1302986 九、發明說明： 【發明所屬之技術領域】 本發明係有關於以非接觸方式測定對象物之表面電位之 靜電測定裝置及使用在該靜電測定裝置之表面電位檢測器 〇 【先前技術】 在先前技術中揭示有靜電測定裝置（表面電位檢測器） ，其以非接觸方式測定帶電於絕緣物表面之靜電的電位（ | 例如，參照專利文獻1 )。 此種靜電測定裝置是在被配置成與對象物面板之電極， 利用靜電感應產生與該對象物之表面電位對應之位準之電 位，用來檢測該檢測器電極之電位位準，藉以測定對象物 之表面電位。 (專利文獻1 )日本專利特開平8 - 1 29043號公報 【發明內容】 (解決問題之手段） • 在該檢測器電極產生之電位位準，不只與對象物之表面 電位有關，而且亦與對象物間之距離有關，即使表面電位 相同，若距離不同時，在檢測器電極產生之電位位準亦會 成爲不同。 因此，在該專利文獻1中，係成爲將包含該檢測器電極 之電位測定用之檢測器部和'11L距用之檢測器部收納在同一 框體而構建檢測器單元，且構建成根據在測距用之檢測器 部所測定到之距離，對在電位測定用之檢測器部所檢定到 1302986 之電位進行距離校正。 如此一來，因爲電位測定用之檢測器部和測距用之檢測 器部係收納在同一框體而構建成檢測器單元，所以在測定 之對象物成爲寬廣面狀而無法以單一的檢測器單元進行測 定之情況，具有需要多個檢測器單元和多個處理其信號之 本體單元而導致成本變高之問題。 而且，不能依照測定之對象物來分開使用根據雷射式或 超音波式等各種檢測原理之測距用的檢測器部，所以難以 I 依照測定之對象和用途來構建系統。 本發明係針對上述問題而完成者，其目的是提供可依照 要測定之對象和用途而容易地構建出最合適的測定系統之 靜電測定裝置。 本發明之靜電測定裝置，構建成可以結合/分離：表面 電位檢測器，用來測定與對象物之表面電位對應之電位； 和變位檢測器，用來測定該表面電位檢測器和該對象物之 間之距離；具備有：校正資料記憶部，記憶根據該表面電 | 位檢測器所測定到之電位和該距離之關係的校正資料；和 演算部，根據該變位檢測器所測定到之該距離和該校正資 料，校正該表面電位檢測器所測定到之電位，用來算出該 對象物之表面電位；和該校正資料記憶部被設在該表面電 位檢測器。 在此處該表面電位檢測器和變位檢測器之結合/分離， 最好是利用設在各個檢測器本體之連接器進行，但是亦可 以使用專用之連接具進行。 -6- 1302986 校正資料亦可以是校正對照表或校正式等。 依照本發明時，因爲表面電位檢測器和變位檢測器是構 建成可以結合/分離，所以可以依照對象物和用途等而結 合和使用檢測原理不同之檢測器。另外，藉由使用校正資 料來校正會依照與對象物間之距離而變化之表面電位檢測 器的測定電位，可以算出精確度良好之對象物之表面電位 〇 另外，本發明之靜電測定裝置，構建成可以結合/分離 | :表面電位檢測器，用來測定與對象物之表面電位對應之 電位；和變位檢測器，用來測定該表面電位檢測器和該對 象物之間之距離；該表面電位檢測器具備有： 固定距離輸入部，在使用固定距離之情況輸入該固定距 離； 固定距離記憶部，用來記憶該固定距離； 校正資料記憶部，記憶根據該表面電位檢測器所測到之 電位和該距離之關係的校正資料；和 • 演算部，在與該變位檢測器結合之狀態，根據該變位檢 測器所測定到之該距離和該校正資料，校正該表面電位檢 測器所測定到之電位，和在與該變位檢測器分離之狀態， 根據被記憶在該固定距離記憶部之距離之該校正資料，校 正利用該表面電位檢測器測定到之電位，用來算出該對象 物之表面電位。 依照本發明時，因爲表面電位檢測器和變位檢測器是構 建成可以結合/分離，所以可以依照對象物和用途等而結 1302986 合和使用檢測原理不同之檢測器。另外，在以固定距離測 定表面電位之情況時，經由將該固定距離輸入到表面電位 檢測器，可以單獨地利用表面電位檢測器測定表面電位。 在最好的實施例中，在該變位檢測器和1個或多個該表 面電位檢測器結合後之狀態，係使該變位檢測器所測定之 該距離資料，可以傳送到該1個或多個表面電位檢測器。 依照本實施例時，在1個或多個各個表面電位檢測器， 因爲可以使用從單一之變位檢測器傳送之距離之資料，分 p 別進行電位之校正，所以在對象物爲面狀之具有廣大之測 定之區域之情況時，可以只增設表面電位檢測器。 在一實施例中，該表面電位檢測器和該變位檢測器是使 檢測器頭部和放大器部經由撓性接收連接線連接成可以裝 卸自如之放大器分離型檢測器；和 在各個放大器部之殻體之兩個側面設有連接器，該變位 檢測器之放大器部和1個或多個該表面電位檢測器之各個 放大器部，經由側面之該連接器，鄰接結合成一行，用來 • 使該變位檢測器所測定之該距離之資料，可以傳送到各個 表面電位檢測器。 依照本實施例時，放大器分離型之表面電位檢_器和變 位檢測器之各個放大器部，經由連接器而結合/分離，依 照對象物之大小，使表面電位檢測器之數目增減，依照對 象物之材質等，可以組合使用檢測原理不同之檢測器。 在較佳實施例中，用來測定被搬運之該對象物之表面電 位的多個該表面電位檢測器之檢測器頭部，係以分別面對 -8- 1302986 該對象物之方式，被配置成沿著對該搬運方向非平行之方 向。 依照本實施例時，當搬運面狀之寬大的對象物時，使多 個表面電位檢測器之檢測器頭部之配置沿著非平行於搬運 方向之方向，例如可以是對搬運方向傾斜之方向，最好爲 正交方向，用以測定對象物之表面電位。 在另一實施例中，是具備有用來輸入修正資料之修正資 料輸入部，藉以對該變位檢測器所測定之該距離，修正該 > 多個表面電位檢測器之距離，該演算部以該修正資料修正 該變位檢測器所測定之該距離，使用修正過之距離算出該 對象物之表面電位。 依照本實施例時，例如，當使用單一變位檢測器和多個 表面電位檢測器，來測定面狀之寬大的對象物之表面電位 之情況時，成爲可在每一個表面電位檢測器修正距離。因 此，例如，在面狀之寬大的對象物爲撓曲時，各個表面電 位檢測器和對象物之間之距離變成隨著表面電位檢測器之 • 設置位置而不同，藉由按對每一個表面電位檢測器，輸入 與對象物之撓曲對應之修正資料，而可將該變位檢測器所 測定之距離，利用該修正資料分別修正成既考慮到撓曲之 距離，再使用該修正過之距離來校正電位以算出表面電位 0 在另一實施例中，該演算部根據多個該變位檢測器所分 別測定之該距離，校正利用該表面電位檢測器所檢測之電 位，用來算出該對象物之表面電位。 -9 - 1302986 電位。 依照本發明時，因爲該表面電位檢測器和變位檢測器是 構建成可以結合/分離，所以可以依對象物和用途等而結 合使用檢測原理不同之檢測器。另外，藉由使用校正資料 來校正會按與對象物間之距離而變化之表面電位檢測器的 測定電位，而能良好之精確度算出對象物之表面電位。 在較佳實施例中，在該變位檢測器和1個或多個該表面 電位檢測器結合之狀態，該變位檢測器所測定之該距離之 | 資料可傳送到該1個或多個該表面電位檢測器。 依照本實施例時，在1個或多個該表面電位檢測器，因 爲能使用以單一變位檢測器所測定之距離資料而分別進行 校正，所以在對象物爲面狀寬大而測定區域很大之情況時 ，僅增設該表面電位檢測器即可。 (發明之效果） 依照本發明時，表面電位檢測器和變位檢測器因爲構建 成可結合/分離，所以可以依照用途和對象物等而組合不 • 同檢測原理之檢測器用以測定表面電位。另外，藉由使用 校正資料來校正會依與對象物間之距離而變化之表面電位 檢測器之測定電位，而能以良好之精確度算出對象物之表 面電位。 【實施方式】 下面參照附圖來詳細說明本發明之較佳實施例。 本發明之靜電測定裝置如後面所述之第4圖所示，具備 有：表面電位檢測器27，用來測定對象物之表面電位；和 -11- 1302986 雷射式變位檢測器3 6，用來測定從該表面電位檢測器27到 對象物之距離。 第1圖是斜視圖，用來表示本發明之表面電位檢測器27 之外觀。本實施例之表面電位檢測器27之構成是在頭部1 和放大器部3之間安裝前置放大器部2。 符號4是用來支持前置放大器部2之支持構件，該支持 構件4是依照需要而被使用的，不會對前置放大器部2之 設置和動作造成任何之影響。 p 頭部1和前置放大器部2係利用電線5連接。 在前置放大器2和放大器部3分別安裝有電線6 a，6b。 在該等電線6 a，6b中包含有具備著電源供給線之多條信號 線。另外，電線6a，6b分別插入到前置放大器部2及放大 器部3之本體內部，各條信號線被焊接在內部之佈線基板 。另外，在各條電線6 a，6b之前端分別設有中繼用連接器 7a，7b。前置放大器部2側之連接器7a爲雄型，放大器部 3側之連接器7b爲雌型，經由連接該等連接器7a，7b，使 • 得前置放大器部2和放大器部3成爲經由各條信號線而被 連接之狀態。 放大器部3所具備之功能包含有：將該測定演算後之表 面電位進行數位顯示之功能；和比較該表面電位與既定之 臨限値，而輸出對象物之表面電位之判定信號之功能。 在用以形成放大器部3之本體殼體30之內部，組入有上 述之演算處理或信號輸出用之電路。另外，在該殼體本體 30之上面配備有用來將該表面電位進行數位顯示之顯示器 -12 - 1302986 亦即，連接有第2圖之變位檢測器頭部之變位檢測器36 之放大器部3 ’和多個表面電位檢測器27之各個放大器部3 ，3·.·，可以經由被設在殼體本體30’，30，…之側面的連接 器，而以鄰接結合狀態連裝成1行。 在本實例中，各個感測放大器部3 ’，3，3 ...之殻體本體 30’，30，30.·· 80係如上述，具有相同之規格，該等殼體本 體30’，30，30·.·係具有朝向與DIN軌道24之正交方向成 爲稍微細長之直方體形狀之形態。 | 電線23係從表面電位檢測器27之放大器部3被引出。 在該電線2 3包含有外部輸入線、外部輸出線及電源線等。 外部輸入線例如是用以從PLC等對表面電位檢測器，施加 來自外部的各種指令，外部輸出線是用以將放大器部3內 部所產生之輸出等，輸出到外部的例如PLC等，而電源線 是用來對放大器部3之內部電路供給電源。 另外，從表面電位檢測器27之放大器部3引出之電線6b 中含有各種信號線，用以在上述之第1圖之前置放大器部2 P 和頭部1之間進行信號處理。 另外一方面，電線6b’係從變位檢測器36之放大器部3’ k引出，在該電線6b’之前端安裝有連接器7b’，其連接到 上述之第2圖之變位檢測器頭部9之圓形連接器1 3。 另外，電線2 3 ’係從變位檢測器3 6之放大器部3 ’被引出 。在該電線23’中包含有外部輸入線、外部輸出線及電源線 等。外部輸入線係對變位檢測器施加來自於外部之PLC等 的各種指令，外部輸出線是甩來將放大器部3 ’內部所產生 -14- 1302986 之各種信號輸出到外部之PLC等，而電源線是用來對放大 器部3 ’之內部電路供給電源。 在各個放大器部3之殻體本體30之一方之側面，如上述 之第1圖所示，設有滑動蓋1 3。當將該等滑動蓋1 3打開時 ，鄰接結合用之連接器從其內部露出，而在另一方之側面 設有可以與該連接器結合之連接器。 另外，變位檢測器3 6之放大器部3 ’之殼體本體3 0 ’亦成 爲同樣之構造。 p 因此，經由連接各個放大器部3 ’，3，3…之側面之連接 器，如第3圖所示，可以將各個放大器部3 ’，3，3 ...連裝 成一行，可以在單一變位檢測器3 6連接多個表面電位檢測 器27。 第4圖是與該第3圖之鄰接接合狀態對應之方塊圖。 表面電位檢測器2 7之頭部1檢測從對象物之帶電電荷產 生之電場，將其變換成爲電氣信號，輸出到前置放大器部2 。前置放大器部2內藏有檢測器電路1 4，該檢測器電路1 4 P 具有用來驅動頭部1之振盪電路，和用來對從頭部1輸出 之信號進行放大和檢波用之電路。 表面電位檢測器2 7之放大器部3具有：A / D變換電路1 5 ，用以對來自前置放大器部2之信號進行A / D變換；CPU 1 6 ，具有作爲演算電路等等功能，其根據來自該A/D變換電 路1 5之信號和來自變位檢測器3 6之距離之資料，演算表 面電位；和記憶部2 6，儲存有後面所述之校正資料；在該 CPU 1 6被輸入有來自上述之按鍵開關3 3之操作信號，另外 -15- 1302986 一方面，CPU16進行上述之顯示器31等之顯示控制。另外 ，具備有D/A變換電路18，用來對CPU 16之輸出進行D/A 變換，將其施加到輸出電路1 7，可以經由輸出電路1 7輸出 到PLC等。 另外一方面，變位檢測器3 6之變位檢測器頭部9內藏有 具備投光用和受光用之電路等的檢測器電路1 9。放大器部 3 ’具備有：A / D變換電路20，用來對來自檢測器頭部9之信 號進行A/D變換；和CPU21，具有作爲演算電路等之功能， B 其根據來自該A/D變換電路20之信號，演算其距離；該 CPU21被輸入有來自按鍵開關33’之操作信號，另外一方面 ’ CPU21進行顯示器31’等之顯示控制。另外，具備有D/A 變換電路25，用來對CPU21之輸出進行D/A變換，將其施 加到輸出電路22，可以經由輸出電路22輸出到PLC等。 該變位檢測器3 6將雷射光朝對象物投光，利用其反射光 測定截至對象物之距離。變位檢測器3 6所測定之距離資料 ，從變位檢測器36之CPU21傳送到表面電位檢測器27之 B 放大器部3之CPU16。 依照以上之方式，當鄰接結合變位檢測器3 6之放大器部 3’和各個表面電位檢測器27之各個放大器部3，3.··時，如 第4圖所示，在各個CPU21、16、16···間可以進行串列通信 ，可以將變位檢測器36所測定之與對象物間之距離的資料 ，傳送到各個表面電位檢測器2 7，各個表面電位檢測器2 7 分別對使用該距離之資料所計測到之電位値作校正，作爲 表面電位値。 -16-[Technical Field] The present invention relates to an electrostatic measuring device for measuring a surface potential of an object in a non-contact manner and a surface potential detector used in the electrostatic measuring device [Prior Art] In the prior art, an electrostatic measuring device (surface potential detector) for measuring the potential of static electricity charged on the surface of an insulator in a non-contact manner is disclosed (for example, see Patent Document 1). Such an electrostatic measuring device is configured to detect a potential level of a potential corresponding to a surface potential of the object by electrostatic induction on an electrode of the object panel, thereby detecting a potential level of the detector electrode, thereby measuring an object Surface potential. (Patent Document 1) Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The distance between objects is related. Even if the surface potential is the same, if the distance is different, the potential level generated at the detector electrode will be different. Therefore, in Patent Document 1, a detector unit for measuring a potential including the detector electrode and a detector unit for '11L distance are housed in the same casing to construct a detector unit, and the detector unit is constructed. The distance measured by the detector unit for distance measurement is corrected for the potential of 1302986 detected by the detector unit for potential measurement. In this way, since the detector unit for potential