JPH01316449A - Coated laminate member - Google Patents
Coated laminate memberInfo
- Publication number
- JPH01316449A JPH01316449A JP14739088A JP14739088A JPH01316449A JP H01316449 A JPH01316449 A JP H01316449A JP 14739088 A JP14739088 A JP 14739088A JP 14739088 A JP14739088 A JP 14739088A JP H01316449 A JPH01316449 A JP H01316449A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- sialon
- base material
- solid solution
- type ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims abstract description 76
- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 11
- 239000000956 alloy Substances 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims abstract description 9
- 239000006104 solid solution Substances 0.000 claims abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- 239000002356 single layer Substances 0.000 claims abstract description 3
- 239000002131 composite material Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- -1 silicon carbonate nitride Chemical class 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052593 corundum Inorganic materials 0.000 abstract description 7
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 238000001659 ion-beam spectroscopy Methods 0.000 abstract description 5
- 238000005498 polishing Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract 4
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 241000920340 Pion Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は被覆複合部材に関し、特に各種化学プラント、
ガスタービン部材、各種ロールなどの耐摩・耐熱・耐食
部材として有効なものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a coated composite member, particularly for use in various chemical plants,
It is effective as a wear-resistant, heat-resistant, and corrosion-resistant member for gas turbine members, various rolls, etc.
［従来の技術］
周知の如く、サイアロン系セラミックスは優れた耐摩耗
性、耐熱衝撃性及び高温強度を有し、その焼結部材の工
業的利用が広く図られてきている。[Prior Art] As is well known, sialon ceramics have excellent wear resistance, thermal shock resistance, and high temperature strength, and sintered members thereof have been widely used industrially.
ところで、その焼結体部材の製造に当たっては高温（１
６００〜１８５０℃）での処理が必要であり、必然的に
構成結晶粒子の粒成長が生じる。このため、ホットプレ
ス、他成分添加等により粒成長を抑制し、耐摩耗性、靭
性等の向上も図られているが、限度がある。By the way, when producing the sintered body member, high temperatures (1
600 to 1850°C), which inevitably causes grain growth of the constituent crystal grains. For this reason, attempts have been made to suppress grain growth and improve wear resistance, toughness, etc. by hot pressing, addition of other ingredients, etc., but there are limits.
ところで、金属または合金からなる基体上にサイアロン
系セラミックスの薄膜コーティングを行なえば、比較的
低温で膜形成が可能で、サイアロン系セラミックスのア
モルファス層または結晶性でも粒子成長の抑えられた微
粒子で構成された成膜層を得ることができる。しかし、
サイアロン系セラミックスは熱膨張係数が一般的に金属
又は合金に比べて小さいため、サイアロン系セラミック
スをこれらの基体へ直接被覆すると、熱膨張率差による
歪みによりクラック等が発生して基体との密着性が低下
する。また、前記セラミックスを被覆した基体を高温で
使用した場合、界面に脆いシリサイドが形成され、強度
低下が起こる。By the way, if a thin film of sialon ceramics is coated on a substrate made of metal or alloy, it is possible to form the film at a relatively low temperature. A deposited layer can be obtained. but,
Sialon-based ceramics generally have a smaller thermal expansion coefficient than metals or alloys, so if sialon-based ceramics are directly coated on these substrates, cracks will occur due to distortion due to the difference in thermal expansion coefficients, resulting in poor adhesion to the substrate. decreases. Furthermore, when the ceramic-coated substrate is used at high temperatures, brittle silicide is formed at the interface, resulting in a decrease in strength.
本発明は上記事情に鑑みてなされたもので、金属又は合
金からなる基体とサイアロン系セラミックス層間にＡ、
ｔ’２ｏ３層を介在させることにより、基体とサイアロ
ンセラミックス層との密着性を向上するとともに、強度
を向上しえる被覆複合部材を提供することを目的とする
。The present invention has been made in view of the above circumstances, and includes A,
It is an object of the present invention to provide a coated composite member that can improve the adhesion between the base and the sialon ceramic layer and the strength by interposing the t'2o3 layer.
