JP6899559B2 - Non-contact surface potential measuring device, measuring jig, and non-contact surface potential measuring method - Google Patents

Description

The present invention relates to a non-contact surface potential measuring device, a measuring jig, and a non-contact surface potential measuring method.

Conventionally, a non-contact surface potential measuring device for measuring the surface potential of a voltage generation source (hereinafter referred to as “measurement target”) to be measured in a non-contact manner has been known. This non-contact surface potential measuring device measures the electric field strength from the object to be measured, and measures the surface potential of the object to be measured based on the measured electric field strength. (For example, Patent Document 1)

Japanese Unexamined Patent Publication No. 2008-08391

Here, another voltage generation source may be arranged around the object to be measured. In this case, even if the electric field strength of the object to be measured is measured, the measured value is affected by the electric field from the surrounding voltage generation source. Therefore, when another voltage generation source is arranged around the object to be measured, the surface potential of the object to be measured cannot be accurately measured.

The present invention has been made in view of such circumstances, and an object of the present invention is to accurately measure the surface potential of a measurement object when another voltage generation source is arranged around the measurement object. It is to provide a non-contact surface potential measuring device, a measuring jig and a non-contact surface potential measuring method which can be performed.

One aspect of the present invention is a non-contact surface potential measuring device that non-contactly measures the surface potentials of N (integer or more) voltage generation sources to be measured, and measures the electric field strength of the voltage generation sources. The electric field strength measuring unit to be measured, a storage unit for storing a conversion coefficient group for converting each electric field strength generated by each voltage generation source into a surface potential of each voltage generation source, and the conversion coefficient group are used. It is a non-contact surface potential measuring device including a conversion unit that converts the electric field strength of the measurement target measured by the electric field strength measuring unit into the surface potential.

One aspect of the present invention is the non-contact surface potential measuring device described above, further comprising a first moving unit capable of moving the electric field strength measuring unit to a predetermined position above each voltage generation source, and measuring the electric field strength. The unit measures the electric field strength of the voltage generation source after being moved to a predetermined position above the voltage generation source for measuring the surface potential by the first moving unit.

One aspect of the present invention is the non-contact surface potential measuring device described above, wherein the first moving unit maintains a constant vertical distance between the voltage generating source and the electric field strength measuring unit. A guide rail for guiding the horizontal movement of the electric field strength measuring unit and a driving unit for moving the electric field strength measuring unit in the horizontal direction along the guide rail are provided.

One aspect of the present invention is the non-contact surface potential measuring device described above, in which the first moving portion is moved up and down in the vertical direction in the vertical direction between the electric field strength measuring portion and the voltage generating source. A distance measuring unit that measures the vertical distance between the voltage generating source and the electric field strength measuring unit located at a predetermined position above the voltage generating source, and a distance measuring unit that can change the distance. The electric field strength measuring unit is moved to a predetermined position above the voltage generating source for measuring the surface potential by the first moving unit, and is moved to and from the voltage generating source by the second moving unit. After the vertical distance is adjusted, the electric field strength of the voltage generation source is measured, and the distance measuring unit measures the vertical distance when the electric field strength measuring unit measures the electric field strength. The conversion unit reads out a conversion coefficient group corresponding to the distance measured by the distance measuring unit from the storage unit, and uses the read conversion coefficient group to obtain the electric field strength measured by the electric field strength measuring unit. , Converted to the surface potential.

One aspect of the present invention is the above-mentioned non-contact surface potential measuring device, in which the 1st to i (i = 1, ..., N) th electrodes are arranged at the same position as the position of the voltage generation source. , A voltage control unit for applying the voltage of N voltage cases j (j = 1, ..., N) and a conversion coefficient calculation unit for calculating the conversion coefficient group, and the electric field strength measurement unit is i. Arranged at a predetermined position above the second electrode, the electric field strength E _ij of the i-th electrode in the voltage case j is measured, and the conversion coefficient calculation unit uses the voltage V _ij as each element of N. Based on the surface potential matrix, which is a matrix of rows and N columns, and the electric field strength matrix, which is a matrix of N rows and N columns with the _{electric field strength Eij as each element, the inverse matrix of the conversion coefficients as the conversion coefficient group.} Is calculated.

One aspect of the present invention is a measuring jig for calculating the above-mentioned conversion coefficient group, which is controlled by an electrode arranged at the same position as the position of the voltage generation source and the voltage control unit. A measuring jig including a voltage generator capable of applying the voltage of the voltage cases j (j = 1, ..., N) to each electrode.

One aspect of the present invention is a non-contact surface potential measuring method in which the surface potentials of N (integer or more) voltage generation sources to be measured are measured in a non-contact manner, and the electric field strength of the voltage generating sources is measured. The measurement target measured by the electric field strength measuring unit using the electric field strength measuring step to be measured and a conversion coefficient group that converts each electric field strength generated by each voltage generation source into the surface potential of each voltage generating source. This is a non-contact surface potential measuring method including a conversion step of converting the electric field strength of the above into the surface potential.

One aspect of the present invention is the above-mentioned non-contact surface potential measuring method, which is arranged at a predetermined position above the voltage generating source and the voltage generating source when the electric field strength measuring unit measures the electric field strength. A distance measuring step for measuring the vertical distance to the electric field strength measuring unit is further included, and the conversion step reads out a conversion coefficient group corresponding to the distance measured in the distance measuring step from the storage unit. This is a non-contact surface potential measuring method for converting the electric field strength measured by the electric field strength measuring unit into the surface potential by using the read conversion coefficient group.

As described above, according to the present invention, when another voltage generation source is arranged around the object to be measured, the surface potential of the object to be measured can be accurately measured.

It is a figure which shows an example of the schematic structure of the non-contact surface potential measuring apparatus 1 which concerns on 1st Embodiment. It is a figure which shows the state of measuring the surface potential with respect to a single voltage generation source 100 which concerns on 1st Embodiment. It is a figure which shows the state of measuring the surface potential with respect to the voltage generation source 100-1 to 100-3 which concerns on 1st Embodiment. It is a figure explaining the principle of superposition of the electric field strength E which concerns on 1st Embodiment. It is a figure which shows the state of performing the calibration measurement of the non-contact surface potential measuring apparatus 1 which concerns on 1st Embodiment. It is a figure which shows an example of the schematic structure of the processing unit 13 which concerns on 1st Embodiment. It is a figure explaining the calculation method of the conversion coefficient group which concerns on 1st Embodiment. It is a figure explaining the flow of the calibration step which concerns on 1st Embodiment. It is a figure explaining the flow of this measurement / calculation step which concerns on 1st Embodiment. It is a figure which shows an example of the schematic structure of the non-contact surface potential measuring apparatus 1A which concerns on 2nd Embodiment. It is a figure which shows the state of performing the calibration measurement of the non-contact surface potential measuring apparatus 1A which concerns on 2nd Embodiment. It is a figure which shows an example of the schematic structure of the processing unit 13A which concerns on 2nd Embodiment. It is a figure explaining the flow of the calibration step which concerns on 2nd Embodiment. It is a figure explaining the flow of this measurement / calculation step which concerns on 2nd Embodiment. An example of the hardware configuration when the processing units 13 and 13A are configured by an electronic information processing device such as a computer is shown.

Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the inventions that fall within the scope of the claims. Also, not all combinations of features described in the embodiments are essential to the means of solving the invention. In the drawings, the same or similar parts may be designated by the same reference numerals to omit duplicate explanations. In addition, the shape and size of elements in the drawings may be exaggerated for a clearer explanation.

When a part of the specification is to "include", "have", or "provide" a component, this does not exclude other components unless otherwise stated. It means that it can further include the components of.

Hereinafter, a non-contact surface potential measuring device, a measuring jig, and a non-contact surface potential measuring method according to an embodiment of the present invention will be described with reference to the drawings.

(First Embodiment)
FIG. 1 is a diagram showing an example of a schematic configuration of the non-contact surface potential measuring device 1 according to the first embodiment.

The non-contact surface potential measuring device 1 non-contacts each surface potential of N (integer of 1 or more) voltage generation sources 100-1 to 100-N (hereinafter collectively referred to as voltage generation source 100) to be measured. Measure with. The voltage generation source 100 is, for example, an electrode pattern of a solar cell or the like.

The voltage generation sources 100-1 to 100-N are mounted on the substrate 200. In this embodiment, the voltage generation sources 100-1 to 100-N are regularly placed in the longitudinal direction of the substrate 200.

The non-contact surface potential measuring device 1 includes an electric field strength measuring unit 10, a distance measuring unit 11, a first moving unit 12, and a processing unit 13.

The electric field strength measuring unit 10 is arranged at a position separated from the voltage generation source 100 by a predetermined distance. The electric field strength measuring unit 10 measures the electric field strength of the voltage generation source 100 in a non-contact manner. The electric field strength measuring unit 10 outputs the measured electric field strength to the processing unit 13.

The distance measuring unit 11 measures the vertical distance (hereinafter, referred to as “measurement distance”) h between the voltage generation source 100 and the electric field strength measuring unit 10. The distance measuring unit 11 outputs the measured measured distance to the processing unit 13.

The first moving unit 12 has a configuration in which the electric field strength measuring unit 10 can be moved directly above each voltage generation source 100. The first moving unit 12 moves the electric field strength measuring unit 10 directly above each voltage generation source 100 based on the moving signal from the processing unit 13. In this embodiment, the distance measuring unit 11 and the electric field strength measuring unit 10 are integrally configured. However, the present invention is not limited to this, and the first moving unit 12 may move the electric field strength measuring unit 10 to a predetermined position above each voltage generation source 100. That is, the first moving unit 12 does not have to move the electric field strength measuring unit 10 directly above each voltage generation source 100.

The first moving unit 12 includes a guide rail 121 and a driving unit 122.
The guide rail 121 measures the electric field strength in the longitudinal direction (hereinafter, simply referred to as “longitudinal direction”) of the substrate 200 while keeping the vertical distance between the voltage generation source 100 and the electric field strength measuring unit 10 constant. Guide the movement of the unit 10.
The drive unit 122 moves the electric field strength measuring unit 10 in the longitudinal direction along the guide rail 121 based on the movement signal from the processing unit 13. For example, the drive unit 122 is a motor that moves the electric field strength measurement unit 10 along the guide rail 121.

By outputting a movement signal to the first moving unit 12, the processing unit 13 moves the electric field strength measuring unit 10 directly above each voltage generation source 100-1 to 100-N.
The processing unit 13 uses a conversion coefficient group from the N electric field strengths measured by the electric field strength measuring unit 10 to obtain the electric field strength of each voltage generation source 100-1 to 100-N, and each voltage generation source 100-1 to 100-1. Convert to a surface potential of 100-N.

Here, a method for measuring the surface potential of the voltage generation sources 100-1 to 100-N of the non-contact surface potential measuring device 1 according to the first embodiment (hereinafter, referred to as "this measurement") will be described. A case where N is 3 will be described for the purpose of preventing the explanation from becoming complicated.

The processing unit 13 moves the electric field strength measuring unit 10 directly above the voltage generation source 100-1 by outputting a moving signal to the first moving unit 12. When the electric field strength measuring unit 10 moves directly above the voltage generation source 100-1, the electric field strength measuring unit 10 measures the electric field strength of the voltage generation source 100-1. However, this measured electric field strength includes the electric field strengths of the voltage source 100-1, the voltage source 100-2, and the voltage source 100-3 measured at a position directly above the voltage source 100-1. Is a value.

Next, the processing unit 13 moves the electric field strength measuring unit 10 directly above the voltage generation source 100-2 by outputting a moving signal to the first moving unit 12. When the electric field strength measuring unit 10 moves directly above the voltage generation source 100-2, the electric field strength measuring unit 10 measures the electric field strength of the voltage generation source 100-2. However, this measured electric field strength includes the electric field strengths of the voltage source 100-1, the voltage source 100-2, and the voltage source 100-3 measured at a position directly above the voltage source 100-2. Is a value.

Finally, the processing unit 13 moves the electric field strength measuring unit 10 directly above the voltage generation source 100-3 by outputting a moving signal to the first moving unit 12. When the electric field strength measuring unit 10 moves directly above the voltage generation source 100-3, the electric field strength measuring unit 10 measures the electric field strength of the voltage generation source 100-3. However, this measured electric field strength includes the electric field strengths of the voltage source 100-1, the voltage source 100-2, and the voltage source 100-3 measured at a position directly above the voltage source 100-3. Is a value.

The processing unit 13 acquires the three electric field strengths measured by the electric field strength measuring unit 10. Then, the processing unit 13 converts each of the three electric field strengths into a surface potential using the conversion coefficient group. As a result, the processing unit 13 can obtain the surface potentials of the voltage generation source 100-1, the voltage generation source 100-2, and the voltage generation source 100-3, respectively.

Here, the conversion coefficient group according to the first embodiment will be described with reference to the drawings. This conversion coefficient group is a set of conversion coefficients that convert the electric field strength generated by each voltage generation source 100 into the surface potential of each voltage generation source 100. The conversion coefficient will be described below.

