TWI292636B - - Google Patents

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Publication number
TWI292636B
TWI292636B TW95110287A TW95110287A TWI292636B TW I292636 B TWI292636 B TW I292636B TW 95110287 A TW95110287 A TW 95110287A TW 95110287 A TW95110287 A TW 95110287A TW I292636 B TWI292636 B TW I292636B
Authority
TW
Taiwan
Prior art keywords
resonant
beams
double
node
filter
Prior art date
Application number
TW95110287A
Other languages
English (en)
Chinese (zh)
Other versions
TW200737585A (en
Inventor
zhen-rong Li
sheng-guo Lin
Original Assignee
Univ Nat Kaohsiung 1St Univ Sc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Kaohsiung 1St Univ Sc filed Critical Univ Nat Kaohsiung 1St Univ Sc
Priority to TW095110287A priority Critical patent/TW200737585A/zh
Publication of TW200737585A publication Critical patent/TW200737585A/zh
Application granted granted Critical
Publication of TWI292636B publication Critical patent/TWI292636B/zh

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
TW095110287A 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator TW200737585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Publications (2)

Publication Number Publication Date
TW200737585A TW200737585A (en) 2007-10-01
TWI292636B true TWI292636B (fr) 2008-01-11

Family

ID=45067586

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Country Status (1)

Country Link
TW (1) TW200737585A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451625B (zh) * 2011-01-05 2014-09-01 Univ Ishou 串接式微機械雙鉗式帶通濾波器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI459630B (zh) 2010-09-15 2014-11-01 Ind Tech Res Inst 微機電濾波器
CN106698326B (zh) * 2017-01-24 2018-04-03 东南大学 基于硅基微机械悬臂梁t型结直接加热式毫米波信号检测器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451625B (zh) * 2011-01-05 2014-09-01 Univ Ishou 串接式微機械雙鉗式帶通濾波器

Also Published As

Publication number Publication date
TW200737585A (en) 2007-10-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees