TWI292192B - - Google Patents

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Publication number
TWI292192B
TWI292192B TW91137343A TW91137343A TWI292192B TW I292192 B TWI292192 B TW I292192B TW 91137343 A TW91137343 A TW 91137343A TW 91137343 A TW91137343 A TW 91137343A TW I292192 B TWI292192 B TW I292192B
Authority
TW
Taiwan
Prior art keywords
glass substrate
bottom plate
reaction chamber
preheating
disposed
Prior art date
Application number
TW91137343A
Other languages
English (en)
Chinese (zh)
Other versions
TW200411774A (en
Inventor
guo-shun Zheng
Tang Jiang I
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW91137343A priority Critical patent/TW200411774A/zh
Publication of TW200411774A publication Critical patent/TW200411774A/zh
Application granted granted Critical
Publication of TWI292192B publication Critical patent/TWI292192B/zh

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  • Chemical Vapour Deposition (AREA)
TW91137343A 2002-12-25 2002-12-25 Preheating reaction room TW200411774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW91137343A TW200411774A (en) 2002-12-25 2002-12-25 Preheating reaction room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW91137343A TW200411774A (en) 2002-12-25 2002-12-25 Preheating reaction room

Publications (2)

Publication Number Publication Date
TW200411774A TW200411774A (en) 2004-07-01
TWI292192B true TWI292192B (ja) 2008-01-01

Family

ID=45067444

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91137343A TW200411774A (en) 2002-12-25 2002-12-25 Preheating reaction room

Country Status (1)

Country Link
TW (1) TW200411774A (ja)

Also Published As

Publication number Publication date
TW200411774A (en) 2004-07-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees