JP2018163121A - Non-contact surface potential measuring device, measuring fixture, and non-contact surface potential measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a non-contact surface potential measuring device, a measuring fixture, and a non-contact surface potential measuring method which can precisely measure surface potential of an object to be measured when an another voltage generation source is arranged around the object to be measured.SOLUTION: A non-contact surface potential measuring device measures surface potentials of N (N is an integer of 1 or more) voltage generation sources, being an object to be measured, in a non-contact manner, and includes: an electric field strength measuring part for measuring the electric field strength of the voltage generation sources; a storage part for storing a set of transformation coefficients for transforming each electric field strength generated by each voltage generation source into the surface potential of each voltage generation source; and a transformation part for transforming the electric field strength of the object to be measured which is measured by the electric field strength measuring part into the surface potential using the set of transformation coefficients.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a non-contact surface potential measuring device, a measuring jig, and a non-contact surface potential measuring method.

  Conventionally, a non-contact surface potential measuring device that measures a surface potential of a voltage generation source (hereinafter referred to as “measurement object”) that is a measurement object in a non-contact manner is known. This non-contact surface potential measuring device measures the electric field strength from the measurement object, and measures the surface potential of the measurement object based on the measured electric field strength. (For example, Patent Document 1)

JP 2008-089391 A

  Here, another voltage generation source may be arranged around the measurement object. In this case, even if the electric field strength of the measurement object is measured, the measured value is affected by the electric field from the surrounding voltage generation source. Therefore, when another voltage generation source is disposed around the measurement object, the surface potential of the measurement object cannot be accurately measured.

  The present invention has been made in view of such circumstances, and its purpose is to accurately measure the surface potential of a measurement object when another voltage generation source is arranged around the measurement object. It is to provide a non-contact surface potential measuring device, a measuring jig and a non-contact surface potential measuring method.

  One aspect of the present invention is a non-contact surface potential measuring device that measures the surface potential of N (an integer greater than or equal to 1) voltage generation sources to be measured in a non-contact manner. Using the conversion factor group, a storage unit for storing a conversion factor group for converting each electric field strength generated by each voltage generation source into a surface potential of each voltage generation source, and a conversion factor group It is a non-contact surface potential measuring device provided with the conversion part which converts the electric field strength of the measuring object measured by the electric field strength measuring part into the surface potential.

  One aspect of the present invention is the above-described non-contact surface potential measuring apparatus, further comprising a first moving unit capable of moving the electric field intensity measuring unit to a predetermined position above each voltage generation source, and the electric field intensity measuring The unit measures the electric field strength of the voltage generation source after being moved to a predetermined position above the voltage generation source for measuring the surface potential by the first moving unit.

  One aspect of the present invention is the above-described non-contact surface potential measuring device, wherein the first moving unit is configured to maintain a constant vertical distance between the voltage generation source and the electric field strength measuring unit. A guide rail that guides the horizontal movement of the electric field intensity measurement unit; and a drive unit that moves the electric field intensity measurement unit in the horizontal direction along the guide rail.

  One aspect of the present invention is the above-described non-contact surface potential measurement device, wherein the first moving unit is moved up and down in the vertical direction, so that the vertical direction between the electric field strength measuring unit and the voltage generating source is increased. A second moving unit capable of changing a distance; and a distance measuring unit that measures a vertical distance between the voltage generating source and the electric field intensity measuring unit disposed at a predetermined position above the voltage generating source; The electric field strength measuring unit is moved to a predetermined position above the voltage generating source for measuring the surface potential by the first moving unit, and between the voltage generating source by the second moving unit. After the vertical distance is adjusted, the electric field strength of the voltage source is measured, and the distance measuring unit measures the vertical distance when the electric field strength measuring unit measures the electric field strength. The conversion unit was measured by the distance measurement unit. The conversion coefficient set in accordance with the separated read from the storage unit, using the read transform coefficient group, the electric field intensity measured by the field intensity measurement unit, converting into the surface potential.

One aspect of the present invention is the above-described non-contact surface potential measuring device, in which each of the 1 to i (i = 1,..., N) th electrodes arranged at the same position as the position of the voltage generation source. , N voltage cases j (j = 1,..., N), a voltage control unit, and a conversion coefficient calculation unit that calculates the conversion coefficient group. The electric field intensity E _ij of the i-th electrode in the voltage case j is measured at a predetermined position above the n-th electrode, and the conversion coefficient calculation unit is N N with the voltage V _ij as each element. Based on a surface potential matrix that is a matrix of rows and N columns and an electric field strength matrix that is a matrix of N rows and N columns with the electric field strength E _ij as each element, an inverse matrix of the conversion coefficients as the conversion coefficient group Is calculated.

  One aspect of the present invention is a measurement jig for calculating the above-described conversion coefficient group, and an electrode disposed at the same position as the position of the voltage generation source and N under control of the voltage control unit. And a voltage generator capable of applying voltages of voltage cases j (j = 1,..., N) to each electrode.

  One aspect of the present invention is a non-contact surface potential measurement method for measuring the surface potentials of N (an integer of 1 or more) voltage generation sources to be measured in a non-contact manner, wherein the electric field strength of the voltage generation sources is measured. The measurement object measured by the electric field intensity measurement unit using a conversion factor group for converting the electric field intensity generated by each voltage generation source into a surface potential of each voltage generation source. A non-contact surface potential measurement method comprising: a conversion step of converting the electric field strength of the above into the surface potential.

  One aspect of the present invention is the above-described non-contact surface potential measurement method, wherein when the electric field intensity measurement unit measures the electric field intensity, the voltage generation source is disposed at a predetermined position above the voltage generation source. A distance measuring step of measuring a distance in the vertical direction between the measured electric field strength measuring unit, and the converting step reads a conversion coefficient group corresponding to the distance measured in the distance measuring step from the storage unit. A non-contact surface potential measurement method that converts the electric field intensity measured by the electric field intensity measurement unit into the surface potential using the read conversion coefficient group.

  As described above, according to the present invention, when another voltage generation source is arranged around the measurement object, the surface potential of the measurement object can be accurately measured.

It is a figure which shows an example of schematic structure of the non-contact surface potential measuring apparatus 1 which concerns on 1st Embodiment. It is a figure which shows a mode that the surface potential with respect to the single voltage generation source 100 based on 1st Embodiment is measured. It is a figure which shows a mode that the surface potential with respect to the voltage generation sources 100-1 to 100-3 which concerns on 1st Embodiment is measured. It is a figure explaining the principle of superimposition of the electric field strength E which concerns on 1st Embodiment. It is a figure which shows a mode that the calibration measurement of the non-contact surface potential measuring apparatus 1 which concerns on 1st Embodiment is performed. It is a figure which shows an example of schematic structure of the process part 13 which concerns on 1st Embodiment. It is a figure explaining the calculation method of the conversion coefficient group which concerns on 1st Embodiment. It is a figure explaining the flow of the calibration step which concerns on 1st Embodiment. It is a figure explaining the flow of this measurement and calculation step which concerns on 1st Embodiment. It is a figure which shows an example of schematic structure of 1 A of non-contact surface potential measuring apparatuses which concern on 2nd Embodiment. It is a figure which shows a mode that the calibration measurement of 1 A of non-contact surface potential measuring apparatuses which concern on 2nd Embodiment is performed. It is a figure which shows an example of schematic structure of 13 A of process parts which concern on 2nd Embodiment. It is a figure explaining the flow of the calibration step which concerns on 2nd Embodiment. It is a figure explaining the flow of this measurement and calculation step which concerns on 2nd Embodiment. An example of a hardware configuration when the processing units 13 and 13A are configured by an electronic information processing apparatus such as a computer is shown.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention. In the drawings, the same or similar parts may be denoted by the same reference numerals and redundant description may be omitted. In addition, the shape and size of elements in the drawings may be exaggerated for a clearer description.

  In the entire specification, when a part includes a component, “includes”, “have”, or “comprises”, this does not exclude other components unless otherwise stated. This means that it can further include the following components.

  Hereinafter, a non-contact surface potential measurement device, a measurement jig, and a non-contact surface potential measurement method according to an embodiment of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a diagram illustrating an example of a schematic configuration of a non-contact surface potential measuring apparatus 1 according to the first embodiment.

  The non-contact surface potential measuring apparatus 1 non-contacts each surface potential of N (an integer greater than or equal to 1) voltage generation sources 100-1 to 100-N (hereinafter collectively referred to as voltage generation sources 100) that are measurement targets. Measure with The voltage generation source 100 is, for example, an electrode pattern of a solar cell.

  The voltage generation sources 100-1 to 100-N are placed on the substrate 200. In the present embodiment, the voltage generation sources 100-1 to 100 -N are regularly placed in the longitudinal direction of the substrate 200.

  The non-contact surface potential measuring device 1 includes an electric field strength measuring unit 10, a distance measuring unit 11, a first moving unit 12, and a processing unit 13.

  The electric field strength measuring unit 10 is disposed at a position away from the voltage generation source 100 by a predetermined distance. The electric field strength measurement unit 10 measures the electric field strength of the voltage source 100 in a non-contact manner. The electric field strength measuring unit 10 outputs the measured electric field strength to the processing unit 13.

  The distance measurement unit 11 measures a vertical distance (hereinafter referred to as “measurement distance”) h between the voltage generation source 100 and the electric field strength measurement unit 10. The distance measurement unit 11 outputs the measured measurement distance to the processing unit 13.

  The first moving unit 12 includes a configuration capable of moving the electric field strength measuring unit 10 directly above each voltage generation source 100. The first moving unit 12 moves the electric field intensity measuring unit 10 directly above each voltage generation source 100 based on the movement signal from the processing unit 13. In the present embodiment, the distance measuring unit 11 and the electric field strength measuring unit 10 are integrally configured. However, the present invention is not limited to this, and the first moving unit 12 may move the electric field strength measuring unit 10 to a predetermined position above each voltage generation source 100. That is, the first moving unit 12 may not move the electric field intensity measuring unit 10 directly above each voltage generation source 100.

The first moving unit 12 includes a guide rail 121 and a driving unit 122.
The guide rail 121 measures the electric field strength in the longitudinal direction of the substrate 200 (hereinafter simply referred to as “longitudinal direction”) while keeping the distance in the vertical direction between the voltage source 100 and the electric field strength measuring unit 10 constant. Guide the movement of the unit 10.
The drive unit 122 moves the electric field strength measurement unit 10 in the longitudinal direction along the guide rail 121 based on the movement signal from the processing unit 13. For example, the drive unit 122 is a motor that moves the electric field strength measurement unit 10 along the guide rail 121.

The processing unit 13 outputs the movement signal to the first moving unit 12 to move the electric field strength measuring unit 10 directly above each of the voltage generation sources 100-1 to 100-N.
The processing unit 13 uses the conversion coefficient group from the N field strengths measured by the field strength measurement unit 10 to convert the field strengths of the voltage generation sources 100-1 to 100-N into the voltage generation sources 100-1 to 100-1. The surface potential is converted to 100-N.

  Here, a method for measuring the surface potential of the voltage generation sources 100-1 to 100-N of the non-contact surface potential measuring apparatus 1 according to the first embodiment (hereinafter referred to as “main measurement”) will be described. A case where N is 3 will be described for the purpose of preventing the explanation from becoming complicated.

  The processing unit 13 outputs the movement signal to the first moving unit 12 to move the electric field strength measuring unit 10 directly above the voltage generation source 100-1. When the electric field strength measuring unit 10 moves right above the voltage source 100-1, the electric field strength measuring unit 10 measures the electric field strength of the voltage source 100-1. However, the measured electric field strength includes the electric field strengths of the voltage generation source 100-1, the voltage generation source 100-2, and the voltage generation source 100-3 measured at a position immediately above the voltage generation source 100-1. It is a value.

  Next, the processing unit 13 outputs a movement signal to the first moving unit 12 to move the electric field strength measuring unit 10 directly above the voltage source 100-2. When the electric field strength measuring unit 10 moves right above the voltage source 100-2, the electric field strength measuring unit 10 measures the electric field strength of the voltage source 100-2. However, the measured electric field strength includes the electric field strengths of the voltage generation source 100-1, the voltage generation source 100-2, and the voltage generation source 100-3 measured at a position immediately above the voltage generation source 100-2. It is a value.

  Finally, the processing unit 13 outputs the movement signal to the first moving unit 12 to move the electric field strength measuring unit 10 directly above the voltage generation source 100-3. When the electric field strength measuring unit 10 moves right above the voltage source 100-3, the electric field strength measuring unit 10 measures the electric field strength of the voltage source 100-3. However, the measured electric field strength includes the electric field strengths of the voltage source 100-1, the voltage source 100-2, and the voltage source 100-3 measured at a position immediately above the voltage source 100-3. It is a value.

  The processing unit 13 acquires the three electric field strengths measured by the electric field strength measuring unit 10. Then, the processing unit 13 converts each of the three electric field strengths to a surface potential using a conversion coefficient group. Thereby, the process part 13 can obtain | require each surface potential of the voltage generation source 100-1, the voltage generation source 100-2, and the voltage generation source 100-3.

  Here, the transform coefficient group according to the first embodiment will be described with reference to the drawings. This conversion coefficient group is a collection of conversion coefficients for converting the electric field intensity generated by each voltage generation source 100 into the surface potential of each voltage generation source 100. Hereinafter, the conversion coefficient will be described.

  FIG. 2 is a diagram illustrating a state in which the surface potential with respect to a single voltage generation source 100 is measured. In the example shown in FIG. 2, since only a single voltage generation source 100 is placed on the substrate 200, the electric field strength measurement unit 10 can measure the electric field strength of the voltage generation source 100 without being affected by the surrounding electric field. Can be measured. Here, it is assumed that, when the surface potential of the voltage source 100 is the surface potential V, the electric field strength measurement unit 10 has obtained the electric field strength E.

  In this case, the surface potential V and the electric field strength E are in a linear relationship. Therefore, the relationship between the surface potential V and the electric field strength E can be expressed by the following equation using the conversion coefficient k.

  Here, the surface potential V is an amount having only a magnitude, that is, a scalar. On the other hand, the electric field strength E is a so-called vector that is a quantity having a magnitude and a direction. However, in the present embodiment, the electric field strength E will be described by limiting only to a scalar having a component in a specific direction.

  This conversion coefficient k depends on the distance between the electric field strength measuring unit 10 and the voltage source 100, the relative position between the electric field strength measuring unit 10 and the voltage source 100, and the shape of the voltage source 100. Therefore, if the respective positions of the electric field strength measuring unit 10 and the voltage generation source 100 and the shape of the voltage generation source 100 are known in advance, the conversion coefficient k can be obtained. If the conversion coefficient k is obtained in advance, the processing unit 13 can convert the electric field strength E measured by the electric field strength measuring unit 10 into the surface potential V.

  Next, a case where a plurality of voltage generation sources 100 are mounted on the substrate 200 will be described. FIG. 3 is a diagram illustrating a state in which the surface potential with respect to the voltage generation sources 100-1 to 100-3 is measured. In the example illustrated in FIG. 3, the electric field strength measurement unit 10 is disposed immediately above the voltage generation source 100-1 in order to measure the surface potential of the voltage generation source 100-1.

Here, as shown in FIG. 3, the voltage generation source 100-1 generates the electric field strength E ₁ with respect to the position of the electric field strength measurement unit 10 when the surface potential is V ₁ . Voltage source 100-2, if the surface potential is _{V 2,} with respect to the position of the electric field strength measuring unit 10, to generate an electric field intensity _{E 2.} When the surface potential is V ₃ , the voltage generation source 100-3 generates the electric field intensity E ₃ with respect to the position of the electric field intensity measurement unit 10. At this time, the electric field strength E measured by the electric field strength measuring unit 10 is not limited to the electric field strength E ₁ from the voltage source 100-1 for which the surface potential is to be measured, but also the influence of the electric field strength E ₂ and the electric field strength E ₃ . receive.

  In this case, as shown in FIG. 4, the electric field strength E measured by the electric field strength measuring unit 10 can be expressed by the following equation based on the principle of superposition.

  This formula (2) can be transformed into the following formula using the relational formula of formula (1).

Here, the conversion coefficient k ₁ is a conversion coefficient when the electric field intensity measurement unit 10 immediately above the voltage generation source 100-1 measures the electric field intensity generated from the voltage generation source 100-1 having the surface potential V _1. is there. Transform coefficient k ₂ is the conversion factor in the electric field strength measuring unit 10 with the electric field intensity generated from the voltage generating source 100-2 is the surface potential V ₂ directly above the voltage source 100-1 is measured. Transform coefficient k ₃ is the conversion factor in the electric field strength measuring unit 10 with the electric field intensity generated from the voltage generating source 100-3 is the surface potential V ₃ immediately above the voltage source 100-1 is measured.

Therefore, if the conversion coefficients k ₁ , k _{2, and} k ₃ are obtained in advance, the processing unit 13 sets the electric field intensity E measured by the electric field intensity measuring unit 10 to each of the voltage generation sources 100-1 to 100-3. It can be converted to surface potentials V ₁ , V ₂ , V ₃ . These conversion coefficients k ₁ , k _{2, and} k ₃ correspond to the above-described conversion coefficient group.

  Therefore, one of the features of the non-contact surface potential measuring apparatus 1 according to the first embodiment is that the conversion coefficient is previously measured before the main measurement for measuring the surface potentials of the plurality of voltage generation sources 100-1 to 100-N. It is to calculate the surface potential of the plurality of voltage generation sources 100-1 to 100-N by performing calibration measurement for measuring the group and using the conversion coefficient group obtained by the calibration measurement in the case of the main measurement. .

  Hereinafter, calibration measurement of the non-contact surface potential measuring apparatus 1 according to the first embodiment will be specifically described with reference to the drawings.

FIG. 5 is a diagram showing how the non-contact surface potential measuring apparatus 1 performs calibration measurement.
As shown in FIG. 5, the non-contact surface potential measuring device 1 needs to use a measuring jig 2 when performing calibration measurement. That is, the measurement jig 2 is a measurement jig for calculating a conversion coefficient group.

  The measurement jig includes N electrodes 300-1 to 300-N (hereinafter collectively referred to as electrodes 300) and N voltage generators 400-1 to 400-N (hereinafter collectively referred to as voltage generators 400). ).

  The electrodes 300-1 to 300-N are respectively disposed at the same positions as the positions of the voltage generation sources 100-1 to 100-N that are measurement targets in the main measurement. The shapes of the electrodes 300-1 to 300-N are substantially the same as those of the voltage generation sources 100-1 to 100-N.

The voltage generator 400 is provided for each electrode 300. That is, the voltage generators 400-1 to 400-N are connected to the N electrodes 300-1 to 300-N.
The voltage generators 400-1 to 400-N can apply voltages of N voltage cases j (j = 1,..., N) to the electrodes 300-1 to 300-N under the control of the processing unit 13. is there. However, the number of voltage generators 400 is not necessarily N, and it is possible to apply voltages of N voltage cases j (j = 1,..., N) to the electrodes 300-1 to 300-N. One may be sufficient. That is, the voltage generator 400 of the present invention is not limited to the number.

Next, the processing unit 13 according to the first embodiment will be described with reference to the drawings. FIG. 6 is a diagram illustrating an example of a schematic configuration of the processing unit 13 according to the first embodiment.
As illustrated in FIG. 6, the processing unit 13 includes an acquisition unit 131, a movement control unit 132, a voltage control unit 133, a control unit 134, and a storage unit 135.

  The acquisition unit 131 is connected to the electric field strength measurement unit 10 and the distance measurement unit 11, respectively. The acquisition unit 131 acquires the electric field strength measured by the electric field strength measurement unit 10. The acquisition unit 131 acquires the measurement distance h measured by the distance measurement unit 11. The acquisition unit 131 outputs the acquired electric field strength and measurement distance h to the control unit 134.

The movement control unit 132 controls driving of the first moving unit 12. That is, the movement control unit 132 controls the amount of movement of the electric field strength measuring unit 10 that moves on the guide rail 121.
For example, the movement control unit 132 drives the first moving unit 12 based on the drive signal from the control unit 134 to move the electric field strength measuring unit 10 to a predetermined position.
The drive signal includes position information for moving the electric field strength measurement unit 10. Accordingly, the first moving unit 12 moves the electric field strength measuring unit 10 to a predetermined position based on the position information included in the drive signal. For example, the predetermined position is a position immediately above each electrode 300 (or voltage generation source 100).

  The voltage control unit 133 is electrically connected to each voltage generator 400. The voltage control unit 133 controls the voltage that each voltage generator 400 applies to the electrode 300. For example, the voltage controller 133 applies N voltage cases j (j) to the 1 to i (i = 1,..., N) -th electrodes 300 arranged at the same positions as the positions of the voltage generation sources 100. = 1,..., N) is applied. Note that the voltage applied to the electrode 300 corresponds to the surface potential of the electrode 300. The voltages of N voltage cases j (j = 1,..., N) applied to each electrode 300 are set in advance in the storage unit 135 and are known.

  The control unit 134 includes a drive control unit 136, a conversion coefficient calculation unit 137, and a conversion unit 138.

  The drive control unit 136 controls driving of the movement control unit 132 and the voltage control unit 133. For example, the drive control unit 136 outputs a first drive command signal to the movement control unit 132. Thereby, the movement control part 132 drives the 1st moving part 12 based on this 1st drive command signal. The drive control unit 136 outputs a second drive command signal to the voltage control unit 133. Thus, the voltage control unit 133 generates a predetermined voltage for each electrode 300 based on the second drive command signal.

  The conversion coefficient calculation unit 137 calculates a conversion coefficient group based on the electric field strength acquired by the acquisition unit 131 through calibration measurement. Then, the conversion coefficient calculation unit 137 stores the calculated conversion coefficient group in the storage unit 135.

  The conversion unit 138 converts the electric field intensity acquired by the acquisition unit 131 in the main measurement after the calibration measurement into the value of the surface potential of the voltage generation source 100 using the conversion coefficient group stored in the storage unit 135.

  Below, the calculation method of the conversion coefficient group which concerns on 1st Embodiment is demonstrated using drawing. FIG. 7 is a diagram for explaining a conversion coefficient group calculation method according to the first embodiment. A case where N is 3 will be described for the purpose of preventing the explanation from becoming complicated.

  As shown in FIG. 7, the voltage control unit 133 causes each electrode 300 to be applied with voltages in the same number of voltage cases as the number of electrodes 300. In the present embodiment, a case where N is 3 will be described as an example. Therefore, the voltage control unit 133 applies the voltages of the three voltage cases from the voltage case 1 to the voltage case 3 to each of the electrodes 300-1 to 300-3. And the electric field strength measurement part 10 measures the electric field strength which generate | occur | produced with the voltage of three voltage cases just above each electrode 300-1-electrode 300-3.

Here, the voltage case j is represented by (V _1j , V _2j , V _3j ). A voltage V _1j indicates a voltage applied to the electrode 300-1 (i = 1). A voltage V _2j indicates a voltage applied to the electrode 300-2 (i = 2). A voltage V _3j indicates a voltage applied to the electrode 300-3 (i = third). When N is 3, j is 1 to 3. Therefore, voltage case 1 = (V ₁₁ , V ₂₁ , V ₃₁ ), voltage case 2 = (V ₁₂ , V ₂₂ , V ₃₂ ), voltage case 3 = (V ₁₃ , V ₂₃ , V ₃₃ ).

The electric field strength measuring unit 10 measures the electric field strength immediately above each of the electrodes 300-1 to 300-3 in each voltage case. Here, when the electric field strength measuring unit 10 has a field strength _{E 1j} electric field strength to be measured immediately above the electrode 300-1, the electric field strength measuring immediately above the electrode 300-1 in voltage cases 1-3, the following It is expressed by the following formula.

Incidentally, the electric field strength _{E 11} is an electric field intensity of the voltage case 1 immediately above the electrode 300-1. Field strength _{E 12} is a field intensity of the voltage Case 2 just above the electrode 300-1. Field strength _{E 13} is a field intensity of the voltage casing 3 right above the electrode 300-1.

The conversion coefficient _{k 11} is the conversion coefficient when the electric field intensity measuring unit 10 arranged the electric field intensity generated from the electrode 300-1 immediately above the electrode 300-1 is measured. Transform coefficient _{k 12} is the conversion coefficient when the electric field intensity measuring unit 10 arranged the electric field intensity generated from the electrode 300-2 immediately above the electrode 300-1 is measured. Transform coefficient _{k 13} is the conversion coefficient when the electric field intensity measuring unit 10 arranged the electric field intensity generated from the electrode 300-3 immediately above the electrode 300-1 is measured.

  As described above, the conversion coefficient calculation unit 137 obtains the electric field intensity directly above the electrode 300-1 in each of the voltage cases 1 to 3, and thereby provides three simultaneous methods as shown in Expression (4). You can make an expression. Therefore, as in the equation (4), when the electric field strength is measured directly above the electrode 300-2 and immediately above the electrode 300-2 in each of the voltage cases 1 to 3, the conversion coefficient calculation unit 137 is obtained. Can generate a total of nine simultaneous equations. These nine simultaneous equations can be expressed in the form of a matrix by the following equation.

Here, the electric field intensity E _ij is an electric field intensity measured by the electric field intensity measuring unit 10 disposed immediately above the i-th electrode 300 in the case of voltage case j. The conversion coefficient k _ij is a conversion coefficient when the electric field intensity measurement unit 10 arranged immediately above the i-th electrode 300 measures the electric field generated from the j-th electrode 300. The surface potential V _ij is the surface potential of the i-th electrode 300 in the case of voltage case j.

  Therefore, Formula (5) can be transformed into the following formula.

Note that E _cal is a matrix of the electric field intensity E _{ij and} is called an electric field intensity matrix. V _cal is a matrix of the surface potential V _ij and is referred to as a surface potential matrix. k _cal is a matrix of transform coefficients k _ij and is referred to as a transform matrix.

Here, the electric field strength matrix E _cal is measured by calibration measurement. The surface potential matrix V _cal is stored in advance in the storage unit 135 and is known. Therefore, the conversion coefficient calculation unit 137 can calculate the conversion matrix k _cal using Equation (6). Since this transformation matrix k _cal is uniquely determined by the shape of the electrode 300, it remains unchanged as long as the electrode shape does not change regardless of the combination of surface potentials. The conversion coefficient calculation unit 137 stores the inverse matrix k ⁻¹ _cal of the calculated conversion matrix k _{cal in} the storage unit 135 as a conversion coefficient group. Note that the conversion coefficient calculation unit 137 may store the calculated conversion matrix k _cal in the storage unit 135 as a conversion coefficient group.

Then, the main measurement can be performed when the inverse matrix k ⁻¹ _cal is stored in the storage unit 135. That is, when the inverse matrix k ⁻¹ _cal is stored in the storage unit 135, measurement of the surface potential with respect to one voltage generation source 100 under the influence of the surrounding electric field from the plurality of adjacent voltage generation sources 100. Is possible. Specifically, in this measurement, the electric field strength measurement unit 10 measures the electric field strength directly above each voltage generation source 100 whose surface potential is unknown. The conversion unit 138 obtains a matrix E _meas of each electric field intensity measured by the electric field intensity measurement unit 10. And the conversion part 138 can acquire each surface potential of the several voltage generation source 100 by carrying out a matrix calculation with the inverse matrix k < ^-1 _{> cal} stored in the memory _| storage part 135 with _respect to the matrix _Emeas . it can.

The flow of calibration measurement and a method of calculating a conversion coefficient group from the electric field intensity matrix E _cal obtained by the calibration measurement (hereinafter referred to as “calibration step”) will be described with reference to FIG.

The conversion coefficient calculation unit 137 determines a known surface potential matrix V _cal of N rows and N columns and stores it in the storage unit 135 (step S101). Note that the user may determine the known surface potential matrix V _cal of N rows and N columns.

  The non-contact surface potential measuring apparatus 1 repeats the processing from step S103 to step S106 from j = 1 to N (step S102).

Specifically, first, the non-contact surface potential measuring device 1 sets j to 1 and causes the i-th voltage generator 400 to generate the voltage V _i1 (step S103).
Next, the non-contact surface potential measuring apparatus 1 moves the electric field strength measuring unit 10 directly above the i-th electrode 300 (step S105), and acquires the electric field strength E _i1 by the electric field strength measuring unit 10 (step S106). The measurement process is repeated from i = 1 to N (step S104).

When the measurement of the electric field intensity E _i1 from i = 1 to N is completed when j is 1, the non-contact surface potential measuring apparatus 1 sets j to 2 and starts measuring the electric field intensity E _i2 from i = 1. Repeat until N.
Thus, the non-contact surface potential measuring apparatus 1 repeats the measurement of the electric field intensity E _ij from i = 1 to N from j to 1 to N. Thus, conversion coefficient calculation section 137 acquires the field strength matrix _{E ij} of N rows and N columns is a matrix of field strength _{E ij.}

The conversion coefficient calculation unit 137 calculates the inverse matrix V ⁻¹ _cal of the known surface potential matrix V _cal of N rows and N columns stored in the storage unit 135 (step S109).

The conversion coefficient calculation unit 137 calculates an N-row N-column conversion matrix k _ij by multiplying the electric field strength matrix E _ij by the inverse matrix V ⁻¹ _{cal according} to Equation (6) (step S110). Then, conversion coefficient calculation section 137 calculates the inverse matrix k ^-1 _cal transformation matrix _{k cal} (step S111), and stored in the storage unit 135 an inverse matrix k ^-1 _cal that the calculated as a conversion factor group.

  Hereinafter, the flow of the measurement method of the main measurement according to the first embodiment and the calculation method of calculating the surface potential of the voltage source 100 from the electric field intensity measured by the main measurement will be described with reference to FIG. To do. The measurement method of the main measurement and the calculation method are collectively referred to as “main measurement / calculation step”.

  The non-contact surface potential measuring device 1 repeats the processes of step S202 and step S203 from i = 1 to N (step S201).

Specifically, the non-contact surface potential measuring apparatus 1 moves the electric field strength measuring unit 10 immediately above the i-th voltage generation source 100 (step S202), and acquires the electric field strength E _i by the electric field strength measuring unit 10. (Step S203), the measurement process is repeated from i = 1 to N. Thereby, the conversion unit 138 obtains a matrix E _meas of N rows and 1 column using the electric field strength E _i of the i-th voltage generation source 100 obtained by the electric field strength measurement unit 10 as each element. Then, the non-contact surface potential measuring device 1 multiplies the matrix E _meas by the inverse matrix k ⁻¹ _cal which is the conversion coefficient group obtained in the calibration step, thereby generating the i th voltage generation source 100. the surface potential _{V i} for calculating the matrix _{V meas} of N rows and one column was each element (step S205).

  As described above, the non-contact surface potential measuring apparatus 1 calculates the surface potential of the measurement object whose accurate value cannot be obtained due to the influence of the surrounding electric field, the transformation matrix obtained in the calibration step, and the electric field intensity measured in this measurement. By converting by this calculation, it is possible to correct the influence of the surrounding electric field and obtain an accurate surface potential of the measurement object.

  As described above, the non-contact surface potential measuring apparatus 1 according to the first embodiment includes the electric field intensity measurement unit 10 that measures the electric field intensity of the N voltage generation sources 100 and the electric field generated by each voltage generation source 100. A storage unit 135 that stores a conversion coefficient group that converts the intensity into a surface potential of each voltage source 100, and the electric field intensity of the measurement target measured by the electric field intensity measurement unit 10 using the conversion coefficient group A conversion unit 138 for converting the potential into a potential. Thereby, the non-contact surface potential measuring apparatus 1 can accurately measure the surface potential of the measurement object even when another voltage generation source is arranged around the measurement object.

  The non-contact surface potential measuring apparatus 1 according to the first embodiment further includes a first moving unit 12 that can move the electric field intensity measuring unit 10 directly above each voltage source 100. The electric field strength measuring unit 10 measures the electric field strength of the voltage source 100 after being moved directly above the voltage source 100 that measures the surface potential by the first moving unit 12.

  Here, the first moving unit 12 guides the horizontal movement of the electric field strength measuring unit 10 while keeping the vertical distance between the voltage source 100 and the electric field strength measuring unit 10 constant. And a drive unit 122 that moves the electric field intensity measurement unit 10 in the horizontal direction along the guide rail 121. As a result, it is possible to save the user from moving the electric field strength measuring unit 10.

  Further, since the electric field strength measuring unit 10 moves along the guide rail 121, the distance in the vertical direction from the voltage source 100 is constant. Accordingly, the measurement by the distance measuring unit 11 is not necessary.

(Second Embodiment)
FIG. 10 is a diagram illustrating an example of a schematic configuration of a non-contact surface potential measuring apparatus 1A according to the second embodiment. Compared with the first embodiment, the non-contact surface potential measurement apparatus 1A according to the second embodiment has a measurement distance h that is a distance in the vertical direction between the voltage source 100 and the electric field strength measurement unit 10. The difference is that the corresponding conversion function group is used.
Hereinafter, a non-contact surface potential measuring apparatus 1A according to the second embodiment will be described.

  As shown in FIG. 10, the non-contact surface potential measuring apparatus 1A includes an electric field strength measuring unit 10, a distance measuring unit 11, a first moving unit 12, a second moving unit 14, and a processing unit 13A.

  The second moving unit 14 raises and lowers the first moving unit 12 in the vertical direction, thereby measuring the electric field strength measuring unit 10 and the distance measuring unit 11 configured integrally with the voltage generating source 100 in the vertical direction. Change the distance h.

  The processing unit 13 </ b> A has the function of the processing unit 13. Further, the processing unit 13 </ b> A controls the measurement distance h that can be changed by the second moving unit 14 by outputting a movement signal to the second moving unit 14.

  Further, the processing unit 13A calculates a conversion coefficient group using the measurement distance h as a parameter in the calibration step. Then, in the main measurement / calculation step, the processing unit 13A uses the conversion coefficient group corresponding to the measurement distance h measured by the distance measurement unit 11 to measure the electric field of each voltage source 100 measured by the electric field strength measurement unit 10. Intensity is converted to surface potential.

Hereinafter, calibration measurement of the non-contact surface potential measuring apparatus 1A according to the second embodiment will be specifically described with reference to the drawings.
FIG. 11 is a diagram illustrating how calibration measurement is performed by the non-contact surface potential measuring apparatus 1A.
As shown in FIG. 11, the non-contact surface potential measuring apparatus 1A needs to use a measuring jig 2 when performing calibration measurement. That is, the measurement jig 2 is also a measurement jig for calculating the conversion coefficient group according to the second embodiment.

The schematic configuration of the processing unit 13A according to the second embodiment will be described below with reference to the drawings. FIG. 12 is a diagram illustrating an example of a schematic configuration of a processing unit 13A according to the second embodiment.
As illustrated in FIG. 12, the processing unit 13A includes an acquisition unit 131, a movement control unit 132A, a voltage control unit 133, a control unit 134A, and a storage unit 135A.

  The movement control unit 132 </ b> A controls driving of the first moving unit 12. That is, the movement control unit 132 </ b> A controls the amount of movement of the electric field strength measuring unit 10 that moves on the guide rail 121. Further, the movement control unit 132 </ b> A controls driving of the second moving unit 14. That is, the movement control unit 132A controls the amount of movement in the vertical direction in the electric field strength measurement unit 10.

  The control unit 134A includes a drive control unit 136A, a conversion coefficient calculation unit 137A, and a conversion unit 138A.

  The drive control unit 136A controls driving of the movement control unit 132A and the voltage control unit 133. For example, the drive control unit 136A outputs a first drive command signal to the movement control unit 132A. Thereby, the movement control unit 132A drives the first moving unit 12 based on the first drive command signal. The drive control unit 136A outputs a third drive command signal to the movement control unit 132A. Thereby, the movement control unit 132A drives the second moving unit 14 based on the third drive command signal. The drive control unit 136A outputs a second drive command signal to the voltage control unit 133. Thus, the voltage control unit 133 generates a predetermined voltage for each electrode 300 based on the second drive command signal.

  The conversion coefficient calculation unit 137A calculates a conversion coefficient group based on the electric field strength and the measurement distance h acquired by the acquisition unit 131 through calibration measurement. Then, the conversion coefficient calculation unit 137A stores the calculated conversion coefficient group in the storage unit 135. This conversion coefficient group is a collection of conversion coefficients using the measurement distance h as a parameter.

Here, the transform coefficient group according to the second embodiment will be described.
Each element k _ij of the transformation matrix k _{cal according} to the first embodiment depends on the measurement distance h. Therefore, each element of the transformation matrix k _cal can be expressed as a function k _ij (h) with the measurement distance h as a parameter. That is, the transformation matrix k _cal and its inverse matrix k ⁻¹ _cal are expressed as a function k _cal (h) and a function k ⁻¹ _cal (h), respectively, with the measurement distance h as a parameter. In the first embodiment, the measurement distance h does not change in the calibration measurement and the main measurement, and the distance h in the calibration measurement and the main measurement is the same. Therefore, in the first embodiment, it is not necessary to consider the measurement distance h. On the other hand, in the second embodiment, in consideration of the change in the measurement distance h in the main measurement, a conversion coefficient group using the measurement distance h as a parameter is obtained in the calibration step.

  The conversion unit 138A acquires the electric field strength and the measurement distance h measured by the main measurement after the calibration measurement. The conversion unit 138A reads a conversion coefficient group corresponding to the acquired measurement distance h from the storage unit 135, and converts the electric field strength measured by the main measurement into a surface potential using the read conversion coefficient group.

  Hereinafter, the flow of the calibration step of the non-contact surface potential measuring apparatus 1A according to the second embodiment will be described with reference to FIG.

The conversion coefficient calculation unit 137A determines a known surface potential matrix V _cal of N rows and N columns and stores it in the storage unit 135 (step S301). Note that the user may determine the known surface potential matrix V _cal of N rows and N columns.

The non-contact surface potential measuring device 1 repeats the processing from step S303 to step S308 from n = 1 to 3 (step S302).
Specifically, assuming that n is 1, the movement control unit 132A moves the electric field intensity measurement unit 10 so that the measurement distance h becomes the measurement distance h _n (step 303). The non-contact surface potential measuring device 1 sets j to 1 and causes the i-th voltage generator 400 to generate the voltage V _i1 (step S305). Next, the non-contact surface potential measuring apparatus 1 moves the electric field strength measuring unit 10 directly above the i-th electrode 300 (step S307), and acquires the electric field strength E _i1 (h _n ) by the electric field strength measuring unit 10. (Step S308), the measurement process is repeated from i = 1 to N.

As described above, the non-contact surface potential measuring apparatus 1 repeats the measurement of the electric field intensity E _ij from i = 1 to N, where n is 1, from j = 1 to N. Then, the non-contact surface potential measuring apparatus 1 repeats the measurement of the electric field intensity E _ij from i = 1 to N, where n is 2, from j = 1 to N. As described above, the non-contact surface potential measuring apparatus 1 repeats the measurement of the electric field intensity E _ij (h _n ) from i = 1 to N and j from 1 to N from n to 1 to 3.
In addition, although the non-contact surface potential measuring apparatus 1 of this embodiment repeats n from 1 to 3, this invention is not limited to this.

In _three cases where the measurement distances are adjusted to h ₁ , h ₂ , and h ₃ , the conversion coefficient calculation unit 137A has an N-row N-column electric field strength matrix E that is a matrix of the electric field strength E _ij (h _n ). (H) is acquired.

The conversion coefficient calculation unit 137A calculates an inverse matrix V ⁻¹ _cal of the known surface potential matrix V _cal of N rows and N columns stored in the storage unit 135 (step S312).

The conversion coefficient calculation unit 137A multiplies the electric field intensity matrix E _ij (h _n ) by the inverse matrix V ⁻¹ _{cal according} to Equation (6), thereby converting the N-row N-column conversion coefficient k _ij (h _n ). Is calculated (step S313). That is, conversion coefficient calculation unit 137A, by multiplying the inverse matrix ^V _{-1 cal} to the electric field strength matrix _E ij _{(h n),} the transformation matrix _k cal for each element _{k ij (h n) (h} n) Is calculated.

In this way, by performing the calibration step by changing the measurement distance h to the distances h ₁ , h ₂ , h ₃ , k _cal (h ₁ ), k _cal (h ₂ ), k _cal (h ₃ ) and 3 Two transformation matrices are obtained.
The conversion coefficient calculation unit 137A approximates each element k _ij (h _n ) from the obtained three conversion matrices using the following approximate expression.

The conversion coefficient calculation unit 137A calculates each coefficient a _ij , b _ij , and c _ij by approximating each element k _ij (h _n ) from the obtained three conversion matrices with the approximate expression of Expression (7) ( Step S314). Then, the conversion coefficient calculation unit 137A stores the calculated coefficients a _ij , b _ij , and c _ij in the storage unit 135A.

  The flow of the main measurement / calculation step according to the second embodiment will be described below with reference to FIG.

  The non-contact surface potential measuring apparatus 1A repeats the processing from step S402 to step S404 from i = 1 to N (step S401).

Specifically, the non-contact surface potential measuring apparatus 1A moves the electric field intensity measuring unit 10 immediately above the i-th voltage generation source 100 (step S402), and the electric field intensity E _i measured by the electric field intensity measuring unit 10 (Step S403) The measurement process of acquiring the measurement distance h and (Step S404) measured by the distance measurement unit 11 is repeated from i = 1 to N. Thereby, the conversion unit 138A obtains a matrix E _meas of N rows and 1 column using the electric field strength E _i of the i-th voltage generation source 100 obtained by the electric field strength measurement unit 10 as each element.

Based on the measurement distance h acquired in step S404 and the coefficients a _ij , b _ij , and c _ij stored in the storage unit 135, the conversion unit 138A converts the conversion matrix k _cal (h ) Is determined (step S406). Then, the conversion unit 138A calculates an inverse matrix k ⁻¹ _cal (h) of the determined conversion matrix k _cal (h) (step S407).

The conversion unit 138A multiplies the matrix E _meas by the inverse matrix k ⁻¹ _cal (h) as a conversion coefficient group, thereby using the surface potential V _i generated in the i-th voltage generation source 100 as each element. A matrix V _meas of N rows and 1 column is calculated (step S408).

As described above, the non-contact surface potential measuring apparatus 1A according to the second embodiment includes the electric field intensity measuring unit 10 that measures the electric field intensity of the N voltage generation sources 100 and the electric field generated by each voltage generation source 100. A storage unit 135A for storing a conversion coefficient group for converting the intensity into a surface potential of each voltage source 100, and using the conversion coefficient group, the electric field intensity of the measurement target measured by the electric field intensity measurement unit 10 A conversion unit 138A for converting the potential into a potential.
Thereby, 1 A of non-contact surface potential measuring apparatuses can measure the surface potential of a measuring object correctly even when another voltage generation source is arrange | positioned around the measuring object.

  Further, the conversion coefficient group according to the second embodiment is set as a conversion matrix using the measurement distance h as a parameter. Thereby, the conversion unit 138A can accurately measure the surface potential of the measurement object at a desired measurement distance h even when another voltage generation source is arranged around the measurement object.

  FIG. 15 shows an example of a hardware configuration when the processing units 13 and 13A are configured by an electronic information processing apparatus such as a computer. The processing units 13 and 13A include a CPU (Central Processing Unit) peripheral unit, an input / output unit, and a legacy input / output unit. The CPU peripheral section includes a CPU 802, a RAM (Random Access Memory) 803, a graphic controller 804, and a display device 805 that are connected to each other by a host controller 801. The input / output unit includes a communication interface 807, a hard disk drive 808, and a CD-ROM (Compact Disk Read Only Memory) drive 809 connected to the host controller 801 by the input / output controller 806. The legacy input / output unit includes a ROM (Read Only Memory) 810, a flexible disk drive 811, and an input / output chip 812 connected to the input / output controller 806.

  The host controller 801 connects the RAM 803, the CPU 802 that accesses the RAM 803 at a high transfer rate, and the graphic controller 804. The CPU 802 operates based on programs stored in the ROM 810 and the RAM 803 to control each unit. The graphic controller 804 acquires image data generated by the CPU 802 or the like on a frame buffer provided in the RAM 803 and displays the image data on the display device 805. Alternatively, the graphic controller 804 may include a frame buffer for storing image data generated by the CPU 802 or the like.

  The input / output controller 806 connects the host controller 801 to the hard disk drive 808, the communication interface 807, and the CD-ROM drive 809, which are relatively high-speed input / output devices. The hard disk drive 808 stores programs and data used by the CPU 802. The communication interface 807 is connected to the network communication device 891 to transmit / receive programs or data. The CD-ROM drive 809 reads a program or data from the CD-ROM 892 and provides it to the hard disk drive 808 and the communication interface 807 via the RAM 803.

  The input / output controller 806 is connected to the ROM 810, the flexible disk drive 811, and the relatively low-speed input / output device of the input / output chip 812. The ROM 810 stores a boot program executed by the processing units 13 and 13A at startup, a program depending on the hardware of the processing units 13 and 13A, and the like. The flexible disk drive 811 reads a program or data from the flexible disk 893 and provides it to the hard disk drive 808 and the communication interface 807 via the RAM 803. The input / output chip 812 connects various input / output devices via the flexible disk drive 811 or a parallel port, serial port, keyboard port, mouse port, and the like.

  A program executed by the CPU 802 is stored in a recording medium such as a flexible disk 893, a CD-ROM 892, or an IC (Integrated Circuit) card and provided by a user. The program stored in the recording medium may be compressed or uncompressed. The program is installed in the hard disk drive 808 from the recording medium, read into the RAM 803, and executed by the CPU 802. The program executed by the CPU 802 causes the processing unit 13 to function as the acquisition unit 131, the movement control unit 132, the voltage control unit 133, the control unit 134, and the storage unit 135 described with reference to FIGS. The unit A is caused to function as the acquisition unit 131, the movement control unit 132A, the voltage control unit 133, the control unit 134A, and the storage unit 135A described with reference to FIGS.

  The program shown above may be stored in an external storage medium. As a storage medium, in addition to a flexible disk 893 and a CD-ROM 892, an optical recording medium such as a DVD (Digital Versatile Disk) or a PD (Phase Disk), a magneto-optical recording medium such as an MD (MiniDisk), a tape medium, and an IC card A semiconductor memory or the like can be used. Further, a storage medium such as a hard disk or a RAM provided in a server system connected to a dedicated communication network or the Internet may be used as a recording medium and provided as a program via the network.

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and includes designs and the like that do not depart from the gist of the present invention. The present invention is not limited to the above-described embodiment, and for example, the following modifications can be considered.

(1) In the above-described embodiment, when the electric field intensity measurement unit 10 measures the voltage generation source 100, the case where the measurement is performed by moving directly above the power generation source 100 has been described. It is not limited. For example, in the case of measuring the surface potential of three (N = 3) voltage generation sources 100, the measurement may not be directly above the voltage generation sources 100 as long as measurement is performed at three different measurement positions. For example, in the case of measuring the surface potential of three (N = 3) voltage generation sources 100, if measured at three different positions above the voltage generation source 100, it is not directly above the voltage generation source 100. May be.

(2) In the second embodiment, each element k _ij (h _n ) is approximated by the approximate expression shown in Expression (7), but the present invention is not limited to this. For example, an expression that approximates each element k _ij (h _n ) changes according to the number of voltage generation sources 100. Therefore, in the present invention, the conversion coefficient calculation unit 137A may approximate each element k _ij (h _n ) to a certain approximate expression, obtain each coefficient in the approximate expression, and store it in the storage unit 135A.

(3) In the second embodiment, k (h) is approximated as a function of distance as a correction method for correcting the conversion function group to a value corresponding to the measurement distance h. However, the present invention is not limited to this. For example, in the present invention, k may be obtained after approximating the electric field strength E (h) as a function of distance, and the conversion function group may be corrected to a value corresponding to the measurement distance h.

DESCRIPTION OF SYMBOLS 1 Non-contact surface potential measuring apparatus 10 Electric field strength measurement part 11 Distance measurement part 12 1st moving part 13 Processing part 100 Voltage generation source 121 Guide rail 122 Drive part 131 Acquisition part 132 Movement control part 133 Voltage control part 134 Control part 135 Memory | storage Unit 136 drive control unit 137 conversion coefficient calculation unit 138 conversion unit 300 electrode 400 voltage generator

Claims (8)

A non-contact surface potential measuring device that measures the surface potential of N (an integer greater than or equal to 1) voltage generation sources to be measured in a non-contact manner,
An electric field strength measuring unit for measuring an electric field strength of the voltage source;
A storage unit for storing a conversion coefficient group for converting each electric field intensity generated by each voltage generation source into a surface potential of each voltage generation source;
Using the conversion coefficient group, a conversion unit that converts the electric field strength of the measurement object measured by the electric field strength measurement unit into the surface potential;
A non-contact surface potential measuring device comprising: A first moving unit capable of moving the electric field strength measuring unit to a predetermined position above each voltage source;
2. The electric field strength measurement unit according to claim 1, wherein the electric field strength measurement unit measures the electric field strength of the voltage generation source after being moved to a predetermined position above the voltage generation source for measuring the surface potential by the first moving unit. Non-contact surface potential measuring device. The first moving unit includes:
A guide rail that guides the horizontal movement of the electric field strength measuring unit while maintaining a constant vertical distance between the voltage source and the electric field strength measuring unit;
A drive unit for moving the electric field intensity measurement unit in a horizontal direction along the guide rail;
A non-contact surface potential measuring device according to claim 2. A second moving unit capable of changing a distance in the vertical direction between the electric field intensity measuring unit and the voltage source by raising and lowering the first moving unit in the vertical direction;
A distance measuring unit that measures a vertical distance between the voltage generating source and the electric field intensity measuring unit disposed at a predetermined position above the voltage generating source;
With
The electric field strength measuring unit is moved to a predetermined position above the voltage generation source for measuring the surface potential by the first moving unit, and is vertically moved between the voltage generating source and the second moving unit. After the distance is adjusted, measure the electric field strength of the voltage source,
The distance measuring unit measures the vertical distance when the electric field strength measuring unit measures the electric field strength,
The conversion unit reads a conversion coefficient group corresponding to the distance measured by the distance measurement unit from the storage unit, and using the read conversion coefficient group, the electric field intensity measured by the electric field intensity measurement unit, The non-contact surface potential measuring device according to claim 3, wherein the non-contact surface potential measuring device converts the surface potential. The voltages of N voltage cases j (j = 1,..., N) are applied to the 1st to i (i = 1,..., N) th electrodes arranged at the same position as the voltage generation source. A voltage controller to be applied;
A conversion coefficient calculation unit for calculating the conversion coefficient group;
With
The electric field strength measurement unit is disposed at a predetermined position above the i-th electrode, measures the electric field strength E _ij of the i-th electrode in the voltage case j,
The conversion coefficient calculation unit includes a surface potential matrix that is an N-row and N-column matrix having the voltage V _ij as each element, and an electric field intensity matrix that is an N-row and N-column matrix having the electric field intensity E _ij as each element. The non-contact surface potential measuring device according to any one of claims 1 to 4, wherein an inverse matrix of conversion coefficients is calculated as the conversion coefficient group based on A measurement jig for calculating the conversion coefficient group in the non-contact surface potential measurement device according to claim 5,
An electrode disposed at the same position as the voltage source;
A voltage generator capable of applying voltages of N voltage cases j (j = 1,..., N) to each electrode under the control of the voltage controller;
A measuring jig comprising A non-contact surface potential measurement method for measuring the surface potential of N (an integer of 1 or more) voltage generation sources to be measured in a non-contact manner,
An electric field strength measuring step for measuring an electric field strength of the voltage source;
Using the conversion coefficient group that converts each electric field strength generated by each voltage generation source into a surface potential of each voltage generation source, the electric field strength of the measurement object measured in the electric field strength measurement step is converted into the surface potential. A conversion step to convert to,
A non-contact surface potential measuring method comprising: A distance for measuring a vertical distance between the voltage generation source and the electric field intensity measurement unit disposed at a predetermined position above the voltage generation source when the electric field intensity measurement unit measures the electric field intensity. Further comprising a measuring step,
In the conversion step, a conversion coefficient group corresponding to the distance measured in the distance measurement step is read from the storage unit, and the electric field intensity measured by the electric field intensity measurement unit is read using the read conversion coefficient group. The non-contact surface potential measuring method according to claim 7, wherein the method is converted to a surface potential.

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