TWI312760B - Auxiliary shifting device, carrying device and assembly thereof - Google Patents

Auxiliary shifting device, carrying device and assembly thereof Download PDF

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Publication number
TWI312760B
TWI312760B TW95138792A TW95138792A TWI312760B TW I312760 B TWI312760 B TW I312760B TW 95138792 A TW95138792 A TW 95138792A TW 95138792 A TW95138792 A TW 95138792A TW I312760 B TWI312760 B TW I312760B
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Taiwan
Prior art keywords
auxiliary
carrying
substrate
assembly
mobile
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TW95138792A
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Chinese (zh)
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TW200819374A (en
Inventor
Wei-Cheih Hsu
Ming-Sheng Chen
Wen-Chang Hsieh
Shu-Chih Wang
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Au Optronics Corp
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Priority to TW95138792A priority Critical patent/TWI312760B/en
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Description

1312760 九、發明說明: 【發明所屬之技術領域】 成.ίΓ,::種用於生產線上移動、承載物料之裝置及總 成,特別疋-_於移動、承載基板β置及總成。 【先前技術】 ㈣隨ίΐίίΐΐ進步’目前電子產品之發展趨勢係講求短小 i術必須不斷精進外=但產品的設計與製造 改良,以符合生產之需ί的各種生產設備亦必須隨之發展 其中 生 ’為了因應不同產品於生產製造 ,細於特定尺寸螢幕之玻璃基板, 係從生產線上取元整基板總歧行 寸之基鮮元,加以取用(即f稱之「收料°」),以進^下^程。 成切將完整機版總 球,以人卫運作之方式,逐再利用一吸 並遺留該等紐單觸之基板觸桃奴絲單元取出’ 由於該基板總成,係為一即將組裝之 ,、表面所存在之線路亦不容損傷;然於「&故==谷 移 狀況 即從生產機台上將基板總成(或已切 忐夕ν」之過紅中, 至拖盤之過針,若發生任ϋ板單元) 時,在移動的過程中,極容易不5表度之疊片狀 另外,於切割完成後之「收路損傷。 廢料,仍存在於托盤上,於人工操作^切副元成後所遺留之 滑入基板單元與托盤間的廢料,破壞j元容易使不甚 土傲早7L下的線路端,此狀 5 «1312760 況在需施加-下壓力於該吸球上,以吸取基板單元的情況尤然。 有鑑於此,如何有效地減少玻璃基板於製程上之移動、切割 及取用過程中之非預期性損傷,以提升生產良率,乃業界亟待解 決的問題。 【發明内容】 ^ 發明之一目的在於提供一種輔助移動裝置,用以移動一基 壯使$片之狀況降低;該輔助移動裝置包含一平板以及一 ^、置:該平板具有__第-面及與該第—面相對之—第二面, t署有複數通氣孔’自該第—面與該第二面延伸。該抽氣 二部份該複數通氣孔導通,動力導引氣體自該第一面, 氣孔,沿該抽氣裝置導出,俾當該基板總成係與該 第面相鄰4,得以承受一朝向該第一面之真空吸附力。 已切目的在於提供一種承載裝置,用以承載至少一 裝吏加基板廢料不致殘留於承載區域;該承載 其中,琴扩ίΐΐ、一框架、一第二支樓結構以及複數承載滑塊。 唁框加^ 置於該集屑盤之一周邊,該第二支稽結構橫跨於 於該“n ’當該至少-基板單元承載 之一祕上基板廢料射經_等_之至少其中 移動並板n在m-:重辅助移動暨承_成’用以 元,該Λ柘罝-土办:士 以土板(成具有複數已切割之基板單 之輔助ί動裝U承二2料結輔助移動暨承載總成包含前述 ,至承载裝置上,使承載^置得以置得以將基板總成移 ^板單元與基板廢料相‘離,避免單=並得使該 卜因與賴姆_觸叙非糊 6 •1312760 生產之良率。 為讓本發明之上述目的、枯 下文係以較佳實關配合崎能更_易懂’ 【實施方式】 上,總成,錢用於生產線 露之輔助移動暨承載總成何應用本發明所揭 以限制本發明。 乂生產氣&之流程中,然此示例並非用 施例^須載總成之一實 係用於生示)’其中該基板總成,較佳者 移動暨承_成之前,此玻。應用本發明之輔助 程度之加工,例如該玻璃UfJ7已由其他生產設備進行相當 切割裂片為複數個基板單^。 3割機台將完整之一基板總成 助移總ί10包含-輔 T2〇;lm 第2A圖與第2B圖係辅助移動癸 Π24Ϊ-Γ . ΐΪ;!ΪΓ 110上設有複數個通氣孔116,自^ 卜’該平板 伸。其中,至少部份該等通氣孔該第延 導通,藉由抽氣裝置12〇之抽氣n抽^;,而與之相 近之氣體自第-面112,經由兮尊乍p動力¥引平板110表面附 k田°亥4通氣孔110,沿該抽氣裝置120 7 *1312760 112相鄰時,得以承受 導出,俾當基板總成與平板110之第一面 一朝向第一面112表面之真空吸附力。 F置5 120具有至少一抽氣管路122及一動力 未)。其中,抽氣f路122設置於第二面114,與 协複數通氣孔116連通。此減管路122亦可安排設置 各談何ί他部位’i列如將純管路設置於平板内部之 ^ 0直接導通通氣孔亦可。而動力裝置124則與該 以ctd22,接’使動力裝置124得經由抽氣管路;221312760 IX. Description of the invention: [Technical field to which the invention pertains] Cheng. Γ,:: A device and assembly for moving and carrying materials on a production line, especially for moving, carrying substrate β and assembly. [Prior Art] (4) Advance with ΐ ΐΐ ' 'The current development trend of electronic products is that short i should be constantly improved. However, the design and manufacturing of products must be improved to meet the needs of production. 'In order to manufacture different types of products, the glass substrate that is finer than the screen of a certain size is taken from the production line, and the basic element of the total substrate is taken from the production line (that is, f is called "receiving °"). To enter ^ lower ^ process. Cheng Chei will complete the complete version of the total ball, in the way of the operation of the human and the Guardian, re-use a suction and leave the substrate of the one-touch tablet touch the snails unit to remove 'Because the substrate assembly is a soon to be assembled, The line existing on the surface should not be damaged; however, the "&== valley shift condition means that the substrate assembly (or the cut-off ν ν) is over-red from the production machine, to the needle In the process of moving, it is very easy to not overlap the surface of the sheet in the process of moving. In addition, after the cutting is completed, the road is damaged. The waste is still present on the tray and is manually operated. After cutting the sub-yuan into the waste material that slides into the substrate unit and the tray, destroying the j-element is easy to make the line end of the 7L under 7o, which is in need of application-down pressure on the suction ball. In particular, it is particularly difficult to absorb the substrate unit. In view of this, how to effectively reduce the unintended damage during the movement, cutting and taking of the glass substrate in the process to improve the production yield is urgently solved by the industry. Problem. [Summary of the Invention] ^ One of the purposes of the invention Providing an auxiliary mobile device for moving a base to reduce the condition of the tablet; the auxiliary mobile device includes a flat panel and a device: the flat panel has a __first surface and is opposite to the first surface In the second aspect, the unit has a plurality of venting holes extending from the first surface and the second surface. The plurality of venting holes are electrically connected to the first surface, the venting holes are along the pumping The gas device is derivable, and the substrate assembly is adjacent to the first surface 4 to withstand a vacuum adsorption force toward the first surface. The purpose of the invention is to provide a carrying device for carrying at least one mounting substrate waste. It does not remain in the load-bearing area; the load carries the piano, a frame, a second branch structure, and a plurality of load-bearing sliders. The frame is added to one of the stacks, and the second branch is horizontal. Across the "n' when the at least - substrate unit carries one of the secret substrate waste shots _ etc. at least one of which moves and the board n is in the m-: heavy assisted movement cum Cheng _ into the yuan, the Λ柘罝-土办: 士以土板(成成的切割的The auxiliary substrate of the substrate is ί 动 U U U 2 2 辅助 辅助 辅助 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含Single = and make the cause and the Rim _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The method of the above, the assembly, the money for the auxiliary line of the production line and the load bearing assembly. The application of the invention is disclosed to limit the invention. In the process of producing gas & One of the solid systems is used to produce) 'where the substrate assembly, preferably the mobile cum Cheng _ before the glass. With the aid of the degree of processing of the present invention, for example, the glass UfJ7 has been subjected to considerable cutting lobes from other production equipment into a plurality of substrates. 3 The cutting machine will move one of the complete substrate assemblies to assist the total ί10 including - auxiliary T2 〇; lm 2A and 2B are auxiliary moving 癸Π24Ϊ-Γ. ΐΪ;! ΪΓ 110 is provided with a plurality of vents 116 , since ^ 卜 'the plate stretched. Wherein at least some of the vent holes are electrically conducted, and the pumping device 12 is configured to pump the gas n, and the gas similar thereto is from the first surface 112, via the 兮 乍 乍 p The surface of the 110 surface is attached to the surface of the first surface 112 of the first surface 112 of the substrate assembly 110 and the flat surface of the flat plate 110 when the air suction device 120 7 * 1312760 112 is adjacent to each other. Vacuum adsorption force. The F set 5 120 has at least one pumping line 122 and a power line. The pumping path r 122 is disposed on the second surface 114 and communicates with the complementary number vent 116. The decrementing line 122 can also be arranged to arrange each of the parts of the column i. For example, a pure pipe can be placed in the inside of the plate to directly open the vent hole. The power unit 124 is connected to the ctd 22 to make the power unit 124 pass through the pumping line;

B# ㈣提供第—面112表面—真空吸附力。於具體應用 時,該動力裝置124可為一真空幫浦。 〜佳實施例中’為使第一面112表面之真空吸附力 付以均勻地分布,因此辅助移動裝置100可更包含一多孔介質 130 ’設於第一面112與基板總成間,使第一面112表面之真空吸 附力’更形均勻。其中於具體應用時,該多孔介質13〇係為具多 孔結構之一紙張,或其他具多孔結構之材料均可。 為使操作者可以輕易地操作辅助移動裝置100,更可於辅助移 動裝置+1〇〇之第二面114設置一握持裝置118,以利生產線上之操 =者可藉雜持整侧师絲置丨⑽,將基減成從工作機台 處’吸附至輔助移動裝置之第一面m上,以利後續之搬運 。此外,於其他之實施例中,此握持裝置亦可設計為一機械 手臂,其可與任何生產線上之自動化搬運設備相配合,使整個辅 助移動裝置得具有自動化鋪之魏,以機個生產線之作業。 。此外,於較佳實施例中,辅助移動裝置1〇〇可包含一第一支 撐結構119 ’設於該第一面112,或者設於第二面114亦可。圖中 顯示之具體應用’該第一支樓結構119係為設置於第二面114之 四個圓柱體,用以續整個輔助移動裝置丨⑽之本體,以利辅助 移動裝置100之固定置放’避免辅助移動裝置1〇〇受到不必要 零件損傷。 8 1312760 ,。該承載裝置⑽包含—集“ 210、1=2〇基1, 撐結構230以及複數承载滑塊24〇。 木22〇 —第二支 框架單”料,而 ^3〇〇^xmm23〇mmm 22〇 m,使至少部份該承載滑塊射 2!卜ίί Γ。尤其是,由於承載滑塊240得於第二支撐i: 承載滑塊240間得以界定複數個間隙& 數基板單几承载於該等承載滑塊謂 210上廢? «μ πΛ/Λ ΐ糾基板單域基板射4相分離<目 而設計成滑塊24°得配合不同之基板單元, 承上所述,於較佳之實施例中,框架220係自隼眉般71 η 體延伸成型,構成承載裝置·之主要本體。mm 結構230具有複數圓棒232,分別獨立地 ^ 第二支標結匕fi^ii2263G2, Γί本體得相對於 ® ^ 之該等圓棒232上,呈一線性移動,以進—步 間不同之距離,配合集屑盤210收集可能不同大 斑其實關+(細和,導狀雜承紐塊亦可 Ξ ϋί之間,詳言之,可將各該承載滑塊二側設置—戴 / m鬼—側得以直接崁入框架中,亦可達到前述界定間隙之 * 2760 目的。 其除圖中顯示本發明承載裝置200之另一實施例, 支$;所示實施例中之集屑盤2ig、框架220、第二 ii、2H^_424i)等元件外。本實施例主要係^露ΪΪ ,、輔助移動裝置間之—定位件270,設置於框架220上, 概㈣,提升‘ tifLTi位件270係、共同地形成一用以嵌合辅助移動裝置 触速分離絲科鑛狀㈣。於較佳之 中,各該粒件27G之内侧更包含—定位塾別,二各 可’藉以緩衝置放輔助移動裝置於承載裝置200 滑動所造步減少絲單域絲廢料間相對 巧’第4圖亦顯示於各該承載滑塊24〇之至少之 ί 當承載滑塊24G沿第二娜^30滑移 以穩定界定出複數個承載滑塊24〇間相同或不;大以 明之έϊΐί施例舉本發明之實施態樣,以及閣釋本發 完成之改變或均等性之安排均屬於本發日之ϊ 圍本毛月之權利保護範圍應以申請專利範圍為準。 