1295635 (1) 九、發明說明 【發明所屬之技術領域】 本發明係有關一種具有用來清掃噴墨頭的噴嘴面的噴 墨頭之噴嘴面的清潔裝置的噴墨頭塗敷裝置，以及噴墨頭 ' 的清潔方法。 【先前技術】 • 藉由以往的噴墨頭方式，於基板的表面將用來塗敷形 成抗蝕劑或定向膜等的功能性薄膜的溶液的噴墨頭的噴嘴 面之技術，有將由矽橡膠等構成的彈性體刀片，一邊按壓 在噴墨頭的噴嘴面，一邊除掉剩餘塗敷液等。 又，在日本特開平6- 1 1 5 0 83號公報（專利文獻1)，在 彈性刀片本身設置空氣吸引用貫通孔，藉由吸引泵浦吸引 附著在彈性刀片的剩餘墨水。 於以往技術，具有以下的問題點。 • 在使用上述彈性體刀片時，因爲與噴墨頭的噴嘴面和 彈性體刀片的磨擦，而切削彈性體刀片，有產生彈性體粉 - 之慮。所產生的彈性體粉入侵到噴嘴，並附著在噴嘴面， 、 此係混入溶液中，而損害形成於基板的功能性薄膜的品質 〇 又，因爲彈性體刀片的劣化等，而導致刮除不完全之 情況。又，難以去除附著在彈性體刀片本身的剩餘塗敷液 ，而使得所刮除的剩餘液體再度附著於噴墨頭的噴嘴面。 在後者中，無法充份地獲得剩餘塗敷液的吸引效果。 -4- (2) 1295635 【發明內容】 〔發明之揭示〕 本發明的課題係提升噴墨頭的噴嘴面之剩下吐出液的 擦拭性能，並使溶液的塗敷品質提升。 本發明係具備噴墨頭，其具有藉由噴墨方式將溶液噴 射塗敷在基板的複數個噴嘴的噴墨塗敷裝置，具有：吸水 性的清掃體；及將該清掃體按壓在前述噴墨頭的噴嘴面的 按壓機構。 又，本發明係用來清掃具有藉由噴墨方式將溶液噴射 塗敷於基板的複數個噴嘴的噴墨頭的噴墨塗敷裝置的清潔 方法，藉由將吸水性的清掃體按壓在前述噴墨頭的噴嘴面 ，以清掃該噴墨頭的噴嘴面。 根據本發明，與藉由以往技術的彈性體刀片刮除不同 ，將具有吸水性的清掃體按壓在噴墨頭的噴嘴面，吸取剩 餘塗敷溶液，因此極力消除在噴墨頭的噴嘴面之間的摩擦 ，提升噴嘴面的擦拭性能，提升溶液的塗敷品質。 【實施方式】 從第1圖到第6圖所示的噴墨塗敷裝置10，大致上具 有正方體狀的基座1。在該基座1的下面的特定位置，分 別設置腳2，而水平的支持上述基座1。 在上述基座1的上面設置有安裝板3。在安裝板3沿 著長邊方向分別設置有導引軌4。在此等導引軌4的上面 -5- 1295635 (3) 側’藉由分別平行設置於其下面兩側的滑動構件6，而可 滑動的支持大致矩形板狀的搬送台5。 上述搬送台5連接有未圖示的驅動裝置，藉由使該驅 動裝置動作，而可沿著上述導引軌4移動上述搬送台5。 於上述搬送台5的上面，藉由靜電夾盤或吸引夾盤等 的保持手段，可裝卸的保持玻璃基板或半導體晶圓等的基 板W。換言之，基板W藉著保持於上述搬送台5的上面 ，而可沿著上述基座1的長邊方向搬送。 在上述基座1的長邊方向中途部，以橫跨上述一對的 導引軌4的方式，立設有門型的支持體7。在該支持體7 的上側，水平的架設有由角柱構成的安裝構件8，在該實 施例中，在該安裝構件8的前面，於和上述基板W的搬 送方向垂直的寬度方向上，並設6個噴墨方式的噴墨頭9 。此等複數個噴墨頭9所構成的長度尺寸爲，設定在大致 與基板W的寬度尺寸相同或者僅長些微’被搬送的基板 W全體，通過上述噴墨頭9的下方。 在此，如第3圖和第4圖所示，上述各噴墨頭9具備 噴墨頭本體5 1。噴墨頭本體5 1具有從上面側與下面側連 通的開口部52，其下面開口藉由可撓板53加以閉塞。該 可撓板5 3是藉由噴嘴板54加以覆蓋，藉此，於該噴墨頭 本體51的下面側，在可撓板53和噴嘴板54之間，形成 有複數間液室5 5。 、液室55是分別經由未圖示的枝管，與形成在噴嘴板 54內的主管54A連通’從主管54A經由枝管供給溶液。 -6 - (4) 1295635 主管54A的一端與後述的供給孔57連接，另一端與後 的回收孔5 9連接。 在上述噴墨頭本體51的長邊方向一端部’形成有 該液室5 5連通的供給孔5 7。 從該供給孔57對於上述液室55，供給例如形成定 膜或抗蝕劑等的功能性薄膜之溶液。藉此，該液室55 以溶液充滿。 φ 如第4圖所示，在上述噴嘴板54與噴墨頭本體51 長邊方向垂直的寬度方向的大約中心部，換言之’係沿 與基板W的搬送方向垂直的方向，以千鳥狀穿設有複 個噴嘴56，噴嘴板54的下面構成平坦的形狀，形成複 個噴嘴56爲開口的噴嘴面20。 又，如第3圖所示，在上述可撓板53的上面’與 述各噴嘴5 6相對向位置分別固接有壓電元件5 8。 又，與液室5 5或各噴嘴5 6分別一對一對應而設計 • 在各壓電元件5 8經由設置在上述開口部5 2內的驅 部60供給驅動電壓。藉此，從與已被驅動的壓電元件 ~ 對應的噴嘴56吐出溶液，可對於所搬送的基板W的上 - 噴射塗敷溶液。 如第3圖所示，在上述噴墨頭本體51的長邊方向 一端部，形成有與上述液室55連通的回收孔59，從該 收孔5 9回收供給到上述液室5 5的溶液。亦即，上述各 墨頭9不僅從各噴嘴5 6噴射供給到上述液室5 5的溶液 並使上述液室5 5內循環，而可從上述回收孔5 9回收。 述 與 向 內 的 著 數 數 上 〇 動 58 面 另 回 噴 -7- 1295635 . (5) 噴墨塗敷裝置10係如第5圖、第6圖所示，具有在 噴墨頭的噴嘴面清潔裝置19。噴嘴面清潔裝置19如以下 所述’具備有：用來擦拭附著於上述複數個噴墨頭9的噴 嘴面20的溶液之帶狀的擦拭布（清掃體μ 2的搬送機構j 3; 以及將擦拭布12按壓在噴墨頭9的噴嘴面20的按壓機構 4 1 〇 (搬送機構13) 帶狀的擦拭布（清掃體）12的搬送機構13，係具備有： 放出擦拭布12的供給捲筒14;捲取擦拭布12的捲取捲筒 1 5 ;橫跨於供給捲筒1 4和捲取捲筒1 5之間的擦拭布i 2， 放出到與上述複數個噴墨頭9的噴嘴面20的相對向位置 的放出機構1 6。 如第1圖所示，在支持體7的安裝構件8上的前面， 於與基板W垂直的寬度方向上，並設有上述複數個噴墨 頭9(在本實施例中爲6個），複數個噴墨頭9的噴嘴面20 的高度相同，複數個噴墨頭9的噴嘴面2 0位於相同的水 平面上。 如第5圖、第6圖所示’在複數個噴墨頭9的寬度方 向的一側（圖中左側），於上下方向分離間隔設置有一對的 供給捲筒14、1 5。如第6圖所示，一對的供給捲筒14、 1 5是設置在安裝於上述門形的支持體7的一側的柱子7 A 的前面的支持板1 1上，一對的供給捲筒1 4、1 5的旋轉的 中心軸，是平行的配置於基板W的搬送方向。在下方的 -8- (6) 1295635 軌道（供給供給捲筒1 4)止住輥子狀的擦拭布1 2的始端部 ，在上方的捲筒（捲取捲筒15)上，止住上述輥子狀的擦拭 布1 2的始端部。擦拭布1 2是由具有低發塵性的吸水性的 帶狀構件，例如聚脂纖維所構成。 與下方的供給捲筒1 4和上方的捲取捲筒1 5，如第6 圖所示，分別具有驅動電動機1 7、1 8，在供給捲筒1 4和 驅動電動機1 7之間，以及捲取捲筒1 5和b 1 8之間，分別 介裝有迴線離合器22、23，驅動電動機17、18的轉矩經 由迴線離合器（hysteresis clutch) 22、23傳達。供給捲 筒1 4和捲取捲筒1 5，從上述噴墨頭9的前方側觀看（第5 圖的紙面上方側），係分別旋轉到逆時鐘方向，藉由該旋 轉供給捲筒1 4放出擦拭布1 2，捲取捲筒1 5則捲取擦拭布 12 〇 此外，將供給捲筒14安裝於2片支持板1 1，在使用 完一方的供給捲筒14的擦拭布12時，可自動切換爲未使 用的另一方的供給捲筒1 4。同樣的，將捲取捲筒1 5安裝 在2片支持板1 1，當一方的捲取捲筒1 5的擦拭布1 2充滿 時，可自動切換爲空的另一方的捲取捲筒15。 根據這種構成，從交換後的新的供給捲筒1 4開始供 給擦拭布1 2之後，由於可將已經使用擦拭布1 2完畢的供 給捲筒1 4，以及充滿擦拭布1 2的捲取捲筒1 5，與未使用 的供給捲筒以及捲取捲筒15交換，因此，不會中斷擦 拭布1 2對於噴墨頭9的清掃，可進行供給捲筒1 4以及捲 取捲筒1 5的交換。 -9- (7) 1295635 從供給捲fe] 1 4到捲取捲同1 5的擦拭布i 2的搬送路 徑，設置有：放出輥子24、後述的導引輥子36以及導引 輥子40，擦拭布12是捲掛於此等輥子24、36、40上，並 從供給捲筒1 4搬送到捲取捲筒1 5。 在放出輥子2 4倂設有間距輥子2 5，在放出輥子2 4和 間距輥子25之間挾住擦拭布1 2。放出輥子24具有驅動馬 達（未圖示），從供給捲筒14放出擦拭布12，間距輥子25 防止驅動滑脫。但是取代該放出輥子2 4和間距輥子2 5， 亦可設置不具備驅動馬達的單純的導引輥子。 在上述複數個噴墨頭9的上側，從上述供給捲筒i 4 將上述擦拭布12，放出到與上述複數個噴墨頭9的噴嘴面 20相對向的前面之上述放出機構16。 放出機構16是具有：輸送部35，此該輸送部35在基 板W的搬送方向垂直的寬度方向上，前進後退的驅動手 段26。 驅動手段26如第5圖所示，具備有：在與前述安裝 構件8的前面倂設的噴墨頭9的上側，於寬度方向分離而 固定的2個皮帶輪30、31;捲回到2個皮帶輪30、31之 間的同步皮帶3 2，以及右側皮帶輪3 0的驅動電動機3 3， 驅動電動機33是可進行正轉（逆時鐘方向）逆轉（時鐘方向） 的切換。 如第6圖所示，安裝於安裝構件8的前述噴墨頭9的 上側位置安裝有基台37。在該基台37上，安裝有上述2 個皮帶輪3 0、3 1以及驅動電動機3 3。又，於基台3 7的前 -10- (8) 1295635 面，與於上述同步皮帶32的下方，與該同步皮帶32平 底設置有由一條軌道所構成的直線導引3 4。在上述直線 引34上安裝有輸送部35。輸送部35是由：安裝在直線 引34上的滑塊部35A ;以及延伸至安裝於滑塊部35A 部之下方的導引部35B，於導引部35B的下端部，旋轉 如地軸承導引輥子36。導引部35B是位在複數個噴墨頭 的前方側（第5圖的紙面的上方側），導引輥子3 6是與噴 頭9的噴嘴面2 0相對向。導引輥子3 6是支持與擦拭布 的表側面（與噴墨頭9相對向的側）相反的背側面。在連 導引輥子3 6的外周上端部和上述複數個噴墨頭9的噴 面20的水平面之間，設置有間隙。 上述輸送部35的滑塊部35A的上部，係使用固定 3 5C而固定在同步皮帶32，在第5圖（A)所示的狀態中 當驅動電動機33反轉時（在逆時鐘方向旋轉），輸送部 在直線導引34上移動（前進）到右方向上。又，在第5 (B)的狀態中，當驅動電動機33正轉時（在順時鐘方向旋 )，輸送部35在直線導引34上移動（後退）至左方向。 又，第5圖（A)係表示輸送部35位於待機位置的狀 。待機位置係對於藉由搬送台5的移動及噴墨頭9的搬 台5所搬送的基板W上的溶液的噴射塗敷沒有障礙的 置。 輸送部3 5係爲了後述的擦拭步驟’從該待機位置 向第5圖（B)所示的右端的擦拭步驟端而前進。 在上述導引輥子3 6和上述捲取捲筒1 5之間，旋轉 行 導 導 下 白 9 rrpi^ 12 結 嘴 具 3 5 圖 轉 態 送 位 朝 白 -11 - (9) 1295635 如地設置有支持擦拭布1 2的表側面的導引輥子40。導引 輥子4 0的外周下端部，係從連結複數個噴墨頭9的噴嘴 面20的水平面，突出於若干下方的位置。 上述驅動手段2 6係沿著上述直線導引3 4，從第5圖 (A)所示的待機位置，使上述輸送部35的導引部35B朝向 第5圖（B)所示的擦拭行程端，而前進到與上述基板W的 搬送方向垂直的寬度方向（第5圖中，爲左右方向）。在輸 送部35前進時，上述捲取捲筒15係停止，與導引部35B 的前進連動，而使上述放出輥子24和供給捲筒1 4旋轉， 放出擦拭布12。輸送部.35係藉由該前進在導引輥子36和 導引輥子40之間，於和複數個噴墨頭9的噴嘴面20相對 向的前面（下面）的位置平行的放出擦拭布1 2。此外，在該 導引部35B前進時，後述的按壓機構41的按壓輥子43在 上方搖動，於複數個噴墨頭9的噴嘴面20 —邊按壓擦拭 布12，一邊沿著噴嘴面20移動。 上述輸送部35在到達第5圖（B)所示的擦拭行程端之 後，上述的驅動手段2 6沿著直線導引3 4，使輸送部3 5從 第5圖（B)所示的擦拭行程端，朝向第5圖（A)所示的待機 位置，後退至上述寬度方向。與輸送部35的後退連動， 而使上述捲取捲筒15旋轉並捲取擦拭布12。此外，在該 導引部35B後退時，後述的按壓機構41的按壓輥子43在 下方搖動，與複數個噴墨頭9的噴嘴面20分離，擦拭布 1 2係在與噴嘴面20之間保持間隙的狀態下後退。 做爲驅動手段2 6可取代上述的驅動馬達和同步皮帶 •12- (10) 1295635 所構成者，而使用來回移動式的汽缸，使上述輸送部35 在寬度方向進退亦可。又，在橫跨於上述供給捲筒14和 捲取捲筒15之間的擦拭布12的第5圖（A)的左側，設置 汽缸，在汽缸的活塞桿前端部安裝上述導引部3 5 B，而使 擦拭布12放出至上述噴墨頭9的噴嘴面20亦可。 (按壓機構41) 噴墨塗敷裝置10係具有將擦拭布12按壓在複數個噴 墨頭9的噴嘴面20的按壓機構41。 如第5圖、.第6圖所示，按壓機構41係具有臂部42 、按壓輥子43、汽缸44，在上述輸送部35的導引部35B 的下端部，與上述導引輥子36同軸，可上下搖動地軸承 臂部42，在臂部42的前端部旋轉軸支撐比上述導引輥子 36小時徑的按壓輥子43。臂部42是藉由汽缸44的驅動 而上下搖動。在第5圖（A)的待機位置上，用來旋轉軸支 撐按壓輥子43的臂部42，係於略水平位置保持於橫跨在 上述導引輥子40和輸送部35的導引輥子36之間的擦拭 布1 2的背側面。 上述輸送部35的導引輥子36，從第5圖（A)所示的待 機位置前進時，使上述汽缸44的活塞桿44A伸長，使上 述臂部42從上述水平位置搖動至上方，如第5圖（B)所示 ’在臂部42搖動至上方的按壓位置上，臂部42的前端部 的按壓輥子43，將橫跨於上述導引輥子40和輸送部35的 導引輥子3 6之間的擦拭布1 2，按壓於上述噴墨頭9的噴 -13- (11) 1295635 嘴面20。 第6圖的二點鎖線係表示臂部42搖動於上方，而將 按壓輥子43按壓於噴墨頭9的噴嘴面20的按壓位置的狀 態。 追蹤上述輸送部35的前進，按壓輥子43是將擦拭布 12按壓於複數個噴墨頭9的噴嘴面20，而沿著噴嘴面20 移動。 # 上述輸送部35係在從第5圖（B)的擦拭行程端的位置 後退至圖中左方時，使上述汽缸44的活塞桿44A收縮， 從按壓位置使臂部42搖動至下方，並恢復到上述水平位 置。當臂部4 2恢復到水平位置時，按壓輥子4 3與上述噴 % 〆 墨頭9的噴嘴面20分離，上述導引輥子40和導引輥子36 之間的擦拭布12，係在上述複數個噴墨頭9的噴嘴面20 之間’返回保持間隙的平行狀態，在該平行狀態下使輸送 部3 5後退。 Φ 噴墨塗敷裝置1 0係具備未圖示的控制裝置，控制裝 置是用來控制構成放出機構1 6的前述驅動手段2 6的右側 皮帶輪30的驅動電動機33、放出輥子24的驅動馬達、及 •驅動電動機1 7、1 8的驅動，並且控制介裝於供給捲筒1 4 和捲取捲筒1 5之間的迴線離合器22、23的勵磁電流，以 控制各驅動電動機1 7、1 8的傳達轉矩。再者，控制裝置 是用來控制汽缸4 4的驅動，而將臂部4 2切換爲水平位置 和按壓位置的兩位置。 然後，對於上述構成的噴墨塗敷裝置1 〇的作用，一 •14- (§) (12) 1295635 邊參照第5圖（A)和第5圖（B)，一邊進行說明。 如第2圖所示，在基板W的搬入/搬出位置上，基板 W供給至搬送台5的上面，於上面保持基板W的搬送台5 ，係沿著基座1的長邊方向，在噴墨頭9的下方以特定的 速度移動。在該移動時，輸送部35以不妨礙上述搬送台5 的移動的方式，退避到第5圖（A)所示的待機位置。 當保持基板W的搬送台5到達噴墨頭9的下方時， 對於搬送台5施加特定的饋送，而驅動壓電元件58並充 滿到各噴墨頭9的液室內，例如從噴嘴5 6噴射形成定向 .膜或抗蝕劑等的功能性的薄膜的溶液。藉此，對於所搬送 的基板W的上面塗敷溶液。當結束對於一片基板W的溶 液之噴射時，將搬送台5移動到搬入/搬出位置。在該位 置上，進行將已塗敷溶液的基板W的下一步驟的搬出及 應塗敷溶液的下一個基板W的搬入之基板W的搬入/搬出 動作。 (放出機構16的輸送部35前進時） 噴墨塗敷裝置1 〇係當結束對於一片基板W的噴射時 ，使構成放出機構1 6的驅動手段2 6的右側的皮帶輪3 0 的驅動電動機33反轉（逆時鐘方向），將固定於同步皮帶 32的輸送部35，從第5圖（A)所示的待機位置，沿著複數 個噴墨頭9的前面（下面）到第5圖（B)所示的擦拭行程端的 位置爲止，以約1〇〇至200mm/sec的速度前進。此外，該 動作以上述基板W的搬入/搬出動作並行而進行亦可。 -15- (13) 1295635 在上述輸送部35的進時，在停止捲取捲筒μ旋轉之 同時’使供給捲筒14的驅動電動機17及放出輥子24的 驅動馬達驅動。放出輥子2 4係與輸送部3 5 (導引輥子3 6) 的前進配合，以不使擦拭布12產生鬆弛的方式放出。與 輸送部35的前進連動，使供給捲筒14的驅動電動機17 和放出輥子2 4的驅動馬達旋轉，放出與複數個噴墨頭9 的寬度方向的長度相當程度的擦拭布1 2。擦拭布1 2是在 導引輥子3 6和上述導引輥子4 0之間，平行的放出到與上 述複數個噴墨頭9的噴嘴面20相對向的前面位置。 控制裝置係以不使擦拭布1 2產生鬆弛的方式，控制 介裝於供給捲筒1 4和驅動電動機1 7之間的迴線離合器22 的勵磁電流，而控制驅動電動機1 7的傳達轉矩。 在上述輸送部35前進時，如上所述，驅動按壓機構 41的汽缸44，而使活塞桿44A伸長，臂部42搖動至上方 的按壓位置，按壓輥子43朝向噴墨頭9的噴嘴面20彈壓 。藉此，按壓輥子43在將擦拭布12按壓於噴墨頭9的噴 嘴面20，依序沿著各噴墨頭9的噴嘴面20移動。擦拭布 1 2由於係由具有吸水性的材料所構成，因此吸附並擦拭附 著於噴墨頭9的噴嘴面20的溶液。 在上述輸送部35前進時，在捲取捲筒15的旋轉停止 的狀態下，使供給捲筒1 4旋轉並放出擦拭布1 2 ’由於捲 取捲筒1 5的旋轉停止’因此導引輥子4 0的旋轉亦保持停 止狀態。結果，與噴墨頭9的噴嘴面20相對向的擦拭布 12，不會與噴墨頭9相對移動，而使相同的擦拭布12面 -16- 1295635 (15) 旋轉捲取捲筒1 5，捲取吸附溶液的擦拭布1 2。此時，供 給捲筒1 4和放出輥子24的旋轉停止。又，控制裝置是用 來控制介裝於捲取捲筒1 5和驅動電動機1 8之間的迴線離 合器23的勵磁電流，以控制驅動電動機1 8的傳達轉矩， 而對所捲取的擦拭布1 2施加特定的張力。 此外，如上所述，與輸送部3 5的後退配合，而將擦 拭布1 2捲取到捲取捲筒1 5時，當輸送部3 5位於擦拭步 驟端時，將位於放出輥子24和導引輥子3 6之間的未使用 的擦拭布1 2捲取到捲取捲筒1 5。 在此，在輸送部3 5的後退中，首先，以捲取捲筒1 5 捲取噴墨頭9的寬度方向長度（配合6個噴墨頭9的寬度 方向的長度）分的擦拭布1 2。然後，在停止捲取捲筒1 5的 旋轉之同時，於與擦拭布12的放出時相反方向，旋轉供 給捲筒1 4及放出輥子24。然後，將位於放出輥子24和導 引輥子3 6之間未使用的擦拭布1 2捲回到供給捲筒1 4側 〇 如此，在捲取捲筒1 5僅捲取供給到噴墨頭9的噴嘴 面20的擦拭的分量的擦拭布1 2，未使用的擦拭布1 2由於 被捲回到供給捲筒1 4側，因此可沒有浪費的使用擦拭布 12 〇 以上，雖結束噴墨塗敷裝置10之噴墨頭9的清潔作 用的1循環，但亦可反覆1循環以上。 此外，在以上中，搬送機構1 3係間歇搬送擦拭布1 2 ，亦即，在輸送部3 5前進時，於捲取捲筒1 5停止的狀態 -18- (16) 1295635 下’從供給捲筒1 4放出與噴墨頭9的寬度方向的長度相 當的量的擦拭布1 2。 在輸送部3 5後退時，旋轉捲取捲筒1 5，捲取附著溶 液的擦拭布1 2，供給捲筒1 4設爲已停止的狀態。 結果，與輸送部3 5的前進後退連動，捲取捲筒1 5係 間歇性的反覆停止旋轉，供給捲筒1 4則是間歇性的反覆 旋轉和停止。 又’使輸送部3 5前進後退的驅動手段的右側皮帶輪 3 0的驅動馬達3 3，亦間歇性的反覆反轉正轉。如上所述 ，搬送機構1 3係間歇性的搬送擦拭布1 2。 根據本實施例，可達以下的作用效果。 (a) 噴墨塗敷裝置10係具有將吸水性的擦拭布12 按壓在噴墨頭9的噴嘴面20的按壓機構41。因而，與以 往技術之彈性刀片的刮除不同，將具有吸水性的擦拭布1 2 按壓在噴墨頭9的噴嘴面20，而吸附並擦拭剩餘塗敷溶液 ，因此可防止剩餘的塗敷溶液殘留在噴墨頭9的噴嘴面2 0 ，而使從擦拭後的噴墨頭9的噴嘴面20的溶液的吐出穩 定。 (b) 擦拭布12爲帶狀，由於具有間歇搬送擦拭布12 的搬送機構1 3，因此藉由搬送機構1 3間歇的依序反覆未 附著溶液的新的擦拭布1 2部分，可清掃噴墨頭9的噴嘴 面20 〇 在以往技術的彈性體刀片中，由於彈性體刀片本身沒 有替換，因此刮除的溶液經常附著於彈性刀片。相對於此 -19- (17) 1295635 ，在擦拭布1 2中，附著擦拭布1 2的溶液的部分被 捲取捲筒1 5，在下一次的清掃時，以擦拭布1 2的 分清掃，因此不需擔心前次的清掃所擦拭的溶液附 墨頭9的噴嘴面20，而使擦拭性能提升，可經常使 9的噴嘴面20維持乾淨。 (c) 搬送機構1 3係具有：擦拭布I 2的供給捲彳 從供給捲筒1 4對於複數個噴墨頭9的噴嘴面20的 出擦拭布1 2的放出機構1 6、以及擦拭布1 2的捲 15° 供給捲筒1 4係儲存具有輕子狀的新的擦拭布 出機構1 6係將與複數個噴墨頭9的噴嘴面20的長 相當程度的擦拭布1 2，從供給捲筒1 4放出到複數 頭9的噴嘴面2 0的前面，捲取捲筒1 5係捲取吸附 擦拭布12部分。結果，即使是帶狀的擦拭布12亦 拿取。使擦拭布12的交換作業變爲容易，又，可 管理擦拭布1 2。 (d) 按壓機構41係於放出機構16將放出至複數 頭9的噴嘴面20的前面的擦拭布12，按壓在噴墨 噴嘴面20的按壓輥子43，將按壓輥子43按壓在 20，並且沿著噴墨頭9的噴嘴面20移動。因而， 輥子按壓在噴墨頭9的噴嘴面20，沿著噴嘴面20 因此使噴嘴面20的清掃作業變爲迅速，可縮短基相 清掃時間，可謀求成本降低。 (e) 放出機構16係沿著噴墨頭9的噴嘴面20移 捲取到 新的部 著在噴 噴墨頭 mi 14- 前面放 取捲筒 12，放 度大致 個噴墨 溶液的 可容易 容易的 個噴墨 頭9的 噴嘴面 將按壓 移動， 5 W的 動擦拭 -20- (18) 1295635 布1 2的驅動手段26，與溶液的黏度配合，而具有用 節驅動電動機3 3的旋轉速度的控制裝置。 結果，與溶液的黏度配合，可調節輸送部3 5的 速度。因而，控制擦拭布12的按壓時間，而可提升 性能。 (0噴墨頭9的清潔方法，係藉由將吸水性的擦 12按壓在噴墨頭9的噴嘴面20，由於清掃噴墨頭9 嘴面20，因此與以往技術藉由彈性體刀片刮除的方法 ，將具有吸水性的擦拭布1 2按壓在噴墨頭9的噴嘴 ，而吸附並擦拭剩餘塗敷溶液的方法，故可防止剩餘 敷溶液殘留在噴墨頭9的噴嘴面2 0，而使擦拭後的 9的噴嘴面2 0的溶液的吐出穩定。 (g) 擦拭布12由帶狀的擦拭布12所構成，由於將 布12間歇搬送至與噴墨頭9的噴嘴面20相對的位置 此藉由搬送機構1 3間歇的依序放出未附著溶液之新 拭布12部分，而可清掃噴墨頭9的噴嘴面20。在以 術的彈性體刀片中，由於彈性體刀片本身無法替換， 經常使所刮除的溶液附著在彈性刀片上。相對於此， 拭布1 2中，擦拭布1 2附著溶液的部分被捲取到捲取 1 5，在下一次清掃時，由於以擦拭布1 2的新的部分 ，因此不需擔心藉由前一次的清掃所擦拭的溶液附著 墨頭9的噴嘴面2 0，而使擦拭性能提升，可經常乾淨 持噴墨頭9的噴嘴面20。 (h) 具有將搬送到與噴墨頭9的噴嘴面20相對向 來調 移動 檫拭 拭布 的噴 :不同 面20 的塗 墨頭 擦拭 ，因 的擦 往技 因此 在擦 捲筒 清掃 在噴 的維 位置 -21 - 1295635 (19) 的擦拭布12按壓在噴嘴面20的按壓輥子43，以按 43將擦拭布12按壓在噴嘴面20，藉由使按壓輥子 著噴嘴面2 0移動，而依序使擦拭布1 2接觸噴嘴面 而，將輥子43按壓於噴墨頭9的噴嘴面20，並且 墨頭9的噴嘴面20移動，因此使噴嘴面20的清掃 爲迅速，而可縮短基板W的清掃時間，謀求成本降 (i)每次結束對於一片的基板W之溶液的塗敷 > 於進行噴墨頭9的清掃，因此在藉由極力乾燥固化 前的狀態下，可從噴嘴面20除去，比較容易除去 因而，可經常乾淨的保持噴墨頭9的噴嘴面2.0。結 抑制從噴墨頭9吐出溶液的不均產生，使溶液的吐 ，而提升形成於基板W的功能性薄膜的品質。 以上，雖然根據圖面詳述本發明的實施例，但 的具體構成不限定於該實施例，在不脫離本發明主 範圍設計的變更等，皆包含於本發明。例如，在上 > 例中，在輸送部3 5前進時，雖所說明將擦拭布12 噴墨頭9的噴嘴面20的例，但亦可在輸送部3 5後 壓。 此時，將供給捲筒1 4和捲取捲筒1 5切換爲第 示的配置，將按壓輥子43與第5圖所示的臂部42 安裝在支軸的右側，亦即，安裝在與第5圖所示的 右相反的位置關係亦可。 又，雖以使用擦拭布做爲清掃體之例進行說明 要是具有吸水性的零件則可，亦可爲其他的零件。 壓輥子 43沿 20。因 沿著噴 作業變 低。 時’由 溶液之 溶液。 果，可 出穩定 本發明 旨內的 述實施 按壓在 退時按 5圖所 相對， 狀態左 ，但只 -22- (20) 1295635 【圖式簡單說明】 第1圖係表示省略清潔裝置的噴墨頭塗敷裝置之正面 圖。 第2圖係表示省略清潔裝置的噴墨頭塗敷裝置之側面 圖。 第3圖係噴墨頭的橫剖面圖。 第4圖係噴墨頭的下面圖。 第5圖係噴墨頭的噴嘴面清潔裝置的模式圖，（A)係 表示輸送部的待機位置，（B)係表示輸送部的擦拭行程端 位置。 第6圖係模式表示噴墨頭的噴嘴面清潔裝置的左側面 之圖。 【主要元件符號說明】 1 :基座 2 :腳 3 :安裝板 4 :導引軌 5 :搬送台 6 :滑動構件 7、1 1 :支持體 8 :安裝構件 9 :噴墨頭 -23 (21) (21)1295635 1 0 :噴墨塗敷裝置 12 :擦拭布 1 3 :搬送機構 14 :供給捲筒 15 :捲取捲筒 1 6 :放出機構 17、18、33:驅動電動機 1 9 :噴嘴面清潔裝置 2〇 :噴嘴面 22、23 :迴線離合器 24 :放出轅子 25 :間距轅子 26 :驅動手段 30、31 :皮帶輪 32 :同步皮帶 34 :直線導引 35 :輸送部 35Α :滑動部 35Β :導引部 35C :固定具 36 :導引轅子 37 :基台 40 :導引轅子 4 1 :按壓機構 -24 1295635 (22) 42 :臂部 43 :按壓轅子 44 :汽缸 44A :活塞桿 5 1 :噴墨頭本體 5 2 :開口部 53 :可撓板 54 :噴嘴板 54A :主管 5 5 :液室 56 :噴嘴 57 :供給管 5 8 :壓電元件 59 :回收孔 60 :驅動部 W :基板BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head coating device having a cleaning device for cleaning a nozzle face of an ink jet head of a nozzle face of an ink jet head, and a spray nozzle The cleaning method of the ink head'. [Prior Art] The technique of applying the nozzle surface of an ink jet head to apply a solution for forming a functional film such as a resist or an alignment film on the surface of a substrate by a conventional ink jet head method is An elastomer blade made of rubber or the like is pressed against the nozzle surface of the ink jet head to remove the remaining coating liquid or the like. In the elastic blade itself, a through hole for air suction is provided in the elastic blade itself, and the remaining ink adhering to the elastic blade is sucked by the suction pump. The prior art has the following problems. • When the above-mentioned elastomer blade is used, the elastomer blade is cut due to friction with the nozzle face of the inkjet head and the elastomer blade, and elastic powder is generated. The generated elastomer powder invades the nozzle and adheres to the nozzle surface, which is mixed into the solution, thereby impairing the quality of the functional film formed on the substrate, and the scraping of the elastomer blade is caused by the deterioration of the elastomer blade. Complete situation. Further, it is difficult to remove the remaining coating liquid adhering to the elastomer blade itself, so that the scraped remaining liquid adheres again to the nozzle face of the ink jet head. In the latter, the suction effect of the remaining coating liquid cannot be sufficiently obtained. -4- (2) 1295635 [Disclosure of the Invention] An object of the present invention is to improve the wiping performance of the remaining discharge liquid on the nozzle surface of the ink jet head and to improve the coating quality of the solution. The present invention provides an ink jet head having an ink jet coating device that sprays a solution onto a plurality of nozzles of a substrate by an inkjet method, and has a water-absorbing cleaning body; and pressing the cleaning body against the spray A pressing mechanism of the nozzle face of the ink head. Further, the present invention is a cleaning method for cleaning an inkjet coating device having an inkjet head in which a plurality of nozzles are spray-coated on a substrate by an inkjet method, by pressing a water-absorbent cleaning body on the aforementioned The nozzle face of the ink jet head to clean the nozzle face of the ink jet head. According to the present invention, unlike the prior art elastomer blade scraping, the water absorbing cleaning body is pressed against the nozzle surface of the ink jet head, and the remaining coating solution is sucked, so that the nozzle surface of the ink jet head is eliminated as much as possible. The friction between the nozzles improves the wiping performance of the nozzle surface and improves the coating quality of the solution. [Embodiment] The inkjet coating device 10 shown in Figs. 1 to 6 has substantially a susceptor 1 having a rectangular parallelepiped shape. At a specific position below the susceptor 1, the foot 2 is separately provided, and the susceptor 1 is horizontally supported. A mounting plate 3 is provided on the upper surface of the base 1. Guide rails 4 are respectively disposed in the longitudinal direction of the mounting plate 3. The upper side of the guide rails 4 -5 - 1295635 (3) side slidably supports the substantially rectangular plate-shaped transfer table 5 by the slide members 6 respectively provided on the lower sides of the guide rails 4 in parallel. A drive device (not shown) is connected to the transfer table 5, and the transfer table 5 can be moved along the guide rail 4 by operating the drive device. On the upper surface of the transfer table 5, a substrate W such as a glass substrate or a semiconductor wafer can be detachably held by a holding means such as an electrostatic chuck or a suction chuck. In other words, the substrate W can be conveyed along the longitudinal direction of the susceptor 1 by being held on the upper surface of the transfer table 5. A gate-shaped support body 7 is erected so as to straddle the pair of guide rails 4 in the middle of the longitudinal direction of the susceptor 1. On the upper side of the support body 7, a mounting member 8 composed of a corner post is horizontally mounted. In this embodiment, the front surface of the mounting member 8 is disposed in a width direction perpendicular to the conveying direction of the substrate W. 6 inkjet heads 9 of the ink jet method. The plurality of ink jet heads 9 are formed to have a length dimension which is set to be substantially the same as the width dimension of the substrate W or only a small amount of the substrate W to be transported, and passes through the lower surface of the ink jet head 9. Here, as shown in Figs. 3 and 4, each of the ink jet heads 9 described above is provided with an ink jet head main body 51. The head body 51 has an opening portion 52 that communicates with the lower surface side from the upper surface side, and the lower surface opening is closed by the flexible plate 53. The flexible plate 53 is covered by the nozzle plate 54, whereby a plurality of liquid chambers 55 are formed between the flexible plate 53 and the nozzle plate 54 on the lower surface side of the ink jet head body 51. The liquid chamber 55 is connected to the main pipe 54A formed in the nozzle plate 54 via a branch pipe (not shown), and supplies the solution from the main pipe 54A via the branch pipe. -6 - (4) 1295635 One end of the main pipe 54A is connected to a supply hole 57 to be described later, and the other end is connected to the rear recovery hole 59. A supply hole 57 through which the liquid chamber 55 communicates is formed at one end portion of the ink jet head main body 51 in the longitudinal direction. A solution of a functional film such as a film or a resist is supplied to the liquid chamber 55 from the supply hole 57. Thereby, the liquid chamber 55 is filled with the solution. As shown in Fig. 4, the nozzle plate 54 is approximately the center portion in the width direction perpendicular to the longitudinal direction of the head body 51, in other words, it is disposed in a thousand birds in a direction perpendicular to the conveying direction of the substrate W. There is a plurality of nozzles 56, and the lower surface of the nozzle plate 54 has a flat shape, and a nozzle surface 20 in which the plurality of nozzles 56 are opened is formed. Further, as shown in Fig. 3, the piezoelectric element 58 is fixed to the upper surface of the flexible plate 53 at a position facing each of the nozzles 56. Further, it is designed to correspond to the liquid chambers 55 or the nozzles 56 in a one-to-one correspondence. The driving voltage is supplied to each of the piezoelectric elements 58 through the driving portion 60 provided in the opening portion 52. Thereby, the solution is discharged from the nozzle 56 corresponding to the piezoelectric element to be driven, and the solution can be applied to the substrate W to be transported. As shown in Fig. 3, a recovery hole 59 communicating with the liquid chamber 55 is formed at one end portion of the ink jet head main body 51 in the longitudinal direction, and a solution supplied to the liquid chamber 55 is recovered from the receiving hole 59. . In other words, each of the ink heads 9 can eject the solution supplied from the nozzles 56 to the liquid chambers 5 5 and circulate the liquid chambers 5 5, and can be recovered from the recovery holes 59. The inkjet coating device 10 is as shown in Fig. 5 and Fig. 6 and has a nozzle face cleaning of the inkjet head. Device 19. The nozzle surface cleaning device 19 is provided with a belt-shaped wiping cloth for cleaning a solution attached to the nozzle surface 20 of the plurality of ink jet heads 9 (the conveying mechanism j 3 of the cleaning body μ 2; The wiping cloth 12 presses the pressing mechanism 4 1 〇 (transport mechanism 13) of the nozzle surface 20 of the inkjet head 9 (the conveying mechanism 13). The conveying mechanism 13 of the wiping cloth (cleaning body) 12 is provided with a supply roll for discharging the wiping cloth 12. a spool 14; a take-up reel 15 that winds up the wiping cloth 12; a wiping cloth i2 that spans between the supply reel 14 and the take-up reel 15 is discharged to the plurality of inkjet heads 9 a discharge mechanism 16 for the relative position of the nozzle face 20. As shown in Fig. 1, on the front surface of the mounting member 8 of the support 7, the plurality of ink jets are provided in the width direction perpendicular to the substrate W. In the head 9 (six in the present embodiment), the nozzle faces 20 of the plurality of inkjet heads 9 have the same height, and the nozzle faces 20 of the plurality of inkjet heads 9 are located on the same horizontal plane. 6 is shown in the side of the width direction of the plurality of ink-jet heads 9 (the left side in the drawing), and is disposed at intervals in the vertical direction. A pair of supply reels 14, 15. As shown in Fig. 6, a pair of supply reels 14, 15 are provided in front of the column 7 A attached to one side of the gate-shaped support 7 On the support plate 1 1 , the central axes of rotation of the pair of supply reels 14 and 15 are arranged in parallel in the transport direction of the substrate W. The lower -8-(6) 1295635 orbit (supply supply reel) 1 4) The starting end portion of the roller-shaped wiping cloth 1 2 is stopped, and the upper end portion of the above-mentioned roller-shaped wiping cloth 1 2 is stopped on the upper reel (winding reel 15). The wiping cloth 12 is composed of A water-absorbing belt member having a low dust-generating property, for example, a polyester fiber. The lower supply drum 14 and the upper take-up reel 15 have a drive motor 1 as shown in Fig. 6, respectively. 7 and 18, between the supply reel 14 and the drive motor 17 and between the take-up reels 15 and b 1 8 , respectively, a return line clutch 22, 23 is provided to drive the motors 17, 18 The torque is transmitted via the hysteresis clutches 22 and 23. The supply reel 14 and the take-up reel 15 are viewed from the front side of the above-described inkjet head 9 (Fig. 5) The upper side of the paper surface is rotated to the counterclockwise direction, and the wiping cloth 1 2 is discharged by the rotation supply reel 14 , and the wiping cloth 12 is taken up by winding the reel 15 , and the supply reel 14 is attached thereto. When the wiping cloth 12 of one supply roll 14 is used, the two support plates 1 can be automatically switched to the other supply roll 14 that is not used. Similarly, the take-up reel 15 is mounted on The two support sheets 1 1 can be automatically switched to the other empty take-up reel 15 when the wiping cloth 1 2 of one of the take-up reels 15 is full. According to this configuration, after the supply of the wiping cloth 1 2 is started from the exchanged new supply reel 1 4, the supply reel 1 4 which has been used with the wiping cloth 12 and the winding of the wiping cloth 1 2 can be taken up. The reel 15 is exchanged with the unused supply reel and the take-up reel 15, so that the cleaning of the inkjet head 9 without interrupting the wiping cloth 12 can be performed, and the supply reel 1 and the take-up reel 1 can be performed. 5 exchanges. -9- (7) 1295635 From the supply roll fe] 1 4 to the transport path of the wiping cloth i 2 of the take-up roll and the 15 5, the release roller 24, a guide roller 36 and a guide roller 40 to be described later are provided, and wiped The cloth 12 is wound around the rollers 24, 36, 40 and conveyed from the supply reel 14 to the take-up reel 15 . A spacing roller 25 is provided at the discharge roller 24, and the wiping cloth 12 is caught between the discharging roller 24 and the spacing roller 25. The discharge roller 24 has a drive motor (not shown), and the wiper 12 is discharged from the supply reel 14, and the pitch roller 25 prevents the drive from slipping. However, instead of the discharge roller 24 and the pitch roller 25, a simple guide roller that does not have a drive motor may be provided. On the upper side of the plurality of ink-jet heads 9, the wiping cloth 12 is discharged from the supply reel i4 to the front discharge mechanism 16 facing the nozzle surface 20 of the plurality of ink-jet heads 9. The discharge mechanism 16 has a transport unit 35 that advances and retracts the drive unit 26 in the width direction perpendicular to the transport direction of the substrate W. As shown in FIG. 5, the driving means 26 includes two pulleys 30 and 31 which are separated and fixed in the width direction on the upper side of the ink jet head 9 provided on the front surface of the mounting member 8, and are wound back to two. The timing belt 3 2 between the pulleys 30, 31, and the drive motor 33 of the right pulley 30, the drive motor 33 is switchable in the forward (counterclockwise) reverse (clock direction). As shown in Fig. 6, a base 37 is attached to the upper side of the ink jet head 9 attached to the mounting member 8. The two pulleys 30, 31 and the drive motor 33 are attached to the base 37. Further, on the front side -10- (8) 1295635 of the base 3 7 and the timing belt 32 below, the timing belt 32 is provided with a linear guide 34 composed of a single track. A conveying