1304995 九、發明說明： ^ 【發明所屬之技術領域】 本發明係關於一種排氣設備，特別關於一種燈管之排 氣設備。 【先前技術】 在燈管的製程中，排氣設備是相當重要的設備之一， 其主要目的係對燈管進行加熱、抽真空、潔淨、填充氣體 ►以及封合等製程。 其中，真空系統係為排氣設備的核心系統之一，一般 而言，真空系統之真空幫浦（pump )係配置於排氣設備之 主體外，並藉由真空管線連接於真空幫浦與排氣頭之間， 由於燈管的真空製程必須循序漸進，因此需要多次的抽真 空程序，而為了使燈管能夠依序經由各真空幫浦的抽真空 程序，因此必須於真空幫浦以及排氣頭之間設計一中心閥 (Center Valve )，以使得燈管能夠順利地進行抽真空程序。 B 請參照圖1所示，其係顯示一般的排氣設備之真空系 統的部分側視剖面示意圖，其係具有一中心柱體11、一中 心閥12、一旋轉盤13、複數個真空幫浦14、複數條第一 真空管線15a、複數條第二真空管線15b以及複數個排氣 頭16。 中心閥12係設置於中心柱體11以及旋轉盤13之間， 且中心閥12具有一旋轉部12a及一固定部12b，旋轉盤13 係與中心閥12之旋轉部12a —同旋轉。 5 1304995 各第一真空管線15a之一端係連接於中心閥12之固定 部12b，其另一端係分別與一真空幫浦14連接；而中心閥 12之旋轉部12a係藉由各第二真空管線15b而分別與排氣 頭16連接。另外，各排氣頭16係挾持一燈管2，並藉由 真空幫浦14的運作，而將燈管2内之氣體經由第二真空 管線15b及第一真空管線15a而排出，以達到將燈管2抽 真空之目的。 另外，由於燈管2内部可能殘存有液體或其他雜質， 因此當燈管2在真空製程時，尚須藉由一加熱爐17將燈 管加熱，以使内部雜質轉換為氣體，並由真空幫浦14將 其排出，其中加熱爐17係環設於排氣設備中，以對燈管2 均勻加熱。 由於中心閥12所連接之第一真空管線15a以及第二真 空管線15b皆須保持真空，因此中心閥12之旋轉部12a 及固定部12b之間必須保持密封，以防止雜質進入，一般 而言，旋轉部12a與固定部12b之接觸表面必須經由精密 拋光技術的加工後，並於接觸表面使用油封氣密，以防止 轉動時產生外漏氣或内漏氣的情況。 承上所述，習知的排氣設備，由於真空幫浦係設置於 排氣設備之主體外，因此需要較長距離之真空管線的配 置，導致排氣效率的降低，亦或是需要較大等級之真空幫 浦以彌補效率的損失。另外，由於中心閥為油封式設計， 當排氣設備運作時，旋轉的動作將會造成部分的油氣回 流，而導致油氣污染產品的品質。再者，中心閥之旋轉部 6 13〇4"5 . 與固定部之接觸面係經由精密拋光加工，若有粉塵或異物 進入’將會造成其接觸面刹傷而導致漏氣，進而造成產線 的停擺。 因此，如何提高排氣設備的排氣致率，以及降低設偫 製造、維修成本，實屬當前重要課題之一。 又 【發明内容】 有鐘於上述課題，本發明之目的為提供一種無需中心 , 闕設計之排氣設備。 緣是，為達上述目的，依據本發明之一種排氣設備係 包括一旋轉韩、一排氣機組以及一排氣頭。旋轉軸係具有 一第一軸部以及一第二軸部，且第一軸部係相對於第二軸 部旋轉；排氣機組係組設於旋轉軸之第一軸部；以及排氣 頭係連結於排氣機組。 承上所述，因依據本發明之一種排氣設備係將排氣機 組設置於旋轉神之第一轴部上，當第〜轴部相對於第二軸 ⑩部旋轉時，排氟機組亦隨之旋轉，因此可省去傳統作法的 中心閥，換f之’可避免因使用中心間而產生的油氣回流 '污染。且將耕氣機組直接組設於第一輪部，可有效縮短排 -it機組與待讲氟元件之間的距離’換言之，其排氣效率可 有效地提升。 【實施方式】 以下將參煦相關圖式，說明依據本發明較佳實施例之 7 1304995 一種排氣設備，其中相同的元件將以相同的參照符號加以 說明。 請參照圖2所示，其係顯示依據本發明較佳實施例之 一種排氣设備之部分侧視剖面圖。依據本發明較佳實施例 之一種排氣设僙係包括一旋轉軸31、一排氣機組32以及 一排氣頭33。本實施例中，排氣設備係為一燈管4之排氣 設備，其中燈管4係可為熱陰極燈管、冷陰極燈管或其他 需排氣製程之燈管，當燈管4於排氣（真空）製程時，燈 | 管4係夾置於排氣頭33。 旋轉軸31係包括一第一軸部311及一第二軸部312， 且第一軸部311係相對於第二軸部312旋轉。其中第一軸 部311係具有一載置平盤（Carried Plate) 311a ’其係與第 一轴部311同步旋轉。於本實施例中，第一軸部311係為 一旋轉軸部；第二軸部312係為一固定軸部，其係例如為 一中心枉體，固定於排氣設備之一本體35或係固定於地 面，藉以支撐第一轴部311 ’且旋轉軸31、排氣機組32 及排氣頭33係設置於本體35中。另外，載置平盤311a 係呈圓形平盤狀，並以第二轴部312為圓心旋轉》 排氣機組32係組設於旋轉軸31之第一軸部311上。 於本實施例中，排氣機組32係組設於第一轴部311之載 置平盤311a上，且排氣機組32係具有一第一排氣機321 及一第一導管322。排氣頭33係藉由第一導管322而與排 ’氣機組31連結。其中第一排氣機321係為一真空排氣機 (真空幫浦），而第一導管322係為一真空導管。燈管4 8 1304995 係夾置於排氣頭33，並藉由排氣機組31之動作，而將燈 管4内之氣體排出。當然，若第一軸部311之結構夠穩固， 則排氣機組31亦可直接吊設於第一軸部311上，而不需 載置平盤311a的設計。 請參照圖3所示，其係顯示依據本發明較佳實施例之 排氣設備之另一部分侧視剖面圖。於本實施例中，排氣機 組31為了能夠循序漸進地進行燈管4的真空製程，因此 可再增加一第二排氣機323以及一第二導管324。其中第 I 二排氣機323係可與第一排氣機相同係為真空排氣機，而 第二導管324係可與第一導管322相同係為真空導管。 為了有效利用空間，於本實施例中，第一軸部311更 具有一附屬載置平盤311b，其與載置平盤311a相同係以 第二轴部312為圓心旋轉。第二排氣機323係設置於附屬 載置平盤311b上，並藉由第二導管324連結第一排氣機 321與第二排氣機323，以利用等級相異（即功率相異） _ 之排氣機輪流啟動，以達到循序漸進的真空製程。 另外，於本實施例中，排氣設備之旋轉軸31更包括 一分度（Index)盤313、一分度軸314及一驅動單元315。 分度盤313係藉由分度軸314’而與旋轉軸31之第一輪部 311連接，並藉由驅動單元315驅動分度盤313以藉由分 度軸314帶動第一轴部311轉動。在此要說明的是，分户 盤313之功能係使第一軸部311以吋動（J〇g)的方式轉動， 意即，使第一軸部311 —次只轉動一段距離，以進行分次 (循序漸進）的真空製程。 1304995 請再同時參照圖2及圖3所示，由於燈管4的排氣設 備主要的目的係對燈管4進行加熱、抽真空、洗淨、填充 氣體以及封合等製程。其中在抽真空時，為了避免燈管4 中殘存雜質，因此於本實施例中，係利用一加熱機組34 產生高溫，而使燈管4中的雜質蒸發或揮發為氣體，再利 用排氣機組31的排氣動作以將燈管4内的雜質去除。其 中加熱機組34係以旋轉軸31為軸心而環設於本體35中， 且加熱機組34具有一溝槽341，使得排氣頭33得以夾置 燈管4而於溝槽341中移動，以對燈管4均勻地加熱。 綜上所述，由於本發明之一種排氣設備相較於習知的 排氣設備，減少了中心閥的設計，因此可避免中心閥油氣 回流而造成的污染。而因減少中心閥所空出的位置即可用 來設置排氣機組，由於排氣機組直接設置於排氣設備中， 其距離待真空製程之燈管的距離較短，因此可選用等級較 低（即功率較小）的排氣機組，即可達到較高的抽真空效 率，因此可降低設備成本。另外，移除了中心閥亦可降低 其維修成本，因此其設備製造及維修成本，皆能夠大幅的 降低。 以上所述僅為舉例性，而非為限制性者。任何未脫離 本發明之精神與範疇，而對其進行之等效修改或變更，均 應包含於後附之申請專利範圍中。 【圖式簡單說明】 圖1為顯示習知一種排氣設備之一部分侧視剖面圖； 1304995 圖2為顯示依據本發明較佳實施例之一種排氣設備之 一部分側視剖面圖；以及 圖3為顯示依據本發明較佳實施例之一種排氣設備之 另一部分側視剖面圖。 ； 元件符號說明： * 1 :真空系統 11 :中心柱體 • 12 :中心閥 12a :旋轉軸部 12b :固定軸部 13 :旋轉盤 14 :真空幫浦 15a :第一真空管線 15b :第二真空管線 16 :排氣頭 • 17 :加熱爐 2、4 :燈管 ' 31 :旋轉軸 * 311 :第一軸部 311a :載置平盤 311b :附屬載置平盤 312 :第二軸部 313 :分度盤 1304995 314 :分度軸 315 :驅動單元 32 ： 排氣機组 321 :第一排氣機 322 :第一導管 323 :第二排氣機 324 :第二導管 33 ： 排氣頭 34 ： 加熱機組 341 :溝槽 35 ： 本體1304995 IX. Description of the Invention: ^ Technical Field of the Invention The present invention relates to an exhaust apparatus, and more particularly to an exhaust apparatus for a lamp. [Prior Art] In the process of the lamp tube, the exhaust device is one of the most important devices, and the main purpose thereof is to heat, vacuum, clean, fill the gas, and seal the lamp. Among them, the vacuum system is one of the core systems of the exhaust equipment. Generally, the vacuum pump of the vacuum system is disposed outside the main body of the exhaust equipment, and is connected to the vacuum pump and the row by a vacuum line. Between the gas heads, since the vacuum process of the lamp must be gradual, multiple vacuuming procedures are required, and in order to enable the lamp to sequentially pass through the vacuum pumping process of each vacuum pump, it is necessary to vacuum the pump and exhaust A center valve is designed between the heads to enable the lamp to smoothly perform the vacuuming process. B, which is shown in FIG. 1 , which is a partial side cross-sectional view showing a vacuum system of a general exhaust apparatus, which has a central cylinder 11 , a central valve 12 , a rotating disk 13 , and a plurality of vacuum pumps 14. A plurality of first vacuum lines 15a, a plurality of second vacuum lines 15b, and a plurality of exhaust heads 16. The center valve 12 is disposed between the center cylinder 11 and the rotating disk 13, and the center valve 12 has a rotating portion 12a and a fixing portion 12b. The rotating disk 13 rotates together with the rotating portion 12a of the center valve 12. 5 1304995 One end of each of the first vacuum lines 15a is connected to the fixing portion 12b of the center valve 12, and the other end thereof is respectively connected to a vacuum pump 14; and the rotating portion 12a of the center valve 12 is provided by each second vacuum line 15b is connected to the exhaust head 16, respectively. In addition, each of the exhaust heads 16 holds a lamp tube 2, and the gas in the lamp tube 2 is discharged through the second vacuum line 15b and the first vacuum line 15a by the operation of the vacuum pump 14 to achieve The purpose of vacuuming the lamp 2 is. In addition, since there may be liquid or other impurities remaining inside the lamp tube 2, when the lamp tube 2 is in a vacuum process, the lamp tube must be heated by a heating furnace 17 to convert internal impurities into gas, and the vacuum is assisted. The Pu 14 discharges it, wherein the heating furnace 17 is ring-connected in the exhaust device to uniformly heat the bulb 2. Since the first vacuum line 15a and the second vacuum line 15b to which the center valve 12 is connected must maintain a vacuum, the rotating portion 12a of the center valve 12 and the fixed portion 12b must be sealed to prevent impurities from entering. Generally, The contact surface between the rotating portion 12a and the fixing portion 12b must be processed by a precision polishing technique, and the oil seal is airtight at the contact surface to prevent external air leakage or internal air leakage during rotation. As described above, the conventional exhaust device has a vacuum pump that is disposed outside the main body of the exhaust device, so that a long distance vacuum line configuration is required, resulting in a decrease in exhaust efficiency or a larger need. Level vacuum pumps to compensate for the loss of efficiency. In addition, since the central valve is oil-sealed, when the exhaust equipment is operated, the rotating action will cause part of the oil and gas return, resulting in the quality of the oil and gas contaminated product. Furthermore, the rotating portion of the center valve 6 13〇4"5. The contact surface with the fixed portion is processed by precision polishing, and if dust or foreign matter enters, it will cause a contact with the surface of the brake and cause air leakage, thereby causing the production. Line lockout. Therefore, how to improve the exhaust rate of the exhaust equipment and reduce the manufacturing and maintenance costs of the installation is one of the current important issues. Further, the present invention aims to provide an exhaust apparatus which does not require a center or a crucible design. Accordingly, in order to achieve the above object, an exhaust apparatus according to the present invention includes a rotary han, an exhaust unit, and an exhaust head. The rotating shaft has a first shaft portion and a second shaft portion, and the first shaft portion rotates relative to the second shaft portion; the exhaust unit is assembled to the first shaft portion of the rotating shaft; and the exhaust head system Connected to the exhaust unit. According to the above description, in an exhaust apparatus according to the present invention, the exhaust unit is disposed on the first shaft portion of the rotating god, and when the first shaft portion is rotated relative to the second shaft portion 10, the fluorine discharge unit is also The rotation, so that the central valve of the traditional method can be omitted, can be avoided to avoid the pollution caused by the use of the center between the oil and gas. Moreover, the cultivating unit is directly assembled in the first wheel portion, which can effectively shorten the distance between the platoon-it unit and the fluorine element to be told. In other words, the exhaust efficiency can be effectively improved. [Embodiment] Hereinafter, an exhaust apparatus according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, in which the same elements will be described with the same reference numerals. Referring to Figure 2, there is shown a partial side cross-sectional view of an exhaust apparatus in accordance with a preferred embodiment of the present invention. An exhaust system according to a preferred embodiment of the present invention includes a rotating shaft 31, an exhaust unit 32, and an exhaust head 33. In this embodiment, the exhaust device is an exhaust device of a lamp tube 4, wherein the lamp tube 4 can be a hot cathode lamp tube, a cold cathode lamp tube or other lamp tube that requires an exhaust process, when the lamp tube 4 is In the exhaust (vacuum) process, the lamp | tube 4 is placed in the exhaust head 33. The rotating shaft 31 includes a first shaft portion 311 and a second shaft portion 312 , and the first shaft portion 311 rotates relative to the second shaft portion 312 . The first shaft portion 311 has a carrier plate 311a' which rotates in synchronization with the first shaft portion 311. In this embodiment, the first shaft portion 311 is a rotating shaft portion, and the second shaft portion 312 is a fixed shaft portion, which is, for example, a central body, and is fixed to one of the exhaust devices 35 or the system. It is fixed to the ground to support the first shaft portion 311 ' and the rotating shaft 31, the exhaust unit 32 and the exhaust head 33 are disposed in the body 35. Further, the placing flat plate 311a has a circular flat disk shape and is rotated about the second shaft portion 312. The exhaust unit 32 is assembled on the first shaft portion 311 of the rotating shaft 31. In the present embodiment, the exhaust unit 32 is disposed on the mounting plate 311a of the first shaft portion 311, and the exhaust unit 32 has a first exhaust unit 321 and a first duct 322. The exhaust head 33 is coupled to the exhaust unit 31 by a first duct 322. The first exhauster 321 is a vacuum exhauster (vacuum pump), and the first duct 322 is a vacuum duct. The lamp 4 8 1304995 is interposed in the exhaust head 33, and the gas in the bulb 4 is discharged by the action of the exhaust unit 31. Of course, if the structure of the first shaft portion 311 is sufficiently stable, the exhaust unit 31 can also be directly suspended from the first shaft portion 311 without the design of the flat plate 311a. Referring to Figure 3, there is shown a side cross-sectional view of another portion of an exhaust apparatus in accordance with a preferred embodiment of the present invention. In the present embodiment, the exhaust unit 31 can further add a second exhaust unit 323 and a second duct 324 in order to carry out the vacuum process of the bulb 4 in a stepwise manner. The first two-stage exhauster 323 can be the same as the first exhaust machine as a vacuum exhauster, and the second duct 324 can be the same as the first duct 322 as a vacuum duct. In order to make effective use of the space, in the present embodiment, the first shaft portion 311 further has a sub-mounting plate 311b which is rotated about the second shaft portion 312 in the same manner as the mounting plate 311a. The second exhausting machine 323 is disposed on the auxiliary mounting plate 311b, and connects the first exhausting machine 321 and the second exhausting machine 323 by the second conduit 324 to utilize different levels (ie, different powers). The exhaust of _ is started in turn to achieve a step-by-step vacuum process. In addition, in the embodiment, the rotating shaft 31 of the exhausting device further includes an indexing plate 313, an indexing shaft 314 and a driving unit 315. The indexing plate 313 is connected to the first wheel portion 311 of the rotating shaft 31 by the indexing shaft 314', and drives the indexing plate 313 by the driving unit 315 to drive the first shaft portion 311 to rotate by the indexing shaft 314. . It is to be noted that the function of the household tray 313 is to rotate the first shaft portion 311 in a swaying manner, that is, to rotate the first shaft portion 311 by a distance. Fractional (step-by-step) vacuum process. 1304995 Please refer to FIG. 2 and FIG. 3 at the same time. The main purpose of the exhaust device of the lamp 4 is to heat, vacuum, clean, fill the gas, and seal the lamp 4. In the present embodiment, in order to avoid residual impurities in the lamp tube 4, in the present embodiment, a heating unit 34 is used to generate high temperature, and the impurities in the lamp tube 4 are evaporated or volatilized into gas, and the exhaust unit is reused. The exhausting action of 31 removes impurities in the bulb 4. The heating unit 34 is disposed in the body 35 with the rotating shaft 31 as an axis, and the heating unit 34 has a groove 341, so that the exhausting head 33 can be moved in the groove 341 by sandwiching the lamp tube 4 to The lamp tube 4 is uniformly heated. In summary, since the exhaust apparatus of the present invention reduces the design of the center valve as compared with the conventional exhaust apparatus, the contamination caused by the backflow of the central valve oil and gas can be avoided. The exhaust unit can be set by reducing the position of the central valve. Since the exhaust unit is directly disposed in the exhaust unit, the distance from the tube to be vacuumed is shorter, so the optional level is lower ( That is, the exhaust unit with a smaller power can achieve higher vacuuming efficiency, thus reducing equipment costs. In addition, the removal of the central valve also reduces the cost of maintenance, so the cost of manufacturing and maintenance of the equipment can be significantly reduced. The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the present invention are intended to be included in the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side elevational cross-sectional view showing a portion of a conventional exhaust apparatus; FIG. 2 is a side elevational cross-sectional view showing a portion of an exhaust apparatus in accordance with a preferred embodiment of the present invention; A side elevational cross-sectional view of another portion of an exhaust apparatus in accordance with a preferred embodiment of the present invention. Description of component symbols: *1: Vacuum system 11: Center cylinder • 12: Center valve 12a: Rotary shaft portion 12b: Fixed shaft portion 13: Rotating disk 14: Vacuum pump 15a: First vacuum line 15b: Second vacuum tube Line 16: Exhaust head • 17: Heating furnace 2, 4: Lamp tube '31: Rotary shaft* 311: First shaft portion 311a: Mounting plate 311b: Attaching plate 312: Second shaft portion 313: Indexing plate 1304095 314: Indexing axis 315: Drive unit 32: Exhaust unit 321: First exhauster 322: First duct 323: Second exhauster 324: Second duct 33: Exhaust head 34: Heating unit 341: groove 35: body