1303603 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種致動器之製造方法，特別是有關於—種 以熱壓方式將金屬板嵌入高分子基板之致動器製造方法。 【先前技術】 近年來，微機電系統（Micro-ElectroMechanical System， MEMS)技術發展快速且成熟，以微機電系統之技術所製作出不 同型態之微機電致動器（Actuator)，係以靜電、磁性、熱致或是 其他形式之能量致動，並廣泛應用於光電、工業儀器、消費性電 子、及生物醫學等領域，其重要性及未來發展潛力不可言喻。 習知技術之靜電式致動㈣製造方法巾，為了使上電極板與 :電極板之間具有m以於其中產生—靜電場而具有致動效 此’即於基材之欲形賴距之位置處，先沉積—層金屬電極層， 接著成長-層厚膜光阻作為一犧牲層細胸社_)，再於^牲 層上猶-金屬電極，最後以濕式侧之方式將多餘之犧牲層去 除’以得戦有—固定間距之靜電式致觸。 a 〜習知技術中所使狀犧牲層必翻用濕式_ _ Etching) 技術去除’ ϋ此必敬用大量之賴雜強之化學溶液進行钱 刻’而現今環侧虹受勒當麵，為了生騎境 化學廢液的破壞，於㈣、心▲ 兄个又百母之 妨，m 過程中所產生之化學廢液不可任意排 力次二Γί廠商需要負擔廢液回收處理的工作所需之設備及人 力貝源的成本支出。 1303603 此外1知技術之靜電式致魅製造方法，由於受限於渴式 转向性祕刻方式，其各方向之额效率亦不相同，致 ，不易控制橫向及縱向之_速率，導致難以製造大面積且厚度 •狀f極板。且轉触之濕式侧亦容1^造成犧牲層去除不均 之問題’必須再經過—道I序製程將殘留之犧牲層去除，不但繁 .造過錄複亦㈣造成本提高。且_濕式侧製織，容易因 Φ，液所洛解的金屬離子或雜質而將污染物殘留於基材上，如此 ' 縣將殘留喊物去除後才可進行後續的製程，對製造成 本亦是一筆不小的負擔。 【發明内容】 、以上的問題’本發明之目的在於提供—種致動器之製造 方法’藉以改良先前技術之致動器的製造方法之不易製造大面積 之電極板、製造過程繁複、製造成本增加、及對環境產生污染的 限制或缺點。 _ 4了達到上述目的，本發明揭露-種致動器之製造方法，其 二驟為，首先提供—高分子基板，接著貼附—第—金屬板於第一 拉具上’减第-模具對高分子基板—側進行據，使第—金屬 =嵌合於高分子基板之—侧。接孰—第二模具對高分子基板嵌 合有第-金屬板之-繼行熱壓，致使高分子基板嵌合有第一金 屬板之-側形成-凹設空間，並使第一金屬板故合於凹設空間之 底部。以貼附有第二金屬板之第三模具對高分子基板後合有第一 金屬板之-舰行熱壓，鍾完成後將第三模具移除，使第二金 7 1303603 屬板之一端喪合於高分子基板，且第二金屬板之另一端懸置於凹 设空間上並對應於第'一金屬板。 本發明之功效在於不需使用習用之犧牲層，以熱壓方式將做 為致動功能之兩金屬板，以熱壓方式平行地嵌合於高分子基板 上，即可快速簡單地製造出具有大面積金屬電極板之致動器，致 使製造工序及成本大幅降低。 以上之關於本發明内容之說明及以下之實施方式之說明係用 以示範與解釋本發明之原理，並且提供本發明之專利申請範圍更 進一步之解釋。 【實施方式】 根據本發明所揭露之致動器之製造方法，係用以製造靜電式 致動器，在以下本發明的詳細說明中，將以微機電技術以及熱壓 技術製造之靜電式致動器做為本發明之最佳實施例。然而所附圖 式僅提供參考與說明用，並非用以限制本發明。 請參閱「第1A圖」至「第3C圖」及「第4圖」，係為致動 态之製造方法之示意圖及步驟流程圖。如「第圖」至「第工。 圖」及「第4圖」所示，首先提供一高分子基板1〇〇 (步驟2〇〇)。 此南分子基板100係以壓克力（PMMA)所製成，以利後續熱壓 製私之成形。接著’將一第一金屬板11()貼附於第一模具上， 並以貼附有第一金屬板U〇之第一模具120對高分子基板1〇〇之 一側進行熱壓（步驟21〇)，當熱壓完成後，將第一模具12〇由高 分子基板100上移除，以使第一金屬板110嵌合於高分子基板1〇〇 8 1303603 之-側（步驟220)，由於第一模具12〇與高分子基板1〇〇進行熱 壓時，兩者係為緊密貼合，故第一金屬板⑽係完全嵌入於高分 子基板100之中而無露出於外。此外，於第一金屬板⑽與第一 模’、120之間具有一脫模層17〇，本發明所採用之模層口〇材 料係為銅金屬層，因錄著特性符合實驗之需求，亦可於其上電 鑛所需之如銅、鎳等金屬層’以於第一模具12〇於高分子基板觸 上移除時，其第—金屬板⑽與第-模具12G間之接合力，小於 第-金屬板no與高分子基板雇之間的接合力，致使第一金屬 板110肷5於回分子基板1〇〇巾，使第一金屬板11〇並不隨著第 :模具12G的鎌而聊於高分子基板UX)，並且本發明揭露之 第一模具120可重複使用。 —如「第2A圖」至「第2C圖」及「第4圖」所示，接著以一 第二模具130對高分子基板喪合有第-金屬板110之-侧進 行熱壓（步驟23〇) ’待熱a處理完成後將第二模具W移除，使 咼刀子基板100甘入5有第一金屬板110之一側开》成一凹設空間⑽ (乂驟240)並使第一金屬板11〇向下嵌入於凹設空間刚之底 部。其中，第二模具13G相對於高分子基板⑽之—側形成有一 凸部131，贱對嵌合有第—金屬板m之高分子基板丨⑻一側 進行熱I ’以形成對應於凸苦131形狀之凹設空間14〇，凸部⑶ 係包含有兩模具板1311以層疊方式設置於第二模具13G上，以形 成凸部131之外形，且兩模具板1311之間、及模具板加與第 二模具13G之係分取—黏著層132進行接合，而本發明所揭露 1303603 之黏著層132係為鈦（Ti)金屬所形成，以使模具板1311與第二 模具130相互緊密結合，避免第二模具13〇對高分子基板1〇〇進 行熱壓處理時，因高溫及壓力之因素導致凸部131模具板1311產 生脫落之問題。 如「第3A圖」至「第3c圖」及「第4圖」所示，最後將— 第二金屬板150貼附於第三模具16〇上，並以貼附有第二金屬板 150之第王模具16〇對高分子基板1〇〇i合有第一金屬板11〇之 一側進行熱壓（步驟250)，當熱壓完成後，將第三模具16〇由高 分子基板100上移除，以使第二金屬板15〇之一端嵌合於高分子 基板100，而另一端懸置於凹設空間14〇上（步驟26〇)，且第二 金屬板150係以平行關係對應於第一金屬板11〇。此外，於第二 金屬板150與第三模具16〇之間具有一脫模層17〇，以於第三模 具勘於高分子基板1〇〇上移除時，其第二金屬板ls〇與第三模 具160間之接合力，小於第二金屬板15〇與高分子基板1〇〇之間 的接合力’致使第二金屬板15〇之一端喪合於高分子基板·中。 當微靜電式制動器導入電流時，以平行關係設置之第一金屬板⑽ 及^二金屬板15G之_產生—靜電場，懸置於凹設空間14〇上 之第二金屬板15G -端受到靜電場的作用，而產生相對於第一金 屬板Π0擺動之制動效果。 與習知技術相較之下，本發明所揭露之致動器製造方法不需 要犧牲層_助，僅彻熱壓技娜做為致動魏之兩金屬板平 行地嵌合於高分子基板上，即可快賴單地製造出靜電式致動 1303603 态，且製造流程及製造成本將大幅簡化降低， 濕式蝕刻所產生之非等向性腐蝕問題 ，而不易 行電極板的限制。 