CN201200954Y - Piezoelectric bridge type beam driven flexible film type liquid jet structure - Google Patents
Piezoelectric bridge type beam driven flexible film type liquid jet structure Download PDFInfo
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- CN201200954Y CN201200954Y CNU2008201085628U CN200820108562U CN201200954Y CN 201200954 Y CN201200954 Y CN 201200954Y CN U2008201085628 U CNU2008201085628 U CN U2008201085628U CN 200820108562 U CN200820108562 U CN 200820108562U CN 201200954 Y CN201200954 Y CN 201200954Y
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- 238000002347 injection Methods 0.000 claims description 60
- 239000007924 injection Substances 0.000 claims description 60
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- 239000012528 membrane Substances 0.000 claims description 22
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- 238000000034 method Methods 0.000 abstract description 7
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- 239000012530 fluid Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
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- 238000005260 corrosion Methods 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
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- 239000000377 silicon dioxide Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
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- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
The utility model discloses a flexible film formula liquid jet structure of bridge type roof beam drive piezoelectricity belongs to the micro-electronic machinery field. The structure of the piezoelectric bridge type beam comprises a piezoelectric bridge type beam, a flexible film, a micro-channel and a micro-jet hole; the method is characterized in that: the outer surface of the liquid jet structure is provided with a micro jet hole communicated with the micro channel, the flexible film covers the top of the micro channel, and the piezoelectric bridge type beam serving as the liquid jet driver is arranged outside the flexible film at the top of the micro channel. The performance requirement on the surface insulating medium layer of the piezoelectric bridge beam is reduced. The flexible organic film can generate larger deformation under the driving of the piezoelectric bridge beam; meanwhile, liquid in the micro-channel is prevented from flowing up and down through gaps on two sides of the piezoelectric bridge beam, more liquid can be effectively driven to be sprayed out from the micro-spraying holes, and the working efficiency and reliability of the liquid spraying structure are improved.
Description
Technical field
The utility model belongs to the microelectron-mechanical field, and a kind of piezoelectric bridge type beam that particularly adopts micro-processing method to realize drives flexible thin membrane type liquid injection structure.
Background technology
The liquid injection structure is a part most crucial in the whole liquid injection apparatus.Liquid injection structure and the device that contains the liquid injection structure are typically applied in inkjet printing, and also there is application aspects such as graphic record, printing and billboard making in industry manufacture field such as Micropicture realizations.The liquid injection structure that adopts piezoelectric principle to make is controlled drop size and jet velocity easily, realizes that high-precision drop sprays, and durability is good.Therefore, the piezoelectric working mode is one of important principles of liquid injection structure employing.
Seiko Epson Corp discloses a kind of piezoelectric type liquid injection structure, upper wall in micro-channel is made piezoelectricity/elastic composite oscillating plate, when the piezoelectric element on piezoelectric vibrating plate applies voltage, protruding, spill change that oscillating plate takes place, thereby the volume in the change micro-channel, make liquid from micro-spraying hole that micro-channel communicates eject.Adopt the piezoelectric vibrating plate hardness of this mode bigger, make the required driving force of its deformation very big; And, link to each other with microchannel walls around the oscillating plate, and suffer restraints.These two kinds of reasons have seriously limited liquid driven in the micro-channel.And, because the effect of contraction of plate surrounding, when the area of oscillating plate more hour, the deformation of plate is just more little, the Volume Changes in the micro-channel is just more little, the liquid outlet quantity of injection is just more little.To eject liquid measure in order increasing, to need to increase the yardstick of micro-channel.And when the more highdensity liquid of formation sprays array, but the width of micro-channel is restricted.Therefore, the type of drive of this liquid injection structure has influenced the liquid spray volume, has hindered the size of further minimizing micro-channel and the integrated level of raising injection apparatus.
The piezoelectric cantilever beam type liquid injection structure that has proposed has overcome the problem that above-mentioned piezoelectric liquid injection structure exists.The driver that they adopt piezoelectric cantilever to spray as liquid.Because piezoelectric cantilever is only at a side fixed support of beam, other parts are suspending movable, are not subjected to the restriction of substrate, therefore, the deflection of cantilever beam is far longer than aforesaid fixing piezoelectric vibrating plate all around, and it can spray from micro-spraying hole by the more liquid of more effective driving.Simultaneously, be deflection deformation because piezoelectric cantilever produces under the excitation of voltage, its deflection is also much larger than the interdigital direct telescopic shape change in interdigital direction of piezoelectricity.In addition, because piezoelectric cantilever can be realized big distortion under low-voltage, therefore, this liquid injection structure can be worked under lower voltage.Perhaps, because piezoelectric cantilever can be realized bigger distortion, so just can keep reducing the lateral dimension of the total area or the micro-channel of driver under the constant situation of liquid jet amount, thereby realize having the more liquid injection apparatus of high density nozzle array.
