1309446 九、發明說明： 【發明所屬之技術領域】 本發明係有關於就TAB (Tap Automated bonding，膠帶自動黏合） 膠帶、T—BGA (Tape Ball Grid Array ’ T-球格柵陣列）膠帶、CSP (Chip Size Package，晶片尺寸封裝）朦帶、ASIC (Application Specific Integrated Circuit，專用積體電路）膠帶、C0F (Chip on Film，薄膜覆晶）膠帶、雙金屬（兩面配線）朦帶（以下單以「電子 零件安裝用薄膜承載膠帶」稱之。）之電氣檢查中，用以檢出發生斷 線等缺損的配線圖案的電子零件安裝用薄膜承載膠帶的電器檢查裝置 以及電子零件安裝用薄膜承載膠帶的電氣檢查方法 【先前技術】 伴隨著電子產業的發展，安裝Ic (積體電路）和LSI (大型積體 電路）等電子零件的配線電路板的需要雖急驟增加，但期望電子機器 的小型化、輕量化以及高功能化，就這些電子零件的安裝方法，在最 近採用使用TAB膠帶、T—BGA膠帶、c〇F (ChipOnFilm)薄膜、T-BGA 膠帶以及ASIG膠帶、雙金屬（賴配線）料等的電子零制薄膜 载勝帶的安裝方式。 特別是，在使用如個人電腦等的期望高精細化、薄型化和液晶晝 ，的邊框面積窄小化的液晶顯示元件（L⑻的電子產針其重要性提 高0 、更且，在最近伴隨行動電話的顯示板彩色液晶化，電子元件安裝 用薄膜承载膠帶的需要開始大幅增加，且連接於個人電腦的印表機^ 印字，制的領域的薄膜承載膠帶需求的增加亦顯著開始增大。 製造零件安伽細承載職，—般係關如以如下所述的 取人！藉由對以如聚醯亞胺薄膜、聚醋薄膜、聚醯胺薄膜、液曰 ΐ材的絕緣薄膜進行打孔等’於絕緣薄膜的長度; ΪΪΓΐ ΐ輸送用扣鏈孔，在此絕緣薄膜的表面經由黏著劑等 ‘、、、壓著而黏著稱為電解銅箱和壓延铜箱的銅箔而形成導電層。 IP〇40101/SF-l〇83f 1309446 其次’塗敷光阻劑於此導電層上的全面 圖案形狀的光罩藉由紫外線曝光此光阻劑，具有期望 光的光阻劑部份。 s "員像液冷解去除被曝 其次’以佩_賴雜溶·學轉（ 光阻劑«轉電層，躺，簡以 形成殘留在__上的由_形成__案除去。籍此， 因而，防止因電子零件安裝時的污物 =短路，為了配_刪嫩及崎，藉由轉 =覆= 具體而言’配線圖案中，在除去連結於1(：等1309446 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to TAB (Tap Automated bonding) tape, T-BGA (Tape Ball Grid Array 'T-ball grid array) tape, CSP (Chip Size Package), ASIC (Application Specific Integrated Circuit) tape, C0F (Chip on Film) tape, bimetal (double-sided wiring) tape (the following is In the electrical inspection of electronic component mounting, the electrical inspection device for the electronic component mounting film-carrying tape for detecting the defective wiring pattern such as the wire breakage, and the film-loading tape for mounting the electronic component. Electrical inspection method [Prior technology] With the development of the electronics industry, the need to install wiring boards for electronic components such as Ic (integrated circuits) and LSIs (large integrated circuits) has increased rapidly, but it is expected to miniaturize electronic devices. Lightweight and highly functional, the use of TAB tapes has recently been used in the installation of these electronic components. T-BGA tape, c〇F (ChipOnFilm) film, tape, and T-BGA tape ASIG, bimetallic (Lai wiring) materials such as electronic parts installation system wins film carrier tape. In particular, in the case of using a liquid crystal display element (L(8), which has a narrower frame area, such as a personal computer, such as a high-definition, thinner, and liquid crystal ray, the importance of the electronic needle is increased by 0, and more recently, with the recent action. The display panel of the telephone has a color liquid crystal, and the demand for the film-carrying tape for electronic component mounting has begun to increase substantially, and the demand for the film-carrying tape in the field of the printer connected to the personal computer has also begun to increase significantly. The parts are loaded with the gantry, and the general system is as follows: by punching the insulating film such as polyimide film, polyester film, polyamide film, liquid enamel Waiting for the length of the insulating film; ΪΪΓΐ ΐ transporting the chain hole, forming a conductive layer on the surface of the insulating film by adhesive, etc., by adhering and bonding a copper foil called an electrolytic copper box and a rolled copper box IP〇40101/SF-l〇83f 1309446 Next, a full-pattern-shaped mask coated with a photoresist on this conductive layer exposes the photoresist by ultraviolet light, and has a photoresist portion of desired light. & "People like liquid cold solution is removed and exposed to the next 'to the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Therefore, it is possible to prevent contamination due to the installation of electronic components = short circuit, in order to match _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _
份和連結於外部端子的剌騎等的制，明阻= 例如網印印刷法形成阻焊劑層。 7曰《阻烊剤藉由 如此在形成阻_之後，在露㈣各5丨腳部份，例如，藉 錫鍍、金鑛和錫-船的共晶合金電鍍等，形成電子零件安農用^ :帶。再者，此電賴為了防止露出的各引腳部份的氧化和變色，且 確保在各引腳部份的接合強度而實施者。 ㈣=’f翁線裝置錄轉此電子零件安伽薄膜承載膜 帶的内引腳部上並以樹脂封裝。 /And the system of connecting to the external terminal, etc., the light resistance = for example, the screen printing method forms a solder resist layer. 7 "The resistance is formed by the formation of the resistance _ after the 5 feet of the exposed (four) parts, for example, by eutectic alloy plating of tin plating, gold ore and ship, etc., forming electronic parts for agricultural use ^ :band. Further, in order to prevent oxidation and discoloration of the exposed pin portions, the galvanic electrode is implemented by ensuring the bonding strength at each lead portion. (4) The 'f-line device is recorded on the inner lead portion of the electronic component Anga film carrying film tape and encapsulated in resin. /
又’在此種電子零件安裝用薄膜承載膠帶的製造的各製程 終製程，雜:實施品質檢查，例如配線職的品質檢查等，但與 的由人的肉眼檢查（透過光檢查）比較，就進行更具效率且正^的檢 查的方法’在最近H雜針麟於設置於電作件安裝用薄膜 承載璆帶的-面上的，進行配線的斷線、短路或鄰接配線間 的絕緣電阻之電氣檢查方法。 但疋，在此種檢查方法，就有斷線的配線而言，雖然可確實檢出， 但無法檢出因所謂破片和細線的缺損引起斷線的配線。 、因而，例如，如使用於液晶顯示元件（LCD)的情況，朝液晶面板 連結時，在隙縫部分彎曲電子零件安裝用薄膜承載膠帶而使用之際， 有發生配線斷線等的不良的問題。 不 IP040101/SF-1083f 6 1309446 n 隨著近年的電子零件安裝用_承載膠帶的薄形化進展，為 =進展配線圖案的微細間距化，有所謂由電子零件ί二: 載膠帶的彎㈣撕_彻蝴題。化獨膜承 文獻1 (特開湖―7774號公极）中，揭示可防止 帶帶不良發生的電子零件安制薄膜承載膠 如第的轩料錢贿縣娜帶的檢查裝置， 10^-06^；^ 擊 承載動的檢查台102和固定元件108之間，挾持薄膜 案2的外引腳114和116的墊部分收和U6a上，進行導通試驗。 又，在固定元件108，於補於連結有配線圖案112的電子零件的 部分的範圍，固定有用以連結_122的_ 此並使之導通的導通用端子124 台Γ，於橫過整個薄膜承載膠帶iig的寬度方向而 叹置有犬出於固疋疋件⑽側的凸部126。另— 上，以挾持此凸部126而設置凹部128。 仙疋兀件108 杳a=文獻1的檢查裝置，藉由在具有此種凸部126的檢 ϋ引腳定元件⑽之間，挾持薄膜承載膠帶110, :Γ= 墊部分114a和116a與一對探針⑽和⑽進 订接觸，且使導通用端子124接觸（著陸，landing)於内引腳⑵ 部分，在於既定錄辭f_狀態舫導通試驗。 、 =二在第7圖中，144係顯示絕緣層，⑽係顯示阻悍劑層。 藉由__性賦予f曲’可強制性地使 的配線_斷線，藉由導通繼可確實檢出不良。轉而引起斷線的 【特許文獻1】特開2003—7774公報 【發明内容】 IP040101/SF-1083f 7 1309446 在此特許文獻1所揭示力習知檢查裝置，係伽 連續進行如上述的料試驗。 T賴承»帶110 但是，對薄膜承載膠帶UG，藉由賦予彎曲，薄膜承載 不平均地延伸的狀態’在每一導通試驗測 夕 定精度降低。 又母_有差異’使反覆測 T即’如第8圖所示，在特許文獻丨的檢查裝置，藉 4126的檢查台1〇2和具有凹部128的固定元件1〇8之 ^ # =請，在於既定位置賦予„的狀態，薄膜承載膠帶= =和胸墊一和未使探针=^ 本細曝綱細_等__ 配線亦可連續且檢查精度良好地實鱗通試驗等 =零件安裝用薄膜承載膠帶的電氣檢查裝置 =安= 膜承載膠帶的電氣檢查方法。 电譯件女裝用4 特徵2前雜技細树㈣确的發明，其 紐錄置具備： 置的強制料部、女仙細承載膠一配線《的強制彎曲裝 和配置於前述強制彎曲部的下游側，使一對探 =薄縣娜帶馳細案，_紙_義導《ί的 徵係的電氣檢查方法之特 的配線圖⑽㈣料子零件絲用雜承載膠帶 胃製程之後’使—對探測針接觸於電子零件安裝用 溥齡載膠_配線_，而檢出配線圖案的導通狀態的電氣檢查製 IP040101/SF-l〇83f 1309446 程 如此藉由構成，在強制弯曲部 電子零件安裳用薄膜承載膠帶的配線圖案f二!1 ⑽部分（拉回 ^ 斷線的配線圖案強制斷線。 叫缺鱗的具有 氣檢查部ΐ的㈣（在回復原來狀態的狀態），在電 線圖案，=====細娜_膠帶的配 因此’在電氣檢查之際，藉由賦予彎曲， 膠帶係f曲被解除的狀態，亦 1相承載 針的接觸位置（菩陳來狀紅狀態。因而，探測 特別是在外引腳的不會偏移，使探測針可正確接觸配線圖案， 也不縣娜帶卻在導賴驗巾成料通不良， 會破觸為不良品，可極為提升檢查的精度。 構成t，在本發明’魏_f鱗的_彎趙㈣由下列部件所 在前述電子零件安剌_承載膠㈣上下方向的—侧， ϊ=:薄;承載膠帶的長軸方向以-定距離間隔所配置的二對第1 二裝用薄膜承载膠帶的上下方向的另H為位 ;别述對第1犬出部件之間而配置的第2突出部件； 餘一對第1突出部件和第2突出部件，藉由從上下方向挾 、’ 裝用薄膜承載膠帶的酉&線_，齡jf曲配線圖案。 ^冓成如此，藉由—對第丨突出部件和第2突出部件，藉由從 _安…持電子零件安褒用薄膜承载膠帶的配線圖案，強制彎曲配 ^择實強制使因缺損等帶有斷線的配線圖案斷線，藉由導通 試驗可確實檢出不良。 又，在本發日月，其特徵為前述一對第】突出部件和第2突出部件 IP040101/SF-1083f 9 1309446 的至少一方係滾輪。 線圖素的達士以丨， 膜承载膠f不使絕緣薄膜以及構成配 (Γ產生塑性變形，商品性不會減低，且回復原 无的狀態，可實施正確的電氣檢查。 特徵係在子零件安裝用薄膜承載膠帶的電氣檢查袭置，其 腊“ w述強制考曲部中’具備於彎曲之， 膜承載膠”麻伸力的拉伸力貞餘置。代子零件女裝用薄 特徵^=的\子零件钱㈣縣讎帶的魏檢查方法，其 對電子零件峨4，謂曲之際， 在彎ϊ:Γ=ΐ於藉由拉伸力負載裝置，可正確進行定位，且 _可確安制_承載科進—步負載拉伸力， 通試驗可損引起之帶有斷線的配線圖案斷線，藉由導 特徵：:ίΐ=:零件安裝用薄膜承載膠帶的電氣檢查裝置，其 料科i ’ 1發_電子零件安㈣_承娜帶的魏檢查方法，立 膜承^:==r裝置，係對電子零她薄 =彎曲部（f曲製程）中的拉伸力負載裝置，因為係浮動滚輪， 膜承重量，在㈣之際’可職子零件安裝用薄 有斷線的配線_斷線，藉由導通試驗可確實檢料良㈣起之帶 =且’藉由調整浮動滚輪的重量，在f曲之際，可對 i/' 膠帶負載既定的拉伸力，所以薄膜承载谬帶不會過度被 ^緣賴以及構成配線圖案的導電材 ^ 會產生難_，私財轉低，朗復麟驗態及=^ IP040101/SF-l〇83f 1309446 電氣檢查。 ·’ i發明輯子零件安裝用薄膜承載膠帶的電氣檢查裝置，其 田:…祕電氣檢查辦，具備於電紐查之際，對電子零件安裝 用溥膜承_帶貞齡伸力的鱗力貞載裝置。 顧ί ·’if?的電子零件安裝用薄膜承載膠帶的電氣檢查方法，其 對i子烫杜=檢查製程中，藉由拉伸力負載裝置，在電氣檢查之際， 對電^零件女裝用薄膜承載膠帶負载拉伸力。 膠帶，在電綠查之際，谓€子料安朗薄膜承載 ί程）'中赋ί變曲伸力，所以在電氣檢查之際，藉由在弯曲部（彎曲 中賦予曾曲，不平均延伸的薄膜承載膠帶成為回復到原來狀態 既;rΓ11檢查之際，由於對電子零件絲_縣餅帶負載 =:='在彎曲部(f曲製輕)中，被強制斷線的配線彼 而且’職被_斷線的具有斷、_配線不再接觸=^一 檢查之際，沒有不良品誤為電氣檢查合格之虞。 電乳 又’本發明的電子零件安裝用簿 特齡前麵議的㈣力 膠帶賦予拉伸力的浮動滾輪。电千零件文裝用薄膜承載 又，本發明的電子零件安裝用薄膜 :徵係:前述電氣檢查部的拉伸力負載裝置:係:=: 裳置和支持於前述細承載膠帶支持I 、 π支持 膠帶賦予拉伸力的浮動滾輪。 、·彳絲用薄膜承載 藉由如此構成，藉由薄膜承载膠帶支掊 帶的狀態，藉由浮動滚輪，藉由浮動滾於的’在支持薄膜承載膠 用薄膜承載膠帶負載既定的拉伸力。、$’可對電子零件安裝 IP040101/SF - l〇83f 11 1309446 藉此，在電氣檢查之際，在彎曲部（f曲製程）中藉由賦 不平均延伸的薄膜承載膠帶，在正確位置，成為回復原來狀離 因而，探測針的接觸位置（著陸位置）不偏移，配線圖案，特；^ 外引腳的塾部分，可正確接觸探測針，可實施正確的電氣檢疋在 又，在電氣檢查之際，由於對電子零件安裝用薄 ^ 此之間，«驗查之際不再連接（_)轉絲伸狀離。 因而’由於触麟線的具麵線的配線可防接 檢查之際，沒有不良品被誤為電氣檢查合格之虞。碼故電乳 更且，在本發明，其特徵為前述一對第丨突出部件係配 ^挾持電子料絲㈣麻娜帶_、畴分的位置:7 3部件，伽舰繼物刪縣瓣的隙縫部= 藉=此種構成，特別是’使用於液晶顯示元件⑽）之隙 ’对如以彎曲狀態使用的例如ΤΑβ膠帶和ot等之中，制二 存在於隙縫部分的配線圖案。 丨彎曲 =此’錢狀職f曲之料部分的配 ====rr，_試二 斷線。 4曲之際，隙縫部分的配線圖案可防止 祕二f祕查之際’除了上述的導通試驗以外，例如在鄰接 ^塾間施加錄，村紐檢錄轉的 丨 查，但因為在此際墊和探測針的接觸 ㈣'，·、的鈕路檢 可實施正確的短路檢查。 （者陸位置）不偏移，所以 藉由本個，在強卿轉（㈣製程）巾， 腳之間）的配麵，可強制咖（㈣腳和外引 因而，之後，職予此種贊曲，;起之具有斷線的配線斷線。 膜承綱泰纖_ (_==== ff040101/SF-l〇83f 12 1309446 ，部（電氣檢查製程）中，負载—定拉伸力於薄膜承載膠帶的配線圖 ^上，被_斷線_線成為不再連接，使—對探騎接觸於配 案，可檢出配線的導通狀態。 良圃 在電祕查之際，藉由賦予彎曲，不均等延伸的薄膜承载 膠π成為解除彎曲的狀態，亦即回復原始狀態之狀態。因而，探測: =接觸位置（著陸位置）不偏移，配線圖案，特別是在外引腳的塾 为，可正確接觸探測針。 Η 因此，原來正常的薄膜承載膠帶卻在導通試驗中形成導通不良 者，不被判斷為不良品，可極為提升檢查的精度。 【實施方式】 以下’基於圖式更詳細說明本發明的實施型態（實施例）。 =1圖縣發_電子零件安伽細承載 檢查裝置的概略圓。 电軋 =1()，轉子轉絲麵承讎帶的電氣檢查裝 置整體（以下’皁以「檢查裝置」稱之）。 、英雷不:檢查裝置10從未圖示的送出機構的捲筒，連續輸 =，择_縣娜帶12，通過強崎鱗14和電氣檢查部 捲取於未圖示的捲取機構的捲筒而構成。 面成t上子料錄_縣_㈣的配線圖案 強制f曲部14具備有強制彎曲裝置18，此強制彎 1圖不的驅動機構藉由上下移動可相互接近和離開的上^之^ 方彎曲部件20和下方彎曲部件22構成。 十上 早件2°的下端’具備由以一定間隔隔開而被配置於電 ㈣！ 12的長軸方向的—對滾輪24和26所構成 IP040101/SF-1083f 13 砌9446 ，如此構成的強制彎曲部14 ’如第i圖所示，5t過配設於強制 处:4内的浮動滾輪和反張力齒輪般的張力賤予裝置4Q和驅動滾輪 栽2 ί際姻雜42的轉暫時被敍，電子零件絲用薄膜承 戟膠τ 12的輸送暫時停止而定位。 5 22孫^ ’如第2 ®所示，藉由義上謂曲部件20和下方彎曲部件 24 f成為於相互接近的方向，藉由第1突出部件28、3〇的一對滾輪 安1用2 2突出部件34的滾輪32 ’藉由從上下方向挾持電子“ 戍装用薄膜承載膠帶12的配線圖案36，強制彎曲⑽配線圖案％而 制此構成，在錄f_ 14中，藉如強構錄置18強 2電子零件钱用_承娜帶12的輯圖案36，制是原本配 =度細而容鱗線的輸出侧的内引腳和外引腳之間的配線圖案，可 制使因缺損等引起之具有斷線的配線圖案斷線。 丹者，此種情況，這些的滾輪 丨刪 .工π二…很饰Μ π邗此的尺寸，雖然、； 疋，但是考慮上述的強制斷線效果，其直徑希望為約4〜10刪。 又，在此實施例的情j:兄，以一對滾輪24和26構成第i突出部件 0和30 ’且以滾輪32構成第2突出部件34。 載膻^藉由以滾輪構成突出部件，藉由摩擦阻力，不過分拉伸薄膜承 ^ v 2 ’使構成電子零件安裝用薄膜承載膠帶12的絕緣薄膜私以 /冓成配線圖案36的導電材料（銅）和阻焊劑層80不會產生塑性變 少，商品性不會降低，於回復原來狀態，可實施正確的電氣檢查。 然而’如n不過分拉伸細承獅帶12，不使财電子零件 裝用薄縣讎帶12的絕緣雜44以及構成自遞圖案36的導電材 =(銅）產生塑性變形，就可代替滚輪，例如如第3圖所示，可由突 ^ 46、48和50構成這些第j突出部件28、3〇和第2突出部件料。更 ’可適當使這些滾輪、突部組合而使用。 又，在此實施例，雖然於上方彎曲部件2〇側，設置第i突出部件 和30，於下方彎曲部件22側，設置第2突出部件科，但是相反地， 苐6圖所不，亦可在上方彎曲部件2〇側，設置第2突出部件料，在 IP040101/SF-lO83f 14 1309446 下方彎曲部件22侧，設置第1突出部件28和30。 藉由如此第6 ®獅的構成，可更確實 的配f _線。_，在此軌，可魏張力賦具有斷線 更且，就設置這些第i突出部件28、3 二置40。 的_ ’可位於配線圖案36，特H«帶12 定的部麵配置，但沒有特麻定。㈣聊和外㈣之間的既 部件如此’可複數部位組合設置第1突出部件28、3G和第2突出 於液2 ’第4 ®翻示作為電子零件錄_膜承娜帶12而使用 =曰:树⑽）之在_分54中，以彎_使用 ^ ί ’It’ 52躲科_，54縣稀縫，56係表示 嶋示=Γ6°係表示形成於外引腳52的試一 載膠帶12的情況，如在第4圖的一 點，線所不’-對第丨如部件28和3Q被配置於挾持電子 用薄膜承載膠帶12的隙縫部分54的位置。因而，如以第4圖的二點 第2突出部件34希魏置位於對應電子料絲用薄膜承 載膠π 12的隙缝部份54的位置。 如此’由對應於位於挾持電子零件安裝用薄膜承載膠帶12的隙縫 部分54的位置所配置之-對第丨突料件28、3Q與配置於對^= 縫部分54的位置的第2突出部件34所構成的組合，可複數組設於對 應於電子零件安裝用_承娜帶12 _縫部分54的配置位置。、 、藉由如此構成，特別是，使用於液晶顯示元件（LCD)之在隙縫部 釦中，以彎曲狀態被使用之例如在TAB膠帶和c〇F膠帶中，可彎曲隙 縫部分54以及存在於其周邊的配線圖案36。 因此，在使用之際被彎曲的隙縫部分54以及其周邊的配線圖案 中，可使因缺損等引起之具有斷線的配線確實強制斷線，因為可藉由 導通試驗確實檢出不良，所以在使用之際在彎曲之際，可防止隙缝部 IP040101/SF-1083f 15 1309446 分54以及其周邊的配線圖案斷線。 ^，在強制彎曲部14中，藉由強制彎曲裝置Μ 娜㈣猶_ _雜爾 =ί 導引滾輪68，而被輸送至ϋ檢查部f/4之後’通過洋動滾輪66和 她ΐ ’上述的浮動滾輪66在強靖曲部Μ中，於f曲之際，可作 料絲簡縣餅帶12 __力的⑽力貞錄置^ 亦即’藉由拉伸力負載裝置7〇 ,於.彎曲之際，因為 薄膜承載膠帶12進而負載拉伸力，所以可使因缺損等引起之I 有斷線的配線圖案36確實強制斷線，可藉由導通試驗確實檢出不卜、 另-方面’被輸送於電氣檢查部16的電子零件安裝用薄膜承載义膠 賦予彎曲’在使具有斷線的配線圖案強制斷線的薄膜承載 ^的料解除的狀態（在回復原來狀態的狀態），在電氣檢查部16 中，使-對探測針接觸於電子零件安裝用薄膜承載膠帶12的輸入側以 及輸出侧的配線圖案36，而檢出配線圖案36的導通狀態。 又，在電氣檢查部16的電氣檢查之際，因為對電子零件安裝用薄 縣載膠帶12藉由如後述之拉伸力貞棘置84賴既定的拉^力， 所以在強制彎曲部14中，被強制斷線的配線彼此間，在電氣檢查之際 不再連接（接觸）而維持拉伸的狀態。 因而，由於可防止具有被強制斷線的配線再接觸，所以在電氣檢 查部16的電氣檢查之際，沒有不良品被誤認為電氣檢查合格之虞。 亦即，此電氣檢查部16如第1圖以及第5圖所示，在電氣檢查部 16，設置下檢查台72和固定一對探測針74、76的上檢查台78。 這些下檢查台72和上檢查台78係可上下移動，例如上檢查台78 下降後，僅藉由上升下檢查台72,在下檢查台72和上檢查台78之間， 挾持並固定薄膜承載膠帶12。 因而，使一對探測針74和76接觸於薄膜承載膠帶12的配線圖案 IP040101/SF-1083f 16 1309446 的=引腳52的測試墊部分6〇，藉由在兩個探測針74和76之間設置的 測疋器71和73，進行導通試驗，可檢查斷線的有無。又，此種導通試 驗可連接不斷進行配線更換。 再者，在配線幅度大的情況，例如在輸入側的外引腳部因為可使 直接配線地接觸探測針74或76 ,所以測試墊部分6〇可省略。 又，在上檢查台78，在面向連接有配線圖案的電子零件的部分的 =引腳58的部分的範圍，固定有用以使内引腳58的配線彼此連接並 ，通的導通用端子81，例如，導電橡膠棒。再者，此導電用端子& 由接地線85接地。 曰 ，而’在電氣檢查部16，於下檢查台72和上檢查台Μ之間，藉 獅ί!膜承載膠帶12 ’使一聰測針74和76接觸於外引腳52的測 U·60 ’且使導通用端子81接觸於内引腳58的部分(著陸)，而 ¥通試驗。 用薄部16 ’賤有於魏齡之際，縣子零件安裝 #膜承帶12貞錄伸力的拉伸力練裝置84。 載膠袭置％係由薄膜承載膠帶支持裝置86和被薄膜承 力的上述浮動滾輪66f=子零件安裝用薄膜承載膠帶12賦予拉伸 ««：：：：： ； 86 5 輪?丨n L τ對電子零件女裝用溥臈承載膠帶12的扣鏈齒 設止成。再者，，卡止繼， Ϊ支持電子零件安裝用薄膜承載膠帶12。 承載若為可支持電子零件安裝用薄膜 這種卡止部件88。’、过驗輪或驅動齒輪等構成，而不限於 送，藉軸承_帶12的輪 __，藉由浮動 IP040101/SF-1083f 17 1309446 用薄膜承载膠帶12的位置，且對電子零件安裝_膜承載 膠帶12負载既定的拉伸力。 藉此，在電氣檢查之際，藉由在強制彎曲部14中賦予彎曲，不平 峨用薄膜承載膠帶12位於正確的位置，成為回復 膜承載^帶且’在電氣檢查之際’由於對電子零件安裝用薄 的配線舰之間，在魏檢查之際不再連接（_)轉持拉伸狀 接觸於配绩2針的接觸裝置（著陸位置）不偏離，探測針可正確地 接觸^線圖案，_是在外引_墊部分，可實施正麵電氣檢查。 柚二Ϊ況，封慮使由浮動滾輪66的重量和由此種拉伸的不平均延 ===12酬恤嫌^㈣靖線的配線 i此間在電讀查之際不再連接（接觸） 動滾輪66的重量希望較好為⑽〜刚g。浮動 崎，無法期待上述的再連接防止效 «右輕於 帶12 使顧轩料絲闕膜承载膠 及構成配線e#36w_ (銅）產生塑性 再者，在此實施例’在弯曲以及電氣檢查之際 薄膜承赫帶12上，軸使用浮動滾輪66，但亦可 不限疋於此，例如，亦可以二組的 ，^ =，帶12，藉由於使相互離開的方向移動， 零件安裝用薄膜承載踢帶12。 貞戰拉伸力於電子 如此，在電氣檢查部16進行導通試驗後，如第 件安裝用薄膜承载谬帶12經由引導滚輪9〇和浮動滾:不=零 圖未不的絲機_捲筒❿構成。 被捲取於 使用如第1圖所示的本發明的檢查装置1〇，如 ^為LCD被使用的寬度35mm和厚度乃刪的聚醒亞胺製絕緣的= 形成有厚度12_的銅配線的所謂軟性ΤΑβ膠帶12、，將配線圖^ IP040101/SF-1083f 18 1309446 面作為上面，進行電氣檢查。 浮動滾輪66和92任一 再者，強制彎曲部14的滾輪直徑係6_， 個皆使用l〇〇g的重量。 實施例2 6圖所不，使用具有在上方彎曲部件2〇侧設置第2突出部件 下方彎曲部件22侧設置第1突出部件28、3〇的強制彎曲部14 於發明的檢查裝置1〇，進行電子零件安裝㈣膜承娜帶12的電氣 桧杳。 “實施例1和2，相較於使用習知檢查裝置的電氣檢查方法，不良率 亦即原來為正常品卻目膠帶位置偏移而被麟為不良品 者得以減少6G%，而使正確且可信綱魏檢麵得可能。又，可確 實防止被強綱線的強綱線品的配線的再連接，向半導體晶體安裝 製程的不良流出率亦比習知品的不良流鲜減少約2〇%。 以上，雖然說明本發明的較佳實施態樣，但是本發明不限於此， 例如，在上述實施例，雖然可適用於安裝電子零件前的電子零件安裝 用薄膜承載膠帶12，但在使用片狀薄膜的FPC和使用半導體晶體安裝 後的電子零件安裝用薄膜承載膠帶的半導體裝置的電氣檢查亦可使^ 等’在不跳脫本發明的目的的範圍亦可有種種變更。 【圖式簡單說明】 第1圖係本發明的電子零件安装用薄膜承載膠帶的實施例的電氣檢查 裝置的概略圖。 ”— 第.2圖係說明第1圖的電氣檢查裝置的強制彎曲部14的彎曲狀態的概 略圖。 〜 第3圖係顯示第1圖的電氣檢查裝置的強制彎曲部14的另一實施例的 概略圖。 、 第4圖係顯示在本發明使用的電子零件安裝用薄膜承载膠帶12的一實 施例的上視圖。 第5圖係說明第1圖的電氣檢查裝置的電氣檢查部16的彎曲狀鮮的概 略圖。 IP040101/SF-1083f 19 1309446 第6圖係說明第1圖的電氣檢查裝置的強制彎曲部14的另一實施例的 彎曲狀態的概略圖。 第7圖係說明習知電氣檢查裝置的概略圖。 第8圖係說明習知電氣檢查裝置的概略圖。 【主要元件符號說明】 10 檢查裝置 12 電子零件安裝用薄膜承載膠帶 14 強制彎曲部 16 電氣檢查部 18 裝置 20 上方彎曲部件 22 下方彎曲部件 24、 26 滾輪 28 第1突出部件 32 滾輪 34 第2突出部件 36 配線圖案 40 浮動滾輪 42 驅動滾輪 44 絕緣薄膜 46、 48、50突部 52 外引腳 54 隙縫部分 58 内引腳 60 測試墊部分 62 扣鏈齒孔 64 引導滾輪 66 浮動滾輪 68 引導滾輪 IP040101/SF-1083f 20 1309446In addition, in the process of manufacturing such a film-carrying tape for mounting electronic components, we perform quality inspections, such as quality inspections of wiring posts, but compared with human visual inspection (light inspection). The method of performing more efficient and positive inspections has recently been performed on the surface of the film-carrying tape for mounting of electric components, and the wiring is broken, short-circuited, or insulated between adjacent wirings. Electrical inspection method. However, in such an inspection method, the wiring having the broken wire can be reliably detected, but the wire broken due to the defect of the so-called fragment and the thin wire cannot be detected. For example, when it is used for a liquid crystal display device (LCD), when the liquid crystal panel is connected to the liquid crystal panel, when the film-loading tape for electronic component mounting is bent and used in the slit portion, there is a problem that wiring is broken or the like. IP040101/SF-1083f 6 1309446 n With the progress of the thinning of the carrier tape for the mounting of electronic components in recent years, the fine pitch of the wiring pattern is changed, and the so-called electronic component ί2: tearing of the tape (four) _ complete the problem. In the literature 1 (Special Kaikai Lake - No. 7774), we revealed that the electronic parts that can prevent the occurrence of belt defects are made of film-loading adhesives such as the inspection equipment of the first Xuanyuan Qianbo County Na belt, 10^- 06^; ^ between the load-bearing inspection table 102 and the fixing member 108, the pad portion of the outer leads 114 and 116 of the holding film case 2 is received on the U6a to conduct a conduction test. Further, in the range of the fixing member 108 that is filled in the portion of the electronic component to which the wiring pattern 112 is connected, the conductive terminal 124 that is connected to the _122 and is electrically connected is fixed to the entire film carrier. The width direction of the tape iig sighs the convex portion 126 on the side of the solid member (10). On the other hand, the concave portion 128 is provided to hold the convex portion 126. The enamel member 108 杳a = the inspection device of Document 1, by holding the film carrying tape 110 between the inspection pin fixing members (10) having such convex portions 126, Γ = pad portions 114a and 116a and one The probes (10) and (10) are in contact with each other, and the common terminal 124 is brought into contact with the inner pin (2) portion in the predetermined