【圖式簡單說明】 *1312760 第1圖係本發明實施财輔 __ 第从圖與第2B圖係本^移動旦H息成之組合示意圖; 意圖; 斜補助移動裝置於柯視角之示 發明承載裝置之分解示意圖; 第4圖係本發日脉餘置另—實施例之組合示意圖。 【主要元件符號說明】 10 :辅助移動暨承載總成 110 :平板 114 :第二面 118:握持裝置 120 :抽氣裴置 124 :動力装置 200 :承栽裝置 220 :框架 232 .圓棒 242 :固定件 260 ·嵌溝 272 ·定位塊 100 :輔助移動裝置 112 .第一面 116 :通氣孔 119 :第一支撐結構 122 :抽氣管路 130 :多孔介質 21〇 :集屑盤 230 :第二支撐結構 240 :承载滑塊 250 :間隙 270 ·定位件 274 :定位势B# (4) Provide the surface of the first surface 112 - vacuum adsorption force. The power unit 124 can be a vacuum pump for a particular application. In the preferred embodiment, in order to uniformly distribute the vacuum adsorption force on the surface of the first surface 112, the auxiliary moving device 100 may further include a porous medium 130' disposed between the first surface 112 and the substrate assembly. The vacuum adsorption force on the surface of the first surface 112 is more uniform. In the specific application, the porous medium 13 is a paper having a porous structure or a material having a porous structure. In order to enable the operator to easily operate the auxiliary mobile device 100, a holding device 118 can be disposed on the second surface 114 of the auxiliary mobile device +1 to facilitate the operator on the production line. The wire is placed on the raft (10), and the base is reduced from the working machine to the first side m of the auxiliary moving device for subsequent handling. In addition, in other embodiments, the holding device can also be designed as a robot arm, which can be matched with the automatic handling equipment on any production line, so that the entire auxiliary mobile device can be automated, and the production line can be automated. Homework. . In addition, in the preferred embodiment, the auxiliary mobile device 1 can include a first support structure 119 ′ disposed on the first surface 112 or on the second surface 114. The specific application shown in the figure 'the first building structure 119 is four cylinders disposed on the second surface 114 for continuing the entire body of the auxiliary mobile device (10) to facilitate the fixed placement of the mobile device 100. 'Avoid the auxiliary mobile device 1 from being damaged by unnecessary parts. 8 1312760,. The carrying device (10) comprises a set of "210, 1 = 2 〇 base 1, a struts 230 and a plurality of load bearing blocks 24 〇. Wood 22 〇 - second frame single material", and ^3 〇〇 ^ x mm23 〇 mmm 22 〇m, so that at least part of the carrying slider shoots 2! 卜 ίί Γ. In particular, since the load bearing slider 240 is obtained from the second support i: the plurality of gaps are defined between the load bearing sliders 240. The number of substrates is simply carried on the load bearing sliders 210. «μ πΛ/Λ ΐ ΐ The single-domain substrate of the substrate is separated by 4 phases. The substrate is designed to be a slider of 24° to match different substrate units. As a preferred embodiment, the frame 220 is formed by elongating 71 η body extension. The main body that constitutes the carrier device. The mm structure 230 has a plurality of round bars 232, which respectively independently control the second branch 匕fi^ii2263G2, and the body is linearly moved relative to the rods 232 of the |^, so that the steps are different. The distance, combined with the collecting disc 210, may be different from the large spot. In fact, the (fine and guiding miscellaneous blocks can also be between , ,ί, in detail, the two sides of the carrying slider can be set - wear / m The ghost-side can be directly plunged into the frame, and can also achieve the aforementioned purpose of defining the gap * 2760. In addition to the figure showing another embodiment of the carrying device 200 of the present invention, the swarf disk 2ig in the illustrated embodiment , frame 220, second ii, 2H^_424i) and other components. In this embodiment, the positioning member 270 is disposed between the auxiliary mobile device and the positioning device 270, and is disposed on the frame 220, and is generally provided with a tifLTi position member 270 to jointly form a contact speed for fitting the auxiliary mobile device. Separation of silk family minerals (4). Preferably, the inner side of each of the granules 27G further includes a positioning locating, and the two can be used to buffer the placement of the auxiliary moving device on the carrying device 200 to reduce the difference between the silk single-domain silk scraps. The figure is also shown in at least each of the load bearing sliders 24 ί when the load bearing slider 24G slides along the second nanometer 30 to stably define a plurality of load bearing sliders 24, the same or not; The implementation of the present invention, as well as the arrangements for the change or equality of the completion of the present invention, are subject to the date of this issue. The scope of protection of the rights of this month shall be subject to the scope of patent application. [Simplified description of the drawings] *1312760 Fig. 1 is a schematic diagram of the combination of the implementation of the invention and the second embodiment of the present invention; Schematic diagram of the disassembly of the carrying device; Fig. 4 is a schematic diagram of the combination of the present embodiment of the present invention. [Main component symbol description] 10: Auxiliary movement and bearing assembly 110: Flat plate 114: Second surface 118: Grip device 120: Exhaust device 124: Power device 200: Bearing device 220: Frame 232. Round bar 242 : fixing member 260 · recessed groove 272 · positioning block 100 : auxiliary moving device 112 . first face 116 : vent hole 119 : first support structure 122 : exhaust pipe 130 : porous medium 21 〇 : collecting chip 230 : second Support structure 240: carrying slider 250: gap 270 · positioning member 274: positioning potential

Claims (2)

翅 2760 _、申請專利範園·· 一種,助移動裝置,用以移動—基板總成,其包含: 平板:Ξί複之-第二面,該 體自該第至少部份該複數通氣孔導通,動力導引氣 咳美袖該魏職孔’沿雜聽置導出,俾當 iiSt係與該第一面相鄰時,得以承受-朝向該第-面之Wing 2760 _, application for patent garden · · A mobile device for moving the substrate assembly, comprising: a flat plate: Ξ 复 复 - second side, the body is electrically conductive from the at least part of the plurality of vent holes , the power-guided cough beauty sleeve, the Wei's hole, is exported along the miscellaneous hearing, and when the iiSt is adjacent to the first side, it can withstand - toward the first side 2.如凊=1所述之獅移練置’其巾該抽氣裝置 附力 管Γ與至少部份該複數通氣孔連&及 瑕置’與該至少—抽氣管路連接,以提供該真空吸 助移_置,更包含-多孔介質,設於該 、魏總成間,使該真空吸附力,更形均勻。 4’ 之辅助移動裝置,其中該多孔介質係為具多孔2. The lion transfer device as described in 凊=1, the suction device attached to the at least one of the plurality of vent holes and the device and the at least the suction line are connected to provide The vacuum suction assisting device further comprises a porous medium disposed between the Wei and the Wei assembly to make the vacuum adsorption force more uniform. 4' auxiliary moving device, wherein the porous medium is porous 5· 求項2所述之辅助移裝置,其中該動力裝置係—真空幫 6. 項1所述之輔助移動褒置’另包含-握持裝置,設於該 7. -第-支撐結構,設5) The auxiliary shifting device according to Item 2, wherein the power device is a vacuum moving device, the auxiliary moving device described in Item 1, and the holding device is disposed on the 7.-the first support structure. Assume 8. Sii以之輔助移動裴置’其中該基板總成具有複數已 1 •I312760 9· —種承載裝置,用以承載至少一基板單元,該至少一基板單元 黏附有基板廢料,該承載裝置包含: 一集屑盤; 、 一框架,設置於該集屑盤之一周邊; 一第二支撐結構,橫跨於該框架内;以及 複數承載滑塊,至少部份該承載滑塊適可於該第二支撐結 構上滑移,且與該第二支樓結構間界定複數間隙; 當該至少一基板單元承載於該等承載滑塊上時,該基板廢 料適可經由該等間隙之至少其中之一掉落至該集屑盤上。 1〇.2ί求項9所述之承栽裝置,其中該框架係自該制盤-體延 伸成型。 11·^睛求項9所述之承紐置,其中該第二支# 棒,並排橫跨於驗_。 U硬翻 12.Γ⑵所述之承载裝置,針各該承载滑塊間,具有互為 承载裝置,另包含—導引裝置,適可導引各 後數承載滑塊,相對於該第二支撐結構,呈-線性移Γ 14·,請求項13所述之承载裝置, 數承載滑塊與該第二支標結構之間/導引裝置,设於各該複 裝置,該導引裝置,設於各該複 16. 一種輔助移動暨承載總成,包含. -輔=裝置具有用:*總成,其具有: 面,該平板上贿魏面㈣之-第二 目孩第一面至該第二面延 2 1312760 伸;以及 引氣體tii置,與至少部份該她贱轉通,動力導 經由該複數通氣孔,沿該抽氣裝置導 向該第帥峽,抑承受一朝 载震置,用以承載複數基板單元,該複數美# @ 一 # ,總成切割而得,其另包含基板廢料== 一集屑盤; 二框架,設置於該集屑盤之一周邊; 二第二支撐結構,橫跨於該框架内;以及 撐結部份該承載_適可於該第二支 二:單;;二 適可經由該等間隙之至少其中之一掉落至該集屑子盤i基板廢料 17.;請求項16㈣之_移鱗承親成,其中該抽氣裝置氣 二份纖通氣孔連通;及、 附力。…玄至少—抽氣管路連^^提供該真$吸 18. 如請求項17所述之辅助移動 設於該第一面與基板總成間, 19. 如請求項18所述之辅助移 為具多孔結構之一紙張。 20.如請求項17 一真空幫浦。 所述之補助移動 暨承載總成,更包含一多孔介 使該真空吸附力,更形均勾。、, 承載總成,其+ 1¾多孔介質係 暨承載總成,其中該動力袈置係 3 *1312760 21 κ 述之_移_承雜成,另包含-握持裝置, =求項I6所述之輔助移動暨承載總成,更包第一支稽 、Mt ’設於鄉—面及該第二面之至少其中之一。 ‘ 助移動暨承載總成,其中該框架係自該 之4 κ _ 所述之辅助移動暨承載總成,其中該支撐結構具 • 冑魏®棒’靖橫跨於該框架内。 間,3上6為戶:m:移動暨承載總成’其中各該承載滑塊 26· ϊΐί^Γ^Ι之輔助移動暨承載總成,另包含-導引裝置’ 性移ϊ各_數承載滑塊’相對於該第二支衛-線 • •以該導引裝置’ 包含至少-舰成,其巾!綠載裝置更 置定位於該承絲置之上。;ς’、’肖时便將賴助移動裝 48. Sii as an auxiliary mobile device, wherein the substrate assembly has a plurality of I 312760 9-type carrying devices for carrying at least one substrate unit, the at least one substrate unit is adhered with substrate waste, and the carrying device comprises a stack of scrapers; a frame disposed at a periphery of one of the stacking trays; a second support structure spanning the frame; and a plurality of load bearing sliders, at least a portion of the load bearing sliders being adapted The second supporting structure is slidably disposed, and defines a plurality of gaps between the second supporting structure and the second supporting structure; when the at least one substrate unit is carried on the carrying sliders, the substrate waste is adapted to pass through at least one of the gaps Drop onto the collecting tray. The planting device of claim 9, wherein the frame is stretched from the plate body. 11·^ Eyes the item 9 described in Item 9, wherein the second branch is a side-by-side _. U. The load-bearing device according to (2), wherein each of the carrying sliders has a mutual carrying device, and further comprises a guiding device, which is adapted to guide each of the rear carrying sliders, relative to the second support Structure, in-linear movement 14·, the carrying device described in claim 13 , between the number of bearing sliders and the second supporting structure / guiding device, is provided in each of the complex devices, the guiding device, Each of the composites 16. An auxiliary mobile and bearing assembly, comprising: - auxiliary = device has: * assembly, which has: face, the tablet on the Wei Wei (four) - the second child first face to The second surface is extended by 2 1312760; and the gas is introduced, and at least a portion of the gas is turned, and the power guide is guided to the first handsome gorge along the air vent through the plurality of vent holes, and is subjected to a shock absorber. , for carrying a plurality of substrate units, the plurality of beauty # @一#, the assembly is obtained, which further comprises a substrate waste == a set of chips; a second frame, disposed around one of the collecting trays; a support structure spanning the frame; and the support portion is adapted to the Two of the two: a single; two suitable to fall through at least one of the gaps to the chip substrate i substrate waste 17.; claim 16 (four) _ shifting scales into the pro, wherein the pumping device gas Two fiber vents are connected; and, with force. ... 玄 at least - the exhaust pipe connection ^^ provides the true $ suction 18. The auxiliary movement as described in claim 17 is provided between the first face and the substrate assembly, 19. The auxiliary movement as described in claim 18 is One of the papers with a porous structure. 20. As requested in item 17 a vacuum pump. The auxiliary mobile cum bearing assembly further comprises a porous medium to induce the vacuum adsorption force to be more uniform. , a load bearing assembly, a + 13⁄4 porous medium system and a load bearing assembly, wherein the power system is 3 * 1312760 21 κ described as a shifting device, and further comprises a holding device, = claim I6 The auxiliary mobile and carrying assembly is further included in the first branch, Mt' is located in at least one of the township and the second side. ‘Auxiliary mobile and load bearing assembly, wherein the framework is from the auxiliary mobile and load bearing assembly of the 4 κ _, wherein the support structure has a 胄 ®® rod 靖 横跨 across the frame. Between, 3, and 6 are households: m: mobile and bearing assembly', each of which carries the slider 26· ϊΐί^Γ^Ι's auxiliary mobile and bearing assembly, and further includes - guiding device' The carrying slider 'relative to the second guard-line•• the guiding device' comprises at least a ship, the towel! The green carrier device is further positioned above the wire carrier. ;ς', 'Shaw will help the mobile device 4
TW95138792A 2006-10-20 2006-10-20 Auxiliary shifting device, carrying device and assembly thereof TWI312760B (en)

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