KR100817683B1 - Static Electricity Measurement Apparatus And Surface Potential Sensor - Google Patents

Abstract

assignment

The present invention provides an electrostatic measuring device that is easy to configure a suitable measuring system according to the object to be measured, the use, and the like.

Resolution

The surface potential sensor 27 and the displacement sensor 36 are configured to be coupled and separated through the amplifier parts 3 and 3 ', and in the state where the plurality of surface potential sensors 27, 27... The data of the distance measured in 36 can be transmitted to the plurality of surface potential sensors 27, 27, and each surface potential sensor 27, 27 corrects the potential measured on the basis of the data of this distance, The surface potential is calculated.

Static electricity measuring instrument, surface potential sensor

Description

Static Electricity Measurement Apparatus And Surface Potential Sensor

1 is a perspective view of a surface potential sensor according to the present invention.

2 is a perspective view of a sensor head portion of a displacement sensor according to the present invention.

3 is a plan view of the amplifier unit of the displacement sensor and the surface potential sensor combined.

4 is a block diagram of a displacement sensor and a surface potential sensor.

Fig. 5 is a characteristic diagram showing the relationship between the measured value and the distance of the surface potential sensor.

6 shows a correction table;

7 is a diagram showing a change in a measurement area by distance.

8 shows a correction table;

9 is a schematic configuration diagram showing an application example of the measurement of surface potential.

10 is a diagram illustrating arithmetic processing of each surface potential sensor of FIG. 9;

11 is a flowchart provided to explain the operation of FIG. 10.

12 corresponds to FIG. 10 in another embodiment.

(Explanation of symbols for the main parts of the drawing)

1: head part

3, 3 ': Amplifier section

27: surface potential sensor

36: displacement sensor

Technical field

The present invention relates to an electrostatic measuring device for measuring the surface potential of an object in a non-contact manner and a surface potential sensor used in the electrostatic measuring device.

Background technology

Conventionally, there exists an electrostatic measuring apparatus (surface potential measuring device) which measures the potential of the static electricity charged on the surface of an insulator non-contact (for example, refer patent document 1).

Such an electrostatic measuring device measures the surface potential of an object by detecting the potential level of the sensor electrode by using an electric potential induced in the sensor electrode disposed opposite the object to generate a potential of the level corresponding to the surface potential of the object. It is.

Patent Document 1: Japanese Patent Application Laid-Open No. 8-129043

The potential level generated at the sensor electrode depends not only on the surface potential of the object but also on the distance from the object. If the distance is the same even though the surface potential is the same, the potential level generated on the sensor electrode is also different.

For this reason, in the said patent document 1, the sensor part for electric potential measurement containing the said sensor electrode, and the sensor part for distance measurement are accommodated in the same body, and comprise a sensor unit, and the electric potential measured by the electric potential measurement sensor part The distance correction is performed based on the distance measured by the sensor unit for distance measurement.

Thus, since the sensor part for electric potential measurement and the sensor part for distance measurement are accommodated in the same body, and the sensor unit is comprised, when the object to measure is expanded to planar shape and cannot be measured with a single sensor unit, There is a difficulty in requiring a plurality of sensor units and a plurality of main body units for processing the signals and increasing the cost.

Moreover, according to the object to be measured, the sensor part for distance measurement based on various detection principles, such as a laser type and an ultrasonic type, could not be distinguished and used, and it was difficult to comprise the system according to the measuring object and a use.

This invention is made | formed in view of the point mentioned above, and an object of this invention is to provide the static electricity measuring device which is easy to comprise a suitable measurement system according to a measurement object, a use, etc.

Means to solve the problem

The electrostatic measuring apparatus of the present invention is capable of combining and detaching a surface potential sensor for measuring a potential according to a surface potential of an object, and a displacement sensor for measuring a distance between the surface potential sensor and the object. A correction data storage unit configured to store correction data based on the relationship between the potential measured by the surface potential sensor and the distance, and the surface based on the distance and the correction data measured by the displacement sensor. A calculation unit for calculating the surface potential of the object by correcting the potential measured by the potential sensor is provided, and the correction data storage unit is provided in the surface potential sensor.

In this case, the surface potential sensor and the displacement sensor are preferably coupled or separated by a connector provided in each sensor itself, but may be performed using a dedicated connection port.

The correction data may be a correction table, a correction formula, or the like.

According to the present invention, since the surface potential sensor and the displacement sensor are configured to be coupled and separated, it is possible to combine and use sensors having different detection principles depending on the object and the use. In addition, the surface potential of the object can be calculated with high accuracy by correcting the measurement potential of the surface potential sensor that changes with the distance to the object using the correction data.

In addition, the electrostatic measuring apparatus of the present invention comprises a surface potential sensor that measures the potential according to the surface potential of the object, and a displacement sensor that measures the distance between the surface potential sensor and the object, so as to be combined and separated, The surface potential sensor includes a fixed distance input unit for inputting the fixed distance when used at a fixed distance, a fixed distance storage unit for storing the fixed distance, and a relationship between the potential measured by the surface potential sensor and the distance. In a state in which the correction data storage unit stores the correction data based on the correction data and the displacement sensor, correcting the electric potential measured by the surface potential sensor based on the distance measured by the displacement sensor and the correction data; In addition, in the state separated from the displacement sensor, the correction at the distance stored in the fixed distance storage unit On the basis of the data, a calculation unit for calculating the surface potential of the object by correcting the potential measured by the surface potential sensor is provided.

According to the present invention, since the surface potential sensor and the displacement sensor are configured to be coupled and separated, it is possible to combine and use sensors having different detection principles depending on the object and the use. In the case of measuring the surface potential at a fixed distance, the surface potential can be measured by the surface potential sensor alone by inputting the fixed distance to the surface potential sensor.

In a preferred embodiment, in the state where the displacement sensor and the one or the plurality of surface potential sensors are coupled, the data of the distance measured by the displacement sensor can be transmitted to the one or the plurality of surface potential sensors.

According to this embodiment, in one or a plurality of surface potential sensors, each of the potentials can be corrected by using the data of the distance transmitted from a single displacement sensor, so that the area where the object is widened and measured In the large case, only the surface potential sensor may be added.

In one embodiment, the surface potential sensor and the displacement sensor are amplifier-separated sensors in which the sensor head portion and the amplifier portion are detachably connected via a connection cord, and connectors are provided on both sides of the casings of the respective amplifier portions. The amplifier section of the sensor and each amplifier section of the one or the plurality of surface potential sensors are coupled in a line adjacent to each other via the connector on the side to transfer data of the distance measured by the displacement sensor to each surface potential sensor. It is possible.

According to this embodiment, the number of surface potential sensors is increased or decreased in accordance with the size of an object, or detected according to the material of the object, by coupling and separating the respective amplifier parts of the separation type surface potential sensor and the displacement sensor through the connector. It is possible to use a combination of sensors with different principles.

In a preferred embodiment, the surface potential of the object to be conveyed is measured, and the sensor head portions of the plurality of surface potential sensors are arranged along a direction non-parallel to the conveying direction so as to oppose the object. will be.

According to this embodiment, when a large object is conveyed in a planar shape, the sensor head portions of the plurality of surface potential sensors are non-parallel in the conveying direction, for example, in an inclination direction, preferably perpendicular to the conveying direction. It is possible to measure the surface potential of the object by arranging accordingly.

In another embodiment, a correction data input unit for inputting correction data for correcting the distance of each of the plurality of surface potential sensors with respect to the distance measured by the displacement sensor, the calculation unit is measured by the displacement sensor The distance is corrected by the correction data, and the surface potential of the object is calculated using the corrected distance.

According to this embodiment, for example, when measuring the surface potential of the object spreading in a planar shape using a single displacement sensor and a plurality of surface potential sensors, it is necessary to correct the distance for each surface potential sensor. It becomes possible. Therefore, for example, when the object widening in a planar shape is bent, the distance between each surface potential sensor and the object is different depending on the installation position of the surface potential sensor, and according to the curvature of the object for each surface potential sensor. By inputting the correction data, the distance measured by the displacement sensor can be respectively corrected by the correction data, corrected to the distance in consideration of the warpage, and the potential can be corrected using the corrected distance to calculate the surface potential.

In another embodiment, the calculation unit calculates the surface potential of the object by correcting the potential measured by the surface potential sensor based on the distances measured by the plurality of displacement sensors, respectively.

According to this embodiment, since the distance measured by each of the displacement sensors is used, for example, when the object is inclined, the distances between both ends of the distance from the object to the minimum and maximum are determined by each displacement sensor. It becomes possible to measure and correct each.

According to a preferred embodiment, the correction data includes measurement size correction data based on a relationship between the measurement area measured by the surface potential sensor and the distance, and the calculation unit includes the distance measured by the displacement sensor and The surface potential of the standard size is calculated by correcting the potential measured by the surface potential sensor based on the measurement size correction data.

According to this embodiment, even if the size of the measurement region changes with distance, the surface potential of the standard size can always be calculated.

In one embodiment, a size input part which inputs the size of the said target object is provided, and the said calculating part correct | amends the surface potential of the said standard size to the surface potential of the said input size.

According to this embodiment, the surface potential corresponding to the size is calculated by inputting the size of the object.

The surface potential sensor of the present invention is a surface potential sensor for measuring the surface potential of an object, and is configured to be detachably coupled to a displacement sensor for measuring the distance between the surface potential sensor and the object. A correction data storage unit for storing correction data based on the relationship between the potential measured at and the distance, and the potential measured by the surface potential sensor based on the distance measured by the displacement sensor and the correction data. And a calculating section for correcting and calculating the surface potential of the object.

According to the present invention, since the surface potential sensor and the displacement sensor are configured to be coupled and separated, it is possible to combine and use a sensor having a different detection principle according to an object or a purpose. In addition, by correcting the measurement potential of the surface potential sensor that changes with the distance to the object using the correction data, the surface potential of the object can be calculated with high accuracy.

In a preferred embodiment, in the state where the displacement sensor and one or a plurality of surface potential sensors are coupled, data of the distance measured by the displacement sensor can be transmitted to the one or a plurality of surface potential sensors.

According to this embodiment, one or a plurality of the surface potential sensors can each be corrected using the data of the distance measured by a single displacement sensor, so that the object is widened in a plane shape and the measured area is large. In this case, only the surface potential sensor may be added.

Implement the invention  Best form for

EMBODIMENT OF THE INVENTION Below, preferred embodiment of this invention is described in detail, referring an accompanying drawing.

As shown in FIG. 4 to be described later, the static electricity measuring device of the present invention is a surface potential sensor 27 for measuring the surface potential of the object, and a laser type for measuring the distance from the surface potential sensor 27 to the object. Displacement sensor 36 is provided.

1 is a perspective view showing an appearance of a surface potential sensor 27 according to the present invention. The surface potential sensor 27 of this embodiment is comprised by remodeling the preamplifier part 2 between the head part 1 and the amplifier part 3.

Although 4 is a support member which supports the preamplifier part 2, this support member 4 is used as needed, and does not affect the installation and operation | movement of the preamplifier part 2 at all.

The head part 1 and the preamp part 2 are connected by the electric cord 5.

Electrical cords 6a and 6b are attached to the preamp section 2 and the amplifier section 3, respectively. These electric cords 6a and 6b include a plurality of signal lines including a power supply line. In addition, the electric cords 6a and 6b are inserted into the main body of the preamplifier part 2 and the amplifier part 3, respectively, and each signal line is soldered to the internal wiring board. In addition, relay connectors 7a and 7b are provided at the ends of the electric cords 6a and 6b, respectively. The connector 7a on the preamplifier part 2 side is male and the connector 7b on the amplifier part 3 side is a male shape. By connecting these connectors 7a and 7b, The preamplifier part 2 and the amplifier part 3 are in the state connected via each signal line.

The amplifier unit 3 has a function of digitally displaying the measured surface potential and a function of outputting a determination signal of the surface potential of the object by comparing the surface potential with a predetermined threshold value.

In the case main body 30 forming the main body of the amplifier unit 3, a circuit for the above-described arithmetic processing and signal output is assembled. Moreover, on the upper surface of this case main body 30, the indicator 31 for digitally displaying the said surface potential, the indicator 32 for indicating the ON state of a determination signal, and the key switch 33 for making various settings are shown. ) And the like are arranged. By the key switch 33, the correction factor for setting the correction function such as the distance and size, the correction coefficient for correcting the distance given from the displacement sensor 36, or the setting such as the distance when the distance to the object is already known. Input is made. 34 in the figure is a transparent cover for protecting the upper surface.

2 is a perspective view of the displacement sensor head portion 9 of the displacement sensor 36. The displacement sensor head portion 9 has a rectangular parallelepiped casing 10. A light transmitting window 11 is provided on the front side of the case 10, an electric cord 12 is drawn out on the rear side thereof, and an annular connector 13 is attached to the front end thereof.

In this displacement sensor head portion 9, a light source, a light transmitting optical system, a light receiving optical system, a position detecting element, a light transmitting and a light receiving circuit, and the like are incorporated. The input signal to the light transmitting circuit, the output signal from the light receiving circuit, and the like flow through the electric cord 12.

This displacement sensor head portion 9 is connected to an amplifier portion of a case of the same standard as the case body 30 of the amplifier portion 3 of the surface potential sensor 27 of FIG. 1.

FIG. 3 is a plan view showing an adjacent coupling state between the amplifier unit 3 'of the displacement sensor 36 and the amplifier unit 3 of the surface potential sensor 27, and the same reference numerals are used for the parts corresponding to FIG. Attach.

The static electricity measuring device of this embodiment can not only connect the displacement sensor 36 and the surface potential sensor 27 one-to-one, but also, as shown in FIG. 3, a single displacement sensor 36 and a plurality of ones. Surface potential sensor 27 can be coupled adjacently via the amplifier portions 3 ', 3, 3...

That is, the amplifier part 3 'of the displacement sensor 36 to which the displacement sensor head part 9 of FIG. 2 is connected, and each of the amplifier parts 3, 3... Of the plurality of surface potential sensors 27 are cased. The connectors provided on the side surfaces of the main bodies 30 ', 30, ... can be mounted continuously in a row in an adjacent coupling state.

In this example, the case main bodies 30 ', 30, 30 ... of the respective amplifier units 3', 3, 3 ... have the same specifications as described above, and these case main bodies 30 ', 30, 30. ...) has a form of a slightly elongated rectangular parallelepiped in the direction orthogonal to the DIN rail 24.

The electric cord 23 is pulled out from the amplifier part 3 of the surface potential sensor 27. The electric cord 23 includes an external input line, an external output line, a power supply line, and the like. The external input line is for giving various commands from the outside to the surface potential sensor, for example, from a PLC or the like, and the external output line outputs an output generated inside the amplifier unit 3 to the external device such as a PLC or the like. The power supply line is for supplying power to the internal circuit of the amplifier unit 3.

In addition, various signal lines for exchanging signals between the preamplifier part 2 and the head part 1 of FIG. 1 described above are provided in the electric cord 6b drawn out from the amplifier part 3 of the surface potential sensor 27. This is included.

On the other hand, the electric cord 6b 'is pulled out from the amplifier part 3' of the displacement sensor 36, and the displacement sensor head part of FIG. 2 mentioned above is attached to the front-end | tip of this electric cord 6b '. The connector 7b 'connected to the annular connector 13 of 9) is attached.

Moreover, the electric cord 23 'is pulled out from the amplifier part 3' of the displacement sensor 36. As shown in FIG. The electric cord 23 'includes an external input line, an external output line, a power supply line, and the like. The external input line gives various commands to the displacement sensor from an external PLC or the like. The external output line is for outputting various signals generated inside the amplifier unit 3 'to an external PLC or the like. Is for supplying power to the internal circuit of the amplifier section 3 '.

On one side of the case main body 30 of each amplifier unit 3, as shown in FIG. 1 described above, a slide cover 8 is provided. When these slide covers 8 are opened, the connector for adjacent coupling is exposed from the inside, and the connector which can be connected to this connector is provided in the other side surface.

Moreover, the case main body 30 'of the amplifier part 3' of the displacement sensor 36 is also comprised in the same structure.

Thus, by connecting the connectors on the side surfaces of the respective amplifier sections 3 ', 3, 3, ..., as shown in Fig. 3, the respective amplifier sections 3', 3, 3, ... are continuously mounted in one row, The plurality of surface potential sensors 27 can be connected to a single displacement sensor 36.

4 is a block diagram corresponding to the adjacent bonding state of FIG. 3.

The head portion 1 of the surface potential sensor 27 detects an electric field generated from the electrified charge of the object, converts it into an electrical signal, and outputs it to the preamplifier portion 2. The preamplifier 2 has a sensor circuit 14 built in, and the sensor circuit 14 amplifies an oscillation circuit for driving the head 1 and a signal output from the head 1. And a circuit for detecting the same.

The amplifier unit 3 of the surface potential sensor 27 includes an A / D converter circuit 15 that performs A / D conversion on the signal from the preamplifier unit 2 and the A / D converter circuit 15. A CPU 16 having a function as an arithmetic circuit for calculating surface potential or the like based on the signal of the signal and the distance from the displacement sensor 36 and a storage unit 26 storing correction data described later. The CPU 16 receives the operation signal from the key switch 33 described above, while the CPU 16 performs display control of the display 31 and the like. In addition, a D / A conversion circuit 18 for outputting the output of the CPU 16 to the output circuit 17 by D / A conversion is provided, and the output can be output to a PLC or the like through the output circuit 17.

On the other hand, the displacement sensor head 9 of the displacement sensor 36 incorporates a sensor circuit 19 including circuits for light transmission and light reception. The amplifier part 3 'is based on the A / D conversion circuit 20 which performs A / D conversion of the signal from the sensor head part 9, and the distance based on the signal from this A / D conversion circuit 20. Is provided with a CPU 21 having a function as an arithmetic circuit or the like that calculates an operation signal. An operation signal from a key switch 33 'is input to the CPU 21, while the CPU 21 displays an indicator 31. Display control such as') is performed. Moreover, the D / A conversion circuit 25 which gives D / A conversion of the output of CPU21 to the output circuit 22 is provided, and it can output to PLC etc. via the output circuit 22. FIG.

This displacement sensor 36 transmits a laser beam toward an object, and measures the distance to an object by the reflected light. The distance data measured by the displacement sensor 36 is transmitted from the CPU 21 of the displacement sensor 36 to the CPU 16 of the amplifier unit 3 of the surface potential sensor 27.

As described above, when the amplifier unit 3 'of the displacement sensor 36 and the respective amplifier units 3, 3, ... of the surface potential sensor 27 are adjacent to each other, as shown in FIG. Serial communication is possible between 21, 16, 16, ..., and the data of the distance with the object measured by the displacement sensor 36 can be transmitted to each surface potential sensor 27, and each surface potential sensor ( 27) corrects each of the electric potential values measured using the data of this distance to be the front surface position.

5 is a characteristic diagram showing the relationship between the measured value and the distance of the surface potential sensor. When the potential of an object of a size having a constant potential and not affected by the change of the measurement area due to the distance is measured by changing the distance, the measured value changes with distance, as shown in FIG.

In general, it is known that the relationship between the measured value of the surface potential sensor and the distance to the object becomes a relationship that is inversely proportional to that shown in FIG. 5.

Therefore, in this embodiment, based on such a characteristic, the correction table as correction data for correcting the measured value to the correct front surface position is stored in the storage unit 26 described above, and the measured value is obtained using this correction table. To calibrate.

Fig. 6 is a diagram for explaining the structure of such a correction table, and is composed of correction coefficients k ₁ to k _n corresponding to distances x ₁ to x _n . By using the correction coefficient, the measured value of the surface potential sensor 27 is corrected to the absolute front surface position.

7 is a figure which shows widening of the measurement area | region of the surface potential sensor 27. As shown in FIG. As shown in Fig. 7, the measurement regions A1 to A3 are widened in accordance with the distances d1 to d3, and the electric potentials, i.e., measured values, of the electric charges in the measurement region are widened and averaged.

Thus, since the measurement area | region becomes wider and the distance with an object becomes long, the measurement result of the surface potential sensor 27 will be influenced by the distance with an object also in the point of a measurement area.

Therefore, in this embodiment, the size of the object is assumed to be a constant standard size S, for example, 10 mm 2, and the measured value is corrected by the measured value in the constant standard size S region. For example, if the measurement area A1 at the first distance d1 is 100 mm 2, 10 mm 2, which is the standard size S, is widened to 10 times the measurement area A 1, and the measured value is 1/10. In this case, the measured value is multiplied by 10 times and corrected by the measured value in the standard size S. For example, if the measurement area A2 at the second distance d2 is 200 mm 2, 10 mm 2, which is the standard size S, is widened to a measurement area of 20 times, and the measured value is 1/20. In this case, the measured value is multiplied by 20 times and corrected by the measured value in the standard size S in this case.

In this way, the change in the measurement area according to the distance is always corrected by the measured value in the constant standard size S. FIG.

For this reason, the correction table as correction data for correcting the measured value to the measured value of the standard size S is stored in the storage unit 26 described above in advance, and the measured value is corrected using this correction table.

8 is a diagram for explaining the configuration of such a correction table, and is composed of correction coefficients K ₁ to K _n corresponding to distances x ₁ to x _n . By using the correction coefficient according to the distance measured by the displacement sensor 36, the measured value of the surface potential sensor 27 is correct | amended, and the surface potential value of standard size S is corrected.

In addition, when the user inputs the actual object size, the measured value according to the size of the input object using the proportional relationship between the standard size S and the size of the input object. To compensate.

9 is a schematic configuration diagram showing an application example of the measurement of the surface potential by the electrostatic measuring device having the above configuration.

This example measures the surface potential of the plate-shaped object 35 to be conveyed by the static electricity measuring device. For example, a plate-like object 35 such as a glass substrate is supported at both ends in the width direction thereof. In the case of conveying in the direction of arrow A (the direction perpendicular to the width direction), the displacement sensor 36 and the plurality of surface potential sensors 27 ₁ to 27 _{5 are} arranged at equal intervals along the width direction and the object ( It is to measure the surface potential of the whole of 35).

Since the center part in the width direction of the plate-shaped object 35 flowing in the form of such a conveying line is bent downward by its own weight, from each surface potential sensor 27 ₁ to 27 ₅ to the object 35. The distance of is also not constant with respect to all the surface potential sensors 27 ₁ to 27 ₅ , and has a different value depending on the attached position thereof.

Therefore, the distance D0 measured by the displacement sensor 36 is not taken as the distance of the surface potential sensors 27 ₁ to 27 ₅ as it is, but instead of the displacement sensor (for each surface potential sensor 27 ₁ to 27 ₅ ). After correcting the distance D0 output from 36) to its own distance, it is necessary to correct the entire surface position.

In Figure 10, each electrostatic sensor (27 ₁ to 27 ₅₎ surface before and configurations for explaining the correction of the position do, in the Figure 10, the above-described five surface potential sensors (27 ₁ to 27 ₅₎ in the Three surface potential sensors 27 ₁ to 27 _{3 are} shown representatively.

The data of the distance D0 to the object 35 measured by the displacement sensor 36 is transmitted to all the surface potential sensors 27 ₁ to 27 _{5 which are} connected.

Each of the electrostatic sensor (27 ₁ to 27 _5), the distance (D0) from the displacement sensor 36, each of the electrostatic sensor head (27 ₁ to 27 ₅₎ and the individual distance between the object (35) Is converted to (D1 to D5).

For example, the left end (左端) electrostatic sensor (27 ₁₎ the object (35) and the distance (D1) is, D1 = a1 × D0 + b1, the surface potential sensor (27 ₂₎ of the side is calculated as in the the distance (D2) is, D2 = a2 × and calculated as D0 + b2, the distance (D3) between the object (35) of the surface potential sensor (27 ₃₎ of the side of the object 35, D3 = a3 × D0 Calculated as + b3.

The correction coefficients a1 to a3 and b1 to b3 at this time are set by the user in advance in accordance with the installation positions of the individual surface potential sensors 27 ₁ to 27 ₃ . Each electrostatic sensor (27 ₁ to 27 _3), correcting the voltage signal obtained by the individual distance (D1 to D3) of each of the modified surface to give a final forward position.

11 is a flowchart of measurement processing of the front surface position of each surface potential sensor.

First, the A / D value of the detection signal measured by the head part 1 is acquired (step n1), and converted into the front surface position P1 (step n2).

Next, it is determined whether or not the distance correction function is 0N (step n3). When the distance correction function is not 0N, distance correction is not performed. Therefore, the process returns to step n1 and the surface front position P1 is the final surface. It becomes all position.

When the distance correction function is 0N, it is determined whether the auto distance correction is 0N (step n4). When the distance correction function is not 0N, the set distance D set by the user is acquired, and the process moves to step n7 ( Step n8).

When the auto distance correction is 0N, the distance value from the displacement sensor 36 is acquired (step n5), and the correction distance is calculated using the correction coefficient set by the user (step n6). 6, using the coefficient according to the correction distance of the correction table of FIG. 6, or using the coefficient value according to the set distance D acquired in step n8, the front surface position P1 is corrected, and the distance correction front position P2. Is calculated (step n7).

Next, it is judged whether or not the size correction function is 0N (step n9), and since size correction is not performed when it is not 0N, the process returns to step n1 and the distance correction preposition P2 is brought to the final front surface position. do.

When the size correction function is 0N, when there is an input of the setting size, the setting size is acquired (step n10), and the front surface of the standard size is determined according to the correction distance of the correction table or the setting distance of the correction table of FIG. The surface potential value of the position or the set size is calculated and ends (step n11).

In the above-mentioned embodiment, although there was one displacement sensor 36, as another embodiment of this invention, for example, as shown in FIG. 12, the some displacement sensor 36 is combined and the example For example, the surface potential sensor 27 may be corrected using the sum D0 = A + B of the distances A and B measured by the displacement sensors 36.

In the above-described embodiment, the displacement sensor uses a laser displacement sensor. However, the displacement sensor is not limited to a laser type, but may be ultrasonic or other, and may be used by selecting an appropriate displacement sensor according to an object or the like, and also using a surface potential sensor. The surface potential sensor, such as a vibration type provided with a tuning fork type vibration tuning body or a rotating sector type provided with a rotary vane wheel, may be selected and used.

According to the present invention, since the surface potential sensor and the displacement sensor are configured to be coupled and separated, the surface potential can be measured by combining sensors having different detection principles according to the use, the object, and the like. In addition, by correcting the measurement potential of the surface potential sensor that changes with the distance to the object using the correction data, the surface potential of the object can be calculated with high accuracy.

Claims (11)

delete A surface potential sensor for measuring the potential according to the surface potential of the object and a displacement sensor for measuring the distance from the object, are configured to be combined and detachable, The surface potential sensor, A fixed distance input unit for inputting the fixed distance when used at a fixed distance; A fixed distance storage unit for storing the fixed distance; A correction data storage unit for storing correction data based on a relationship between a distance between the object and the surface potential sensor and a potential; In the state combined with the displacement sensor, the potential measured by the surface potential sensor is corrected based on the distance measured by the displacement sensor and the correction data, and in the state separated from the displacement sensor, the fixed And an arithmetic unit that calculates a surface potential of the object by correcting the potential measured by the surface potential sensor based on the correction data at the distance stored in the distance storage unit. The method of claim 2, In the state which combined the said displacement sensor and one or more said surface potential sensors, the data of the said distance measured by the said displacement sensor can be transmitted to the said one or some surface potential sensor, The static electricity measuring apparatus characterized by the above-mentioned. The method of claim 3, wherein The surface potential sensor and the displacement sensor are an amplifier separation type sensor, in which a sensor head part and an amplifier part are detachably connected via a connection cord, Connectors are provided on both side surfaces of the case of each amplifier section, and the displacement is achieved by coupling the amplifier section of the displacement sensor and each amplifier section of the one or the plurality of surface potential sensors to be adjacent to each other in a line through the connector on the side surface. Electrostatic measurement apparatus characterized in that the data of the distance measured by the sensor can be transmitted to each surface potential sensor. The method of claim 4, wherein The surface potential of the object to be conveyed is measured, wherein the sensor head portions of the plurality of surface potential sensors are arranged along a direction non-parallel to the conveying direction so as to oppose the object respectively. The method of claim 3, wherein A correction data input unit configured to input correction data for correcting distances of the plurality of surface potential sensors with respect to the distance measured by the displacement sensor, and the calculation unit corrects the distance measured by the displacement sensor. And a surface potential of the object using the corrected distance. The method of claim 2, And the calculating unit calculates a surface potential of the object by correcting a potential measured by the surface potential sensor based on the distances measured by the plurality of displacement sensors, respectively. The method of claim 2, The correction data includes measurement size correction data based on a relationship between the measurement area and the distance measured by the surface potential sensor, The computing unit calculates a surface potential at a standard size by correcting a potential measured by the surface potential sensor based on the distance measured by the displacement sensor and the measurement size correction data. . The method of claim 8, A size input unit for inputting a size of the object, And the calculating unit corrects the surface potential of the object in the standard size to the surface potential in the input size. A surface potential sensor for measuring the surface potential of an object, Is coupled to and detachable from the displacement sensor for measuring the distance to the object, A correction data storage unit for storing correction data based on a relationship between a distance between the object and the surface potential sensor and a potential; and the surface potential sensor based on the distance and the correction data measured by the displacement sensor. And a calculating section for correcting the potential measured by the calculation and calculating the surface potential of the object. The method of claim 10, And said distance sensor measured in said displacement sensor can be transmitted to said one or a plurality of said surface potential sensors in a state in which said displacement sensor and one or a plurality of said surface potential sensors are coupled to each other.

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