［課題を解決するための手段］
本発明者等は、サイアロン系セラミックスについて種々
研究したところ、このセラミックスのすぐれた特性を生
かすために、金属又は合金からなる基体との間に中間層
、即ちサイアロン系セラミックスとの結合力が非常に強
いＡ１２０３層を介在させることを見出した。ところで
、Ａ、１？２ ｏ３がすべての金属又は合金と“なじみ
”が良い訳ではないので、その構成には工夫が必要であ
る。具体的には、鉄系の金属又は合金からなる基体の場
合は、基体上に予めＴＩ Ｃ層を形成しその上にＡ１２
０３層を形成してからサイアロン系セラミックス層を被
覆する。また、Ａｌ系の金属又は合金からなる基体の場
合は、Ａｌを共通成分とじて含んでいるため、比較的密
着性の良いＡ１２０３層の形成が可能である。[Means for Solving the Problems] The present inventors have conducted various studies on sialon ceramics, and found that in order to take advantage of the excellent properties of this ceramic, an intermediate layer, that is, sialon, is formed between the substrate made of metal or an alloy. It was discovered that an A1203 layer having a very strong bonding force with ceramics is interposed. By the way, since A, 1?2 o3 is not "compatible" well with all metals or alloys, it is necessary to devise a structure for it. Specifically, in the case of a substrate made of iron-based metal or alloy, a TIC layer is formed on the substrate in advance, and A12 is applied on top of the TIC layer.
After forming the 03 layer, a sialon ceramic layer is coated. Furthermore, in the case of a substrate made of an Al-based metal or alloy, since Al is included as a common component, it is possible to form an A1203 layer with relatively good adhesion.
本発明において、サイアロン系セラミックス層としては
、Ａｌ固溶の酸窒化けい素（以下、（Ｓ １．Ａ〕）Ｏ
Ｎで示す）層１．あるいはＡｌ固溶の炭酸窒化けい素（
以下、（Ｓｌ、Ａ〕）ＣＯＮで示す）層が挙げられる。In the present invention, the sialon ceramic layer is made of silicon oxynitride (hereinafter referred to as (S1.A)) dissolved in Al solid solution.
(denoted as N) layer 1. Or silicon carbonate nitride in solid solution with Al (
Hereinafter, a layer (denoted as (Sl, A])CON) may be mentioned.
ここで、これらの２種のけい素化合物層はサイアロン系
セラミックスとの密着性が高くかつ優れた耐摩性を有し
ている。従って、Ａ１３０３層の上に（Ｓ ｉ、Ａ））
ＯＮ層、あるいは（Ｓ ｉ、Ａ）＞ＣＯＮ層を単層でコ
ーティングした被覆体でも優れた耐摩部材が構成され、
更にサイアロン系セラミックス層をコーティングするこ
とによりサイアロン系セラミックスの特性を生かした密
着性に優れた被覆部材が得られる。Here, these two types of silicon compound layers have high adhesion to the sialon ceramics and excellent wear resistance. Therefore, on top of the A1303 layer (S i, A))
A coating coated with a single layer of ON layer or (S i, A)>CON layer also constitutes an excellent wear-resistant member.
Furthermore, by coating with a sialon ceramic layer, a coated member with excellent adhesion that takes advantage of the characteristics of sialon ceramics can be obtained.
なお、上記サイアロン系セラミックス層は２種以上の交
互複層として用いてもよい。Note that the above-mentioned sialon ceramic layer may be used as an alternating multilayer of two or more types.
前記（Ｓｌ、Ａ））ＯＮ層あるいは（Ｓｌ、ｌｔ’）Ｃ
ＯＮ層は、ＣＶＤ法で成膜可能であるが、上記組成のタ
ーゲットを使用したイオンビームスパッタ法でＯＮ又は
ＣＯＮ雰囲気又はこれらイオンを利用した照射によりよ
り微細で欠陥の少ない良好な膜形成が可能である。また
、サイアロン系セラミックス層の生成に当たっても前記
と同様な方法で同様な効果を引出すことができ、耐摩耗
性、機械的強度により優れた密着性の良い被覆形成が可
能である。Said (Sl, A)) ON layer or (Sl, lt')C
The ON layer can be formed by the CVD method, but it is possible to form a finer film with fewer defects by ion beam sputtering using a target with the above composition in an ON or CON atmosphere or by irradiation using these ions. It is. Further, when forming a sialon ceramic layer, the same effect can be obtained by the same method as described above, and it is possible to form a coating with good adhesion and excellent wear resistance and mechanical strength.
［作用］
本発明において、Ａ１２０３層を介してサイアロン系セ
ラミックス層の形成を行なえば、強固な被覆構造体が得
られるとともに、Ａ１２０９層がＳｌの拡散を防ぐバリ
ア層となり、高温で使用した場合でも脆いシリサイド層
が形成されるのを防ぎ高温強度の低下を防ぐことができ
る。以下、本発明の実施例について説明する。[Function] In the present invention, by forming the sialon ceramic layer through the A1203 layer, a strong coating structure can be obtained, and the A1209 layer acts as a barrier layer to prevent diffusion of Sl, even when used at high temperatures. It is possible to prevent the formation of a brittle silicide layer and prevent a decrease in high temperature strength. Examples of the present invention will be described below.
［実施例１］
まず、寸法４０ｍａ＋Ｘ １００ａｖＸ ２＋ｓｍ厚の
Ａｌ板の片面をＡｌコ０３研磨剤を使用して、鏡面研磨
した後、アセトン中にて超音波洗浄し、乾燥した。[Example 1] First, one side of an Al plate having dimensions of 40 ma + x 100 av x 2 + sm thick was mirror-polished using Alco 03 polishing agent, and then ultrasonically cleaned in acetone and dried.
つづいて、前記Ａｌをイオン注入装置内に取付け、加速
電圧１２０ＫｖでＯ＋イオンを２ Ｘ １０ ”イオン
／Ｃ■２のドーズ量までイオン−注入した。次に、Ａｌ
コ０３ターゲツトを用いたイオンビームスパッタ法でＡ
１２０３を蒸着し、厚さ１．５ｐのＡ１２０３層を蒸着
した。次いで、このＡｌ２Ｏ３層上に、夫々ターゲット
を用いたイオンビームスパッタ法で下記組成式に示すα
−サイアロン層、β−サイアロン層及びα／β容量比３
０／７０及びａ、β−サイアロン層を１．５ｐ成模し、
被覆複合部材を作製した。Next, the Al was installed in an ion implanter, and O+ ions were implanted at an accelerating voltage of 120 Kv to a dose of 2 x 10'' ions/C2.
A by ion beam sputtering method using CO03 target
1203 was deposited, and a 1.5p thick layer of A1203 was deposited. Next, on this Al2O3 layer, α shown in the following compositional formula was applied by ion beam sputtering using targets.
-sialon layer, β-sialon layer and α/β capacity ratio 3
0/70 and a, β-sialon layer 1.5p formed,
A coated composite member was produced.
（１）、α−サイアロン層：
Ｍｘ （Ｓｉ、Ａ）） ＋２ （０，Ｎ） ＋ｂ（但
し、０＜ｘ≦２、Ｍ ： Ｌ １．Ｎａ、ｃ ａ、Ｍｇ
、Ｙ。(1), α-sialon layer: Mx (Si, A)) +2 (0, N) +b (however, 0<x≦2, M: L 1.Na, ca, Mg
,Y.
希土類元素のうち１種又は２種以上を示す）（２）、β
−サイアロン層：
組成式Ｓ Ｌｂ−ｚＡｌ ｚ Ｏｚ Ｎａ−ｚ（０＜
Ｚ≦４６３）実施例１に係る被覆複合部材よれば、ＡＩ
板上にＡ１２０３層を介してサイアロン層を形成した構
造となっているため、上述したいずれのサイアロン層も
クラック発生による剥離は生じなかった。Indicates one or more rare earth elements) (2), β
- Sialon layer: Composition formula S Lb-zAl z Oz Na-z (0<
Z≦463) According to the coated composite member according to Example 1, AI
Since the structure was such that the sialon layer was formed on the plate through the A1203 layer, none of the above-mentioned sialon layers peeled off due to cracking.
なお、比較例として、前述した表面研磨処理したＡｌ板
上に上記各種サイアロン層を同様の方法で直接蒸着させ
た成膜層はいずれもクラック発生による剥離が認められ
、密着性に明瞭な差があることが確認された。As a comparative example, the various sialon layers described above were deposited directly on the surface-polished Al plate using the same method, and peeling due to cracking was observed, and there was a clear difference in adhesion. It was confirmed that there is.
［実施例２］
まず、寸法４０ｓｍＸ １００ｍｍＸ ：２＋■厚のス
テンレス鋼（ＳＵＳ３０４）板の片面をＡｌコ０３研磨
剤を使用して、鏡面研磨した後、アセトン中にて超音波
洗浄し、乾燥した。つづいて、前記鋼板をイオン注入装
置内に取付け、加速電圧１６０ＫＶでＴＩ＋イオンを２
Ｘ １０１フイオン／ｃ１２のドーズ量までイオン注
入し、ひきつづき加速電圧５５ＫＶでＣ＋イオンをＩ
Ｘ １０ ′フイオン／ｃ１１２のドーズ量までイオン
注入した。次に、Ａｌ２０３ターゲットを用いたイオン
ビームスパッタ法でＡｌ２０３を蒸着し、厚さ１．５ｐ
のＡ１２０３層を形成した。次いで、前記
Ａ１２０３層を形成した鋼板を真空中にて８００℃で１
時間加熱した後、室温まで冷却した。この後、前記Ａ、
ｌ？２０３層に厚さ２．５ｐの（Ｓｌ。[Example 2] First, one side of a stainless steel (SUS304) plate with dimensions of 40 sm x 100 mm x : 2 + ■ thickness was mirror-polished using Alco 03 abrasive, and then ultrasonically cleaned in acetone and dried. . Next, the steel plate was installed in an ion implanter, and 2 TI+ ions were implanted at an accelerating voltage of 160 KV.
Ion implantation was performed up to a dose of X 101 ions/c12, and C+ ions were subsequently
Ion implantation was carried out to a dose of X 10' ion/c112. Next, Al203 was deposited by ion beam sputtering using an Al203 target to a thickness of 1.5p.
An A1203 layer was formed. Next, the steel plate on which the A1203 layer was formed was heated at 800°C for 1 time in a vacuum.
After heating for an hour, it was cooled to room temperature. After this, the above A,
l? 203 layers with a thickness of 2.5p (Sl.
１７’） ＯＮ層を形成し、更に厚さ２．５ｐの（Ｓ
１．Ａ））ＣＯＮ層、及び厚さ２．５ｐの（Ｓｉ、Ａ、
１？）ＣＯＮ層を化学蒸着法により成膜し、被覆複合部
材を作製した。17') Form an ON layer, and further layer (S) with a thickness of 2.5p.
1. A)) CON layer and 2.5p thick (Si, A,
1? ) A CON layer was formed by chemical vapor deposition to produce a coated composite member.
実施例２に係る被覆複合部材を６００℃で加熱した後室
温までの冷却サイクルを１００回繰返したが、鋼板及び
被覆層間での割れや剥離は認められなかった。また、比
較例として、前述のように表面研磨処理した鋼板上に（
Ｓｌ、Ａ、ｔ’）ＯＮ層、（Ｓｌ、Ａ））ＣＯＮ層を直
接前記と同条件で成膜したものは、成膜後の観察で成膜
層内でクラック発生による剥離が一部に見られた。A cycle of heating the coated composite member according to Example 2 at 600° C. and then cooling it to room temperature was repeated 100 times, but no cracking or peeling was observed between the steel plate and the coating layer. In addition, as a comparative example, (
When the Sl, A, t') ON layer and (Sl, A)) CON layer were directly formed under the same conditions as above, observation after the film formation revealed that some peeling due to cracks occurred within the formed layer. It was seen.
［実施例３］
まず、Ｆｅ系焼結合金（Ｆ ｅ−２，５−ｌＭｏ−１３
Ｃｒ−ＩＭｂ）からなる基体（１４０ｍ ／ ｍΦＸ３
ｍ／ｍ）の片面をＡｌ２０３研磨材を使用して研磨した
後、研磨した後アセトン中にて超音波洗浄し、乾燥した
。つづいて、前記試料をイオン注入装置内に取付け、加
速電圧１６０ＫＶでＴＩ＋イオンをｌＸｌ０”イオン／
Ｃ１２のドーズ量までイオン注入した。次に、前記基体
上にスパッタ法で厚さ約１．５ｐのＴＩ Ｃ層を成膜し
た後、厚さ約２ｐのＡ、ｅ２０３層を成膜した。次いで
、このＡｌ２０３層上に、スパッタ法により厚さ１．５
ｐの（Ｓ １．Ａ））ＯＮ層とこれと同厚さのβ−サイ
アロン層とを夫々積層して成膜し、被覆複合部材を作製
した。[Example 3] First, Fe-based sintered alloy (Fe-2,5-lMo-13
Cr-IMb) (140m/mΦX3
m/m) was polished using an Al203 abrasive, and after polishing, it was ultrasonically cleaned in acetone and dried. Next, the sample was installed in an ion implantation device, and TI+ ions were introduced into the ion implanter at an acceleration voltage of 160 KV.
Ions were implanted to a dose of C12. Next, a TIC layer with a thickness of about 1.5p was formed on the substrate by sputtering, and then an A, e203 layer with a thickness of about 2p was formed. Next, on this Al203 layer, a layer with a thickness of 1.5
A coated composite member was produced by laminating and forming a (S1.A)ON layer of p and a β-sialon layer of the same thickness.