更避免習知技術因 製造出大面積之平[Technical Field] The present invention relates to a method of manufacturing an actuator, and more particularly to an actuator manufacturing method in which a metal plate is embedded in a polymer substrate by a hot pressing method. [Prior Art] In recent years, Micro-ElectroMechanical System (MEMS) technology has developed rapidly and maturely, and various types of microelectromechanical actuators (Actuators) have been fabricated by the technology of MEMS. Magnetic, thermal or other forms of energy actuation, and widely used in optoelectronics, industrial equipment, consumer electronics, and biomedical fields, its importance and future development potential is inexplicable. The electrostatic method of the prior art (4) manufacturing method towel, in order to make the upper electrode plate and the electrode plate have m to generate an electrostatic field therein, and have an actuation effect, that is, the desired shape of the substrate At the position, first deposit a layer of metal electrode layer, then grow - thick film photoresist as a sacrificial layer of thin chest _), then on the ^ layer of the metal-electrode, and finally the wet side of the way The sacrificial layer is removed to provide an electrostatic touch with a fixed pitch. a ~ The sacrificial layer in the conventional technology must be turned over with wet _ _ _ ching technology to remove ' ϋ 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 必 而In order to destroy the chemical waste liquid in the riding environment, in the case of (4), the heart ▲ brother and the hundred mothers, the chemical waste liquid generated in the m process cannot be arbitrarily discharged. The manufacturer needs to bear the work of recycling the waste liquid. The cost of equipment and manpower. 1303603 In addition, the electrostatic fascination manufacturing method of the known technology is limited by the thirst-type steering secret pattern, and the efficiency of each direction is also different, so that it is difficult to control the lateral and vertical velocities, resulting in difficulty in manufacturing large Area and thickness • shape f plate. Moreover, the wet side of the touch can also cause the problem of uneven removal of the sacrificial layer. The residual sacrificial layer must be removed by the I-order process, which is not only complicated but also caused by the recording (4). And _wet side weaving, it is easy to leave contaminants on the substrate due to Φ, metal ions or impurities that are dissolved by the liquid, so that the county can remove the shouts before proceeding to the subsequent process, and the manufacturing cost is also It is a big burden. SUMMARY OF THE INVENTION The above problem 'the object of the present invention is to provide a method for manufacturing an actuator' which is advantageous for improving the manufacturing method of the prior art actuator, which is difficult to manufacture a large-area electrode plate, complicated in manufacturing process, and manufacturing cost. Increases or limits or disadvantages that cause pollution to the environment. In order to achieve the above object, the present invention discloses a method for manufacturing an actuator. The second step is to first provide a polymer substrate, and then attach the first metal plate to the first puller to reduce the first die. On the side of the polymer substrate, the first metal is fitted to the side of the polymer substrate. The second mold is subjected to hot pressing of the first metal plate to the polymer substrate, so that the polymer substrate is fitted with the side-side forming-recessed space of the first metal plate, and the first metal plate is formed. Therefore, it fits at the bottom of the recessed space. The third metal plate to which the second metal plate is attached is attached to the polymer substrate, and the first metal plate is combined with the ship's hot pressing. After the clock is completed, the third mold is removed, so that the second gold 7 1303603 is one end of the plate. The composite substrate is smashed, and the other end of the second metal plate is suspended on the recessed space and corresponds to the first metal plate. The effect of the invention is that the two metal plates, which are actuating functions, can be directly and thermally mounted on the polymer substrate in a hot pressing manner without using a conventional sacrificial layer, and can be quickly and easily manufactured. The actuator of the large-area metal electrode plate causes the manufacturing process and cost to be greatly reduced. The above description of the present invention and the following description of the embodiments of the present invention are intended to illustrate and explain the principles of the invention. [Embodiment] A method for manufacturing an actuator according to the present invention is for manufacturing an electrostatic actuator. In the following detailed description of the present invention, an electrostatic actuator manufactured by microelectromechanical technology and hot pressing technology will be used. The actuator is the preferred embodiment of the invention. However, the drawings are provided for reference and description only, and are not intended to limit the invention. Please refer to "1A" to "3C" and "4" for a schematic diagram of the manufacturing method and a flow chart of the steps. As shown in "Graphic" to "Working. Figure" and "Figure 4", a polymer substrate 1 is first provided (step 2). The south molecular substrate 100 is made of acrylic (PMMA) to facilitate subsequent hot pressing. Then, a first metal plate 11 is attached to the first mold, and one side of the polymer substrate 1 is heat-pressed by the first mold 120 to which the first metal plate U is attached (step 21〇), after the hot pressing is completed, the first mold 12〇 is removed from the polymer substrate 100 such that the first metal plate 110 is fitted to the side of the polymer substrate 1〇〇13 1303603 (step 220). When the first mold 12A and the polymer substrate 1 are hot-pressed, the two are in close contact with each other, so that the first metal plate (10) is completely embedded in the polymer substrate 100 without being exposed. In addition, there is a release layer 17〇 between the first metal plate (10) and the first molds '120. The mold layer material used in the present invention is a copper metal layer, and the recording characteristics meet the requirements of the experiment. The metal layer such as copper or nickel required for the electrowinning can also be used to bond the first metal plate (10) and the first mold 12G when the first mold 12 is removed from the polymer substrate. , less than the bonding force between the first metal plate no and the polymer substrate, causing the first metal plate 110肷5 to be wiped back on the molecular substrate 1, so that the first metal plate 11〇 does not follow the first: mold 12G The polymer substrate UX) is discussed, and the first mold 120 disclosed in the present invention can be reused. - as shown in "2A" to "2C" and "4", the second mold 130 is used to heat-press the side of the polymer substrate with the first metal plate 110 (step 23). 〇) 'After the heat a treatment is completed, the second mold W is removed, so that the boring knife substrate 100 is slid into the side of one of the first metal plates 110 to form a recessed space (10) (step 240) and first The metal plate 11〇 is embedded downwardly at the bottom of the recessed space. The second mold 13G is formed with a convex portion 131 on the side of the polymer substrate (10), and the heat is applied to the side of the polymer substrate 丨 (8) on which the first metal plate m is fitted to form a corresponding bitter 131. a recessed space 14 〇, the convex portion (3) includes two mold plates 1311 disposed on the second mold 13G in a stacked manner to form a convex portion 131, and between the two mold plates 1311 and the mold plate The adhesive layer 132 of the second mold 13G is joined by the adhesive layer 132, and the adhesive layer 132 of the 1303603 disclosed in the present invention is formed of titanium (Ti) metal, so that the mold plate 1311 and the second mold 130 are closely combined with each other to avoid When the second mold 13 is subjected to hot pressing treatment on the polymer substrate 1 , the mold plate 1311 of the convex portion 131 is peeled off due to high temperature and pressure. As shown in "3A" to "3c" and "4", finally, the second metal plate 150 is attached to the third mold 16 and is attached with the second metal plate 150. The king mold 16 热 heat-presses one side of the polymer substrate 1 〇〇 i with the first metal plate 11 ( (step 250), and after the hot pressing is completed, the third mold 16 is 〇 from the polymer substrate 100 Removing, so that one end of the second metal plate 15 is fitted to the polymer substrate 100, and the other end is suspended on the recessed space 14〇 (step 26〇), and the second metal plate 150 is in a parallel relationship. On the first metal plate 11〇. In addition, there is a release layer 17〇 between the second metal plate 150 and the third mold 16〇, so that when the third mold is removed on the polymer substrate 1〇〇, the second metal plate ls〇 The bonding force between the third molds 160 is smaller than the bonding force between the second metal plate 15 and the polymer substrate 1', so that one end of the second metal plate 15 is smashed into the polymer substrate. When the micro electrostatic brake introduces a current, the first metal plate (10) and the second metal plate 15G disposed in a parallel relationship generate an electrostatic field, and the second metal plate 15G-end suspended on the recessed space 14〇 is received. The action of the electrostatic field produces a braking effect that oscillates relative to the first metal plate. Compared with the prior art, the actuator manufacturing method disclosed in the present invention does not require a sacrificial layer-assisting, and only the heat-pressing technique is used as the actuation of the two metal plates of the Wei in parallel on the polymer substrate. The electrostatically actuated 1303603 state can be manufactured in a single manner, and the manufacturing process and manufacturing cost will be greatly simplified, and the non-isotropic corrosion problem caused by wet etching is not easily limited by the electrode plate. More avoiding the use of conventional technology to create a large area
雖然本發明之實施例揭露如上所述， 明，任何熟習_技藝者，在錢離本發明奸驟定本發 凡依本發日騎請範圍職之形狀 精神和乾圍内，舉 之變更，iu卜士政 構以彳寸敛及精神當可做些許 一 本發明之專利保護範圍須視本說明書所附之申請專 利範圍所界定者為準。 【圖式簡單說明】Although the embodiment of the present invention is disclosed as described above, any skilled person in the art, in the form of a change in the shape of the spirit of the scope of the present, The scope of the patent protection of the invention is subject to the scope of the patent application attached to this specification. [Simple description of the map]
第1A圖為本發明之分解步驟示意圖 flB圖為本發曰月之分解步驟示意圖 第1C圖為本剌之分解步驟示意圖 第2A圖為本發明之分解步驟示意圖 圖為本發明之分解步驟示意圖 =2C圖為本發明之分解步驟示意圖 f3A圖為本發明之分解步驟示意圖 第3B圖為本發明之分解步驟示意圖 圖為本發明之分解步驟示意圖 第4圖為本發明之步驟流程圖。 【主要元件符號說明】 100 高分子基板 第一金屬板 以及 11 110 1303603 120 130 131 1311 132 140 150 160 170 步驟200 步驟210 步驟220 步驟230 步驟240 第一模具 第二模具 凸部 模具板 黏著層 凹設空間 弟二金屬板 第三模具 脫模層 提供一高分子基板 貼附有第一金屬板之第一模具對高分子基板一側 進行熱壓 第一金屬板嵌合於高分子基板 以第二模具對高分子基板嵌合有第一金屬板之一 侧進行熱壓 高分子基板嵌合有第一金屬板之一侧形成凹設空 間 步驟250 貼附有第二金屬板之第三模具對高分子基板嵌合 有第一金屬板之一侧進行熱壓 步驟260 第二金屬板一端嵌合於高分子基板，且另一端懸 置於凹設空間 121A is a schematic diagram of an exploded step of the present invention. FIG. 1C is a schematic diagram of a decomposition step of the present invention. FIG. 2A is a schematic diagram of an exploded step of the present invention. 2C is a schematic diagram of the decomposition steps of the present invention. FIG. 3B is a schematic diagram showing the decomposition steps of the present invention. FIG. 3B is a schematic diagram showing the decomposition steps of the present invention. FIG. [Main component symbol description] 100 polymer substrate first metal plate and 11 110 1303603 120 130 131 1311 132 140 150 160 170 Step 200 Step 210 Step 220 Step 230 Step 240 First mold second mold convex portion mold plate adhesive layer concave The third mold release layer of the space two metal plate is provided with a first substrate with a first metal plate attached to the polymer substrate, and the first metal plate is heat-pressed on the side of the polymer substrate. The mold is formed by laminating one side of the first metal plate on the polymer substrate, and the concave portion is formed on one side of the first metal plate. Step 250 is attached to the third metal plate to which the second metal plate is attached. The molecular substrate is fitted with one side of the first metal plate to perform a hot pressing step 260. One end of the second metal plate is fitted to the polymer substrate, and the other end is suspended in the recessed space 12