portion 35 is attached to the straight guide 34. The conveying portion 35 is composed of a slider portion 35A attached to the linear guide 34, and a guide portion 35B extending to a lower portion of the slider portion 35A, and is rotated at the lower end portion of the guiding portion 35B. Roller 36. The guide portion 35B is positioned on the front side of the plurality of ink jet heads (on the upper side of the paper surface in Fig. 5), and the guide roller 36 is opposed to the nozzle surface 20 of the head 9. The guide roller 36 is a back side that supports the opposite side of the front side of the wiper (the side opposite to the ink jet head 9). A gap is provided between the outer peripheral upper end portion of the guide roller 36 and the horizontal surface of the ejection face 20 of the plurality of ink jet heads 9. The upper portion of the slider portion 35A of the transport unit 35 is fixed to the timing belt 32 by fixing 35C, and when the drive motor 33 is reversed in the state shown in Fig. 5(A) (rotating in the counterclockwise direction) The conveying portion moves (advances) on the linear guide 34 to the right direction. Further, in the state of the fifth (B), when the drive motor 33 rotates forward (in the clockwise direction), the transport portion 35 moves (retracts) on the linear guide 34 to the left direction. Further, Fig. 5(A) shows a state in which the transport unit 35 is at the standby position. The standby position is not hindered by the application of the solution on the substrate W conveyed by the movement of the transfer table 5 and the stage 5 of the ink jet head 9. The conveyance unit 35 advances from the standby position to the wiping step end of the right end shown in Fig. 5(B) for the wiping step 'described later. Between the above-mentioned guide roller 36 and the above-mentioned take-up reel 15 5, the rotation guide is turned white 9 rrpi ^ 12 The nozzle has a 3 5 figure and the position is turned toward white -11 - (9) 1295635 There is a guide roller 40 that supports the side of the wiper cloth 12. The outer peripheral lower end portion of the guide roller 40 protrudes from a plurality of lower positions from a horizontal plane connecting the nozzle faces 20 of the plurality of ink jet heads 9. The driving means 26 follows the linear guide 34, and the guiding portion 35B of the conveying portion 35 is directed toward the wiping stroke shown in Fig. 5(B) from the standby position shown in Fig. 5(A). The end is advanced to a width direction perpendicular to the conveyance direction of the substrate W (the left and right direction in Fig. 5). When the conveying unit 35 advances, the take-up reel 15 is stopped, and in conjunction with the advancement of the guiding portion 35B, the discharge roller 24 and the supply reel 14 are rotated to release the wiping cloth 12. The conveying portion 35 is configured to eject the wiping cloth 1 2 in parallel with the front (lower) position of the nozzle face 20 of the plurality of ink jet heads 9 by the advancement between the guide roller 36 and the guide roller 40. . Further, when the guide portion 35B is advanced, the pressing roller 43 of the pressing mechanism 41, which will be described later, is rocked upward, and the wiper 12 is pressed against the nozzle surface 20 of the plurality of inkjet heads 9, and moves along the nozzle surface 20. After the transport unit 35 reaches the wiping stroke end shown in Fig. 5(B), the above-described driving means 26 guides the straight line 34, and the transport unit 35 is wiped from the fifth figure (B). The stroke end is moved back to the above-described width direction toward the standby position shown in Fig. 5(A). In conjunction with the retreat of the conveying unit 35, the take-up reel 15 is rotated and the wiping cloth 12 is taken up. Further, when the guide portion 35B is retracted, the pressing roller 43 of the pressing mechanism 41, which will be described later, is rocked downward, and is separated from the nozzle surface 20 of the plurality of inkjet heads 9, and the wiping cloth 12 is held between the nozzle surface 20 and the nozzle surface 20. Retreat in the state of the gap. As the driving means 26, in place of the above-described drive motor and timing belt, 12-(10) 1295635, the transport unit 35 may be moved forward and backward in the width direction by using a shuttle type moving cylinder. Further, a cylinder is provided on the left side of the fifth figure (A) of the wiping cloth 12 which is spanned between the supply reel 14 and the take-up reel 15, and the guide portion 35 is attached to the front end portion of the piston rod of the cylinder. B, the wiping cloth 12 may be discharged to the nozzle face 20 of the above-described inkjet head 9. (Pressing Mechanism 41) The inkjet coating device 10 has a pressing mechanism 41 that presses the wiping cloth 12 against the nozzle surface 20 of the plurality of inkjet heads 9. As shown in Fig. 5 and Fig. 6, the pressing mechanism 41 has an arm portion 42, a pressing roller 43, and a cylinder 44, and is coaxial with the guide roller 36 at a lower end portion of the guiding portion 35B of the conveying portion 35. The bearing arm portion 42 can be rocked up and down, and the pressing roller 43 having a diameter of 36 hours behind the guide roller is supported by a rotating shaft at the front end portion of the arm portion 42. The arm portion 42 is rocked up and down by the driving of the cylinder 44. In the standby position of Fig. 5(A), the arm portion 42 for rotating the shaft supporting pressing roller 43 is held at a slightly horizontal position on the guide roller 36 which straddles the guide roller 40 and the conveying portion 35. The back side of the wiper 1 2 . When the guide roller 36 of the transport unit 35 advances from the standby position shown in FIG. 5(A), the piston rod 44A of the cylinder 44 is extended, and the arm portion 42 is swung from the horizontal position to the upper side. 5 (B) shows the pressing roller 43 at the front end portion of the arm portion 42 at the pressing position where the arm portion 42 is swung upward, and the guide roller 36 that straddles the guiding roller 40 and the conveying portion 35. The wiping cloth 1 2 is pressed against the nozzle face 20 of the above-described ink jet head 9 by the jet-13-(11) 1295635. The two-point lock line in Fig. 6 indicates that the arm portion 42 is rocked upward, and the pressing roller 43 is pressed against the pressing position of the nozzle face 20 of the ink jet head 9. The advancement of the transport unit 35 is followed, and the pressing roller 43 presses the wiper 12 against the nozzle surface 20 of the plurality of ink jet heads 9, and moves along the nozzle surface 20. # When the conveyance unit 35 is retracted to the left in the figure from the position of the wiping stroke end of Fig. 5(B), the piston rod 44A of the cylinder 44 is contracted, and the arm portion 42 is swung downward from the pressing position, and is restored. Go to the above horizontal position. When the arm portion 4 2 is returned to the horizontal position, the pressing roller 43 is separated from the nozzle face 20 of the above-described ink jetting head 9, and the wiping cloth 12 between the guiding roller 40 and the guiding roller 36 is in the above plural The nozzle faces 20 of the inkjet heads 9 are returned to a parallel state in which the gaps are maintained, and in this parallel state, the conveying portions 35 are retracted. Φ The inkjet coating device 10 includes a control device (not shown), and the control device is a drive motor 33 for controlling the right pulley 30 of the above-described driving means 26 of the discharge mechanism 16, and a drive motor for discharging the roller 24. And driving the driving of the motors 17 and 18, and controlling the exciting current of the return clutches 22, 23 interposed between the supply reel 14 and the take-up reel 15 to control the respective drive motors 17 , 1 8 conveys torque. Further, the control means is for controlling the driving of the cylinder 44, and the arm portion 4 2 is switched to two positions of the horizontal position and the pressing position. Next, the action of the above-described inkjet coating apparatus 1 , will be described with reference to Figs. 5(A) and 5(B). As shown in Fig. 2, at the loading/unloading position of the substrate W, the substrate W is supplied to the upper surface of the transfer table 5, and the transfer table 5 for holding the substrate W thereon is sprayed along the longitudinal direction of the susceptor 1. The lower portion of the ink head 9 moves at a specific speed. At the time of this movement, the conveyance unit 35 retreats to the standby position shown in Fig. 5(A) so as not to hinder the movement of the conveyance table 5. When the transfer table 5 holding the substrate W reaches the lower side of the ink jet head 9, a specific feed is applied to the transfer table 5, and the piezoelectric element 58 is driven and filled into the liquid chamber of each ink jet head 9, for example, ejected from the nozzle 56. A solution of a functional film oriented to a film or a resist is formed. Thereby, a solution is applied to the upper surface of the substrate W to be transferred. When the ejection of the solution to the one substrate W is completed, the transfer table 5 is moved to the loading/unloading position. At this position, the loading/unloading operation of the substrate W for carrying out the next step of the substrate W to which the solution has been applied and the loading of the next substrate W to which the solution is applied is performed. (When the conveyance unit 35 of the discharge mechanism 16 is advanced) The inkjet coating device 1 is configured to drive the drive motor 33 of the pulley 30 of the right side of the drive means 26 of the discharge mechanism 16 when the ejection of one substrate W is completed. The reverse direction (counterclockwise direction) is fixed to the transport portion 35 of the timing belt 32, from the standby position shown in Fig. 5(A), along the front (lower) of the plurality of ink jet heads 9 to Fig. 5 ( B) The position of the wiping stroke end is shown to advance at a speed of about 1 〇〇 to 200 mm/sec. Further, this operation may be performed in parallel with the loading/unloading operation of the substrate W. -15-(13) 1295635 At the time of the advancement of the conveyance unit 35, the drive motor 17 of the supply reel 14 and the drive motor of the discharge roller 24 are driven while stopping the rotation of the take-up reel μ. The discharge roller 24 is engaged with the advancement of the conveying portion 35 (guide roller 36) so as not to loosen the wiping cloth 12. In conjunction with the advancement of the conveyance unit 35, the drive motor 17 of the supply reel 14 and the drive motor of the discharge roller 24 are rotated, and the wiping cloth 12 corresponding to the length of the plurality of ink-jet heads 9 in the width direction is discharged. The wiping cloth 1 2 is placed in parallel between the guide roller 36 and the above-described guide roller 40 in a front position opposed to the nozzle face 20 of the plurality of ink jet heads 9. The control device controls the excitation current of the loop clutch 22 interposed between the supply reel 14 and the drive motor 17 so as not to loosen the wiping cloth 12, and controls the transmission of the drive motor 17 Moment. When the transport unit 35 advances, as described above, the cylinder 44 of the pressing mechanism 41 is driven to extend the piston rod 44A, the arm portion 42 is swung to the upper pressing position, and the pressing roller 43 is biased toward the nozzle surface 20 of the ink jet head 9. . Thereby, the pressing roller 43 presses the wiping cloth 12 against the nozzle surface 20 of the inkjet head 9, and sequentially moves along the nozzle surface 20 of each of the inkjet heads 9. Since the wiping cloth 1 2 is composed of a material having water absorbability, the solution attached to the nozzle face 20 of the ink jet head 9 is sucked and wiped. When the conveyance unit 35 advances, in a state where the rotation of the take-up reel 15 is stopped, the supply reel 14 is rotated and the wiping cloth 1 2 'is stopped due to the rotation of the take-up reel 15'. Therefore, the guide roller is guided. The rotation of 40 is also kept stopped. As a result, the wiping cloth 12 opposed to the nozzle face 20 of the ink-jet head 9 does not move relative to the ink-jet head 9, but the same wiping cloth 12--16- 1295635 (15) is rotated to take up the reel 15 , take up the wiping cloth 1 2 of the adsorption solution. At this time, the rotation of the supply reel 14 and the discharge roller 24 is stopped. Further, the control means is for controlling the exciting current of the loop clutch 23 interposed between the take-up reel 15 and the drive motor 18 to control the transmission torque of the drive motor 18, and to wind up The wiper 1 2 applies a specific tension. Further, as described above, when the wiping cloth 1 2 is taken up to the take-up reel 15 with the retreat of the conveying portion 35, when the conveying portion 35 is located at the wiping step end, it will be located at the discharging roller 24 and the guide The unused wiping cloth 12 between the rollers 3 6 is taken up to the take-up reel 15 . Here, in the retreat of the transport unit 35, first, the wiping cloth 1 in which the length of the ink jet head 9 in the width direction (the length in the width direction of the six ink jet heads 9 is divided) is taken up by the take-up reel 15 2. Then, while the rotation of the take-up reel 15 is stopped, the supply reel 14 and the discharge roller 24 are rotated in the opposite direction to the discharge of the wiping cloth 12. Then, the unused wiping cloth 12 between the discharge roller 24 and the guide roller 36 is wound back to the side of the supply reel 14 so that only the take-up reel 15 is taken up and supplied to the ink jet head 9 The wiping cloth 12 of the wiping component of the nozzle surface 20, the unused wiping cloth 12 is wound back to the supply reel 14 side, so that the wiping cloth 12 〇 or more can be used without waste, and the ink jet coating is finished. The cleaning action of the ink jet head 9 of the applicator 10 is performed for one cycle, but may be repeated for one cycle or more. Further, in the above, the conveying mechanism 13 intermittently conveys the wiping cloth 1 2, that is, when the conveying unit 35 advances, the state of the winding reel 15 is stopped -18-(16) 1295635 The reel 1 4 discharges the wiping cloth 12 in an amount corresponding to the length of the ink jet head 9 in the width direction. When the transport unit 35 is retracted, the take-up reel 15 is rotated, and the wiping cloth 1 2 to which the solution adheres is wound up, and the supply reel 1 4 is stopped. As a result, in conjunction with the advancement and retreat of the transport unit 35, the take-up reel 15 intermittently stops rotating, and the supply reel 14 is intermittently rotated and stopped intermittently. Further, the drive motor 3 3 of the right pulley 30 of the drive means for advancing and retracting the transport portion 35 is also intermittently reversely reversed. As described above, the conveying mechanism 13 intermittently conveys the wiping cloth 1 2 . According to this embodiment, the following effects can be achieved. (a) The inkjet coating device 10 has a pressing mechanism 41 that presses the water-absorbent wiping cloth 12 against the nozzle surface 20 of the inkjet head 9. Therefore, unlike the scraping of the elastic blade of the prior art, the absorbent cloth 1 2 having the water absorbability is pressed against the nozzle face 20 of the ink jet head 9, and the remaining coating solution is adsorbed and wiped, thereby preventing the remaining coating solution. The nozzle surface 20 of the inkjet head 9 remains, and the discharge of the solution from the nozzle surface 20 of the inkjet head 9 after wiping is stabilized. (b) The wiping cloth 12 has a belt shape, and since the conveying mechanism 13 that intermittently conveys the wiping cloth 12 is provided, the conveying mechanism 13 intermittently repeats the new wiping cloth portion 12 in which the solution is not adhered, and the cleaning can be performed. The nozzle face 20 of the ink head 9 is entangled in the prior art elastomer blade, and since the elastomer blade itself is not replaced, the scraped solution often adheres to the elastic blade. In contrast to this -19-(17) 1295635, in the wiping cloth 12, the portion to which the solution of the wiping cloth 12 is adhered is taken up by the reel 15, and at the time of the next cleaning, the wiping cloth 1 2 is cleaned. Therefore, there is no need to worry about the nozzle face 20 of the ink-attached head 9 of the solution wiped by the previous cleaning, and the wiping performance is improved, and the nozzle face 20 of 9 can be kept clean. (c) The transport mechanism 13 includes a discharge mechanism of the wiping cloth I 2 from the supply reel 1 to the discharge mechanism 1 of the wiping cloth 1 2 of the nozzle surface 20 of the plurality of ink jet heads 9, and a wiping cloth 1 2 roll 15° supply roll 1 4 is a new wiper mechanism 1 having a light-weight shape, and the wiper 1 2 having a length corresponding to the length of the nozzle face 20 of the plurality of ink-jet heads 9 The supply reel 14 is discharged to the front surface of the nozzle face 20 of the plurality of heads 9, and the take-up reel 15 is taken up by the suction wiping cloth 12 portion. As a result, even the strip-shaped wiping cloth 12 is taken. It is easy to exchange the wiping cloth 12, and the wiping cloth 12 can be managed. (d) The pressing mechanism 41 is attached to the wiping cloth 12 that is discharged to the front surface of the nozzle surface 20 of the plurality of heads 9 by the discharge mechanism 16, and is pressed against the pressing roller 43 of the inkjet nozzle surface 20, and the pressing roller 43 is pressed at 20, and along the The nozzle face 20 of the ink jet head 9 moves. Therefore, the roller is pressed against the nozzle surface 20 of the ink jet head 9, and the cleaning operation of the nozzle surface 20 is made rapid along the nozzle surface 20, whereby the cleaning time of the base phase can be shortened, and the cost can be reduced. (e) The discharge mechanism 16 is taken up along the nozzle face 20 of the inkjet head 9 to take a new portion, and the reel 12 is placed in front of the inkjet head mi 14-, and the discharge of a substantially ink jet solution can be easily performed. The nozzle surface of the easy ink jet head 9 will be pressed and moved, and the driving means 26 of the 5 W movable wipe -20-(18) 1295635 cloth 12 will cooperate with the viscosity of the solution, and have the rotation of the drive motor 33. Speed control device. As a result, the speed of the conveying portion 35 can be adjusted in accordance with the viscosity of the solution. Thus, the pressing time of the wiping cloth 12 is controlled, and the performance can be improved. (0. The cleaning method of the inkjet head 9 is performed by pressing the water-absorbent wipe 12 against the nozzle face 20 of the inkjet head 9, and cleaning the nozzle face 20 of the inkjet head 9, so that it is scraped by an elastomer blade in the prior art. In addition, a method in which the water-absorbent wiping sheet 12 is pressed against the nozzle of the ink-jet head 9 to adsorb and wipe the remaining coating solution prevents the remaining coating solution from remaining on the nozzle surface 20 of the ink-jet head 9. The discharge of the solution of the nozzle surface 20 of the wiped 9 is stabilized. (g) The wiping cloth 12 is composed of a belt-shaped wiping cloth 12, and the cloth 12 is intermittently conveyed to the nozzle surface 20 of the inkjet head 9. In the opposite position, the nozzle portion 20 of the ink jet head 9 can be cleaned by intermittently sequentially discharging the new wipe 12 portion of the unattached solution by the transport mechanism 13. In the elastomer blade, the elastomer blade is used. It is not replaceable by itself, and the scraped solution is often attached to the elastic blade. In contrast, in the wiping cloth 12, the portion of the wiping cloth 12 attached to the solution is taken up to the winding 15 for the next cleaning, due to the next cleaning, To wipe the new part of the cloth 1 2, so don't worry about it by the previous one The wiped solution adheres to the nozzle face 20 of the ink head 9, and the wiping performance is improved, and the nozzle face 20 of the inkjet head 9 can be cleaned frequently. (h) There is a nozzle face 20 to be carried to the inkjet head 9. Relatively to the movement of the wiper wiper: the ink head of the different face 20 is wiped, because the wiper is cleaned in the wiper position in the spray position - 21 - 1995635 (19), the wiper 12 is pressed against the nozzle The pressing roller 43 of the surface 20 presses the wiping cloth 12 against the nozzle surface 20 by 43, and moves the pressing roller to the nozzle surface 20, thereby sequentially bringing the wiping cloth 12 into contact with the nozzle surface, and pressing the roller 43 to The nozzle surface 20 of the ink jet head 9 moves, and the nozzle surface 20 of the ink head 9 moves, so that the cleaning of the nozzle surface 20 is rapid, and the cleaning time of the substrate W can be shortened, thereby reducing the cost (i) each time for one piece. The application of the solution of the substrate W is performed after the inkjet head 9 is cleaned. Therefore, it can be removed from the nozzle surface 20 in a state before being dried by the maximum force, and it is relatively easy to remove, so that the inkjet head can be kept clean frequently. The nozzle face of 9 is 2.0. The junction suppression is discharged from the inkjet head 9 The unevenness is generated to cause the spit of the solution to improve the quality of the functional film formed on the substrate W. Although the embodiment of the present invention has been described in detail with reference to the drawings, the specific configuration is not limited to the embodiment, and The present invention is also included in the present invention. For example, in the above example, when the transport unit 35 is advanced, an example of the nozzle surface 20 of the wiping cloth 12 of the ink jet head 9 will be described. However, it is also possible to press the conveying portion 35. At this time, the supply reel 14 and the take-up reel 15 are switched to the first arrangement, and the pressing roller 43 and the arm portion 42 shown in Fig. 5 are attached. The right side of the fulcrum, that is, the positional relationship opposite to the right side shown in Fig. 5 may be attached. Further, the description will be made by using a wiping cloth as a cleaning body. If it is a water absorbing member, it may be another member. Press roller 43 along 20. It becomes lower along the spray operation. When the solution is from solution. The stability of the present invention can be stabilized. The pressing is reversed according to the fifth figure, and the state is left, but only -22-(20) 1295635 [Simple description of the drawing] Fig. 1 shows the spraying of the cleaning device omitted. Front view of the ink head coating device. Fig. 2 is a side view showing an ink jet head applying device omitting a cleaning device. Fig. 3 is a cross-sectional view of the ink jet head. Fig. 4 is a view showing the lower side of the ink jet head. Fig. 5 is a schematic view showing a nozzle face cleaning device for an ink jet head, wherein (A) indicates a standby position of the transport portion, and (B) indicates a wipe stroke end position of the transport portion. Fig. 6 is a view showing the left side surface of the nozzle face cleaning device of the ink jet head. [Description of main component symbols] 1 : Base 2 : Foot 3 : Mounting plate 4 : Guide rail 5 : Transfer table 6 : Slide member 7 , 1 1 : Support 8 : Mounting member 9 : Inkjet head -23 (21 (21) 1295635 1 0 : inkjet coating device 12 : wiping cloth 1 3 : conveying mechanism 14 : supply reel 15 : winding reel 1 6 : discharging mechanism 17, 18, 33: driving motor 1 9 : nozzle Surface cleaning device 2〇: Nozzle surface 22, 23: Return clutch 24: Release tweezers 25: Pitch tweezers 26: Driving means 30, 31: Pulley 32: Timing belt 34: Linear guide 35: Conveying part 35Α: Sliding Part 35Β: Guide 35C: Fixture 36: Guide tweezers 37: Base 40: Guide tweezers 4 1 : Pressing mechanism - 24 1295635 (22) 42 : Arm 43 : Pressing tweezers 44 : Cylinder 44A : piston rod 5 1 : ink jet head body 5 2 : opening portion 53 : flexible plate 54 : nozzle plate 54A : main pipe 5 5 : liquid chamber 56 : nozzle 57 : supply pipe 5 8 : piezoelectric element 59 : recovery hole 60 : drive unit W: substrate