JP3404462B2 - Sheet peeling device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet peeling device, and more particularly to a device structure suitable for peeling a ceramic green sheet from a carrier film.

[0002]

2. Description of the Related Art Generally, when manufacturing a monolithic ceramic capacitor, a monolithic ceramic coil or the like, a carrier film made of PET or the like is coated with a slurry prepared by kneading ceramic particles and an organic binder, and a doctor blade or the like is used. It is spread thinly and dried to form a ceramic green sheet layer. Internal electrode patterns are formed on the surface of this ceramic green sheet layer by printing or the like using a conductive paste or the like in an appropriate pattern according to the product. Then, such ceramic green sheet layers are appropriately laminated to form a laminated body, appropriately cut if necessary, and then fired, and finally external electrodes and the like are formed.

In the step of laminating the ceramic green sheet layers in the above manufacturing method, the ceramic green sheet layers carried on the carrier film are cut into a predetermined shape and dimensions, and the cut ceramic green sheets are cut into carrier films. Then, the laminate is peeled off and sequentially laminated to form a laminate. As a method for peeling the ceramic green sheet before forming this laminated body or at the time of forming the laminated body, a carrier film carrying a ceramic green sheet layer is supplied along a predetermined guide path and the carrier film is adsorbed. There is a method of using a sheet peeling device configured to bring a sheet holding head close to the holding film holding table from above and suck and hold the ceramic green sheet layer carried on the carrier film by the sheet holding head. In this method, the carrier film and the ceramic green sheet layer sandwiched between the film holding base and the sheet holding head are cut into a desired shape and size by a cutter device,
By pulling the sheet holding head upward as it is, the ceramic green sheet sucked and held by the sheet holding head is peeled off from the carrier film on the film holding table.

In order to facilitate the work of peeling the ceramic green sheet from the carrier film, the carrier film is bent from the end of the film holding table to the back side (that is, to the side away from the sheet holding head). A ceramic green sheet that is suction-held by the sheet-holding head by horizontally moving the film holding base to the side opposite to the above-mentioned end while forming the film guiding path and keeping the carrier film stretched. On the other hand, the carrier film may be gradually peeled off at the above-mentioned end portion.

[0005]

However, in the above-described sheet peeling apparatus, when the thickness of the carrier film and the ceramic green sheet layer supplied on the film holding table changes, the operating position of the sheet holding head also changes. Therefore, it is necessary to adjust the operating position of the sheet holding head frequently, which is a labor-intensive problem.

In particular, when the carrier film is peeled from the ceramic green sheet sucked and held by the sheet holding head by the above method, the ceramic green sheet is completely sandwiched between the film holding base and the sheet holding head. There is a problem that it is difficult to smoothly peel the carrier film from the ceramic green sheet unless the sheet holding head is pulled up and moved slightly (about 30 μm). However, since the initial position of the sheet holding head changes when the thickness of the carrier film and the ceramic green sheet layer changes, setting work must be performed in the drive cylinder and the like.

Therefore, the present invention is to solve the above-mentioned problems, and its object is to perform a fine adjustment operation with respect to the thickness change of the carrier film and the sheet carried on the carrier film with a simpler structure. An object of the present invention is to provide a structure of a novel sheet peeling device that can be reduced or eliminated.

[0008]

In order to solve the above problems, a sheet peeling apparatus of the present invention is a sheet peeling apparatus for peeling a sheet carried on a carrier film, wherein the sheet carrying apparatus holds the sheet. A film holding member having a film holding surface for holding a carrier film, and supplying the carrier film carrying the sheet onto the film holding surface, and from the end of the film holding surface to the rear side of the film holding surface. A film erection means for guiding and collecting the carrier film by bending, and a sheet holding member having a sheet holding surface which is configured to be contactable with and separable from the film holding member and which is arranged to face the film holding surface. A plane moving means for relatively moving the film holding member and the sheet holding member in the sheet surface direction And an auxiliary member configured to be movable in the contact and separation direction of the sheet holding member with respect to the film holding member, a driving unit that moves the sheet holding member in the contact and separation direction, the auxiliary member and the sheet holding member. A coupling means capable of coupling a member, and a fine movement means for slightly moving the auxiliary member in a direction in which the sheet holding member is separated from the film holding member, and the sheet carried on the carrier film is By holding the sheet holding surface in contact with each other, the sheet holding member and the auxiliary member are joined by the joining means, and the auxiliary moving member is finely moved by the fine moving means together with the sheet holding member. The sheet held on the surface is slightly separated from the film holding surface, and in this state, the plane transfer is performed. The carrier film is gradually peeled at the end portion while moving the film holding member to the side opposite to the end portion relative to the sheet holding member by means. Is characterized by.

According to the present invention, the auxiliary member is connected to the sheet holding member by the connecting means in a state where the sheet holding surface of the sheet holding member is in contact with the sheet on the carrier film, and the auxiliary member is finely moved in this state. By slightly moving the sheet holding member away from the film holding surface by the means, the fine movement means always uses the height (approaching position) of the sheet holding member as a reference when the sheet holding surface is in contact with the sheet. Since the sheet holding member is finely moved via the, the moving amount by the fine moving means can be independently set regardless of the approach position of the sheet holding member, so that a complicated mechanism or program is not required. In addition, even if the approaching position of the sheet holding member changes, it does not affect the operation of the fine moving means at all,
It is also possible to stack a plurality of sheets on the sheet holding surface of the sheet holding member.

In the present invention, a cutting means for cutting the sheet carried on the carrier film into a desired shape on the film holding surface is provided, and the sheet cut by the cutting means is the sheet holding surface. It is preferable that it is configured to be held on the substrate and peeled from the carrier film. According to this invention, since the sheet is cut on the carrier film and peeled while being cut, by feeding the carrier film by the film erection means after the peeling operation is completed, a plurality of sheets are sequentially It can be peeled off from the carrier film.

In the present invention, the driving means is configured to change the distance between the sheet holding member and the fixed base member, and the fine movement means changes the distance between the base member and the auxiliary member. Preferably, it is configured to. According to the present invention, both the driving means and the fine movement means are configured to move the sheet holding member and the auxiliary member with reference to the base member, so that the position control of the sheet holding member can be performed with high accuracy. At the same time, the device configuration can be simplified.

In the present invention, the sheet holding member is
It is preferable that the auxiliary member, the driving unit, and the fine moving unit are connected to the movable member via a connecting member extending in the contacting / separating direction, and are arranged between the base member and the movable member. According to the present invention, the auxiliary member, the driving unit and the fine moving unit are arranged between the base member and the movable member, so that the apparatus can be made compact and a space is secured around the sheet holding member. Therefore, it is possible to reduce the size of the device, improve the maintainability, and reduce the weight of the operating unit.

In the present invention, the sheet holding member is
The connecting means is mounted on the auxiliary member by being driven by the driving means via the connecting member guided in the contacting / separating direction, and the auxiliary member and the sheet holding member are combined by gripping the connecting member. It is preferably configured to. According to the present invention, the connecting member guided in the contacting / separating direction is configured to be gripped by the connecting means mounted on the auxiliary member, so that the driving force transmitting function to the sheet holding member and the guide for the sheet holding member are provided. The function and the connecting portion of the sheet holding member to the auxiliary member can be configured by one connecting member, and the connecting means holds the connecting member guided in the contacting / separating direction, thereby simplifying the holding structure. Since it can be made compact, the device configuration can be simplified and the configuration can be made compact.

In the present invention, it is preferable that the coupling means is a clamp device that clamps the connecting member. According to the present invention, since the coupling means is configured by the clamp device that clamps the connecting member, the operation of the connecting member is not hindered when the connecting member is not clamped, and the simple structure is ensured when the connecting member is clamped. The sheet holding member and the auxiliary member can be combined and integrated.

In each of the above inventions, the auxiliary member, the movable member, and the base member are plate-shaped members each having a plate surface in a direction orthogonal to the contacting / separating direction.
It is preferable in terms of weight reduction.

In each of the above inventions, the connecting member may be directly supported by the base member, or the connecting member may be supported by the auxiliary member and the auxiliary member may be the base member or another member fixed. You may pivot it on.

Further, each of the above means is preferably a peeling device for a ceramic green sheet, and is particularly preferably used before the laminating step for forming a ceramic laminated body or before the laminating step itself. In the latter case, each of the above inventions can be regarded as a ceramic green sheet laminating apparatus for forming a ceramic laminated body.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of a sheet peeling apparatus according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a schematic schematic configuration diagram showing the overall configuration of the sheet peeling apparatus of this embodiment. The ceramic green sheet layer 2 is formed on the surface of the carrier film 1 by the same method as described above. At the lower part of the apparatus, the carrier film 1 and the ceramic green sheet layer 2 are moved toward the film holding base 10 and the film holding base 1 is moved.
A film erection mechanism (film erection means) including guide rollers 11 and 12 for collecting the carrier film 1 from 0 and a driving means (not shown) is arranged. The film holding table 10 has a film holding surface 10a for sucking and holding a film on its upper surface.
A large number of suction holes connected to an exhaust device (not shown) are formed in 0a so that the carrier film 1 supplied on the film holding surface 10a can be sucked and held.
Further, on the moving direction side of the film holding surface 10a by the film erection mechanism, an end portion 10b having a sharp tip end for bending the carrier film 1 behind the film holding surface 10a by the film erection mechanism is formed. .
In the illustrated example, the carrier film 1 is the guide roller 1
1 is drawn out onto the film holding surface 10a of the film holding table 10, bent at the end 10b, and installed so as to be recovered via the guide roller 12.

A sheet holding mechanism 20 is formed above the film holding table 10. In the sheet holding mechanism 20,
Base plate 2 fixed to the frame of a device (not shown)
1 (base member) and a sheet holding head 22 having a sheet holding surface 22a facing the film holding surface 10a.
(Sheet holding member). Like the film holding surface 10a, the sheet holding surface 22a is provided with a large number of suction holes connected to an exhaust device (not shown). By these suction holes, the ceramic green sheet layer 2
And is configured to adsorb and hold the ceramic green sheet 2a cut into a desired area or shape by a cutting mechanism 30 described later.

A connecting shaft 23 (connecting member) extending upward is attached to the sheet holding head 22, and the connecting shaft 23 may be axially supported by the base plate 21 as shown in FIG. In practice, as will be described later, the connecting shaft 23 is axially supported by the auxiliary plate 26, and the axial support portion of the auxiliary plate 26 is axially supported by the base plate 21. The upper end of the connecting shaft 23 is fixed to the movable plate 24. The movable plate 24 is equipped with a drive cylinder 25 (drive means) including a hydraulic cylinder and a pneumatic cylinder,
The movable cylinder 24 can be moved in the vertical direction with respect to the base plate 21 by the drive cylinder 25. An auxiliary plate 26 (auxiliary member) is arranged on the base plate 21 so as to overlap with each other, and the auxiliary shaft 26 has a connecting shaft 2
A clamp device 27 (coupling means) through which 3 is inserted and a fine movement cylinder 28 (fine movement means) for changing the distance between the base plate 21 and the auxiliary plate 26 are mounted.

The sheet holding head 22 is provided with a cutting mechanism 30 having a cutter blade 31 and a cutter driving section 32, which are arranged in four circles so as to surround the sheet holding surface 22a. The cutting mechanism 30 is provided with a position adjuster (for example, an XY table) configured to correct and change the cutting position by the cutter blade 31, respectively, and cuts the ceramic green sheet layer 2 at a desired position. Is configured to be able to. Further, a camera, an optical sensor, a light source, etc. for reading internal electrode patterns, markings and the like formed on the surface of the ceramic green sheet layer 2 are arranged above and / or below the film holder 10. The position adjuster is operated according to the position of the internal electrode pattern or the marking, and the cutter blade 31
The cutting position of the ceramic green sheet layer 2 is automatically positioned.

