CN110038763B - Cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid - Google Patents
Cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid Download PDFInfo
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- CN110038763B CN110038763B CN201910418914.2A CN201910418914A CN110038763B CN 110038763 B CN110038763 B CN 110038763B CN 201910418914 A CN201910418914 A CN 201910418914A CN 110038763 B CN110038763 B CN 110038763B
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- cover plate
- copper sheet
- liquid storage
- spraying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/40—Filters located upstream of the spraying outlets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
- B05B17/0676—Feeding means
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Abstract
The invention provides a cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid, which comprises a base, a porous liquid storage structure, a flexible thin film, a copper sheet, piezoelectric ceramics, an upper cover plate, a copper sheet pressing plate and a nozzle, wherein a liquid storage tank is arranged on the left side of the upper surface of the base, an installation groove is arranged on the right side of the upper surface of the base, a fluid circulation groove is arranged at the bottom of the installation groove, the liquid storage tank is communicated with the fluid circulation groove sequentially through a liquid storage tank outlet and a fluid flow passage inlet, the porous liquid storage structure is arranged in the liquid storage tank, the flexible thin film is arranged in a positioning groove and completely covers the fluid circulation groove, the upper cover plate restrains the outward freedom degree of the flexible thin film in the normal direction, the copper sheet is attached to the flexible thin film, the piezoelectric ceramics is attached to the copper sheet, a pressing sheet penetrates through the upper, and a closed cavity for containing high-viscosity fluid is enclosed between the flexible film and the base. The invention can realize the injection of high-pressure high-viscosity fluid.
Description
Technical Field
The invention belongs to the field of micro-droplet jetting, and particularly relates to a cantilever beam type piezoelectric micro-jetting mechanism capable of jetting a high-viscosity fluid.
Background
The micro-droplet injection mechanism based on piezoelectric actuation is widely applied to the fields of material chemical industry, biological medicine, micro-electro-mechanical system manufacturing and the like, and mainly realizes the functions of injecting and controlling micro-droplets and the like. The vibrator of the traditional piezoelectric micro-spraying mechanism is in a fully-constrained deformation quantity and is small; when the existing film cantilever beam type piezoelectric micro-spraying mechanism is used for spraying the high-viscosity fluid, the high pressure in the cavity can enable the elastic film to protrude towards the outer side of the cavity, and the spraying failure of the micro-spraying mechanism can be caused; meanwhile, the conventional piezoelectric micro-spraying mechanism also has the problems of needing a pressure stabilizing oil storage tank and complicated structure.
Disclosure of Invention
In view of the above, the present invention is directed to a cantilever beam type piezoelectric micro-jetting mechanism capable of jetting a high-viscosity fluid, which has a higher working strength, can realize a jetting function of a high-pressure high-viscosity fluid, and does not cause jetting failure.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
a cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid comprises a base, a porous liquid storage structure, a flexible film, a copper sheet, piezoelectric ceramics, an upper cover plate, a copper sheet pressing plate and a nozzle, wherein a liquid storage tank is arranged on the left side of the upper surface of the base, an installation groove is arranged on the right side of the upper surface of the base, a fluid circulation groove is arranged at the bottom of the installation groove, a liquid storage tank outlet is arranged at the bottom of the side surface of the liquid storage tank, a fluid circulation groove inlet is arranged at the bottom of the fluid circulation groove, the liquid storage tank is communicated with the fluid circulation groove through the liquid storage tank outlet and the fluid circulation groove inlet in sequence, the porous liquid storage structure is arranged in the liquid storage tank, the flexible film is arranged in a positioning groove and completely covers the fluid circulation groove, the upper cover plate compresses the periphery of the flexible film and is fixedly connected with the base, and the upper cover plate restrains, the copper sheet is attached to the upper surface of the flexible thin film, the piezoelectric ceramic is attached to the upper surface of the copper sheet, the copper sheet pressing sheet penetrates through the upper cover plate and then is tightly pressed at the left end of the copper sheet to form a cantilever beam structure, the copper sheet pressing sheet is fixedly connected with the upper cover plate, the nozzle is arranged on the lower surface of the base and is communicated with the fluid channel, and a closed cavity for containing high-viscosity fluid is formed by the flexible thin film, the porous liquid storage structure and the nozzle in a surrounding mode.
Furthermore, the upper cover plate is provided with a plurality of counter bores, a plurality of cover plate threaded holes and a cover plate through hole, the plurality of counter bores are symmetrically distributed around the upper cover plate along the central line of the upper cover plate, the plurality of cover plate threaded holes are symmetrically distributed along the central line of the upper cover plate, the counter bores are arranged on the outer side of the cover plate threaded holes, the cover plate through hole is located at the center of the upper cover plate, the cover plate through hole is a rectangular through hole, the cover plate through hole is in clearance fit with the copper sheet pressing plate, the base is provided with a base threaded hole matched with the counter bores, and the bolt penetrates through the counter bores and is connected with the base threaded hole to fix the upper cover plate on the base.
Furthermore, the width of the cover plate through hole is smaller than that of the fluid circulation groove, the lower surface of the flexible film area which is not attached to the copper sheet is contacted with fluid, and the upper surface of the flexible film area is contacted with the upper cover plate.
Furthermore, a blocking threaded hole is formed in the bottom of the left side face of the liquid storage tank and matched with the plug.
Furthermore, the copper sheet pressing plate is of a T-shaped structure, the T-shaped structure comprises a horizontal connecting portion and a vertical pressing portion which are integrally formed, a copper sheet pressing plate through hole is formed in the horizontal connecting portion, a bolt penetrates through the copper sheet pressing plate through hole and then is connected with a cover plate threaded hole to fix the copper sheet pressing plate on the upper cover plate, the bottom surface of the vertical pressing portion is a pressing plate fixing surface, and L-type grooves for preventing the interference of the copper sheet pressing plate, a copper sheet and piezoelectric ceramics are cut out on the pressing plate fixing surface.
Further, the piezoelectric ceramic is polarized in the thickness direction.
Further, the porous reservoir structure is a sponge.
Further, the nozzle is of a conical structure.
Furthermore, the copper sheet is attached to the center of the flexible film, and the piezoelectric ceramic is attached to the center of the copper sheet.
Furthermore, the sections of the copper sheets and the piezoelectric ceramics are rectangular or circular.
Compared with the prior art, the cantilever beam type piezoelectric micro-spraying mechanism capable of spraying the high-viscosity fluid has the following advantages: the piezoelectric vibrator is only restricted to one end, and the required voltage amplitude is small when the jetting intensity is the same; the degree of freedom of the flexible film in the outward direction in the normal direction is restricted by the upper cover plate, when the pressure in the cavity is high, due to the restriction of the upper cover plate, the flexible film cannot generate outward bulges, namely, the high-pressure high-viscosity fluid can be sprayed under the condition of not influencing actuation; the porous liquid storage structure is arranged in the fluid liquid storage tank, so that the filtering of the sprayed fluid can be realized, and meanwhile, the pressure-stabilizing liquid supply to the micro-spraying cavity is realized by overcoming the gravity action by utilizing the coupling action and the micropore capillary action of the fluid flowing into the porous structure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a top view of an embodiment of an cantilever beam piezoelectric micro-jetting mechanism capable of jetting a high-viscosity fluid;
FIG. 2 is a sectional view taken along line A-A of FIG. 1;
FIG. 3 is a sectional view taken along line B-B of FIG. 1;
FIG. 4 is an enlarged view at C of FIG. 2;
FIG. 5 is a schematic structural diagram of a base of an cantilever beam type piezoelectric micro-jet mechanism capable of jetting a high-viscosity fluid according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of an upper cover plate of an cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a copper sheet pressing plate of an cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid according to an embodiment of the present invention.
Description of reference numerals:
1-base, 1-1-blocking threaded hole, 1-2-liquid storage tank outlet, 1-3-fluid liquid storage tank, 1-4-base threaded hole, 1-5-fluid circulation groove inlet, 1-6-fluid circulation groove, 1-7-mounting groove, 2-blocking, 3-porous liquid storage structure, 4-flexible film, 5-copper sheet, 6-piezoelectric ceramic, 7-upper cover plate, 7-1-countersunk hole, 7-2-cover plate threaded hole, 7-3 cover plate through hole, 8-copper sheet pressing plate, 8-1-copper sheet pressing plate through hole, 8-2-pressing plate fixing surface, 8-3-L type groove and 9-nozzle.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
In addition, the fluid with a large viscosity mentioned in the embodiment of the present invention means a fluid with a viscosity of more than 50 cP.
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
As shown in fig. 1-7, a cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a large-viscosity fluid comprises a base 1, a porous liquid storage structure 3, a flexible film 4, a copper sheet 5, a piezoelectric ceramic 6, an upper cover plate 7, a copper sheet pressing plate 8 and a nozzle 9, wherein a liquid reservoir 1-3 is arranged on the left side of the upper surface of the base 1, an installation groove 1-7 is arranged on the right side of the upper surface of the base 1, a fluid circulation groove 1-6 is arranged at the bottom of the installation groove 1-7, a reservoir outlet 1-2 is arranged at the bottom of the side surface of the liquid reservoir 1-3, a fluid circulation groove inlet 1-5 is arranged at the bottom of the fluid circulation groove 1-6, the liquid reservoir 1-3 is communicated with the fluid circulation groove 1-6 sequentially through the reservoir outlet 1-2 and the fluid circulation groove inlet 1-5, the porous liquid storage structure 3 is arranged in the liquid storage tank 1-3, the flexible film 4 is arranged in the positioning groove 1-7 and completely covers the fluid circulation groove 1-6, the periphery of the flexible film 4 is tightly pressed by the upper cover plate 7 and is fixedly connected with the base 1, the normal outward freedom degree of the flexible film 4 is restrained by the upper cover plate 7, the copper sheet 5 is attached to the upper surface of the flexible film 4, the piezoelectric ceramic 6 is attached to the upper surface of the copper sheet 5, the copper sheet pressing sheet 8 penetrates through the upper cover plate 7 and is tightly pressed at the left end of the copper sheet 5 to form a cantilever beam structure, the copper sheet pressing sheet 8 is fixedly connected with the upper cover plate 7, the nozzle 9 is arranged on the lower surface of the base 1 and is communicated with the fluid circulation groove 1-6, and a closed cavity for containing high-viscosity fluid is formed by the flexible film 4, the porous liquid storage structure 3 and the nozzle 9, the closed cavity is a micro-spraying cavity.
A plurality of counter bores 7-1, a plurality of cover plate threaded holes 7-2 and a cover plate through hole 7-3 are arranged on the upper cover plate 7, the plurality of counter bores 7-1 are symmetrically distributed around the upper cover plate 7 along the central line of the upper cover plate 7, the plurality of cover plate threaded holes 7-2 are symmetrically distributed along the central line of the upper cover plate 7, the counter sink 7-1 is arranged at the outer side of the cover plate threaded hole 7-2, the cover plate through hole 7-3 is positioned at the central position of the upper cover plate 7, the cover plate through hole 7-3 is a rectangular through hole, the cover plate through hole 7-3 is in clearance fit with the copper sheet pressing plate 8, the base 1 is provided with base threaded holes 1-4 matched with the counter bores 7-1, and the bolts penetrate through the counter bores 7-1 and then are connected with the base threaded holes 1-4 to fix the upper cover plate 7 on the base 1.
By setting the width L1 of the cover plate through hole 7-3 to be less than the width L2 of the fluid circulation groove 1-6, the lower surface of the flexible film region which is not attached to the copper sheet 5 is contacted with fluid, and the upper surface is contacted with the upper cover plate 7, so that the degree of freedom of the flexible film 4 in the outward direction in the normal direction is limited, the flexible film 4 is prevented from bulging outwards due to high pressure in the cavity, and failure is avoided.
The bottom of the left side surface of the liquid storage tank 1-3 is provided with a blocking threaded hole 1-1, and the blocking threaded hole 1-1 is matched with the block 2.
The bottom of the fluid circulation groove 1-6 is provided with a fluid circulation groove inlet 1-5, and the bottom of the fluid circulation groove inlet 1-5 is communicated with a liquid storage tank outlet 1-2, so that the arrangement effectively prevents the failure of the piezoelectric micro-spraying mechanism caused by that when the vibrator bends towards the cavity direction, the high-viscosity fluid is smoothly sprayed out through a nozzle opening (smaller) of the nozzle 9 without flowing back into the fluid liquid storage tank 1-3.
The copper sheet pressing plate 8 is of a T-shaped structure, the T-shaped structure comprises a horizontal connecting portion and a vertical pressing portion which are integrally formed, a copper sheet pressing plate through hole 8-1 is formed in the horizontal connecting portion, a bolt penetrates through the copper sheet pressing plate through hole 8-1 and then is connected with a cover plate threaded hole 7-2 to fix the copper sheet pressing plate 8 on the upper cover plate 7, the bottom surface of the vertical pressing portion is a pressing plate fixing surface 8-2, the pressing plate fixing surface 8-2 is used for fixing the copper sheet 5, L-shaped grooves 8-3 are cut in the pressing plate fixing surface 8-2, and interference among the copper sheet pressing plate 8, the copper sheet 5 and the piezoelectric ceramic 6 can.
The piezoelectric ceramic 6 is polarized in the thickness direction, and the jetting performance can be adjusted by changing the thickness of the ceramic.
The porous liquid storage structure 3 is a porous liquid storage structure such as a sponge or the like or a porous structure processed by 3D printing, and the porous liquid storage structure 3 is arranged in the liquid storage tank 1-3, so that the filtering of the ejected fluid can be realized, and the pressure-stabilized liquid supply of the micro-spraying cavity can be realized by overcoming the gravity action by utilizing the coupling action and the micropore capillary action of the fluid flowing into the porous structure.
The nozzle 9 is a conical structure and is used for realizing fluid jet, and the jet performance can be adjusted by adjusting the size and the angle of a cone angle of a jet orifice of the cavity.
The copper sheet 5 is pasted at the central position of the flexible thin film 4, and the piezoelectric ceramic 6 is pasted at the central position of the copper sheet 5.
The sections of the copper sheets 5 and the piezoelectric ceramics 6 are rectangular or circular, and can be in any shape so as to meet different spraying requirements.
The number of the bolts for connecting the base 1 and the upper cover plate 7 is N, and N is a positive integer; the number of the bolts connecting the upper cover plate 7 and the copper sheet pressing plate 8 is M, and M is a positive integer. In the invention, the value of N is 9, and the value of M is 2.
The working principle of the invention is that a porous liquid storage structure 3 is arranged in a fluid storage pool 1-3, so that the filtering of sprayed fluid can be realized, the stable pressure liquid supply to a micro-spraying cavity is realized by using the coupling effect of the fluid flowing into a plurality of holes and the capillary action of micropores, the micro-spraying cavity enclosed by a flexible film 3 and a base 1 is filled with liquid, the vibrator formed by piezoelectric ceramics 6 and a copper sheet 5 is excited by pulse voltage to generate vertical bending vibration, so that the volume of the cavity enclosed by the flexible film 4 and the base 1 is increased or decreased, so that liquid drops are periodically sprayed outwards, the width L1 of a cover plate through hole on an upper cover plate 7 is slightly larger than the width of a vibrator (the width of the copper sheet is equal to the width of the copper sheet because the copper sheet is fixedly connected with the piezoelectric ceramics, but is smaller than the width L2 of a fluid flow groove of the cavity, the flexible film 4 is tightly adhered to mounting grooves 1-7 of the base 1 by the upper cover plate 7, the sealing rectangle of a fluid flow field in the cavity is realized, and the sealing rectangle of the fluid flow area of the upper cover plate 7 is a non-directional contact area, and the flexible film 4 is prevented from being connected with the vibrator and is prevented from being deformed when the vibrator moves towards the vibrator along with the outside of the cavity.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid is characterized in that: comprises a base (1), a porous liquid storage structure (3), a flexible film (4), a copper sheet (5), piezoelectric ceramics (6), an upper cover plate (7), a copper sheet pressing plate (8) and a nozzle (9), wherein a liquid storage tank (1-3) is arranged on the left side of the upper surface of the base (1), an installation groove (1-7) is arranged on the right side of the upper surface of the base (1), a fluid circulation groove (1-6) is arranged at the bottom of the installation groove (1-7), a liquid storage tank outlet (1-2) is arranged at the bottom of the side surface of the liquid storage tank (1-3), a fluid circulation groove inlet (1-5) is arranged at the bottom of the fluid circulation groove (1-6), the liquid storage tank (1-3) is communicated with the fluid circulation groove (1-6) through the liquid storage tank outlet (1-2) and the fluid circulation groove inlet (1-5) in sequence, the porous liquid storage structure (3) is arranged in the liquid storage tank (1-3), the flexible film (4) is arranged in the mounting groove (1-7) and completely covers the fluid circulation groove (1-6), the periphery of the flexible film (4) is compressed by the upper cover plate (7) and is fixedly connected with the base (1), the normal outward freedom degree of the flexible film (4) is restricted by the upper cover plate (7), the copper sheet (5) is attached to the upper surface of the flexible film (4), the piezoelectric ceramic (6) is attached to the upper surface of the copper sheet (5), the copper sheet pressing plate (8) penetrates through the upper cover plate (7) and is compressed at the left cantilever beam end of the copper sheet (5) to form a cantilever beam structure, the copper sheet pressing plate (8) is fixedly connected with the upper cover plate (7), and the nozzle (9) is arranged on the lower surface of the base (1), and the flexible film (4), the porous liquid storage structure (3) and the nozzle (9) form a closed cavity for containing high-viscosity fluid.
2. The cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid as claimed in claim 1, wherein: the upper cover plate (7) is provided with a plurality of counter bores (7-1), a plurality of cover plate threaded holes (7-2) and a cover plate through hole (7-3), the plurality of counter bores (7-1) are symmetrically distributed around the upper cover plate (7) along the central line of the upper cover plate (7), the plurality of cover plate threaded holes (7-2) are symmetrically distributed along the central line of the upper cover plate (7), the counter bores (7-1) are arranged on the outer side of the cover plate threaded holes (7-2), the cover plate through hole (7-3) is positioned at the central position of the upper cover plate (7), the cover plate through hole (7-3) is a rectangular through hole, the cover plate through hole (7-3) is in clearance fit with the copper sheet pressing plate (8), the base (1) is provided with a base threaded hole (1-4) matched with the counter bores (7-1), the bolt penetrates through the counter bore (7-1) and then is connected with the threaded hole (1-4) of the base to fix the upper cover plate (7) on the base (1).
3. The cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid as claimed in claim 2, wherein: the width of the cover plate through hole (7-3) is smaller than that of the fluid circulation groove (1-6), the lower surface of the flexible film area which is not attached with the copper sheet (5) is contacted with fluid, and the upper surface is contacted with the upper cover plate (7).
4. An cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid according to any one of claims 1 to 3, wherein: the bottom of the left side surface of the liquid storage tank (1-3) is provided with a blocking threaded hole (1-1), and the blocking threaded hole (1-1) is matched with the block (2).
5. The cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid is characterized in that the copper sheet pressing plate (8) is of a T-shaped structure, the T-shaped structure comprises a horizontal connecting part and a vertical pressing part which are integrally formed, a copper sheet pressing plate through hole (8-1) is formed in the horizontal connecting part, a bolt penetrates through the copper sheet pressing plate through hole (8-1) and then is connected with a cover plate threaded hole (7-2) to fix the copper sheet pressing plate (8) on the upper cover plate (7), the bottom surface of the vertical pressing part is a pressing plate fixing surface (8-2), and L-shaped grooves (8-3) for preventing the copper sheet pressing plate (8), copper sheets (5) and piezoelectric ceramics (6) from interfering are cut in the pressing plate fixing surface (8-2).
6. The cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid as claimed in claim 1, wherein: the piezoelectric ceramics (6) adopt thickness direction polarization.
7. The cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid as claimed in claim 1, wherein: the porous liquid storage structure (3) is a sponge.
8. The cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid as claimed in claim 1, wherein: the nozzle (9) is of a conical structure.
9. The cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid as claimed in claim 1, wherein: the copper sheet (5) is attached to the center of the flexible film (4), and the piezoelectric ceramic (6) is attached to the center of the copper sheet (5).
10. The cantilever beam type piezoelectric micro-spraying mechanism capable of spraying a high-viscosity fluid as claimed in claim 9, wherein: the sections of the copper sheets (5) and the piezoelectric ceramics (6) are rectangular or circular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910418914.2A CN110038763B (en) | 2019-05-20 | 2019-05-20 | Cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910418914.2A CN110038763B (en) | 2019-05-20 | 2019-05-20 | Cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid |
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| CN110038763A CN110038763A (en) | 2019-07-23 |
| CN110038763B true CN110038763B (en) | 2020-07-14 |
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| CN201910418914.2A Active CN110038763B (en) | 2019-05-20 | 2019-05-20 | Cantilever beam type piezoelectric micro-spraying mechanism capable of spraying high-viscosity fluid |
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| CN111889680B (en) * | 2020-06-09 | 2022-08-26 | 哈尔滨工业大学 | Direct on-demand printing mechanism for hot-melt metal micro-droplets based on piezoelectric micro-jetting |
| CN113739827B (en) * | 2021-08-24 | 2023-01-17 | 江苏大学 | Dynamic micro-cantilever fixing device and detection method thereof |
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| JP4670225B2 (en) * | 2003-04-04 | 2011-04-13 | セイコーエプソン株式会社 | Piezoelectric element forming member, manufacturing method thereof, piezoelectric element unit using the same, and liquid jet head |
| JP2008240092A (en) * | 2007-03-28 | 2008-10-09 | Brother Ind Ltd | Film deposition system and film deposition method |
| CN201200952Y (en) * | 2008-05-29 | 2009-03-04 | 刘淑芹 | Piezoelectric cantilever beam driving flexible thin film type liquid jet structure |
| CN101288864B (en) * | 2008-06-11 | 2012-12-05 | 刘淑芹 | Liquid spray head based on piezoelectric bridge type beam and flexible thin film |
| CN201200954Y (en) * | 2008-06-13 | 2009-03-04 | 刘淑芹 | Piezoelectric bridge type beam driving flexible thin film type liquid jet structure |
| CN204523408U (en) * | 2015-01-20 | 2015-08-05 | 北京派和科技股份有限公司 | Based on injection valve and the point glue equipment of Piezoelectric Ceramic and flexible amplification mechanism |
| CN105984216B (en) * | 2015-02-13 | 2018-05-11 | 北京派和科技股份有限公司 | Piezo jets and its processing method and the spraying equipment including the nozzle |
| CN105128532B (en) * | 2015-08-11 | 2017-01-18 | 北京派和科技股份有限公司 | Piezoelectric array nozzle and spraying equipment comprising same |
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