recording f_state 舫 conduction test. , = 2 In Figure 7, 144 shows the insulating layer, and (10) shows the barrier layer. The wiring_breaking which can be forcibly made by the __ property imparting the f-curve can be reliably detected by conduction. In the case of the above-mentioned material test, the force inspection device disclosed in Patent Document 1 is continually subjected to the above-described material test. . However, in the film carrying tape UG, the state in which the film load is unevenly extended by imparting bending is reduced in the accuracy of each conduction test. The mother _ has a difference 'to make a reverse T test', as shown in Fig. 8, in the inspection device of the franchise document, the inspection table 1 〇 2 of 4126 and the fixing element 1 〇 8 with the concave portion 128 # = please In the state where the given position is given, the film carrying tape == and the chest pad one and the probe == this thin exposure detail _, etc. __ The wiring can also be continuous and the inspection accuracy is good. Electrical inspection device for mounting film-carrying tape = An = Electrical inspection method for film-carrying tape. Electric translation for women's clothing 4 Features 2 Pre-acrobatics fine trees (4) Indeed, the new record has: The female concealed carrier-loaded rubber wiring is forcedly bent and placed on the downstream side of the above-mentioned forced bending portion, so that a pair of probes = thin county Na-Chi, and the electrical inspection method of the _ paper_yidao (4) Wiring diagram (10) (4) After the gas processing of the material component wire, the electrical inspection system IP040101/ is used to detect the conduction state of the wiring pattern after the probe is in contact with the electronic component mounting age-based adhesive_wiring_ SF-l〇83f 1309446 is thus constructed by force The wiring pattern of the film-bearing tape for the electronic parts of the curved part f 2! 1 (10) part (pull back ^ The wire pattern of the broken wire is forcibly broken. The gas inspection part of the missing scale is called (4) (in the state of returning to the original state) ), in the wire pattern, ===== pinna _ tape is equipped as a result of 'in the electrical inspection, by giving the bend, the tape is released, and the contact position of the 1-phase bearing needle Therefore, the detection is not in the outer pin, so that the probe pin can be properly contacted with the wiring pattern, and the non-professional tape is inferior to the test towel, which may be broken into defective products. The accuracy of the inspection can be greatly improved. The composition t, in the invention, the "wei_f scale" _ bend Zhao (four) from the following parts of the aforementioned electronic parts ampere _ bearing adhesive (four) up and down direction - side, ϊ =: thin; carrying tape The long axis direction of the two pairs of the first two-use film-carrying tape disposed at a predetermined distance is in the vertical direction; the second protruding member disposed between the first canine members; a pair of first protruding members and second protruding members, from above to below挟, ' 酉 amp amp 薄膜 装 装 装 装 装 装 装 装 装 装 装 装 装 装 装 装 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜配线Use the wiring pattern of the film-carrying tape, and force the bending to force the wiring pattern with broken wires, such as defects, to be broken, and the continuity test can be used to detect the defects. In addition, the characteristics of the day and month are At least one of the pair of first protruding members and the second protruding member IP040101/SF-1083f 9 1309446 is a roller. The wire of the wire is 丨, the film carrying adhesive f does not make the insulating film and the composition (Γ plasticity) Deformation, the commerciality will not be reduced, and the original state will be restored, and a correct electrical inspection can be performed. The feature is placed in the electrical inspection of the film-carrying tape for sub-assembly mounting, and the wax is "in the mandatory test section", which is provided in the bending, and the tensile force of the film-carrying rubber is increased. The sub-components women's thin features ^= \ sub-parts money (four) county 雠 belt Wei inspection method, its electronic parts 峨 4, predicate, in the bend: Γ = ΐ by tensile force load The device can be correctly positioned, and the _ can be surely installed _ carrying the section into the load tensile force, and the wiring pattern with broken wire caused by the test can be broken, by the guiding feature:: ΐ ΐ =: part The electrical inspection device for mounting the film-carrying tape, the material inspection i '1 hair _ electronic parts An (four) _ Cheng Na belt Wei inspection method, the vertical film bearing ^: == r device, the pair of electronic zero she thin = bending The tensile force load device in the (f-curve process) is a floating roller and a film-bearing weight. In the case of (4), the wiring of the serviceable sub-assembly is broken and disconnected, and the continuity test can be confirmed by the continuity test. The material is good (four) from the belt = and 'by adjusting the weight of the floating roller, at the time of f curvature, the i/' tape can be loaded with a predetermined tensile force, so the film carrying the belt will not be excessively affected and