1313147 A7 五、發明說明（/ ) 本發明係關於一種喷射式微波電漿產生器，尤指一種 (請先閱讀背面之注意事項再填寫本頁) 變化時，仍可產生並維持一穩定的電敷之嘴射式電毅產生 器。 電漿（PlaSma)是指一種具相等濃度的正負電荷介 質，或是-種由準電中性（Quasineutral)帶電氣體與中 性粒子所構成之集合體。一般電衆產生的方式，是將所需 之氣體導入一容器内，於一固定氣麼下，以直流電源（D C )、射頻（Radio Frequency )或微波（Micr〇wave)等能 量來源’利用電容式（eapaeitive )、電感式（induct 或粒子與波交互作用的方式使氣體崩潰（Breakd嶋）游離， 如此即可產生電漿。 ;線- 其t喷射式電漿（Piasma Je1;)，是將電漿能量聚集在 -小的體積範圍内’以使電漿產生更高反應的能量，此種 S史什或稱為火炬電漿（plasma Tr〇ch)，喷射式電漿可應用 在於半導體工業所產生的全氟化物（pFC，perflu〇rinated compounds，例如：CF4，LF6，NF3 )廢氣之處理。而以 Μ波噴射式電漿（Microwave piasma jet )運用於廢氣處 理時’由於微波頻率為2. 45GHz，其所產生之電漿具有較 尚分解氣體的能力，故比其他方式所產生之電漿能得到較 佳之處理效果。 按’德國專利DE 195 11 915 A1號之微波電漿產生器 主要係利用微波將氣體激發，以達到產生電漿之功效。此 一習用微波電漿產生器主要係包括有一可傳送微波能量之 本紙張尺度適用中國國家標準（CNs)A4規格（21〇 x 297公釐） A7 1313147 I— --—-—________ 五、發明說明（) 導波管，及一連接於該導波管之金屬圓形管，於此金屬圓 形管内設有一長條形的金屬圓形喷嘴，該金屬圓形喷嘴的 尖端即電漿的開始源點，亦為直徑擴大之金屬管之始點， 此直徑擴大之金屬管之長度必須涵蓋整個電漿火炬，而此 直控擴大之金屬管的用途，即是創造一使得微波易於傳播 的條件，因而可產生一穩定的電漿。 工作氣體係經由金屬圓形喷嘴，導引至金屬圓形喷嘴 的尖端，於此喷嘴尖端之微波電場強度亦最高，因而可產 生一穩定之電漿，但是當工作壓力劇烈變動時，此一習用 微波電漿產生器的設計，無法得到一穩定的電漿，其需經 常調整導波管與金屬圓形管，來調節穩定微波以解決電漿 的穩定度，實有改善的空間與必要性。 本新發明之基礎在於一新的認知：先前假設於電漿内 之電子有如金屬導體般，是不完全正確的，電漿的電性及 特性會文到工作壓力及使用氣體之種類而改變。由實驗得 知，若要得到一穩定之電漿，尚需於電漿產生處，得到一 穩定流動的氣流，此條件於產生電漿的瞬間尤其重要。 I 為此本發明之主要目的在於：提供一種嘴射式微波 電漿產生器，其包括有一方形導波管，一與方形導波管呈 垂直連通之圓形導管，一設置於圓形導管中的内軸，一連 通於圓形導管之電漿容置管，一非導體之中空管及一設置 於電漿容置管内部可導電之螺旋管，其中内軸之頂端係位 於電名令置官之起始點，圓形導管所形成之腔體則被中空 官所分隔，並與方形導波管隔離，藉由電漿容置管、螺旋 本纸張尺度適用中國國家標準（ι::Ν5〉Αϋ (21() x 297公楚-------- (請先閱讀背面之注意事項再填寫本 訂： .線. 五、發明說明（ :::=同形成一傳播系統的設計，可對應於工作壓 一系〜、、變動，以及傳播系統内之參數變化，產生並維持 :定之電漿’達到解決微波於傳播、匹配以及 等方面問題之功效者。 只見 特徵 為使貴審查委員能進一步瞭解本發明之結構 及其他目的’彡附以圖式詳細說明如后： (—)·圖式部份： 第圖.係本發明較佳實施例之平面示意圖。 第二圖：係本發明另一較佳實施例之平面示意圖。 (—)圖號部份： (2 )活塞 (4)電漿容置管 (6 )活塞 (8)中空管 (1 0)内軸 (1 2)螺旋管 (1)方形導波管 (3，3，）圓形導管 (5 )電漿 (7)氣體輸入管 (9 )墊圈 (1 1 )頂端 (1 3)中空管 a =螺旋管之螺旋圈間距 D1=圓形導管之直徑 D 2 =電漿容置管之直徑 D 3 =螺旋管之螺旋内徑 本發明主要係提供一種喷射式微波電聚產生器，請配 合參看第-圖所示，本發明之喷射式微波電漿產生器主要 係由-方形導波管（1)、_圓形導管（3，3 、一 1313147 中空管（8)及 A7 五、發明說明（Φ) 電衆容置管（4)、一内軸（1〇) 一螺旋管（1 2)組合所構成。 ΓΡίίΙ方Γ導波S (1)之一端係連接於微波產生器 (:=，以作為傳送由所產生的微波能量，於方形 =⑴的另-端内部設有一活塞（2)以 波能量之匹配； 圓形導官（3, 3’）係以金屬材質製成，並與方形 導波管（1 )垂直相接並呈連通，該位於方形導波管 (1 )側之圓形導管（3 )管段末端係與電漿容置管 (4)相連接，而位於方形導波管（1)的另-側之圓形 導管（3，）管段於末端係㈣有—絲（6)以供調節微波 與《的匹配值’於圓形導管（3，）近方形導波管（工）處 設有兩氣體輸入管⑺，以供工作氣體流入； 中空管（8)係為非導體，此一非導體之中空管 (8)之材質可為石英或陶瓷，該中空管（8)係設置於 圓形導管（3，3，）内部與方形導波管⑴相接處， 並藉由墊圈（9)將中空管（8)管壁與圓形導管（3， 3 )及方形導波管（1)之管壁隔離，如此當工作氣體 流入時，不會流至方形導波管（1 )内； 内軸（1 0)為金屬導體’其係軸向設置於圓形導管 (3，3 )内部，該内軸（1 〇 ) 一端之頂端（1 1 )係 位於電漿容置管（4 )之起始點，其另端係至少延伸至方 形導波管（1 )與圓形導管（3 ’ 3，）相接處，而與圓形 導管（3，3，）形成一同軸電纜之形式’且該内軸（工 本紙張尺度適用中關冢標準（CNS)A格⑵G x 297公楚） (請先閱讀背面之注意事項再填寫本頁) 訂： --線· 13131471313147 A7 V. INSTRUCTIONS (/) The present invention relates to a jet type microwave plasma generator, especially one type (please read the back note before refilling this page). When changing, a stable electric power can still be generated and maintained. The mouth of the mouth is a type of electric generator. Plasma (PlaSma) refers to a positive and negative charge medium of equal concentration, or a collection of quasi-electrically neutral (Quasineutral) charged gas and neutral particles. In general, the electricity generation method is to introduce the required gas into a container, and use a capacitor such as a DC power source, a radio frequency (Radio Frequency) or a microwave (Micr〇wave) under a fixed gas. Epaeitive, inductive (induct or particle-wave interactions cause the gas to collapse (Breakd嶋) free, thus producing plasma. Line - its t-jet plasma (Piasma Je1;), will The plasma energy is concentrated in a small volume range to make the plasma produce a higher reaction energy. This kind of Sish is called plasma Tr〇ch, and the jet plasma can be applied in the semiconductor industry. The resulting perfluorinated (pFC, perflu〇rinated compounds, eg CF4, LF6, NF3) waste gas treatment, while the microwave wave jet plasma (Microwave piasma jet) is used in exhaust gas treatment 'because the microwave frequency is 2 45 GHz, the plasma produced by it has the ability to decompose more gas, so it can obtain better treatment effect than the plasma produced by other methods. According to the German patent DE 195 11 915 A1 microwave plasma generator main It is necessary to use microwave to excite the gas to achieve the effect of generating plasma. This conventional microwave plasma generator mainly includes a paper size capable of transmitting microwave energy and is applicable to the Chinese National Standard (CNs) A4 specification (21〇x 297). A7 1313147 I— -----________ V. Inventive Note () The waveguide, and a metal circular tube connected to the waveguide, wherein the metal circular tube is provided with a long strip of metal The circular nozzle, the tip of the metal circular nozzle, that is, the starting point of the plasma, is also the starting point of the enlarged diameter metal tube, and the length of the enlarged diameter metal tube must cover the entire plasma torch, and the direct control is expanded. The use of the metal tube is to create a condition that makes the microwave easy to propagate, thus producing a stable plasma. The working gas system is guided to the tip of the metal circular nozzle via a metal circular nozzle at the tip of the nozzle. The microwave electric field strength is also the highest, so that a stable plasma can be produced, but when the working pressure changes drastically, the design of the conventional microwave plasma generator cannot obtain a stable plasma. It is necessary to constantly adjust the waveguide and the metal circular tube to adjust the stable microwave to solve the stability of the plasma, and there is room for improvement. The basis of the new invention lies in a new cognition: previously assumed in the plasma The electrons inside are not exactly the same as the metal conductors. The electrical properties and characteristics of the plasma change from the working pressure to the type of gas used. It is known from experiments that if a stable plasma is to be obtained, it is still necessary. At the plasma generation, a steady flow of gas is obtained, which is especially important at the moment when the plasma is generated. I. The main object of the present invention is to provide a nozzle-type microwave plasma generator comprising a square guide. a waveguide, a circular conduit vertically communicating with the square waveguide, an inner shaft disposed in the circular conduit, a plasma receiving tube communicating with the circular conduit, a non-conducting hollow tube and a a spiral tube disposed inside the plasma receiving tube, wherein the top end of the inner shaft is located at the starting point of the electric commander, and the cavity formed by the circular duct is separated by the hollow official and is guided by the square guide Wave tube separation With the plasma receiving tube, the spiral paper size applies to the Chinese national standard (ι::Ν5>Αϋ (21() x 297 public Chu-------- (please read the notes on the back first) Fill in this order: . Line. V. Invention Description ( :::= The design of a communication system can correspond to the change of the working pressure, the change, and the parameter changes in the propagation system, generate and maintain: The pulp 'has reached the effect of solving the problems of microwave propagation, matching and other aspects. The features are to enable the review board to further understand the structure and other objects of the present invention. The following is a detailed description of the following: (-) Figure: Figure: is a plan view of a preferred embodiment of the present invention. . Second Figure: is a schematic plan view of another preferred embodiment of the present invention. (—) Part number: (2) Piston (4) Plasma receiving tube (6) Piston (8) Hollow tube (10) Inner shaft (1 2) Spiral tube (1) Square waveguide tube ( 3,3,) round duct (5) plasma (7) gas input tube (9) washer (1 1) top end (1 3) hollow tube a = spiral tube pitch D1 = diameter of round tube D 2 = diameter of the plasma receiving tube D 3 = spiral inner diameter of the spiral tube. The present invention mainly provides a jet type microwave electropolymer generator, please refer to the first embodiment, the jet type microwave plasma of the present invention. The generator is mainly composed of a square wave guide tube (1), a _ circular duct (3, 3, a 1313147 hollow tube (8) and A7. 5. Description of the invention (Φ) electric charge tube (4), one The inner shaft (1〇) is composed of a combination of a spiral tube (1 2). ΓΡίίΙ square Γ guided wave S (1) one end is connected to the microwave generator (:=, as the transmission of the generated microwave energy, in the square The other end of =(1) is internally provided with a piston (2) matched by wave energy; the circular guide (3, 3') is made of metal and is perpendicularly connected to the square waveguide (1) and Connected, this is located on the side of the square waveguide (1) The end of the pipe (3) is connected to the plasma receiving pipe (4), and the pipe of the circular pipe (3,) located on the other side of the square waveguide (1) has a wire at the end (4). 6) Two gas inlet pipes (7) are provided for adjusting the microwave and the matching value in the circular duct (3,) near the square waveguide (work) for the working gas to flow in; the hollow tube (8) is For the non-conductor, the non-conductor hollow tube (8) may be made of quartz or ceramic, and the hollow tube (8) is disposed inside the circular duct (3, 3,) and the square waveguide (1) Connected, and the wall of the hollow tube (8) is separated from the wall of the circular duct (3, 3) and the square waveguide (1) by a gasket (9), so that when the working gas flows in, it will not Flowing into the square waveguide tube (1); the inner shaft (10) is a metal conductor's axially disposed inside the circular duct (3, 3), the top end of the inner shaft (1 〇) (1 1 ) is located at the starting point of the plasma receiving tube (4), and the other end extends at least to the junction of the square waveguide (1) and the circular duct (3'3,), and the circular duct ( 3,3,) formation In the form of coaxial cables' and the inner shaft (work in the present scale off Otsuka standard paper (CNS) A suitable well-Chu ⑵G x 297 cells) (Read Notes on the back and then fill the page) provides: - Line 1313147
五、發明說明（ 0)之頂端（i i)最好為尖錐狀； 螺旋管（1 2)係可導電，該螺 於電喂容罟其…u 官（1 2 )係設置 於===產生之電漿…包圍限制 具有:同與圓形導管(3)係不相連而 圖觀之1 2·_ζ之微波頻率為例圓形導 B 之直桎D 1大約為5〇_ :電漿容置 之直徑D2大約為85咖，而其長度則最少為電激 j 生範圍之長度；螺旋管（iu之D3 55_，螺旋管（12)之管徑大約為6_，而螺旋管、、、: 2 )各螺旋圈間距a則大約為2〇mm。 在上述„又„十下’於作用時微波係經過方形導波管 (1 )導入圓形導管（3 )中，並經由圓形導管（3 )與 内轴（1 0 )所形成的-同軸電缓系統，而到達電裝容/置 管（4)之起始點，亦即内軸（1 〇)之頂端（丄工）， 同時，工作氣體之氣流也會經由氣體輸入管（7)，穩定 流經圓形導管（3，3,）而到達内幸“ 1〇)之尖：狀 (1 1 )的頂端，將位於内軸（2 〇)之尖錐狀（丄工） 的頂端之微波電場強度增高，則於電漿容置管（4 )之内 部會產生電漿（5)，且電漿（5)係包圍限制於螺旋管 (1 2)之螺旋範圍中。 由此，電毅（5 )、電羅容置管（4)以及本發明戶# 特有的螺旋管（1 2)共同構成一特殊之傳播系統，此系 統特別適合解決微波於傳播、匹配以及傳播頻寬等方面問 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公Μ ) <請先閱讀背面之注意事項再填寫本頁} 訂 -I線· -n H , A7 B7 ^13147 五、發明說明（么） 題，於此傳播系統内，螺旋管（12)與電漿容置管 (4)共同形成一同軸電緵之外軸，所產生之電漿（5 ) 則有如内軸，藉由調整活塞（6 )之位置可達成對此微波 傳播系統之匹配，故對應於工作壓力之劇烈變動，仍可產 生並維持一穩定之電漿。 根據實驗結果，為了使得微波傳播的頻寬增加，本發 明之螺旋管（1 2)亦可為由多個單一之金屬環所組成， 在不影響其效應下，螺旋管（1 2)的圈數及其各圈間之 距離，可自由地調整。 為了得到較佳之結果，本發明之螺旋管（1 2 )將充 滿整個電漿容置管（4)，而螺旋管（12)的各螺旋圈 間距a，最小可相當於該螺旋管（1 2 )之管徑。於長時 間使用時，最好能將螺旋管（1 2 )加以冷卻，因此最好 使用管狀材料。 請參看第二圖所示，其係為本發明另一較佳實施例之 平面示意圖，其大致結構係如上述之結構，惟中空管（工 3 )係沿圓形導管（3， ，3)朝電漿容置管（4 )延 伸，並貫通過螺旋管（i 2 )所形成之螺旋段中央，該中 空管（1 3 )之材質為非導體之石英或陶瓷，而螺旋管 』1 2)之兩端係穿出電漿容置管（4)管壁，且該螺旋 管（1 2)係可被冷卻，該中空f (工3 )係通過本發明 喷射式微波«產生器之„ (5)部份，或者可延伸通 過整個喷射式微波電t產生器，對於使用對環保有宝之氣 體、或是經過電躁（5)處理後，產生有害之物質的製 1313147 五、發明說明（ 明設計做適度的㈣有效處理廢氣，而 的需求）可加以冷卻的設計，可適用於長時間工作 综上料，本發明確可朗如前揭所料進 漿產生器之功效，上述係為本發明較佳實施： . ' ❽非用錄制本發明之申請㈣，且本發明 確已具備前述能增進既有習作的功效之優點，當 έ· 專利申請之要件，爰依法具文提出申請。 訂 線 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公髮）5. Description of the invention (0) The top (ii) is preferably tapered; the spiral tube (12) is electrically conductive, and the screw is electrically fed. The u (1 2) system is set at === The resulting plasma...surrounding limit has: the same as the circular conduit (3) is not connected, and the microwave frequency of the image is 1 2·_ζ, for example, the circular guide B is straight 桎 D 1 is about 5 〇 _ : plasma The diameter D2 of the accommodation is about 85 coffee, and the length is at least the length of the electric excitation range; the spiral tube (D3 55_ of iu, the diameter of the spiral tube (12) is about 6_, and the spiral tube, : 2) The spacing a of each spiral is about 2〇mm. In the above-mentioned "10" function, the microwave system is introduced into the circular duct (3) through the square waveguide (1), and is coaxial with the inner shaft (10) via the circular duct (3). The electric slow system reaches the starting point of the electric capacity/tube (4), that is, the top end of the inner shaft (1 〇), and the gas flow of the working gas is also passed through the gas inlet pipe (7). Stable through the circular duct (3,3,) and reach the tip of the inner "1"): the tip of the shape (1 1 ) will be located at the tip of the inner shaft (2 〇) When the intensity of the microwave electric field is increased, the plasma (5) is generated inside the plasma receiving tube (4), and the plasma (5) is enclosed in the spiral range of the spiral tube (12). Electric Yi (5), electric Luorong tube (4) and the unique spiral tube (1 2) of the invention together constitute a special propagation system, which is especially suitable for solving microwave propagation, matching and propagation bandwidth. This paper is applicable to the Chinese National Standard (CNS) A4 specification (21〇X 297 Μ). <Please read the notes on the back and fill out this page. -n H , A7 B7 ^13147 V. Inventive Note (Motor) In this propagation system, the spiral tube (12) and the plasma receiving tube (4) together form a coaxial electric shaft, which is produced. The plasma (5) is like an inner shaft. By adjusting the position of the piston (6), the matching of the microwave propagation system can be achieved, so that a stable plasma can be generated and maintained corresponding to a drastic change in the working pressure. As a result of the experiment, in order to increase the bandwidth of the microwave propagation, the spiral tube (12) of the present invention may also be composed of a plurality of single metal rings, and the number of turns of the spiral tube (1 2) without affecting the effect thereof The distance between the rings and their respective turns can be freely adjusted. For better results, the spiral tube (12) of the present invention will fill the entire plasma receiving tube (4), and the spiral coils of the spiral tube (12) The spacing a, the minimum can be equivalent to the diameter of the spiral tube (12). When used for a long time, it is better to cool the spiral tube (12), so it is best to use a tubular material. Shown as a plan view of another preferred embodiment of the present invention, which is roughly The structure is as described above, except that the hollow tube (3) extends along the circular conduit (3, , 3) toward the plasma receiving tube (4) and through the spiral formed by the spiral tube (i 2 ) In the middle of the segment, the hollow tube (1 3 ) is made of non-conductor quartz or ceramic, and both ends of the spiral tube 12 2 are passed through the wall of the plasma receiving tube (4), and the spiral tube ( 1 2) can be cooled, the hollow f (work 3) is passed through the part (5) of the jet microwave generator of the present invention, or can be extended through the entire jet microwave electric generator, for environmental protection A gas with a treasure, or a product that produces harmful substances after being treated by an electric raft (5). 1313147 5. Description of the invention (a design that is moderately designed to effectively treat exhaust gas) can be cooled and designed. In the case of a long-term work, the present invention can be used as a preferred embodiment of the present invention. The above is a preferred embodiment of the present invention: . ' ❽ is not used to record the application of the present invention (4), and the present invention does The advantages of the above-mentioned patents can be enhanced, as well as the requirements of the patent application. Dead letter law to apply. Customize the paper size to the Chinese National Standard (CNS) A4 specification (210 X 297 mil)