CN113899213B

CN113899213B - Pressure curing oven capable of rapidly cooling

Info

Publication number: CN113899213B
Application number: CN202111496077.9A
Authority: CN
Inventors: 邓燕; 张延忠; 赵永先
Original assignee: BEIJING ZHONGKE TORCH TECHNOLOGY CO LTD
Current assignee: BEIJING ZHONGKE TORCH TECHNOLOGY CO LTD
Priority date: 2021-12-09
Filing date: 2021-12-09
Publication date: 2022-03-11
Anticipated expiration: 2041-12-09
Also published as: CN113899213A

Abstract

The invention provides a rapid cooling pressure curing oven which comprises an oven body, an objective table, a cooling device and a lifting mechanism. The furnace body has a cavity; the object stage is arranged in the cavity; the cooling device is arranged in the cavity; the lifting mechanism part is positioned in the cavity and connected with the cooling device, and the lifting mechanism can drive the cooling device to move up and down so as to contact or separate from the objective table. The utility model provides a rapid cooling's pressure curing oven does not take place the displacement at the bearing thing, guarantees under welding quality's the prerequisite, can realize the rapid cooling and the rapid heating up of objective table, promotes welding efficiency.

Description

Pressure curing oven capable of rapidly cooling

Technical Field

The invention relates to the technical field of sealing equipment for welding, baking and curing chips in the semiconductor industry, in particular to a rapid cooling pressure curing oven.

Background

The pressure curing oven is divided into a positive pressure curing oven, a negative pressure curing oven and a combined pressure curing oven. At present, the pressure curing furnaces on the market are mostly in the forms of fixed object stages, fixed cooling pipelines, fixed heating devices and the like. In order to ensure the cooling efficiency, the cooling pipeline is contacted with the objective table, and the purpose of rapid cooling is achieved by lifting the contact surface. There are also devices in which the cooling line is not in contact with the stage and is cooled by internal gas circulation. Or directly cooled by gas. And the cooling pipeline is fixed, the object stage moves, and the object stage is attached to and separated from the cooling pipeline. In the heating process, the objective table is separated from the pipeline, and the objective table is attached to the cooling pipeline during cooling, so that the purpose of rapid cooling is realized.

However, since the cooling pipe is not provided, the cooling efficiency is low because the gas is directly used for cooling, and the inert gas is mostly used as a cooling medium, the inert gas is continuously filled into the cooling pipe to achieve the cooling effect, and the cost is high. The non-contact type pipe and gas combination method has improved cooling efficiency compared to the gas cooling method, but the cooling efficiency is still relatively slow, and the inert gas is consumed more. Objective table and cooling line laminating can cool off fast, nevertheless has a problem, promptly in the heating process, because of objective table and cooling line laminating, rate of heating is slower, and degree homogeneity is lower moreover. The pressure curing oven that the objective table motion and the cooling pipeline laminating realize the cooling, in the objective table motion process, cause the above-mentioned carrier displacement easily, cause the welding badly.

In view of the above, the present invention is particularly proposed.

Disclosure of Invention

An object of this application is to provide a rapid cooling's pressure curing oven, does not take place the displacement at the carrier, guarantees under welding quality's the prerequisite, can realize the rapid cooling and the rapid heating up of objective table, promotes welding efficiency.

In order to achieve the above object, the present application provides the following technical solutions: a rapid cool down pressure curing oven comprising:

a furnace body having a cavity;

an object stage disposed within the cavity;

a cooling device disposed within the cavity;

the lifting mechanism is partially positioned in the cavity and is connected with the cooling device, and the lifting mechanism can drive the cooling device to move up and down so as to contact or separate from the objective table.

Optionally, elevating system includes driver part and transmission shaft, set up the external screw thread on the transmission shaft, the last thread bush that sets up of cooling device, driver part sets up the stove body is outside, the transmission shaft runs through the stove body sets up, just the transmission shaft with set up between the stove body and rotate sealing device, transmission shaft one end with thread bush threaded connection, the other end with driver part transmission is connected.

Optionally, the furnace further comprises a cooling medium pipe, the cooling device is provided with a cooling medium channel, a communication opening communicated with the cavity is formed in the furnace body, the cooling medium pipe penetrates through the communication opening, the cooling medium pipe is connected with the cooling device, and the cooling medium pipe is communicated with the cooling medium channel.

Optionally, the cooling medium pipe is sleeved with an elastic sealing device, two ends of the elastic sealing device are respectively connected with the objective table and the furnace body, and the inner space of the elastic sealing device is isolated from the cavity.

Optionally, a plurality of cooling medium channels are arranged in parallel on the cooling device, and in two adjacent cooling medium channels, an inlet of one cooling medium channel and an outlet of the other cooling medium channel are located on the same side of the cooling device.

Optionally, the cooling device further comprises a blowing device, the blowing device is communicated with the cooling device, and the blowing device is communicated with the cooling medium channel.

Optionally, the heating device includes a heating device, the heating device includes a plurality of heating pipes, the cooling device includes a base portion and a plurality of boss portions connected to the base portion, an accommodating cavity is formed between two adjacent boss portions, and each heating pipe is respectively disposed in the corresponding accommodating cavity.

Optionally, the furnace body includes a bottom cylinder, a cover and a rotary bracket, and the rotary bracket is connected to the cover to drive the cover to close or open the opening of the bottom cylinder.

Optionally, the rotating bracket includes a column and a beam, a thread through groove is formed in the beam, a locking component is connected to the thread through groove in a threaded manner, and the locking component is connected to the cover body.

Optionally, the auxiliary locking mechanism comprises a plurality of pressing rods arranged along the circumferential direction of the bottom cylinder body at intervals, one end of each pressing rod is hinged to the bottom cylinder body, the middle of each pressing rod is connected with a telescopic mechanism, the other end of each pressing rod is provided with a pressing block, the telescopic mechanisms stretch and move to drive the pressing rods to swing, and therefore the cover body is pressed or released through the pressing blocks.

Compared with the prior art, the beneficial effects of this application are as follows:

the application provides a rapid cooling's pressure curing oven, when beginning to heat up the objective table in advance, judge whether cooling device is in with the low level of objective table, if do not have the action at the low level, if laminate at high level and objective table, then drive cooling device through elevating system, fall it to low level and objective table separation. After the heating is finished, the cooling device is driven to ascend through the lifting mechanism, the upper plane is attached to the objective table, and the objective table is cooled. After cooling, the lifting mechanism drives the cooling device to descend to prepare for the next action cycle. So, not taking place the displacement at the carrier, under the prerequisite of guaranteeing welding quality, can realize the rapid cooling and the rapid heating up of objective table, promote welding efficiency.

Drawings

The above and other objects, features and advantages of exemplary embodiments of the present disclosure will become readily apparent from the following detailed description read in conjunction with the accompanying drawings. Several embodiments of the present disclosure are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings and in which like reference numerals refer to similar or corresponding parts and in which:

FIG. 1 is a schematic cross-sectional view of a rapid cooling pressure curing oven according to an embodiment of the present disclosure;

FIG. 2 is a schematic structural diagram of a rapid cooling pressure curing oven according to an embodiment of the present disclosure when a cover is opened;

FIG. 3 is a schematic structural diagram of a rapid cooling pressure curing oven according to an embodiment of the present disclosure;

FIG. 4 is a schematic view of a matching structure of a stage and a cooling device in a heating state of the rapid cooling pressure curing oven according to the embodiment of the present disclosure;

fig. 5 is a schematic view of a matching structure of a stage and a cooling device in a cooling state of the rapid cooling pressure curing oven according to the embodiment of the present application.

In the figure, the furnace body 1, the bottom cylinder 11, the limit hook 111, the cover 12, the rotary bracket 13, the upright column 131, the hook 1311, the cross beam 132, the locking member 133, the rotary sealing device 14, the stage 2, the cooling device 3, the bottom stage 31, the boss 32, the threaded sleeve 301, the cooling medium passage 302, the lifting mechanism 4, the driving member 41, the transmission shaft 42, the cooling medium pipe 5, the elastic sealing device 6, the heating pipe 7, the auxiliary locking mechanism 8, the pressing rod 81, the telescopic mechanism 82, the pressing block 83, the plane 831, the inclined plane 832, and the shielding plate 9.

Detailed Description

The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure, and it is obvious that the described embodiments are some, but not all embodiments of the present disclosure. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.

Specific embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

Referring to fig. 1 to 5, the present invention provides a rapid cooling pressure curing oven, which includes an oven body 1, a stage 2, a cooling device 3 and a lifting mechanism 4. The furnace body 1 is provided with a cavity which is a carrier for all installation, the structure is that the wall of a cylindrical cavity is matched with a circular arc bottom, and the wall of the furnace cavity and the bottom of the furnace cavity of the structure can bear larger pressure. The object stage 2 is arranged in the cavity, fixed in the furnace chamber through a connecting device and used for bearing a welding eutectic workpiece. The cooling device 3 is arranged in the cavity, the lifting mechanism 4 is partially positioned in the cavity, the lifting mechanism 4 is connected with the cooling device 3, and the lifting mechanism 4 can drive the cooling device 3 to move up and down so as to contact or separate from the object stage 2.

The utility model provides a rapid cooling's pressure curing oven when beginning to heat up objective table 2 in advance, judges whether cooling device 3 is in the low level with objective table 2, if do not have the action at the low level, if laminate with objective table 2 at the high level, then drive cooling device 3 through elevating system 4, fall it to low level and objective table 2 separation. After the heating is completed, the cooling device 3 is driven to ascend through the lifting mechanism 4, the upper plane 831 is attached to the objective table 2, and the objective table 2 is cooled. After the cooling is finished, the lifting mechanism 4 drives the cooling device 3 to descend to prepare for the next action cycle. So, do not take place the displacement at the carrier, under the prerequisite of guaranteeing welding quality, can realize objective table 2's quick cooling and rapid heating up, promote welding efficiency.

In a possible embodiment, the lifting mechanism 4 includes a driving part 41 and a transmission shaft 42, an external thread is disposed on the transmission shaft 42, a threaded sleeve 301 is disposed on the cooling device 3, the driving part 41 is disposed outside the furnace body 1, the transmission shaft 42 is disposed through the furnace body 1, a rotary sealing device 14 is disposed between the transmission shaft 42 and the furnace body 1, one end of the transmission shaft 42 is in threaded connection with the threaded sleeve 301, and the other end is in transmission connection with the driving part 41. The driving part 41 drives the transmission shaft 42 to rotate, so that the thread bushing 301 moves up and down along the transmission shaft 42, and the cooling device 3 is driven to lift. The rotary sealing device 14 is disclosed in the prior art, the present application does not limit the specific structure thereof, and any device capable of realizing the rotary sealing engagement between the transmission shaft 42 and the furnace body 1 is within the protection scope of the present application.

In a possible embodiment, the rapid cooling pressure curing oven further comprises a cooling medium pipe 5, the cooling device 3 has a cooling medium channel 302, a communication opening communicated with the cavity is formed in the oven body 1, the cooling medium pipe 5 penetrates through the communication opening, the cooling medium pipe 5 is connected with the cooling device 3, and the cooling medium pipe 5 is communicated with the cooling medium channel 302. During cooling, the cooling medium is introduced into the cooling medium passage 302 through the cooling medium pipe 5, so that the cooling device 3 is cooled more rapidly.

In a possible implementation scheme, the rapid cooling pressure curing oven further comprises an elastic sealing device 6, the elastic sealing device 6 is sleeved outside the cooling medium pipe 5, two ends of the elastic sealing device 6 are respectively connected with the objective table 2 and the oven body 1, and the inner space of the elastic sealing device 6 is isolated from the cavity. Therefore, the lifting mechanism 4 is isolated in the cavity, and the sealing performance in the cavity cannot be influenced by lifting.

In a possible embodiment, a plurality of cooling medium channels 302 are arranged in parallel on the cooling device 3, and in two adjacent cooling medium channels 302, the inlet of one cooling medium channel 302 and the outlet of the other cooling medium channel 302 are located on the same side of the cooling device 3. So can guarantee the temperature homogeneity in the stage of cooling down, the temperature homogeneity of objective table 2 when improving the cooling.

In a possible embodiment, the rapid cooling pressure curing oven further comprises a blowing device, the blowing device is communicated with the cooling device 3, and the blowing device is communicated with the cooling medium channel 302. The cooling medium in the cooling medium channel 302 is blown away during preheating, so that the temperature uniformity and the heating rate of the object stage 2 in the heating process are improved.

In a possible embodiment, the rapid cooling pressure curing oven further comprises a heating device, the heating device comprises a plurality of heating pipes 7, the cooling device 3 comprises a base portion 31 and a plurality of boss portions 32 connected to the base portion 31, a containing cavity is formed between two adjacent boss portions 32, and each heating pipe 7 is respectively arranged in the corresponding containing cavity. Even so be convenient for cooling device 3's installation and lift, can also cool down heating pipe 7, further promote cooling rate.

In a possible embodiment, the furnace body 1 comprises a bottom cylinder 11, a cover 12 and a rotating bracket 13, wherein the rotating bracket 13 is connected with the cover 12 to drive the cover 12 to close or open the mouth of the bottom cylinder 11.

In a possible embodiment, the rotating bracket 13 comprises a column 131 and a beam 132, the beam 132 is provided with a through-thread groove, the through-thread groove is in threaded connection with a locking component 133, and the locking component 133 is connected with the cover 12. The bottom cylinder body 11 is connected with the bottom of the upright column 131, and the upper part of the upright column 131 supports the cross beam 132. The cross beam 132 supports the locking member 133, the locking member 133 passes through the through-slot and is rotatably connected to the cover 12, and the locking member 133 is rotated to drive the cover 12 to move up and down to open or close the opening of the bottom cylinder 11.

Further, the upright column 131 includes a first upright column and a second upright column, the bottom cylinder 11 is provided with a limit hook 111 corresponding to the first upright column, and the second upright column is rotatably connected with the bottom cylinder 11. The first upright post is provided with a hook body 1311 matched with the limiting hook 111, the cover 12 is provided with an avoiding groove corresponding to the limiting hook 111 and the structure, and the avoiding groove is used for lifting the first upright post when the cover 12 is lifted. When the cover 12 is at the lowest position, the limit hook 111 limits the cover 12, the cover 12 cannot rotate, the cover 12 limits the bottom of the structure on the first column, so that the first column cannot move to both sides, and the limit hook 111 hooks the hook 1311, so that the first column cannot lift. When the cover 12 is lifted to a position beyond the limit hook 111 by rotating the rotation locking member 133, the limit hook 111 releases the limit of the cover 12, so that the cover 12 drives the first column to rotate around the second column, thereby removing the cover 12 to open the upper opening of the bottom cylinder 11.

In a possible embodiment, the rapid cooling pressure curing oven further comprises an auxiliary locking mechanism 8, the auxiliary locking mechanism 8 comprises a plurality of pressing rods 81 arranged at intervals in the circumferential direction of the bottom cylinder body 11, one end of each pressing rod 81 is hinged to the bottom cylinder body 11, a telescopic mechanism 82 is connected to the middle of each pressing rod 81, a pressing block 83 is arranged at the other end of each pressing rod 81, the telescopic mechanism 82 performs telescopic motion to drive the pressing rods 81 to swing, so that the cover body 12 is pressed or released through the pressing blocks 83. Further carry out the pressfitting to lid 12 and bottom cylinder body 11, guarantee the leakproofness, be convenient for carry out the evacuation.

Further, the bottom surface of the pressing block 83 includes a flat surface 831 and a slope surface 832, when the vacuum is not pumped yet, the slope surface 832 is in contact with the cover 12, and the contact with the cover 12 is gradually switched from the slope surface 832 to the flat surface 831 along with the shortening of the vacuum pumping and stretching mechanism 82. Making either state tightly connected.

In a possible embodiment, the rapid cooling pressure curing oven further comprises a shielding plate 9 installed around the carrying platform inside the oven cavity to prevent the parts from falling into the oven cavity. And 7 heating pipe holes are formed around the bottom cylinder body 11 and used for installing a heater, and sensor mounting holes and the like are further formed for fixing the sensor. The top of the bottom cylinder body 11 is provided with a flange, and the flange is provided with a sealing ring mounting groove and used for mounting a sealing ring and forming a sealing space with the upper cover.

