CN201220507Y - Liquid injection structure based on piezoelectric cantilever beam - Google Patents
Liquid injection structure based on piezoelectric cantilever beam Download PDFInfo
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- CN201220507Y CN201220507Y CNU200820080407XU CN200820080407U CN201220507Y CN 201220507 Y CN201220507 Y CN 201220507Y CN U200820080407X U CNU200820080407X U CN U200820080407XU CN 200820080407 U CN200820080407 U CN 200820080407U CN 201220507 Y CN201220507 Y CN 201220507Y
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
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Abstract
The utility model discloses a liquid injection structure based on piezoelectric cantilever beam that belongs to the micro-electronic machinery field that relates to and adopts little processing method to realize. The piezoelectric micro-jet orifice structure mainly comprises a piezoelectric cantilever beam, a micro-channel and a micro-jet orifice; the piezoelectric cantilever beam containing the piezoelectric film layer and the upper and lower electrodes is positioned at the upper part of the liquid microchannel or in the microchannel and is used as a driver for liquid ejection in the microchannel; the micro-jet holes corresponding to the micro-channels on the micro-channel substrate are arranged on the jet hole plate, and the jet holes, the micro-channels and the piezoelectric cantilever beams are combined to form a liquid jet structure. The piezoelectric cantilever beam of the liquid jet structure can realize larger deformation, can work under lower voltage, reduces the area of a liquid driver and the size of a micro-channel, and is beneficial to realizing a liquid jet head with a higher-density jet hole array.
Description
Technical field
The utility model belongs to the microelectron-mechanical field, particularly a kind of liquid injection structure based on piezoelectric cantilever that adopts micro-processing method to realize.
Background technology
The most common, the most extensive, the most typical ink jet type that is applied as of liquid injection structure is printed figure, image record and fields such as printing, printing and dyeing.Also be widely used at other little manufacture views such as multiple display such as liquid crystal display, organic light emitting display and biochips.It also is the core of fluid jetting head and liquid injection apparatus.Having the drop size based on the liquid injection structure of piezo-electric effect can control, and jet velocity is controlled, realizes that easily high-precision drop sprays, and characteristics such as long service life are the important directions of liquid injection apparatus development.
Along with the development of technology, the jet velocity of liquid injection structure and nozzle array density improve constantly.High performance liquid injection structure depends mainly on the global design and the manufacturing technology of liquid driver, liquid micro-channel and micro-spraying hole.
A kind of liquid injection structure of existing piezoelectric type shower nozzle adopts the body piezoelectric ceramics to make the micro-channel of liquid, applies voltage on the piezoelectrics as the micro-channel sidewall, and channel wall produces shearing deformation, thus liquid ejection in the extruding micro-channel.This piezoelectric type liquid injection structure, difficulty is bigger when the many rows of making array jet head liquid.
The liquid injection structure of another kind of existing piezoelectric type shower nozzle, the piezoelectrics driver that adopts multilayer is as liquid driver, when on driver, applying voltage, the length of driver changes, the upper wall of extruding micro-channel, thereby change the size of conduit chamber internal volume, liquid is ejected from spray orifice.The piezoelectric actuator manufacture difficulty is bigger in this piezoelectric type liquid injection structure, the assembling difficulty of other parts such as driver and micro-channel, and the precision prescribed height, make efficiency is low, the cost height.
Seiko Epson Corporation discloses a kind of piezoelectric type shower nozzle, its liquid injection structure is to make piezoelectricity/elastic composite oscillating plate at the upper wall of micro-channel, when applying voltage between the upper and lower electrode of piezoelectric layer on piezoelectric vibrating plate, protruding, spill change that oscillating plate takes place, thereby the volume in the change micro-channel, make liquid from micro-spraying hole that micro-channel communicates eject.Adopt the liquid injection structure of this working method, can make the array jet head liquid of higher density.But, adopt the piezoelectric vibrating plate hardness of this mode bigger, make the required driving force of its deformation very big; And, link to each other with microchannel walls around the oscillating plate, and suffer restraints.These two kinds of reasons have seriously limited liquid driven in the micro-channel.And, because the effect of contraction of plate surrounding, when the area of oscillating plate more hour, the deformation of plate is just more little, the Volume Changes in the micro-channel is just more little, the amount of liquid that ejects is just more little.When forming more highdensity liquid injection structure array, micro-channel width in one direction is restricted.Therefore, influenced the liquid spray volume, the type of drive of this liquid injection structure has hindered the size of further minimizing micro-channel and has improved the integrated level of injection structure.
Summary of the invention
The purpose of this utility model is that a kind of liquid injection structure that drives based on piezoelectric cantilever is provided at the deficiencies in the prior art, and its primary structure comprises, piezoelectric cantilever, micro-channel, micro-spraying hole; It is characterized in that: the piezoelectric cantilever that contains piezoelectric thin film layer and upper and lower electrode thereof is arranged in the top or the conduit of liquid micro-channel, forms the driver that liquid sprays in the micro-channel; The micro-spraying hole corresponding with micro-channel on the substrate is being set on the jet orifice plate, is being arranged in the piezoelectric cantilever of micro-channel top or conduit, spray orifice and micro-channel combine and constitute the liquid injection structure.
One end or a side of described piezoelectric cantilever link to each other with substrate, form the fixed support end of cantilever beam, and the cantilever beam other parts are suspending movable, place at least one in each micro-channel top or conduit.
Described piezoelectric cantilever is to comprise multilayer elastic composite construction piezoelectricity and non-piezoelectricity, wherein comprises one deck piezoelectric layer and upper and lower electrode layer thereof at least.
The surface of described piezoelectric cantilever is an electric insulation layer.
The liquid injection structure that described piezoelectric cantilever drives comprises at least one group of piezoelectric cantilever, micro-channel, micro-spraying hole, constitutes the array liquid injection structure that drives with piezoelectric cantilever.
The beneficial effects of the utility model are top or conduits that piezoelectric cantilever is arranged in micro-channel, and under the excitation of voltage, piezoelectric cantilever produces deflection deformation, and the liquid that drives in the micro-channel sprays from micro-spraying hole.Because piezoelectric cantilever is only fixed in a side of beam, other parts are unsettled, are not subjected to the restriction of substrate, therefore, fixing piezoelectric vibrating plate around the deflection of cantilever beam is far longer than, it can spray from micro-spraying hole by the more liquid of more effective driving.Because piezoelectric cantilever can be realized big distortion under low-voltage, therefore, this injection structure can be worked under lower voltage.In addition, because piezoelectric cantilever can be realized bigger distortion, so just can keep reducing the area of liquid driver and the size of micro-channel under the constant situation of liquid jet amount, thereby realize having the more liquid injection structure of high density nozzle array.
The utility model adopts top or the middle liquid that drives in micro-channel of piezoelectric cantilever in micro-channel, make it from micro-spraying hole, to spray, increase the liquid spray volume, reduced the driving voltage of liquid driver, further improved spray orifice density in the liquid injection structure.
Description of drawings
Fig. 1 is first kind of structural representation of liquid injection structure, and in this structure, piezoelectric cantilever is at the micro-channel middle part.
Fig. 2 is the assembling schematic diagram of Fig. 1.
Fig. 3 is second kind of structural representation of liquid injection structure, and in this structure, piezoelectric cantilever is on micro-channel top.
Fig. 4 piezoelectric cantilever cross-sectional view.
A kind of piezoelectric cantilever of Fig. 5 in micro-channel or top place form.In this form, cantilever beam is parallel with the micro-channel length direction.
A kind of piezoelectric cantilever of Fig. 6 in micro-channel or top place form.In this form, cantilever beam is vertical with the micro-channel length direction.
A kind of piezoelectric cantilever of Fig. 7 in micro-channel or top place form.In this form, cantilever beam is vertical with the micro-channel length direction, and, the cantilever beam among Fig. 6 is split up into a plurality of small cantilever beams arranged side by side.
A kind of piezoelectric cantilever of Fig. 8 in micro-channel or top place form.In this form, two cantilever beams are placed in the same micro-channel or top.And the fixed support end of two cantilever beams interconnects, by linking to each other with the substrate both sides with the vertical bridge-like structure of micro-channel length direction, as the support end of two cantilever beams.
A kind of piezoelectric cantilever of Fig. 9 in micro-channel or top place form.In this form, in same micro-channel or top place many described in many picture groups 8 to cantilever beam.
A kind of piezoelectric cantilever of Figure 10 in micro-channel or top place form.In this form, two cantilever beams are placed in the same micro-channel or top.And the fixed support end of two cantilever beams interconnects, and links to each other with substrate by the bridge-like structure parallel with micro-channel, as the support end of two cantilever beams.
A kind of piezoelectric cantilever of Figure 11 in micro-channel or top place form.In this form, further the cantilever beam among Figure 10 is split up into a plurality of small cantilever beams arranged side by side.
A kind of piezoelectric cantilever of Figure 12 in micro-channel or top place form.In this form, be parallel to the micro-channel length direction, place two relative cantilever beams respectively, the fixed support end of each cantilever beam links to each other with the micro-channel edge respectively.
A kind of piezoelectric cantilever of Figure 13 in micro-channel or top place form.In this form, perpendicular to the micro-channel length direction, place two relative cantilever beams respectively, the fixed support end of each cantilever beam links to each other with the micro-channel edge respectively.
A kind of piezoelectric cantilever of Figure 14 in micro-channel or top place form.In this form, further the cantilever beam described in Figure 13 is split up into a plurality of small cantilever beams arranged side by side.
A kind of piezoelectric cantilever of Figure 15 in micro-channel or top place form.In this form, two kinds of cantilever beam placement forms described in Fig. 8 and Figure 12 are made up, be positioned over the cantilever beam of two kinds of forms in the same micro-channel or top.
The specific embodiment
The liquid injection structure that drives based on piezoelectric cantilever that the utility model proposes has multiple implementation.Fig. 1 and Fig. 3 respectively example two kinds of possible implementation structures wherein.Their common trait all is top or the conduit that the piezoelectric cantilever that contains piezoelectric thin film layer and upper and lower electrode thereof is arranged in the liquid micro-channel, the driver that sprays as liquid in the micro-channel.Piezoelectric cantilever produces deflection deformation under the excitation of voltage, the liquid that drives in the micro-channel sprays from micro-spraying hole.Fig. 1 and the schematic diagram that can be considered as realizing array liquid injection structure shown in Figure 3.
In first kind of structural representation shown in Figure 1, form by jet orifice plate 100, substrate 200 and last substrate 300.The one row micro-spraying hole 110 corresponding with micro-channel 220 on the substrate 200 is being set on the jet orifice plate 100; Piezoelectric cantilever 210 is positioned at the top of micro-channel 220 on the substrate 200; Micro-channel 220 on the substrate 200 and the last micro-channel 320 on the last substrate 300 combine, constitute a complete liquid micro-channel, after micro-channel 220 and last micro-channel 320 were merged into complete liquid micro-channel, piezoelectric cantilever 210 was positioned at the middle part of the liquid micro-channel that is merged into; The next door of the micro-channel 220 on substrate 200 is provided with fluid reservoir 230; Be connected by microflute 240 between micro-channel 220 and the fluid reservoir 230; On the last substrate 300 with substrate 200 on fluid reservoir 230 corresponding sections fluid reservoir 330 is set, fluid reservoir 230 combines with last fluid reservoir 330, becomes a big fluid reservoir, and on the top of last fluid reservoir 330 inlet 350 is set; On on the last substrate 300 between micro-channel 320 and the last fluid reservoir 330 by on microflute 340 be connected.Jet orifice plate 100, substrate 200 and 300 3 substrates of last substrate bond together successively forms the liquid injection structure (as shown in Figure 2) that piezoelectric cantilever drives.
Described piezoelectric cantilever 210 has only an end to be fixed on micro-channel 220 walls of substrate 200, and other parts are suspending movable (as shown in Figure 2).
Described piezoelectric cantilever 210 comprises piezoelectric layer 212 and top electrode 213 thereof, bottom electrode 211, at the surface coverage insulating medium layer 214 of cantilever beam, makes the liquid in upper and lower electrode layer and the micro-channel keep electric insulation.This piezoelectric cantilever 210 can also be for containing the MULTILAYER COMPOSITE piezoelectric cantilever of multi-layer piezoelectric layer and the non-piezoelectric layer of multilayer; Or to comprise the form formation piezoelectric cantilever of the identical or opposite piezoelectric layer of two-layer or two-layer above polarised direction.
Described in each micro-channel top or conduit in can place a plurality of piezoelectric cantilevers by different way, the liquid that drives in the same micro-channel sprays from the micro-spraying hole that communicates with it.
At last, jet orifice plate 100, substrate 200 and 300 3 substrates of last substrate are grouped together by bonding or bonding mode, form the liquid injection structure.
The array liquid injection structure that described piezoelectric cantilever drives, be that a plurality of piezoelectric cantilevers, micro-channel, micro-spraying hole are arranged in respectively separately on the substrate, and corresponding mutually, each substrate combination back together just constitutes the array liquid injection structure that drives with piezoelectric cantilever.Can be considered as the schematic diagram of array liquid injection structure as shown in figures 1 and 3.
In first kind of structure of liquid injection structure, piezoelectric cantilever is on micro-channel top.The major part of liquid injection structure is with illustrated in figures 1 and 2 the same, just in last substrate 300 on each dividing wall of 320 of micro-channel be removed, form a big fluid reservoir, link to each other by last microflute 340 with the original fluid reservoir 350 in next door.With above-mentioned three substrate combination together after, be equivalent to the top that piezoelectric cantilever 210 is positioned at the liquid micro-channel.
In second kind of structure, two fluid reservoirs further will going up on the substrate 300 are merged into a big fluid reservoir 322.At this moment, inlet 350 can move to the substrate middle part, becomes for 351 (as shown in Figure 3).
The cross-section structure of the piezoelectric cantilever 210 in the foregoing description as shown in Figure 4, it is composited by silicon dioxide layer 215, bottom electrode 211, piezoelectric layer 212, top electrode 213, surface insulation dielectric layer 214.Except that this implementation, silicon dioxide layer following also can keep certain thickness monocrystalline silicon layer and constitute cantilever beam with other layer in the piezoelectric cantilever.
In other implementation of the present utility model, also can will be designed to different forms with the corresponding piezoelectric cantilever microactrator of each micro-channel, and, can place a plurality of piezoelectric cantilevers by different way in the top of each micro-channel or conduit, the liquid that drives in the same micro-channel sprays from the micro-spraying hole that communicates with it.For example, its in same micro-channel or the number on top can be more than one, its fixed support end also can be positioned at different positions, as Fig. 5---Figure 15 shows that multiple distribution form with the corresponding piezoelectric cantilever of same micro-channel.
Liquid injection structure of the present utility model can be widely used in inkjet printing, other little manufacture view such as field such as figure, image record and printing, printing and dyeing and multiple display, biochip.
Claims (5)
1. liquid injection structure that drives based on piezoelectric cantilever, its primary structure comprises, piezoelectric cantilever, micro-channel, micro-spraying hole; It is characterized in that: the piezoelectric cantilever that contains piezoelectric thin film layer and upper and lower electrode thereof is arranged in the top or the conduit of liquid micro-channel, forms the driver that liquid sprays in the micro-channel; Be provided with on the jet orifice plate with the microflute substrate on the corresponding micro-spraying hole of micro-channel, be arranged in the piezoelectric cantilever of micro-channel top or conduit, spray orifice and the micro-channel formation liquid injection structure that combines.
2. according to the described liquid injection structure that drives based on piezoelectric cantilever of claim 1, it is characterized in that: an end or a side of described piezoelectric cantilever link to each other with substrate, form the fixed support end of cantilever beam, the cantilever beam other parts are suspending movable, place at least one in each micro-channel top or conduit.
3. according to the described liquid injection structure that drives based on piezoelectric cantilever of claim 1, it is characterized in that: described piezoelectric cantilever is to comprise piezoelectricity and multi-layer compound structure non-piezoelectricity, wherein comprises one deck piezoelectric layer and upper and lower electrode layer thereof at least.
4. according to the described liquid injection structure that drives based on piezoelectric cantilever of claim 1, it is characterized in that: the surface of described piezoelectric cantilever is an electric insulation layer.
5. according to the described liquid injection structure that drives based on piezoelectric cantilever of claim 1, it is characterized in that: the liquid injection structure that described piezoelectric cantilever drives, comprise at least one group of piezoelectric cantilever, micro-channel, micro-spraying hole, constitute the array liquid injection structure that drives with piezoelectric cantilever.
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| Application Number | Priority Date | Filing Date | Title |
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| CNU200820080407XU CN201220507Y (en) | 2008-05-07 | 2008-05-07 | Liquid injection structure based on piezoelectric cantilever beam |
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| Application Number | Priority Date | Filing Date | Title |
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| CNU200820080407XU CN201220507Y (en) | 2008-05-07 | 2008-05-07 | Liquid injection structure based on piezoelectric cantilever beam |
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| CN201220507Y true CN201220507Y (en) | 2009-04-15 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103182844A (en) * | 2011-12-27 | 2013-07-03 | 珠海纳思达企业管理有限公司 | Liquid spray head |
| CN103287102A (en) * | 2012-02-23 | 2013-09-11 | 珠海纳思达电子科技有限公司 | Ink-jet printer liquid nozzle |
| CN103287101A (en) * | 2012-02-23 | 2013-09-11 | 珠海纳思达电子科技有限公司 | Piezoelectric actuator and liquid shower nozzle |
| CN103660573A (en) * | 2012-09-08 | 2014-03-26 | 珠海纳思达电子科技有限公司 | Liquid ink nozzle |
| CN104339865A (en) * | 2013-07-30 | 2015-02-11 | 珠海纳思达企业管理有限公司 | Liquid spray head |
-
2008
- 2008-05-07 CN CNU200820080407XU patent/CN201220507Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103182844A (en) * | 2011-12-27 | 2013-07-03 | 珠海纳思达企业管理有限公司 | Liquid spray head |
| CN103182844B (en) * | 2011-12-27 | 2015-06-03 | 珠海纳思达企业管理有限公司 | Liquid spray head |
| CN103287102A (en) * | 2012-02-23 | 2013-09-11 | 珠海纳思达电子科技有限公司 | Ink-jet printer liquid nozzle |
| CN103287101A (en) * | 2012-02-23 | 2013-09-11 | 珠海纳思达电子科技有限公司 | Piezoelectric actuator and liquid shower nozzle |
| CN103287102B (en) * | 2012-02-23 | 2015-12-02 | 珠海赛纳打印科技股份有限公司 | ink-jet printer liquid nozzle |
| CN103660573A (en) * | 2012-09-08 | 2014-03-26 | 珠海纳思达电子科技有限公司 | Liquid ink nozzle |
| CN103660573B (en) * | 2012-09-08 | 2015-06-17 | 珠海赛纳打印科技股份有限公司 | Liquid ink nozzle |
| CN104339865A (en) * | 2013-07-30 | 2015-02-11 | 珠海纳思达企业管理有限公司 | Liquid spray head |
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Granted publication date: 20090415 Termination date: 20160507 |
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| CF01 | Termination of patent right due to non-payment of annual fee |