FIG. 2 is a diagram showing a state of measuring the surface potential with respect to a single voltage generation source 100. In the example shown in FIG. 2, since only a single voltage generation source 100 is mounted on the substrate 200, the electric field strength measuring unit 10 determines the electric field strength of the voltage generation source 100 without being affected by the ambient electric field. Can be measured. Here, it is assumed that the electric field strength E is obtained by the electric field strength measuring unit 10 when the surface potential of the voltage generation source 100 is the surface potential V.

In this case, the surface potential V and the electric field strength E have a linear relationship. Therefore, the relationship between the surface potential V and the electric field strength E can be expressed by the following formula using the conversion coefficient k.

Here, the surface potential V is a quantity having only a magnitude, that is, a scalar. On the other hand, the electric field strength E is a so-called vector which is a quantity having a magnitude and a direction. However, in the present embodiment, the electric field strength E will be described by limiting it to only the scalar of the component in the specific direction.

This conversion coefficient k depends on the distance between the electric field strength measuring unit 10 and the voltage generation source 100, the relative position between the electric field strength measuring unit 10 and the voltage generation source 100, and the shape of the voltage generation source 100. Therefore, if the positions of the electric field strength measuring unit 10 and the voltage generation source 100 and the shape of the voltage generation source 100 are known in advance, the conversion coefficient k can be obtained. Then, if the conversion coefficient k is obtained in advance, the processing unit 13 can convert the electric field strength E measured by the electric field strength measuring unit 10 into the surface potential V.

Next, a case where a plurality of voltage generation sources 100 are mounted on the substrate 200 will be described. FIG. 3 is a diagram showing a state of measuring the surface potential with respect to the voltage generation sources 100-1 to 100-3. In the example shown in FIG. 3, the electric field strength measuring unit 10 is arranged directly above the voltage generating source 100-1 in order to measure the surface potential of the voltage generating source 100-1.

Here, as shown in FIG. 3, the voltage generation source 100-1 generates _{an electric field strength E 1} with respect to the position of the electric field strength measuring unit 10 when the _{surface potential is V 1.} The voltage generation source 100-2 generates _{the electric field strength E 2} with respect to the position of the electric field strength measuring unit 10 when the _{surface potential is V 2.} The voltage generation source 100-3 generates _{an electric field strength E 3} with respect to the position of the electric field strength measuring unit 10 when the _{surface potential is V 3.} At this time, the electric field strength E measured by the electric field strength measuring unit 10 is affected _{not only by the electric field strength E 1} from the voltage generation source 100-1 whose surface potential is to be measured, but also by the electric field strength E ₂ and the electric field strength E _3. receive.

In this case, as shown in FIG. 4, the electric field strength E measured by the electric field strength measuring unit 10 can be expressed by the following equation by the principle of superposition.

This equation (2) can be transformed into the equation shown below by using the relational equation of the equation (1).

Here, the conversion coefficient k ₁ is the transform coefficient when the electric field intensity measurement unit 10 in the electric field intensity generated from the voltage generating source 100-1 is the surface potential V ₁ directly above the voltage source 100-1 measures is there. The conversion coefficient k ₂ is a conversion coefficient when the electric field strength measuring unit 10 directly above the voltage generation source 100-1 measures the electric field strength generated from the voltage generation source 100-2 having a surface potential V _2. Transform coefficient k ₃ is the conversion factor in the electric field strength measuring unit 10 with the electric field intensity generated from the voltage generating source 100-3 is the surface potential V ₃ immediately above the voltage source 100-1 is measured.

Therefore, if the conversion coefficients k ₁ , k _2, k ₃ are obtained in advance, the processing unit 13 sets the electric field strength E measured by the electric field strength measuring unit 10 to each of the voltage generation sources 100-1 to 100-3. It can be converted into surface charges V ₁ , V ₂ , and V _3. The conversion coefficients k ₁ , k _2, k ₃ correspond to the above-mentioned conversion coefficient group.

Therefore, one of the features of the non-contact surface potential measuring device 1 according to the first embodiment is the conversion coefficient in advance before the main measurement for measuring the surface potentials of a plurality of voltage generation sources 100-1 to 100-N. The surface potentials of a plurality of voltage generation sources 100-1 to 100-N are calculated by performing a calibration measurement for measuring a group and using the conversion coefficient group obtained by the calibration measurement in the case of this measurement. ..

Hereinafter, the calibration measurement of the non-contact surface potential measuring device 1 according to the first embodiment will be specifically described with reference to the drawings.

FIG. 5 is a diagram showing a state of performing calibration measurement of the non-contact surface potential measuring device 1.
As shown in FIG. 5, the non-contact surface potential measuring device 1 needs to use a measuring jig 2 when performing calibration measurement. That is, the measuring jig 2 is a measuring jig for calculating the conversion coefficient group.

The measuring jig includes N electrodes 300-1 to 300-N (hereinafter collectively referred to as electrodes 300) and N voltage generators 400-1 to 400-N (hereinafter collectively referred to as voltage generator 400). ) Is provided.

The electrodes 300-1 to 300-N are arranged at the same positions as the positions of the voltage generation sources 100-1 to 100-N, which are the measurement targets in this measurement. The shapes of the electrodes 300-1 to 300-N are substantially the same as those of the voltage generation sources 100-1 to 100-N.

The voltage generator 400 is provided for each electrode 300. That is, voltage generators 400-1 to 400-N are connected to the N electrodes 300-1 to 300-N.
The voltage generators 400-1 to 400-N can apply the voltage of N voltage cases j (j = 1, ..., N) to each electrode 300-1 to 300-N under the control of the processing unit 13. is there. However, the voltage generator 400 does not necessarily have to be N, and if the voltage of N voltage cases j (j = 1, ..., N) can be applied to each electrode 300-1 to 300-N. There may be one. That is, the number of voltage generators 400 of the present invention is not limited.

Next, the processing unit 13 according to the first embodiment will be described with reference to the drawings. FIG. 6 is a diagram showing an example of a schematic configuration of the processing unit 13 according to the first embodiment.
As shown in FIG. 6, the processing unit 13 includes an acquisition unit 131, a movement control unit 132, a voltage control unit 133, a control unit 134, and a storage unit 135.

The acquisition unit 131 is connected to the electric field strength measuring unit 10 and the distance measuring unit 11, respectively. The acquisition unit 131 acquires the electric field strength measured by the electric field strength measurement unit 10. The acquisition unit 131 acquires the measurement distance h measured by the distance measurement unit 11. The acquisition unit 131 outputs the acquired electric field strength and the measurement distance h to the control unit 134.

