TWI322716B - Slit coater - Google Patents

Description

1322716 IX. Description of the Invention: [Technical Field] The present invention relates to a slit coating apparatus, and more particularly to a coating operation for applying a photosensitive liquid such as a photoresist on a substrate for a flat panel display. 'The slit coating device can simply remove the photosensitive liquid attached to the nozzle discharge port. [Prior Art] Generally, in the manufacturing process of a substrate for a flat panel display, a process of forming a predetermined pattern on the surface of the substrate is mainly performed by photolithography. According to the photolithography method, a coating process of applying a liquid photosensitive material such as a photoresist having a predetermined thickness to the surface of the substrate is first performed before the exposure, development, and etching process. In the coating step, a nozzle having a slit type discharge port is usually used, and a photosensitive liquid is applied to the substrate during the movement of the substrate. The apparatus used at this time is a general slit coating apparatus. Further, the coating device further includes a cleaning device for removing the photosensitive liquid unevenly attached to the end of the nozzle discharge port. As is well known, the cleaning device is generally cleaned using a priming roller. This type of washing wheel cleaning method 'discloses the adsorption roller in parallel with the cutting direction of the nozzle discharge port' and rotates about its axis to remove the photosensitive liquid attached to the end portion of the nozzle discharge port. The length of the adsorption affinity corresponds to the length of the slit of the nozzle discharge port. 1322716 • Further, one side of the adsorption roller is further provided with a roller cleaner which is linked with the rotation of the roller and sprays the cleaning fluid to the side of the outer circumferential surface of the roller (drying gas or acetone) The solution) is used to clean the surface of the wheel and then remove the photosensitive liquid. However, in the roller cleaning method using the adsorption roller, the photosensitive liquid is removed by a simple rotation operation in a state where the slit in the entire area of the nozzle discharge port is in contact with the outer peripheral surface of the adsorption roller. Therefore, this structure may cause the following problems when removing the photosensitive liquid. • First, if the slit direction of the nozzle discharge port and the suction roller are not parallel, a part of the entire slit region of the discharge port will be in an uncontacted state, so that it is difficult to uniformly remove the photosensitive liquid adhering to the entire discharge port. Further, if the length of the adsorption roller corresponds to the entire slit length of the discharge port, the intermediate portion thereof will fall and be bent and deformed in a state of supporting both sides of the roller. Therefore, it is difficult to arrange the adsorption roller in parallel with the cutting direction of the discharge port. When the photosensitive liquid which is particularly attached to the end portion of the nozzle discharge port is not completely removed, the substrate is coated, and the photosensitive liquid is not uniformly applied to the initial application position of the substrate, thereby causing excessive defects. In addition, in a state parallel to the nozzle discharge port, the photosensitive roller is removed by rotating the adsorption roller in a specific direction with respect to the axis of the nozzle to adhere to the nozzle outlet end. The photographic liquid is piled up along the direction of rotation of the roller, and + 丨 one side will cause secondary contamination of the photosensitive liquid to adhere to another position at the end of the nozzle. Because the adsorption roller is linked with the cleaning device that uses the cleaning fluid to clean the roller, such as the cleaning machine, the electric mechanical structure of the field is complicated, and it is difficult to carry out the dimension > Excessive space in the work area. : To solve the shortcomings of this roller cleaning method, there is a technique for moving the enamel rubbing member along the slit direction of the tea 〒's mouth, the mouth of the R ^ port to remove the photosensitive liquid. However, in this manner, when the wiping member is cut along the ejection port, the secondary direction is from -0 to the other end, and secondary contamination is caused by the overflow of the photosensitive liquid. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide a slit coating which is capable of preventing a single sweat caused by a photosensitive liquid adhered to a nozzle discharge port when a photosensitive liquid is removed. Apply the device. In order to achieve the above object, the present invention provides a slit coating apparatus comprising: a workbench having a coating operation on a working surface; a nozzle body having a slit type discharge port and being fixed to the table One side of the substrate is coated with a photosensitive liquid on the substrate moving along the working surface; the cleaning roller has a cylindrical cleaning member and is located below the nozzle body in a manner transverse to the cutting direction of the ejection opening; a first driving portion for rotating the cleaning roller in a certain direction such that the cylindrical cleaning member is red-turned about its axis, and the second driving portion is used for moving the cleaning roller to make The cleaning roller moves in a cutting direction of the ejection port while rotating under the action of the first driving portion; the third driving portion is coupled to the first driving portion and the second driving portion to cause the cleaning roller The wheel moves in a direction orthogonal to the slit of the discharge port. According to the present invention, when a photosensitive liquid such as a photoresist is applied to a substrate by a slit nozzle, the photosensitive liquid adhering to the nozzle outlet can be easily removed by the cleaning roller. In particular, since the removal actions of the cleaning rollers in three different directions are interlocked with each other, the end of the discharge port does not repeatedly contact the outer peripheral surface of the roller and can be transmitted through the spiral region along the outer circumferential surface of the roller. Perform removal work. This method of removing the photosensitive liquid can easily remove the photosensitive liquid by using a small roller as compared with the conventional removal method (the removal method by the suction roller or the rubbing material wiping member), and can be prevented to the utmost in the removal operation. Secondary pollution from the spout. Further, when the photosensitive liquid coating operation is performed by the slit coating method, the photosensitive liquid adhering to the nozzle discharge port can be uniformly removed, and the amount of the coating and the work efficiency can be further increased. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, and the description will be made within the scope of the embodiments of the present invention. The specific embodiments of the present invention can be embodied in various forms, and the scope of the claims of the present invention is not limited to the specific embodiments described below. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the entire structure of a slit coating apparatus of the present invention, and reference numeral 2 in the drawing shows a nozzle body. The nozzle body 2 has a rectangular shape in plan view, and is suitable for performing a usual slit coating as t' and fixed to one side of the table M. The 1322716 table has a conveying device M1 such as a roller conveyor, and has the nozzle body 2. In the process of transporting the flat panel display substrate G (hereinafter referred to as "substrate") through the transport apparatus i M1, a coating operation of applying a photosensitive liquid such as a photoresist W to the substrate is performed. As shown in the figure, the nozzle body 2 is fixed by a conventional method on a support table mounted on the side of the substrate transporting area of the table 0.

The nozzle body 2 can also be moved in the up and down direction on the support table M2 by a conventional conveying member M3° such as a LM rail (hereinafter referred to as "LM rail"). The bottom of the bottom is formed with a conventional slit-type discharge port N for jetting the photosensitive liquid w, and the material is made of: , and the metal excellent in durability and corrosion resistance is used. Not shown, the mounting is used to adjust the discharge gap, and one side of the nozzle body 2 can be further adjusted with a conventional gap for increasing or decreasing the discharge amount.

/,, in the slit coating device of the invention, the side of the nozzle body 2 is provided with a "sampling number" of the continuous coating number I ^ receiving the photosensitive liquid W, and is connected thereto

, · only the place is placed horizontally in work A

On one side of the surface. . M, and on the substrate G of the material to be transferred, the roller 4, the core of which is removed; the nozzle body 2 is cleaned by the cleaning roller 4, and the photosensitive liquid on the /N end portion or synthetic resin can be used. The rotor made of the type uses a metal sight wheel excellent in rigidity and durability, and the outer peripheral surface 1322716 of the cleaning roller 4 is provided with a cylindrical cleaning member 6. The cylindrical cleaning member 6 is in the office. The outer peripheral surface of the cleaning roller 4 is formed by inserting a synthetic rubber-like sheet or a gasket, which can be used by a general EPDM rubber (Ethylene_

Propylene-Non-conjugated Diene, hereinafter referred to as ‘‘EpD]Vi,’) A sheet or liner made of material. In particular, the EPDM material is suitable for producing the cleaning member 6 of the present invention because of its excellent chemical resistance, weather resistance, heat resistance, solvent resistance and the like. As shown in FIG. 2, when the cleaning roller 4 is rotated in a state of being disposed across the nozzle body 2, the cleaning member 6 can remove the photosensitive light attached to the end of the nozzle discharge port N by the contact pressure. Liquid ash. Further, the total length of the cleaning roller 4 is larger than the slit N slit width and smaller than the slit length, so that the photosensitive liquid W can be removed with the cleaning member 6 having the smallest area. In order to remove the photosensitive liquid w, the cleaning member 6 of the cleaning roller 4 is in spiral contact with the discharge port N. To this end, in the present embodiment, as shown in the figure, the cleaning roller 4 receives the power of the first driving portion D1, the second driving portion D2, and the third driving portion D3, and is in three different directions. The action is combined to form a spiral moving region F as shown in FIG. 3, thereby removing the photosensitive liquid w. As shown in FIG. 2, the first driving portion D1' and the third driving portion D3' may be respectively mounted on the platform 8, and the nozzle body 2 and the platform are on the table M. 8 are placed in separate positions. The platform 8 can use a rectangular shuttle milk 〇 & Α B ^ having a corresponding length of 10! 32271 与 with the nozzle body 2, and the area of the platform 8 is suitable for mounting the driving parts, and allowing the road... The cleaning wheel 4 receives the power of the driving portion and follows

The opening direction of the exit N N is described. In addition, the outer casing 10' may be further provided with a casing 10' for the bottom portion of the y drive portion m, the second drive portion D2, and the third drive portion D3. Escaped - with: t The spare part D1 can use the conventional motor R1, as shown in Fig. 2, the shaft of the motor Ri and the shaft of the cleaning roller 4 are connected to one end of the shaft of the cleaning roller 4. As shown in FIG. 4, when the motor R1 that drives the first driving portion D1 is called, the cleaning roller 4 rotates in a certain direction centering on its axis to i隹 knots into the first - remove action A1. For the second drive unit D2 and the third drive unit D3, the w body pressures R2 and R3 can be used. The transfer fluid pressure cylinders R2, R3 are composed of a rail-actuated guide and a sliding device movable along the guide, and can be re-formed and can be driven by fluid pressure such as air pressure. Reciprocating. The second driving portion D2, that is, the transfer fluid pressure cylinder R2, is provided to be capable of providing a transfer region corresponding to the entire slit direction of the discharge so that the cleaning light wheel 4 reciprocates in the region. The 35th move. p D2' causes the cleaning roller 4 to move from the end of the discharge port N of the nozzle body 2 in the cutting direction toward the other end. That is, the cleaning light wheel 4 can complete the first: removal operation A2 in the cutting direction of the discharge port N. The second removing operation 相连 is interlocked with the first removing operation A1 performed by the side of the side of the monthly washing member 6 being rotated in contact with the one end of the discharge port N. ~ 1322716 When the nozzle body 2 is coated with the photosensitive liquid w, D2 can separate the cleaning roller 4 from the substrate G delivery region, and the cleaning roller 4 is in contact with the substrate G. Further, the fluid pressure red R" of the transfer of the third driving portion D3 is located between the first driving portion _ portion D2 as shown in Fig. 2 to make the cleaning roller 4: second Driving the direction of the slit N in the direction of the slit. The nozzle body 2 is as shown in Fig. 6. The cleaning roller 4 transmits the third = the third division can be performed in the direction across the slit. That is, as shown in FIG. 7, the name + the driving action of the first driving portion D1, the portion D2, and the second driving portion D3, the cleaning action A1, A2 in the three directions of the cleaning parent wheel* A3 interlocks with each other, so that the W-port N-end material is washed on the whole core of the material, and is in contact with the screw region F, and is moved to ', multi-moving three. In addition, the first driving unit D1, the second driving unit W, and the third driving unit D3 are electrically connected to each other so as to periodically remove the adhesion when the slit coating operation is performed, through the box or the control. Photosensitive liquid w on the discharge port N of the nozzle body 2. This electrical connection and control method are as long as those skilled in the art Easy embodiment valley 'detailed description thereof will be omitted in the above description, illustrated and illustration of a conventional fluid pressure conveying ... - a second driving portion and the third drive unit 〇2 configuration Μ.:

12 1322716 The invention is not limited to this. For example, although not shown, the second driving portion D2 and the third driving unit 3 may be configured to reciprocate along a predetermined section by a rack gear or a conveying screw that is actuated by receiving power from a motor. structure. Further, other various structures capable of achieving the object of the present invention can also be employed. In the above embodiment, in order to remove the photosensitive liquid w attached to the ejection port N through the cleaning roller 4, a rotary driving device di and two linear moving devices D2 and D3 are employed, but a rotary driving device may be employed. D1 and a linear moving device. For example, as shown in FIG. 8, the first drive = for fixing the cleaning roller 4 is fixed. The crucible D1 can directly configure the second driving portion D2 in the form shown in the figure in the oblique direction (diagonal direction) of the nozzle body 2. Although the above specific embodiment has explained an example in which a cleaning roller 4 is slanted corresponding to the nozzle body 2, the present invention is not limited to the above structure 0.

As shown in Fig. 9, at both sides of the nozzle body 2, at least two cleaning rollers 4 opposed to each other may be disposed to alternately remove the photosensitive liquid w. + In the following, the process of removing the photosensitive liquid stomach attached to the end portion of the mouth of the t-mouth body 2 by the slit coating & After the slit coating operation is performed on the substrate g by the nozzle body 2, when the nozzle body 2 on the holder M2 is moved to a position where it can be in contact with the rinsing member 6 of the cleaning roller 4, it can be removed. operation. As shown in FIG. 4, in a state where the cylindrical cleaning member 6 and the outlet N are in contact with each other, the first driving portion (1) 13 丄 322716 is driven to make the it α roller roller 4 to one Rotate in the direction to perform the first -1. After the removal, as shown in FIG. 5 and FIG. 6, respectively, the second ΤΊ 月 — % % % % % % 驱动 , , , , , , , , 分别 分别 分别 分别 分别 分别 分别 分别 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗The action A2 and the third removal action A3 are removed. In the case where the cleaning member 6_ side of the cleaning roller 4 is in contact with the end of the ejection port N, as shown in Fig. 7, three removal actions A1 and A2 in the same direction are shown. And A3 perform the removal operation in conjunction with each other. As shown in FIG. 10, when the removal operations Ai, a2, A3' and the end portions of the discharge σ N passing through the cleaning roller 4 are in contact with the outer peripheral surface of the cleaning member 6, A spiral moving region F is formed on the entire outer peripheral surface. On the other hand, the photosensitive liquid W' on the ejection port N adheres to the region ρ and is removed. According to the operation request, the rotation speed, the moving speed, and the like of the cleaning roller 1 are appropriately adjusted through the first driving portion di, the first driving portion D2, or the third driving portion D3 to change the cleaning. The pitch of the helical transfer area F of the component 6. The above-described method of removing the photosensitive liquid W by forming the spiral movement region F by the cleaning roller 4 can easily remove the discharge port N of the nozzle body 2 by cleaning the β-washing member 6 having a limited area on the outer peripheral surface of the roller 4. Photosensitive liquid W. In particular, this method removes the photosensitive liquid by removing the photosensitive liquid attached to the discharge port by the rotation of a roller member (adsorption roller) or by moving the stone c: S) 14 1 Compared with the method, it has a more excellent removal effect and can prevent the secondary pollution caused by the photosensitive liquid of I322716 in the removal process to the utmost. Figure 11 shows another embodiment of the cleaning unit #8 & In the specific embodiment, the cleaning member 6 is further formed with a spiral guide groove η. The guide groove 形成 has a spiral groove formed on the outer peripheral surface of the wheel 4 of the ice sheet of the cleaning bowl 4, and is sized to sandwich a portion of the end portion of the discharge port. As shown in FIG. 12, in the process of removing the photosensitive liquid W attached to the discharge port, the end portion of the discharge port is inserted into the guide groove H at a certain depth, and not only can be easily removed. The photosensitive liquid w at the bottom of the outlet ν is supplied, and the photosensitive liquid W adhering to both side surfaces of the end portion of the discharge port ν can be simply removed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the entire structure of a slit coating apparatus of the present invention. Figure 2 is an enlarged view of the page of Figure 1. Figure 3 is a schematic view for explaining the action of the cleaning roller shown in Figure 2. Fig. 4 is a schematic view for explaining the action of the first driving portion shown in Fig. 2. Figure 5 is a schematic view for explaining the action of the second driving portion shown in Figure 2. Fig. 6 is a schematic view for explaining the action of the third driving portion shown in Fig. 2. Fig. 7 is a schematic view for explaining the state in which the cleaning roller in each direction of the cleaning roller shown in Fig. 2 is connected. Figure 8 is a schematic view showing another driving embodiment of the cleaning roller shown in Figure 2; Figure 9 is a schematic view showing another embodiment of the cleaning roller shown in Figure 2; Fig. 10 is a schematic view showing the attached state of the photosensitive liquid on the cylindrical cleaning member shown in Fig. 2. Figure 11 is a schematic view for explaining another specific embodiment of the cleaning member shown in Figure 2. Figure 12 is a schematic view for explaining the action of the guide groove shown in Figure 11. # [Main component symbol description] 2 : Nozzle body 4 : Cleaning roller 6 : Cleaning member 8 : Platform 1 0 : Housing G : Substrate W : Photosensitive liquid _ D1 : First drive unit D2 : Second drive unit D3 : Three driving portion N: discharge port L: supply pipe Μ: table M1: conveying device M2: support table 16 1322716 M3: conveying member R1: motor R2, R3: fluid pressure rainbow F: spiral moving region Η: guide groove Α1 : First removal action Α 2 : Second removal action A3 : Third removal action

17

Claims (1)

1322716 X. Patent application scope: 1 · A slit coating device comprising: a coating operation on a substrate on a surface of a work surface; * a nozzle body having a slit type exit and fixed in the work a side of the ^, and a photosensitive liquid applied to the substrate along the surface (four), a cleaning roller having a cylindrical cleaning member, and located at the nozzle body in a manner transverse to the ejection opening direction Below; • f IHp' is used to rotate the cleaning roller in a certain direction to rotate the cylindrical cleaning member about its axis;卩, for moving the cleaning roller to move the cleaning wheel in the cutting direction of the ejection port while rotating under the driving action of the first driving portion; the third driving portion, and the first The driving unit and the second driving unit are coupled to move the cleaning roller in a direction orthogonal to the discharge port slit. 2. The slit coating apparatus according to claim 1, wherein the cleaning operation of the cleaning roller is combined in three different directions by the linkage of the driving portions to make the cylindrical shape The circumferential surface of the cleaning member is in spiral contact with the end of the discharge port. The slit coating apparatus according to Item 1, wherein the month is washed. P pieces are made of synthetic rubber made of Ethylene-Propylene-Non-conjugated Diene. 4. The slit-type coating skirt according to claim 1, wherein the first driving portion uses a motor, and the cleaning roller receives the driving force of the motor 18 1322716 'shaft Its axis is centered to rotate in a certain direction. The slit coating apparatus according to Item 1, wherein the second driving portion or the third driving portion may be a fluid pressure cylinder for transfer, a linear guide, or a rack gear connected to the motor, Any one of the conveying screws. The slit coating apparatus of claim 1, wherein the length of the cleaning roller is larger than a slit width of the ejection orifice, and smaller than a slit length. The slit coating apparatus of claim 1, further comprising a spiral guide formed on a circumferential surface of the cylindrical cleaning member. 8. The slit coating apparatus of claim 7, wherein the groove has a groove depth and a width suitable for accommodating the discharge port slit and is in contact with both side walls of the discharge port. 9. A slit coating apparatus comprising: a φ table 'application work on a substrate on a working surface thereof; a nozzle body having a slit type discharge port and fixed to one side of the table And applying a photosensitive liquid to the substrate moving along the working surface; the cleaning roller has a cylindrical cleaning member, and is located below the nozzle body in a manner crossing the incision direction of the exit port; a driving portion for rotating the cleaning roller ' in a specific direction to rotate the cylindrical cleaning member about its axis; a second driving portion coupled to the first driving portion to enable The cylinder 1322716-shaped cleaning member moves in the diagonal direction of the discharge port slit. 1 . The slit coating apparatus according to claim 9 , wherein the cleaning operation of the cleaning roller in three different directions is combined by the interlocking of the driving portions to make the cylinder The circumferential surface of the shaped cleaning member is in spiral contact with the end of the discharge port. 11. The slit coating apparatus according to claim 9, wherein the first driving portion uses a motor, and the cleaning roller receives a transmission force of the motor shaft to a certain axis Rotate in a specific direction. #12. The slit coating device according to claim 9, wherein the second driving portion is provided with a fluid pressure cylinder for transfer, a linear guide, a rack gear connected to the motor, and a conveying screw. Any of them. The slit coating apparatus according to claim 9, wherein the length of the cleaning roller is larger than a slit width of the ejection orifice and smaller than a slit length. 1 . The slit coating apparatus of claim 9, wherein the step further comprises a spiral guide groove formed on a circumferential surface of the cylindrical cleaning member. XI, round: as the next page 20