TW200810841A - Slit coater - Google Patents

Abstract

This invention relates to a slit coater, which is applicable to the coating operation to coat sensitization liquid such as photoresist for photo lithography on the substrate for flat panel display, and can remove the sensitization liquid unevenly adhered on the spraying outlet of the nozzle simply, comprising: a workbench, for performing coating operation to the substrate on the work surface thereof; a nozzle body having slit spraying outlet, fixed on one side of the workbench to coat sensitization liquid to the substrate; a cleaning roller, having cylindrical cleaning part and located below the aforementioned nozzle body in the manner of transversely passing the cutting direction of spraying outlet; a first driving part, used for rotating the cleaning roller in a certain direction to make the cleaning part rotate using the axis thereof as a center; a second driving part, used for moving the cleaning roller to make the cleaning roller move along the cutting direction of the spaying outlet while rotating under the action of first driving part; and a third driving part, coupling with the first driving part and the second driving part to make the cleaning roller move toward the direction of spaying outlet slit.

Description

[Technical Field] The present invention relates to a slit coating apparatus, and more particularly to a coating operation suitable for applying a photosensitive liquid such as a photoresist on a substrate for a flat panel display, and A slit coating device that can easily remove the photosensitive liquid attached to the nozzle discharge port. [Prior Art] In the manufacturing process of a flat panel display substrate, a process of forming a predetermined pattern on the surface of the substrate is mainly performed by photolithography (Ph〇t〇lithography). According to the photolithography method, before the exposure, development, and etching processes, a coating step of applying a liquid photosensitive material such as a photoresist having a predetermined thickness to the surface of the substrate is first performed. In the coating step, a nozzle having a slit type discharge port is usually used, and a photosensitive liquid is applied to the substrate during the movement of the substrate. The apparatus used at this time is a general slit coating apparatus. Moreover, the coating device further includes a cleaning device for removing the photosensitive liquid unevenly attached to the end of the nozzle discharge port. As is well known, the cleaning device is generally cleaned using a roller. In the roller cleaning method, the adsorption roller is disposed in parallel with the cutting direction of the nozzle discharge port, and is searched for centering on the axis A to remove the photosensitive liquid adhering to the end portion of the nozzle discharge port. The length of the adsorption roller corresponds to the slit length of the nozzle discharge port. , 200810841 @I & $% light-loaded side-mounted roller washer, which is linked with the rotation of the roller, and sprays the cleaning fluid to the side of the outer circumference of the roller (drying Dreaming a body or acetone solution), thereby cleaning the surface of the roller and then performing the removal of the photosensitive liquid. However, in the state in which the slits of the nozzles are in contact with the outer peripheral surface of the entire surface of the nozzle discharge port by the roller cleaning method, the simple rotation action is used to remove the households. Sensitive liquid. Therefore, this structure may cause the following problems when removing the photosensitive liquid. First, if the slit direction of the nozzle discharge port and the adsorption roller are not parallel, the _ portion of the entire (four) region of the μ port will be in an uncontacted state, so that it is difficult to uniformly remove the photosensitive liquid adhering to the entire discharge port. Further, if the length of the adsorption roller corresponds to the entire slit length f' of the discharge port, the intermediate portion thereof will fall and be deformed in a state of being supported on both sides of the roller. Therefore, it is difficult to arrange the adsorption roller in parallel with the cutting direction of the exit. In particular, the photographic liquid attached to the whistle 喈啥 φ φ π 山 、 、, 、, $ is not completely removed, and the substrate is coated. ^ 』 邗 邗 , ,, will be initially coated on the substrate The application position cannot uniformly apply the salty mouth soil from nine to night, thereby causing excessive bad production UX3 °. In addition, under the slap of the nozzle discharge port, the center of the adsorption roller is made The axis is the reference to the way of drying the 4 inch 疋 direction to remove the photosensitive liquid. 'The photosensitive liquid attached to the end of the nozzle outlet is stacked on one side along the rotation direction of the wheel, which will cause sensitization. The liquid is again attached to the secondary contamination at another location at the end of the nozzle. Further, since the adsorption roller is interlocked with the cleaner for cleaning the light wheel table by the cleaning fluid, the electromechanical structure is complicated, it is difficult to carry out the maintenance, and an excessive space is occupied in the coating work area.

There is a shortcoming of this type of light wheel cleaning method. There is a technique to find the edge of the method: the direction of the slit of the method moves the enamel wiping member to remove the photosensitive liquid, and the washing method. However, in this manner, when the wiping member moves to the other end along the slit end of the discharge port, the photosensitive liquid overflows. [Invention] The present invention has been made in view of the above problems, and an object thereof is to provide a In "=!,, it can be: a slit-type coating device which is simple in structure and which is attached to the discharge port of the nozzle, and has a simple structure. The package is provided with a slit type. The coating device, the nozzle body, i is applied to the substrate in a narrow manner; the nozzle is sprayed; and the outlet is fixed to the side of the table, and has a circle along the work... Applying a photosensitive liquid; cleaning the parent wheel, /, having a η-like cleaning member located below the nozzle body; and: =, opening the direction of the opening to rotate the cleaning roller 'for rotation to one side The second driving part, the heart 2: the washing component is centered on its axis, and the Kunlun wheel moves in the first-drive neighboring position to move the cleaning wheel to move the cleaning incision direction; the third drive... along the mouth outlet Connected to the cleaning roller; the driver-drive unit and the second driver And move. * ° Father's side of the discharge port slit 200810841 According to the present invention, when one insect 荨 photosensitive liquid, ^ the photosensitive liquid on the discharge port. When using a slit nozzle to coat the substrate, it can be easily removed through the cleaning roller.

To carry out the removal operation. The way to remove the repeated contact

Prevent secondary pollution from the 1 exit. Therefore, when the photosensitive liquid coating operation is performed by the slit coating method, the photosensitive liquid adhering to the nozzle discharge port can be uniformly removed, and the amount of the coated product and the work efficiency can be further improved. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, and the description will be made within the scope of the embodiments of the invention. Since the specific embodiments of the present invention can be embodied in various forms, the scope of the claims is not limited to the specific embodiments described below. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the entire structure of a slit coating apparatus of the present invention, and reference numeral 2 in the drawing shows a nozzle body. Conventional slit coating operation The nozzle body 2 has a rectangular shape in plan view to be suitable for carrying out

200810841 The table has a conveying device mi such as a roller type wheel conveyor, and the nozzle body 2 is provided. In the process of transferring the substrate G for flat panel display (hereinafter referred to as "substrate") through the transport device M1, a coating operation of applying the photosensitive liquid to the substrate g is performed on the substrate g. The nozzle body 2 can be fixed to the support table M2 mounted on the substrate transporting region-side of the working table M by a conventional method. The material nozzle body can also be movably provided with a linear guide at both ends thereof ( Hereinafter referred to as the LM guide"), the conveying member M3 of the erecting & cultivating "recognition" is moved in the up and down direction on the “ 2 M2. The bottom gauge slit ejector (4) of the nozzle body 2 The material of the liquid W is made of a material which is excellent in durability and corrosion resistance. Further, although not shown, the nozzle body is attached to adjust the discharge interval, and the side J is advanced. The conventional gap adjusting device for increasing or decreasing the discharge amount is as shown in FIG. 1. The nozzle body of the nozzle body of the present invention can be connected to the coating device.

The continuation coating is placed horizontally on the working second squeegee w' and attached to one side of the surface. Further, as shown in FIG. 2, the roller 4 is used to remove the cleaning roller 4 which is attached to the ejection body side, and can be cleaned on the crotch portion. Photosensitive liquid W. Or a roller made of a synthetic resin, and a cylindrical cleaning member 6 is provided on the outer peripheral surface of the cleaning wheel 4 which is excellent in durability. The cylindrical cleaning member 6 is formed by laminating a rubber-like sheet or a gasket on the outer peripheral surface of the cleaning I-ring 4, which can be used by a general EPDM rubber (Ethylene_Proylene-Non- A sheet or profile made of conjugated Diene, hereinafter referred to as "EPDM". In particular, since the EPDM material has excellent properties such as chemical resistance, weather resistance, heat resistance, and grain resistance, it is suitable for producing the cleaning member 6 of the present invention. As shown in FIG. 2, when the cleaning roller 4 is rotated in a state of being disposed across the nozzle body 2, the cleaning member 6 can remove the photosensitive light attached to the end of the nozzle discharge port N by the contact pressure. Liquid w. Further, the entire length of the cleaning roller 4 is larger than the slit N slit width and smaller than the slit length, so that the photosensitive liquid W can be removed with the cleaning member 6 having the smallest area. In order to remove the photosensitive liquid w, the cleaning member 6 of the cleaning roller 4 is in spiral contact with the discharge port N. To this end, in the present embodiment, as shown in FIG. 1, the cleaning roller 4 receives the power of the first driving portion D, the second driving portion, and the third driving portion D3, and is in two different directions. The action is combined to form a spiral moving region F as shown in FIG. 3, thereby removing the photosensitive liquid w. As shown in FIG. 2, the first driving portion D1, the second driving portion D2, and the third driving portion D3 may be respectively mounted on the platform 8, and on the table, the nozzle body 2 and the platform 8 are placed in separate positions. The platform 8' can use a rectangular plate having a length corresponding to the nozzle body 2 of 200810841. The area of the platform 8 is adapted to mount the respective drives. Each of the cleaning rollers 4 receives the power of the driving portion and moves in the cutting direction of the exit N.

Further, a housing 1 is further provided at the bottom of the platform 8 for covering the first driving portion D, the second driving portion D2, and the third driving portion D3. The first driving portion D1 can use a conventional motor R1, as shown in FIG. 2, and the shaft of the private machine R1 is connected to one end of the shaft of the cleaning roller 4. Similarly, as shown in Fig. 4, when the first driving portion D1 Ri % is driven, the cleaning roller 4 is oriented with its axis as a center to perform the first removing operation A1. Further, the second drive portion conventional transfer fluid pressure cylinders R2 R2, R3 are constituted by the guide slide 1 having an active action, and are reciprocated by the air compressor. For D2 and the third drive unit D3, R3 can be used. The fluid pressure cylinder for transfer and the fluid pressure that can be moved along the guide can cause the second driving portion η to slide

^ f Λ ^ ^ , that is, the fluid pressure cylinder R2 for transfer, and the mouth is set to provide sufficient

, the 薅# P field of the entire slit direction of the exit N is made so that the rinsing roller 4 is moved back and forth in the region. The second driving portion can make the The cleaning roller 4 γ %+, so the body 2 discharge port — - filter VL + 铷 4 攸 the hemp 鳊 cutting direction moves toward the other end. That is, the cleaning roller 钤 4 π ~ on the wish wheel 4 can be completed a second removing operation Α2 in the spraying direction. The side of the dividing cleaning member 6 is in contact with the spraying end and the first contact with the rotation. A1 is connected. 200810841 When the nozzle body 2 is coated with the photosensitive liquid w, a D2 can disengage the cleaning roller 4 from the substrate. The second driving unit drives the cleaning roller 4 in contact with the substrate g. (7) transporting area to prevent the transfer fluid of the third driving unit (1) from being located between the first driving portion R3 and the portion m in a manner as shown in FIG. 2, so that the cleaning roller 4 moves in the direction of the slit direction orthogonal to the second drive discharge port N. The cleaning body 4, as shown in Fig. 6, passes through the third drive and is narrowed across the discharge port N.卩m's work A3. In the direction of the slit, the third removal is performed, that is, as shown in FIG. 7, under the driving action of the first driving portion D portion D2 and the third driving portion 03, the cleaning is removed in the direction of the moving direction. A1, A2, and A3 are interlocked with each other to cause the ejection of the photosensitive liquid in the vicinity of the entire surface F of the cleaning member 6 in the vicinity of the cleaning member 6 (see Figure II). Further, the first driving portion D1, the second driving portion Μ, and the third driving portion D3 are electrically connected to each other so as to pass through a separate control box or control button (not shown) during the slit coating operation. The photosensitive liquid w attached to the discharge port N of the nozzle body 2 is periodically removed. 1 . :: The electrical connection and control method is as long as it is a technical person in the art, so the detailed description is omitted. In the above-mentioned D brother, the second driving portion D2 and the third driving portion (7) constituted by the conventional transfer fluid pressure R2 are exemplified and illustrated, but the invention is not limited thereto. For example, although not shown, the second driving unit D2 and the first one are provided. : Part d: A conventional structure that can reciprocate along a predetermined section by a second::: or a screw or the like that is actuated by receiving power from a motor. Further, other various structures capable of achieving the object of the present invention can also be employed. In the above embodiment, in order to remove the photosensitive liquid w attached to the ejection port N through the cleaning roller 4, a rotary driving device and a structure of two movable devices 4 D2 and D3 are employed, but a spin = honour can also be used. Set D1 and a linear moving device D2. For example, as shown in FIG. 8, in order to enable the first driving portion Di to which the cleaning roller 4 is fixed to move directly in the oblique direction (diagonal direction) of the nozzle body 2, the second driving portion D2 can be arranged in the figure. The form shown. Although the above specific embodiment illustrates an example in which only one cleaning roller 4 is provided corresponding to the nozzle body 2, the present invention is not limited to the above-described structure 0 as shown in FIG. 9, on both sides of the nozzle body 2. At least two cleaning rollers 4 opposed to each other may be disposed to alternately remove the photosensitive liquid W. Next, the process of removing the photosensitive liquid w adhering to the end portion of the discharge port N of the nozzle body 2 by the slit coating apparatus of the present invention will be described. After the slit application operation is performed on the substrate G by the nozzle body 2, the removal operation can be performed when the nozzle body 2 on the support table M2 is moved to a position where it can be in contact with the cleaning member 6 for cleaning the front wheel*. First, as shown in FIG. 4, in a state where the cylindrical cleaning member 6 and the discharge port N are in contact with each other, the first driving portion ^, 13 200810841 is driven to cause the cleaning wheel 4 to Rotating in one direction, who is going to remove the action A1 〇 then 'as shown in FIG. 5 and FIG. 6 respectively, driving one L-two driving part D2 and the second driving part D3' respectively to make the cleaning roller 4 target The second removal operation A2 and the third removal operation A3 are performed separately. In this case, in the state in which the cleaning member 6_ side of the cleaning roller 4 is in contact with the end of the discharge port N, as shown in FIG. 7, the same direction removal actions Al, Α2, Α3 The removal is performed by interlocking, as shown in FIG. 10, through the removal operation of the cleaning roller 4, the A3, and the end of the discharge port N are in contact with the outer peripheral surface of the cleaning member 6: on the entire outer circumferential surface A spiral moving region F is formed. On the other hand, the photosensitive liquid W on the ejection port N adheres to the region F and is removed. In addition, according to the work request, the rotation speed, the moving speed, and the like of the cleaning cruiser 4 can be appropriately adjusted through the first driving portion 〇, the second driving portion D2, or the third driving portion D3 to change the formation. The pitch of the spiral transfer region F of the cleaning member 6 is described. The manner in which the cleaning roller 4 is formed by the cleaning roller 4 to remove the sense of the sense can be obtained by simply cleaning the nozzle body 6' on the outer peripheral surface of the cleaning roller 4: the washing member 6' The photosensitive rotation t = attached == and the movement of the wiper member of the wheel member (adsorption roller) to remove the removal effect of the photosensitive liquid, while the m ^ fly has a better b ° attack than the limit to prevent Secondary pollution caused by sensitizing 14 200810841 photo-liquid in the removal process. Figure Ί - shows another embodiment of the cleaning member 8 66 Η. In the specific embodiment, the cleaning member 6 is provided with a spiral guide groove 延. The guide groove 形成 forms a spiral groove on the outer peripheral surface of the cleaning method and the front roller 4, and is sized to sandwich a portion of the core portion of the nozzle outlet. In the process of removing the light-reducing liquid W adhering to the discharge port, the end portion of the discharge port is inserted into the guide groove at a certain depth. Therefore, not only the photosensitive liquid W at the bottom of the discharge D ν can be removed simply, but also the photosensitive liquid W adhering to both side surfaces of the end portion of the discharge port ν can be easily removed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the entire structure of a slit coating apparatus of the present invention. Figure 1 is a partial enlarged view of Figure 1. Figure 3 is a schematic view for explaining the action of the cleaning roller shown in Figure 2. FIG. 4 is a schematic diagram for explaining the action of the first driving unit shown in FIG. 2. FIG. 5 is a schematic diagram for explaining the action of the second driving unit shown in FIG. The sound diagram 7 of the second driving portion shown in FIG. 2 is a schematic diagram for explaining the state of the cleaning of the cleaning roller shown in FIG. Illustrated Fig. 8 is a schematic diagram showing an embodiment of another driving star 15 of the cleaning roller shown in Fig. 2. Figure 9 is a schematic view showing another embodiment of the cleaning roller shown in Figure 2; Fig. 10 is a schematic view showing the attached state of the photosensitive liquid on the cylindrical cleaning member shown in Fig. 2. Figure 11 is a schematic view for explaining another specific embodiment of the cleaning member shown in Figure 2. Figure 12 is a schematic view for explaining the action of the guide groove shown in Figure 11. • [Main component symbol description] 2 : Nozzle body 4 : Cleaning roller 6 : Cleaning member 8 : Platform 10 : Housing G : Substrate W : Photosensitive liquid _ D1 : First driving portion D2 : Second driving portion D3 ·· Three driving portion N: discharge port L: supply pipe Μ: table M1: conveying device M2: support table 16 200810841 M3: conveying member R1: motor R2, R3: fluid pressure cylinder F: spiral moving region Η: guide groove Α1 : first removal action Α 2 : second removal action A3 · · third removal action 17

