TWI320402B - Method and system for supplying high purity fluid - Google Patents
Method and system for supplying high purity fluidInfo
- Publication number
- TWI320402B TWI320402B TW092136681A TW92136681A TWI320402B TW I320402 B TWI320402 B TW I320402B TW 092136681 A TW092136681 A TW 092136681A TW 92136681 A TW92136681 A TW 92136681A TW I320402 B TWI320402 B TW I320402B
- Authority
- TW
- Taiwan
- Prior art keywords
- high purity
- supplying high
- purity fluid
- fluid
- supplying
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/04—Feed or outlet devices; Feed or outlet control devices using osmotic pressure using membranes, porous plates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4402—Reduction of impurities in the source gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
- F17C13/026—Special adaptations of indicating, measuring, or monitoring equipment having the temperature as the parameter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C6/00—Methods and apparatus for filling vessels not under pressure with liquefied or solidified gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/01—Shape
- F17C2201/0104—Shape cylindrical
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/03—Orientation
- F17C2201/032—Orientation with substantially vertical main axis
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2203/00—Vessel construction, in particular walls or details thereof
- F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
- F17C2203/0602—Wall structures; Special features thereof
- F17C2203/0612—Wall structures
- F17C2203/0614—Single wall
- F17C2203/0617—Single wall with one layer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/01—Mounting arrangements
- F17C2205/0123—Mounting arrangements characterised by number of vessels
- F17C2205/013—Two or more vessels
- F17C2205/0149—Vessel mounted inside another one
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0311—Closure means
- F17C2205/0314—Closure means breakable, e.g. with burst discs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0311—Closure means
- F17C2205/0317—Closure means fusing or melting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0323—Valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0323—Valves
- F17C2205/0332—Safety valves or pressure relief valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0323—Valves
- F17C2205/0335—Check-valves or non-return valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0341—Filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0388—Arrangement of valves, regulators, filters
- F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/05—Ultrapure fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/06—Controlling or regulating of parameters as output values
- F17C2250/0605—Parameters
- F17C2250/0631—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2265/00—Effects achieved by gas storage or gas handling
- F17C2265/01—Purifying the fluid
- F17C2265/012—Purifying the fluid by filtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Water Treatment By Sorption (AREA)
- Separation Of Gases By Adsorption (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/331,123 US6911065B2 (en) | 2002-12-26 | 2002-12-26 | Method and system for supplying high purity fluid |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200422265A TW200422265A (en) | 2004-11-01 |
TWI320402B true TWI320402B (en) | 2010-02-11 |
Family
ID=32654656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092136681A TWI320402B (en) | 2002-12-26 | 2003-12-24 | Method and system for supplying high purity fluid |
Country Status (7)
Country | Link |
---|---|
US (2) | US6911065B2 (zh) |
JP (1) | JP2006512200A (zh) |
KR (4) | KR101129801B1 (zh) |
CN (3) | CN100376309C (zh) |
AU (1) | AU2003300286A1 (zh) |
TW (1) | TWI320402B (zh) |
WO (1) | WO2004060810A2 (zh) |
Families Citing this family (38)
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US6911065B2 (en) * | 2002-12-26 | 2005-06-28 | Matheson Tri-Gas, Inc. | Method and system for supplying high purity fluid |
AU2003210732B2 (en) * | 2003-01-28 | 2007-03-29 | Fluor Technologies Corporation | Configuration and process for carbonyl removal |
US20040206239A1 (en) * | 2003-02-20 | 2004-10-21 | Laubacher Daniel B. | Method for reducing gaseous contamination in a pressure vessel |
US7018448B2 (en) * | 2003-10-28 | 2006-03-28 | Advanced Technology Materials, Inc. | Gas cabinet including integrated effluent scrubber |
US7160359B2 (en) * | 2004-07-02 | 2007-01-09 | Air Products And Chemicals, Inc. | Built in purifier for reactive gases |
TW200632245A (en) * | 2005-01-28 | 2006-09-16 | Matsushita Electric Ind Co Ltd | A thermal insulator |
US7638058B2 (en) * | 2005-04-07 | 2009-12-29 | Matheson Tri-Gas | Fluid storage and purification method and system |
US7811532B2 (en) * | 2005-04-18 | 2010-10-12 | Air Products And Chemicals, Inc. | Dual-flow valve and internal processing vessel isolation system |
WO2006119428A2 (en) * | 2005-05-03 | 2006-11-09 | Advanced Technology Materials, Inc. | Fluid storage and dispensing systems, and fluid supply processes comprising same |
EP1934514B1 (en) * | 2005-09-15 | 2015-07-15 | Månbas Alpha AB | Pressure controlled gas storage |
US20070175905A1 (en) * | 2005-11-28 | 2007-08-02 | Matheson Tri-Gas, Inc. | Gas storage container linings formed with chemical vapor deposition |
US20100242835A1 (en) * | 2006-06-09 | 2010-09-30 | S.O.I.T.E.C. Silicon On Insulator Technologies | High volume delivery system for gallium trichloride |
US7914746B2 (en) * | 2006-08-23 | 2011-03-29 | Lummus Technology Inc. | Method and apparatus for protective atmosphere recycling |
NL1033130C2 (nl) * | 2006-12-22 | 2008-06-24 | Scient Glass Technology Singap | Gasfles, een beschermelement voor gebruik op een dergelijke gasfles en filter kennelijk bestemd voor gebruik bij een dergelijke gasfles. |
JP4976207B2 (ja) * | 2007-06-15 | 2012-07-18 | 三井金属鉱業株式会社 | ガス中の酸素除去装置及び高純度窒素ガスの製造装置 |
US8308439B2 (en) * | 2007-07-20 | 2012-11-13 | Lummus Technology Inc. | Method and apparatus for resisting disabling fouling of compressors in multistage compression systems |
WO2009151723A1 (en) * | 2008-03-26 | 2009-12-17 | Matheson Tri-Gas | Purification of fluorine containing gases |
US20090320771A1 (en) * | 2008-06-10 | 2009-12-31 | Matheson Tri-Gas | Ionic liquid mediums for holding solid phase process gas precursors |
US7955416B2 (en) * | 2008-12-05 | 2011-06-07 | Matheson Tri-Gas, Inc. | Polymerized polymeric fluid storage and purification method and system |
US8491720B2 (en) * | 2009-04-10 | 2013-07-23 | Applied Materials, Inc. | HVPE precursor source hardware |
KR101113641B1 (ko) * | 2009-05-12 | 2012-02-14 | 기아자동차주식회사 | 고압 수소 충전용 리셉터클 필터 |
JP5908927B2 (ja) * | 2011-03-11 | 2016-04-26 | アライアンス フォー サステイナブル エナジー リミテッド ライアビリティ カンパニー | エネルギー貯蔵システムとパワーエレクトロニクスを試験するための熱量計ならびにそれらの製造方法および使用方法 |
FR2978536B1 (fr) * | 2011-07-25 | 2013-08-23 | Valeo Systemes Thermiques | Bouteille reservoir de fluide refrigerant et echangeur de chaleur comprenant une telle bouteille |
US9764283B2 (en) | 2012-07-17 | 2017-09-19 | Siemens Aktiengesellschaft | Scrubbing solution for absorption of carbon dioxide and method for accelerating the absorption by germanium dioxide |
CN102861560A (zh) * | 2012-10-22 | 2013-01-09 | 黑龙江省对俄工业技术合作中心 | 一种电子气体吸附剂的改性方法 |
CN105358895B (zh) * | 2013-04-17 | 2017-07-04 | 林德股份公司 | 用于液化可燃气体的储罐 |
RU2663930C2 (ru) * | 2013-04-17 | 2018-08-13 | Линде Акциенгезелльшафт | Резервуар для хранения сжиженных горючих газов |
EP3059212A1 (de) * | 2015-02-18 | 2016-08-24 | Heraeus Quarzglas GmbH & Co. KG | Verfahren und vorrichtung zur herstellung von quarzglas aus einer polymerisierbaren polyalkylsiloxanverbindung mit membranfilter als reinigungsvorrichtung |
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CA3221975A1 (en) * | 2015-08-14 | 2017-02-23 | Basf Corporation | Adsorbents and methods of making and using adsorbents |
DE102016008107A1 (de) | 2016-07-01 | 2018-01-04 | Daimler Ag | Tankventil |
CN107859865A (zh) * | 2017-11-16 | 2018-03-30 | 佛山市高明区生产力促进中心 | 一种便捷移动的储气罐 |
JP7138192B2 (ja) * | 2018-06-22 | 2022-09-15 | リンデ ゲゼルシャフト ミット ベシュレンクテル ハフツング | シリンダ弁並びにシリンダ及びシリンダ弁内の汚染物質の形成を抑制する方法 |
TWI706103B (zh) * | 2019-08-05 | 2020-10-01 | 古豐愿 | 負壓供氣鋼瓶 |
KR102292288B1 (ko) * | 2020-03-24 | 2021-08-24 | 주식회사 케이씨 | 얼라인 기능이 구비된 가스공급장치 |
WO2021262480A1 (en) * | 2020-06-22 | 2021-12-30 | Numat Technologies, Inc. | An apparatus for dispensing and supplying gas to a storage vessel |
TWI774149B (zh) * | 2020-12-08 | 2022-08-11 | 古豐愿 | 安全負壓供氣鋼瓶 |
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-
2002
- 2002-12-26 US US10/331,123 patent/US6911065B2/en not_active Expired - Fee Related
-
2003
- 2003-12-22 KR KR1020117004744A patent/KR101129801B1/ko not_active IP Right Cessation
- 2003-12-22 CN CNB2003801099828A patent/CN100376309C/zh not_active Expired - Fee Related
- 2003-12-22 KR KR1020117004743A patent/KR101130006B1/ko not_active IP Right Cessation
- 2003-12-22 WO PCT/US2003/041017 patent/WO2004060810A2/en active Application Filing
- 2003-12-22 JP JP2004565647A patent/JP2006512200A/ja active Pending
- 2003-12-22 KR KR1020117004741A patent/KR101136638B1/ko not_active IP Right Cessation
- 2003-12-22 CN CN2008100099628A patent/CN101306294B/zh not_active Expired - Fee Related
- 2003-12-22 AU AU2003300286A patent/AU2003300286A1/en not_active Abandoned
- 2003-12-22 CN CN2008100099632A patent/CN101306295B/zh not_active Expired - Fee Related
- 2003-12-22 KR KR1020057012115A patent/KR101164679B1/ko not_active IP Right Cessation
- 2003-12-24 TW TW092136681A patent/TWI320402B/zh not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
WO2004060810A3 (en) | 2004-11-04 |
TW200422265A (en) | 2004-11-01 |
AU2003300286A8 (en) | 2004-07-29 |
AU2003300286A1 (en) | 2004-07-29 |
US20050160910A1 (en) | 2005-07-28 |
KR101164679B1 (ko) | 2012-07-10 |
WO2004060810A2 (en) | 2004-07-22 |
KR20050085913A (ko) | 2005-08-29 |
US6911065B2 (en) | 2005-06-28 |
KR20110038156A (ko) | 2011-04-13 |
CN101306295A (zh) | 2008-11-19 |
KR101129801B1 (ko) | 2012-03-23 |
US20040123735A1 (en) | 2004-07-01 |
CN101306294A (zh) | 2008-11-19 |
CN101306294B (zh) | 2012-09-05 |
US7387663B2 (en) | 2008-06-17 |
KR20110038157A (ko) | 2011-04-13 |
KR101130006B1 (ko) | 2012-03-28 |
JP2006512200A (ja) | 2006-04-13 |
CN101306295B (zh) | 2013-01-09 |
CN100376309C (zh) | 2008-03-26 |
KR20110038155A (ko) | 2011-04-13 |
KR101136638B1 (ko) | 2012-04-18 |
CN1753720A (zh) | 2006-03-29 |
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