measurement and the detector unit for distance measurement are housed in the same housing and are configured as detector units, the object to be measured has a wide surface and cannot be a single detector. In the case where the unit performs measurement, there is a problem that a plurality of detector units and a plurality of body units for processing signals thereof are required, resulting in a high cost. Further, since it is not possible to separately use the detector portion for ranging according to various detection principles such as a laser type or an ultrasonic wave type according to the object to be measured, it is difficult to construct the system in accordance with the object and use of the measurement. The present invention has been made in view of the above problems, and an object thereof is to provide an electrostatic measuring apparatus which can easily construct an optimum measuring system in accordance with an object to be measured and a use. The static electricity measuring device of the present invention is constructed to be capable of bonding/separating: a surface potential detector for measuring a potential corresponding to a surface potential of an object; and a displacement detector for measuring the surface potential detector and the object a distance between the correction data storage unit and the correction data according to the relationship between the potential measured by the surface detector and the distance; and the calculation unit, which is determined according to the displacement detector The distance and the correction data are corrected for the potential measured by the surface potential detector for calculating the surface potential of the object; and the correction data storage portion is provided at the surface potential detector. Here, the combination/separation of the surface potential detector and the displacement detector is preferably carried out using a connector provided in each detector body, but it can also be carried out using a dedicated connector. -6- 1302986 The calibration data can also be a calibration checklist or a calibration formula. According to the present invention, since the surface potential detector and the displacement detector are constructed to be combined/separated, the detector having a different detection principle can be combined and used in accordance with the object, the use, and the like. Further, by using the calibration data to correct the measurement potential of the surface potential detector which changes according to the distance from the object, the surface potential of the object with good accuracy can be calculated. In addition, the electrostatic measurement device of the present invention is constructed. Can be combined/separated | : a surface potential detector for determining a potential corresponding to a surface potential of the object; and a displacement detector for determining a distance between the surface potential detector and the object; the surface The potential detector includes: a fixed distance input unit that inputs the fixed distance when a fixed distance is used; a fixed distance memory unit that memorizes the fixed distance; and a corrected data memory unit that memorizes according to the surface potential detector Correction data of the relationship between the potential and the distance; and • a calculation unit that, in combination with the displacement detector, corrects the surface potential detector according to the distance measured by the displacement detector and the correction data The measured potential, and in a state separated from the displacement detector, is stored in the fixed distance memory unit N distance data correction, the correction using the measured surface potential of the potential detector for the surface potential of the object is calculated. According to the present invention, since the surface potential detector and the displacement detector are constructed to be combined/separated, the detector can be combined with the detection principle according to the object, the use, and the like. Further, when the surface potential is measured at a fixed distance, the surface potential can be measured by the surface potential detector alone by inputting the fixed distance to the surface potential detector. In a preferred embodiment, after the displacement detector and one or more of the surface potential detectors are combined, the distance data measured by the displacement detector can be transmitted to the one. Or multiple surface potential detectors. According to the present embodiment, in one or more of the respective surface potential detectors, since the data of the distance transmitted from the single displacement detector can be used, the potential is corrected, so that the object is planar. When there is a large area of measurement, only a surface potential detector can be added. In one embodiment, the surface potential detector and the displacement detector are such that the detector head and the amplifier portion are connected to the detachable amplifier-separated detector via a flexible receiving connection line; and in each of the amplifier sections A connector is disposed on two sides of the housing, and an amplifier portion of the displacement detector and one or more amplifier portions of the surface potential detector are adjacently connected in a row via the connector on the side for The data of the distance measured by the displacement detector can be transmitted to each surface potential detector. According to the present embodiment, the amplifier potential separation type surface potential detector and the respective amplifier sections of the displacement detector are coupled/separated via the connector, and the number of surface potential detectors is increased or decreased according to the size of the object, according to The material of the object, etc., can be combined with a detector having a different detection principle. In a preferred embodiment, the detector heads of the plurality of surface potential detectors for measuring the surface potential of the object being transported are configured to face the object -8-1302986, respectively. In a direction that is non-parallel to the direction of transport. According to the present embodiment, when a wide object having a planar shape is conveyed, the arrangement of the detector heads of the plurality of surface potential detectors is arranged in a direction non-parallel to the conveyance direction, for example, a direction inclined to the conveyance direction. Preferably, it is an orthogonal direction for measuring the surface potential of the object. In another embodiment, the correction data input unit for inputting the correction data is provided, and the distance measured by the displacement detector is corrected, and the distance of the plurality of surface potential detectors is corrected. The correction data corrects the distance measured by the displacement detector, and calculates the surface potential of the object using the corrected distance. According to the present embodiment, for example, when a single displacement detector and a plurality of surface potential detectors are used to measure the surface potential of a planar wide object, the distance can be corrected at each surface potential