TWI303456B - - Google Patents
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- Publication number
- TWI303456B TWI303456B TW91112715A TW91112715A TWI303456B TW I303456 B TWI303456 B TW I303456B TW 91112715 A TW91112715 A TW 91112715A TW 91112715 A TW91112715 A TW 91112715A TW I303456 B TWI303456 B TW I303456B
- Authority
- TW
- Taiwan
- Prior art keywords
- phase shift
- photoresist
- layer
- transparent substrate
- attenuating
- Prior art date
Links
- 230000010363 phase shift Effects 0.000 claims description 80
- 229920002120 photoresistant polymer Polymers 0.000 claims description 53
- 238000007689 inspection Methods 0.000 claims description 35
- 238000002834 transmittance Methods 0.000 claims description 32
- 230000002238 attenuated effect Effects 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 22
- 238000000576 coating method Methods 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000011161 development Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000007547 defect Effects 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 7
- 238000001459 lithography Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW91112715A TWI303456B (enExample) | 2002-06-11 | 2002-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW91112715A TWI303456B (enExample) | 2002-06-11 | 2002-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWI303456B true TWI303456B (enExample) | 2008-11-21 |
Family
ID=45070718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW91112715A TWI303456B (enExample) | 2002-06-11 | 2002-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI303456B (enExample) |
-
2002
- 2002-06-11 TW TW91112715A patent/TWI303456B/zh not_active IP Right Cessation
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |