TWI303661B - Cerium-based abrasive and stock material therefor - Google Patents

Description

1303661 V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to a raw material thereof. Decorative abrasive material as a main component and [Prior Art] A pair of abrasive materials are, for example,

Cmonaz ite) concentrate, Zhongli Yifang* smashing, drying, and holding ore concentrates, etc., manufactured by real (Zhao Zhao to the threshold & mashing (smashing), grading, etc. Japanese Patent Publication No. 1982-96, JP-A-2002-97457, and People: Auxiliary 4949 No. Among the listed raw materials, the fluorocarbon quinone concentrate, such as lanthanum, lanthanum and the like, and fluorine are one of suitable raw materials for the lanthanum-based abrasive. For example, a typical ratio of total rare earth oxides of fluorocarbon strontium ore is TBA0), a weight ratio of about 68 to 73% by weight, about 6 wt% of fluorine, and a strong heat loss (100%. 〇 is 20% by weight). In the TRE, the cerium oxide Ce02#) is about 5〇wt%, the cerium oxide (La2〇3, etc.) is about 35%, the oxygen is 〇H〇3, etc.)镨 (Pr6〇ii, etc.) is 4% left. However, as an abrasive, it is required to polish the material to the extent that the damage is not as high as possible. Further, it is preferable to carry out the grinding step and efficiently manufacture the article, and it is preferable to shorten the time required for the grinding step as much as possible. Such a material as the lanthanide abrasive material requires a polishing rate as high as possible (grinding value is large). Moreover, in recent years, lanthanum abrasive materials have been used for hard disk or magnetic hard disk.

2169-6322-PF(N2).ptd Page 8 1303661 V. INSTRUCTIONS (2) Glass substrate, liquid crystal display (LCD), color filter for liquid crystal TV, clock, desktop computer, camera In the field of polishing such as a glass substrate for display such as an LCD or a solar cell, a glass substrate for an LSI mask, or an optical lens, or an optical lens, it is particularly necessary to perform surface polishing with higher precision. And the polishing rate is more south. However, in the polishing of the conventional lanthanum-based abrasive material, there is a possibility that the scratch of the polishing precision required for the polishing of the optical hard disk or the glass substrate for the magnetic hard disk cannot be satisfied. Further, after the start of the polishing, the polishing rate is rapidly lowered as the polishing progresses, and the polishing efficiency is rapidly lowered. Thus, conventional lanthanide abrasive materials do not adequately meet the requirements of these fields. DISCLOSURE OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION In view of the above problems, the present invention provides a bismuth-based grinding problem in which the polishing performance is improved and the polishing rate is higher. The bismuth-based polishing material according to the first aspect of the invention contains at least a mi: and a titanium oxide as a rare earth oxide and contains oxygen, and the weight of the ruthenium-based bismuth compound (tre 〇) is 9%. The weight ratio of strontium to TRE0 (Ce 〇 2 / TRE 〇) is 5 〇 wt% to 65 wt%, and the oxidation occupies TRE 〇 i (10) 10 wt% 〜 16 wt%. 1 K KM2U3/TREO) If you use this decorative material, you can get less abrasive scratches.

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5. The high-precision polished surface (the surface to be polished) required by the invention (3). Further, it is possible to prevent a sharp drop in the polishing speed after the start of the 7-grinding, and it is possible to maintain a longer polishing speed for a longer period of time. Thus, the reason for having excellent polishing characteristics is not clear, and it is mainly because the ratio of bismuth (yttria) in the abrasive is increased. The ratio of yttrium oxide in TRE0 is about 5 〇wt%. If such a lanthanum-based abrasive is used, as described earlier, scratches will occur and the polishing rate will be drastically reduced. . Various types of materials such as fluorine contained in the abrasive material are relatively simple to study, and if the proportion of the element is high, the speed is most favored. And can be more sure

Among the lanthanum abrasive materials, the amount of rare earth elements generally studied according to TRE〇. In the abrasive material of the present invention, the rare earth element is present in the abrasive in the form of oxide, oxyfluoride or fluorination. When TRE is used, the amount of the rare earth element in the abrasive can be compared. In the abrasive material of the above invention, it is more preferable that the TRE0 is 90% by weight or more and 9% by weight or more. The higher the proportion of the rare earth elements in the abrasive material, the higher the ratio of the TRE0, the higher the proportion of the cerium oxide that is ground in the rare earth oxide, and the higher the content of the polishing in the impurity (one of the causes of the scratch). Reduce, and prevent the occurrence of scratches.

However, the higher the weight ratio (Ce02/TRE0) of yttrium oxide in the =' TRE0, the more likely the scratch is to occur, and if it exceeds the above upper limit, it is likely to cause scratches which are not allowed in the above-mentioned field requiring high-precision polishing. On the other hand, if the ratio is as low as described above, the polishing rate is lowered, and if the above-mentioned I limit is not satisfied, a sufficient polishing rate cannot be ensured. Considering these two aspects, yttrium oxide accounts for a better ratio of TRE0 (Ce02/TRE0).

1303661 V. INSTRUCTIONS (4) 50wt%~60wt% 〇, and the weight ratio of yttrium oxide in TRE0 (the higher the Nd2〇3/TRE(8), the lower the research f speed '1 exceeds the above upper limit'% cannot be _ In addition, the lower the ratio of yttrium oxide, the more likely the scratch is to occur, and if it is less than the above lower limit, it is easy to cause scratches and scratches that are not allowed in the above-mentioned field requiring high-precision polishing. In both respects, the weight ratio of cerium oxide to TRE0 (Nd2〇3/TRE〇) is preferably llwt% 〜15wt% '12wt% 〜14wt%, more preferably. 发明, the invention is an abrasive material, oxidized.镧 occupies the total rare earth oxidation, the weight of the weight of the weight; ^ ratio (La2 〇 3 / TRE 〇) is preferably 22wt% ~ 3 〇 wt% 〇 〇 镧 镧 镧 研磨 研磨 研磨 研磨 研磨 研磨 研磨 研磨 研磨 研磨 研磨 研磨 研磨If the ratio of cerium oxide is increased, the ratio of cerium oxide will decrease and the polishing rate will decrease. On the other hand, the lower the proportion of cerium oxide, the more likely the scratch will occur. The above lower limit 'is required for high precision grinding In the above-mentioned field, it is easy to cause an unacceptable polishing scratch. Considering these two aspects, the cerium oxide accounts for a ratio of 24% by weight to 28% by weight, and the cerium-based abrasive material of the above invention contains cerium oxide. Oxygen = 镨% by weight of TRE0... Eight/Cai (9) Better I 〇wt%~& Owt% 〇 From the above 5 loads, there are not only enamel, bismuth and titanium in the abrasive material: help: grinding The content of 钖 or 鈥 varies depending on the state of polishing. The second invention which is different from the first invention described above is conceivable because of the relationship between the content of the sputum and the sputum.

1303661 V. INSTRUCTION OF THE INVENTION (5) That is, the galvanized abrasive material of the second invention is oxidized steel and oxidized as a rare earth oxide and contains fluorine: special: in rrvo /T'RF'm #^ The weight ratio of weight (TRE0) (Ce02/TRE0) is 45wt%~7〇wt%, the weight ratio of TRE〇^^^^^^^鈥(ΜΑ)(L 〇^化纲(La2〇3) and emulsification The negative negative preparation π from 3 2 3 ) is J·4~2.8. In this way, the weight ratio of the emulsified 镧/, emulsified enamel in the TRE〇 is in the abrasive material, and the amount of the sputum in the grinding material is excellent. 々里. The weight of the balance is good. The result is that the grinding material is π η. The grinding material makes the above weight ratio of cerium oxide to cerium oxide. If the ratio is too large or too small, the grinding speed will ensure sufficient Grinding speed. From this point of view, the weight ratio j, ... method (La2 03 / Nd2 03 ) is more desirable at 1 · 6 to 2 · 6. In addition, the ratio of the total weight of yttrium oxide to oxidized enthalpy to the ratio of TRE 人 is the ratio of the total weight of oxidized steel to the oxidized aggregate. The reason why SHi ί ° is within this range is High grinding ' "a drop, right above the above upper limit, can not ensure sufficient grinding. If the proportion of bismuth bismuth is increased, the ratio of yttrium oxide is relatively: two ways: the polishing rate will decrease. On the other hand, the higher the ratio, the more likely the scratch will occur. If the lower limit value is not exceeded, the above-mentioned field in the second mill will be prone to unacceptable polishing scratches. ((La2〇3 + Nd2〇3)/TRE〇) Better " 30wt°/〇~45wt〇/〇. In the case of the above discussion, it is preferable to use the following lanthanide abrasive materials. Page 12 2169-6322-PF(N2).ptd 1303661 V. Description of the invention (6) (3rd invention). That is, at least cerium oxide, cerium oxide, and cerium oxide are contained as a rare earth oxide and contain a gas, which is characterized in that the total weight of the rare earth oxide (TRE0) is 90% by weight or more, and the weight ratio of cerium oxide to TRE0 ( Ce02/TRE0) is 45wt%~70wt%, the weight ratio of cerium oxide to TRE0 (Nd2 03 /TRE0) is 10wt%~16wt%, and the weight ratio of lanthanum oxide (La2 03 ) to yttrium oxide (Nd2 03 ) in TRE0 ( La2 03 /Nd2 03 ) is 1 · 4~2· 8. Furthermore, in such an abrasive material, the weight ratio of cerium oxide to TRE0 (Ce02/TRE0) is preferably 50% by weight to 655% by weight, and the weight ratio of cerium oxide to TRE0 (La2 03 /TRE0) is more preferably 22% by weight. 〜30wt%, the total weight of cerium oxide and oxidized oxime in the ratio of TRE0 ((La2〇3 + Nd2 03 ) / TREO) is more preferably 25wt% ~ 50wt% 〇

Further, the improvement of the polishing characteristics was further studied, and the following results were obtained. In other words, as the polishing material of each of the above inventions, the weight ratio of fluorine to the total rare earth oxide equivalent weight (F/TRE0) is preferably 4·〇wt% to 9·0 wt%. . The higher the ratio of fluorine, the coarser the state of the polishing surface, and the lower the polishing property. When the above-mentioned upper limit is exceeded, the above-mentioned field requiring high-precision polishing tends to cause unacceptable roughening of the polishing surface. This is considered to be the result of a strong chemical action caused by excess fluorine. On the other hand, the lower the ratio of fluorine, the lower the polishing rate. If the lower limit is not satisfied, a sufficient polishing rate cannot be ensured. When the amount of fluorine is small, the chemical action which contributes to the grinding is small. Considering these two aspects, the weight ratio of gas to TRE0 (F/TRE0) is more preferably 5·〇wt%~8·〇wt%. Further, in the fluorine-containing lanthanum-based abrasive, a part (or all) of the rare earth element is not used as a rare earth oxide but as a oxyfluoride or a surface oxide.

V. Description of invention (7) = quantity =. ;=? All rare earth oxides of the abrasive materials. Rare earth oxides, which are converted into shellfish in terms of fluorine content in the so-called heart-grinding material. , "The object of the research is relatively thin ίΐί!: The 钸 is the abrasive material #, the total weight of the touch stove t ^ ^ 0. 〇 5wt%, χ Τ *; b ^ U ^ h) / TREO) or shaft It is best to use the radioactive material of the material to reduce the amount of the material in the material. The surface of the material is βi: o.〇r, the abrasive material of each month, and the material of the material. Total of TREO and fluorine content: ==磨^ tt) t ^ ^95wt^l 〇5wt ί t " t 1 } ^ The formation will decrease 'If the above upper limit is exceeded, the roughness of the rough surface will be allowed Therefore. If the weight is two; Another = excess 'f strong chemical action, the result is that the polished surface becomes thicker ^, the lower the weight ratio, the more likely the grinding scratches will occur, if any! It is easy to produce research that cannot be tolerated in the above-mentioned fields: The main original® which is low in the ratio of the inside is considered to contain more impurities. If these two aspects are considered, the above ratio is preferably 98% by weight to 104% by weight. Further, the ruthenium-based abrasive materials of the above-described respective inventions were subjected to the analysis of the diffraction of the right ray to obtain the following results. The crucible abrasive material of the above inventions is measured by X-ray diffraction method using a Cu_Ka line or a "twist line as a x-ray ray 1303661", the invention (8) source, at 20 (diffraction angle) = 2 〇.~3 〇. The X-ray diffraction peak in the range of X-ray diffraction peak intensity, the strongest X-ray diffraction peak intensity of rare earth oxyfluoride (Ln〇|?), and yttrium oxide (Ce强度 2) The intensity ratio of the strongest X-ray diffraction peak intensity (LnOF/ Ce02) of the X-ray diffraction peak intensity is preferably 〇·4 to 0.7. The larger the X-ray diffraction peak intensity ratio, the easier it is to occur. If the scratch is excessively exceeded, the above-mentioned upper limit value is liable to cause scratching which is unacceptable in the above-mentioned field. On the other hand, the smaller the X-ray diffraction peak intensity ratio, the lower the polishing rate, if the lower limit value is not exceeded. However, sufficient polishing speed cannot be ensured. If these two aspects are considered, the X-ray diffraction peak intensity ratio is better than 0·45~0·65 〇', and as the lanthanide abrasive material of each of the above inventions, X-ray diffraction method using a Cu-Ka line or a Cu-K & line as an X-ray source, at 20 (wound The angle of incidence = 24.2. The range of ± 〇.5. The rare earth fluoride (1 ^ ^: X-ray diffraction peak intensity of the strongest X-ray diffraction peak intensity, and the strongest oxidized X-ray diffraction peak intensity The intensity of the X-ray diffraction peak/strong '6/ Ce〇2) is preferably hereinafter. The rare earth gas referred to herein is a raw material containing a rare earth oxide, for example, in the grinding. In the material production stage, the material produced by the fluorination treatment is applied to the raw material. Therefore, the X-ray diffraction peak intensity ratio exceeds the above upper limit shape, and the rare earth fluoride cannot be converted into the ruthenium compound due to insufficient calcination. In the case of residual rare earth oxides, or the second generation of 2:2 =: the conversion of the rare earth oxyfluoride is limited, and the rare earth vaporization is excessive with respect to the rare earth element.

2169-6322-PF(N2).ptd Page 15 1303661 V. INSTRUCTIONS (9) Residual conditions. An abrasive material that is insufficiently baked cannot be guaranteed to be octave, so it is not suitable. On the other hand, the abrasive material which has been sufficiently calcined, divided, and milled at a relatively high rate contains relatively large amount of coarse particles (it is not suitable for the excessive amount of gas and the amount of gas contained is excessively large. In the roasting stage of the time, the chemical action of fluorine & needle/grinding produces coarse particles (since the sintered material particles are sintered by Doners & 曰 厌 厌 成为 成为 成为 成为 成为 成为 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Relatively excessive, the pulverization or classification after the roasting of the yang is sufficiently reduced by the coarse granules. In the grinding of the abrasive material, the polishing surface is subjected to the chemical action of excess fluorine, which requires high-precision grinding. In the above-mentioned field, the surface of the polished surface which cannot be tolerated is determined. The X-ray diffraction peak of cerium oxide (Ce02) which is used for the calculation of the peak intensity ratio described above refers to the rare earth oxide peak which is mainly composed of cerium. , X-ray radiation peak appearing in the range of 20=28.!.±1.〇. And the so-called X-ray diffraction peak intensity of cerium oxide (Ce〇2), more specific , refers to cubic thinning based on bismuth Based oxide "ηχ〇 /) 'of the X-ray diffraction peak intensity .Lnx〇y lines are usually 15 ^ γ / χ ^ 2, ^ column identified as Ce02, CeQ5NdQ 5 01 75, or CeusNdusOuu. However, even

An abrasive material having a small Nc^Os/TREO may be identified as a Ce-Nd-lanthanide compound. It is presumed to contain an oxide of a rare earth element (La or the like) other than Ce or Nd. As apparent from the above, in the case of X-ray diffraction, the case of oxidized decoration (Ce 〇 2) is different from that of pure yttrium oxide in the case of Ce02 in TREO, and may not be pure yttrium oxide.

1303661 V. INSTRUCTIONS (10) The above-mentioned values are the following values. That is, using the measured average particle size (heart) using the measured lanthanide abrasive material = chaotic particle size distribution measurement method is prone to grinding to the injury if the Λ particle size (D5d) is larger, the more = two, f Unacceptable abrasive scratches in the field. On the other hand, the smaller the average grain size (D) is, the smaller the grinding rate is. #, M H # π t Y will fall, and the right is less than the lower limit of the above - two. If these two aspects are taken into consideration, the average particle size 〇 > 50) is better than 88 "111~1.4/^. Shipin 隹 is a material for the above-mentioned various inventions. The ΒΕΤ法比表® JJ^#2.〇m2/g.5.〇m2/g and =s are decreased. If the above upper limit is exceeded, it cannot be ensured. Fully grind 1 ί. On the other hand, the smaller the Xiefa specific surface area, the easier it is to generate 35, and the lower limit is not satisfied by the above, and it is easy to cause scratches and scratches that are not allowed in the field of high-precision polishing. 5mVg〜4. OmVg。 Having a better specific surface area of 2. 5mVg~4. OmVg. Next, we will discuss the raw materials for the abrasive materials. In the bismuth-based abrasive material of the invention, the weight ratio of the total rare earth oxide to the weight K (TREO) is 9 〇 wt% or more, and the ratio of cerium oxide to TRE ( (Ce02/TRE0) is 5 〇 wt%. ～65 wt%, the ratio of cerium oxide to TRE0 (Nd2 03 /TRE0) is 1% by weight to 1% by weight of the lanthanum-based abrasive (first invention), and the raw material (fourth invention) contains at least lanthanum, cerium and原料 As a raw material for a rare earth element, it is characterized in that yttrium oxide accounts for the weight of TRE0. Page 17 2169-6322-PF(N2).ptd 1303661 —1^———...... , invention description (11) --- quantitative ratio (Ce02 / TRE0) is 50wt% ~ 65wt%, oxidation of the proportion of treo day (Nd203 / TRE0) is 10wt% ~ 16wt%, the total weight of the shaft and the weight of m TRE0 The ratio ((U + Th)/TRE0) is below 0·〇5wt〇/0. $ ; The raw material for the abrasive material, with the increase in the ratio of cerium oxide (CeOz/TREO) in the TRE ,, the abrasive material is easily scratched, and if it exceeds the above upper limit, high precision is likely to occur. The aforementioned field of grinding ^ unacceptable abrasive scratches. On the other hand, the lower the ratio of cerium oxide, the lower the polishing rate of the produced abrasive, and if the lower limit is not satisfied, it is difficult to ensure a sufficient polishing rate. Therefore, in consideration of these two aspects, the weight ratio of cerium oxide to TRE0 (Ce02/TRE0) is preferably 50% by weight to 60% by weight. On the other hand, in the case of cerium oxide, the higher the weight ratio is, the polishing rate of the manufactured abrasive material is lowered, and if it exceeds the above upper limit, it is difficult to ensure a sufficient polishing rate. On the other hand, the lower the ratio of oxidized, the scratches to be produced are likely to be scratched, and if the lower limit is not satisfied, it is likely to cause scratches that cannot be tolerated in the above-described field requiring high-precision polishing. Therefore, in consideration of these two aspects, the weight ratio of cerium oxide to TRE ( (Nd2 03 /TRE0) is more preferably llwt% to 15% by weight, and 12% by weight to 14% by weight is more preferable. Further, the reason why the weight ratio of TRE0 to the total weight of the shaft and the crucible ((u + Th)/TRE〇) is preferably within the above range is that the radioactive material such as uranium or thorium is preferably as small as possible. Bastrite concentrate, monazite concentrate, complex ore concentrates in China (especially monazite concentrates and complex mineral concentrates in China), containing more stoves 'do not remove shafts and sputum, directly as It is not suitable to use the raw materials for the abrasive materials. Therefore, the weight ratio ((u + Th)/TRE〇) is less than 00 00 5 wt%

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The raw materials are better, and the raw materials below 5 wt% of 〇·〇〇〇 are more desirable. Further, the weight ratio of cerium oxide to TREO (La^/TREO) is preferably from 2 2% by weight to 30% by weight. Further, the ratio is preferably from 24% by weight to 28% by weight. The lower the ratio of cerium oxide, the larger the amount of fluorine released during firing, and the excessively low amount is likely to be excessively released, and it is difficult to control the amount of fluorine in the lanthanoid material during firing. In the abrasive material of the above invention, the weight ratio (Ce02/TRE0) of the cerium oxide to the total rare earth oxide equivalent weight (TREO) is 45 wt% to 70 wt%. The ratio of the weight ratio of lanthanum oxide (La2 03 ) to titanium oxide (Nd2〇3) in TREO (L a2 03 / N d2 03 ) is 1 / 4 to 2. 8 钸 abrasive material (second invention) as its The raw material (the fifth invention) is a raw material for an antimony-based polishing material containing at least lanthanum, cerium and lanthanum as a rare earth element, wherein the weight ratio (Ce02/TRE0) is 45 wt% to 70 wt%, and ruthenium oxide in TREO The weight ratio of cerium oxide (La2 03 /Nd2 03 ) is 1·4~2·8. When the raw material of the crucible polishing material is increased in weight ratio (Ce〇2/TREO) in the TRE 0, the produced abrasive material is likely to be scratched. If the above-mentioned upper limit value is exceeded, high-precision grinding is likely to occur. In the aforementioned field, the *ivfy method allows for abrasive scratches. On the other hand, the lower the ratio of cerium oxide, the lower the polishing rate of the manufactured abrasive material, and if the lower limit is not satisfied, it is difficult to ensure a sufficient polishing rate. Therefore, in consideration of these two aspects, the proportion of cerium oxide in the weight ratio of TREO (Ce02/TREO) is preferably 50% by weight to 60% by weight. Further, the weight ratio of cerium oxide to cerium oxide (La2 03 /Nd2 〇 3) is too large or too small, and the polishing rate of the manufactured abrasive material is lowered to ensure a sufficient polishing speed. Therefore, the weight of yttrium oxide and yttrium oxide in TREO

1303661 V. Description of invention (13) The ratio (La2 03 /Nd2 03 ) is 1·6~2. 6 is more desirable. The weight ratio of (1) to the total weight of the shaft and the crucible ((1| + 1^)/1^£: 〇) is preferably 0. 0 5 wt% or less. This is because the radioactive material such as uranium or plutonium is preferably as low as possible. Bastrite concentrates, monazite concentrates, complex ore concentrates in China (especially monazite concentrates and complex mineral concentrates in China), containing more 钍' without removing uranium and plutonium The use of raw materials for abrasive materials is not suitable. Therefore, the weight ratio ((U + Th) / TRE0) is preferably 0. 00 5 wt% or less, and the raw material of 〇. 〇 〇 〇 5 w t % or less is more preferable. Further, the ratio of the total weight of cerium oxide to cerium oxide to TRE0 ((La2 03 + N d2 03 ) / T R E 0 ) is preferably 2 5 w t % 〜 5 0 w t %. The lower the ratio, the larger the amount of fluorine released during the calcination, and the more easily the above-mentioned lower limit is excessively released, and it is difficult to control the amount of fluorine in the lanthanum-based abrasive during baking. In addition, the polishing material of the above invention contains at least cerium oxide, cerium oxide, and cerium oxide as a rare earth oxide and a fluorine-containing cerium-based abrasive, and the total rare earth oxide conversion weight (TRE0) is 90% by weight. The weight ratio of your TRE0 (Ce02/TRE0) is 45wt%~70wt%, the weight ratio of titanium oxide to TRE0 (Nd2 03 /TRE0) is 10wt%~16wt%, and the lanthanum oxide (La2 03 ) and titanium oxide (Nd2) in TRE0 03) The weight ratio (La2 03 /Nd2 03 ) is a bismuth-based polishing material (third invention), and the raw material (the sixth invention) contains at least lanthanum, cerium and lanthanum as rare earths. The lanthanum-based material for the abrasive material is characterized in that the TRE0 system is 90% by weight or more, the cerium oxide accounts for the weight ratio of TRE0 (Ce02/TRE0) is 45 wt% to 70 wt%, and the oxidation ratio accounts for the weight ratio of TRE0 (Nd2 03 / TRE0) is 10wt ° /. ~16wt%, oxidation in TRE0

2169-6322-PF(N2).ptd Page 20 1303661 V. INSTRUCTIONS (14) The weight ratio of lanthanum (La2 03 ) to yttrium oxide (Nd2 03 ) (La2 03 /Nd2 03 ) is 1·4~2· 8. Further, in such a raw material, the weight ratio of cerium oxide to TRE0 (Ce02/TRE0) is 50% by weight to 655% by weight, and the weight ratio of cerium oxide to TRE0 (La2 03 /TRE0) is 22% by weight to 30% by weight, cerium oxide and oxidation. The ratio of the total weight of the crucible to the TRE0 ((La2 03 + Nd2 03 ) / TRE0) is preferably from 25 wt% to 50 wt%. Further, in the raw material, for the same reason as described above, the weight ratio of TRE0 to the total weight of uranium and lanthanum ((U + Th) / TRE0) is preferably 5% by weight or less, and less than 0.005% by weight of the raw material. Well, it is more desirable to use less than 5% by weight of raw materials. The above-mentioned invention is a raw material for the abrasive material, in any one of the raw materials of the invention, wherein the weight ratio of cerium oxide to TRE0 (pr6〇n / TRE〇) is preferably 2·〇wt%~8. In addition to the radioactive materials such as uranium or thorium contained in the raw materials, the ore of the raw material for the abrasive material contains, in addition, the words (Ca), barium (Ba), iron (Fe), and phosphorus. (p) and other elements. The polishing material produced from such a multi-element ore (raw material) is often contained as an impurity, and if an abrasive containing a large amount of these impurities is used, polishing scratches are likely to occur, and the polishing speed is high. Will fall. Further, if these impurities (especially iron) remain on the polished surface or the like, the properties and properties of the object to be polished may be lowered. From this point, regarding the above-mentioned original == any item, as the raw material of the bismuth-based abrasive material of the present invention and the weight ratio of the lanthanide-based abrasive material 'TREp to the total weight of calcium, barium, iron, and phosphorus ((Ca + Ba) + Fe + P)/TRE〇) is preferably 2.0 wt% or less, more preferably 1 wt% or less, more preferably 〇 5 wt% or less, and as a raw material thereof, the weight ratio

1303661 V. Inventive Note (15) ((Ca + Ba + Fe + P) / TRE0) is preferably 2. 〇 wt% or less, more preferably l.Owt% or less, and more preferably 0.45 wt% or less. As a method for producing a raw material for a lanthanum-based abrasive material, the following method (the first production method of the raw material) is roughly employed. First, 'the concentrate of the fluorine-contained concentrate or the like is decomposed by a sulfuric acid decomposition method or an alkali decomposition method, and the mixture is separately precipitated or separately dissolved, and the shaft, the drum, the handle, the crucible, the iron, the phosphorus, etc. are reduced and removed. The impurities give a rare earth solution. Further, the composition (rare earth composition adjustment) of the rare earth component of the obtained rare earth solution was adjusted. Thereafter, the composition of the adjusted rare earth solution is mixed with a precipitating agent (for example, ammonium hydrogencarbonate, ammonium carbonate, sodium hydrogencarbonate, sodium carbonate, ammonia, oxalic acid, ammonium oxalate, sodium oxalate, urea, etc.) to form a rare earth compound ( For example, a precipitate of a carbonate, an alkali carbonate, a monohydroxycarbonate, a hydroxide, an oxalate or the like is filtered and washed with water to obtain a raw material for the lanthanum abrasive of the present invention. When a raw material for a lanthanum-based abrasive material is produced, a method of adjusting a composition of a rare earth-based solution (reduced: after removing impurities) includes a solvent extraction method and addition. In the solvent extraction method, impurities other than rare earth elements can also be used depending on the method used. It can also be combined to make Xiao. The solvent extraction method and the addition method are also described first. First, the solvent extraction method will be described. Also, the ratio of 丨丄, ^ 鈥 (Nd203 / TRE0) is high, α, the weight ratio of oxidized oxime in the solution before solvent extraction is aa2 〇 3 / N (^二J 镧 镧 and the method in the solution, can be enumerated The following: a solvent extraction method for extracting titanium-portion to an organic solvent p疋' from a rare earth aqueous solution W, or a rare earth element

2169-6322-PF(N2).ptd 1303661 5. After almost all of the organic solvent is extracted into the organic solvent, the organic solvent is brought into contact with the aqueous solution for reverse extraction, and a part of the residue is left in the organic solvent. A method of back-extracting most other rare earth elements into an aqueous solution. By such a method, the ratio of hydrazine is lowered to adjust to the ratio suitable for the present invention. Conversely, the ratio of the ratio of the solution before the solvent extraction (Nd2 03 /TRE0) is low or the solvent used in the case where the weight ratio of cerium oxide to oxidation is large (La2〇3/Nd2%) is large. The following methods can be mentioned as an extraction method. That is, a part of ruthenium or osmium is left in an aqueous solution, and other rare earth elements are extracted into an organic solvent, and then contacted with an aqueous solution for reverse extraction, and almost all of the rare earth elements extracted in the organic solvent are reversed. A method of extracting to an aqueous solution. By such a method, the ratio of bismuth can be increased, and the ratio suitable for the present invention can be adjusted. And each of the solvent extraction methods described herein, as the organic solvent, an organic solvent which is more easily extracted by the rare earth lanthanum cerium, and an organic solvent which is easier to extract with a lighter rare earth element may be used. In the solvent extraction step or the reverse extraction step, the extraction amount of the target substance or the reverse extraction is appropriately determined depending on conditions such as the raw material used for the desired abrasive material. The original q ^ ί ΐ for the addition method to explain. # The composition of the soil composition before adjustment 盥ί 1 2 Nd2 〇 3"TREo) high, or the oxidation before the solvent extraction, the amount of γ, the amount of (La203 / Nd2 03) is small, the addition of γ A large or sputum liquid of a compound having a rare earth element such as ruthenium or osmium (for example, an acid such as a carbonate or a hydrogen solution) (salt may also be a solution of a substance, an emulsion, or the like with a hydrochloric acid The solution), mixed,

1303661

To reduce the ratio of titanium ' and adjust to the ratio suitable for the present invention. On the contrary, the soil composition is adjusted, the proportion of bismuth in the former solution (Nd2〇3/TRE〇) is low, or the weight ratio of cerium oxide to cerium oxide before solvent extraction is α% 〇3/Ν (12〇3) In the case of a large-scale addition method, an aqueous solution containing a large amount of a compound containing ruthenium is added and mixed to increase the ratio of ruthenium and adjust to a ratio suitable for the present invention. In addition, the amount of the aqueous solution to be added in the above-mentioned additive method is appropriately determined depending on the conditions of the raw material of the raw material to be produced, and the like. Field As a method of producing a raw material for a lanthanum-based abrasive material, the following method (the second method for producing a raw material) is also available. 7 ^ , as in the manufacture of the abrasive material of the above invention, the total rare earth oxide conversion weight (TRE0) is 90 wt% or more, the weight ratio of cerium oxide to TRE0 (Ce02/TRE0) is 50 wt% to 65 wt%, and cerium oxide accounts for TRE0. When the weight ratio (Nd2 03 /TRE0) is 1% by weight to 6% by weight of the lanthanum-based abrasive (first invention), the following materials are prepared as raw materials for the raw material for the abrasive. Specifically, the value of "Ce02/TRE0" or "Nd2 03 /TRE0" whose value of the elements of uranium, thorium, calcium, strontium, iron, and the like is sufficiently reduced is not necessarily within the above-mentioned appropriate range ( For example, carbonates, basic carbonates, monohydroxycarbonates, hydroxides, oxalates, etc.). Further, these plural raw materials (raw materials for raw materials for polishing materials) are mixed, and the raw materials for the lanthanum abrasive materials of the present invention are produced by adjusting the content of the ruthenium or the entanglement (mixing step). For example, in the case of producing the above-described abrasive material, cerium oxide (Ce02) accounts for the weight ratio of the total rare earth oxide equivalent weight (TRE0) (Ce02/TRE0).

2169-6322-PF(N2).ptd Page 24 1303661 V. Description of invention (18) 45wt%~70wt%, weight ratio of lanthanum oxide (La2 03 ) to titanium oxide (Nd2 03 ) in TRE0 (1^2 03 / "2 03" When the 研磨-based abrasive material (the second invention) of 1.4 to 2.8 is used, the following materials are prepared as raw materials for the raw material for the polishing material. Specifically, a plurality of uranium, thorium, calcium, strontium, and iron are prepared. The content of "Ce02/TRE0" or "La2 03 /TRE0" whose content of phosphorus or the like is sufficiently lowered is not necessarily within the above-mentioned suitable range (for example, carbonate, carbonate, monobasic carbonate, Hydroxide, oxalate, etc.). Further, the raw material (the raw material of the raw material for the polishing material) is mixed, and the content of the crucible or the crucible (mixing step) is adjusted to produce the raw material for the crucible polishing material of the present invention. Further, the second manufacturing method The mixing step described may be carried out before the baking step of the production of the lanthanum abrasive. In other words, the mixing step may be carried out at the stage of the production step of the raw material for the lanthanum-based abrasive material, for example, γ, the pulverization and the fluorination treatment of the plurality of raw materials (the raw materials for the raw material for the polishing material) A mixing step is also possible. Further, it may be a raw material (raw material for a raw material for polishing materials) used for mixing, or 'a high-purity substance having a ratio of one type of rare earth oxide in TRE0 of 99 Wt% or more. The adjustment of the composition can be easily accomplished using a high-purity raw material, but the high-purity raw material is also expensive. Further, the raw materials for various polishing materials are described above, and the calcined product obtained by calcining the raw material for the polishing material (for example, calcined rare earth carbon=salt, alkaline carbonate, monohydroxycarbonate, or the like) may be used. The oxide of the hydrazine, such as a hydroxide or an oxalate, or the intermediate between the oxide and the raw material thereof - is a raw material for the bismuth-based abrasive material of the present invention.

2169-6322-PF(N2).ptd No. 25 1303661 V. INSTRUCTIONS (19) The material refers to the powder that is used in the initial stage of the manufacture of the abrasive material when the abrasive material is made from the raw material. The raw material of = also includes the raw material (intermediate raw material) supplied at the time of manufacture of the lanthanum abrasive. Therefore, the above-described; j:: = material is subjected to a pulverization treatment and/or a fluorination treatment, and a drying treatment and/or a pulverization treatment is carried out, and after firing, it becomes a lanthanide abrasive material. The material (that is, the material before the baking step in which the abrasive material is produced) is a raw material (intermediate raw material) for the lanthanide abrasive material herein. In the above-mentioned raw materials for the polishing material and the lanthanum-based polishing material, "F/TRE0", "(u+Th)/TRE0", and "(Ca + Ba + Fe+P)/TRE0" are relative. The weight ratio of the weight of "F", the weight of "U + Th", and the weight of "Ca + Ba + Fe + P" in terms of the weight of the total rare earth oxide of the raw material for the polishing material and the polishing material (TRE0) Non-"F" accounts for the weight of TRE0, "U + Th" accounts for the weight of TRE0, and "Ca + Ba + Fe + P" accounts for the weight of TRE0. "TRE0" does not contain "F", "U + Th", "Ca + Ba + Fe + P", "F" accounts for the weight of TRE0, "(U + Th)" accounts for the weight of TRE0 or "Ca + The ratio of Ba + Fe + P" to the weight of TRE0 is substantially 0% by weight. Therefore, when "F/TRE0", "(U + Th)/TRE0" or "(Ca + Ba + Fe + P) / TRE0" of the raw material for the polishing material and the polishing material is obtained, it is necessary to separately measure the polishing material. "TRE0 (full rare earth oxide conversion weight)" of the raw material and the abrasive material. The weight of the "F", the weight of "U + Th", and the reuse of "Ca + Ba + Fe + P" are converted into "TRE0" lOOwt. %. For example, abrasive materials

2l69>6322-PF(N2).ptd Page 26 1303661 V. Description of Invention (20) When "TRE0" is 90 wt% and the "F" of the abrasive is 6.3 wt%, the "F/TRE0" of the abrasive material is 6.3 (wt0 / 〇) / 90.0 (wt%) xl00 (wt0 / 〇) = 7.0 (wt%). [Embodiment] Hereinafter, a preferred embodiment of the bismuth-based abrasive material of the present invention will be described. Younger 1 embodiment First, an emulsified rare earth (made in India) was prepared. And the composition of the total rare earth oxide conversion weight (hereinafter referred to as TRE0) is 46wt%, Ce02/TRE0 is 50.3wt%, La2 03 /TRE0 is 23·7 wt%, and Nd2 03 /TRE0 is 20.0wt°/〇 Pr60n/TRE0 is 5.2 wt%, (U + Th)/TRE0 is 〇·〇〇〇5 wt%, and (Ca + Ba + Fe + P)/TRE0 is 0.6 wt%. Further, the rare earth chloride system is pulverized in the order of the fluorocarbon antimony concentrate (manufactured in India), and the phosphate component is dissolved in the aqueous solution by alkali decomposition (140 ° C, 3 hours) using a concentrated aqueous solution of sodium hydroxide. Hot water treatment, filtration, and dissolving separately using hydrochloric acid having a pH adjusted to 3.5 to 4.0 (dissolving rare earth elements and leaving uranium (U) and thorium (Th) in the hydroxide precipitate), filtering, solvent It is obtained by various steps of extraction, evaporation and concentration, and cooling and solidification. [Example]: A raw material (intermediate raw material) for a cerium-based abrasive material was produced using the prepared rare earth chloride. First, the prepared rare earth chloride is mixed with dilute hydrochloric acid of 〇·lm〇1/L to prepare a rare earth chloride solution, and the prepared solution is filtered, and the filtered solution is subjected to solvent extraction. In the solvent extraction,

