JP2014004826A - Pattern forming method and mold release device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To excellently release an imprint mold and a material to be transferred without depending on the quality of the material to be transferred.SOLUTION: A mold release device 10 releases an imprint mold 30 from a material to be transferred 20 pressed by the imprint mold 30 to form a transfer pattern. A pattern forming method comprises: fixing an end part side of the material to be transferred 20 pressed by the imprint mold 30 to a jig 11; fixing the imprint mold 30 on a stage 12; pressing a force plunger 13 for mold release having pressing surfaces 13a and 13b on a surface on the side opposite to the imprint mold 30 side of the material to be transferred 20; moving the jig 11 so that the material to be transferred 20 is bent along the pressing surfaces 13a and 13b to form a peeling start point between the imprint mold 30 and the material to be transferred 20; separating the imprint mold 30 and the material to be transferred 20 in a direction vertical to the forming surface of a pattern 31 of the imprint mold 30 in a bent state of the material to be transferred 20 to release the imprint mold 30 from the material to be transferred 20.

Description

  The present invention relates to a pattern forming method and a mold release apparatus for releasing a imprint mold from a transfer material to which the imprint mold is pressed to form a transfer pattern.

  Conventionally, an imprint method is known in which an imprint mold having an uneven pattern is pressed against a material to be transferred to form a desired transfer pattern on the material to be transferred (see, for example, Patent Document 1). Patent Document 1 discloses a concavo-convex pattern in which a transfer substrate having an imprint mold pressed against a resist layer is curved by pressurizing the back side so that the resist layer side maintains a convex state with a predetermined curvature from the start to the end of mold release. A forming apparatus is disclosed.

JP 2010-234669 A

  However, in the pattern forming method in the conventional concavo-convex pattern forming apparatus disclosed in Patent Document 1, the resist layer side of the transfer substrate is maintained in a dome shape with a predetermined curvature at the time of mold release. The layer must be made of a material having excellent stretchability. If a resist layer made of a non-stretchable material is used, there is a problem that wrinkles are formed in the resist layer and the transfer pattern is easily broken.

  The present invention provides a pattern forming method and a release apparatus that can solve the above-described problems caused by the prior art and can release the imprint mold and the transfer material satisfactorily without depending on the material of the transfer material. The purpose is to provide.

  One pattern forming method according to the present invention includes a step of fixing an end portion side of a transfer material pressed against an imprint mold to a jig and fixing the imprint mold to a stage; and A step of pressing a mold for release having a pressing surface made of a convex curved surface curved in a bowl shape on a surface opposite to the side of the imprint mold, and the jig for transferring the jig to the mold for mold release A step of forming a starting point of separation between the imprint mold and the transfer material, and a state of bending the imprint mold while the transfer material is bent. And a step of separating the imprint mold and the material to be transferred in a direction perpendicular to a pattern forming surface, and releasing the imprint mold from the material to be transferred.

  According to one pattern forming method of the present invention, the pressing surface of the mold for pressing that presses the surface of the transfer material opposite to the imprint mold side is a convex curved surface that is curved like a bowl, for example, a cylindrical curved surface Therefore, even if the transfer material is bent along the pressing surface of the mold for release by a jig fixed to the end side of the transfer material, it is impossible to stretch the transfer material in the expansion / contraction direction. No power is applied. For this reason, wrinkles and the like do not occur even if the transfer material is a non-stretchable material. According to this pattern forming method, a starting point of peeling is formed between the imprint mold and the transfer material, and the imprint mold and the transfer material are separated while the transfer material is bent. Even if a non-stretchable material to be transferred is used, it is preferable that after the peeling start point is formed between the imprint mold and the material to be transferred, the peeling progresses inward from the peeling start point. The transfer pattern can be formed by releasing the mold. Thereby, it is possible to prevent the transfer pattern from collapsing and to prevent the imprint mold from being damaged.

  In one embodiment of the present invention, the mold for release is such that the curvature of the pressing surface corresponding to the pattern transfer region of the transfer material is smaller than the curvature of the pressing surface corresponding to the pattern non-transfer region. Is formed.

  In another embodiment of the present invention, the release mold has a flat pressing surface corresponding to the pattern transfer region of the transfer material.

  Another pattern forming method according to the present invention includes a step of fixing an end portion side of a transfer material pressed against an imprint mold to a jig and fixing the imprint mold to a stage; and Press formed on the surface opposite to the imprint mold side so that the curvature of the pressing surface corresponding to the pattern transfer region of the transfer material is smaller than the curvature of the pressing surface corresponding to the pattern non-transfer region. A step of pressing a mold for release having a surface, and the jig is moved so that the material to be transferred is bent along the pressing surface of the mold for release, and the imprint mold and the material to be transferred A step of forming a peeling start point between the imprint mold and the transfer material in a direction perpendicular to a pattern forming surface of the imprint mold while the transfer material is bent. The transfer material Characterized by comprising the step of releasing the al the imprint mold.

  According to another pattern forming method of the present invention, the curvature of the pressing surface of the mold release mold corresponding to the pattern transfer area is set smaller than the curvature of the pressing surface of the mold release mold corresponding to the pattern non-transfer area. Therefore, an excessive force in the expansion / contraction direction is not generated on the transfer material in the pattern transfer region. Thereby, like the above-mentioned one pattern formation method, it can control that a transfer pattern collapses and can prevent damage to an imprint type.

  One mold release apparatus according to the present invention is a mold release apparatus for releasing the imprint mold from the material to be transferred on which the imprint mold is pressed, and a jig for fixing the end side of the material to be transferred. And a stage having a holding mechanism for holding the imprint mold, and a release surface in which a pressing surface made of a convex curved surface curved in a bowl shape is pressed against the surface of the transfer material opposite to the imprint mold side. At the time of mold release and mold release, the mold release mold is pressed against the material to be transferred, and the jig is moved so that the material to be transferred is bent along the pressing surface, and the material to be transferred is bent. A drive means for moving the stage relative to the pattern forming surface of the imprint mold in a vertical direction while pulling the imprint mold away from the transfer material is provided. And

  Another mold release apparatus according to the present invention is a mold release apparatus for releasing the imprint mold from the material to be transferred on which the imprint mold is pressed, and a jig for fixing the end side of the material to be transferred. And a stage having a holding mechanism for holding the imprint mold, and the curvature of the pressing surface corresponding to the pattern transfer region of the transfer material on the surface opposite to the imprint mold side of the transfer material, A pressing mold for pressing a pressing surface formed so as to be smaller than the curvature of the pressing surface corresponding to the pattern non-transfer area, and pressing the pressing surface against the material to be transferred at the time of releasing, The jig is moved so that the material to be transferred bends in a state along the pressing surface of the mold for release, and the stage is placed on the pattern forming surface of the imprint type while the material to be transferred is bent. Relative to the vertical direction It is dynamic, and further comprising a drive means for separating the said transfer material and the imprint mold.

  According to one and other mold release devices according to the present invention, the same operational effects as those of the pattern forming method described above can be obtained.

  According to the present invention, the imprint mold and the transfer material can be favorably released regardless of the material of the transfer material.

It is a perspective view which shows the mold release apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing which shows a part of the mold release apparatus. It is sectional drawing which shows a part of transfer apparatus of the front | former stage of the mold release apparatus. It is a flowchart which shows the mold release process by the mold release apparatus. It is sectional drawing which shows the mode at the time of mold release of the mold release apparatus. It is sectional drawing which shows the mode at the time of mold release of the mold release apparatus. It is sectional drawing which shows the mode at the time of mold release of the mold release apparatus. It is a perspective view which shows the mold for mold release of the mold release apparatus. It is a perspective view which shows the other mold for mold release in the mold release apparatus. It is a perspective view which shows the other mold for mold release of the mold release apparatus. It is sectional drawing which shows the mode at the time of mold release by the mold release apparatus which concerns on the 2nd Embodiment of this invention.

  Hereinafter, a pattern forming method and a mold release apparatus according to embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[First Embodiment]
FIG. 1A is a perspective view showing a mold release device according to the first embodiment of the present invention. FIG. 1B is a cross-sectional view showing a part of the release device. FIG. 2 is a cross-sectional view showing a part of the transfer device in the preceding stage of the mold release device. FIG. 3 is a flowchart showing a mold release process by the mold release device. 4-6 is sectional drawing which shows the mode at the time of mold release of a mold release apparatus. FIG. 7 is a perspective view showing a mold for mold release of the mold release apparatus.

  As shown in FIGS. 1A and 1B, a release apparatus 10 according to the first embodiment prepares a transfer material 20 made of, for example, a resin film, on which an imprint mold 30 is pressed by a transfer apparatus which will be described later. Thus, the imprint mold 30 is released from the transfer material 20 to form a transfer pattern.

  As shown in FIG. 1, the release device 10 according to the first embodiment prepares a transfer material 20 made of, for example, a resin film in which an imprint mold 30 is pressed by a transfer device which will be described later. This is an apparatus for releasing the imprint mold 30 from the transfer material 20 to form a transfer pattern.

  The mold release apparatus 10 includes a jig 11 that fixes the end portion side of the transfer material 20, and a stage 12 that includes a holding mechanism that holds the imprint mold 30 by suction, for example. The release device 10 also includes a release pressing die 13 having a substantially cylindrical curved pressing surface that is curved in a bowl shape, and the pressing surface is on the surface opposite to the imprint die 30 side of the transfer material 20. Pressed.

  For example, the mold for release 13 is a spherical surface formed so that the curvature of the pressing surface 13a corresponding to the pattern transfer region of the transfer material 20 is smaller than the curvature of the pressing surface 13b corresponding to the pattern non-transfer region. Shaped pressing surfaces 13a and 13b. The mold for release 13 is connected to third driving means (not shown), which will be described later, via a support shaft 14, for example. In addition, the pressing surface 13a is formed in a planar shape in which the curvature becomes substantially zero as it is closer to the center.

  For example, the jig 11 has a structure capable of sandwiching the end portion of the transfer material 20 in the thickness direction of the transfer material 20. In this example, since the mold for release 13 has a shape including the deformed cylindrical press faces 13a and 13b whose center is close to a flat surface, the jig 11 is formed along, for example, both end edges of the mold for release 13. In addition, the transfer material 20 is formed so as to be able to hold the end of the transfer material 20 in a straight line. In addition, the jig 11 may be configured to be able to sandwich both end portions in a predetermined direction of the transfer material 20 and preset end portions in accordance with the shape of the mold for release 13.

  In this embodiment, for example, a resin film made of thermoplastic polyimide, polyolefin, liquid crystal polymer, or the like having a thickness of about 25 μm, a resin film made of a thermosetting epoxy resin, or the like is used as the transfer material 20. These resin films usually have stretchability, but a resin film made of a non-stretchable material can also be applied to the transfer material 20 of this example.

  The imprint mold 30 is a mold such as a mold or a die, and a pattern 31 that is inverted with respect to the uneven pattern transferred to the transfer material 20 is formed. The imprint mold 30 is made of, for example, silicon, and the pattern 31 is formed in a pattern having a minimum line / space (L / S) of 5 μm / 5 μm and a height of 5 μm.

  The material of the imprint mold 30 is not limited. For example, the imprint mold 30 may be formed of nickel, copper, DLC (diamond-like carbon), or the like and formed with a pattern 31 having a desired fine pitch. . Further, the surface of the imprint mold 30 on the pattern 31 side may be subjected to an easy mold release process coated with, for example, a fluororesin. The jig 11 and the stage 12 can also be made of the same material as the imprint mold 30 described above.

  Further, the jig 11, the stage 12 and the mold for release 13 of the mold release apparatus 10 correspond to first, second and third driving means that can move each of them in the vertical direction relatively. It is attached. On the other hand, a suction hole 12a is formed in the stage 12 at a location corresponding to the position where the imprint mold 30 is disposed.

  The imprint mold 30 is sucked and fixed onto the stage 12 by being sucked by a suction device (not shown) through the suction hole 12a.

Next, a pattern forming method will be described.
In the transfer stage, as shown in FIG. 2A, a film-shaped transfer material 20 and an imprint mold 30 are prepared, and a pattern transfer region (location) of the transfer material 20 and the pattern of the imprint mold 30 are prepared. These are arranged on the stages 8 and 9 of the transfer device 40 after being aligned with the position 31.

  At this time, for example, the transfer material 20 is attached and fixed to the stage 9 by a pressing plate 9a, a bolt 9b, and a nut 9c provided on the stage 9. Further, the imprint mold 30 is stuck and fixed so as to be easily removable after the transfer of the pattern 31 from the stage 8 by, for example, an adhesive sheet.

  Then, while heating at least one of the imprint mold 30 and the transfer member 20, for example, the stage 8 is moved to the stage 9 side, and the imprint mold 30 is placed on the transfer material 20 as shown in FIG. The pattern 31 is transferred by pressing. At this time, it is preferable that the transfer material 20 is heated to a temperature at which the transfer material 20 becomes soft and then pressed. However, when the transfer material 20 is made of a thermoplastic resin, the transfer material 20 is heated to a temperature equal to or higher than the glass transition point. Is desirable.

  After the pattern 31 is transferred in this manner, the imprint mold 30 and the transfer material 20 are cooled below the temperature at which the transfer material 20 becomes soft, and conveyed to the mold release device 10 described above in an integrated state. The mold release process by the mold release device 10 is started. Here, the mold release step will be described with reference to FIG.

  First, as shown in FIG. 1, the end side of the transfer material 20 is fixed to the jig 11 (step S100), and the stage 12 is brought into contact with the imprint mold 30 so that the imprint mold 30 is placed on the stage 12. (Step S102). The imprint mold 30 is fixed to the stage 12 by a suction method by suction through the suction hole 12a, a fixing method by a not-shown pressing plate, an electrostatic suction method or an adhesion method using an adhesive sheet or the like. be able to.

  Next, as shown in FIG. 4, the release driving die 13 is shown on the surface opposite to the imprint die 30 side of the transfer material 20 by a third driving means as indicated by an arrow straight line (downward) in FIG. 4. Thus, the pressing surfaces 13a and 13b are pressed against each other (step S104). At the same time, as shown by an arrow straight line (upward) in FIG. 4, the jig 11 is moved so that the transferred material 20 bends in a state along the pressing surfaces 13 a and 13 b of the release mold 30, and the transferred material 20 is moved. It bends (step S106).

  At this time, the peeling force acts on the interface end portion between the transfer material 20 and the imprint mold 30 at the boundary between the pattern transfer region and the non-transfer region of the transfer material 20, and the interface end portion is peeled off and peeled off. A starting point is formed. After that, as shown in FIG. 5, the jig 11 and the mold release mold 13 are kept in a state where the jig 11 and the mold release mold 13 bend the transferred material 20 by the first and third driving means. 5 is moved in the vertical direction (upward) with respect to the formation surface of the pattern 31 of the imprint mold 30 as indicated by a straight line in FIG. 5, for example, and is relatively separated from the stage 12 (step S108).

  With the movement of the jig 11 and the mold for release 13, the peeling proceeds from the peeling start point side toward the center of the transfer material 20 and the imprint mold 30, and finally completely peels off. The imprint mold 30 is released from the transfer material 20 (step S110). As described above, since the peeling start point is already formed before the separation, the transfer proceeds smoothly without breaking the transfer pattern 21 of the transfer material 20 formed by the pattern 31.

  Finally, as shown in FIG. 6, the bending of the transfer material 20 held by the movement of the jig 11 by the first driving means and the release mold 13 by the third driving means is, for example, for release By moving the pressing die 13, the pressing is released and returned to its original state. At the same time, the end of the end of the transfer material 20 by the jig 11 is released, and then the transfer material 20 is taken out (step S112), the imprint mold 30 is removed from the stage 12, and a series of processing according to this flowchart is performed. finish. In this way, the imprint mold 30 is released from the transfer material 20, whereby a transfer pattern 21 is formed on the transfer material 20.

  As described above, according to the pattern forming method by the mold release device 10 according to the first embodiment, the transfer material 20 to which the mold release mold 13 is pressed is moved along the pressing surfaces 13 a and 13 b by the jig 11. The starting point of peeling is formed by bending in the state. Then, the imprint mold 30 and the transfer material 20 are separated from each other while the transfer material 20 is bent, and the mold release is performed.

  That is, since the material to be transferred 20 that is a resin film is bent, the imprint mold 30 does not have to be flexible, and in a direction perpendicular to the formation surface of the pattern 31 while the material to be transferred 20 is bent. Since the transfer material 20 and the imprint mold 30 are separated, the transfer pattern 21 does not collapse.

  In addition, since it is only necessary to bend the transfer material 20 to the extent that it is possible to form a peeling start point with the imprint mold 30, the non-stretchable resin film may be used in the transfer region of the pattern 31. And the like can be suppressed. Accordingly, the transfer material 20 and the imprint mold 30 can be favorably released regardless of the material of the transfer material 20.

  As shown in FIG. 7, the above-described mold for release 13 includes deformed cylindrical pressing surfaces 13a and 13b that are curved in a bowl shape, and the curvature of the pressing surface 13a is smaller than the curvature of the pressing surface 13b. Although what was formed was used, the following may be used, for example. That is, as shown in FIG. 8, a mold release die 13 </ b> B having a cylindrical press surface 13 c having a certain curvature curved in a bowl shape toward the transfer material 20 may be used.

  Further, as shown in FIG. 9, a dome-like, spherical release mold 13C formed so that the curvature of the pressing surface 13d in the pattern transfer region is smaller than the curvature of the pressing surface 13e in the pattern non-transfer region. May be used. Thus, the mold for release 13 may be formed in a shape having a pressing surface capable of forming the peeling start point as described above.

[Second Embodiment]
FIG. 10 is a cross-sectional view showing a state at the time of mold release by the mold release apparatus according to the second embodiment of the present invention. In the following description, the same reference numerals are assigned to portions that overlap the portions that have already been described, and description thereof is omitted. When the imprint mold 30 and the transfer material 20 are separated from each other, the release device 10A according to the second embodiment is directed from the peeling start point of both to the progressing direction of peeling (that is, toward the interface between the two). ) A gas ejection mechanism (not shown) for blowing air is provided to assist smooth peeling, which is different from the mold release device 10 according to the first embodiment.

  That is, as shown to Fig.10 (a), 10 A of mold release apparatuses are the jig | tool 11, the stage 12, the pressing die 13 for mold release, 1st-1st like the mold release apparatus 10 which concerns on 1st Embodiment. A gas ejection mechanism for ejecting air toward the interface edge between the material to be transferred 20 and the imprint mold 30 at the boundary between the pattern transfer region and the non-transfer region of the material to be transferred 20 together with each part such as the driving means 3. A plurality of nozzles 7 are provided.

  Then, in the mold release step, as shown in FIG. 10A, after the material to be transferred 20 on which the imprint mold 30 is pressed is fixed to the jig 11 and placed on the stage 12, the process shown in FIG. As shown in FIG. 4, the transfer material 20 is bent along the pressing surfaces 13a and 13b, and a separation start point is formed at the interface end.

  When the separation start point is formed, air is blown out from each nozzle 7, and the stage 12 is moved to the transfer material 20 while the transfer material 20 is bent while the air blowing is continued as shown in FIG. The imprint mold 30 is released from the material to be transferred 20 by being moved relatively in a direction away from the transfer material 20.

  According to the pattern forming method by the mold release apparatus 10A according to the second embodiment configured as described above, as shown in FIGS. 10B and 10C, at the time of mold release, along with the movement of the stage 12, Since the air supplied from the gas ejection mechanism is blown toward the interface between the transfer material 20 and the imprint mold 30, the mold can be released more satisfactorily.

DESCRIPTION OF SYMBOLS 10 Mold release apparatus 11 Jig 12 Stage 12a Suction hole 13 Mold release molds 13a, 13b Press surface 20 Transfer material 21 Transfer pattern 30 Imprint mold 31 Pattern

Claims (6)

Fixing the imprint mold to the end of the transfer material pressed against the jig, and fixing the imprint mold to the stage;
A step of pressing a mold for release having a pressing surface made of a convex curved surface curved in a bowl shape on the surface opposite to the imprint mold side of the transfer material;
Moving the jig so that the material to be transferred bends along the pressing surface of the mold for release, and forming a starting point of peeling between the imprint die and the material to be transferred;
With the transferred material bent, the imprint mold and the transferred material are separated from each other in a direction perpendicular to the pattern forming surface of the imprint mold, and the imprint mold is released from the transferred material. And a pattern forming method. The mold for release is formed such that the curvature of the pressing surface corresponding to the pattern transfer region of the transfer material is smaller than the curvature of the pressing surface corresponding to the pattern non-transfer region. The pattern forming method according to claim 1. The pattern forming method according to claim 1, wherein the release mold has a flat pressing surface corresponding to a pattern transfer region of the material to be transferred. Fixing the imprint mold to the end of the transfer material pressed against the jig, and fixing the imprint mold to the stage;
On the surface of the transfer material opposite to the imprint mold side, the curvature of the pressing surface corresponding to the pattern transfer area of the transfer material is smaller than the curvature of the pressing surface corresponding to the pattern non-transfer area. A step of pressing a mold for release having a pressing surface formed on
Moving the jig so that the material to be transferred bends along the pressing surface of the mold for release, and forming a starting point of peeling between the imprint die and the material to be transferred;
With the transferred material bent, the imprint mold and the transferred material are separated from each other in a direction perpendicular to the pattern forming surface of the imprint mold, and the imprint mold is released from the transferred material. And a pattern forming method. A mold release device for releasing the imprint mold from the transfer material pressed against the imprint mold,
A jig for fixing the end side of the transfer material;
A stage having a holding mechanism for holding the imprint mold;
A mold for mold release that is pressed against a surface opposite to the imprint mold side of the material to be transferred, and a pressing surface made of a convex curved surface curved in a bowl shape,
At the time of mold release, the mold for pressing is pressed against the material to be transferred, the jig is moved so that the material to be transferred is bent along the pressing surface, and the material to be transferred is bent. The mold is further provided with a driving means for moving the stage in a direction perpendicular to the pattern forming surface of the imprint mold to separate the imprint mold from the transfer material. apparatus. A mold release device for releasing the imprint mold from the transfer material pressed against the imprint mold,
A jig for fixing the end side of the transfer material;
A stage having a holding mechanism for holding the imprint mold;
On the surface of the transfer material opposite to the imprint mold side, the curvature of the pressing surface corresponding to the pattern transfer area of the transfer material is smaller than the curvature of the pressing surface corresponding to the pattern non-transfer area. A mold for mold release against which a pressing surface formed on
At the time of mold release, the pressing surface is pressed against the material to be transferred, and the jig is moved so that the material to be transferred is bent along the pressing surface of the mold for mold release, and the material to be transferred is bent. A driving means for moving the stage in a direction perpendicular to the pattern forming surface of the imprint mold and separating the imprint mold and the transfer material. Mold release device.

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