But, in liquid injection structure, because piezoelectric cantilever has only an end to fix based on piezoelectric cantilever, the other end suspends movable, like this, and when cantilever beam is longer, cantilever beam structures is relatively more fragile, though the drive displacement of movable end can be very big, driving force reduces.On the other hand, the cantilever beam structures that an end floats has also been brought difficulty for the reliability of shower nozzle and manufacturing, has reduced service life and fabrication yield.
A kind of piezoelectric bridge type beam liquid injection structure that has proposed has overcome the problem that above-mentioned piezoelectric cantilever liquid injection structure exists.Because piezoelectric bridge type beam is only at the two ends of beam fixed support, the intermediate portion is not restricted by substrate, therefore, fixing piezoelectric vibrating plate around the deflection of piezoelectric bridge type beam is far longer than, it can spray from micro-spraying hole by the more liquid of more effective driving.On the other hand, because piezoelectric bridge type beam at the two ends of beam fixed support, therefore, has been avoided in the Piezoelectric Cantilever Beams, an end fixed support only, and the other end suspend movable caused fragile structure, driving force is less relatively, reliability is low, make problems such as difficulty.Therefore, based on the liquid injection structure of piezoelectric bridge type beam overcome simultaneously based on around the fixing board-like liquid injection structure of piezoelectric vibration and based on the shortcoming of piezoelectric cantilever beam type liquid injection structure.It had both guaranteed reliability, had taken into account operating efficiency again, had also reduced manufacture difficulty.
But in this piezoelectric bridge type beam liquid injection structure, piezoelectric bridge type beam is at the top or the middle liquid that directly drives in the micro-channel of micro-channel, and piezoelectric bridge type beam directly contacts with liquid.This requires electrode and connecting line on the piezoelectric bridge type beam must cover the good insulation performance dielectric layer, and keeps its insulating properties for a long time, in case leak-stopping.Simultaneously, because there is the slit in the piezoelectric bridge type beam both sides, the liquid in the micro-channel can by current downflow on the slit of piezoelectric bridge type beam both sides, reduce the intensity of liquid driven when piezoelectric bridge type beam moves.
Summary of the invention
The purpose of this utility model is directly to contact with liquid at piezoelectric bridge type beam in the piezoelectric bridge type beam liquid injection structure, require electrode and connecting line on the piezoelectric bridge type beam must cover the good insulation performance dielectric layer, and need long-term its insulating properties that keep, in case leak-stopping; Simultaneously, because there is the slit in the piezoelectric bridge type beam both sides, the liquid in the micro-channel can be when piezoelectric bridge type beam moves, by current downflow on the slit of piezoelectric bridge type beam both sides, reduced the deficiency of the intensity of liquid driven, and a kind of piezoelectric bridge type beam that provides drives flexible thin membrane type liquid injection structure.Its structure comprises, piezoelectric bridge type beam, fexible film, micro-channel, micro-spraying hole; It is characterized in that: at the micro-spraying hole that the setting of liquid injection structure outer surface communicates with micro-channel, fexible film is covered in the top of micro-channel, places in the outside of micro-channel top fexible film as the piezoelectric bridge type beam of liquid jet drive; The micro-spraying hole that communicates with micro-channel, micro-channel, the fexible film at micro-channel top, piezoelectric bridge type beam combine and constitute the liquid injection structure.
The two ends of described piezoelectric bridge type beam link to each other with substrate, and as the fixed support end of bridge type beam, the both sides of piezoelectric bridge type beam mid portion do not link to each other with substrate, form bridge architecture.
Described piezoelectric bridge type beam is placed one at least in the outside of each micro-channel top fexible film.
Described piezoelectric bridge type beam is the multi-layer compound structure that comprises piezoelectric layer and non-piezoelectric layer, wherein comprises one deck piezoelectric layer and upper and lower electrode layer thereof at least.
Each layer in the described piezoelectric bridge type beam covers whole bridge type beam, or partly is distributed on the bridge type beam.
Described fexible film is an organic film material, or the organic film material of blast blending.
Described piezoelectric bridge type beam directly contacts with the fexible film outer surface in the outside of micro-channel top fexible film or does not contact, or joins by bonding mode and fexible film outer surface.
Described piezoelectric bridge type beam drives in the flexible thin membrane type liquid injection structure, comprise at least one group of micro-spraying hole that communicates with micro-channel, micro-channel, the fexible film at micro-channel top, piezoelectric bridge type beam, constitute piezoelectric bridge type beam and drive flexible thin membrane type liquid injection structure array.
The beneficial effects of the utility model are, compare with the piezoelectric bridge type beam liquid injection structure that has proposed, piezoelectric bridge type beam in the utility model is on the fexible film at micro-channel top, do not contact with liquid in the conduit, this just greatly reduces the performance requirement to piezoelectric bridge type beam surface insulation dielectric layer.And because flexible organic film has good flexibility, bigger deformation can take place in it under the driving of piezoelectric bridge type beam; Simultaneously, because fexible film is at the sealing function on micro-channel top, prevent that the liquid in the micro-channel from passing through current downflow on the slit of piezoelectric bridge type beam both sides, can more effectively drive more liquid and from micro-spraying hole, spray, improved the operating efficiency and the reliability of liquid injection structure.
Description of drawings
Fig. 1 is first kind of structural representation of liquid injection structure.
Fig. 2 is the assembling schematic diagram of Fig. 1.
Fig. 3 is second kind of structural representation of liquid injection structure.
Fig. 4 is the assembling schematic diagram of Fig. 3.
Fig. 5 is the piezoelectric bridge type beam cross-sectional view.
The specific embodiment
A kind of piezoelectric bridge type beam that the utility model proposes drives flexible thin membrane type liquid injection structure, has multiple implementation.Wherein two kinds of possible implementations that Fig. 1 and Fig. 3 have distinguished example.Their common trait all is the micro-spraying hole that communicates with micro-channel in the setting of liquid injection structure outer surface, fexible film is the material that binds of micro-channel, be covered in the top of micro-channel, the piezoelectric bridge type beam that contains piezoelectric thin film layer and upper and lower electrode thereof is placed in the outside of micro-channel top fexible film, as the driver of liquid injection in the micro-channel; The micro-spraying hole that communicates with micro-channel, micro-channel, the fexible film at micro-channel top, piezoelectric bridge type beam combine and constitute the liquid injection structure; Under the driving of voltage, piezoelectric bridge type beam generation deformation drives the fexible film generation deformation at micro-channel top, thereby changes the volume of micro-channel, with the liquid in the micro-channel from micro-spraying hole that micro-channel communicates spray.
In first kind of structural representation shown in Figure 1, form by jet orifice plate 100, substrate 200, fexible film 300 and last substrate 400.The one row micro-spraying hole 110 corresponding with micro-channel 220 on the substrate 200 is being set on the jet orifice plate 100; The next door of the micro-channel 220 on substrate 200 is provided with fluid reservoir 230; Be connected by microflute 240 between micro-channel 220 and the fluid reservoir 230; Fexible film 300 is covered in substrate 200 upper surfaces, become the material that binds of the micro-channel 220 on the substrate 200, on the fexible film 300 with substrate 200 on fluid reservoir 230 corresponding sections opening 330 is set, fluid reservoir 230 further communicates with last fluid reservoir 430 on the last substrate 400 by opening 330, combine, become a big fluid reservoir; Piezoelectric bridge type beam 410 is positioned at the bottom of the release groove 420 on the substrate 400, and each piezoelectric bridge type beam 410 on the last substrate 400 is above each micro-channel 220 on the substrate 200, and mutual correspondence.The two ends of piezoelectric bridge type beam 410 are fixed on release groove 420 walls, form bridge architecture; Jet orifice plate 100, substrate 200, fexible film 300 and last substrate 400 are superimposed together successively and form the liquid injection structure (as shown in Figure 2) that piezoelectric bridge type beam drives the flexible thin membrane type.
Described piezoelectric bridge type beam 410 comprises piezoelectric layer 412 and upper electrode layer 413 thereof, lower electrode layer 411, can cover insulating medium layer 414 on the surface of piezoelectric bridge type beam.This piezoelectric bridge type beam 410 can also be for containing the MULTILAYER COMPOSITE piezoelectric bridge type beam of multi-layer piezoelectric layer and the non-piezoelectric layer of multilayer; Or to comprise the form formation piezoelectric bridge type beam of the identical or opposite piezoelectric layer of two-layer or two-layer above polarised direction.
At last, jet orifice plate 100, substrate 200, fexible film 300 and last substrate 400 are grouped together by bonding or bonding mode, form the liquid injection structure.
Described piezoelectric bridge type beam drives in the flexible thin membrane type liquid injection structure, comprise at least one group of micro-spraying hole that communicates with micro-channel, micro-channel, the fexible film at micro-channel top, piezoelectric bridge type beam, constitute piezoelectric bridge type beam and drive flexible thin membrane type liquid injection structure array.Can be considered as the schematic diagram of liquid injection structure array as shown in figures 1 and 3.
In second kind of structural representation of liquid injection structure shown in Figure 3, the jet orifice plate 100 of liquid injection structure, substrate 200 and fexible film 300 parts are same as shown in Figure 1.Different with first kind of structure is, no release groove 420 on the last substrate 400, and the last fluid reservoir 430 that will go up on the substrate 400 becomes and fexible film 300 upper sheds 330 corresponding openings 440; Simultaneously, the piezoelectric bridge type beam 410 on the last substrate 400 is directly aimed at corresponding micro-channel 220 above substrate 200, and last substrate 400 just can be combined with jet orifice plate 100, substrate 200 and fexible film 300 without upset, as shown in Figure 4.Adopt corrosion or grinding and polishing thining method can realize said structure, also can adopt the material of metal material as last substrate 400, each functional layer such as deposit bottom electrode, piezoelectric layer, top electrode on metal substrate, etching or stamp out piezoelectric bridge type beam 410 and structure such as opening 440 again.
The cross-section structure of the piezoelectric bridge type beam 410 in the foregoing description as shown in Figure 5, it is composited by silicon dioxide layer 415, bottom electrode 411, piezoelectric layer 412, top electrode 413, surface insulation dielectric layer 414.Except that this implementation, the following of silicon dioxide layer also can keep certain thickness monocrystalline silicon layer in the piezoelectric bridge type beam, constitutes bridge type beam with other layer.
In other implementation of the present utility model, also can will be designed to different forms with the corresponding piezoelectric bridge type beam of each micro-channel, corresponding to the number of the piezoelectric bridge type beam of each driven micro-channel at least one, its fixed support end also can be positioned at different positions.For example, after each layer of liquid injection structure substrate parts assembled, the direction of piezoelectric bridge type beam can be parallel with driven micro-channel length direction, also can be vertical with the micro-channel length direction, or the like.
The aforesaid liquid injection structure further combines with drive circuit, liquid storage box, bracing frame, shell, connecting line etc. can constitute complete liquid injection apparatus or integrated fluid jetting head.
Liquid injection structure of the present utility model is at inkjet printing, aspects such as graphic record, printing and billboard making, and have fields such as industry manufacturing that Micropicture realizes and have very and use widely.
Claims (8)
1. a piezoelectric bridge type beam drives flexible thin membrane type liquid injection structure, and its structure comprises, piezoelectric bridge type beam, fexible film, micro-channel, micro-spraying hole; It is characterized in that: at the micro-spraying hole that the setting of liquid injection structure outer surface communicates with micro-channel, fexible film is covered in the top of micro-channel, places in the outside of micro-channel top fexible film as the piezoelectric bridge type beam of liquid jet drive; The micro-spraying hole that communicates with micro-channel, micro-channel, the fexible film at micro-channel top, piezoelectric bridge type beam combine and constitute the liquid injection structure.
2. drive flexible thin membrane type liquid injection structure according to the described piezoelectric bridge type beam of claim 1, it is characterized in that the two ends of described piezoelectric bridge type beam link to each other with substrate, as the fixed support end of bridge type beam, the both sides of piezoelectric bridge type beam mid portion do not link to each other with substrate, form bridge architecture.
3. drive flexible thin membrane type liquid injection structure according to the described piezoelectric bridge type beam of claim 1, it is characterized in that described piezoelectric bridge type beam is placed one at least in the outside of each micro-channel top fexible film.
4. drive flexible thin membrane type liquid injection structure according to the described piezoelectric bridge type beam of claim 1, it is characterized in that described piezoelectric bridge type beam is the multi-layer compound structure that comprises piezoelectric layer and non-piezoelectric layer, wherein comprise one deck piezoelectric layer and upper and lower electrode layer thereof at least.
5. drive flexible thin membrane type liquid injection structure according to the described piezoelectric bridge type beam of claim 1, it is characterized in that each layer in the described piezoelectric bridge type beam covers whole bridge type beam, or partly is distributed on the bridge type beam.
6. drive flexible thin membrane type liquid injection structure according to the described piezoelectric bridge type beam of claim 1, it is characterized in that described fexible film is an organic film material, or the organic film material of blast blending.
7. drive flexible thin membrane type liquid injection structure according to the described piezoelectric bridge type beam of claim 1, it is characterized in that, described piezoelectric bridge type beam directly contacts with the fexible film outer surface in the outside of micro-channel top fexible film or does not contact, or joins by bonding mode and fexible film outer surface.
8. drive flexible thin membrane type liquid injection structure according to the described piezoelectric bridge type beam of claim 1, it is characterized in that, described piezoelectric bridge type beam drives in the flexible thin membrane type liquid injection structure, comprise at least one group of micro-spraying hole that communicates with micro-channel, micro-channel, the fexible film at micro-channel top, piezoelectric bridge type beam, constitute piezoelectric bridge type beam and drive flexible thin membrane type liquid injection structure array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201085628U CN201200954Y (en) | 2008-06-13 | 2008-06-13 | Piezoelectric bridge type beam driven flexible film type liquid jet structure |
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| Application Number | Priority Date | Filing Date | Title |
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| CNU2008201085628U CN201200954Y (en) | 2008-06-13 | 2008-06-13 | Piezoelectric bridge type beam driven flexible film type liquid jet structure |
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| CN201200954Y true CN201200954Y (en) | 2009-03-04 |
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| CNU2008201085628U Expired - Fee Related CN201200954Y (en) | 2008-06-13 | 2008-06-13 | Piezoelectric bridge type beam driven flexible film type liquid jet structure |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103934144A (en) * | 2014-04-28 | 2014-07-23 | 吉林大学 | Piezoelectrically-driven spraying direction flexible adjustment device |
| CN105984216A (en) * | 2015-02-13 | 2016-10-05 | 北京派和科技股份有限公司 | Piezoelectric nozzle and processing method thereof, and spraying equipment including the nozzle |
| CN106827813A (en) * | 2015-12-07 | 2017-06-13 | 清华大学 | Finger-like cantilever type piezoelectric shower nozzle and its processing method and spraying equipment |
| CN106915161A (en) * | 2015-12-28 | 2017-07-04 | 清华大学 | Laminated piezoelectric shower nozzle and the spraying equipment including the shower nozzle |
| CN110038763A (en) * | 2019-05-20 | 2019-07-23 | 哈尔滨工业大学 | A kind of micro- spraying mechanism of cantilever piezoelectric of sprayable big viscosity fluid |
-
2008
- 2008-06-13 CN CNU2008201085628U patent/CN201200954Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103934144A (en) * | 2014-04-28 | 2014-07-23 | 吉林大学 | Piezoelectrically-driven spraying direction flexible adjustment device |
| CN103934144B (en) * | 2014-04-28 | 2015-07-29 | 吉林大学 | The flexible adjusting device of a kind of driving type piezoelectric actuator injection direction |
| CN105984216A (en) * | 2015-02-13 | 2016-10-05 | 北京派和科技股份有限公司 | Piezoelectric nozzle and processing method thereof, and spraying equipment including the nozzle |
| CN106827813A (en) * | 2015-12-07 | 2017-06-13 | 清华大学 | Finger-like cantilever type piezoelectric shower nozzle and its processing method and spraying equipment |
| CN106915161A (en) * | 2015-12-28 | 2017-07-04 | 清华大学 | Laminated piezoelectric shower nozzle and the spraying equipment including the shower nozzle |
| CN106915161B (en) * | 2015-12-28 | 2018-05-18 | 清华大学 | Laminated piezoelectric nozzle and the spraying equipment including the nozzle |
| CN110038763A (en) * | 2019-05-20 | 2019-07-23 | 哈尔滨工业大学 | A kind of micro- spraying mechanism of cantilever piezoelectric of sprayable big viscosity fluid |
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Granted publication date: 20090304 Termination date: 20160613 |