実施例３に係る被覆複合部材によれば、ピオンディスク
法による摩耗テスト（摺動速度４ｃＩＩ／ｓ）を行なっ
たところ、摩耗量は１０． ５ Ｘ １０−８ａｓ／Ｋ
ｇであった。一方、比較例として、上ａａ Ｆ ｅ系焼
結合金基体研磨材（比較例１）、温度１７５０℃。According to the coated composite member according to Example 3, when a wear test was conducted using the pion disk method (sliding speed: 4 cII/s), the amount of wear was 10. 5 x 10-8as/K
It was g. On the other hand, as a comparative example, an aa Fe-based sintered alloy base abrasive material (comparative example 1) was used at a temperature of 1750°C.
圧力５００Ｋｇ／ｃａ＋２．保持時間６０分の条件でホ
ットプレス法にて作製したβ−サイアロン基体研磨材（
比較例２ ） 、Ｓ １３ Ｎ 、＋基体研磨材（比較
例３）を夫々用意し、実施例３と同様な条件で摩耗テス
トを行なったところ、摩耗量は夫々４０Ｘ１０−８．１
２．５Ｘ１０−８．１５ Ｘ １０−０−８（／Ｋｇで
あった。これらの結果より、本発明品の耐摩耗性が良好
であることが確認された。Pressure 500Kg/ca+2. β-sialon-based abrasive material (
Comparative Example 2), S 13 N, + base abrasive material (Comparative Example 3) were prepared, and a wear test was conducted under the same conditions as in Example 3. As a result, the amount of wear was 40X10-8.1.
It was 2.5×10-8.15×10-0-8 (/Kg). These results confirmed that the abrasion resistance of the product of the present invention was good.
［発明の効果］
以上詳述した如く本発明によれば、金属又は合金からな
る基体とサイアロン系セラミックス層間にＡ１２０３層
を介在させることにより、基体とサイアロンセラミック
ス層との密着性を向上するとともに、強度を向上しえる
被覆複合部材を提供できる。[Effects of the Invention] As detailed above, according to the present invention, by interposing the A1203 layer between the base made of metal or alloy and the sialon ceramic layer, the adhesion between the base and the sialon ceramic layer is improved, and A coated composite member with improved strength can be provided.
出願人代理人 弁理士 鈴江武彦Applicant's agent: Patent attorney Takehiko Suzue
Claims (2)
を介してサイアロン系セラミックス層を形成したことを
特徴とする被覆複合部材。(1) A coated composite member characterized in that a sialon ceramic layer is formed on a substrate made of metal or alloy through an Al_2O_3 layer.
化けい素層、Ａｌ固溶の炭酸窒化けい素層あるいはサイ
アロン層のうちの１種の単層または２種以上の交互複層
であることを特徴とする請求項１記載の被覆複合部材。(2) The sialon ceramic layer is a single layer or an alternating multilayer of two or more of the following: a silicon oxynitride layer with solid solution of Al, a silicon carbonate nitride layer with solid solution of Al, or a sialon layer. The coated composite member according to claim 1, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63147390A JPH0762232B2 (en) | 1988-06-15 | 1988-06-15 | Coated composite member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63147390A JPH0762232B2 (en) | 1988-06-15 | 1988-06-15 | Coated composite member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01316449A true JPH01316449A (en) | 1989-12-21 |
| JPH0762232B2 JPH0762232B2 (en) | 1995-07-05 |
Family
ID=15429180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63147390A Expired - Lifetime JPH0762232B2 (en) | 1988-06-15 | 1988-06-15 | Coated composite member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0762232B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0688889A1 (en) * | 1994-06-24 | 1995-12-27 | Institut Français du Pétrole | Method for passivating nickel and iron based superalloy parts |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6447880A (en) * | 1987-08-18 | 1989-02-22 | Nippon Steel Corp | Stainless steel having ceramics layer on surface |
-
1988
- 1988-06-15 JP JP63147390A patent/JPH0762232B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6447880A (en) * | 1987-08-18 | 1989-02-22 | Nippon Steel Corp | Stainless steel having ceramics layer on surface |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0688889A1 (en) * | 1994-06-24 | 1995-12-27 | Institut Français du Pétrole | Method for passivating nickel and iron based superalloy parts |
| FR2721622A1 (en) * | 1994-06-24 | 1995-12-29 | Inst Francais Du Petrole | Passivation method for metal parts made of nickel and iron based superalloy. |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0762232B2 (en) | 1995-07-05 |
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