Claims (1)

200810841 X. Patent application: 1. A slit coating device, including: · Workbench's work on the working surface of the substrate; nozzle body with slit type "side of the mouthpiece And applying a photosensitive cleaning roller to the substrate along the working fluid; the surface of the kneading surface has a cylindrical cleaning member, and (4) a cutting direction is located below the nozzle body; a driving portion for rotating the cleaning parent wheel in a direction to rotate the cylindrical cleaning member about its axis; a second driving portion for moving the cleaning roller to make The cleaning roller rotates along the cutting direction of the ejection port while rotating under the driving action of the first driving portion; and the third driving portion is coupled to the first driving portion and the second driving portion to The cleaning roller moves in a direction orthogonal to the slit of the discharge port. 2. Apply for the patent scope! According to the slit coating device of the above aspect, the cleaning operation of the cleaning roller in three different directions is combined by the interlocking of the driving portions to make the circumferential surface of the cylindrical cleaning member and the discharge port The ends are in contact with each other in a spiral manner. The slit coating apparatus according to the first aspect of the invention, wherein the cleaning member is made of synthetic rubber made of Ethylene_pr〇pylene·Non-conjUgated mene. The slit coating apparatus of claim 1, wherein the first driving unit uses a motor, and the cleaning roller receives the shaft of the motor 18 200810841, with its axis For the center to a particular party. The first driving part or the third driving part of the slit coating device basin according to the first aspect of the patent, the shifting, the middle cylinder, the linear guide, or the rack gear connected to the motor may be selected. , 'round =, any kind of force. In the screw, the slit type coating described in the scope of the patent application is longer than the discharge port, and is eight degrees. The visibility is less than the length of the slit. 7. The slit step described in the patent application 帛i includes forming in the cylindrical cleaning two-inlet-groove. The spiral guide on the ^^: The slot-type coating of the guide groove described in the seventh application of the patent scope is in contact with the side walls of the discharge port, and the grooves, 1 and . 4He exit slit, 9· A slit type coating device, including: Φ mouth 'the working surface is slanted obliquely| α nozzles "the coating work of the substrate"; He 1 ^ body, which has a slit a type of one, , , 'and fixed to the working fluid; the substrate on which the attack surface moves is coated with a photosensitive cleaning roller, a: and the right circle μ exits the slit of the square ~~ 叼> Locating under the nozzle of the ship in a manner transverse to the spray opening direction; a driving portion for removing the cylindrical cleaning member to "turn the cleaning roller" The axis is center-rotated; and a driving portion is coupled to the brother driving portion to wash the cylinder 19 200810841 in a shape β. The P piece moves in the diagonal direction of the slit of the discharge port. 1 〇 连 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 狭缝 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗 清洗Fine export.接触 Contact in a suspicious manner. η·Slot coating basin according to item 9 of the patent application scope The second moving part uses a motor, and the cleaning front wheel receives the motor, and its axis rotates in a certain direction centering on the axis. 12. In the slit type according to claim 9, wherein the first 樜 樜 如 1 1 15 15 15 , , , , , , , , , , , , , , , , , , , , , , , , 可选 可选 可选 可选 可选 移 移 移 移 移Any one of the conveying screws. The slit coating apparatus according to claim 9, wherein the length of the u-wheel is larger than the slit width of the discharge port, and is smaller than the slit length. 14. The slit-type coating according to claim 9 of the patent application, further comprising a spiral guide groove formed on a circumferential surface of the cylindrical cleaning member.