detector. . Therefore, for example, when the wide object of the planar shape is deflected, the distance between each surface potential detector and the object becomes different depending on the position of the surface potential detector, by pressing each surface The potential detector inputs correction data corresponding to the deflection of the object, and the distance measured by the displacement detector can be corrected by using the correction data to take into account the distance of the deflection, and then the correction is used. The distance is corrected to calculate the surface potential 0. In another embodiment, the calculation unit corrects the potential detected by the surface potential detector based on the distance measured by the plurality of displacement detectors, and calculates the potential The surface potential of the object. -9 - 1302986 Potential. According to the present invention, since the surface potential detector and the displacement detector are constructed to be combined/separated, it is possible to combine detectors having different detection principles depending on the object, use, and the like. Further, by using the correction data to correct the measurement potential of the surface potential detector which changes depending on the distance from the object, the surface potential of the object can be calculated with good accuracy. In a preferred embodiment, in the state where the displacement detector is combined with one or more of the surface potential detectors, the data of the distance measured by the displacement detector can be transmitted to the one or more The surface potential detector. According to the present embodiment, in the one or more of the surface potential detectors, since the correction can be performed using the distance data measured by the single displacement detector, the object is wide in area and the measurement area is large. In this case, only the surface potential detector may be added. (Effect of the Invention) According to the present invention, since the surface potential detector and the displacement detector are constructed to be combinable/separable, a detector which does not have the same detection principle can be combined for measuring the surface potential in accordance with the use, the object, and the like. Further, by using the correction data to correct the measurement potential of the surface potential detector which varies depending on the distance between the objects, the surface potential of the object can be calculated with good accuracy. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The electrostatic measuring device according to the present invention includes a surface potential detector 27 for measuring the surface potential of the object as shown in Fig. 4 which will be described later; and -11-1302986 laser displacement detector 3 6, It is used to measure the distance from the surface potential detector 27 to the object. Fig. 1 is a perspective view showing the appearance of the surface potential detector 27 of the present invention. The surface potential detector 27 of the present embodiment is configured such that the preamplifier unit 2 is mounted between the head 1 and the amplifier unit 3. Reference numeral 4 is a supporting member for supporting the preamplifier section 2, which is used as needed, and does not have any influence on the setting and operation of the preamplifier section 2. The p head 1 and the preamplifier unit 2 are connected by an electric wire 5. Electric wires 6a, 6b are attached to the preamplifier 2 and the amplifier unit 3, respectively. The plurality of signal lines including the power supply line are included in the wires 6a, 6b. Further, the electric wires 6a, 6b are inserted into the main body of the preamplifier unit 2 and the amplifier unit 3, respectively, and the respective signal lines are soldered to the internal wiring board. Further, relay connectors 7a, 7b are provided at the front ends of the respective electric wires 6a, 6b, respectively. The connector 7a on the preamplifier unit 2 side is male, and the connector 7b on the amplifier unit 3 side is female, and the preamplifier unit 2 and the amplifier unit 3 are connected via the connectors 7a and 7b. The state in which each signal line is connected. The function of the amplifier unit 3 includes a function of digitally displaying the surface potential after the measurement calculation, and a function of comparing the surface potential with a predetermined threshold and outputting a determination signal of the surface potential of the object. Inside the main body casing 30 for forming the amplifier unit 3, a circuit for performing the above-described arithmetic processing or signal output is incorporated. Further, a display -12 - 1302986 for digitally displaying the surface potential is provided on the upper surface of the casing body 30, that is, an amplifier portion of the displacement detector 36 to which the displacement detector head of the second figure is connected Each of the amplifier portions 3, 3, . . . of the plurality of surface potential detectors 27 can be connected in abutting state by a connector provided on the side of the housing bodies 30', 30, ... Row. In the present example, the housing bodies 30', 30, 30, . . . of each of the sense amplifier sections 3', 3, 3, ... have the same specifications as described above, and the housing bodies 30', 30, 30·.· has a shape of a rectangular shape that is slightly elongated toward the direction orthogonal to the DIN rail 24. The electric wire 23 is taken out from the amplifier unit 3 of the surface potential detector 27. The electric wire 23 includes an external input line, an external output line, a power supply line, and the like. The external input line is, for example, for applying a variety of commands from the outside to the surface potential detector from a PLC or the like, and the external output line is for outputting an output generated inside the amplifier unit 3, for example, a PLC, etc., and the power supply. The line is used to supply power to the internal circuit of the amplifier unit 3. Further, the electric wire 6b drawn from the amplifier unit 3 of the surface potential detector 27 includes various signal lines for performing signal processing between the amplifier unit 2 P and the head 1 before the first picture. On the other hand, the electric wire 6b' is taken out from the amplifier portion 3'k of the displacement detector 36, and a connector 7b' is attached to the front end of the electric wire 6b', which is connected to the displacement detector head of Fig. 2 described above. The circular connector 13 of the portion 9. Further, the electric wire 2 3 ' is taken out from the amplifier portion 3 ' of the displacement detector 36. The electric wire 23' includes an external input line, an external output line, a power supply line, and the like. The external input line applies various commands from the external PLC to the displacement detector, and the external output line is used to output various signals generated by the amplifier unit 3' to the external PLC, etc., and the power supply. The line is used to supply power to the internal circuit of the amplifier unit 3'. On the side of one of the casing main bodies 30 of each of the amplifier sections 3, as shown in Fig. 1 described above, a slide cover 13 is provided. When the sliding cover 13 is opened, the connector for abutting is exposed from the inside thereof, and the connector on the other side is provided with a connector that can be coupled to the connector. Further, the casing body 3 0 ' of the amplifier unit 3' of the displacement detector 36 has the same configuration. Therefore, by connecting the connectors on the sides of the respective amplifier sections 3', 3, 3, ... as shown in Fig. 3, the respective amplifier sections 3', 3, 3 ... can be connected in a single line, which can be single The displacement detector 36 connects a plurality of surface potential detectors 27. Fig. 4 is a block diagram corresponding to the adjacent joined state of the third figure. The head 1 of the surface potential detector 27 detects an electric field generated from the charged electric charge of the object, converts it into an electric signal, and outputs it to the preamplifier unit 2. The preamplifier section 2 incorporates a detector circuit 14 having an oscillating circuit for driving the head 1 and a circuit for amplifying and detecting a signal output from the head 1. The amplifier section 3 of the surface potential detector 27 has an A/D conversion circuit 15 for A/D conversion of a signal from the preamplifier section 2, and a CPU 16 having functions as a calculation circuit and the like. Calculating the surface potential based on the data from the A/D conversion circuit 15 and the distance from the displacement detector 36; and the memory unit 2 6, storing the correction data described later; the CPU 16 is The operation signal from the above-described push button switch 3 3 is input, and -15-1302986, on the other hand, the CPU 16 performs display control of the above-described display 31 and the like. Further, a D/A conversion circuit 18 for D/A conversion of the output of the CPU 16 and applied to the output circuit 17 can be output to the PLC or the like via the output circuit 17. On the other hand, the displacement detector head 9 of the displacement detector 36 has a detector circuit 19 including a circuit for light projection and light reception. The amplifier unit 3' is provided with an A/D conversion circuit 20 for performing A/D conversion on a signal from the detector head 9, and a CPU 21 having a function as an arithmetic circuit or the like, B based on the A/D from the A/D. The signal of the conversion circuit 20 is used to calculate the distance; the CPU 21 is input with an operation signal from the key switch 33', and on the other hand, the CPU 21 performs display control of the display 31' or the like. Further, a D/A conversion circuit 25 for D/A conversion of the output of the CPU 21 is applied to the output circuit 22, and can be output to the PLC or the like via the output circuit 22. The displacement detector 36 projects the laser light toward the object, and uses the reflected light to measure the distance to the object. The distance data measured by the displacement detector 36 is transmitted from the CPU 21 of the displacement detector 36 to the CPU 16 of the B amplifier unit 3 of the surface potential detector 27. According to the above, when the amplifier portion 3' of the displacement detector 36 and the respective amplifier sections 3, 3.. of the surface potential detectors 27 are adjacently adjacent to each other, as shown in Fig. 4, in the respective CPUs 21, 16 Between 16 and 16 can perform serial communication, and the data of the distance between the object measured by the displacement detector 36 can be transmitted to each surface potential detector 27, and each surface potential detector 27 is respectively The potential measured by the data of the distance is used as a correction for the surface potential 値. -16-
1302986 寬度方向之方向）被搬運之情況，沿著寬度方向以等障 倂設變位檢測器36和多個表面電位檢測器27^275,用贫 定對象物35之全體之表面電位。 此種在搬運線上流動之板狀之對象物3 5，由於其本| 重量，其寬度方向之中央部份會撓曲到下方，所以從名 表面電位檢測器27^ 2 7 5到對象物35之距離，對於全音| 表面電位檢測器27!〜2 7 5並不成爲一定，依照安裝之位檟 成爲不同之値。 因此，並不是將變位檢測器3 6所測定之距離D0直g 入作爲表面電位檢測器27^275之距離，而是需要在各作 面電位檢測器27^ 2 7 5，將變位檢測器36所輸出之距離 修正成爲本身之距離，然後進行表面電位檢測器値之杉 第10圖是構造圖，用來說明各個表面電位檢測器27 之表面電位値之校正，在該第1 0圖中，代表性地表示上 5個表面電位檢測器27^〜2 7 5當中的3個表面電位檢測 27丨〜2 7 3。 變位檢測器3 6所測定之截至對象物3 5之距離D0之資 ，被傳送到連結之所有的表面電位檢測器27^ 2 7 5。 在各個表面電位檢測器27^ 2 7 5，離開變位檢測器36 距離D0被變換成爲各個表面電位檢測器27^275和對象 35之間的個別距離D1〜D5。 例如，左端之表面電位檢測器27!之與對象物35之距 D1係藉Dl = alxD0 + bl算出，相鄰之表面電位檢測器27: 隔 :測 ，之 個 :之 :而 :取 丨表 D0 :正 275 ‘述 丨器 :料 之 .物 :離 之 -19- 1302986 距離之關係。 第6圖表示校正對照表。 第7圖表示依照距離之測定區域的變化。 第8圖表示校正資料。 第9圖是槪略構造圖，用來表示表面電位之測定之實用 例。 第1 0圖表示第9圖之各個表面電位檢測器之演算處理。 第1 1圖是流程圖，用來說明第1 0圖之動作。 P 第12圖是另一實施例之與第10圖對應之圖。 主要部分之代表符號說明 1 頭 部 3，3’ 放 大 器 部 27 表 面 電 位 檢測器 36 變 位 檢 測 器 33，33， 按 鍵 開 關 -22-When the direction of the width direction of the 1302986 is carried, the displacement detector 36 and the plurality of surface potential detectors 27^275 are arranged in the same direction in the width direction, and the surface potential of the entire object 35 is used. The plate-shaped object 35 which flows on the conveyance line has a central portion in the width direction which is deflected downward due to its weight, so that the surface potential detector 27^277 is applied to the object 35. The distance, for the full tone | Surface potential detector 27! ~ 2 7 5 does not become a certain, according to the location of the installation is different. Therefore, the distance D0 measured by the displacement detector 36 is not directly entered as the distance of the surface potential detector 27^275, but the displacement detection is required at each surface potential detector 27^247. The distance outputted by the device 36 is corrected to its own distance, and then the surface potential detector is shown in Fig. 10 as a structural diagram for explaining the correction of the surface potential 値 of each surface potential detector 27, in the first 0 map. The three surface potentials of the upper five surface potential detectors 27^ to 27.5 are representatively detected 27丨~2 7 3 . The distance D0 of the object 3 5 measured by the displacement detector 36 is transmitted to all of the connected surface potential detectors 27^275. At the respective surface potential detectors 27^275, the distance D0 from the displacement detector 36 is converted into individual distances D1 to D5 between the respective surface potential detectors 27^275 and the object 35. For example, the distance D1 of the surface potential detector 27! at the left end from the object 35 is calculated by Dl = alxD0 + bl, and the adjacent surface potential detector 27: is separated: measured, one of: D0: Positive 275 'Speaker: material. Object: away from -19- 1302986 distance relationship. Figure 6 shows a calibration comparison table. Fig. 7 shows the change in the measurement area according to the distance. Figure 8 shows the calibration data. Fig. 9 is a schematic structural view showing a practical example of measurement of surface potential. Fig. 10 shows the calculation processing of each surface potential detector of Fig. 9. Figure 1 is a flow chart for explaining the action of Figure 10. P Fig. 12 is a view corresponding to Fig. 10 of another embodiment. Description of the main parts: 1 Head 3, 3' Amplifier 27 Surface Potential Detector 36 Displacement Detector 33, 33, Press the key to turn off -22-