In the above description of the present specification, the terms "fixed," "mounted," "connected," or "connected," and the like, are to be construed broadly unless otherwise expressly specified or limited. For example, with the term "coupled", it can be fixedly coupled, detachably coupled, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship. Therefore, unless the specification explicitly defines otherwise, those skilled in the art can understand the specific meaning of the above terms in the present invention according to specific situations.

From the above description of the present specification, those skilled in the art will also understand the terms used below, terms indicating orientation or positional relationship such as "upper", "lower", "front", "rear", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", "center", "longitudinal", "lateral", "clockwise" or "counterclockwise" are based on the orientation or positional relationship shown in the drawings of the present specification, it is for the purpose of facilitating the explanation of the invention and simplifying the description, and it is not intended to state or imply that the devices or elements involved must be in the particular orientation described, constructed and operated, therefore, the above terms of orientation or positional relationship should not be construed or interpreted as limiting the present invention.

In addition, the terms "first" or "second", etc. used in this specification are used to refer to numbers or ordinal terms for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present specification, "a plurality" means at least two, for example, two, three or more, and the like, unless specifically defined otherwise.

While various embodiments of the present invention have been shown and described herein, it will be obvious to those skilled in the art that such embodiments are provided by way of example only. Numerous modifications, changes, and substitutions will occur to those skilled in the art without departing from the spirit and scope of the present invention. It should be understood that various alternatives to the embodiments of the invention described herein may be employed in practicing the invention. It is intended that the following claims define the scope of the invention and that the module compositions, equivalents, or alternatives falling within the scope of these claims be covered thereby.

Claims

1. The utility model provides a rapid cooling's pressure curing oven which characterized in that includes:

the furnace comprises a furnace body, a cover body and a rotary support, wherein the furnace body is provided with a cavity and comprises a bottom cylinder body, the cover body and the rotary support, and the rotary support is connected with the cover body so as to drive the cover body to close or open the opening part of the bottom cylinder body;

an object stage disposed within the cavity;

the cooling device is arranged in the cavity and comprises a base part and a plurality of boss parts connected to the base part, an accommodating cavity is formed between every two adjacent boss parts, a cooling medium channel is arranged on each boss, and in every two adjacent cooling medium channels on the cooling device, the inlet of one cooling medium channel and the outlet of the other cooling medium channel are positioned on the same side of the cooling device;

the heating device is arranged on the furnace body and comprises a plurality of heating pipes, and each heating pipe is arranged in a corresponding accommodating cavity;

the lifting mechanism is partially positioned in the cavity and is connected with the cooling device, and the lifting mechanism can drive the cooling device to move up and down so as to contact or separate from the objective table;

the furnace body is provided with a communicating opening communicated with the cavity, the cooling medium pipe penetrates through the communicating opening, the cooling medium pipe is connected with the cooling device, and the cooling medium pipe is communicated with the cooling medium channel;

the elastic sealing device is sleeved outside the cooling medium pipe, two ends of the elastic sealing device are respectively connected with the objective table and the furnace body, and the inner space of the elastic sealing device is isolated from the cavity;

the blowing device is communicated with the cooling device and the cooling medium channel;

the auxiliary locking mechanism comprises a plurality of pressing rods arranged at intervals along the circumferential direction of the bottom cylinder body, one end of each pressing rod is hinged to the bottom cylinder body, the middle of each pressing rod is connected with a telescopic mechanism, the other end of each pressing rod is provided with a pressing block, the telescopic mechanisms stretch and move to drive the pressing rods to swing, so that the pressing blocks can press or release the cover body, and the bottom surfaces of the pressing blocks comprise planes and inclined planes.

2. The rapid cooling pressure curing oven according to claim 1, wherein the lifting mechanism comprises a driving part and a transmission shaft, the transmission shaft is provided with an external thread, the cooling device is provided with a threaded sleeve, the driving part is arranged outside the oven body, the transmission shaft penetrates through the oven body, a rotary sealing device is arranged between the transmission shaft and the oven body, one end of the transmission shaft is in threaded connection with the threaded sleeve, and the other end of the transmission shaft is in transmission connection with the driving part.

3. The rapid cooling pressure curing oven of claim 1, wherein the rotating bracket comprises a column and a beam, the beam is provided with a through groove, the through groove is connected with a locking component by a thread, and the locking component is connected with the cover.