CN112059352B

CN112059352B - Multi-module packaging vacuum furnace for welding elements and using method thereof

Info

Publication number: CN112059352B
Application number: CN202011213036.XA
Authority: CN
Inventors: 赵永先; 邓燕; 张延忠
Original assignee: Beijing Torch Weiye Technology Co ltd
Current assignee: Beijing Torch Weiye Technology Co ltd
Priority date: 2020-11-04
Filing date: 2020-11-04
Publication date: 2021-02-19
Anticipated expiration: 2040-11-04
Also published as: CN112059352A

Abstract

The application provides a multi-module packaging vacuum furnace for welding elements, which comprises a vacuum cavity, a jig, a lifting device, a movable baffle mechanism, a heating mechanism, a water cooling mechanism, a valve pump mechanism and a control device, wherein the jig is arranged on the vacuum cavity; the lifting device, the movable baffle mechanism, the heating mechanism, the water cooling mechanism and the valve pump mechanism are in communication connection with the control device. The application also provides a using method of the vacuum furnace, which comprises the steps of putting the multilayer jig into the cavity in the sequence from bottom to top; vacuumizing the cavity, and extending the baffle plate to form a shielding state; when the vacuum degree in the cavity reaches the activation vacuum degree, the lower heating carrier is heated to the activation temperature and is kept for a first time period, and after the cavity is cooled to the safety temperature, the baffle is reset and returns to the reset state; the lifting device descends to the lowest point, the pipe shell jig layer and the germanium window jig layer are tightly attached to each other, and the pipe shell jig layer and the germanium window jig layer are heated to the welding temperature; and after the welding is finished, taking down the welded element from the pipe shell jig layer. The application realizes the high-efficiency function of multiple modules.

Description

Multi-module packaging vacuum furnace for welding elements and using method thereof

Technical Field

The application relates to the field of vacuum furnaces for welding components, in particular to a multi-module packaging vacuum furnace for welding components.

Background

The packaging vacuum furnace used during welding elements in the prior art adopts a single module structure and a small cavity structure as the most adopted structural modes: the packaging part placing jig is of an integrated structure with a small area as a main part, the internal space of the vacuum cavity is small, and the shape of the vacuum cavity is mainly the shape of a barrel;

the prior art has many structures which can not meet the welding of a single-layer small-area jig in the welding process of the same process and different temperatures; for example, when performing a vacuum soldering operation with a GETTER activation process, such as in the packaging of MEMS devices, PGA chips, GETTER geter geters are coated on the ge window portion of the soldering element, solder is coated on the case portion, and the GETTER geter GETTER activation requires 20 minutes at a temperature of 360 ℃, if the temperature is directly reached to 360 ℃, the melting point of the solder is reached during the thermal activation process, and the solder will melt.

Meanwhile, when a multilayer large-area jig is welded, a series of problems such as temperature uniformity and the like can be caused because the local area can not be tightly attached due to insufficient flatness; meanwhile, the small cavity structure is convenient for achieving the vacuum effect, but also limits the size of the jig in the cavity, the number of the packaging parts is small each time, the requirement of mass production cannot be met, and the cost is high;

in addition, the existing vacuum packaging equipment mostly adopts a blowing cooling mode, and the cooling rate is low; the compatibility of different products under the same process cannot be fully met; the existing vacuum packaging equipment also has the problems that the size of a vacuum pumping port is small, the high vacuum can not be quickly pumped, the vacuum cavity and the vacuum pump are often connected through a pipeline, and the nitrogen is unevenly distributed in the process of vacuum pumping.

Disclosure of Invention

In order to solve the above problems, the present application provides a multi-module encapsulated vacuum furnace for welding components, comprising a vacuum chamber, a jig, a lifting device, a movable baffle mechanism, a heating mechanism, a water cooling mechanism, a valve pump mechanism and a control device; the lifting device, the movable baffle mechanism, the heating mechanism, the water cooling mechanism and the valve pump mechanism are in communication connection with the control device;

the vacuum cavity comprises a cover body and a cavity body;

the heating mechanism comprises an upper heating part arranged on the cover body and a lower heating carrier arranged in the cavity;

the jig is arranged above the lower heating carrier, the jig comprises a three-layer structure, and a germanium window jig layer for placing a germanium window part of a welding element, a tube shell jig layer for placing a tube shell part of the welding element and a gravity block jig layer for placing a gravity block are sequentially arranged from bottom to top; the tube shell jig layer is fixedly connected with the lifting device and can move away from and cling to the germanium window jig layer in the vertical direction under the driving of the lifting device;

the movable baffle mechanism comprises a baffle driving device and a baffle, and the baffle driving device can drive the baffle to move in the horizontal direction; the position of the baffle in the vertical direction is higher than the germanium window jig layer and lower than the pipe shell jig layer when the lifting device rises to the highest point;

when the baffle driving device drives the baffle to reach the maximum stroke in the horizontal direction, the baffle is in a shielding state, and the baffle can block the heat conduction of the lower heat insulation carrying platform to the pipe shell jig layer; when the baffle driving device drives the baffle to reset, the baffle is in a reset state, and at the moment, the projection of the baffle and the jig in the vertical direction has no overlapping part.

Preferably, the jigs are arranged into a plurality of groups.

Preferably, the jigs are arranged into four groups which are symmetrical in parallel, and the size of each group of jigs is the same.

Preferably, the valve pump mechanism comprises a high vacuum gate valve, a molecular pump, a main pumping valve, an inflation/deflation valve and a vacuum interface, wherein the main pumping valve is arranged at the center of the bottom of the cavity and connected with the molecular pump, and the main pumping valve is set to be large-caliber.

Preferably, the water cooling mechanism comprises cover body shell water cooling, cavity internal water cooling, dynamic seal water cooling and pump water cooling.

Preferably, a germanium window welding limiting groove for placing a germanium window part of the element is formed in the top of the germanium window jig layer, and the germanium window part of the element is horizontally placed in the germanium window welding limiting groove during welding; the position of the pipe shell jig layer, which corresponds to the germanium window welding limiting groove, is provided with a pipe shell welding limiting groove hole for placing a pipe shell part of an element, the pipe shell welding limiting groove hole is used for placing the pipe shell part of the element, and the hole area of the pipe shell welding limiting groove hole is slightly larger than the area of the pipe shell part; the bottom of the hole of the tube shell welding limiting slotted hole is retracted inwards, so that the area of the bottom of the hole is slightly larger than that of the germanium window part of the element, and is slightly smaller than that of the tube shell part.

Preferably, the lifting device further comprises a supporting plate, the jig is arranged above the supporting plate, through holes are formed in the periphery of the germanium window jig layer, a support column is arranged at the bottom of the tube shell jig layer, and the support column penetrates through the through holes in the germanium window jig layer and is fixedly connected with the supporting plate.

Preferably, the movable baffle mechanism is arranged on two sides of the jig, the baffles on two sides are positioned on the same horizontal plane, and when the stroke of the baffle driving device reaches the maximum, the baffles on two sides can be spliced together to form heat insulation on the pipe shell jig layer.

The present application also provides a method of using a multi-module package vacuum oven for soldering components as described above, the method comprising the steps of:

s10, placing the germanium window part of the welding element on a germanium window jig layer, placing the tube shell part of the welding element on a tube shell jig layer, placing the gravity block on a gravity block jig layer, and placing jigs into the cavity in the sequence of the germanium window jig layer, the tube shell jig layer and the gravity block jig layer from bottom to top;

s11, closing the cover body, vacuumizing the cavity, driving the pipe shell jig layer and the gravity block jig to rise to the highest point by the lifting device, and extending the baffle plate to form a shielding state;

s12, when the pressure of the vacuum degree in the cavity reaches 10^-4Pa, starting heating by the lower heating platform, heating the lower heating platform to an activation temperature, keeping the temperature for a first time period, cooling the cavity after the getter is activated, reducing the temperature to a safe temperature, resetting the baffle plate, and returning to a homing state;

s13, the lifting device descends to the lowest point, the tube shell jig layer is tightly attached to the germanium window jig layer, the upper heating component and the lower heating carrier are heated at the same time to the welding temperature, and the germanium window part and the tube shell part are welded;

and S14, cooling after welding, opening the cover body after cooling to room temperature, and taking down the welded element from the tube shell jig layer.

The beneficial effect that this application realized is as follows:

the welding area division is realized to this application, and applicable same technology, the welding of different tools (different products). The problem of the product welding temperature homogeneity of multilayer tool is solved, divide into the fritter, increase local area's plane degree, in the welding process, the work piece fully contacts with heating microscope carrier, increases area of contact. The welding with different temperatures in the same process is solved, and the method is particularly suitable for welding with GETTER GETTER activation and is mainly used for MEMS device packaging and PGA chip packaging processes. The multilayer jig can be lifted, and when the multilayer jig is separated from each other to a certain distance, the baffle mechanism capable of rotating is configured on the vacuum furnace, so that the temperature of the two layers of jigs cannot be cut. The bottom or the top temperature sets up to high temperature, and the baffle can insulate against heat, protects the tool of the other side at relative low temperature, and after the high temperature technology was accomplished, the baffle can be withdrawed, and the tool descends, just can accomplish the welding of low temperature technology in same flow. And the multilayer jig is matched with the baffle mechanism to complete the high-temperature thermal activation of the GETTER GETTER, so that the solder is prevented from melting due to high temperature in the process. The multilayer jig is provided with a gravity block jig, has a guiding effect, and is pressed at the center of the workpiece by using the gravity block, so that the workpiece is more tightly attached during welding, and a better welding effect is achieved. And preparation is made for subsequent automatic transformation, and the four groups of jigs can be grabbed by the manipulator. The heating carrier is provided with a cold water system, the heating carrier is cooled by water, and a gas cooling system in the vacuum cavity is matched, so that a better cooling effect than that of pure gas cooling can be achieved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art according to the drawings.

Fig. 1 is a perspective view of a multi-module package vacuum oven for soldering components according to the present application.

Fig. 2 is a top view (without lid) of the multi-module encapsulated vacuum oven of the present application.

Fig. 3 is a structural diagram of the jig and the lifting device of the present application.

Fig. 4 is a structural diagram of a package jig layer in the jig of the present application.

Fig. 5A is a position structure diagram between the baffle and the jig when the baffle is in the reset state according to the present application.

Fig. 5B is a structural diagram of a position between the baffle and the jig when the baffle is in a shielding state.

Fig. 6 is a perspective view of the shutter moving mechanism according to the present invention.

Fig. 7 is an embodiment of the integral water cooling mechanism of the present application.

FIG. 8 illustrates an embodiment of the present application for a multi-module vacuum oven.

Detailed Description

The technical solutions in the embodiments of the present application are clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

As shown in fig. 1-8, the present application provides a multi-module packaging vacuum furnace for soldering components, which includes a vacuum chamber 1, a jig 2, a movable baffle mechanism 3, a heating mechanism, a water cooling mechanism, a vacuum mechanism and a control device;

as shown in fig. 1, the vacuum chamber 1 comprises a cover 11 and a chamber 12, the cover 11 and the chamber 12 are hinged to each other, and the cover 11 can be opened and closed by pushing the cover 11 by an electric push rod 13 arranged outside the vacuum chamber;

as shown in fig. 1 and 2, the heating mechanism includes an upper heating part 111 and a lower heating stage 121; the upper heating part 111 is arranged on the cover body 11, and the lower heating stage 121 is arranged inside the cavity 12;

the cavity 12 is also internally provided with a jig 2 and a lifting device 122, the lifting device 122 is fixedly connected with the jig 2, and the lifting device 122 is arranged below the jig 2; as shown in fig. 3, the jig 2 is provided with three layers of structures abutting side by side: a germanium window jig layer 21, a tube shell jig layer 22 and a gravity block jig layer 23 are sequentially arranged from bottom to top; in this embodiment, two lifting devices are respectively disposed on two sides of the jig, the lifting device 122 includes a guide shaft 1222, a lifting screw 1223 and a lifting motor 1225, and a dynamic sealing device 1224 is further used between the lifting motor and the lifting screw for sealing during movement;

the lifting device further comprises a supporting plate 1221, two ends of the supporting plate 1221 are fixedly connected with lifting screws 1223 on two sides of a jig, the jig 2 is arranged above the supporting plate 1221, through holes are formed in the periphery of the germanium window jig layer 21, a supporting column 221 is arranged at the bottom of the tube shell jig layer 22, and the supporting column 221 penetrates through the through holes of the germanium window jig layer 21 and is fixedly connected with the supporting plate 1221;

in order to keep stability, the direction of the jig and the ground is set to be a horizontal direction, and the plane where the supporting plate is located and the plane where the jig is located are parallel to each other and are both in the horizontal direction; the guide shaft and the lead screw of the lifting device are vertical to the horizontal direction, the lifting device moves in the direction of the lead screw, and the moving direction of the lifting device is set to be the vertical direction;

through the arrangement, when the lifting device 122 moves upwards, the germanium window jig layer 21 keeps unchanged in position, and the tube shell jig layer 22 and the gravity block jig layer 23 can move to be attached to and away from the germanium window jig layer 21 in the vertical direction under the driving of the lifting device;

the top of the germanium window jig layer 21 is provided with a germanium window welding limiting groove 211, the germanium window welding limiting groove 211 is used for placing a germanium window part of an element, the germanium window part of the element is flatly placed in the germanium window welding limiting groove 211 during welding, the periphery of the top surface of the germanium window part is coated with welding flux, and an inner area surrounded by the welding flux is coated with a getter;

as shown in fig. 4, a tube shell welding limiting slot hole 222 is disposed at a position of the tube shell fixture layer 22 corresponding to the germanium window welding limiting slot 211, and the tube shell welding limiting slot hole 222 is used for placing a tube shell portion of an element, wherein the hole area of the tube shell welding limiting slot hole 222 is slightly larger than the area of the tube shell portion and is used for flatting the tube shell portion; meanwhile, the bottom of the hole of the tube shell welding limiting slotted hole 222 is retracted inwards, so that the area of the bottom of the hole is slightly smaller than that of the tube shell part, and the tube shell welding limiting slotted hole is used for clamping the tube shell part after the tube shell jig layer is lifted; in addition, the area of the bottom of the hole is slightly larger than that of the germanium window of the element, so that the welded element can be taken down from the germanium window welding limiting groove 222 above the germanium window after the germanium window of the element and the tube shell are welded with each other;

the gravity block jig layer 23 is provided with a gravity block slotted hole 231 in the position corresponding to the tube welding limiting slotted hole 222, the gravity block slotted hole 231 is used for placing a gravity block, the gravity block is used for pressing an element tube shell part in the tube welding limiting slotted hole 222, when the tube shell part of an element descends and is in mutual contact with a germanium window part for welding, the gravity block enables the tube shell part to be stressed downwards, the reinforcement welding is carried out, the gravity block is pressed at the center of the workpiece, the workpiece is attached more tightly during welding, and a better welding effect is achieved.

As shown in fig. 5, in order to solve the problem that the jigs may be unevenly stressed and easily incline during the lifting process, in the embodiment, four sets of jigs are arranged in pairs, the four sets of jigs are arranged on the supporting plate 1221 in a grid shape, and each set of jigs can at least place 5 × 5 elements. After the jig is partitioned, the flatness of a local area is increased, in the welding process, elements are fully contacted with the heating carrying platform, the contact area is increased, and meanwhile, the jig is applicable to welding of the same process and different jigs (different products) through welding area division.

The movable baffle mechanism 3 comprises a baffle driving device 31 and a baffle 32; the baffle driving device comprises a vacuum bellows 312, a sensor 313, a sliding seat 315 and a guide shaft 314; the baffle driving device is arranged outside the chamber body 2, and is fixedly connected with the baffle inside the vacuum chamber through a telescopic rod 311 at one end of a vacuum corrugated pipe 312, the guide shaft 314 and the vacuum corrugated pipe 312 are arranged in the horizontal direction, that is, the baffle 32 can move in the horizontal direction, and the sensor 313 is used for sensing the moving position of the baffle.

The movable baffle mechanism 3 is arranged on two sides of the jig 2, as shown in fig. 2, 5A and 5B, the position of the baffle 32 in the vertical direction is higher than the germanium window jig layer and lower than the pipe shell jig layer when the lifting mechanism rises to the highest point;

the two-side movable baffle plate mechanism drives the baffle plates to reciprocate in the horizontal direction, wherein the baffle plates on the two sides are positioned on the same horizontal plane, when a getter on the germanium window jig layer needs to be activated, the lifting mechanism is lifted upwards, the tube shell jig layer is separated from the germanium window jig layer, the baffle plates start to move, when the stroke of the baffle plate driving device reaches the maximum, the baffle plates on the two sides can be spliced together, and at the moment, the baffle plates are in a shielding state, so that the heat insulation of the tube shell jig layer on the lower heating carrier platform is formed;

in order to ensure heat insulation, the total area formed by splicing the baffles on the two sides is not less than the projection area of the jig in the vertical direction;

when welding, the baffle is withdrawn to both sides, finally gets back to in the space of tool both sides, forms the playback state, and baffle and tool projection in the vertical direction do not have the overlap portion this moment, and elevating system descends this moment, and tube tool layer and germanium window tool layer contact weld.

By the mode, welding at different temperatures in the same process is solved, the method is particularly suitable for welding with GETTER GETTER activation, and is mainly used for MEMS device packaging and PGA chip packaging processes.

The mode that multilayer tool liftable, when multilayer tool separated a certain distance each other, this vacuum furnace has configured baffle mechanism, accomplishes cutting apart of two-layer tool can not the temperature. The bottom or the top temperature sets up to high temperature, and the baffle can insulate against heat, protects the tool of the other side at relative low temperature, and after the high temperature technology was accomplished, the baffle can be withdrawed, and the tool descends, just can accomplish the welding of low temperature technology in same flow.

The lifting process of the jig is matched with the baffle mechanism in a shrinkage mode to complete high-temperature thermal activation of the GETTER GETTER, and the solder is prevented from melting due to high temperature in the process.

As shown in fig. 1, the valve pump mechanism includes a high vacuum gate valve 51, a molecular pump 52, a main pumping valve 53, an inflation/deflation valve 54 and a vacuum interface 55, wherein the main pumping valve is disposed at the center of the bottom of the chamber and connected to the molecular pump, and is configured to ensure that the vacuum degree meets the requirement of high vacuum level parameters, and the main pumping valve is set to be of a large caliber for rapidly, uniformly and stably pumping the inside of the vacuum chamber, so as to avoid the problem that the nitrogen density inside the vacuum chamber is not uniform due to the pumping port disposed at one side of the vacuum chamber, and the yield is reduced during welding.

The movable baffle mechanism and the main pumping valve are arranged in a dynamic sealing manner;

as shown in fig. 7, the water cooling mechanism includes a cover housing water cooling 41, a chamber housing water cooling 43, a chamber interior water cooling 42, a dynamic seal water cooling 44, and a pump water cooling 45.

The application vacuum furnace has the specific use process that:

firstly, sequentially placing four groups of jigs provided with elements into a cavity from bottom to top in a three-layer sequence;

then, the control device controls the cover body 11 to be closed, the lifting mechanism drives the pipe shell jig layer 22 and the gravity block jig 23 to rise to the highest point, the baffles 32 on the two sides symmetrically extend out to form a shielding state, and the valve pump mechanism is vacuumized to enable the vacuum pressure of the inner cavity to reach the vacuum degree pressure intensity

p, the lower heating carrier in the cavity starts to heat, the temperature is raised to 360 ℃ and is kept for 20 minutes, after the getter is activated, the cavity 2 is cooled, the temperature in the cavity is reduced to 130 ℃, the baffle is reset and returns to the reset state, then the lifting mechanism is lowered to the lowest point, the pipe shell jig layer and the germanium window jig layer are tightly attached together, at the moment, the upper heating component and the lower heating carrier heat simultaneously, the temperature is heated to the designated temperature for welding, after the welding is finished, the water cooling and the air cooling run simultaneously, after the temperature is cooled to the room temperature, the cover body is opened, the welding is finished, and finally, the four groups of jig.

As shown in fig. 8, in the embodiment of the present application, the multi-module vacuum oven for welding components is disposed on a box 6, wherein a vacuum chamber 1 is disposed on the top of the box 6, a control device 7 is further disposed inside the box, a pulley 61 is disposed at the bottom of the box, and a display 8 and an alarm lamp 9 are further disposed on the upper portion of the box.

While the preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the appended claims be interpreted as including the preferred embodiment and all changes and modifications that fall within the scope of the present application. It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims

1. A multi-module packaging vacuum furnace for welding elements comprises a vacuum cavity, a jig, a lifting device, a movable baffle mechanism, a heating mechanism, a water cooling mechanism, a valve pump mechanism and a control device; the lifting device, the movable baffle mechanism, the heating mechanism, the water cooling mechanism and the valve pump mechanism are in communication connection with the control device;

the vacuum cavity comprises a cover body and a cavity body;

the jig is arranged above the lower heating carrier; the jig comprises a three-layer structure, namely a germanium window jig layer for placing a germanium window part of a welding element, a tube shell jig layer for placing a tube shell part of the welding element and a gravity block jig layer for placing a gravity block are sequentially arranged from bottom to top, and the three-layer structure provided with the jig is abutted side by side in the horizontal direction; the tube shell jig layer is fixedly connected with the lifting device and can move away from and cling to the germanium window jig layer in the vertical direction under the driving of the lifting device;

the jigs are arranged into a plurality of groups;

when the baffle driving device drives the baffle to reach the maximum stroke in the horizontal direction, the baffle is in a shielding state, and the projection of the baffle and the jig in the vertical direction are overlapped; at the moment, the baffle can block the heat conduction of the lower heating carrying platform to the pipe shell jig layer; when the baffle driving device drives the baffle to reset, the baffle is in a reset state, and at the moment, the projection of the baffle and the jig in the vertical direction has no overlapping part.

2. The multi-module package vacuum furnace for soldering components as claimed in claim 1, wherein the jigs are arranged in four groups symmetrically arranged side by side, and each group of jigs is the same in size.

3. The multi-module encapsulated vacuum furnace for solder elements of claim 1, wherein the valve pump mechanism comprises a high vacuum gate valve, a molecular pump, a main pumping valve, an inflation/deflation valve and a vacuum interface, wherein the main pumping valve is disposed at the center of the bottom of the chamber, and the main pumping valve is connected with the molecular pump.

4. The multi-module package vacuum furnace for solder components of claim 1, wherein the water cooling mechanism comprises lid housing water cooling, cavity interior water cooling, dynamic seal water cooling, and pump water cooling.

5. The multi-module package vacuum furnace for welding components of claim 1, wherein a germanium window welding limiting groove for placing a germanium window part of the component is arranged at the top of the germanium window jig layer, and the germanium window part of the component is flatly placed in the germanium window welding limiting groove during welding; the position of the pipe shell jig layer, which corresponds to the germanium window welding limiting groove, is provided with a pipe shell welding limiting groove hole for placing a pipe shell part of an element, the pipe shell welding limiting groove hole is used for placing the pipe shell part of the element, and the hole area of the pipe shell welding limiting groove hole is slightly larger than the area of the pipe shell part; the bottom of the hole of the tube shell welding limiting slotted hole is retracted inwards, so that the area of the bottom of the hole is slightly larger than that of the germanium window part of the element, and is slightly smaller than that of the tube shell part.

6. The multi-module package vacuum furnace for welding components as claimed in claim 1, wherein the lifting device further comprises a supporting plate, the jig is disposed above the supporting plate, through holes are disposed around the germanium window jig layer, a supporting column is disposed at the bottom of the tube shell jig layer, and the supporting column passes through the through holes of the germanium window jig layer and is fixedly connected with the supporting plate.

7. The multi-module packaging vacuum furnace for welding components of claim 1, wherein the movable baffle mechanism is arranged on two sides of the jig, the baffles on the two sides are positioned on the same horizontal plane, and when the stroke of the baffle driving device reaches the maximum, the baffles on the two sides can be spliced together to form heat insulation on the pipe shell jig layer.

8. A method of using a multi-module encapsulated vacuum oven according to any of claims 1-7, the steps of the method being:

s11, closing the cover body, vacuumizing the cavity, driving the pipe shell jig layer and the gravity block jig layer to rise to the highest point by the lifting device, and extending the baffle plate to form a shielding state;

s12, when the pressure of the vacuum degree in the cavity reaches 10^-4When Pa is needed, the lower heating platform starts to heat, the lower heating platform is heated to the activation temperature and is kept for a first time period, after the getter is activated, the cavity is cooled, and after the getter is cooled to the safety temperature, the baffle is reset and returns to the homing state;