TWI292636B - - Google Patents
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- Publication number
- TWI292636B TWI292636B TW95110287A TW95110287A TWI292636B TW I292636 B TWI292636 B TW I292636B TW 95110287 A TW95110287 A TW 95110287A TW 95110287 A TW95110287 A TW 95110287A TW I292636 B TWI292636 B TW I292636B
- Authority
- TW
- Taiwan
- Prior art keywords
- resonant
- beams
- double
- node
- filter
- Prior art date
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095110287A TW200737585A (en) | 2006-03-24 | 2006-03-24 | Micromechanical wave filter using free-free beam resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095110287A TW200737585A (en) | 2006-03-24 | 2006-03-24 | Micromechanical wave filter using free-free beam resonator |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200737585A TW200737585A (en) | 2007-10-01 |
TWI292636B true TWI292636B (fr) | 2008-01-11 |
Family
ID=45067586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095110287A TW200737585A (en) | 2006-03-24 | 2006-03-24 | Micromechanical wave filter using free-free beam resonator |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200737585A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI451625B (zh) * | 2011-01-05 | 2014-09-01 | Univ Ishou | 串接式微機械雙鉗式帶通濾波器 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI459630B (zh) | 2010-09-15 | 2014-11-01 | Ind Tech Res Inst | 微機電濾波器 |
CN106698326B (zh) * | 2017-01-24 | 2018-04-03 | 东南大学 | 基于硅基微机械悬臂梁t型结直接加热式毫米波信号检测器 |
-
2006
- 2006-03-24 TW TW095110287A patent/TW200737585A/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI451625B (zh) * | 2011-01-05 | 2014-09-01 | Univ Ishou | 串接式微機械雙鉗式帶通濾波器 |
Also Published As
Publication number | Publication date |
---|---|
TW200737585A (en) | 2007-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |