CN110038763A - A kind of micro- spraying mechanism of cantilever piezoelectric of sprayable big viscosity fluid - Google Patents
A kind of micro- spraying mechanism of cantilever piezoelectric of sprayable big viscosity fluid Download PDFInfo
- Publication number
- CN110038763A CN110038763A CN201910418914.2A CN201910418914A CN110038763A CN 110038763 A CN110038763 A CN 110038763A CN 201910418914 A CN201910418914 A CN 201910418914A CN 110038763 A CN110038763 A CN 110038763A
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- Prior art keywords
- copper sheet
- cover plate
- fluid
- upper cover
- micro
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/40—Filters located upstream of the spraying outlets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
- B05B17/0676—Feeding means
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- Special Spraying Apparatus (AREA)
Abstract
The present invention provides a kind of micro- spraying mechanisms of cantilever piezoelectric of sprayable big viscosity fluid, including pedestal, porous storage liquid structure, fexible film, copper sheet, piezoelectric ceramics, upper cover plate, copper sheet pressing plate and nozzle, liquid stock solution pond is offered on the left of base upper surface, right side opening is equipped with mounting groove, fluid circulation groove is offered in installation trench bottom, liquid stock solution pond passes sequentially through liquid storage tank outlet and fluid course entrance is connected to fluid circulation groove, porous storage liquid structure setting is in liquid stock solution pond, fexible film is arranged in locating slot and fluid circulation groove is completely covered, the outside freedom degree of the normal direction of upper cover plate constraint fexible film, copper sheet is attached to the upper of fexible film, piezoelectric ceramics is attached on copper sheet, the left end that copper sheet tabletting is pressed on copper sheet after upper cover plate forms cantilever beam structure, nozzle is provided with base lower surface and and fluid channel Connection, surrounds the closed cavity for accommodating big viscosity fluid between fexible film and pedestal.The present invention is able to achieve the injection of the big viscosity fluid of high pressure.
Description
Technical field
The invention belongs to fine liquid drop spray fields, more particularly, to a kind of cantilever piezoelectric of sprayable big viscosity fluid
Micro- spraying mechanism.
Background technique
It is widely used in chemical engineering of materials, biologic medical, micro-electro-mechanical systems controlling based on piezoelectric actuated fine liquid drop spray mechanism
It makes in equal fields, it is main to realize to functions such as the injections and control of fine droplet.The micro- spraying mechanism oscillator of conventional piezoelectric is staff cultivation
Deformation quantity is smaller；Since big viscosity fluid is due to the influence of viscous drag, it is difficult to be realized by low pressure, utilize existing film cantilever
When the micro- spraying mechanism of beam type piezoelectric sprays big viscosity fluid, high pressure can make elastic membrane to protrusion on the outside of cavity in cavity, will cause
Micro- spraying mechanism ejection failure；Existing piezoelectric micromotor spraying mechanism is there is also pressure stabilizing fuel reserve tank is needed simultaneously, the problem of structure is complicated.
Summary of the invention
In view of this, the present invention is directed to propose a kind of micro- spraying mechanism of cantilever piezoelectric of sprayable big viscosity fluid, work
Make that intensity is bigger, there is the ejection function for being able to achieve the big viscosity fluid of high pressure, and ejection failure will not occur.
In order to achieve the above objectives, the technical scheme of the present invention is realized as follows:
A kind of micro- spraying mechanism of cantilever piezoelectric of sprayable big viscosity fluid, including pedestal, porous storage liquid structure, flexibility
Film, copper sheet, piezoelectric ceramics, upper cover plate, copper sheet pressing plate and nozzle, offered on the left of base upper surface liquid stock solution pond,
It is equipped with mounting groove in the right side opening of base upper surface, offers fluid circulation groove in installation trench bottom, the liquid stock solution pond
Side bottom is exported equipped with liquid storage tank, offers fluid circulation groove entrance, the liquid stock solution in the bottom of fluid circulation groove
Pond passes sequentially through liquid storage tank outlet and fluid circulation groove entrance is connected to fluid circulation groove, and the porous storage liquid structure setting exists
In liquid stock solution pond, the fexible film is arranged in locating slot and is completely covered fluid circulation groove, and the upper cover plate compresses
It the periphery of fexible film and is fixedly connected with pedestal, the outside freedom degree of the normal direction of the upper cover plate constraint fexible film, institute
The copper sheet stated is covered in the upper surface of fexible film, and the piezoelectric ceramics is covered in the upper surface of copper sheet, the copper sheet pressure
The left end that piece is pressed on copper sheet after upper cover plate forms cantilever beam structure, and the copper sheet tabletting is fixedly connected with upper cover plate,
The nozzle is provided with the lower surface of pedestal, and is connected to fluid channel, the fexible film and porous storage liquid structure and spray
The closed cavity for accommodating big viscosity fluid is surrounded between mouth.
Further, multiple counter sinks, multiple cover board threaded holes and a cover plate through hole are equipped on the upper cover plate, it is more
A counter sink is symmetrically distributed in the surrounding of upper cover plate along the center line of upper cover plate, and multiple cover board threaded holes are along upper cover plate
Center line it is symmetrical, the outside of cover board threaded hole is arranged in the counter sink, and the cover plate through hole is located in upper cover plate
Heart position, the cover plate through hole are rectangular through-hole, and the cover plate through hole and copper sheet platen gap cooperate, the pedestal be equipped with
The base threaded hole of counter sink cooperation, bolt connect with base threaded hole after counter sink and are fixed on the base upper cover plate.
Further, the width of the cover plate through hole is less than the width of fluid circulation groove, the flexible thin not pasted with copper sheet
The lower surface of diaphragm area is contacted with fluid, and upper surface is contacted with upper cover plate.
Further, blocking threaded hole, the blocking threaded hole are offered in the left side bottom in the liquid stock solution pond
Cooperate with blocking.
Further, the copper sheet pressing plate be T font structure, T font structure include integrally formed horizontal connection portion and
Vertical compressed part, in horizontal connection portion be equipped with copper sheet pressing plate through-hole, bolt pass through copper sheet pressing plate through-hole after with cover board threaded hole
Copper sheet pressing plate is fixed on upper cover plate by connection, and the bottom surface of vertical compressed part is pressing plate stationary plane, is cut out on pressing plate stationary plane
The L-type groove for preventing copper sheet pressing plate and copper sheet and piezoelectric ceramics from interfering.
Further, the piezoelectric ceramics is polarized using thickness direction.
Further, the porous storage liquid structure is sponge.
Further, the nozzle is cone structure.
Further, the copper sheet is covered in the center of fexible film, and the piezoelectric ceramics is covered in copper sheet
Heart position.
Further, the section of the copper sheet and piezoelectric ceramics is rectangle or circle.
Compared with the existing technology, the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind of the present invention
Have the advantage that piezoelectric vibrator only constrains one end, when identical injection intensity, required voltage magnitude is small；Fexible film
The outside freedom degree of normal direction is capped plate constraint, and when pressure is very big in cavity, due to the constraint of upper cover plate, flexible membrane will not
Outside protrusion is generated, that is, in the injection for not influencing that high pressure big viscosity fluid may be implemented in the case where actuating；Fluid reservoir
The porous storage liquid structure of placement in liquid pool, both may be implemented the filtering of opposing jet body, while flowing into porous coupling using fluid
Cooperation with and micropore capillarity overcome the gravity realization to the pressure stabilizing feed flow of micro- spray chamber body.
Detailed description of the invention
The attached drawing for constituting a part of the invention is used to provide further understanding of the present invention, schematic reality of the invention
It applies example and its explanation is used to explain the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is bowing for the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind described in the embodiment of the present invention
View；
Fig. 2 is the sectional view along A-A of Fig. 1；
Fig. 3 is the B-B direction cross-sectional view of Fig. 1；
Fig. 4 is enlarged drawing at the C of Fig. 2；
Fig. 5 is the bottom of the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind described in the embodiment of the present invention
The structural schematic diagram of seat；
Fig. 6 is the upper of the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind described in the embodiment of the present invention
The structural schematic diagram of cover board；
Fig. 7 is the copper of the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind described in the embodiment of the present invention
The structural schematic diagram of piece pressing plate.
Description of symbols:
1- pedestal, 1-1- block threaded hole, the outlet of 1-2- liquid storage tank, 1-3- fluid reservoir liquid pool, 1-4- base threaded hole, 1-
5- fluid circulation groove entrance, 1-6- fluid circulation groove, 1-7- mounting groove, 2- blocking, the porous storage liquid structure of 3-, 4- fexible film,
5- copper sheet, 6- piezoelectric ceramics, 7- upper cover plate, 7-1- counter sink, 7-2- cover board threaded hole, 7-3 cover plate through hole, 8- copper sheet pressing plate,
8-1- copper sheet pressing plate through-hole, 8-2- pressing plate stationary plane, 8-3-L type groove, 9- nozzle.
Specific embodiment
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
In addition, the big viscosity fluid being previously mentioned in an embodiment of the present invention, refers to that viscosity is greater than the fluid of 50cP.
The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
As shown in Fig. 1-Fig. 7, a kind of micro- spraying mechanism of cantilever piezoelectric of sprayable big viscosity fluid, including it is pedestal 1, more
Hole stores liquid structure 3, fexible film 4, copper sheet 5, piezoelectric ceramics 6, upper cover plate 7, copper sheet pressing plate 8 and nozzle 9, in 1 upper surface of pedestal
Left side offer liquid stock solution pond 1-3,1 upper surface of pedestal right side opening be equipped with mounting groove 1-7, in the bottom mounting groove 1-7
Fluid circulation groove 1-6 is offered, the side bottom of the liquid stock solution pond 1-3 is equipped with liquid storage tank and exports 1-2, in fluid circulation groove
The bottom of 1-6 offers fluid circulation groove entrance 1-5, and the liquid stock solution pond 1-3 passes sequentially through liquid storage tank outlet 1-2 and stream
Body circulation groove entrance 1-5 is connected to fluid circulation groove 1-6, and the porous storage liquid structure 3 is arranged in the 1-3 of liquid stock solution pond,
The fexible film 4 is arranged in locating slot 1-7 and is completely covered fluid circulation groove 1-6, and the upper cover plate 7 compresses flexible thin
It the periphery of film 4 and is fixedly connected with pedestal 1, the upper cover plate 7 constrains the outside freedom degree of normal direction of fexible film 4, described
Copper sheet 5 be covered in the upper surface of fexible film 4, the piezoelectric ceramics 6 is covered in the upper surface of copper sheet 5, the copper sheet
The left end that tabletting 8 is pressed on copper sheet 5 after upper cover plate 7 forms cantilever beam structure, and the copper sheet tabletting 8 and upper cover plate 7 are solid
Fixed connection, the nozzle 9 is provided with the lower surface of pedestal 1, and be connected to fluid circulation groove 1-6, the fexible film 4 and more
Hole, which stores, surrounds the closed cavity for accommodating big viscosity fluid between liquid structure 3 and nozzle 9, this closed cavity is micro- spray chamber body.
Multiple counter sink 7-1, multiple cover board threaded hole 7-2 and a cover plate through hole 7-3 are equipped on upper cover plate 7, it is multiple
The counter sink 7-1 is symmetrically distributed in the surrounding of upper cover plate 7, multiple edges cover board threaded hole 7-2 along the center line of upper cover plate 7
The center line of upper cover plate 7 is symmetrical, and the outside of cover board threaded hole 7-2, the cover plate through hole 7- is arranged in the counter sink 7-1
3 are located at the center of upper cover plate 7, and the cover plate through hole 7-3 is rectangular through-hole, between the cover plate through hole 7-3 and copper sheet pressing plate 8
Gap cooperation, the pedestal 1 are equipped with the base threaded hole 1-4 that cooperate with counter sink 7-1, bolt after counter sink 7-1 with bottom
Upper cover plate 7 is fixed on pedestal 1 by seat threaded hole 1-4 connection.
Width L1 by the way that cover plate through hole 7-3 is arranged is less than the width L2 of fluid circulation groove 1-6, does not paste with copper sheet 5
The lower surface in fexible film region is contacted with fluid, and upper surface is contacted with upper cover plate 7, and which limits the normal direction of fexible film 4
Outside freedom degree prevents the intracorporal high pressure of chamber from causing 4 outwardly convex of fexible film, avoids failing.
In liquid stock solution pond, the left side bottom of 1-3 offers blocking threaded hole 1-1, the blocking threaded hole 1-1 and blocks up
2 cooperation of plug.
Fluid circulation groove entrance 1-5, the bottom of fluid circulation groove entrance 1-5 are offered in the bottom of fluid circulation groove 1-6
It is connected to liquid storage tank outlet 1-2, such setting is effectively prevented when oscillator is bent to cavity direction, and big viscosity fluid is suitable
Benefit, without flowing back into fluid reservoir liquid pool 1-3, causes the mistake of piezoelectric micromotor spraying mechanism by (smaller) ejection of jet hole of nozzle 9
Effect.
Copper sheet pressing plate 8 is T font structure, and T font structure includes integrally formed horizontal connection portion and vertical compressed part,
Horizontal connection portion is equipped with copper sheet pressing plate through-hole 8-1, and bolt is connect after passing through copper sheet pressing plate through-hole 8-1 with cover board threaded hole 7-2
Copper sheet pressing plate 8 is fixed on upper cover plate 7, the bottom surface of vertical compressed part is pressing plate stationary plane 8-2, the pressing plate stationary plane 8-2
For fixing copper sheet 5, L-type groove 8-3 is cut out on pressing plate stationary plane 8-2, can effectively prevent copper sheet pressing plate 8 and copper sheet 5 and pressure
Interference between electroceramics 6.
Piezoelectric ceramics 6 is polarized using thickness direction, can adjust jetting performance by change ceramic thickness.
The porous liquid structure 3 that stores is the porous porous structure for storing liquid structure or being processed using 3D printing such as sponge, liquid stock solution
The porous storage liquid structure 3 of placement in the 1-3 of pond, both may be implemented the filtering of opposing jet body, while be flowed into using fluid porous
Coupling and micropore capillarity overcome the gravity to realize the pressure stabilizing feed flow to micro- spray chamber body.
Nozzle 9 is cone structure, can size by adjusting cavity spout and cone angle angle for realizing fluid injection
Degree, to realize the adjustment to jetting performance.
Copper sheet 5 is covered in the center of fexible film 4, and the piezoelectric ceramics 6 is covered in the center of copper sheet 5.
The section of copper sheet 5 and piezoelectric ceramics 6 is rectangle or circle, is also possible to arbitrary shape, to meet different injections
Demand.
The number of bolts for connecting pedestal 1 and upper cover plate 7 is N, and N is positive integer；Connect the spiral shell of upper cover plate 7 and copper sheet pressing plate 8
Bolt number is M, and M is positive integer.The value that the value of N is 9, M in the present invention is 2.
The working principle of the invention: the porous storage liquid structure 3 of placement in fluid reservoir liquid pool 1-3 both may be implemented to injection
The filtering of fluid, while porous coupling and micropore capillarity are flowed into using fluid to overcome gravity to realize to micro-
The pressure stabilizing feed flow of spray chamber body.It is hydraulically full in 1 closed micro- spray chamber body of fexible film 3 and pedestal, under pulsed voltage excitation
The oscillator that piezoelectric ceramics 6 and copper sheet 5 form generates bending vibration up and down, so that the 1 closed cavity body of institute of fexible film 4 and pedestal
Product generates increase and decrease, realizes that periodically injection drop outward, the width L1 of the cover plate through hole on upper cover plate 7 are slightly larger than oscillator
Width (due to copper sheet and piezoelectric ceramics consolidation together, should be the width of copper sheet here), but be less than cavity fluid circulation groove
Width L2.Fexible film 4 is capped plate 7 and is pressed on the mounting groove 1-7 of pedestal 1, realizes the sealing to fluid domain in cavity.
Simultaneously as the width of the rectangular through-hole of upper cover plate 7 is less than the width of cavity fluid circulation groove, so that the portion that fexible film 4 is deposited
Subregion is to contact with fluid on one side, on one side for not with oscillator paste but contacted (disconnected) with upper cover plate 7.The flexibility in the region
Film 4 is limited the outside Single Degree Of Freedom of normal direction, may be implemented to transport downwards when oscillator is bent to cavity direction with oscillator
It is dynamic, while the intracorporal high pressure of chamber being avoided to cause 4 outwardly convex of fexible film, it avoids failing.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of micro- spraying mechanism of cantilever piezoelectric of sprayable big viscosity fluid, it is characterised in that: including pedestal (1), porous
Liquid structure (3), fexible film (4), copper sheet (5), piezoelectric ceramics (6), upper cover plate (7), copper sheet pressing plate (8) and nozzle (9) are stored,
Liquid stock solution pond (1-3) is offered on the left of pedestal (1) upper surface, the right side opening in pedestal (1) upper surface is equipped with mounting groove (1-
7) it, is offered fluid circulation groove (1-6) in the bottom mounting groove (1-7), the side bottom of the liquid stock solution pond (1-3) is equipped with storage
Liquid pool exports (1-2), offers fluid circulation groove entrance (1-5), the liquid stock solution in the bottom of fluid circulation groove (1-6)
Pond (1-3) passes sequentially through liquid storage tank outlet (1-2) and fluid circulation groove entrance (1-5) is connected to fluid circulation groove (1-6), described
The setting of porous storage liquid structure (3) in liquid stock solution pond (1-3), fexible film (4) setting is in locating slot (1-7)
And fluid circulation groove (1-6) is completely covered, the upper cover plate (7), which compresses the periphery of fexible film (4) and fixes with pedestal (1), to be connected
It connects, the outside freedom degree of the normal direction of the upper cover plate (7) constraint fexible film (4), the copper sheet (5) is covered in flexible thin
The upper surface of film (4), the piezoelectric ceramics (6) are covered in the upper surface of copper sheet (5), and the copper sheet tabletting (8) passes through upper
The left end that copper sheet (5) is pressed on after cover board (7) forms cantilever beam structure, the copper sheet tabletting (8) and upper cover plate (7) fixed company
It connects, the nozzle (9) is provided with the lower surface of pedestal (1), and is connected to fluid circulation groove (1-6), the fexible film (4)
The closed cavity for accommodating big viscosity fluid is surrounded between porous storage liquid structure (3) and nozzle (9).
2. the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to claim 1, feature exist
In: multiple counter sinks (7-1), multiple cover board threaded holes (7-2) and a cover plate through hole (7- are equipped on the upper cover plate (7)
3), multiple counter sinks (7-1) are symmetrically distributed in the surrounding of upper cover plate (7), multiple lids along the center line of upper cover plate (7)
Plate threaded hole (7-2) is symmetrical along the center line of upper cover plate (7), and the counter sink (7-1) is arranged at cover board threaded hole (7-2)
Outside, the cover plate through hole (7-3) is located at the center of upper cover plate (7), and the cover plate through hole (7-3) is rectangular through-hole,
The cover plate through hole (7-3) and copper sheet pressing plate (8) clearance fit, the pedestal (1) are equipped with the bottom cooperated with counter sink (7-1)
Seat threaded hole (1-4), bolt connect afterwards with base threaded hole (1-4) across counter sink (7-1) upper cover plate (7) being fixed on pedestal
(1) on.
3. the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to claim 2, feature exist
In: the width of the cover plate through hole (7-3) is less than the width of fluid circulation groove (1-6), the fexible film not pasted with copper sheet (5)
The lower surface in region is contacted with fluid, and upper surface is contacted with upper cover plate (7).
4. the micro- spraying machine of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to any one of claim 1-3
Structure, it is characterised in that: offer blocking threaded hole (1-1), the blocking in the left side bottom of the liquid stock solution pond (1-3)
Threaded hole (1-1) and blocking (2) cooperation.
5. the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to claim 4, feature exist
It is T font structure in: the copper sheet pressing plate (8), T font structure includes integrally formed horizontal connection portion and vertical compressed part,
In horizontal connection portion be equipped with copper sheet pressing plate through-hole (8-1), bolt pass through copper sheet pressing plate through-hole (8-1) afterwards with cover board threaded hole
Copper sheet pressing plate (8) is fixed on upper cover plate (7) by (7-2) connection, and the bottom surface of vertical compressed part is pressing plate stationary plane (8-2),
The L-type groove (8-3) for preventing copper sheet pressing plate (8) and copper sheet (5) and piezoelectric ceramics (6) from interfering is cut out on pressing plate stationary plane (8-2).
6. the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to claim 1, feature exist
In: the piezoelectric ceramics (6) is polarized using thickness direction.
7. the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to claim 1, feature exist
In: the porous storage liquid structure (3) is sponge.
8. the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to claim 1, feature exist
In: the nozzle (9) is cone structure.
9. the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to claim 1, feature exist
In: the copper sheet (5) is covered in the center of fexible film (4), and the piezoelectric ceramics (6) is covered in the center of copper sheet (5)
Position.
10. the micro- spraying mechanism of cantilever piezoelectric of the sprayable big viscosity fluid of one kind according to claim 9, feature exist
In: the section of the copper sheet (5) and piezoelectric ceramics (6) is rectangle or circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910418914.2A CN110038763B (en) | 2019-05-20 | 2019-05-20 | Cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910418914.2A CN110038763B (en) | 2019-05-20 | 2019-05-20 | Cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110038763A true CN110038763A (en) | 2019-07-23 |
| CN110038763B CN110038763B (en) | 2020-07-14 |
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|---|---|---|---|
| CN201910418914.2A Active CN110038763B (en) | 2019-05-20 | 2019-05-20 | Cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid |
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|---|---|---|---|---|
| CN111889680A (en) * | 2020-06-09 | 2020-11-06 | 哈尔滨工业大学 | Direct on-demand printing mechanism for hot-melt metal micro-droplets based on piezoelectric micro-jetting |
| CN111889680B (en) * | 2020-06-09 | 2022-08-26 | 哈尔滨工业大学 | Direct on-demand printing mechanism for hot-melt metal micro-droplets based on piezoelectric micro-jetting |
| CN113739827A (en) * | 2021-08-24 | 2021-12-03 | 江苏大学 | Dynamic micro-cantilever fixing device and detection method thereof |
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| CN110038763B (en) | 2020-07-14 |
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