1303661 V. INSTRUCTIONS (21) As an organic solvent, an extractant (PC-88A: manufactured by Daiba Chemical Industry Co., Ltd.) and a diluent (zps〇L: manufactured by Idemitsu Petrochemical Co., Ltd.) which are easy to extract heavy rare earth elements are used. The resulting solution was mixed at a liquid ratio (extractant/diluent) of 1/2. The organic solvent and the rare earth chloride solution (TRE0210g/L) are in a state of flow ratio (organic solvent/gasified rare earth solution) of 8/1, and are subjected to countercurrent multi-stage contact (30 stages) to form a rare earth element. Extract into an organic solvent. Further, in this step, a sufficient amount of aqueous sodium hydroxide solution is added to the countercurrent multistage extraction of the organic solvent to be used, and almost all of the rare earth elements in the rare earth chloride solution are extracted. Thereafter, the organic solvent containing the rare earth element and the 3 mol / L hydrochloric acid aqueous solution were subjected to a countercurrent multi-stage contact (3 0 stage) in a flow ratio (organic solvent / aqueous hydrochloric acid solution) of 8 / 1 · 4 , A part of lanthanum, cerium, and rare earth elements (Pm (Sm) to heavy rare earth and γ) which are more easily extracted by organic solvents remain in the organic solvent, and most of lanthanum and cerium, A part of the rhodium was back-extracted into an aqueous hydrochloric acid solution to obtain a rare earth solution (refined liquid). After the solvent extraction, the obtained rare earth solution is mixed with an aqueous solution of ammonium hydrogencarbonate (or a precipitant) to form a precipitate of a rare earth carbonate, which is then dried by a centrifugal separator and washed (washed) to obtain a barium-based polishing. A rare earth carbonate of a raw material (intermediate raw material) for materials. Its composition, TRE0 is 44wt ° / G. The weight ratio of each rare earth element in TRE0 is the same as that of the obtained lanthanum-based abrasive (refer to Table 1). And F/TRE0 is 0·lwt°/G is not full, (u + Th)/TRE0 is 〇· 〇〇〇5 wt% is not full, (Ca + Ba + Fe + P)/TREO is 〇.4wt% full. The rare earth carbonate (intermediate raw material) thus prepared is mixed with 2 times by weight of pure water of the weight of the raw material, and a wet ball mill (using a diameter of 5 mm)

2169-6322-PF(N2).ptd Page 28 1303661 V. INSTRUCTIONS (22) The cerium oxide ball is used as a pulverizing medium for 8 hours of wet pulverization, to slurry. The DS () of the obtained pulverized product was 〇·8 V m. Then, 10% by weight of hydrofluoric acid was added to the original body to prepare a slurry (F/TRE0) of the fluorine component in the slurry, and the slurry was stirred for 30 minutes (hereinafter referred to simply as fluorine* ratio). The "F/TRE0" after the fluorination treatment was 8. 〇wt%. And the fluorine concentration is measured by alkali melting, warm water extraction and fluoride ion electrode method. The X, the measured component is precipitated, and the supernatant liquid is taken out, and pure water is added for purification. The washed slurry is filtered by pressure filtration. The obtained ferment was dried at 140 ° C for 48 hours. Further, the obtained dried cake was ground with a sample & and the obtained pulverized product was fired (baking temperature 丨〇 〇 〇 〇 c, baking time ^ hours). After calcination, the obtained calcined product was classified with a sample mill powder =:; a wheel classifier (setting a classification point at 5 #m) to obtain a lanthanide abrasive material. Embodiments 2 and 3: In the examples, the organic solvent containing a rare earth element is contacted with a 3 mol/L hydrochloric acid aqueous solution in a countercurrent flow, and a rare earth element such as cerium is back-extracted to a hydrochloric acid aqueous solution, and an organic solvent is used. The flow ratio with the aqueous hydrochloric acid solution (organic solvent/hydrochloric acid aqueous solution) was different from that of the example. Further, the flow ratio (organic solvent/hydrochloric acid aqueous solution) in Example 2 was 8/1·3, and the flow ratio (organic solvent/hydrochloric acid aqueous solution) in Example 3 was 8/1·2. Conditions other than the above are the same as in the first embodiment, and the description thereof is omitted. Further, the rare earth carbonate (intermediate raw material) iTRE〇 produced in Example 2 was 46"/◦, and the treq of the rare earth carbonate (intermediate raw material) produced in Example 3 was 43 wt%. The weight ratio of each rare earth element, whichever embodiment is the same as the final lanthanide abrasive material (refer to the table)

2169-6322-PF(N2).ptd Page 29 1303661

/TTRE0 is 〇· 〇〇〇5wt% not full, (Ca + Ba+Fe + P)/TRE0 is 0·4wt% under 01). In either case, F/TRE0 is 〇·lwt% less than (U+Th), and the fluorocarbon strontium concentrate produced in the United States is prepared as a raw material. 3重量%, and its composition (weight ratio), TRE0 is 70wt%, Ce02/TRE0 is 49. 3wt%,

La2 03 /TRE0 is 34.0 wt%, Nd2 03 /TRE0 is ll.3 wt%, Pr6〇u/TRE〇 is 4·Owt%, F/TREO is 8.0 wt%, and (U + Th)/TRE0 is 〇 Lwt%, (Ca + Ba + Fe + P) / TRE0 is 6.8 wt%. The prepared raw material (Fluorocarbon concentrate) was mixed with 2 times by weight of pure water of the weight of the raw material, and subjected to wet pulverization for 8 hours using a wet ball mill (using a 5 mm diameter oxidized wrong ball as a pulverizing medium). To get the raw material slurry. Further, the obtained raw material slurry was subjected to steps of repulp washing, filtration, drying, calcination, pulverization, and separation to obtain a lanthanum-based abrasive. Further, the conditions of the respective steps after the repulp washing were the same as in the first embodiment. In the comparative examples of Examples 2 and 3, the organic solvent containing a rare earth element is subjected to a countercurrent multistage contact with a 3 mol/L hydrochloric acid aqueous solution, and a rare earth element such as ruthenium is back-extracted to a hydrochloric acid aqueous solution, and the conditions and implementation thereof are carried out. Example j is different. In Comparative Example 2, the flow ratio of the organic solvent to the aqueous hydrochloric acid solution (organic, solvent/hydrochloric acid aqueous solution) was 8/1·6, and the rare earth elements in the organic solvent were all back-extracted to the aqueous hydrochloric acid solution to obtain Rare earth solution (refined liquid). The flow ratio (organic solvent / aqueous hydrochloric acid solution) in Comparative Example 3 was 8 /1 ·1. The other conditions were the same as in the first embodiment. And made in Comparative Example 2

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1303661 V. INSTRUCTION OF THE INVENTION (24) The TRE 造 of the rare earth carbonate (intermediate raw material) produced was 42% by lining, and the rare earth carbonate (intermediate raw material) produced in Comparative Example 3 was 46 wt%. Further, the weight ratio of each rare earth element in TRE〇 is the same as that of the finally produced lanthanum-based abrasive material (see Table 丨). In either case, F/TRE0 is (Klwt% is not full, (u + Th)/TRE〇 is 〇〇〇〇5 wt% less than, (Ca + Ba + Fe + P)/TRE0 is 0.4wt % is not full. Free example i_l.l • In each of the examples, the fluorination treatment was carried out under the same conditions as in Example 2, and the fluorination treatment "F/TRE0" was used. In Example 4, it was 4·〇wt%, Example 5 was 5·5 wt%, Example 6 was 1 lwt%, and Example 7 was 15 wt%. Compounds 8 and 9: In each of the examples, the calcination step The bismuth-based abrasive material was produced under the same conditions as in Example 2 except that the baking temperature was different. The baking temperature was 850 t in Example 8, and Example 9 was 11 Å. (: The above respective examples and The content of the lanthanum-based abrasive obtained in each of the comparative examples, the weight ratio of each of the rare earth oxides in TREO and TRE0, and the like are as shown in Table 1. (0& + 6 & 砰 4?) / 1 rib The abrasive of Comparative Example 1 was 6.2% by weight, and the other abrasive materials were 〇4% by weight.

1303661 V. INSTRUCTIONS (25) [Table 1] Abrasive material _ the weight ratio of each rare earth vapor (ψ«) La2〇3/ F_) F/ U+TV material Nd2〇3 + TRB0 TRBD TRBO Content rate TRBO (wt%) (ψί%) (vt%) (wt%) (wt%) 002 Lai2〇3 Ρ^δΟιι Nd2〇3 b2〇3+Nja〇3 Comparative Example 1 6.1 87.8 48.3 34.6 4.0 11.3 45.9 3.06 93,9 6.9 0.10 itmn 6.6 94.0 50.3 23.7 5.2 20.0 43.7 1.19 100.6 7.0 <0.0003 Example 1 6.5 93.7 53.4 25.1 5.0 15.9 41.0 1.58 100.2 6.9 <i).0CO3 Bao 2 Example 2 6.5 93.8 55, 2 26.1 4,9 13,2 39.3 1.98 100.3 6.9 <0,0003 Example 3 6.4 93.7 57.4 27.0 4.7 10.5 37.5 2.57 100.1 6.8 <0.0003 Comparative Example 3 6.4 93.9 59.4 28.0 4.9 7.1 35.1 3.94 100.3 6.8 <D (XX)3 Example 4 3.0 %3 55.2 26.1 4.9 13.2 39.3 1.98 99.3 3.1 <Ω.(ΧΧ)3 Bao Shi Example 5 4.4 95.4 552 26.1 4.9 13.2 39.3 1.98 99.8 4.6 <0.0003 Example 2 6.5 93.8 55.2 26.1 4.9 13.2 39.3 1.98 100.3 6.9 <0.0003 Example 6 8.2 92.5 55.2 26.1 4.9 13.2 39.3 1.98 100.7 8,9 <0.0003 Example? 10.5 91.3 55.2 26.1 4.9 13.2 39.3 1.98 101.8 11.5 <0.0003 Example 8 6.7 93.7 55.2 26.1 4.9 13.2 39.3 1.98 100.4 7.2 <0.0003 Example 2 6.5 93.8 55.2 26.1 4.9 13.2 39.3 1.98 100.3 6.9 <D.CC03 9 6.3 93.8 55.2 26.1 4.9 13.2 39.3 1.98 100.1 6.7 <0.0003 Using the lanthanide abrasive materials obtained in each of the examples and the comparative examples, the average particle diameter (D5G), the BET specific surface area (BET), and the diffraction X-ray intensity were measured ( Indensity). Further, the polishing test was carried out using the lanthanum-based abrasive materials obtained in the respective Examples and Comparative Examples, and the polishing value (polishing speed), the scratch evaluation of the obtained polished surface, and the adhesion (detergency) were evaluated. The measurement method, the polishing test method, and the evaluation methods of various polishing characteristics will be described below. The measured values and evaluation results are shown in Table 2 below.

2169-6322-PF(N2).ptd Page 32 1303661 V. Description of the invention (26) Measurement of the average particle size (I) using a laser diffraction/scatter method for particle size distribution measurement (Shimadzu Corporation) System: SALD-2 0 0 0A), measuring the particle size distribution of the lanthanide abrasive material, and obtaining the average particle diameter ((D5(): particle size of 50% of the cumulative volume from the side of the small particle size). MT specific surface area ( BET): It is measured according to JIS R 1 626-1 996 (the method of measuring the specific surface area of the gas adsorption BET method of fine ceramic powder) by the "6 · 2 flow method (3 · 5) - point method". A X-ray diffraction device (manufactured by Macscience Co., Ltd., ΜΧΡ18) was used for the X-ray diffraction measurement, and X-ray diffraction was performed on the X-ray diffraction. Shot analysis, measuring the intensity of the diffracted ray. In this measurement, a copper (Cu) target is used, and the diffraction angle (20) is in the diffracted X-ray pattern of the Cu_K A line (obtained by the Cu-K "line"). 2〇.~3〇. The peaks appearing inside are analyzed. Other measurement conditions are tube voltage 4〇kv, tube, flow 150mA. The circumference is 20=5.~8〇., the sample width is 〇〇2, and the f-drawing speed is 4/min. Moreover, the X-ray diffraction of the oxidized decoration (Ce〇2) is read from the obtained X-ray diffraction measurement result. Peak intensity, X-ray diffraction peak intensity of lanthanide oxyfluoride (Ln〇F) and X-ray diffraction peak intensity of lanthanide fluoride (LnFs)'s X-ray diffraction peak intensity ratio (LnOF/ Ce02) , LnF3/Ce02). Grinding test

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Page 33 1303661 V. INSTRUCTION OF THE INVENTION (27) As a grinding machine, a grinding tester (HSP-21 type, manufactured by Taitung Seiki Co., Ltd.) was prepared. This polishing tester is a machine that grinds a polishing target surface with a polishing pad while supplying a polishing slurry to a polishing target surface, and the polishing pad is made of a polyurethane material, and the polishing test is performed once every 2 hours (24 hours). The left and right grinding time) is exchanged for new products. As the object to be polished, a glass for a flat plate having a diameter of 6 5 mm was prepared. Further, the powdery cerium-based abrasive powder was mixed with pure water to prepare an abrasive slurry 50 L having a solid concentration of 15 w %. The abrasive slurry is used to polish the surface of the glass for a flat sheet. In the grinding test, the abrasive slurry was supplied at a rate of 5 liters/min, and the abrasive slurry was recycled. The pressure of the polishing pad to the polishing surface was set to 9.8 kPa (100 g/cin2). The rotational speed of the polishing tester was i rpm. Evaluation of polishing value (polishing speed) After 30 minutes from the start of polishing, the glass for the flat plate to be polished was exchanged. And the exchanged flat plates are measured with a glass system to measure the weight of the glass. Further, the flat plate was polished by glass for 10 minutes, and the amount of reduction in the amount of glass due to polishing was determined. From this value, "grinding value 1" was obtained. Further, the polishing value of the abrasive material of Comparative Example 1 was used as a reference (10 〇 ). In the first 30 minutes and the next 10 minutes, a total of 40 minutes; ^, after the end, exchanged into a new flat glass, 23 hours and 20 minutes (姨 24 hours) grinding, and then exchanged into The flat plate for grinding the object is made of glass. And the exchanged flat plates are measured with a glass system to measure the weight of the glass. + φ & After the glass exchange, the polishing was performed for 10 minutes, and the amount of reduction in the weight of the % i glass due to the polishing was determined, and the "grinding value 2" was determined from the value. And ^ _

2169-6322-PF(N2).ptd Page 34 1303661 V. Description of Invention (28) The grinding value 2 was determined using the polishing value 1 of the polishing material of Comparative Example 1 as a reference (丨〇 〇 ). Based on the "grinding value 1" and the "grinding value 2", the "grinding value ratio (grinding value 2 / polishing value 1)" is obtained, and the "grinding value 1", the "grinding value 2", and the "grinding value ratio" are used. Evaluation of the polishing value of the lanthanum-based abrasive material (Evaluation of the grinding speed of the polishing scratches, r2, Washing the polished flat glass with pure water), and scratching the polished surface after drying in a dust-free state 1 The evaluation uses a halogen lamp of 300,000 lux for rabbit ^ ^ ^ ^ ^ ^ ^" as the light source, and observes by reflection method, the number of points of Tian,,,, Putian, Shi Er, and Qi J Yang, full point 1 00 o'clock, evaluated by the point of reduction. The scratching of the glass substrate for the LCD is required to be electrically recognized by the T text. "The exact one. For the ship, in Tables 2 and 5, ◎ the non-grinding accuracy. In order to judge the basis, it is suitable for HD and glass substrates for LCDs. Table 98, 2 (very less than 95 points (applicable for HD, LCD + 'υ) stands for 98 grinding), "△" stands for 95 points or less is less than 90 points (listening = fine polishing of the glass substrate for the substrate), and "this is used for HD." The glass substrate for LCD is finely ground. The 90 points of the table are not full. (The test can not be carried out with the test. The evaluation is to use the carrier glass, and the adhesion to the abrasive material (detergency) will be Optical microscope after washing and drying

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1303661 V. INSTRUCTIONS (29) ------- In the polymer, take out 5 "c once it is dried, then pour it into a container of pure water, and perform ultrasonic cleaning for 5 minutes. . Ultrasonic washing The carrier glass taken out from the container was washed with pure water, and the carrier glass of the observation object was known. Thereafter, the residual amount of the abrasive particles remaining on the surface of the carrier glass was observed with an optical microscope to evaluate the adhesion. Specifically, in Tables 2 and 5, "〇" means that no residue of the abrasive particles is observed, which is very suitable for fine polishing, and "△" represents that a small amount of abrasive particles are observed, which is suitable for fine polishing, and "X" means that a large amount of abrasive particles remain observed, which is not suitable for fine grinding.

Page 36 1303661 V. Description of invention (30) [Table 2] Physical properties X-ray diffraction peak intensity honing characteristics 〇50 〇m) BET (m2/g) UOF /Ce02 LnF3 /Ce02 Grinding value 1 Grinding value 2 Grinding value evaluation compared with scratch evaluation Comparative Example 1 1.23 3.0 0.82 <0.10 100 23 0.23 Δ △ Comparative Example 2 1.10 3.8 0.76 <0.10 107 32 0.30 Δ Δ Bao Example 1 1.13 3.5 0.62 <0.10 122 82 0,67 0 0 Example 2 1.18 3.3 0,55 <0.10 138 107 0.78 ◎ 0 Example 3 1.20 3.2 0.48 <0.10 132 87 0.66 0 0 Comparative Example 3 1.22 3.0 0.33 <0.10 115 37 0.32 Δ △ Bao Example 4 0.73 4.2 0.30 < 0.10 88 62 0.70 ◎ Δ Example 5 0.95 3.7 0.46 < 0.10 119 88 0.74 ◎ 0 Example 2 1.18 3.3 0.55 < 0.10 138 107 0.78 ◎ 0 Example 6 1.29 2.8 0.63 0.10 151 110 0.73 0 0 賨 Example 7 1.52 2.4 0.83 0.21 161 106 0.66 Λ Δ Example 8 0,91 4.0 0,47 <0.10 113 S3 0.73 ◎ Δ Example 2 1.18 3.3 0.55 <0.10 138 107 0.78 ◎ 0 Implementation Example 9 1.41 2.6 0.61 <0.10 154 111 0.72 0 0 As shown in Table 2, the abrasive material of Example 3, The polishing value (grinding value 1) is high shortly after the start of polishing (after 30 minutes), and also has a high polishing value (grinding value 2) after long-term cycle use. 'The decrease in value due to use is small (grinding) Value ratio = 〇 · 66~0· 78). That is, the sharp grinding value (grinding speed) after the start of the grinding can prevent the higher grinding value from being maintained. Further, in the polishing materials of Examples 1 to 3, the damage to the ground surface was difficult to occur, and it was difficult to adhere to the polished surface. And, there is a polishing scratch, the abrasive material of the example, which is all polished by the Turk Table 2, which is very good,

2169-6322-PF(N2).ptd Page 37 1303661 V. INSTRUCTIONS (31) ---- The abrasive material of Example 2 has the best polishing characteristics. On the other hand, in the polishing materials of Comparative Examples 1 to 3, the polishing value 2 was remarkably lowered, and the polishing force was suddenly lowered by the use of the t-grinding ratio = 〇· 23 to 0·32). Further, it has been found that there is a problem that polishing scratches are likely to occur and adhesion to the polished surface is liable to occur. Therefore, based on the data shown in Table 1, after the respective examples and comparative examples were studied, the following conclusions were obtained. 】 As a lanthanide abrasive material, TRE0 is preferably at least 9 〇 wt%, more preferably 92 wt% or more. The weight ratio of cerium oxide to TRE ( (Ce 〇 2 / TRE 〇) is preferably more than wt%. Further, from each of the examples and the comparative example 2, it is preferable that the weight ratio of the oxidized phase to the TRE0 (Nd2 03 /TRE0) is 16% by weight or less as the lanthanum-based abrasive. Further, from each of Examples and Comparative Example 3, it is preferable that the weight ratio of the oxidized phase to TRE0 (Nd2 03 /TRE0) is at least 10 w % or more as the lanthanum-based abrasive. As the lanthanide abrasive material, the weight ratio of cerium oxide to TRE ( (La2 03 /TRE0) is preferably 3 〇 wt% or less. And comparing the data of each of the examples and the comparative examples (Table) by other viewpoints, knowing that as a lanthanide abrasive material, the weight ratio of yttrium oxide (1^〇3) to yttrium oxide (Nd2〇〇 (La2〇3) /Nd2〇3) is preferably ΐ·4 or more (comparison of each example with comparative example 2), and 2·8 or less (comparison of each example with comparative examples 1 and 3). Further, as a lanthanum abrasive, oxidation The ratio of the total weight of cerium and cerium oxide to TREO ((La2〇3 + Nd2〇3)/TRE〇) is preferably 25% to 5% by weight. Comparing Example 2 and Examples 4 to 7, it is known that As the lanthanide abrasive material, the weight ratio of fluorine content to TREO (F/TRE0) is preferably from 4% by weight to 9% by weight. And as the lanthanide abrasive material, the total weight of uranium and lanthanum is relative to TRE〇 It

1303661

The weight ratio ((U + Th) / TRE0) is preferably 0.05 wt% or less. Day, 0 t 且 and Comparative Examples 1 to 3 and Comparative Examples 1 to 3, the X-ray diffraction peak intensity ratio (Ln 〇 F / V, invention description (32)

Ce02) is best for 〇·4~〇. 7. Further, it can be understood from the respective examples that the average particle size (D5Q) of the abrasive particles is preferably 0 · 7 // m to 1 · 6 // m, and the specific surface area of the BET method is preferably 2.0 m 2 /g to 5.0. M2/g. ', as shown in Table 2, the abrasive materials of Example 2 and Examples 4 to 7.

The grinding value is 1 high and has a high grinding value of 2, and the reduction in the grinding value due to use is relatively small (grinding value ratio = 〇 · 6 6 to 0 · 7 8 ). That is, I , , and 14L prevent jr. The sharpening of the grinding value (grinding speed) after the start of the grinding is performed, and the higher grinding value is maintained for a longer period of time. However, the polishing material of the fourth embodiment has a slightly lower adhesion value than the second embodiment and the polishing value of 1 and the polishing value 2, and has a small amount of adhesion. This is because the weight ratio of the TRE0 amount to the fluorine amount (F/treD〇) is smaller than that of the second embodiment and the X-ray diffraction peak intensity ratio (LnOF/Ce 〇 2) is small. Example 7 The abrasive material was more likely to be scratched than the Example 2 and the like, and had a small amount of adhesion. This is because the krypton ray radiance ratio is larger than that of the second embodiment (1^(^/〇6〇2 or 11^3/〇6〇2). In addition, as shown in Table 2, The abrasive materials of Examples 2, 8 and 9 have a high polishing value of 1 and a relatively high polishing value of 2, and the decrease in the polishing value due to use is relatively small (grinding value ratio = 0.72 to 〇78). In addition, it is possible to prevent the sharpening of the polishing value (polishing rate) after the start of the grinding, and to maintain the polishing of the crucible for a longer period of time. As a result, it is understood that when the material for polishing the raw material of the present invention is used, the baking temperature is (10)^匚~12. 〇〇c>c (better than 85〇t 1100 C), can produce a small decrease in the grinding value (grinding speed)

1303661 ........ V. Description of invention (33) Abrasive material with a larger grinding ratio. After the cap is formed, the barium carbonate, the barium carbonate, the barium carbonate, and the barium carbonate are calcined (calcined), and then mixed to prepare a raw material, and the prepared raw material is used to produce a tantalum-based abrasive. Explain. First, high-purity cesium carbonate (TREO: 45wt%, Ce02/TRE0: 9.99% by weight or more) and strontium carbonate (TREO: 45wt%,

La2 03 /TRE0 : 99·9wt% or more), strontium carbonate (TREO: 45wt%, Pr60u/TRE0 ··99· 9wt% or more), titanium carbonate (TREO: 45wt0/〇,

Nd2 03 /TRE0 : 99· 9w t% or more), respectively, calcination (baking). The calcination temperature is 60 ° C and the calcination time is 12 hours. And calcined to obtain a barium carbonate calcined product (TREO: 83 wt%, Ce02/TRE0: 99·9 wt ° / above, strong heat loss: 17 wt%), barium carbonate calcined product (TREO: 85 wt ° / 〇,

La2 03 /TRE0 : 99·9wt% or more, strong heat loss: i5wt%), barium carbonate calcined product (TREO: 86wt%, Pr60n/TRE0: 99·9wt% or more, strong heat loss: 14wt%), barium carbonate Calcined product (TRE〇: 82wt%, Nd2〇3/TREO: 9.99% by weight, strong heat loss: 18% by weight). Each of the calcined products thus obtained was mixed to prepare a lanthanum-based abrasive (intermediate raw material) used in each of the examples and comparative examples described below. Each of the examples and comparative examples = the composition of the lanthanum-based abrasive (intermediate raw material) is as shown in Table 3. And the weight ratio of (u+T"/TRE〇) of the intermediate materials prepared by mixing these are all 〇·〇〇〇5wt% underfill, and the weight ratio of (Ca + Ba + Fe + p)/TRE〇 0 · 1 wt % is not full.

1303661 V. INSTRUCTIONS (34) [Table 3] TTffiO rare earth chloride-doped soil example iwt%) La2〇3/ Nd2〇3 CeOa Laa〇3 PreOli Nd203 Laa〇3+ Nda〇3 Comparative Example 6 55.0 32.0 5.0 8.0 40.0 4.00 Example 10 55.0 29.0 5.0 11,0 40.0 2,64 Bao Shi Example 11 55.0 27.0 5.0 13.0 40.0 2.08 Example 12 55.0 25.0 5.0 15.0 40.0 1.67 Comparative Example 7 55.0 22.0 5.0 18.0 40.0 1.22 Comparative Example 8 43.0 34.5 4.5 18,0 52.5 1.92 Example 13 46.0 33.0 4.0 17.0 50.0 1,94 Example 14 68.0 19.0 4.0 9.0 28.0 2.11 Comparative Example 9 72.0 16.5 3.5 8.0 24.5 2,06 Example 1 0 to 1 4 and Comparative Example 6 to 9 : The raw material for the prepared lanthanum abrasive material (intermediate raw material = rare earth carbonate calcined product (mixed product)) is mixed with 2 times by weight of pure water of the raw material, using a wet ball mill (using a zirconia having a diameter of 5 mm) The ball was subjected to wet pulverization for 8 hours as a pulverization medium = ", and the raw material slurry was obtained. The obtained pulverized product ho was 0·8 " m. The obtained slurry was subjected to the same treatment as the fluorination treatment). "F/TRE〇" after the fluorination treatment is 8· 〇 , : solid component precipitation 'The upper layer clear liquid is taken out, pure water is added, y ' is washed, and the washed slurry is filtered by pressure filtration. And the polymerization is carried out in the order of drying, simmering, pulverizing, and grading. In addition, the ς = ^ of each step after drying is the same. y /, Example 1 The contents obtained in the above Examples 1 to 14 and Comparative Examples 6 to 9 The fluorine content, the ratio of the weight ratio of each of the rare earth element grinding materials in TREO and TRE0

2169-6322-PF(N2).ptd Page 41 1303661 V. Description of invention (35) As shown in Table 4. And the weight ratio of (Ca + Ba + Fe + P) / TRE0 of these abrasive materials is 0. 1 w t % is not full. [Table 4] V VV VWS' VVV 'The fluorine content of the abrasive material 辛 (wt%) The weight of the abrasive material (wt%) The weight ratio of each rare earth oxide in the TREO (wt%) Laa〇3/ Nd2〇3 F(wt%) Ten TREO (wt%) F/ TREO (wt%) U Ten TV TREO (wt%) Ce02 Lai2〇3 PreOn Ndb〇3 La2〇3+ Nd203 Comparative Example 6 6.4 94.1 55.0 32.0 5.0 8.0 40 4.00 100.5 6.8 <0.0003 Example 10 6.2 94.2 55.0 29.0 5.0 11.0 40 2.64 1C0.4 6.6 Cardio-cerebral Example 11 6.5 94.3 55.0 27.0 5.0 13.0 40 2.08 100.8 6.9 <0.00) 3 Example 12 6.4 94.2 55.0 25.0 5.0 15.0 40 1.67 100.6 6.8 <0.0003 Comparative example? 63 94.0 55.0 22.0 5.0 18,0 40 1.22 ICO,3 6.7 ^).0CO3 Comparative Example 8 7,0 93.2 43.0 34.5 4,5 18,0 52.5 1.92 100,2 7,5 <0.0003 Example 13 6,7 93.6 46.0 33.0 4.0 17.0 50.0 1.94 ICO,3 7.2 <0.003 Example 14 6.0 94.5 68.0 19.0 4.0 9.0 28.0 2.11 100.5 6.3 <0.0003 Comparative Example 9 5.7 94.5 72.0 16.5 3,5 8.0 24,5 2.06 100.2 6.0 ^). C003 Using the lanthanum-based abrasive materials obtained in the respective Examples and Comparative Examples, the average particle diameter (D5Q), the BET specific surface area (BET), and the diffraction X-ray intensity (I ndensity) were measured. Further, the polishing test was carried out using the lanthanum-based abrasive materials obtained in the respective Examples and Comparative Examples, and the polishing value (polishing speed), the scratch evaluation of the obtained polished surface, and the adhesion (detergency) were evaluated. The measurement method and test method are as described previously. The measured values and evaluation results are shown in Table 5.

