JP2008093970A - Metal mold for transferring fine shape and manufacturing device of fine shape transfer sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing device of a fine shape transfer sheet capable of easily demolding a sheet-like base material such as a resin film where the fine uneven shape is transferred, shaped and molded from the metal mold for transferring the fine uneven shape. <P>SOLUTION: An adhesive force between the sheet-like base material 4 and the metal mold 3 is reduced in the end part of a metal mold shaping surface by reducing the pressure force or/and reducing the transfer rate near the peripheral edge part of the metal mold shaping surface, and starting of demodeling of the sheet-like base material from the metal mold is facilitated. The metal mold for transferring the fine shape is constituted so that the metal mold 21 where the metal mold thickness of the part corresponding to the peripheral edge part in the shaping surface is gradually reduced toward the outermost peripheral edge part direction of the shaping surface or the metal mold 22 where the height of the fine uneven shape of the metal mold formed on the part corresponding to the peripheral edge part in the shaping surface is gradually reduced toward the outermost peripheral edge part direction of the shaping surface, or the distance between the metal mold and a pressure plate is gradually increased toward the outermost peripheral edge part direction, or a small intermediate board is disposed between the metal mold and the pressure plate. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a fine shape transfer mold and a fine shape transfer sheet manufacturing apparatus.

  More specifically, a fine shape that makes it possible to easily release a sheet-like substrate such as a resin film formed by transferring the fine shape from a fine uneven shape transfer mold from the mold. The present invention relates to a transfer mold and an apparatus for manufacturing a fine shape transfer sheet using the mold.

  As a means for producing an optical film such as a light guide plate, a light diffusing plate, and a lens, a method for transferring a fine uneven shape provided on the surface of a mold onto the film has been conventionally known. An apparatus and a method for intermittently forming fine irregularities on the film have been proposed (Patent Document 1, Patent Document 2).

  In these apparatuses and methods, a fine uneven shape is formed on the film surface by pressing a film supplied from an unwinding roll into a press device onto a mold having a fine uneven shape and transferring the fine uneven shape. When transferring by pressing, generally the mold is heated to a temperature above the glass transition point of the film. After the transfer is completed, the mold is cooled under a certain condition while continuing the press. When the cooling proceeds to below the glass transition point of the film, the press pressure is released and the film is released from the mold only by applying a certain tension to the film.

  However, when this mold release is performed, there may be a problem that the film is not peeled off while being attached to the mold due to the characteristics of the applied resin and the consumption of the release material on the mold surface. Furthermore, if the film is forcibly removed, problems such as damage to the film, leaving a release mark such as a scratch on the film transfer surface, and damage to the mold occur.

  In order to facilitate releasability, the mold surface is formed in advance with a curved surface (warp) to release the pressure on the mold and at the same time, the molded body itself is trying to restore flatness. A method of automatically releasing by force has been proposed. Specifically, with respect to the release between a substrate such as a Si wafer and a stamper (die), the die can be released with high accuracy and ease without breaking the fine uneven shape. As a method of molding, the stamper and the support are connected via an elastic body, and the mold is released by the recovery force of the elastic body when the support is pulled up. It has been proposed to make mold release easier (Patent Document 3).

However, in the method described in Patent Document 3, the applicable molded body is limited by the elastic characteristics. For example, a very thin resin film having a thickness of 0.3 mm or less has insufficient elastic force. It was difficult to adopt.
JP 2005-199455 A Japanese Patent Laying-Open No. 2005-310286 JP 2004-288845 A

  In view of the above-described points, an object of the present invention is to easily form a sheet-like base material such as a resin film formed by transferring a fine shape from a fine uneven shape transfer mold from the mold. Fine shape transfer that can produce an excellent fine concavo-convex shape transfer sheet-like base material that can be uniformly and accurately transferred even when the fine concavo-convex shape has a considerable shaping area It is providing the manufacturing apparatus of a metal mold | die and a fine shape transfer sheet.

  In particular, as in the model showing the state at the start of mold release shown in FIG. 4, a resin film having a very thin thickness such as several tens of μm or more and 1 mm or less, a wide transfer area, and a high flexibility. When releasing the sheet-like material 4 from the mold 3 after transfer, it is necessary to prevent the force F required for the release from being excessively applied, particularly at the start of the release starting from the end of the mold. It is important, and if the force F is excessively applied, it may cause damage such as deformation or damage the sheet-like material itself to the fine irregular shape formed with great effort. Things can happen.

  The fine shape transfer mold of the present invention that achieves the above-described object has the following configuration (1).

(1) In a fine uneven shape transfer mold for forming a fine uneven shape on the surface of a sheet-like substrate, the mold thickness of the portion corresponding to the peripheral portion in the forming surface is the maximum of the forming surface. A mold for fine shape transfer, characterized by being gradually smaller in the direction of the peripheral edge.

  In addition, the fine shape transfer mold of the present invention preferably has the following specific configuration (2).

(2) The shape of the shaping surface is substantially rectangular, and at least one side of the rectangular shape, the mold thickness of the portion gradually decreases toward the outermost peripheral portion of the shaping surface. The mold for fine shape transfer according to (1) above, wherein

  In addition, another fine shape transfer mold of the present invention that achieves the above-described object has the following configuration (3).

(3) In a fine concavo-convex shape transfer mold for shaping a fine concavo-convex shape on the surface of a sheet-like substrate, the fine concavo-convex shape of the mold formed in the portion corresponding to the peripheral portion in the shaping surface A mold for fine shape transfer, characterized in that the height gradually decreases toward the outermost peripheral portion of the shaping surface.

  Further, in the other mold for fine shape transfer of the present invention, preferably, it comprises the following specific configuration (4).

(4) The shape of the shaping surface is substantially rectangular, and in at least one side of the rectangular shape, the height of the fine unevenness of the mold of the portion is in the direction of the outermost periphery of the shaping surface. The fine shape transfer mold according to (3), wherein the mold is gradually lowered toward the bottom.

  Moreover, the manufacturing apparatus of the fine shape transfer sheet of the present invention that achieves the above-described object has the following configuration (5).

(5) In a manufacturing apparatus of a fine shape transfer sheet in which the fine uneven shape is intermittently formed by a die having a fine uneven shape on the surface of the sheet-like base material, the die and the process for supporting the die An apparatus for producing a fine shape transfer sheet, wherein the distance between the mold and the pressure plate is gradually increased toward the outermost peripheral portion at the peripheral portion of the surface in contact with the pressure plate.

  In addition, another fine shape transfer sheet manufacturing apparatus of the present invention that achieves the above-described object has the following configuration (6).

(6) In a fine shape transfer sheet manufacturing apparatus that intermittently shapes the fine concavo-convex shape with a mold having a fine concavo-convex shape on the surface of a sheet-like substrate, a mold between the die and the pressure plate An apparatus for producing a fine shape transfer sheet, wherein an intermediate plate having a smaller area is disposed.

  Moreover, in the manufacturing apparatus of the fine shape transfer sheet of the present invention of (6), preferably, it comprises the following specific configuration (7) or (8).

(7) The apparatus for producing a fine shape transfer sheet according to (6), wherein the intermediate plate is formed of a material having a lower compression elastic modulus than the mold.

(8) The apparatus for producing a fine shape transfer sheet according to (6) or (7), wherein the compression elastic modulus of the intermediate plate is in the range of 1.0 × 10 ⁶ to 200 × 10 ⁹ Pa. .

  According to the mold for fine shape transfer of the present invention according to claims 1 and 3 and the apparatus for producing a fine shape transfer sheet of the present invention according to claims 5 and 6, in the vicinity of the peripheral portion of the mold shaping surface. By reducing the applied pressure or / and reducing the transfer rate, it is possible to reduce the adhesion between the sheet-like substrate and the mold at the end of the mold shaping surface, and to facilitate the start of mold release. it can.

  According to the present invention, the portion where the applied pressure at the peripheral portion of the shaping surface is weak is excluded from the range of the fine shape transfer sheet as the final product, but the fine shape of the final product portion is highly accurate. It can be manufactured as an excellent one.

Hereinafter, the present invention will be described in more detail.
The technical idea of the fine shape transfer mold and the fine shape transfer sheet manufacturing apparatus of the present invention is to reduce the pressing force in the vicinity of the peripheral portion of the mold shaping surface and / or reduce the transfer rate. It is configured to reduce the adhesion between the sheet-like base material and the mold at the end of the mold shaping surface, and as a result, to facilitate the release of the sheet-like base material from the mold. . Here, making the start of release of the sheet-like base material from the mold easy means, as a specific phenomenon, to release the sheet-like base material from the mold smoothly with less force In particular, it is to be able to proceed with the mold release at the initial stage of the mold release start in the vicinity of the peripheral portion of the shaping surface. In the present invention, the “transfer rate” is determined by “the height of the unevenness (depth) of the fine shape transferred to the surface of the sheet-like substrate / the height of the unevenness (depth) of the fine shape in the mold” × 100 ”. It is a value and indicates the degree of transfer of the fine shape.

  As such a configuration, in the present invention, in particular, the shape and form around the mold are made unique as follows.

  First, as shown in model (a) of FIG. 1, the fine shape transfer mold that is the first of the present invention is a fine shape for forming a fine uneven shape on the surface of a sheet-like substrate 4. In the concavo-convex shape transfer mold 3, the peripheral portion taper die 21 in which the mold thickness of the portion corresponding to the peripheral portion in the forming surface gradually decreases toward the outermost peripheral portion of the forming surface. is there. By doing so, the pressing force at the peripheral portion is lowered, and the transfer rate at that portion is reduced. That is, the penetration of the fine shape irregularities of the film is reduced, the adhesion between the film and the mold is reduced, and the mold release can be started smoothly. Once the mold release is started, the mold release is performed stably by the restoring force of the film bent at the mold release point. In addition, even at the outermost peripheral part, even if the applied pressure may increase due to stress concentration at the edge, the film does not wrap around the mold side peripheral surface during molding, and adhesion at the outermost peripheral part can be reduced. Release can be started smoothly. In FIG. 1, 11 is a fine concave shape, and 12 is a fine convex shape.

  Here, “the outermost peripheral portion of the shaping surface” refers to a portion corresponding to the outermost end portion of the mold, that is, a side peripheral surface, and “a portion corresponding to the peripheral portion in the shaping surface”. The inner surface of the shaping surface in the vicinity including the outermost peripheral portion.

  In addition, “gradually smaller” does not necessarily have to be small in an orderly and uniform manner toward the outermost peripheral portion, and the thickness of the mold is not necessarily viewed as a whole. However, it is only necessary to be able to be recognized as becoming smaller as it goes in the direction of the outermost peripheral portion, and may be substantially a stepped shape or a multistage shape.

In addition, the peripheral edge portion that is tapered does not need to be provided corresponding to the entire peripheral edge portion. Usually, the release force is applied from a specific direction, so the direction in which the release force is applied. The taper processing part should just be provided in the part which opposes. Typically, the shape of Fukatachimen, when it is substantially rectangular, such as a rectangular shape is generally, in the case of該矩shape, in one side portion of at least the rectangular mold thickness of the moiety What is necessary is just to comprise so that length may become small gradually toward the outermost peripheral part direction of a shaping surface.

  The mold for fine shape transfer according to the second aspect of the present invention is a fine concavo-convex shape for shaping a fine concavo-convex shape on the surface of the sheet-like substrate 4 as schematically shown in FIG. In the transfer mold 3, the height of the fine unevenness of the mold formed in the portion corresponding to the peripheral portion in the shaping surface is gradually lowered toward the outermost peripheral portion of the shaping surface (smaller). This is a peripheral portion low groove-shaped mold 22. By doing so, even when the transfer rate is 100%, the permeation of the fine shape irregularities of the film at the peripheral portion itself becomes small, the adhesion between the film and the mold is reduced, and the mold release can be started smoothly. Become. Once the mold release is started, the mold release is performed stably by the restoring force of the film bent at the mold release point.

  Moreover, the peripheral part made into the low groove shape does not need to be provided corresponding to all the peripheral parts, and since the release force is usually applied from one specific direction, the release force is applied. It is only necessary that the low groove-shaped portion is provided in the portion facing the direction. Usually, the shape of the shaping surface is generally a rectangular shape such as a rectangular shape. In the case of the rectangular shape, at least in one side portion of the rectangular shape, What is necessary is just to comprise so that the height of a fine uneven | corrugated shape may become low gradually toward the outermost peripheral part direction of a shaping surface.

  In addition, “gradually smaller” does not necessarily mean that it is smaller in an orderly and uniform manner toward the outermost peripheral portion. As long as it is recognized that the thickness becomes smaller as it goes in the direction of the outermost peripheral portion, it may be a material that has a substantially stepped or multi-step shape.

  Moreover, as shown in FIG. 2, the apparatus for manufacturing a fine shape transfer sheet, which is the third aspect of the present invention, uses a mold 3 having a fine uneven shape on the surface of a sheet-like substrate 4 to make fine unevenness. In an apparatus for manufacturing a fine shape transfer sheet that shapes a shape intermittently, a mold 3 and a pressure plate that supports the mold are formed as a peripheral step press plate 8, and the peripheral step press A portion 13 where the distance between the mold and the pressure plate gradually increases toward the outermost peripheral portion is formed at the peripheral portion of the surface with which the plate 8 contacts. By doing so, the pressurizing force decreases due to the deformation of the mold at the peripheral edge during pressing, or the distance between the mold and the upper pressure plate increases, and accordingly, at the peripheral edge The pressing force and transfer rate are small, and release can be started smoothly. In FIG. 2, 1 is a manufacturing apparatus of a fine shape transfer sheet, 2 is a pressing device, 3 is a mold, 5 is an upper temperature control plate, and 6 is a lower temperature control plate.

  In addition, as shown in FIG. 3, the apparatus for manufacturing a fine shape transfer sheet according to the fourth aspect of the present invention uses a mold 3 having a fine uneven shape on the surface of a sheet-like substrate 4 to make fine unevenness. In an apparatus for manufacturing a fine shape transfer sheet that shapes a shape intermittently, an intermediate plate 7 having an area smaller than that of the mold 3 is disposed between the mold 3 and the pressure plate. By doing so, the pressing force decreases due to the deformation of the mold at the peripheral edge during pressing, or the distance between the mold and the upper pressure plate increases. A portion 14 in which the pressure is reduced is formed, and the pressure and transfer rate in the portion are small, and as a result, the adhesion between the mold and the sheet-like substrate is weakened, and the mold release is started smoothly. be able to.

In the apparatus for manufacturing a fine shape transfer sheet according to the fourth aspect of the invention, the intermediate plate 7 is made of a material having a lower compression elastic modulus than the mold 3 so that the applied pressure can be accurately transmitted to the mold. It is preferable that it is formed by. Although the compression elastic modulus of the intermediate plate depends on the mold material, it is preferably in the range of 1.0 × 10 ⁶ to 200 × 10 ⁹ Pa, more preferably 1.0 × 10 ⁶ in the pressure during press molding. ^{About 6} to 200 × 10 ⁶ Pa is preferable. As a preferred form of the material, when the mold is made of stainless steel or copper, it is preferable to use a rubber material such as silicone or fluorine as the intermediate plate. Depending on the temperature conditions, EPDM (ethylene propylene) may be used. -Diene) rubber or the like may be used.

  When practicing the present invention, the above-described first to fourth inventions can also be used in appropriate combinations. According to such combined use, more delicate pressure and transfer rate at the peripheral edge Can be realized.

  Moreover, as a method of releasing the film, it may be manual, or it may be released by being held by a roll or the like. Further, the end portion may be gripped with a clip or the like to release the mold by applying tension, or air may be blown to the boundary between the film and the mold.

  In each of the above-described present inventions, the effective area for reducing the pressing force / transfer rate is the total outermost peripheral area in the case of production of a general optical film, according to various findings of the present inventors. Is preferably about 1% to 15%, more preferably about 3% to 10%.

  In addition, the mold and apparatus of the present invention exert an effect regardless of the shaping area. Among them, in recent years, there are mobile phones, personal computers, televisions and the like as applications of optical films. Optimal for manufacturing relatively small and very thin optical films for mobile phones, etc., or for optical films that require particularly high precision and uniform characteristics over large areas such as large TV sets. Specifically, it is suitable for manufacturing an optical film having a shaping area with a screen size for 1 inch to 100 inches.

  The mold 3 used in the present invention will be described. The transfer surface of the mold has a fine pattern, and methods for forming the pattern on the mold include machining, laser processing, photolithography, and electron beam drawing. As the material of the mold, any material can be used as long as the desired pressing strength, pattern processing accuracy, and film releasability can be obtained. For example, metal materials including stainless steel, nickel, copper, etc., silicone, glass, Ceramics, resins, or those having a surface coated with an organic film for improving releasability are preferably used. The fine pattern of the mold is formed corresponding to a fine uneven pattern to be applied to the sheet surface.

  Moreover, as preferable thickness (thickness, film thickness) of sheet-like base materials, such as a film applied to this invention, it is the range of 0.01-5 mm, More preferably, it exists in the range of 0.01-1 mm. It is to be. If it is less than 0.01 mm, it is difficult because there is not enough thickness to mold, and if it is larger than 5 mm, the rigidity is large, and it is difficult to realize the mold release method intended by the present invention in which it is peeled off from the mold. It is.

  The sheet-like substrate applied to the present invention is typically a film mainly composed of a thermoplastic resin, and more specifically, polyethylene terephthalate, polyethylene-2, 6-naphthalate, polypropylene terephthalate, Polyester resins such as polybutylene terephthalate, polyolefin resins such as polyethylene, polystyrene, polypropylene, polyisobutylene, polybutene and polymethylpentene, polyamide resins, polyimide resins, polyether resins, polyesteramide resins, polyetheresters Resin, acrylic resin, polyurethane resin, polycarbonate resin, or polyvinyl chloride resin.

  Among these, there are various types of monomers to be copolymerized, and it is easy to adjust the physical properties of the materials, so that polyester resins, polyolefin resins, polyamide resins, acrylic resins or these are particularly preferable. It is preferable that it is mainly formed from a thermoplastic resin selected from the above mixture, and it is more preferable that the above-mentioned thermoplastic resin is composed of 50% by weight or more.

  Further, the film may be a film made of the above-mentioned resin alone or a laminate made of a plurality of resin layers.

  A fine shape transfer sheet was produced under the following specifications and conditions (1) to (8) (Example 1) and (1) to (10) (Example 2).

Example 1
(1) Mold size: 500 mm (film width direction) × 800 mm (film running (feed) direction) × 20 mm (thickness).

(2) Mold material: copper.
(3) Fine shape: the pitch is 50 μm, the convex portion width is 25 μm, the convex portion height is 50 μm, and the cross section when viewed from the film running direction (feed direction) is rectangular.

(4) Peripheral part of the mold: the model is shown in FIG. 1 (a), and the mold thickness is 100 μm thinner (outermost peripheral position) from the line 20 mm inside the outermost periphery toward the outermost periphery. A taper process was performed.

(5) Press device: It can pressurize up to 3000 kN, and pressurization is performed by a hydraulic pump. Two temperature control plates made of aluminum alloy and having a size of 700 mm (film width direction) × 1000 mm (film running direction) are attached to the press apparatus in the vertical direction, and are connected to a heating apparatus and a cooling apparatus, respectively. The mold is attached to the lower temperature control plate. The heating device is a heat medium circulation device, and the heat medium is Barrel Therm # 400 (manufactured by Matsumura Oil Co., Ltd.), which is heated to 150 ° C. and flows at a flow rate of 100 L / min. Moreover, a cooling device is a cooling water circulation device, and flows the water cooled at 20 degreeC with the flow volume of 150 L / min.

(6) Film: made of polyethylene terephthalate, having a thickness of 100 μm (thickness variation: ± 10 μm) and a width of 520 mm.

(7) Operation method: Using the above apparatus, molding was performed as follows. A film is placed on a mold in advance. Next, after the temperature control plate is heated up and down to 110 ° C., the upper plate is lowered and the film pressing is started. The press was performed at 5 MPa on the mold surface for 30 seconds. Thereafter, the temperature control plate is cooled both top and bottom while the press is continued. Cooling is stopped when each temperature control plate reaches 60 ° C. When the cooling is completed for both the upper and lower sides, the press is released. Raise the upper plate to the upper limit and release the film.

(8) The above operation was repeated to produce 10 molded films. Mold release was started manually from the edge. In either case, there was no sticking of the film to the end of the mold, adhesion, etc., and the mold could be easily and uniformly released with high precision.

Example 2
(1) Mold size: 500 mm (film width direction) × 800 mm (film running direction) × 20 mm (thickness).

(2) Mold material: copper.
(3) Fine shape: a pitch of 50 μm, a convex part width of 25 μm, a convex part height of 50 μm, and a rectangular section when viewed from the film running direction was used.

(4) Mold peripheral part: FIG. 1 (b) shows a model. The height of the convex part of the fine shape is gradually reduced from the line 10 mm inside from the outermost part to the outermost part. Specifically, the fine shape of the peripheral portion was processed so that the height of the convex portion was 10 μm.

(5) Press device: It can pressurize up to 3000 kN, and pressurization is performed by a hydraulic pump. Two temperature control plates made of an aluminum alloy and having a size of 700 mm (film width direction) × 1000 mm (film running direction) are attached in the upper and lower sides in the press device, and are connected to a heating device and a cooling device, respectively. The mold is attached to the lower temperature control plate. The heating device is a heat medium circulation device, and the heat medium is Barrel Therm # 400 (manufactured by Matsumura Oil Co., Ltd.), which is heated to 150 ° C. and flows at a flow rate of 100 L / min. Moreover, a cooling device is a cooling water circulation device, and flows the water cooled at 20 degreeC with the flow volume of 150 L / min.

(6) Film: made of polyethylene terephthalate, having a thickness of 100 μm (thickness variation: ± 10 μm) and a width of 520 mm.

(7) Operation method: Using the above apparatus, molding was performed as follows. A film is placed on a mold in advance. Next, after the temperature control plate is heated up and down to 110 ° C., the upper plate is lowered and the film pressing is started. The press was performed at 5 MPa for 30 seconds on the mold surface. Thereafter, the temperature control plate is cooled both top and bottom while the press is continued. Cooling is stopped when each temperature control plate reaches 60 ° C. Release the press when the top and bottom cooling is complete. Raise the upper plate to the upper limit and release the film.

(8) The above operation was repeated to produce 10 molded films. The mold release was performed using a roll for holding the film. The roll used was a silicone rubber having an outer diameter of 150 mm and a rubber hardness (JIS K6253) of 60 on the surface. The roll was provided with a drive unit consisting of a servo motor to release the film automatically. In either case, there was no sticking of the film to the end of the mold, adhesion, etc., and the mold could be easily and uniformly released with high precision.

1 (a) and 1 (b) are schematic front views illustrating an embodiment of a fine shape transfer mold according to the present invention as a model. FIG. 2 is a schematic front view for explaining a model of an embodiment of the apparatus for producing a fine shape transfer sheet according to the present invention. FIG. 3 is a schematic front view for explaining a model of another embodiment of the apparatus for producing a fine shape transfer sheet according to the present invention. FIG. 4 shows a method for transferring a sheet-like material such as a resin film after transfer molding to a sheet-like material such as a resin film that is thin and has a large transfer area and high flexibility by using a fine uneven shape transfer mold. It is the model figure which showed the state at the time of mold release start at the time of making it mold-release from a metal mold | die.

Explanation of symbols

1: Manufacturing apparatus for fine shape transfer sheet 2: Press device 3: Mold 4: Sheet-like base material 5: Upper temperature control plate 6: Lower temperature control plate 7: Intermediate plate 8: Pressurizing plate with stepped peripheral edge 11: Fine concave shape 12: Fine convex shape 13: A portion where the pressure plate gradually moves away from the mold toward the outermost peripheral portion 14: A portion where the applied pressure decreases 21: A peripheral portion taper die 22: A low peripheral portion Groove-shaped mold F: Force required to release the sheet-like substrate at the start of mold release starting from the mold edge

Claims (8)

  In a mold for transferring fine irregularities to form a fine irregular shape on the surface of a sheet-like substrate, the mold thickness of the portion corresponding to the peripheral portion in the shaping surface is the direction of the outermost peripheral portion of the shaping surface A mold for fine shape transfer, characterized by being gradually smaller toward.   The shape of the shaping surface is substantially rectangular, and at least one side of the rectangular shape, the mold thickness of the portion gradually decreases toward the outermost peripheral portion of the shaping surface. The fine shape transfer mold according to claim 1, wherein:   In a mold for transferring a fine uneven shape on a sheet-like substrate surface, the height of the fine uneven shape of the mold formed in a portion corresponding to the peripheral portion in the forming surface is A mold for fine shape transfer, which is gradually lowered toward the outermost peripheral portion of the shaping surface.   The shape of the shaping surface is substantially rectangular, and in at least one side of the rectangular shape, the height of the fine unevenness of the mold of the portion gradually increases toward the outermost peripheral portion of the shaping surface. 4. The mold for fine shape transfer according to claim 3, wherein the mold is low.   In a manufacturing apparatus of a fine shape transfer sheet that intermittently shapes the fine concavo-convex shape with a mold having a fine concavo-convex shape on the surface of the sheet-like substrate, the die and the pressure plate supporting the die are in contact with each other An apparatus for manufacturing a fine shape transfer sheet, wherein the distance between the mold and the pressure plate is gradually increased toward the outermost peripheral portion at the peripheral portion of the surface to be moved.   In a manufacturing apparatus of a fine shape transfer sheet that intermittently shapes the fine concavo-convex shape by a mold having a fine concavo-convex shape on the surface of the sheet-like base material, it is smaller than the die between the die and the pressure plate An apparatus for producing a fine shape transfer sheet, comprising an intermediate plate having an area.   The apparatus for producing a fine shape transfer sheet according to claim 6, wherein the intermediate plate is formed of a material having a lower compression elastic modulus than the mold. The apparatus for producing a fine shape transfer sheet according to claim 6 or 7, wherein the compression elastic modulus of the intermediate plate is in the range of 1.0 x 10 ⁶ to 200 x 10 ⁹ Pa.

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