1280288 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種表面硬化方面的技術領域，尤指 種可大幅降低成本，且並可提昇刀具硬度之刀具之表面 硬化方法者。 【先前技術】1280288 IX. Description of the Invention: [Technical Field] The present invention relates to a technical field of surface hardening, and more particularly to a surface hardening method for a tool which can greatly reduce the cost and improve the hardness of the tool. [Prior Art]
一般習用利用真空濺鍍法於刀具表面被覆含鈦及矽 之硬貝薄膜時，在該真空濺鍍之製程中係需先利用鋁、鈦 $材被覆於該刀具表面，以利用該靶材中之鋁作為黏著介 貝而使鈦能與碳鋼材質之刀具表面緊密的結合，然後再利 用鈦、矽靶材被覆於其外層，如此便可再藉由鈦的結合， 而使妙可被緊密牢固的結合，藉此便可於該刀具表面形成 一緊密結合且含有鈦、矽之硬質薄膜，以使得該刀具因此 而可具有較佳之硬度。 ▲然而，由於上述之真空濺鍍係需用到大量之鋁靶材， 而及銘乾材係為氧化！g，該氣化銘之價格係非常昂貴，所 以相對的該需利用大量氧⑽來作為真线鏟之輕材以 於刀具表面形成含有鈦、歡硬質薄_表面硬化方法， 係會使得刀具的成本大幅的提高；而且就未塗佈前刀具不 鏽鋼之基材其表面硬度為18〇〇微克式硬度（MIcr〇-HARDNESS)’而鈦、石夕、氧化鋁共組而成使其表面具有36〇〇 微克式硬度（MICRO-HARDNESS)，唯由18〇〇直接塗層為3600 微克式硬度（MICRO-HARDNESS)，在刀具常受高壓高熱環 境下，極易使差異非常大之二個基層的結合面產生崩解之 5 1280288 狀況，進而使該被覆之加工無意義，而造成浪費。 【發明内容】 本發明之主要目的在提供一種於刀具表面形成硬質 薄膜以提昇刀具之硬度之刀具之表面硬化方法者。 具體而言，以上所述刀具之表面硬化方法，其主要係 利用真空濺鍍之方法於該刀具表面形成一硬質薄膜者，而 該真空濺鍍之步驟係包括（a )將真空濺鍍之溫度設定為 350。(：，壓力設定為1.5xl(T2mbar，並充入氮氣作為鍍膜介 質；（b )使一鈦乾材濺鑛被覆於刀具表面約30分鐘；（c) 使鈦、矽比例為鈦85%〜90%，矽15%〜1〇%之靶材濺 鍍被覆於該刀具最外層約60分鐘。 如此，便可使鈦與碳鋼材質之刀具表面緊密牢固的結 合，同時矽亦可藉由鈦而緊密牢固的結合於該刀具表面， 因此係可使刀具具有較佳之硬度，而且於真空濺鍍時無需 用到大量的氧化鋁，所以亦可大幅降低表面硬化之成本。 在另一實施例中更可於該（c)步驟後再施以一（d ) 步驟：使鈦、矽比例為鈦77%〜82%，矽23%〜18%矽 靶材濺鍍被覆於該刀具最外層約120分鐘。如此，則更可 進一步的提昇該刀具之硬度。 【實施方式】 請參閱第一圖所示，係本發明所述一種刀具之表面硬 化方法的第一較佳實施例的流程圖，其主要係利用真空濺 鍍之方法於該刀具表面被覆一層硬質薄膜者，而該真空濺 鍍之步驟包括： 1280288 (a )將真空濺鍍之溫度設定為35〇t ，設⑷划-W，並充人議氣作二= ===漸進層之方以刀具表面形成—厚 的硬質薄膜； (b )第—層係使用—鈦（Ti)㈣於刀具表面減鑛 、、勺3 0分鐘， (C)第二層係使用鈦（Ti)、矽（Si)比例為欽（Ti) 85%〜90% ’石夕（Si) 15%〜1〇%之靶材，於該第一層外 滅鍍約60分鐘，而其中該鈦（Ti)、矽（Si)之比例^欽 (Ti) 87%，矽（Si) 13%為最佳； 如此於真空濺鍍第一層時，係可使鈦與碳鋼材質之刀 具表面緊密牢固的結合，而於真空電鍍第二層時，係可使 矽（Si)藉由鈦（Ti)而緊密牢固的結合於該刀具表面， 而使該刀具可因此具有較佳之硬度，而且於真空濺鍍時係 無需用到大量的氧化鋁，所以亦可大幅降低表面硬化之成 本0 另外請參閱第二圖所示，係為本發明之第二較佳實施 例的流程圖，其主要係於該第一實施例之（c )步驟後再 施以一（d )步驟使該第二層外再形成一第三層之被覆， 而該第三層係使用鈦（Ti)、矽（Si)比例為鈦（Ti) 77 %〜82%，矽（Si) 23%〜18%之靶材，於該第二層外藏 鐘約120分鐘’而其中該鈦（Ti )、石夕（Si)之比例以欽 (Ti) 80%，矽（Si) 20%為最佳。 如此，則便可更為提昇該刀具之硬度，而且由第三圖 1280288 及第三之一圖之破壞測試圖、破壞測試照片中係可明顯看 出，本發明確實具有表面強化及硬度增強之功效。 綜上所述，當知本發明具有產業上之利用性及進步 性，而且在同類產品中均未見有類似之產品或發表而具有 新穎性，故已符合發明專利之申請要件。 1280288 【圖式簡單說明】 第一圖，係本發明第一較佳實施例之流程圖。 ζ第二I，係本發明第二較佳實施例之流程圖。 第三圖，係本發明破壞測試圖。 第三之一圖，係本發明破壞測試照片。In the vacuum sputtering process, the aluminum and titanium materials are coated on the surface of the tool to utilize the target in the vacuum sputtering process. The aluminum acts as a bonding shell to enable the titanium to be tightly bonded to the surface of the tool made of carbon steel, and then the titanium and tantalum targets are coated on the outer layer, so that the combination of titanium can be closely combined. A strong bond is formed whereby a tightly bonded hard film comprising titanium and tantalum is formed on the surface of the tool so that the tool can have a better hardness. ▲ However, due to the above-mentioned vacuum sputtering system, a large number of aluminum targets are required, and the dry materials are oxidized! g, the price of the gasification is very expensive, so it is necessary to use a large amount of oxygen (10) as the light material of the wire shovel to form titanium on the surface of the tool, which is hard and thin _ surface hardening method, which will make the tool The cost is greatly improved; and the surface hardness of the substrate of the stainless steel before the coating is 18 〇〇 micro-gram hardness (MIcr〇-HARDNESS)', and the titanium, the stone, and the alumina are combined to have a surface of 36. MICRO-HARDNESS, only 18〇〇 directly coated with 3600 μg hardness (MICRO-HARDNESS), it is easy to make the difference between the two bases in the high pressure and high heat environment. The bonding surface produces a 5 1280288 condition of disintegration, which in turn makes the processing of the coating meaningless and wasteful. SUMMARY OF THE INVENTION A primary object of the present invention is to provide a surface hardening method for a tool that forms a hard film on the surface of a tool to increase the hardness of the tool. Specifically, the surface hardening method of the above tool mainly uses a vacuum sputtering method to form a hard film on the surface of the tool, and the vacuum sputtering step includes (a) a temperature of vacuum sputtering. Set to 350. (:, the pressure is set to 1.5xl (T2mbar, and filled with nitrogen as a coating medium; (b) a titanium dry material is sprayed on the surface of the cutter for about 30 minutes; (c) the ratio of titanium to tantalum is 85% of titanium~ 90%, 矽15%~1〇% of the target is sputter coated on the outermost layer of the tool for about 60 minutes. Thus, the surface of the tool made of titanium and carbon steel can be tightly and firmly combined, and the titanium can also be made of titanium. The tightly and firmly bonded to the surface of the tool allows the tool to have a better hardness, and does not require a large amount of alumina during vacuum sputtering, so that the cost of surface hardening can be greatly reduced. In another embodiment Further, after the step (c), a step (d) is further applied: the ratio of titanium to tantalum is 77% to 82% of titanium, and the target of 23% to 18% of tantalum is sputter coated on the outermost layer of the cutter. In this case, the hardness of the tool can be further improved. [Embodiment] Referring to the first figure, a flow chart of a first preferred embodiment of a surface hardening method for a tool according to the present invention is provided. Mainly using a vacuum sputtering method to coat the surface of the tool with a hard layer The film, and the vacuum sputtering steps include: 1280288 (a) set the temperature of the vacuum sputtering to 35 〇 t, set (4) stroke - W, and fill the air to make two = = = = progressive layer to The surface of the tool is formed into a thick hard film; (b) the first layer is made of titanium (Ti) (4) on the surface of the tool, and the spoon is used for 30 minutes. (C) The second layer is made of titanium (Ti) or tantalum (Ti) The ratio of Si) is (Ti) 85%~90% 'Shi Xi (Si) 15%~1〇% of the target, and the first layer is out-plated for about 60 minutes, and the titanium (Ti), 矽(Si) ratio ^ Qin (Ti) 87%, 矽 (Si) 13% is the best; so when vacuum sputtering the first layer, the titanium and carbon steel tool surface can be tightly and firmly combined, and When the second layer is vacuum-plated, the crucible (Si) can be tightly and firmly bonded to the surface of the tool by titanium (Ti), so that the tool can have a better hardness and is not required for vacuum sputtering. A large amount of alumina is used, so that the cost of surface hardening can be greatly reduced. In addition, please refer to the second embodiment, which is a flow chart of the second preferred embodiment of the present invention. After the step (c) of the first embodiment, a step (d) is further applied to form a coating of the third layer outside the second layer, and the ratio of titanium (Ti) and bismuth (Si) is used for the third layer. It is a titanium (Ti) 77%~82%, bismuth (Si) 23%~18% target, and the second layer is hidden for about 120 minutes' and wherein the titanium (Ti), Shi Xi (Si) The ratio is 80% for Qin (Ti) and 20% for Si(Si). In this way, the hardness of the tool can be further improved, and the damage test chart and damage are broken by the third figure 1280288 and the third figure. It is apparent from the test photograph that the present invention does have the effects of surface strengthening and hardness enhancement. In summary, it is known that the present invention has industrial applicability and progress, and has no similar products or publications in the same kind of products, and has novelty, so it has met the application requirements of the invention patent. 1280288 BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a flow chart of a first preferred embodiment of the present invention. ζ II I is a flow chart of a second preferred embodiment of the present invention. The third figure is the damage test chart of the present invention. The third one is a damage test photograph of the present invention.