2169-6322-PF(N2).ptd Page 42 1303661 V. INSTRUCTIONS (36) [Table 5] Physical properties X-ray diffraction peak intensity Abrasive properties D50 BET LnOF LnF3 Grinding value 1 Grinding value 2 mm Tongue attachment surface 〇m) (m2/g) /CeOa /Ce〇2 Comparative Example 6 1.15 3.9 0.83 <0.10 111 33 0.30 Δ Δ Example 10 1.19 3.6 0.65 <0.10 128 87 0.68 〇〇Example 11 1.24 3.5 0.53 < 0.10 140 110 0.79 〇 Example 12 1.25 3.5 0.48 <0.10 131 88 0.67 〇〇Comparative Example 7 1.29 3.0 0.32 <DA0 116 37 0.32 Δ Δ Comparative Example 8 0.99 4.3 ο.ω <0.10 85 26 0.31 Δ X Implementation Example 13 1.04 4.0 0.59 <0.10 98 68 0.69 @ Δ Example 14 1.33 2.5 0.49 135 90 0.67 〇Δ Comparative Example 9 1.37 2.2 0.42 <0.10 142 92 0,65 X Δ As shown in Table 5, the examples of the examples The abrasive material has a high polishing value (grinding value 1) in an unused state and a high polishing value (grinding value 2) in the used state, and the reduction in the polishing value due to use is relatively small (grinding value ratio = 〇) · 6 7~〇· 7 9). Further, the abrasive materials of the respective examples have the advantage that the polishing scratches are less likely to occur and are less likely to adhere to the polished surface. Further, in Examples 丨 to 4, the polishing material of Example 11 had the most excellent polishing properties. On the other hand, in the polishing material of each comparative example, the polishing value 2 was remarkably lowered, and the polishing value (grinding speed) was drastically lowered by use (excluding Comparative Example 9). Further, it has been found to be problematic in that it is easily scratched and scratched and easily adhered to the polished surface. 7 know and for the data shown in Table 4 'Comparative Example and Comparative Example 8, 9 ^ 乂 as the decorative material of the decorative system, the weight ratio of cerium oxide to TRE0 Example 6 1 7 ^ Ε〇) is preferably 45Wt% ~7〇Wt%. And comparing the various examples and comparisons, as the lanthanide abrasive material, the weight ratio of cerium oxide to TRE 〇

1303661

V. INSTRUCTIONS (37) The example (Nd2 03 /TRE0) is preferably i 〇 wt% 〜 16 wt%. Further, as shown in Table 5, as the lanthanum abrasive, the X-ray diffraction peak intensity ratio (LnOF/Ce 〇 2) is preferably 0·4 to 0·7. ' And comparing the data of each of the examples and the comparative examples shown in Table 4 from another point of view, the ratio of the bismuth oxide (1^2〇3) to the titanium oxide (2%) in TRE0 is known (L). 〇3 / N dg 〇3 ) ' From the comparison between the examples and the comparative example 7, it is preferable that the ratio is 1/4 or more. From the comparison between the respective examples and the comparative example 6, it is preferable that the ratio is 2.8 or less. It can be seen from Examples 13 and 14 that if the weight balance of oxidized cerium and lanthanum is adjusted, the weight ratio of cerium oxide to TRE ( (Nd2 〇 3 / TRE 9 wt % 〜 1 7 wt % can also be obtained by practical grinding. Industrial Applicability As explained above, the present invention has few eves, and can be long-lasting: the f-type abrasive material 'scratch-generating abrasive material, and the shorter time gate !^ The right side uses the high-quality polished surface with less adhesion of the present invention. That is: two less scratches, a % abrasive material for the optical hard disk or a magnetic hard disk, and the glass can be provided according to the present invention. Suitable for the field of surface grinding performance; ^ material: grinding, etc., requiring high precision

1303661 Simple description of the schema

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Claims (1)

1303661 _ Case No. 93112159_77 July/4 _Repairing __ VI. Patent application scope • 1 · A korea abrasive material containing at least cerium oxide, oxidized steel and cerium oxide as rare earth oxides and containing fluorine It is characterized in that the total rare earth oxide conversion weight (TRE0) is 90% by weight or more, and the weight ratio of cerium oxide to the total rare earth oxide equivalent weight (Ce02/TRE0) is 50% by weight to 655% by weight, and fluorine is relative to the total rare earth. The weight ratio of the oxide-based weight (F/TREO) is 5.0% by weight to 8.0% by weight, and the weight ratio of the oxidized weight to the total weight of the rare earth oxide (Nd2 03 /TRE0) is 10% by weight to 16% by weight. 2. The 钊5糸 abrasive material according to the patent scope of claim 1, wherein the weight ratio of cerium oxide to the total weight of the rare earth oxide (La2 03 /TRE0) is 22% by weight to 30% by weight. 3 - a lanthanum-based abrasive material containing at least cerium oxide, cerium oxide, and titanium oxide as a rare earth oxide and containing fluorine, characterized in that cerium oxide accounts for the weight ratio of the total rare earth oxide equivalent weight (TRE 〇) ((^〇2/1^£:〇) is 4 5wt %~7 0 wt%, the weight of fluorine relative to the total rare earth oxide, the ratio (J/TRE0) is 5.〇wt%~8.0wt %, and the weight ratio of yttrium oxide α~〇3) to oxidized (Nd2〇3) in the conversion weight of the total rare earth oxide (L a2 〇3 / N hex 2 03 ) is 1 · 4 〜 2 · 8. 4. The decorative abrasive according to claim 3, wherein the total weight of cerium oxide and cerium oxide is in proportion to the total weight of the rare earth oxide ((La2 03 + Nd2 03 ) / TRE0) is 25 wt. % ~ 50wt%. 5. If the lanthanide abrasive material described in the third or third paragraph of the patent application, the weight of the total weight of uranium and thorium relative to the total rare earth oxide ((U+Th)/TRE0) is at 〇 · Below 05wt%. 6) The lanthanide abrasive material as described in claim 3 or 3, 1303661 : 'The fine is measured by the χ ray diffraction method using the Cu-κ α line or the Cu-K a 1 line as the X-ray source, at 20 (the diffraction bar, a 9 n. qn. λα — b , plant k %射射) - 2 0~3 0 The dry circle appears in the dry green:, in the peak, the rare earth oxyfluoride (Ln〇F) ray diffraction peak intensity, ,, = strong X ray diffraction The peak intensity, the intensity ratio of the X-ray diffraction peak intensity which is strong in the χ-ray diffraction peak of cesium oxide (Ce〇2) (Ln〇F/Ce〇2) is 〇~0 · 7 〇· 4 7. The lanthanide abrasive material according to the invention of claim i or 3, wherein the average particle diameter of the abrasive particles (D system 〇·7 〜1 6 . ^, 8 · as claimed in claim 1 or 3 The lanthanum-based abrasive material described in the above section, the BET specific surface area system 2·〇m2/g~5. 〇ffl2/g. 9 · A lanthanide abrasive material as described in claim 1 The raw material for the lanthanum polishing material contains at least cerium oxide, cerium oxide, and titanium oxide as a rare earth oxide, and the cerium oxide accounts for the weight ratio of the total rare earth oxide (Ce〇2/TRE〇). 〇 1:% to 65% by weight, the weight ratio of fluorine to the total rare earth oxide equivalent weight (F/TRE〇) is less than 1·1 wt% 'and the weight ratio of cerium oxide to the total weight of the rare earth oxide (Nd2〇3/TREO) is 1 〇wt%~16wi;%, the weight ratio of the total weight of uranium and lanthanum to the weight of all rare earth oxides ((u + Th)/TRE〇) at 〇· 〇5wt The raw material of the lanthanum-based abrasive material for the lanthanum-based abrasive material according to the third aspect of the patent application, which contains at least cerium oxide, cerium oxide and oxidized cerium as a rare earth oxide, characterized in that The weight ratio of the cerium oxide to the total weight of the rare earth oxide (Ce〇2/TRE〇) is 45 wt% to 70 wt%, and the weight ratio of fluorine to the total weight of the rare earth oxide (F/TRE〇) is not full 2169-6322-PF3(N2).pt Page 47 1303661 Case No. 93112159 Gas? Amendment of the year of the month, the application of the patent range of 0.1% by weight, and the weight ratio of lanthanum oxide to yttrium oxide in the conversion weight of the total rare earth oxide (La2 03 / Nd2 03 ) is 1 · 4~2 · 8 . (11 2169-6322-PF3(N2).ptc第48页