑制，而本實施例之致動元件306的兩端並未連接固定於 轉接板305上可視、為一自由端，當致動元件3〇6受電場作 用’其不僅能產生形變，且其兩端侧為自由端，相對可 產生形變量較大，故整體產生形變量較不受到限制，進而 月b產生推動振動板302的位移量與比對案推動振動板a 的位移量比較為大。 另外，本案與習知無轉接板之技術就實際實驗分析振 動板位移量關係比對而言，因兩者致動元件跨接於具腔體 之基板上不同的基礎，因此分析僅能就相同的腔體、相同 的傳動塊直徑及厚度、相_致動元件厚度、以及相同的 =固定塊間跨距的條件下來比對，以說明出無轉接板盘有 榦接板承载之致動元件所導致的振動板位移量差異結果。 =下就以寬8mra之腔體、10"m之振動板、謂心 铖70件、直控4麵厚100/zm之傳動塊的相同條件下， ::下：：素分析法所解析兩者振動板的最大位移量結 200846191 比對案 致動元件(PZT) 直徑(mm) ^ :—----------------= 兩固定塊間跨 距（mm) — 振動板最大位 移量（/z m) (無轉 11 10 6.29 接板） 13 12 8.29 --~~---- 13 17 ^— "—~~---- 16 1— 一 本發明 9 一一， -X- 10 -----—=— 6.87 (有轉 11 . 12 12.1 接板） 15 一-------------- 16 ---—- 表一 18.3 ---------- 以上述分析數據可看出，本發明在相同的腔體、相同 的傳動塊直徑及厚度、相同的致動元件厚度、以及相同的 兩固定塊間跨距的條件下，其振動板所獲得最大位移量皆 較比對案之振動板所獲得最大位移量為大，而且當兩者兩 固定塊間跨距愈大，相對兩者振動板所獲得最大位移量差 ⑩距更明顯更大。 當然’為了增加振動板302的體積變化量，傳動塊 的寬度愈寬愈好，但該傳動塊304之寬度愈寬，將使其與 轉接板305接觸面積也愈大，相對也會限制轉接板所 產生之彎曲位移量，因此，傳動塊304的設計需與轉接板 305及振動板302的尺寸相配合，以使振動板302得到最 • 佳的位移量及其體積變化量。請參閱第四圖及第五圖，其 ★ 係為本案第二及第三較佳實施例之微致動流體供應器之 15 200846191 _ 結構示意圖，微致動流體供應器40及50的結構及致動元 、件306的驅動方式係與第一較佳實施例相似，差異點在於 第四圖及第五圖所示之傳動塊的形狀分別為呈現“凸,， 字形之凸形結構307及一梯形結構308，凸形結構3〇7及 梯形結構308與轉接板305接觸的面積係較小於鱼振動板 302接觸面積，可讓轉接板305受到較少的限制，使轉接 板305產生較大的致動位移量，而凸形結構3〇7及梯形社 藝構308與振動板302側接觸的面積較大的主要目的是讓振 動板302的等效體積變化量變大。 請參閱第六圖，其係為將本案之微致動流體供應器結 構應用於微幫浦結構之剖面不意圖，如圖所示，微幫浦会士 構60係具有一入口通道61及一出口通道犯，主要用來傳 送一流體’同樣係由基板3〇1、腔體3011、振動板302、 固定塊303、傳動塊304、轉接板305以及致動元件306 所組成’至於基板3(H、腔體3011、振動板302、固定塊 ⑩ 303、傳動塊304、轉接板305以及致動元件306的結構及 驅動方式及功效係已詳述於第一較佳實施例中，因此不再 贅述。 當一電壓作用在致動元件306的兩侧電極時，致動元 件306在此電場的作用下會產生一形變作用，並讓轉接板 305產生連動且跟著形變，而位於轉接板305下方的傳動 塊304能將轉接板305所產生的推力傳遞至振動板3〇2， • 以推動振動板302產生致動位移量，將改變腔體3〇11的 體積，使得經由入口通道61儲存於腔體3011内的流體受 16 200846191 _ 擠壓而經由出口通道62流出至其他預先設定之空間，以 ' 達到供給流體的目的。 請參閱第七圖，其係將本案之微致動流體供應器應用 於喷墨頭結構之剖面示意圖，如圖所示，喷墨頭結構70 兩側均具有一入口通道71，主要經由入口通道71接收由 一墨水匣（未圖示）所儲存之墨水並將其喷射出去，以對 一紙張進行列印，本案之喷墨頭結構70係由基板、振動 φ 板302、固定塊303、傳動塊304、轉接板305以及致動元 件306所組成，至於振動板302、固定塊303、傳動塊304、 轉接板305以及致動元件306的結構及驅動方式及功效係 已詳述於第一較佳實施例中，因此不再贅述。 於本實施例中，基板係為一喷嘴片72,其係形成一腔 體721且具有複數個陣列式排列的喷孔722，當一電壓作 用在致動元件306的兩侧電極時，致動元件306在此電場 的作用下會產生一形變作用，並讓轉接板305產生連動且 • 跟著形變，而位於轉接板305下方的傳動塊304能將轉接 板305所產生的推力傳遞至振動板302,以推動振動板302 產生致動位移量，將改變腔體721的體積，使得經由入口 通道71儲存於腔體721内的墨水受擠壓而經由喷嘴片72 之喷孔722噴出複數個液滴至相對應的紙張上，以達到喷 墨列印的目的。 - 综上所述，本案之微致動流體供應器主要藉由將致動 ‘元件的底部與轉接板連接固定，而該轉接板兩端連接固定 於兩固疋塊上，使得轉接板在致動元件的帶動下亦可視為 17 200846191 • 一可形變體，且致動元件的兩端並未連接固定於固定塊上 - 可視為一自由端，當致動元件受電場作用時，致動元件不 僅能產生形變，且其兩端侧為自由端，相對可產生形變量 較大，故整體產生形變量較不受到限制，進而能提昇推動 振動板的位移量，且本案之微致動流體供應器可應用於微 幫浦結構及喷墨頭結構上，是以，本案之微致動流體供應 器極具產業之價值，爰依法提出申請。 0 本案得由熟知此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 18 200846191 【圖式簡單說明】 • 第一圖（a):其係為習知微致動流體供應器之結構示意圖。 第一圖（b) ··其係為第一圖（a)形變之結構示意圖。 第二圖：其係為了改善第一圖（a)之缺點所發展出的另一 習知微致動流體供應器之示意圖。 第三圖（a):其係為本案第一較佳實施例之微致動流體供 應器之結構示意圖。 _ 第三圖（b):其係為第三圖（8)所示之致動元件之形變 示意圖。 第四圖：其係為本案第二較佳實施例之微致動流體供應器 之結構不意圖。 第五圖：其係為本案第三較佳實施例之微致動流體供應器 之結構不意圖。 第六圖：其係為將本案之微致動流體供應器應用於微幫浦 結構之剖面示意圖。 _ 第七圖··其係為將本案之微致動流體供應器應用於喷墨頭 結構之剖面示意圖。 19 200846191 【主要元件符號說明】 微致動流體供應器：10， 基板：11、23、301 致動元件·· 13、21、306 傳動塊：25、304 轉接板：305 接地電極：3062 梯形結構：308 入口通道：61、71 喷墨頭結構：70 腔體：721 20 、 30 、 40 、 50 振動板：12、22、302 腔體：14、24、3011 固定塊：26、303 訊號電極：3061 凸形結構：307 微幫浦結構：60 出口通道：62 喷嘴片：72 喷孔：722The direction of the arrow of B is indicated by the dotted line, so when the actuating element 21 is subjected to an electric field, both end sides thereof are fixed, and the relative deformation is suppressed by the both ends, and the actuating element 306 of the present embodiment The two ends are not connected and fixed to the adapter plate 305 and are visible as a free end. When the actuating element 3〇6 is subjected to an electric field, it not only can be deformed, but also has free ends on both end sides thereof, and can generate a deformation variable. If the size is larger, the overall shape-modifying variable is not limited, and the amount of displacement of the vibrating plate 302 generated by the month b is larger than the displacement amount of the vibrating plate a by the comparison. In addition, in this case and the conventional technique of no adapter plate, the actual experimental analysis of the displacement relationship of the vibration plate is compared, because the two actuators are connected to different foundations on the substrate with the cavity, so the analysis can only Comparing the same cavity, the same drive block diameter and thickness, the phase of the actuator, the thickness of the actuator, and the same = the distance between the fixed blocks, to illustrate the dry plate carrier without the adapter plate The result of the difference in the displacement of the vibrating plate caused by the moving element. = Under the same conditions of the cavity of 8mra width, 10"m vibration plate, said heart 铖 70 pieces, direct control 4 face thickness 100/zm, :: under:: analysis of two methods Maximum displacement of the vibrating plate 200846191 Comparison of the actuating element (PZT) Diameter (mm) ^ :-----------------= Span between two fixed blocks (mm ) — Maximum displacement of the vibrating plate (/zm) (no rotation 11 10 6.29 plate) 13 12 8.29 --~~---- 13 17 ^— "—~~---- 16 1—One invention 9 one, -X- 10 ------=- 6.87 (has a turn 11.12 12.1 board) 15 a-------------- 16 ----- Table A 18.3 ---------- As can be seen from the above analysis data, the present invention is in the same cavity, the same transmission block diameter and thickness, the same actuation element thickness, and the same two fixed blocks Under the condition of span, the maximum displacement obtained by the vibrating plate is larger than the maximum displacement obtained by the vibrating plate of the pair, and the larger the span between the two fixed blocks, the obtained by the two vibrating plates The maximum displacement difference of 10 is more significant. Of course, in order to increase the volume change of the vibration plate 302, the width of the transmission block is as wide as possible, but the wider the width of the transmission block 304 is, the larger the contact area with the adapter plate 305 is, and the relative rotation is also restricted. The amount of bending displacement generated by the web is such that the design of the transmission block 304 needs to match the dimensions of the adapter plate 305 and the vibrating plate 302 to provide the diaphragm plate 302 with the best amount of displacement and volume change. Please refer to the fourth and fifth figures, which are the micro actuated fluid supply of the second and third preferred embodiments of the present invention. 200846191 _ Structural schematic, structure of the microactuated fluid supply 40 and 50 and The driving manner of the actuating element 306 is similar to that of the first preferred embodiment. The difference is that the shapes of the driving blocks shown in the fourth and fifth figures are respectively convex, zigzag convex structures 307 and A trapezoidal structure 308, the convex structure 3〇7 and the trapezoidal structure 308 are in contact with the adapter plate 305 in an area smaller than the contact area of the fish vibration plate 302, so that the adapter plate 305 is less restricted, so that the adapter plate 305 produces a large amount of actuation displacement, and the main purpose of the larger area of the convex structure 3〇7 and the trapezoidal structure 308 in contact with the side of the vibrating plate 302 is to increase the equivalent volume change of the vibrating plate 302. Referring to the sixth figure, it is not intended to apply the microactuated fluid supply structure of the present invention to the micro-pump structure. As shown, the micro-pushui structure 60 has an inlet passage 61 and an outlet. Passage, mainly used to transport a fluid 'also by the substrate 3, 1, the cavity 3011, the vibration plate 302, the fixed block 303, the transmission block 304, the adapter plate 305, and the actuating element 306 constitute 'as for the substrate 3 (H, the cavity 3011, the vibration plate 302, the fixed block 10 303) The structure, driving mode and function of the transmission block 304, the adapter plate 305 and the actuating element 306 have been described in detail in the first preferred embodiment, and therefore will not be described again. When a voltage acts on the two of the actuating element 306 In the case of the side electrodes, the actuating element 306 generates a deformation under the action of the electric field, and causes the adapter plate 305 to be interlocked and deformed, and the transmission block 304 located below the adapter plate 305 can connect the adapter plate 305. The generated thrust is transmitted to the vibrating plate 3〇2, • to push the vibrating plate 302 to generate an actuation displacement amount, which will change the volume of the cavity 3〇11 so that the fluid stored in the cavity 3011 via the inlet passage 61 is subjected to 16 200846191 _ Squeeze and flow out through the outlet passage 62 to other pre-set spaces to 'reach the supply of fluid. Please refer to the seventh figure, which is a schematic cross-sectional view of the microactuated fluid supply of the present invention applied to the inkjet head structure. As shown, inkjet The structure 70 has an inlet passage 71 on both sides, and receives ink stored by an ink cartridge (not shown) through the inlet passage 71 and ejects it to print a paper. The inkjet head structure of the present invention The 70 series is composed of a substrate, a vibration φ plate 302, a fixed block 303, a transmission block 304, an adapter plate 305, and an actuating member 306. As for the vibration plate 302, the fixed block 303, the transmission block 304, the adapter plate 305, and the actuation The structure and the driving mode and the function of the component 306 have been described in detail in the first preferred embodiment, and therefore will not be described again. In the embodiment, the substrate is a nozzle piece 72, which forms a cavity 721 and has a plurality of arrayed orifices 722, when a voltage is applied to the electrodes on both sides of the actuating member 306, the actuating member 306 generates a deformation under the action of the electric field, and causes the adapter plate 305 to be interlocked and • Following the deformation, the transmission block 304 located below the adapter plate 305 can transmit the thrust generated by the adapter plate 305 to the vibration plate 302 to push the vibration plate 302 to generate an actuation displacement that will change the volume of the cavity 721. Make it pass through the entrance 71 stored in the ink chamber 721 is squeezed through the nozzle orifice plate 72 of a plurality of droplets 722 ejected onto the paper corresponding to achieve the purpose of ink jet printing. - In summary, the microactuated fluid supply of the present invention is mainly fixed by connecting the bottom of the actuating element to the adapter plate, and the two ends of the adapter plate are fixedly connected to the two solid blocks, so that the transfer is made. The plate can also be regarded as a deformable body by the actuating element. 17 200846191 • A deformable body, and the two ends of the actuating element are not connected and fixed to the fixed block - can be regarded as a free end, when the actuating element is subjected to an electric field, The actuating element can not only produce deformation, but also has free ends on both end sides, which can produce relatively large deformation variables, so the overall shape deformation is not limited, and thus the displacement of the vibrating plate can be increased, and the case is slightly The fluid supply device can be applied to the micro-push structure and the ink jet head structure. Therefore, the micro-actuated fluid supply device of the present invention is of great industrial value, and the application is made according to law. 0 This case has been modified by people who are familiar with this technology. However, it is not to be protected as claimed. 18 200846191 [Simple description of the diagram] • First diagram (a): This is a schematic diagram of the structure of a conventional microactuated fluid supply. The first figure (b) · · is a schematic diagram of the deformation of the first figure (a). Second Figure: A schematic view of another conventional microactuated fluid supply developed to improve the disadvantages of Figure 1(a). Fig. 3(a) is a schematic view showing the structure of the microactuated fluid supply device of the first preferred embodiment of the present invention. _ Third figure (b): This is a schematic diagram of the deformation of the actuating element shown in the third figure (8). Fourth Figure: It is a schematic construction of the microactuated fluid supply of the second preferred embodiment of the present invention. Fig. 5 is a schematic view showing the structure of the microactuated fluid supply of the third preferred embodiment of the present invention. Figure 6 is a schematic cross-sectional view of the microactuator fluid supply of the present invention applied to the micro-push structure. _ Fig. 7 is a schematic cross-sectional view showing the application of the microactuated fluid supply of the present invention to the structure of the ink jet head. 19 200846191 [Explanation of main component symbols] Microactuated fluid supply: 10, Substrate: 11, 23, 301 Actuating components · 13, 21, 306 Transmission block: 25, 304 Adapter plate: 305 Grounding electrode: 3062 Trapezoid Structure: 308 Inlet channel: 61, 71 Inkjet head structure: 70 Cavity: 721 20, 30, 40, 50 Vibrating plate: 12, 22, 302 Cavity: 14, 24, 3011 Fixed block: 26, 303 Signal electrode :3061 Convex structure: 307 Micro-pull structure: 60 Exit channel: 62 Nozzle piece: 72 Hole: 722