2 and 3 show the sheet holding mechanism 20 described above.
FIG. 3 is a cross-sectional view showing a more detailed structure of FIG. 2 and a plan view seen at the position of the auxiliary plate 26. The four connecting shafts 23 are slidably inserted through bearings at four corners of the flat rectangular auxiliary plate 26, and the upper end of the connecting shaft 23 is movable plate 2.
It is fixed at 4. A drive cylinder 25 fixed to the lower surface of the movable plate 24 is provided with a drive rod 25a that can be retracted and retracted, and the tip of the drive rod 25a is brought into contact with or fixed to the upper surface of the base plate 21. Drive rod 25
Around the a, the upper surface of the base plate 21 and the drive cylinder 25
An elastic member 25b made up of a coil spring or the like is housed in a compressed state between the lower end of the main body of the main body and the elastic member 25b. The elastic member 25b urges the assembly of the movable plate 24, the connecting shaft 23 and the sheet holding head 22 upward. is doing. Movable plate 2
4, the assembly including the connecting shaft 23 and the sheet holding head 22 has its own weight and the elastic member 25, as will be described later.
A predetermined stress adjusted and set by the elastic force of b is applied to the ceramic green sheet 2a. In addition, in FIG. 2, the sheet holding head 22 is illustrated in a simplified manner.

Four connecting shafts 2 in the auxiliary plate 26
A clamp device 27 is attached and fixed to two of the insertion portions of the connecting shaft 23.
Through the opening provided in the. Clamp device 27
A pair of clamp members 27a are provided inside the connecting shaft 2
It is arranged opposite to both sides of 3. A pair of clamp members 2
7a is held by an elastic member 27b such as a coil spring (see FIG. 2) in a direction in which the connecting shaft 23 is not constrained. When air is supplied to the clamp device 27 through a pipe (not shown), the pair of clamp members 27a move so as to approach each other and hold the connecting shaft 23 from both sides. Sheet holding head 22 attached to the connecting shaft 23
Is combined with and integrated. On the other hand, the rod 28a of the fine movement cylinder 28 mounted on the auxiliary plate 26 is in a state where its tip end is in contact with the upper surface of the base plate 21, and the auxiliary is provided when the clamp device 27 is not clamping the connecting shaft 23. The plate 26 is guided by the connecting shaft 23 so as to be vertically movable above the base plate 21.

Next, the operation of the present embodiment configured as described above will be described with reference to FIGS. 1, 4, 5, and 6. As shown in FIG. 1, the carrier film 1 carrying the ceramic green sheet layer 2 has a guide roller 11
Is pulled out onto the film holding table 10 via the
It is installed so that it is bent from b to the back of the film holding surface 10a and then collected via the guide roller 12. When the carrier film 1 stops at a predetermined position, first, the carrier film 1 is sucked and held on the film holding surface 10a by the above-mentioned suction holes of the film holding table 10. Next, as shown in FIG.
By pulling in the drive rod 25a, the sheet holding head 22 descends from above and comes into contact with the ceramic green sheet layer 2 carried by the carrier film 1 on the film holding table 10. At this time, in the present embodiment, the sheet holding surface 22a is the surface of the ceramic green sheet layer 2 due to a predetermined stress determined by the own weight of the movable plate 24, the connecting shaft 23, and the sheet holding head 22 and the elastic force of the elastic member 25b. It is designed to press. Here, the drive rod 25a may be fixed to the upper surface of the base plate 21, and a predetermined pressure controlled by the drive cylinder 25 may be applied to the ceramic green sheet layer 2 from the sheet holding surface 22a. In this case, the elastic member 25b becomes unnecessary.

Next, in the above state, the sheet holding surface 22a
The ceramic green sheet layer 2 is sucked by a large number of suction holes (not shown) formed in the above to suck and hold the ceramic green sheet layer 2 on the sheet holding surface 22a. Then, in this state, the clamp device 27 is operated to grip the connecting shaft 23, and the sheet holding head 22 and the auxiliary plate 2 are held.
Combine with 6 and integrate. The joining operation may be performed after the sheet holding head 22 comes into contact with the surface of the ceramic green sheet layer 2 and before the ceramic green sheet layer 2 is sucked and held. Further, after adjusting the position of the cutter blade 31 using an internal electrode pattern or marking formed on the surface of the ceramic green sheet layer 2 as a reference using a position detection device (camera, optical sensor, etc.) not shown, the cutter drive unit 32 is operated to lower the cutter blade 31, and the ceramic green sheet 2a having a predetermined shape and size is cut from the ceramic green sheet layer 2.

After that, as shown in FIG. 5, the fine movement cylinder 28 is operated, and the rod 28a that abuts on the upper surface of the base plate 21 is projected to move the auxiliary plate 26 upward by a predetermined amount δ. At this time, the auxiliary plate 26 and the sheet holding head 2
Since 2 is integrated with the clamp device 27, the sheet holding head 22 also moves upward by the same amount δ as the auxiliary plate 26 moves up. The predetermined amount δ is for facilitating the peeling operation of the ceramic green sheet 2a, which will be described later, and is usually a very small amount.
100 μm, preferably 20-50 μm (eg 30 μm
m) is desirable, but carrier film 1
And the carrying state (bonding state) of the ceramic green sheet 2a on the carrier film 1 and the like. The film holding base 10 is moved to the left side in the figure with respect to the sheet holding head 22 (end 1
The carrier film 1 is peeled from the ceramic green sheet 2a sucked and held by the sheet holding head 22 by moving the carrier film 1 horizontally to the opposite side of 0b.

When the carrier film 1 is finally peeled off from all of the ceramic green sheets 2a, first, the clamping device 27 is moved to the connecting shaft 2 as shown in FIG.
3 is released to release the connection state between the sheet holding head 22 and the auxiliary plate 26, and then the drive rod 25a of the drive cylinder 25 projects so that the sheet holding head 22 moves upward while holding the ceramic green sheet 2a. The fine movement cylinder 28 retracts the rod 28a again to return the position of the auxiliary plate 26 to the base plate 21 to the initial state. Then, the film holding table 10 returns to the right side in the drawing again, the film holding table 10 releases the carrier film 1, the carrier film 1 is fed by a predetermined amount by the film erection mechanism, and the state shown in FIG. 1 is restored.

In the present embodiment, in the state shown in FIG.
From the sheet holding head 22 to the ceramic green sheet 2
a is transferred to another place (not shown), for example, a place where the laminated body in which the ceramic green sheets 2a are laminated is arranged, and the ceramic green sheet 2 is adsorbed and held as it is.
You may make it a can be piled up on the top of a laminated body. Further, as shown in FIG. 6, the sheet holding head 22 is further operated as shown in FIGS. 1, 4 and 5 while adsorbing and holding one layer of the ceramic green sheet 2a, and the second layer of the ceramic green sheet is operated. 2a is peeled from the carrier film 1 while being adhered to the lower surface of the ceramic green sheet 2a of the first layer, and the third and subsequent layers are similarly adhered. It is also possible to shape the body. However, in this case, if a predetermined pressure is required to bond the ceramic green sheets 2a to each other, a sufficient pressure is applied in the process shown in FIG. Sheet 2
a to be given to a. If heat treatment or light irradiation treatment is required to bond the ceramic green sheets 2a to each other, a heating means (heater or the like) may be built in the film holding base 10 or the sheet holding head 22 or both of them, or the film holding base 10 may be used. And sheet holding head 22
There is provided an optical opening through which light irradiation (for example, ultraviolet irradiation) can be performed.

In this embodiment, the sheet holding head 22 is connected to the ceramic green sheet layer 2 on the carrier film 1.
The sheet holding head 22 and the auxiliary plate 26 are combined and integrated with each other by the clamp device 27 in a state of being in contact with the sheet holding head 22, and the sheet holding head 22 is slightly pulled up by the fine movement cylinder 28 when the ceramic green sheet 2a is peeled off. Since the carrier film 1 and the ceramic green sheet layer 2 have a thickness
For example, even if the product type changes,
Since the operation corresponding to the thickness of the carrier film 1 and the ceramic green sheet layer 2 can be executed without adjusting the drive cylinder 25 and the fine movement cylinder 28, the operation position adjustment work becomes unnecessary and labor is reduced. Can be significantly reduced. In particular, when a large variety of small quantity production, which has been demanded in recent years, is carried out, a very remarkable effect is exhibited. Particularly, when a plurality of ceramic green sheets 2a are sequentially bonded as described in the latter half of the preceding paragraph, the number of ceramic green sheets 2a stacked on the sheet holding surface 22a of the sheet holding head 22 is As the sheet holding head 22 increases
(The position when the surface of the ceramic green sheet layer 2 on the carrier film 1 is in contact, that is, the position where the sheet holding head 22 is closest to the film holding table 21) gradually increases. Regardless of the descending position (approaching position) of the sheet holding head 22, the predetermined amount δ by the fine movement cylinder 28 can always be kept constant, so that it is possible to reliably operate without using a complicated mechanism or program. Can be made.

Further, in the present embodiment, the connecting shaft 23 is connected to the sheet holding head 22, and the connecting shaft 23 is used for guiding the contacting / separating operation (vertical movement) of the sheet holding head 22 and is connected with the clamp device 27. Therefore, it is possible to prevent the device from becoming complicated and large. As shown in FIGS. 2 and 3, as described above, the connecting shaft 23 is supported by the auxiliary plate 26, and the auxiliary plate 26 is pivotally supported by the base plate 21 to indirectly connect the auxiliary plate 26. The shaft 23 may be configured to be guided and supported in the contacting / separating direction, but unlike the above description, as shown in the schematic drawings of FIGS. 1, 4, 5, and 6, the coupling is performed. The shaft 23 directly connects to the base plate 2
It may be configured to be supported by the bearing 1 (as illustrated for convenience by omission of illustration).

In this embodiment, the drive cylinder 25, the auxiliary plate 26, the clamp device 27, and the fine movement cylinder 28 are arranged between the base plate 21 and the movable plate 24 fixed to the connecting shaft 23. The respective mechanical parts can be integrated compactly, and a space can be secured around the sheet holding head 22, so that the device can be downsized, maintainability can be improved, and the operating part can be lightened.

The sheet peeling apparatus of the present invention is not limited to the above-mentioned illustrated examples, and it goes without saying that various modifications can be made without departing from the scope of the present invention.

[0033]

As described above, according to the present invention,
When the sheet holding surface of the sheet holding member is in contact with the sheet on the carrier film, the auxiliary member is joined to the sheet holding member by the joining means, and in this state the fine movement means slightly moves the auxiliary member to slightly film the sheet holding member. By separating the sheet holding surface from the holding surface, the fine movement unit finely moves the sheet holding member via the auxiliary member with the height (approaching position) of the sheet holding member in the state where the sheet holding surface is in contact with the sheet as a reference. Therefore, regardless of the approach position of the sheet holding member,
Since the amount of movement by the fine movement means can be set independently, no complicated mechanism or program is required, and even if the approach position of the sheet holding member changes, the movement of the fine movement means is not affected at all. It is also possible to stack a plurality of sheets on the sheet holding surface of the sheet holding member.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram schematically showing an overall configuration of an embodiment of a sheet peeling device according to the present invention.

FIG. 2 is an enlarged end view showing a part of the embodiment in more detail.

FIG. 3 is a plane structure explanatory view showing a plane structure of an auxiliary plate portion in the same embodiment.

FIG. 4 is a schematic configuration diagram showing an operation state of the same embodiment.

FIG. 5 is a schematic configuration diagram showing another operation state of the same embodiment.

FIG. 6 is a schematic configuration diagram showing still another operation state of the same embodiment.

[Description of Reference Signs] 1 ... Carrier film, 2 ... Ceramic green sheet layer, 2a ... Ceramic green sheet, 10 ... Film holding base, 10a ... Film holding surface, 10b ... End portion, 11
... guide roller, 12 ... guide roller, 20 ... sheet holding mechanism, 21 ... base plate, 22 ... sheet holding head, 22a
... Seat holding surface, 23 ... Connection shaft, 24 ... Movable plate,
25 ... Drive cylinder, 25a ... Drive rod, 25b ... Elastic member, 26 ... Auxiliary plate, 27 ... Clamping device, 27a ...
Clamp member, 28 ... Fine movement cylinder, 28a ... Rod,
30 ... Cutting mechanism, 31 ... Cutter blade, 32 ... Cutter drive unit

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) B65H 41/00 H01G 4/12 364 H01G 13/00 391

Claims (6)

(57) [Claims] 1. A sheet peeling device for peeling a sheet carried on a carrier film, comprising a film holding member having a film holding surface for holding the carrier film carrying the sheet, and carrying the sheet. A film erection means for supplying the carrier film to the film holding surface, and bending and collecting the carrier film from the end of the film holding surface to the rear side of the film holding surface, and the film holding member. A sheet holding member having a sheet holding surface that is configured to be contactable and separable with respect to the film holding surface, and the film holding member and the sheet holding member are relatively in the sheet surface direction. Plane moving means for moving the sheet holding member, and a method for contacting and separating the sheet holding member with respect to the film holding member. An auxiliary member configured to be movable, a drive means for moving the sheet holding member in the contacting / separating direction, a coupling means capable of coupling the auxiliary member and the sheet holding member, and the sheet holding member A fine movement means for slightly moving the auxiliary member in a direction away from the film holding member, and in a state where the sheet holding surface is brought into contact with the sheet carried on the carrier film, by the joining means. By combining the sheet holding member and the auxiliary member and finely moving the auxiliary member together with the sheet holding member by the fine moving means as it is, the sheet held on the sheet holding surface is slightly separated from the film holding surface. In this state, the film holding unit is relatively moved with respect to the sheet holding member by the plane moving means. While moving to the opposite side of the end portion,
A sheet peeling device, characterized in that the carrier film is gradually peeled at the end portion. 2. A cutting means for cutting the sheet carried on the carrier film into a desired shape on the film holding surface according to claim 1, wherein the sheet cut by the cutting means is provided with the cutting means. A sheet peeling device configured to be held on a sheet holding surface and peeled from the carrier film. 3. The driving device according to claim 1, wherein the driving unit is configured to change a distance between the sheet holding member and a fixed base member, and the fine movement unit includes the base member and the fixed member. A sheet peeling device, characterized in that it is configured to change a distance from an auxiliary member. 4. The sheet holding member according to claim 3, wherein the sheet holding member is connected to the movable member via a connecting member extending in the contacting / separating direction, and the auxiliary member, the driving unit, and the fine moving unit are connected to the base member and the base member. A sheet peeling device, which is disposed between movable members. 5. Any one of claims 1 to 4
In the above paragraph, the sheet holding member is driven by the driving means via a connecting member guided in the contacting / separating direction, the coupling means is mounted on the auxiliary member, and the auxiliary member is held by gripping the connecting member. A sheet peeling device configured to connect a member and the sheet holding member. 6. The sheet peeling device according to claim 4, wherein the coupling means is a clamp device that clamps the connecting member.