composed. The wiring pattern of the conductive material ^ will be difficult _, private wealth turn low, Long Fu Lin verification and = ^ IP040101 / SF-l 〇 83f 1309446 electrical an examination. · 'I invented the electrical inspection device for the film-carrying tape for the installation of the parts, the field:...The secret electrical inspection office, which is equipped with the enamel film for the installation of electronic components. Load device. Guί · 'if? The electrical inspection method for the film-carrying tape for electronic component mounting, which is for the i-hot stamping = inspection process, by the tensile force load device, at the time of the electrical inspection, Load the tensile force with a film carrying tape. Tape, in the case of electric green check, that is, the material of the Anlang film carries ί Cheng) 'Zhong Fu ¡ 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲 曲The extended film-carrying tape is returned to the original state; when the rΓ11 is inspected, the wire is forcibly disconnected due to the load on the electronic part wire_==== in the curved portion (f-light) "Occupation of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ (4) The floating roller for imparting tensile force to the force tape. The film for carrying the electronic component is mounted on the film, and the film for mounting the electronic component of the present invention: the tensile force load device of the electrical inspection unit::: The floating bearing roller supporting the I and π supporting tapes to support the stretching force is supported by the above-mentioned fine carrier tape. The film bearing is carried out by the film carrying tape, and the state of the tape is supported by the film carrying tape. , by floating in the 'supporting film bearing The film is loaded with a film carrying tape to load a predetermined tensile force. $' can be installed on the electronic parts IP040101/SF - l〇83f 11 1309446, thereby making it possible to bend in the bending part (f-curve process) during the electrical inspection. The unevenly stretched film-carrying tape is returned to the original position at the correct position, so that the contact position (landing position) of the probe pin is not offset, the wiring pattern, and the 塾 portion of the outer pin can correctly contact the probe pin. It is possible to carry out the correct electrical inspection. In addition, during the electrical inspection, due to the installation of thin parts for electronic parts, the inspection is no longer connected (_) the wire is stretched away. When the wiring of the upper line of the lining line can be prevented from being inspected, no defective product is mistaken for the electrical inspection. The code is more electric, and in the present invention, the pair of the first protruding members are matched. ^ Holding the electronic filament (4) Ma Na belt _, the position of the domain: 7 3 parts, the gap of the singularity of the singularity of the sneakers = l = such a composition, especially the 'slot used in the liquid crystal display element (10)) For example, ΤΑβ tape used in a bent state And ot, etc., a wiring pattern existing in the slit portion.丨Bend = This is the part of the material of the money-like job. ====rr, _ test 2 is broken. At the time of the four songs, the wiring pattern of the slit portion can prevent the second secret of the secret. In addition to the above-mentioned conduction test, for example, the recording is carried out in the adjacent area, and the inspection of the village is checked, but because of the The contact with the probe (4) ', ·, the button test can carry out the correct short circuit check. (The location of the land) is not offset, so with this, in the strong (transfer) ((4) process), the matching surface of the towel, can force the coffee ((four) feet and external guidance, then, after the job, like this曲,;The wire breakage with broken wire. The film is under the order of _ (_==== ff040101/SF-l〇83f 12 1309446, part (electrical inspection process), load-fixed tensile force On the wiring diagram of the film-carrying tape, the _ disconnection _ line becomes no longer connected, so that the contact state of the wiring can be detected when the probe is in contact with the matching case. The curved, unevenly extending film-carrying adhesive π is in a state of releasing the bending, that is, returning to the original state. Therefore, the detection: = the contact position (landing position) is not offset, and the wiring pattern, especially at the outer pin is Therefore, the probe can be properly contacted. Η Therefore, the original film-carrying tape has a poor conduction in the conduction test, and is not judged to be a defective product, which can greatly improve the accuracy of the inspection. [Embodiment] The following is based on the figure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Example: =1 图县发_ The outline of the electronic component Anga fine load inspection device. Electric rolling = 1 (), the electrical inspection device of the rotor transfer surface bearing belt (the following 'soap is called "inspection device" In the inspection device 10, the reel of the delivery mechanism (not shown) is continuously outputted, and the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The wire pattern of the mechanism is taken up. The wiring pattern of the sub-item___4 is forced to have the forced bending device 18, and the driving mechanism of the forced bending 1 is close to each other by moving up and down. And the lower curved part 20 and the lower curved part 22 which are separated from each other. The lower end of the first upper part of the first part has a long axis direction which is arranged at a constant interval and is disposed in the long axis direction of the electric (four)! 24 and 26 constitute IP040101/SF-1083f 13 slab 9446, and the forced bending portion 14' thus constructed is as shown in Fig. i, and 5t is disposed at the forcing position: the tension roller in the 4: the tension 贱 like the back tension gear 贱The device 4Q and the drive roller planted 2 ί 姻 姻 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 42 The conveyance of the rubber-coated rubber τ 12 is temporarily stopped and positioned. 5 22 Sun ^ ' As shown in the second ® , the first pre-curved member 20 and the lower curved member 24 f are in a direction close to each other by the first protrusion The pair of roller members 1 of the members 28 and 3 are formed by the roller 32' of the 2 2 protruding members 34 by holding the wiring pattern 36 of the electronic film-loading tape 12 for the armor from the vertical direction, forcibly bending (10) the wiring pattern %. In the record f_ 14, by the strong record of the 18 strong 2 electronic parts money with _ Cheng Na with 12 series of pattern 36, the system is the original with the = fine and the scale of the output side of the inner side of the pin and outside The wiring pattern between the pins can be used to break the wiring pattern having a broken line due to a defect or the like. Dan, in this case, these rollers are deleted. The work π two... very decorative Μ 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗 邗Further, in the case of this embodiment, the pair of rollers 24 and 26 constitute the i-th protruding members 0 and 30', and the roller 32 constitutes the second projecting member 34. By using the roller to constitute the protruding member, the conductive film constituting the film carrying tape 12 for mounting the electronic component is privately formed into the conductive material of the wiring pattern 36 by the frictional resistance without excessively stretching the film. (Copper) and the solder resist layer 80 do not cause less plasticity, and the commercial properties are not lowered, and the correct electrical inspection can be performed after returning to the original state. However, if n is not excessively stretched, the lion belt 12 is not excessively used, and the insulating material 44 of the thin county belt 12 and the conductive material constituting the self-reporting pattern = (copper) are plastically deformed. The roller, for example, as shown in Fig. 3, may constitute the j-th protruding members 28, 3 and the second protruding member by the projections 46, 48 and 50. Further, these rollers and projections can be used in combination as appropriate. Further, in this embodiment, the i-th protruding member and the 30 are provided on the side of the upper curved member 2, and the second protruding member is provided on the lower curved member 22 side, but conversely, the figure 6 is not On the side of the upper curved member 2, a second projecting member is provided, and the first projecting members 28 and 30 are provided on the side of the bent member 22 under the IP040101/SF-lO83f 14 1309446. With the composition of the 6th lion, the f _ line can be more reliably matched. _, in this track, the Wei tension can be broken, and the second i-th protruding members 28, 3 are placed at 40. The _ ' can be located in the wiring pattern 36, and the special H « belt 12 is set in the face, but there is no special setting. (4) The two parts between the chat and the outer (four) are so that the 'multiple parts can be combined to set the first protruding parts 28, 3G and the second one in the liquid 2' 4th ® as the electronic parts record _ film Chengna belt 12 and use =曰: tree (10)) in _ minute 54, with bend _ use ^ ί 'It' 52 hide _, 54 county sparse seam, 56 series indicate Γ = Γ 6 ° means the test formed on the outer pin 52 In the case of the tape 12, as in the point of Fig. 4, the wires are not disposed at positions where the members 28 and 3Q are disposed at the slit portion 54 of the film-carrying tape 12 for holding electrons. Therefore, as shown in Fig. 4, the second projecting member 34 is placed at a position corresponding to the slit portion 54 of the film-loading adhesive π 12 for the electronic wire. Thus, the second projecting member 28, 3Q and the second projecting member disposed at the position of the slit portion 54 are disposed by the position corresponding to the slit portion 54 of the film carrying tape 12 for holding the electronic component mounting. The combination of 34 is arbitrarily arranged in an arrangement position corresponding to the mounting portion 12 of the electronic component. And, in this way, in particular, used in a slit portion of a liquid crystal display element (LCD), used in a bent state, for example, in a TAB tape and a c〇F tape, a bendable slit portion 54 and present in The wiring pattern 36 around it. Therefore, in the slit portion 54 which is bent at the time of use and the wiring pattern in the periphery thereof, the wiring having the disconnection due to the defect or the like can be forcibly disconnected, since the defect can be reliably detected by the conduction test, At the time of use, it is possible to prevent the gap pattern IP040101/SF-1083f 15 1309446 minute 54 and the wiring pattern around it from being broken. ^, in the forced bending portion 14, by the forced bending device Μ娜(4) _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The floating roller 66 described above can be used as a (10) force recording device for the silk cake of the Jianxian County during the f-curve, that is, by the tensile force load device 7〇, At the time of bending, since the film carrying tape 12 is further loaded with the tensile force, the wiring pattern 36 which is broken due to the defect or the like can be forcibly disconnected, and can be detected by the conduction test. In the state in which the film carrying the electronic component mounting is carried by the electrical inspection unit 16 and the material of the film carrying the wire having the broken wire is forcibly disconnected (in the state of returning to the original state) In the electrical inspection unit 16, the pair of probe pins are brought into contact with the input side and the output side wiring pattern 36 of the electronic component mounting film-carrying tape 12, and the conductive state of the wiring pattern 36 is detected. In addition, in the electrical inspection of the electrical inspection unit 16, the thin tape carrier 12 for mounting the electronic component is in the forced bending portion 14 by the tensile force of the tensile force 84 84 as will be described later. The wires that are forcibly disconnected are not connected (contacted) to each other during the electrical inspection to maintain the stretched state. Therefore, since the wiring having the forced disconnection can be prevented from coming into contact with each other, when the electrical inspection unit 16 performs the electrical inspection, no defective product is mistaken for the electrical inspection. In other words, the electric inspection unit 16 is provided with a lower inspection table 72 and an upper inspection table 78 that fixes the pair of detection needles 74 and 76 in the electrical inspection unit 16 as shown in Figs. 1 and 5 . The lower inspection table 72 and the upper inspection table 78 can be moved up and down. For example, after the upper inspection table 78 is lowered, the film carrying tape is held and fixed between the lower inspection table 72 and the upper inspection table 78 only by raising the lower inspection table 72. 12. Thus, the pair of detecting pins 74 and 76 are brought into contact with the test pad portion 6 of the = pin 52 of the wiring pattern IP040101 / SF-1083f 16 1309446 of the film carrying tape 12, by being between the two detecting pins 74 and 76 The set of detectors 71 and 73 are subjected to a conduction test to check the presence or absence of a disconnection. In addition, this continuity test can be connected continuously for wiring replacement. Further, in the case where the wiring width is large, for example, the outer lead portion on the input side can be directly wired to the probe needle 74 or 76, so that the test pad portion 6 can be omitted. Further, in the upper inspection table 78, a common terminal 81 for connecting the wirings of the inner leads 58 to each other in the range of the portion of the = pin 58 of the portion where the electronic component of the wiring pattern is connected is fixed. For example, a conductive rubber rod. Further, the conductive terminal & is grounded by the ground line 85.曰, and 'in the electrical inspection department 16, between the lower inspection table 72 and the upper inspection table, the lion's yokes 74 and 76 are in contact with the outer lead 52. 60' and the common terminal 81 is brought into contact with the portion of the inner lead 58 (landing), and the test is passed. With the thin section 16 贱 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏% of the rubber-loaded tape is provided by the film-carrying tape supporting device 86 and the above-mentioned floating roller 66f which is supported by the film; the film-loading tape 12 for sub-part mounting is given to the stretch ««::::: ; 86 5 rounds 丨n L τ is set for the fastener element of the electronic component women's carrying tape 12 . Furthermore, the card supports the film carrying tape 12 for mounting electronic parts. The holding member 88 is a film that can support the mounting of electronic components. ', the test wheel or the drive gear, etc., not limited to the delivery, by the bearing _ belt 12 wheel __, by floating IP040101 / SF-1083f 17 1309446 with the film carrying tape 12 position, and the installation of electronic components _ The film carrying tape 12 is loaded with a predetermined tensile force. Thereby, at the time of the electrical inspection, by imparting the bending in the forcible bending portion 14, the film-bearing tape 12 for the unevenness is placed at the correct position, and the recovery film is carried by the tape and is "on the occasion of the electrical inspection" due to the electronic components. Between the installation of the thin wiring ship, the contact device (the landing position) that is in contact with the performance of the needle 2 is not deviated when the Wei inspection is stopped (_), and the probe needle can correctly contact the ^ line pattern. , _ is in the external _ pad part, can perform frontal electrical inspection. In the case of pomelo, the weight of the floating roller 66 and the uneven extension of the stretching are ===12, and the wiring of the wire is not connected (contact) during the electric reading. The weight of the moving roller 66 is preferably from (10) to just g. Floating Saki, can't expect the above reconnection to prevent the effect «The right lighter than the belt 12 makes the Gu Xuan silk enamel film carrying adhesive and the wiring wiring e#36w_ (copper) to produce plastic again, in this embodiment 'in bending and electrical inspection In the case of the film bearing belt 12, the shaft uses the floating roller 66, but may not be limited thereto. For example, the two groups, ^=, belt 12, may be moved by the direction of moving away from each other. Carrying the kick belt 12. The tensile force is the same as that of the electrons. After the electrical inspection unit 16 performs the conduction test, the first piece of the film for carrying the mounting tape 12 is conveyed by the guide roller 9 and the floating roller: the yarn machine without the zero figure ❿ constitute. It is taken up by using the inspection apparatus 1 of the present invention as shown in Fig. 1, such as the width of 35 mm used for the LCD and the insulation of the thickness of the occluded imide. The copper wiring having the thickness of 12_ is formed. The so-called soft ΤΑβ tape 12 is electrically checked by using the wiring pattern ^ IP040101/SF-1083f 18 1309446 as the top surface. Any of the floating rollers 66 and 92, the diameter of the roller of the forcible bending portion 14 is 6_, and the weight of l〇〇g is used. In the second embodiment, the forcible bending portion 14 having the first projecting members 28 and 3 is provided on the side of the upper curved member 2 on the side of the upper curved member 2 on the side of the upper curved member 2, and the forcible bending portion 14 is provided in the inspection apparatus 1 of the present invention. Installation of electronic parts (4) Membrane bearing the electric raft of 12 belt. "Examples 1 and 2, compared with the electrical inspection method using the conventional inspection device, the defect rate is the original product but the offset of the eye tape position is reduced by 6G%, which is correct and It is possible to prevent the re-connection of the wires of the strong wire of the strong line, and the defective outflow rate to the semiconductor crystal mounting process is also reduced by about 2% compared with the poor flow of the conventional product. Although the preferred embodiment of the present invention has been described above, the present invention is not limited thereto. For example, in the above embodiment, although it is applicable to the film carrying tape 12 for electronic component mounting before mounting electronic components, the sheet shape is used. The electrical inspection of the FPC of the film and the semiconductor device using the film-carrying tape for mounting the electronic component after the semiconductor crystal is mounted may be modified in various ways without departing from the object of the present invention. Fig. 1 is a schematic view showing an electrical inspection device of an embodiment of a film-carrying tape for mounting an electronic component according to the present invention. ” - Fig. 2 is a view showing an electrical inspection device of Fig. 1 A schematic view of the curved state of the forced bending portion 14 is set. ~ Fig. 3 is a schematic view showing another embodiment of the forced bending portion 14 of the electrical inspection device of Fig. 1. Fig. 4 is a top view showing an embodiment of the film carrying tape 12 for mounting electronic parts used in the present invention. Fig. 5 is a schematic view showing a curved shape of the electrical inspection unit 16 of the electrical inspection device of Fig. 1. IP040101/SF-1083f 19 1309446 Fig. 6 is a schematic view showing a curved state of another embodiment of the forcible bending portion 14 of the electrical inspection device of Fig. 1. Fig. 7 is a schematic view showing a conventional electrical inspection device. Fig. 8 is a schematic view showing a conventional electrical inspection device. [Description of main component symbols] 10 Inspection device 12 Film-loading tape for electronic component mounting 14 Forced bending portion 16 Electrical inspection portion 18 Device 20 Upper curved member 22 Lower curved member 24, 26 Roller 28 First protruding member 32 Roller 34 Second protruding Component 36 Wiring pattern 40 Floating roller 42 Driving roller 44 Insulating film 46, 48, 50 Projection 52 Outer pin 54 Slot portion 58 Inner pin 60 Test pad portion 62 Buckle perforation 64 Guide roller 66 Floating roller 68 Guide roller IP040101 /SF-1083f 20 1309446
70 拉伸力負載裝置 72 檢查台 74、 76探測針 78 固定部件 80 阻焊劑層 81 導通用端子 84 拉伸力負載裝置 86 薄膜承載膠帶支持裝置 88 卡止部件 90 引導滾輪 92 浮動滾輪70 Tensile force load device 72 Inspection table 74, 76 probe needle 78 Fixing part 80 Solder resist layer 81 Guide universal terminal 84 Tensile force load device 86 Film carrying tape support device 88 Locking member 90 Guide roller 92 Floating roller
IP040101/SF-1083f 21IP040101/SF-1083f 21