The movement control unit 132 controls the drive of the first movement unit 12. That is, the movement control unit 132 controls the amount of movement of the electric field strength measuring unit 10 that moves the guide rail 121.
For example, the movement control unit 132 moves the electric field strength measuring unit 10 to a predetermined position by driving the first moving unit 12 based on the drive signal from the control unit 134.
The drive signal includes position information for moving the electric field strength measuring unit 10. Therefore, the first moving unit 12 moves the electric field strength measuring unit 10 to a predetermined position based on the position information included in the drive signal. For example, this predetermined position is a position directly above each electrode 300 (or voltage generation source 100).

The voltage control unit 133 is electrically connected to each voltage generator 400. The voltage control unit 133 controls the voltage applied to the electrode 300 by each voltage generator 400. For example, the voltage control unit 133 has N voltage cases j (j) in each of the 1st to i (i = 1, ..., N) electrodes 300 arranged at the same position as the position of each voltage generation source 100. = 1, ..., N) voltage is applied. The voltage applied to the electrode 300 corresponds to the surface potential of the electrode 300. The voltages of the N voltage cases j (j = 1, ..., N) applied to each electrode 300 are set in the storage unit 135 in advance and are known.

The control unit 134 includes a drive control unit 136, a conversion coefficient calculation unit 137, and a conversion unit 138.

The drive control unit 136 controls the drive of the movement control unit 132 and the voltage control unit 133. For example, the drive control unit 136 outputs the first drive command signal to the movement control unit 132. As a result, the movement control unit 132 drives the first movement unit 12 based on the first drive command signal. The drive control unit 136 outputs a second drive command signal to the voltage control unit 133. As a result, the voltage control unit 133 generates a predetermined voltage on each electrode 300 based on the second drive command signal.

The conversion coefficient calculation unit 137 calculates the conversion coefficient group based on the electric field strength acquired by the acquisition unit 131 by the calibration measurement. Then, the conversion coefficient calculation unit 137 stores the calculated conversion coefficient group in the storage unit 135.

The conversion unit 138 converts the electric field strength acquired by the acquisition unit 131 by the main measurement after the calibration measurement into the value of the surface potential of the voltage generation source 100 by using the conversion coefficient group stored in the storage unit 135.

Hereinafter, a method for calculating the conversion coefficient group according to the first embodiment will be described with reference to the drawings. FIG. 7 is a diagram illustrating a method of calculating a conversion coefficient group according to the first embodiment. A case where N is 3 will be described for the purpose of preventing the explanation from becoming complicated.

As shown in FIG. 7, the voltage control unit 133 applies the same number of voltage cases as the number of electrodes 300 to each electrode 300. In this embodiment, a case where N is 3 will be described as an example. Therefore, the voltage control unit 133 applies the voltages of the three voltage cases from the voltage case 1 to the voltage case 3 to each of the electrodes 300-1 to 300-3. Then, the electric field strength measuring unit 10 measures the electric field strength generated by the voltages of the three voltage cases directly above the electrodes 300-1 to 300-3.

Here, the voltage case j is represented by (V _1j , V _2j , V _3j ). The voltage V _1j indicates the voltage applied to the electrode 300-1 (i = 1st). The voltage V _2j indicates the voltage applied to the electrode 300-2 (i = second). The voltage V _3j indicates the voltage applied to the electrode 300-3 (i = 3rd). Then, when N is 3, j becomes 1 to 3. Therefore, the voltage case 1 = (V ₁₁ , V ₂₁ , V ₃₁ ), the voltage case 2 = (V ₁₂ , V ₂₂ , V ₃₂ ), and the voltage case 3 = (V ₁₃ , V ₂₃ , V ₃₃ ).

The electric field strength measuring unit 10 measures the electric field strength directly above each of the electrodes 300-1 to 300-3 in each voltage case. Here, when the electric field strength measured by the electric field strength measuring unit 10 directly above the electrode 300-1 is the electric field strength E _1j , the electric field strength measured directly above the electrode 300-1 in the voltage cases 1 to 3 is as follows. It is expressed by the formula of.

The electric field strength E ₁₁ is the electric field strength of the voltage case 1 directly above the electrode 300-1. The electric field strength E ₁₂ is the electric field strength of the voltage case 2 directly above the electrode 300-1. The electric field strength E ₁₃ is the electric field strength of the voltage case 3 directly above the electrode 300-1.

Further, the conversion coefficient k ₁₁ is a conversion coefficient when the electric field strength measuring unit 10 arranged directly above the electrode 300-1 measures the electric field strength generated from the electrode 300-1. The conversion coefficient k ₁₂ is a conversion coefficient when the electric field strength measuring unit 10 arranged directly above the electrode 300-1 measures the electric field strength generated from the electrode 300-2. The conversion coefficient k ₁₃ is a conversion coefficient when the electric field strength measuring unit 10 arranged directly above the electrode 300-1 measures the electric field strength generated from the electrode 300-3.

In this way, the conversion coefficient calculation unit 137 obtains the electric field strength directly above the electrode 300-1 in each of the voltage cases 1 to 3, and as shown in the equation (4), three simultaneous methods. You can make an expression. Therefore, similarly to the equation (4), in each of the voltage cases 1 to 3, when the electric field strength is measured directly above the electrode 300-2 and directly above the electrode 300-2, the conversion coefficient calculation unit 137 Can generate a total of nine simultaneous equations. These nine simultaneous equations can be expressed in the form of a matrix by the following equations.

Here, the electric field strength _Eij is the electric field strength measured by the electric field strength measuring unit 10 arranged directly above the i-th electrode 300 in the case of the voltage case j. The conversion coefficient _kij is a conversion coefficient when the electric field strength measuring unit 10 arranged directly above the i-th electrode 300 measures the electric field generated from the j-th electrode 300. The surface potential V _ij is the surface potential of the i-th electrode 300 in the case of the voltage case j.

Therefore, the equation (5) can be transformed into the following equation.

_{Incidentally, E cal} is a matrix of field strength _{E ij,} that the field strength matrix. V _cal is a matrix of the surface potential _{V ij,} that the surface potential matrices. k _cal is a matrix having a transformation coefficient k _ij , and is called a transformation matrix.

Here, the electric field strength matrix E _cal is measured by calibration measurement. The surface potential matrix V _cal is stored in the storage unit 135 in advance and is known. Therefore, the conversion coefficient calculation unit 137 can calculate the _{transformation matrix k cal using the equation (6).} Since this transformation matrix k _cal is uniquely determined by the shape of the electrode 300, it does not change regardless of the combination of surface potentials as long as the electrode shape does not change. The conversion coefficient calculation unit 137 stores the calculated inverse matrix k ^-1 _{cal of the conversion matrix k cal in} the storage unit 135 as a conversion coefficient group. The conversion coefficient calculation unit 137 _{may store the calculated conversion matrix k cal} as a conversion coefficient group in the storage unit 135.

Then, when the inverse matrix k ^-1 _cal is stored in the storage unit 135, this measurement becomes possible. That is, when the inverse matrix k ^-1 _cal is stored in the storage unit 135, the surface potential of one voltage generation source 100 is measured under the influence of ambient electric fields from a plurality of adjacent voltage generation sources 100. Is possible. Specifically, in this measurement, the electric field strength measuring unit 10 measures the electric field strength directly above each voltage generation source 100 whose surface potential is unknown. The conversion unit 138 obtains _{a matrix Emeas} of each electric field strength measured by the electric field strength measuring unit 10. Then, the conversion unit 138 can acquire each surface potential of the plurality of voltage generation sources 100 _{by performing a matrix calculation on the matrix E mes} ^{with the inverse matrix k -1} _cal stored in the storage unit 135. it can.

The flow of the calibration measurement and the method of calculating the conversion coefficient group from the electric field strength matrix E _cal obtained by the calibration measurement (hereinafter referred to as “calibration step”) will be described with reference to FIG.

The conversion coefficient calculation unit 137 determines a known surface potential matrix V _cal of N rows and N columns and stores it in the storage unit 135 (step S101). The user may determine the known surface potential matrix V _{cal of N rows and N columns.}

The non-contact surface potential measuring device 1 repeats the processes from step S103 to step S106 from j = 1 to N (step S102).

Specifically, first, the non-contact surface potential measuring device 1 generates a voltage V _i1 in the i-th voltage generator 400, where j is set to 1 (step S103).
Next, the non-contact surface potential measuring device 1 moves the electric field strength measuring unit 10 directly above the i-th electrode 300 (step S105), _{and acquires the electric field strength Ei1} by the electric field strength measuring unit 10 (step S106). , The measurement step is repeated from i = 1 to N (step S104).

_{When the non-contact surface potential measuring device 1 finishes the measurement of the electric field strength E i1} from i = 1 to N when j is 1, the measurement of the electric field strength E _i2 is performed from i = 1 with j as 2. Repeat up to N.
In this way, the non-contact surface potential measuring device 1 repeats the measurement of the _{electric field strength Eij that repeats from i = 1 to N from 1 to N.} Thus, conversion coefficient calculation section 137 acquires the field strength matrix _{E ij} of N rows and N columns is a matrix of field strength _{E ij.}

The conversion coefficient calculation unit 137 calculates the inverse matrix V ^-1 _{cal of the known surface potential matrix V cal} of N rows and N columns stored in the storage unit 135 (step S109).

The transformation coefficient calculation unit 137 calculates _{the transformation matrix kij} of N rows and N columns by multiplying the _{electric field strength matrix Eij} by the inverse matrix V ^-1 _{cal according} to the equation (6) (step S110). Then, conversion coefficient calculation section 137 calculates the inverse matrix k ^-1 _cal transformation matrix _{k cal} (step S111), and stored in the storage unit 135 an inverse matrix k ^-1 _cal that the calculated as a conversion factor group.

Hereinafter, the flow of the measurement method of the present measurement according to the first embodiment and the calculation method of calculating the surface potential of the voltage generation source 100 from the electric field strength measured by the main measurement will be described with reference to FIG. To do. The measurement method of this measurement and the above calculation method are collectively referred to as "this measurement / calculation step".

The non-contact surface potential measuring device 1 repeats the processes of steps S202 and S203 from i = 1 to N (step S201).

Specifically, the non-contact surface potential measuring apparatus 1 moves the field intensity measuring portion 10 immediately above the i-th voltage source 100 (step S202), and obtains the electric field intensity E _i by the electric field intensity measuring unit 10 (Step S203), the measurement step is repeated from i = 1 to N. As a result, the conversion unit 138 acquires _{the matrix E mes} of N rows and 1 column with _{the electric field strength E i} of the i-th voltage generation source 100 obtained by the electric field strength measuring unit 10 as each element. Then, the non-contact surface potential measuring device 1 generates the i-th voltage generation source 100 by multiplying _{this matrix Emeas} ^{by the inverse matrix k -1} _cal , which is a conversion coefficient group obtained in the calibration step. the surface potential _{V i} for calculating the matrix _{V meas} of N rows and one column was each element (step S205).

In this way, the non-contact surface potential measuring device 1 uses the conversion matrix obtained in the calibration step and the electric field strength measured in this measurement to determine the surface potential of the measurement target for which an accurate value could not be obtained due to the influence of the surrounding electric field. By converting by the calculation of, it is possible to correct the influence of the ambient electric field and obtain an accurate surface potential of the measurement target.

As described above, the non-contact surface potential measuring device 1 according to the first embodiment includes an electric field strength measuring unit 10 for measuring the electric field strengths of N voltage generation sources 100 and an electric field generated by each voltage generation source 100. Using the storage unit 135 that stores the conversion coefficient group that converts the intensity into the surface potential of each voltage generation source 100 and the conversion coefficient group, the electric field strength of the measurement target measured by the electric field strength measuring unit 10 is measured on the surface. A conversion unit 138 for converting into an electric field is provided. As a result, the non-contact surface potential measuring device 1 can accurately measure the surface potential of the object to be measured even when another voltage generation source is arranged around the object to be measured.

Further, the non-contact surface potential measuring device 1 according to the first embodiment further includes a first moving unit 12 capable of moving the electric field strength measuring unit 10 directly above each voltage generation source 100. Then, the electric field strength measuring unit 10 measures the electric field strength of the voltage generating source 100 after being moved directly above the voltage generating source 100 for measuring the surface potential by the first moving unit 12.

Here, the first moving unit 12 guides the horizontal movement of the electric field strength measuring unit 10 while keeping the vertical distance between the voltage generation source 100 and the electric field strength measuring unit 10 constant. And a drive unit 122 for moving the electric field strength measuring unit 10 in the horizontal direction along the guide rail 121. This saves the user the trouble of moving the electric field strength measuring unit 10.

Further, since the electric field strength measuring unit 10 moves along the guide rail 121, the vertical distance from the voltage generation source 100 is constant. Therefore, the measurement of the distance measuring unit 11 becomes unnecessary.

(Second Embodiment)
FIG. 10 is a diagram showing an example of a schematic configuration of the non-contact surface potential measuring device 1A according to the second embodiment. The non-contact surface potential measuring device 1A according to the second embodiment has a measurement distance h which is a vertical distance between the voltage generation source 100 and the electric field strength measuring unit 10 as compared with the first embodiment. The difference is that the corresponding conversion function group is used.
Hereinafter, the non-contact surface potential measuring device 1A according to the second embodiment will be described.

As shown in FIG. 10, the non-contact surface potential measuring device 1A includes an electric field strength measuring unit 10, a distance measuring unit 11, a first moving unit 12, a second moving unit 14, and a processing unit 13A.

The second moving unit 14 raises and lowers the first moving unit 12 in the vertical direction to measure the electric field strength measuring unit 10 and the distance measuring unit 11 integrally configured, and the voltage generating source 100 in the vertical direction. Change the distance h.

The processing unit 13A has the function of the processing unit 13. Further, the processing unit 13A controls the measurement distance h that can be changed by the second moving unit 14 by outputting the moving signal to the second moving unit 14.

Further, the processing unit 13A calculates a conversion coefficient group with the measurement distance h as a parameter in the calibration step. Then, in this measurement / calculation step, the processing unit 13A uses the conversion coefficient group corresponding to the measurement distance h measured by the distance measurement unit 11 to measure the electric field of each voltage generation source 100 measured by the electric field strength measurement unit 10. Converts strength to surface potential.

Hereinafter, the calibration measurement of the non-contact surface potential measuring device 1A according to the second embodiment will be specifically described with reference to the drawings.
FIG. 11 is a diagram showing a state of performing calibration measurement of the non-contact surface potential measuring device 1A.
As shown in FIG. 11, the non-contact surface potential measuring device 1A needs to use the measuring jig 2 when performing the calibration measurement. That is, the measuring jig 2 is also a measuring jig for calculating the conversion coefficient group according to the second embodiment.

Hereinafter, the schematic configuration of the processing unit 13A according to the second embodiment will be described with reference to the drawings. FIG. 12 is a diagram showing an example of a schematic configuration of the processing unit 13A according to the second embodiment.
As shown in FIG. 12, the processing unit 13A includes an acquisition unit 131, a movement control unit 132A, a voltage control unit 133, a control unit 134A, and a storage unit 135A.

The movement control unit 132A controls the drive of the first movement unit 12. That is, the movement control unit 132A controls the amount of movement of the electric field strength measuring unit 10 that moves the guide rail 121. Further, the movement control unit 132A controls the drive of the second movement unit 14. That is, the movement control unit 132A controls the amount of movement in the vertical direction in the electric field strength measuring unit 10.

The control unit 134A includes a drive control unit 136A, a conversion coefficient calculation unit 137A, and a conversion unit 138A.

The drive control unit 136A controls the drive of the movement control unit 132A and the voltage control unit 133. For example, the drive control unit 136A outputs the first drive command signal to the movement control unit 132A. As a result, the movement control unit 132A drives the first movement unit 12 based on the first drive command signal. The drive control unit 136A outputs a third drive command signal to the movement control unit 132A. As a result, the movement control unit 132A drives the second movement unit 14 based on the third drive command signal. The drive control unit 136A outputs a second drive command signal to the voltage control unit 133. As a result, the voltage control unit 133 generates a predetermined voltage on each electrode 300 based on the second drive command signal.

The conversion coefficient calculation unit 137A calculates the conversion coefficient group based on the electric field strength and the measurement distance h acquired by the acquisition unit 131 by the calibration measurement. Then, the conversion coefficient calculation unit 137A stores the calculated conversion coefficient group in the storage unit 135. This conversion coefficient group is a set of conversion coefficients with the measurement distance h as a parameter.

Here, the conversion coefficient group according to the second embodiment will be described.
Each element _{k ij} of the transformation matrix _{k cal} according to the first embodiment is dependent on the measurement distance h. Therefore, each element of the transformation matrix k _{cal can be expressed as a function k ij} (h) with the measurement distance h as a parameter. That is, the transformation matrix k _cal and its inverse matrix k ^-1 _{cal are represented as a function k cal} (h) and a function k ^-1 _cal (h) with the measurement distance h as a parameter, respectively. In the first embodiment, the measurement distance h does not change in each of the calibration measurement and the main measurement, and the distance h of the calibration measurement and the main measurement is the same as each other. Therefore, in the first embodiment, it is not necessary to consider the measurement distance h. On the other hand, in the second embodiment, in consideration of the change in the measurement distance h in this measurement, the conversion coefficient group with the measurement distance h as a parameter is obtained in the calibration step.

The conversion unit 138A acquires the electric field strength and the measurement distance h measured by the main measurement after the calibration measurement. The conversion unit 138A reads out the conversion coefficient group corresponding to the acquired measurement distance h from the storage unit 135, and uses the read conversion coefficient group to convert the electric field strength measured by this measurement into a surface potential.

The flow of the calibration step of the non-contact surface potential measuring device 1A according to the second embodiment will be described below with reference to FIG.

The conversion coefficient calculation unit 137A determines a known surface potential matrix V _cal of N rows and N columns and stores it in the storage unit 135 (step S301). The user may determine the known surface potential matrix V _{cal of N rows and N columns.}

The non-contact surface potential measuring device 1 repeats the processes from step S303 to step S308 from n = 1 to 3 (step S302).
Specifically, with n being 1, the movement control unit 132A moves the electric field strength measurement unit 10 so that _{the measurement distance h becomes the measurement distance h n (step 303).} The non-contact surface potential measuring device 1 generates a voltage V _i1 in the i-th voltage generator 400 with j as 1. (Step S305). Then, the non-contact surface potential measuring apparatus 1, i th directly above the electrode 300 to move the electric field strength measuring unit 10 (step S307), and obtains the electric field strength _E i1 _{(h n)} by the electric field intensity measuring unit 10 (Step S308), the measurement step is repeated from i = 1 to N.

As described above, the non-contact surface potential measuring device 1 repeats _{the measurement of the electric field strength Eij} , which repeats from i = 1 to N, with n being 1, from 1 to N in j. Then, the non-contact surface potential measuring device 1 repeats the measurement of the _{electric field strength Eij} , which repeats from i = 1 to N, with n being 2, from 1 to N in j. Thus, the non-contact surface potential measuring apparatus 1 repeats from i = 1 N, and j from 1 to measure the electric field strength _E ij _{(h n)} of up to N, n from 1 to 3.
The non-contact surface potential measuring device 1 of the present embodiment repeats n from 1 to 3, but the present invention is not limited to this.

Conversion coefficient calculation section 137A, in the case of the three cases the measured distance is adjusted to _{h 1,} h 2, _{h 3,} a matrix of field strength _E ij _{(h n)} N rows and N columns of the field strength matrix E (H) is acquired.

The conversion coefficient calculation unit 137A calculates the inverse matrix V ^-1 _{cal of the known surface potential matrix V cal} of N rows and N columns stored in the storage unit 135 (step S312).

Conversion coefficient calculation unit 137A using Formula (6), by multiplying the inverse matrix ^V _{-1 cal} to the electric field strength matrix _E ij _{(h n),} the conversion factor of N rows and N columns _k ij _(h n) Is calculated (step S313). That is, the conversion coefficient calculation unit 137A _{multiplies the electric field strength matrix E ij} (h _n ) by the inverse matrix V ^-1 _cal , so that the conversion matrix k _cal (h _n ) of _{each element k ij} (h _{n) is multiplied.} Is calculated.

In this way, by changing the measurement distance h to the distances h ₁ , h ₂ , and h ₃ and performing the calibration step, k _cal (h ₁ ), k _cal (h ₂ ), k _cal (h ₃ ) and 3 Two transformation matrices are obtained.
Conversion coefficient calculation unit 137A is obtained each of the three elements _k ij from the transformation matrix _{(h n),} it is approximated by the approximate expression shown below.

Conversion coefficient calculation unit 137A, each coefficient by approximating an approximate equation for each element _k ij from the obtained three transformation matrix _{(h n)} Equation _{(7) a ij, b ij} , and calculates the _{c ij} ( Step S314). Then, the conversion coefficient calculation unit 137A stores the calculated coefficients a _ij , _bij , and c _ij in the storage unit 135A.

Hereinafter, the flow of the measurement / calculation steps according to the second embodiment will be described with reference to FIG.

The non-contact surface potential measuring device 1A repeats the processes of steps S402 to S404 from i = 1 to N (step S401).

Specifically, the non-contact surface potential measuring apparatus 1A, immediately above the i-th voltage generation source 100 moves the electric field strength measuring unit 10 (step S402), and the electric field strength E _i the electric field strength measuring unit 10 has measured (Step S403), the measurement step of acquiring the measurement distance h and (step S404) measured by the distance measurement unit 11 is repeated from i = 1 to N. As a result, the conversion unit 138A acquires _{the matrix E mes} of N rows and 1 column with _{the electric field strength E i} of the i-th voltage generation source 100 obtained by the electric field strength measuring unit 10 as each element.

_{The conversion unit 138A uses the conversion matrix k cal} (h) used in this measurement / calculation step based on the measurement distance h acquired in step S404 and the coefficients a _ij , _bij , and c _{ij stored in the storage unit 135.} ) Is determined (step S406). Then, the conversion unit 138A calculates the inverse matrix k ^-1 _{cal (h) of the determined transformation matrix k cal} (h) (step S407).

Conversion unit 138A, to the matrix _{E meas,} by multiplying the inverse matrix k ^-1 _cal (h) as a conversion coefficient set, the surface potential _{V i} generated in the i-th voltage source 100 and each element The N-by-1 matrix V- _meas is calculated (step S408).

As described above, the non-contact surface potential measuring device 1A according to the second embodiment includes an electric field strength measuring unit 10 for measuring the electric field strengths of N voltage generation sources 100 and an electric field generated by each voltage generation source 100. Using the storage unit 135A that stores the conversion coefficient group that converts the intensity into the surface potential of each voltage generation source 100 and the conversion coefficient group, the electric field strength of the measurement target measured by the electric field strength measuring unit 10 is measured on the surface. A conversion unit 138A for converting into an electric field is provided.
As a result, the non-contact surface potential measuring device 1A can accurately measure the surface potential of the object to be measured even when another voltage generation source is arranged around the object to be measured.

Further, the conversion coefficient group according to the second embodiment is set as a conversion matrix with the measurement distance h as a parameter. As a result, the conversion unit 138A can accurately measure the surface potential of the measurement target at a desired measurement distance h even when another voltage generation source is arranged around the measurement target.

FIG. 15 shows an example of a hardware configuration when the processing units 13 and 13A are configured by an electronic information processing device such as a computer. The processing units 13 and 13A include a CPU (Central Processing Unit) peripheral unit, an input / output unit, and a legacy input / output unit. The CPU peripheral portion includes a CPU 802, a RAM (Random Access Memory) 803, a graphic controller 804, and a display device 805 that are interconnected by a host controller 801. The input / output unit includes a communication interface 807, a hard disk drive 808, and a CD-ROM (Compact Disk Read Only Memory) drive 809 connected to the host controller 801 by the input / output controller 806. The legacy input / output unit includes a ROM (Read Only Memory) 810 connected to the input / output controller 806, a flexible disk drive 811 and an input / output chip 812.

The host controller 801 connects the RAM 803, the CPU 802 that accesses the RAM 803 at a high transfer rate, and the graphic controller 804. The CPU 802 operates based on the programs stored in the ROM 810 and the RAM 803 to control each part. The graphic controller 804 acquires image data generated on a frame buffer provided in the RAM 803 by the CPU 802 and the like, and displays the image data on the display device 805. Instead, the graphic controller 804 may internally include a frame buffer for storing image data generated by the CPU 802 or the like.

The input / output controller 806 connects the host controller 801 to a hard disk drive 808, a communication interface 807, and a CD-ROM drive 809, which are relatively high-speed input / output devices. The hard disk drive 808 stores programs and data used by the CPU 802. The communication interface 807 connects to the network communication device 891 to send and receive programs or data. The CD-ROM drive 809 reads a program or data from the CD-ROM 892 and provides it to the hard disk drive 808 and the communication interface 807 via the RAM 803.

The input / output controller 806 is connected to the ROM 810, the flexible disk drive 811 and the relatively low speed input / output device of the input / output chip 812. The ROM 810 stores a boot program executed by the processing units 13 and 13A at startup, a program depending on the hardware of the processing units 13 and 13A, and the like. The flexible disk drive 811 reads a program or data from the flexible disk 893 and provides it to the hard disk drive 808 and the communication interface 807 via the RAM 803. The input / output chip 812 connects various input / output devices via a flexible disk drive 811 or a parallel port, a serial port, a keyboard port, a mouse port, and the like.

The program executed by the CPU 802 is stored in a recording medium such as a flexible disk 893, a CD-ROM 892, or an IC (Integrated Circuit) card and provided by the user. The program stored in the recording medium may be compressed or uncompressed. The program is installed in the hard disk drive 808 from the recording medium, read into the RAM 803, and executed by the CPU 802. The program executed by the CPU 802 causes the processing unit 13 to function as the acquisition unit 131, the movement control unit 132, the voltage control unit 133, the control unit 134, and the storage unit 135 described in relation to FIGS. 1 to 9 for processing. The unit A functions as the acquisition unit 131, the movement control unit 132A, the voltage control unit 133, the control unit 134A, and the storage unit 135A described in relation to FIGS. 1 to 14.

The program shown above may be stored in an external storage medium. In addition to the flexible disk 893 and CD-ROM892, the storage medium includes an optical recording medium such as a DVD (Digital Versaille Disk) or PD (Phase Disk), an optical magnetic recording medium such as an MD (MiniDisc), a tape medium, and an IC card. A semiconductor memory or the like can be used. Further, a storage medium such as a hard disk or RAM provided in a dedicated communication network or a server system connected to the Internet may be used as a recording medium and provided as a program via the network.

Although the embodiments of the present invention have been described in detail with reference to the drawings, the specific configuration is not limited to this embodiment, and includes designs and the like within a range that does not deviate from the gist of the present invention. The present invention is not limited to the above embodiment, and for example, the following modifications can be considered.

(1) In the above-described embodiment, when the electric field strength measuring unit 10 measures the voltage generation source 100, the case where the voltage generation source 100 is moved to directly above the power generation source 100 and the measurement is performed has been described. Not limited. For example, in the case of measuring the surface potential of three (N = 3) voltage generation sources 100, it does not have to be directly above the voltage generation source 100 if the measurement is performed at three different measurement positions. For example, in the case of measuring the surface potential of three (N = 3) voltage generation sources 100, if the measurement is performed above the voltage generation source 100 and at three different positions, it is not directly above the voltage generation source 100. You may.

(2) In the second embodiment, each element k _{ij (h n)} is approximated by the approximate expression shown in equation (7), the present invention is not limited thereto. For example, the expression that approximates each element _k ij _{(h n)} varies depending on the number of voltage sources 100. Therefore, in the present invention, conversion coefficient calculation unit 137A may each element k _{ij (h n),} is approximated to a certain approximation formula may be stored in the storage unit 135A asking each coefficient of in approximation.

(3) In the second embodiment, k (h) is approximated as a function of the distance as a correction method for correcting the conversion function group to a value corresponding to the measurement distance h, but the present invention is not limited to this. For example, in the present invention, the conversion function group may be corrected to a value corresponding to the measurement distance h by approximating the electric field strength E (h) as a function of the distance and then obtaining k.

1 Non-contact surface potential measuring device 10 Electric field strength measuring unit 11 Distance measuring unit 12 First moving unit 13 Processing unit 100 Voltage source 121 Guide rail 122 Driving unit 131 Acquisition unit 132 Movement control unit 133 Voltage control unit 134 Control unit 135 Storage Unit 136 Drive control unit 137 Conversion coefficient calculation unit 138 Conversion unit 300 Electrode 400 Voltage generator

Claims (8)

A non-contact surface potential measuring device that measures the surface potentials of N (integer of 1 or more) voltage sources to be measured in a non-contact manner.
An electric field strength measuring unit that measures the electric field strength of the voltage generation source,
A storage unit that stores a group of conversion coefficients that convert each electric field strength generated by each voltage generation source into the surface potential of each voltage generation source.
Using the conversion coefficient group, a conversion unit that converts the electric field strength of the measurement target measured by the electric field strength measuring unit into the surface potential, and a conversion unit.
A non-contact surface potential measuring device comprising. The electric field strength measuring unit is further provided with a first moving unit capable of moving the electric field strength measuring unit to a predetermined position above each voltage generation source.
The first aspect of claim 1, wherein the electric field strength measuring unit is moved to a predetermined position above the voltage generating source for measuring the surface potential by the first moving unit, and then measures the electric field strength of the voltage generating source. Non-contact surface potential measuring device. The first moving part is
A guide rail that guides the horizontal movement of the electric field strength measuring unit while keeping the vertical distance between the voltage generation source and the electric field strength measuring unit constant.
A drive unit that horizontally moves the electric field strength measuring unit along the guide rail,
The non-contact surface potential measuring device according to claim 2. A second moving unit capable of changing the vertical distance between the electric field strength measuring unit and the voltage generation source by moving the first moving unit up and down in the vertical direction.
A distance measuring unit for measuring the vertical distance between the voltage generating source and the electric field strength measuring unit arranged at a predetermined position above the voltage generating source, and a distance measuring unit.
With
The electric field strength measuring unit is moved to a predetermined position above the voltage generation source for measuring the surface potential by the first moving unit, and is vertically connected to the voltage generating source by the second moving unit. After the distance is adjusted, the electric field strength of the voltage source is measured and
The distance measuring unit measures the distance in the vertical direction when the electric field strength measuring unit measures the electric field strength.
The conversion unit reads out a conversion coefficient group corresponding to the distance measured by the distance measuring unit from the storage unit, and uses the read conversion coefficient group to obtain the electric field strength measured by the electric field strength measuring unit. The non-contact surface potential measuring device according to claim 3, which converts the surface charge into the surface charge. The voltage of N voltage cases j (j = 1, ..., N) is applied to each of the 1st to i (i = 1, ..., N) electrodes arranged at the same position as the position of the voltage generation source. The voltage control unit to be applied and
A conversion coefficient calculation unit that calculates the conversion coefficient group,
With
The electric field strength measuring unit is arranged at a predetermined position above the i-th electrode, and measures the _{electric field strength Eij of the i-th electrode in the voltage case j.}
The conversion coefficient calculation unit is a surface potential matrix which is a matrix of N rows and N columns having the _{voltage V ij} as each element, and an electric field strength matrix which is a matrix of N rows and N columns having the _{electric field strength E ij as each element.} The non-contact surface potential measuring device according to any one of claims 1 to 4, which calculates an inverse matrix of conversion coefficients as the conversion coefficient group based on the above. A measuring jig for calculating the conversion coefficient group in the non-contact surface potential measuring device according to claim 5.
An electrode arranged at the same position as the voltage source and
A voltage generator capable of applying the voltage of N voltage cases j (j = 1, ..., N) to each electrode by the control of the voltage control unit.
A measuring jig equipped with. A non-contact surface potential measuring method for measuring the surface potentials of N (integer of 1 or more) voltage sources to be measured in a non-contact manner.
An electric field strength measuring step in which the electric field strength of the voltage generation source is measured by an electric field strength measuring unit, and
Using a conversion coefficient group that converts each electric field strength generated by each voltage generation source into the surface potential of each voltage generation source, the electric field strength of the measurement target measured in the electric field strength measurement step is measured as the surface potential. Conversion steps to convert to, and
Non-contact surface potential measurement method including. When the electric field strength is measured in the electric field strength measuring step, the vertical distance between the voltage generating source and the electric field strength measuring unit arranged at a predetermined position above the voltage generating source is measured. Including additional distance measurement steps
The conversion step uses a conversion coefficient set according to the distance measured by the distance measuring step, the electric field intensity measured by the field intensity measuring step, converted to the surface potential, according to claim 7 Non-contact surface potential measurement method.

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