TW200739031A - Apparatus for measuring thickness of glass substrate - Google Patents

Apparatus for measuring thickness of glass substrate

Info

Publication number
TW200739031A
TW200739031A TW095129930A TW95129930A TW200739031A TW 200739031 A TW200739031 A TW 200739031A TW 095129930 A TW095129930 A TW 095129930A TW 95129930 A TW95129930 A TW 95129930A TW 200739031 A TW200739031 A TW 200739031A
Authority
TW
Taiwan
Prior art keywords
glass substrate
thickness
calculates
conveyed
measuring thickness
Prior art date
Application number
TW095129930A
Other languages
Chinese (zh)
Other versions
TWI421467B (en
Inventor
Tomohiro Nishiyama
Original Assignee
Nishiyama Stainless Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nishiyama Stainless Chemical Co Ltd filed Critical Nishiyama Stainless Chemical Co Ltd
Publication of TW200739031A publication Critical patent/TW200739031A/en
Application granted granted Critical
Publication of TWI421467B publication Critical patent/TWI421467B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/38—Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
    • G01N33/386—Glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0181—Memory or computer-assisted visual determination
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/10—Plc systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Geometry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Ceramic Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

A thickness measuring apparatus 40 is provided which receives a laminated glass substrate GL for use in flat panel display having subjected to thinning process, and measures thickness of the glass substrate in a plurality of inspection lines LN1-LN3. Provided are three sets of displacement sensors Si arranged orthogonally to a conveyance path in which the glass substrate is conveyed, on the sides of front and back faces of the glass substrate; a first means that calculates clearances Dl, D2 between each sensor and a face of the glass substrate GL based on an output signal from the displacement sensor; and a second means that calculates thickness T of the glass substrate being conveyed based on a value calculated in the first means and clearance DO of a pair of sensors determined in advance. According to the present invention, it is possible to accurately measure thickness even for a thinned glass substrate.
TW095129930A 2006-04-07 2006-08-15 Apparatus for measuring thickness of glass substrate TWI421467B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006106645 2006-04-07

Publications (2)

Publication Number Publication Date
TW200739031A true TW200739031A (en) 2007-10-16
TWI421467B TWI421467B (en) 2014-01-01

Family

ID=38782473

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095129930A TWI421467B (en) 2006-04-07 2006-08-15 Apparatus for measuring thickness of glass substrate

Country Status (4)

Country Link
KR (1) KR20070100618A (en)
CN (1) CN101050946A (en)
SG (1) SG136848A1 (en)
TW (1) TWI421467B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102073327A (en) * 2010-12-23 2011-05-25 南京林业大学 Online monitoring and control system for continuous flat press plate blank thickness of artificial plate
KR101220654B1 (en) * 2010-12-27 2013-02-07 주식회사 포스코 system and method for measuring surface rough
CN102305593A (en) * 2011-05-20 2012-01-04 西安迈瑞测控技术有限公司 Method and device for measuring geometric elements of high-accuracy and wide-range thin-film transistor (TFT) substrate glass
KR200469125Y1 (en) * 2012-03-13 2013-09-25 노바테크인더스트리 주식회사 An Automatic thickness measurement system of a display panel
WO2015001145A1 (en) 2013-07-04 2015-01-08 Fuesca, S.L. Apparatus for measuring the surface diffusion and the nanometric thickness of metals or metallic oxides on glass substrates
KR101413511B1 (en) * 2013-11-28 2014-07-04 컨트롤코리아 주식회사 System for measuring thickness
CN110006350B (en) * 2018-09-19 2021-08-20 核工业华东二六三工程勘察院 Thickness measuring platform based on laser beam emission
CN109813238A (en) * 2019-01-28 2019-05-28 广东拓斯达科技股份有限公司 The control method and device of thickness of glass detection
CN110384405B (en) * 2019-07-31 2021-06-04 广东万家乐燃气具有限公司 Water supply control method and water dispenser
CN110353506B (en) * 2019-07-31 2021-06-04 广东万家乐燃气具有限公司 Water cut-off control method and water dispenser
WO2022118184A1 (en) * 2020-12-01 2022-06-09 Lohia Mechatronik Private Limited A device and a method to measure and monitor physical properties of moving web of slit plastic film tapes
US11913772B2 (en) * 2022-03-17 2024-02-27 Intel Corporation Non-destructive gap metrology
CN114812452A (en) * 2022-06-14 2022-07-29 芜湖东旭光电科技有限公司 Glass substrate detection system, method, device, electronic device and storage medium

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000055626A (en) * 1998-08-06 2000-02-25 Nanotemu:Kk Plate thickness measuring method and device therefor
DE19949019C2 (en) * 1999-10-11 2001-12-13 Leica Microsystems Measuring device and method for measuring structures on substrates of various thicknesses
KR100652948B1 (en) * 2000-12-08 2006-12-01 삼성코닝 주식회사 Method and system for measuring glass thickness of liquid crystal display
JP3768443B2 (en) * 2002-01-09 2006-04-19 大日本スクリーン製造株式会社 Width dimension measuring device and thin film position measuring device
DE10225488A1 (en) * 2002-06-10 2003-12-18 Bild Und Signalverarbeitung Mb Method and device for non-contact thickness measurement of transparent measurement objects
JP2005061982A (en) * 2003-08-12 2005-03-10 Nishiyama Stainless Chem Kk Apparatus for inspecting display glass substrate
JP2006133099A (en) * 2004-11-08 2006-05-25 Micronics Japan Co Ltd Inspection device of display panel

Also Published As

Publication number Publication date
SG136848A1 (en) 2007-11-29
KR20070100618A (en) 2007-10-11
CN101050946A (en) 2007-10-10
TWI421467B (en) 2014-01-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees