1323193 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種模具式塗布裝置之塗布方法，尤其 以模具式塗布裝置進行塗布之開始。1323193 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a coating method of a mold coating apparatus, particularly a coating application apparatus.
【先前技術】 採用模具式塗布裝置（diecoater)(也有人稱之為淋幕式塗 布機（curtain flow coater)’或狹縫式塗布機（池⑺咖或仙此 coater))以進行的塗布，是一種被廣泛使用來作為形成均等厚度 的塗臈之塗布方法4物’此種塗布技術，可以被用來作為在& ^曰面板或PDP的彩色顯示器或固體攝影元件等所使用的彩色滤光 片（colorfilter) ’或是光阻等的塗膜之形成過程。 心 採用模具式塗布裝置以進行塗布的方法，與採用旋轉塗布 用目較之下，其所具備的雜在於因為其所使 ΐ 交ς因此特別是對於大型平板所進行的塗[Prior Art] Coating using a die coater (also known as a curtain flow coater' or a slit coater (pool (7) or a coater) is A coating method widely used as a coating method for forming a uniform thickness. This coating technique can be used as a color filter used for color displays or solid-state imaging elements of & panels or PDPs. Film (colorfilter) or the formation of a coating film such as photoresist. The method of coating using a die-type coating device, and the use of spin coating, is complicated by the fact that it is applied to a large flat plate because of the entanglement of the enamel.
义採ΐ?具式塗布裝置以進行塗布的方法，在開始塗布程序之 i握;*進灯初始化。所謂的初始化，是指去除在模具(die，塵 所附著的液滴（有時可能會乾燥、硬化），以使待塗布 η::的話’會因而導致珠粒成形（beadf_ati〇n)盔法 致ί生^況硬化的情況時’亦會因為這個原因而導 方法it產業界提出了各式各將模具前端初始化的 =套=辰i塗布塗料（塗布液）之前，在前述之淋幕式塗布 件的頂面偏’使其緊細著清雜件（細）。而此清潔構 清雜伴為可與套_唇緣部前端部緊密附著的形狀，且 由具有轉彈性的高分子樹脂所構成。然後 使此⑽構件w唇緣部移動，以將附著的塗料（塗布液、液滴） 5 1323193 予以到除的清潔方法（請參照專利文件υ。 棱嫁Γ卜湖知技術’係使模具本體接觸的唇緣部硬質 刮下除去被固持在唇緣部的塗布液之方法（請參照專利文件' 然而，在此種方法中，當液滴的量比較多，尤其是已經乾 硬化的情斜，如果要職滴從模具的前端完全去除的話，就必 須施加某種程度的壓力，找使這些清潔縣或彻 ’ 此兩者合稱為刮除裝置）移動。 將 因此，藉由與模具之間的摩擦，此等刮除裝置本 為3損。被磨損削除_除震置其構成材料的細粉，會附4 具前端的表面，而成為殘留在模具前端的異物。 a 、 若在這種狀態中進行塗布的話，隨著液體的吐出，此 3剝離，而使在塗布所得到的塗膜表面殘 異物較細微的時候，有時候則會溶解於塗布液 中的洛媒而混入，而形成在塗膜中組成内容不同的部份。 除m等方法之外，另外’也有人提出與模具本身未接觸， 模具祕化的方法。例如，藉由對滾筒狀的物體先進行預 = iff前端’以進行初始化的方法（請參照專利文 件3)此時，同時地，亦可使模具前端的異物被去除。 古杜ίί種方法之中，因為在初始化時，刮除裝置等不會與模具 直接接觸，因此可以期待獲得異物比較少的塗布膜。 、、 然而，由於此種方法本來的目的，即係為了要修整 因此去除異物的作雜小。料要使異物完全齡，則 不斷反覆塗布在滾筒狀物體之方式。 因^ ’採用此種方法的話，在完成之後的塗布膜上異物會附 者^可餘度，就必_藉職。尤其是當維料在補模 端（予以>5染）的時候’在-段期間之内，會有異物持續附著。 又’雖然在每次初始化時，塗料會從模具前端吐出的 於使用時都會進行清潔、重整，但是因為在滾筒 1323193 異^與塗布材料’並無法在料、重錄序歡全絲，因此 異物、塗布材料的觀物触態㈣會從賴再度附著 甚至，在長時間的使用後，在吐出狹縫 :的乾燥，態物質附著，因此要進行初始化 難而且些乾燥物與固態物質也往往會剝離而變成里物。 鑑於以上所述的各種理由，在使職具式 ^ 法中’無法獲得一種可充分滿足不會有異物附著，且模it方 =技術。因此，要穩定地獲得一種異物極少的塗布二說= 的方m者的非接_之模具前端之初始化 曰紅&出了一種技術。此種技術係在塗布作 時，使模具前端浸泡或接觸儲放在容器等的^， 用的時候才緩慢地往上升（請參照專利 ’n 非接觸型的模具前端之初始化二法)， 的核具別端之初始化方法仍無奸鱗決。 说接觸型 專利文件1日本專利3306838號公報 =文件2日本特開平„ —147〇62號公報 專利文件3曰本特開2001 —310147號公報 專利文件4日本特開2006 —55775號公報 【發明内容】 (發明所欲解決的問題） 立 在桓知技術之問題點，本發明之課題即在於夢_ 月匕 二的模具前端之初始化= 之塗膜中，異=量i2;置之塗布方法’而依據此方法所得 (解決問題的方法） 使塗布 本發明之模具式塗布裝置之塗布方法，其特徵在於·· 1323193 • 除裝置之彻或塊體，再編_ 以進行模具前端的液滴到除(初始化) 前端的效果°在本發明中’因為在對模罝 由使塗布液乾燥、硬化而構成的到刀到3置，係 液滴到除（初始化）時，合有模二成’因此即使在 伴隨而來，而產生4田微“_#，;、刮除裝置之間的接觸所 失於塗布液中的溶媒，^恢來該=會溶解、滅 布膜在组成上與厚度上產生，因此不會造成塗 .【實施方式】 始化The method of coating is applied to the coating device, and the coating process is started. The so-called initialization refers to the removal of the droplets in the mold (die, which may be dried and hardened, so that the η:: to be coated will result in bead formation). In the case of hardening of the condition, it will also be used for this reason. The industry has proposed various types of coatings (coating liquids) that are initialized at the front end of the mold before the coating. The top surface of the coating member is biased to make it close to the cleansing member (thin), and the cleaning structure is in a shape that can be closely attached to the front end portion of the sleeve portion, and is made of a polymer resin having a rotational elasticity. Then, the lip portion of the member (10) is moved to remove the adhered paint (coating liquid, droplet) 5 1323193 to the cleaning method (please refer to the patent document . A method of hardly scraping off a lip portion which is in contact with a mold body to remove a coating liquid held at a lip portion (refer to the patent document 'However, in this method, when the amount of liquid droplets is relatively large, especially dry hardening Feeling oblique if the job is dripping from the mold If the front end is completely removed, it is necessary to apply some degree of pressure to find these cleaning counties or the two together called the scraping device to move. Therefore, by scraping with the mold, these scraping The device is a three-loss device. The fine powder that has been removed by the wear-removal _ will be attached to the surface of the front end of the mold, and will be attached to the front end of the mold. a. If it is coated in this state, When the liquid is discharged, the 3 is peeled off, and when the surface of the coating film obtained by coating is fine, sometimes the monomer dissolved in the coating liquid is mixed, and the composition is different in the coating film. In addition to the method of m, etc., there is also a method of making the mold secret without contact with the mold itself. For example, the method of initializing the pre- iff front end by pressing the drum-shaped object ( Please refer to Patent Document 3) At this time, at the same time, foreign matter at the front end of the mold can be removed. Among the methods, since the scraping device or the like does not directly contact the mold during initialization, it can be A coating film having a relatively small foreign matter is obtained. However, since the original purpose of the method is to remove the foreign matter in order to be trimmed, the foreign matter is completely aged, and the coating is continuously applied to the roller-like object. By the way, if you use this method, the foreign matter on the coated film after completion will be attached, and it will be borrowed. Especially when the material is on the side of the mold (to be dyed &5; At the time of the 'in-stage period, foreign matter will continue to adhere. 'Also, at each initialization, the paint will be cleaned and reformed from the front end of the mold, but it will be coated on the drum 1323193. The material 'can't be in the material, re-recorded, and then the whole material, the object's physical state of the coating material (4) will be attached again from the reliance, even after a long period of use, in the spout: dry, state substance adhesion Therefore, it is difficult to perform initialization and some dry matter and solid matter tend to peel off and become a lining. In view of the various reasons described above, it is not possible to obtain a type that can be sufficiently satisfied without the attachment of foreign matter, and the mode is = technology. Therefore, it is necessary to stably obtain a non-connected mold front end of the coating material which has a very small amount of foreign matter, and a technique of blushing & This technique is used to soak the front end of the mold or contact it in a container, etc., and slowly rise it when it is used (please refer to the patent 'n non-contact type mold front end initialization method) The initialization method of the other end of the nuclear instrument is still not a ruthless decision. Japanese Patent Laid-Open No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. 2001-310147. 】 (Problems to be Solved by the Invention) The problem of the present invention lies in the problem of the initialization of the mold tip of the dream _ 匕 匕 = = 异 异 异 异 异 异 异 异 异 异 异 异 异 ; ; ; ; ; 涂布 涂布 涂布 涂布 涂布According to this method, the method for applying the mold coating apparatus of the present invention is characterized in that: 1323193 • (Initialization) Effect of the front end. In the present invention, 'because the mold is dried and hardened by the coating liquid, the knives are set to 3, and when the liquid droplets are removed (initialized), the mold is combined into two molds. Even if it comes with it, it will produce 4 Tianwei "_#,; the contact between the scraping device will be lost in the solvent in the coating liquid, and it will dissolve and wipe the film in composition and thickness. Generated, so it will not cause Coating. [Embodiment] Initialization
ί ίί；Γ,]^£ ° J iiii?產生細微粉體，但此粉體仍會溶解於塗布液ΐ的、容 =將參照附圖詳細說明依據本發明的較j實=離物 說明ϊ。2転綱依據本發明之模具式塗布裝置的塗布方法之 i離之=2係顯示作為本發明之到除裂置’採用到刀的一纽 置於所t ’模具式塗布裝置A具備歧管（細_) 2，設 前端。以塗ίίίίϋ""及概部4，位於通_狹縫部3的 =姑ii 泵將置於㈣祕_6 _塗布液s，經 。卩3而供應。在被·於吸_的桌子7上之待塗布物 蒋涂液珠B之後’藉由使本體1往箭頭方向行進的方式布在 :ίΐ= 上進行塗布。然後’在塗布完成時，停止該塗^ 5 ’同輕賴具本體丨往上升，與液珠 ^^ 1323193 次的塗布作業。 留於如果花費許多時間的話，有可能導致殘 二整之_隔係2 常都會在突謝财郎值，故通 刀或；成==:=予的^ ，2係顯示使用刮刀作為到除裝置之例Γ μ刮去）。 .的刮刀1〇 具備有獅廢料儲存部η 緣部4的前端之塗布液液滴13 ,·基本本體1之唇 除廢m存部12。 4上刺除的液_收納於刮 然而，在此時，由於唇緣部4與到刀 此到刀10本身亦會慢慢磨損 j的摩擦滑動’因 膜中。 王、田_粉末，而分散在塗布 傳統上’都是使用橡膠等的彈性 因此，在塗布膜中被分散的磨損部份2 10的材質， 然而，在本發明之中，因為是採用從塗》均勻程度。 硬化的材觸製造_刀，並配合微 將=4發去除後， 液中的溶媒。因為其與原本的塗布 ^ ^易溶解於塗布 響塗布膜的均勻程度。 …、相異之處’因此不會影 在圖示的例中，係顯示將刮刀的 狀之例，但是本發明並不限定於此種 成適合唇緣部的形 的兩側斜面適於前端面，基本上前端邱。例如，使唇緣部 在不脫離本發明之要旨範刮刀所 於本發明之技術思想的範圍内。叶變更，均包含 用塊體作為到除裝置之例。 附屬ίp 4予_始化，使用 然亦可採用單數，不過仿据a/存。卩12之塊體14。塊體14雖 論為單數個複數個皆多是採取配置複數個，但無 收納於刮除廢，__廢料’基本上被 此塊滑動，因 就#用持產生镟的粉末，而分散在塗布膜中。 都是使用橡膠等的^性“來刀的情況相同’傳統上’ ‘是採用從塗布^度。—，在本發明之中，因為 與原本的塗布液並益相塗鄕布液中的溶媒。因為 ra ^θ u…、相異之處’因此不會影響塗布膜的均勻程度。 損，因此^塊體’都會隨著使用的過程而漸漸磨 體，㈣祕絲树倾材騎製朗刮刀或塊 夠更tim材使模具式塗布裝置的躲部之初始化能 域，；地進行’因此對於形成均勻的薄層之技術領 大的貢|型的模具式塗布裝置之技術領域’可謂有相當 【圖式簡單說明】 ，1係說日域具式塗布裝置進行塗布的方法之說明圖。 圖2係採用到刀作為本發明之刮除裝置之一實施型態之說明 1323193 圖3係採用塊體作為本發明之刮除裝置之其他實施型態之說 明圖。 【主要元件符號說明】Ίίί;Γ,]^£ ° J iiii? produces a fine powder, but the powder will still dissolve in the coating liquid, the volume = will be described in detail with reference to the accompanying drawings. . According to the coating method of the mold coating apparatus of the present invention, the method of applying the mold is as shown in the present invention, and the mold is applied to the mold. (fine_) 2, set the front end. To apply ί ί ί ϋ & 概 概 概 概 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 = =卩3 and supply. After the coating of the bead B on the table 7 to be sucked, the coating is carried out by arranging the body 1 in the direction of the arrow. Then, when the coating is completed, the coating is stopped and the body of the light-drawing device is lifted up, and the coating operation of the liquid bead is 1323193 times. If you spend a lot of time, it may lead to the stagnation of the _ _ _ _ 2 often convinced the value of the franc, so the knife or; ===:= ^, 2 shows the use of the scraper as a device Example Γ μ scrape). The scraper 1 has a coating liquid droplet 13 having a tip end of the lion waste storage portion η edge portion 4, and a lip portion of the basic body 1 is removed. 4 The liquid that has been stabbed is stored in the scraping. However, at this time, since the lip portion 4 and the knife to the knife 10 are also slowly worn, the frictional sliding of j is due to the film. Wang, Tian _ powder, and dispersed in the coating is traditionally 'all using rubber or the like, therefore, the material of the worn portion 2 10 dispersed in the coating film, however, in the present invention, because it is applied 》Uniformity. The hardened material touches the _ knife and cooperates with the micro-will remove the solvent in the liquid after removing the hair. Because it is compatible with the original coating, it is easy to dissolve in the uniformity of the coating of the coating film. ...the difference" is therefore not shown in the example shown in the figure, and the example of the shape of the scraper is shown, but the present invention is not limited to the two sides of the shape suitable for the lip portion. Face, basically front end Qiu. For example, it is within the scope of the technical idea of the present invention to make the lip portion without departing from the gist of the present invention. Leaf changes include the use of blocks as an example of a device. Affiliated ίp 4 is _initialized, but it can also be used in singular, but it is a/. Block 14 of 卩12. Although the block 14 is a single number and a plurality of multiples, a plurality of configurations are adopted, but the storage is not stored in the scraping waste, and the __ scrap is basically slid by the block, because the powder used in the holding is dispersed. In the coating film. It is the same as the use of rubber, etc. The same is true for the case of the knife. Traditionally, 'the coating is used.- In the present invention, because it is coated with the original coating liquid and the solvent in the coating liquid. Because ra ^θ u..., the difference 'will not affect the uniformity of the coating film. Loss, so ^ block ' will gradually wear the body with the process of use, (4) the secret silk tree The scraper or the block is more tim material to enable the initialization of the hiding portion of the mold coating device, and the technical field of the mold coating device of the type that is formed by the technique of forming a uniform thin layer can be said to have [Simplified illustration of the drawing], 1 is an explanatory diagram of a method of coating by a Japanese-type coating device. Fig. 2 is a description of an embodiment of a scraping device of the present invention using a knife 1323193. The block is an explanatory view of other embodiments of the scraping device of the present invention.
1〜模具本體 2〜歧管 3〜狭縫部 4〜唇緣部 5〜塗布液供給泵 6〜塗布液供給槽 7〜(吸附型之)桌子 8〜待塗布物 10〜刮刀 11〜驅動部 12〜刮除廢料儲存部 13〜塗布液液滴 14〜塊體 A〜模具式塗布裝置 B〜液珠 S〜塗布液 W〜待塗布物 111 to mold main body 2 to manifold 3 to slit portion 4 to lip portion 5 to coating liquid supply pump 6 to coating liquid supply tank 7 to (adsorption type) table 8 to object to be coated 10 to blade 11 to drive unit 12 - scraping waste storage portion 13 - coating liquid droplet 14 - block A - mold coating device B ~ liquid bead S ~ coating liquid W ~ to be coated 11