TW200737585A - Micromechanical wave filter using free-free beam resonator - Google Patents

Micromechanical wave filter using free-free beam resonator

Info

Publication number
TW200737585A
TW200737585A TW095110287A TW95110287A TW200737585A TW 200737585 A TW200737585 A TW 200737585A TW 095110287 A TW095110287 A TW 095110287A TW 95110287 A TW95110287 A TW 95110287A TW 200737585 A TW200737585 A TW 200737585A
Authority
TW
Taiwan
Prior art keywords
free
beams
resonator
resonant
micromechanical
Prior art date
Application number
TW095110287A
Other languages
English (en)
Other versions
TWI292636B (zh
Inventor
zhen-rong Li
sheng-guo Lin
Original Assignee
Univ Nat Kaohsiung 1St Univ Sc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Kaohsiung 1St Univ Sc filed Critical Univ Nat Kaohsiung 1St Univ Sc
Priority to TW095110287A priority Critical patent/TW200737585A/zh
Publication of TW200737585A publication Critical patent/TW200737585A/zh
Application granted granted Critical
Publication of TWI292636B publication Critical patent/TWI292636B/zh

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
TW095110287A 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator TW200737585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Publications (2)

Publication Number Publication Date
TW200737585A true TW200737585A (en) 2007-10-01
TWI292636B TWI292636B (zh) 2008-01-11

Family

ID=45067586

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095110287A TW200737585A (en) 2006-03-24 2006-03-24 Micromechanical wave filter using free-free beam resonator

Country Status (1)

Country Link
TW (1) TW200737585A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8471651B2 (en) 2010-09-15 2013-06-25 Industrial Technology Research Institutute Microelectromechanical filter
CN106698326A (zh) * 2017-01-24 2017-05-24 东南大学 基于硅基微机械悬臂梁t型结直接加热式毫米波信号检测器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451625B (zh) * 2011-01-05 2014-09-01 Univ Ishou 串接式微機械雙鉗式帶通濾波器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8471651B2 (en) 2010-09-15 2013-06-25 Industrial Technology Research Institutute Microelectromechanical filter
CN106698326A (zh) * 2017-01-24 2017-05-24 东南大学 基于硅基微机械悬臂梁t型结直接加热式毫米波信号检测器

Also Published As

Publication number Publication date
TWI292636B (zh) 2008-01-11

Similar Documents

Publication Publication Date Title
CN103907286B (zh) 弹性波分波器
TW200711298A (en) Small-sized piezoelectric resonator
TW200737585A (en) Micromechanical wave filter using free-free beam resonator
Auersch Building response due to ground vibration—simple prediction model based on experience with detailed models and measurements
CN201682603U (zh) 一种耳机
TW200737682A (en) Exciting method for elastic vibration member and vibratory driving device
DE602007004102D1 (de) Piezoelektrischer Resonator mit optimierten Bewegungsfähigkeiten
CN104883650A (zh) 振动发声装置
WO2006031950A3 (en) Acoustically intelligent structures with resonators
WO2013012840A3 (en) Method and apparatus for manufacturing a resonating structure
ATE438452T1 (de) Verfahren und vorrichtung zur trennung von teilchen
WO2006008502A3 (en) Ultrasonic generator system
WO2015126498A3 (en) Micromechanical frequency divider
CN102056059A (zh) 多功能发声器
CN106341055A (zh) 振动能量采集器
CN206775735U (zh) 一种发声器
CN204761697U (zh) 振动发声装置
CN106416068B (zh) 弹性波装置
WO2009029171A4 (en) Z-leg shock isolator
CN102158039A (zh) 宽频微型电磁式振动能量采集器
EP2409403A1 (en) Resonator device and method of optimizing a q-factor
EP2570770A3 (en) Three-mass coupled oscillation technique for mechanically robust micromachined gyroscopes
CN109478874A (zh) 具有减少的板模式的电声滤波器
CN214363414U (zh) 一种道路施工用具有锤击降噪结构的夯实装置
RU2008100808A (ru) Гидрофон на поверхностных акустических волнах

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees