TWI292636B - - Google Patents

Download PDF

Info

Publication number
TWI292636B
TWI292636B TW95110287A TW95110287A TWI292636B TW I292636 B TWI292636 B TW I292636B TW 95110287 A TW95110287 A TW 95110287A TW 95110287 A TW95110287 A TW 95110287A TW I292636 B TWI292636 B TW I292636B
Authority
TW
Taiwan
Prior art keywords
resonant
beams
double
node
filter
Prior art date
Application number
TW95110287A
Other languages
English (en)
Chinese (zh)
Other versions
TW200737585A (en
Inventor
zhen-rong Li
sheng-guo Lin
Original Assignee
Univ Nat Kaohsiung 1St Univ Sc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Kaohsiung 1St Univ Sc filed Critical Univ Nat Kaohsiung 1St Univ Sc
Priority to TW095110287A priority Critical patent/TW200737585A/zh
Publication of TW200737585A publication Critical patent/TW200737585A/zh
Application granted granted Critical
Publication of TWI292636B publication Critical patent/TWI292636B/zh

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
TW095110287A 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator TW200737585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Publications (2)

Publication Number Publication Date
TW200737585A TW200737585A (en) 2007-10-01
TWI292636B true TWI292636B (fr) 2008-01-11

Family

ID=45067586

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Country Status (1)

Country Link
TW (1) TW200737585A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451625B (zh) * 2011-01-05 2014-09-01 Univ Ishou 串接式微機械雙鉗式帶通濾波器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI459630B (zh) 2010-09-15 2014-11-01 Ind Tech Res Inst 微機電濾波器
CN106698326B (zh) * 2017-01-24 2018-04-03 东南大学 基于硅基微机械悬臂梁t型结直接加热式毫米波信号检测器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451625B (zh) * 2011-01-05 2014-09-01 Univ Ishou 串接式微機械雙鉗式帶通濾波器

Also Published As

Publication number Publication date
TW200737585A (en) 2007-10-01

Similar Documents

Publication Publication Date Title
CN110052391B (zh) 双谐振模式耦合的微机械压电超声波换能器
CN111328005B (zh) 压电式mems麦克风
TWI292636B (fr)
JP2008209389A (ja) 加速度センサ
JP2009520970A (ja) 少なくとも２つの機械的に結合された振動質量体を備えるマイクロシステム、より詳細にはマイクロジャイロ
JP6696530B2 (ja) 圧電ジャイロスコープにおける連結懸架
JP2010171966A5 (ja) 振動片、振動子、センサー及び電子部品
WO2002018875A1 (fr) Capteur de vitesse angulaire
JP2010501831A (ja) 音叉ジャイロスコープ装置を有する２軸ヨーレート検知ユニット
JP2002277248A (ja) 角速度センサ
JP2008286521A (ja) 回転速度検知ユニット、及び回転速度センサ
JP5257196B2 (ja) 輪郭振動片
TW201212372A (en) Microelectromechanical filter
WO2013108804A1 (fr) Gyroscope vibrant
TW201933638A (zh) 共振器及共振器模組
CN103688136A (zh) 振动器以及振动陀螺仪
WO2015109697A1 (fr) Haut-parleur à membrane multiple
WO2021209682A3 (fr) Ensemble résonateur de système microélectromécanique
JP2002107372A (ja) 加速度センサ
CN107863903B (zh) 阵列式非线性宽频升频振动能量采集器
CN113630703B (zh) Mems扬声器
WO2001036910A1 (fr) Capteur de vitesse angulaire
CN112953433A (zh) 一种多梁耦合的微机电谐振器
CN102823275B (zh) 发声部件
JPH0323699Y2 (fr)

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees