CN106544631B - Chromium carbide multilayer gradient composite coating on surface of substrate and preparation method thereof - Google Patents

Chromium carbide multilayer gradient composite coating on surface of substrate and preparation method thereof Download PDF

Info

Publication number
CN106544631B
CN106544631B CN201610939472.2A CN201610939472A CN106544631B CN 106544631 B CN106544631 B CN 106544631B CN 201610939472 A CN201610939472 A CN 201610939472A CN 106544631 B CN106544631 B CN 106544631B
Authority
CN
China
Prior art keywords
layer
composite coating
chromium carbide
gradient composite
preparing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610939472.2A
Other languages
Chinese (zh)
Other versions
CN106544631A (en
Inventor
姜欣
王永欣
鲁侠
李金龙
王立平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo Aoshen Technology Co.,Ltd.
Original Assignee
Ningbo Institute of Material Technology and Engineering of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo Institute of Material Technology and Engineering of CAS filed Critical Ningbo Institute of Material Technology and Engineering of CAS
Priority to CN201610939472.2A priority Critical patent/CN106544631B/en
Publication of CN106544631A publication Critical patent/CN106544631A/en
Application granted granted Critical
Publication of CN106544631B publication Critical patent/CN106544631B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a chromium carbide multilayer gradient composite coating on the surface of a substrate. The composite coating is formed by sequentially laminating a Cr layer, a CrN layer, a CrCN layer and a CrC layer from the surface of a matrix to the top. Compared with the existing single-layer CrC coating, the multilayer gradient structure can relieve the difference of composition, structure and physical properties between the coating and a substrate, reduce the stress of the coating and obviously improve the frictional wear performance of the coating. The invention also provides a method for preparing the alloy by adopting the multi-arc ion plating technology, which takes metal Cr as a target material, high-purity Ar as working gas and C2H2And N2The method for preparing the chromium carbide multilayer gradient composite coating for the reaction gas can control the components and the structure of each layer by adjusting the flow of various gases.

Description

Chromium carbide multilayer gradient composite coating on surface of substrate and preparation method thereof
Technical Field
The invention relates to a chromium carbide coating on the surface of a substrate, in particular to a multilayer gradient composite chromium carbide coating on the surface of the substrate and a preparation method thereof.
Background
The nitride or carbide coating of the transition metal is called as a hard coating, and the coating has high hardness and good chemical stability, has good wear resistance and corrosion resistance under special conditions of high temperature, high speed, high pressure and the like, and is widely applied to industrial production.
Common preparation methods of the hard coating comprise magnetron sputtering, multi-arc ion plating and the like, wherein the hard coating prepared by the multi-arc ion plating has high hardness, good compactness and high chemical stability, but is often accompanied with the formation of defects such as liquid drops, micropores, intercrystalline gaps and the like in the growth process of the coating. The defects form fatigue micro-cracks under the action of alternating stress generated by friction load, and the micro-cracks are further diffused and converged, so that the coating is finally peeled off and failed from the matrix. In addition, due to the differences in composition, texture and structure between the coating and the substrate, there is an interface with abrupt changes in properties, especially large differences in thermal expansion coefficients, making it difficult to achieve sufficient bond strength. Under the condition of Hertz stress generated by friction load and residual stress generated in the coating deposition process, a film-substrate interface becomes a weak link, so that the coating is easy to peel off and fall off, and the performance of the coating is influenced.
Chromium carbide (CrC) plays an important role as a common hard coating material in the fields of tools, dies, blades and the like. However, the toughness of the CrC is poor, the brittleness of the coating can be further increased by residual stress generated in the coating preparation process by the PVD process, and the CrC coating is prone to brittle fracture and even peeling under the action of high contact stress circulation.
At present, researches on releasing internal stress of a CrC coating and improving the toughness of the coating through a multilayer gradient structure design are rarely reported. And the multilayer gradient structure can improve the barrier effect of the CrC coating on a corrosive medium, improve the wear resistance and corrosion resistance of the CrC coating in the corrosive medium, and has important application value.
Disclosure of Invention
In view of the above technical situation, the technical object of the present invention is to design a CrC composite coating on the surface of a substrate, which has high bonding strength with the substrate and excellent overall properties such as high hardness, low wear rate, high corrosion resistance, etc.
In order to achieve the technical aim described above, the inventors designed an intermediate composite layer between the substrate and the CrC coating: the Cr layer, the CrN layer and the CrCN layer are sequentially laminated from the surface of the substrate to the top. In the present application, the CrC composite coating is referred to as a CrC multilayer gradient composite coating.
Preferably, in the CrC layer, the content of the C element gradually increases along the lamination direction.
Preferably, in the CrCN layer, the content of the C element gradually increases along the lamination direction.
Preferably, in the CrN layer, the content of the N element gradually increases along the stacking direction.
Preferably, the thickness of the Cr layer is 100nm to 500 nm.
Preferably, the thickness of the CrN layer is 100nm to 500 nm.
Preferably, the thickness of the CrCN layer is 100nm to 1 μm.
Preferably, the thickness of the CrC layer is 1-10 μm.
Compared with the CrC layer on the surface of the existing substrate, the CrC multilayer gradient composite coating has the following beneficial effects:
(1) a plurality of intermediate layers are designed in the composite coating to form a gradient transition structure, and the structure can effectively relieve the difference of composition, structure and physical properties between the CrC layer on the top layer and the matrix, so that the internal stress is reduced, and the bonding strength of the coating and the matrix is improved. Moreover, the multi-interface between layers can destroy the columnar growth structure of the coating and block the penetrating channel reaching the matrix along the columnar crystal grain boundary, thereby effectively blocking the penetration of corrosive media to the coating and improving the medium corrosion resistance of the CrC coating. In addition, the hard CrC layer is positioned on the topmost layer and has low wear rate and low friction coefficient.
(2) In the composite coating, the element ratio of C to Cr in the CrC layer at the topmost layer is preferably larger than the stoichiometric ratio of CrC, and excessive C exists in a-C phase form, so that the coating has a CrC/a-C two-phase composite structure. In the structure, the a-C phase can effectively fill CrC crystal boundary, thereby being beneficial to the compactness of the coating and further improving the hardness and the wear resistance of the coating, the hardness can reach more than 30GPa, and the wear rate reaches 10-16m3In the order of/N.m. Further preferably, it is most preferableThe content of C element in the CrC layer of the top layer is gradually increased along the lamination direction (namely the direction from bottom to top), at this time, in the CrC layer, the bottom layer part is mainly composed of hard phase CrC, the content of amorphous carbon is less, the coating can have good bearing capacity, the surface layer part is mainly composed of lubricating phase a-C phase, sp in a-C phase2The C-C is a lamellar graphite structure, has low shear stress, and is easy to form an a-C transfer film on the dual surface in the friction process, so that the friction coefficient of the composite coating can be effectively reduced, and the average friction coefficient of the composite coating in the atmospheric environment can be reduced to be less than 0.2.
(3) The composite coating has good corrosion resistance in corrosive media (such as seawater and the like), has good protective effect on a substrate which operates in a high-speed, high-load and corrosive environment, can effectively improve the comprehensive performance and service life of the substrate, and has good application value, for example, cutting tools, mechanical moving parts for a seawater environment and the like (such as piston rings, gears, valves, sliding sheets, sealing rings and the like).
The invention also provides a method for preparing the CrC multilayer gradient composite coating, which adopts the multi-arc ion plating technology, and the substrate with the surface cleaned is placed in a vacuum cavity of a coating device, metal Cr is taken as a target material, high-purity Ar is taken as a working gas, and C is taken as2H2And N2Applying negative bias to the substrate for reacting gas, applying target current to the Cr target, and depositing a CrC multilayer gradient composite coating on the surface of the substrate, wherein the specific implementation steps are as follows:
step 1, introducing Ar gas, and depositing a Cr layer on the surface of a substrate;
preferably, the Ar flow is kept between 200sccm and 400 sccm;
preferably, the Cr target current is 40-80A, the negative bias of the substrate is-20 to-50V, and the deposition time is 10-30 min;
preferably, the heating temperature is 400-450 ℃;
step 2, continuously introducing Ar gas and N2Depositing a CrN layer on the surface of the Cr layer;
preferably, the flow rate of Ar gas is gradually reduced, and N is2The gas flow rate is gradually increased. IntoOne-step optimization is carried out, wherein the initial flow of Ar gas is 200 sccm-400 sccm, and the final flow is 0 sccm; n is a radical of2The initial flow rate of the gas is 0sccm, and the final flow rate is 350 sccm-800 sccm; more preferably, during the deposition process, the flow of Ar gas is uniformly reduced and N is2The gas flow rate is uniformly increased.
Preferably, the Cr target current is 40-80A, the negative bias of the substrate is-20 to-50V, and the deposition time is 10-60 min;
step 3, stopping introducing Ar gas, and continuously introducing N2And is charged with C2H2Depositing a CrCN layer on the surface of the Cr layer;
preferably, the Cr target current is 40-80A, the negative bias of the substrate is-20 to-100V, and the deposition time is 10-60 min;
preferably, N is2The gas flow is 350sccm to 800 sccm;
preferably, C is2H2The gas flow rate is gradually increased. Further preferably, during the deposition, C2H2The initial flow rate of the gas is 0sccm, and the final flow rate is 30sccm to 100 sccm. More preferably, during the deposition, C2H2The gas flow rate is uniformly increased.
Step 4, stopping introducing N2Continuously introducing C2H2And introducing Ar, and depositing a CrC layer on the surface of the CrCN layer; and, during the deposition, C2H2The gas flow rate is gradually increased.
Preferably, the Cr target current is 40-80A, the negative bias of the substrate is-50 to-300V, and the deposition time is 1-3 h;
preferably, the Ar flow rate is maintained at 200sccm to 400 sccm.
Preferably, C is2H2The initial flow rate is 50 sccm-100 sccm, and the final flow rate is 100 sccm-200 sccm; further preferably, during the deposition, C2H2The gas flow rate is uniformly increased.
The number of the Cr targets is not limited, preferably, the number of the Cr targets is not less than 2 and not more than 8, and the Cr targets are preferably symmetrically distributed by taking the matrix as the center.
Preferably, the purity of the Cr target is 99% or more.
Preferably, said C2H2、N2And the purity of Ar is more than 99.9 percent.
Preferably, after the deposition of the CrC multilayer gradient composite coating is finished, cooling to below 220 ℃ in a vacuum environment, then cooling to below 100 ℃ in a nitrogen protective atmosphere, discharging gas, opening a cavity and discharging, namely obtaining the CrC multilayer gradient composite coating on the surface of the substrate.
The cleaning treatment of the surface of the substrate comprises one or more of ultrasonic cleaning, multi-arc ion plating reverse sputtering cleaning and the like. The multi-arc ion plating reverse sputtering cleaning is bias reverse sputtering cleaning which is carried out by putting a substrate into a multi-arc ion plating equipment cavity, introducing high-purity Ar into the cavity, taking metal Cr as a target material, applying direct current to the Cr target and bombarding the substrate under the negative bias of the substrate.
Preferably, the temperature of the cavity is 300-400 ℃.
Preferably, the chamber background is evacuated to 3X 10 before cleaning-3Pa～5×10-3Pa。
Preferably, the Ar flow is 100 to 300 sccm.
Preferably, the target current is 50 to 70A.
Preferably, the negative bias voltage of the substrate is-800 to-1300V.
The preparation method adopts the multi-arc ion plating technology, can control the components and the structure of each layer by adjusting the flow of various gases, and has the following beneficial effects:
(1) the method is simple and easy to implement, and the Cr layer, the CrN layer, the CrCN layer and the CrC layer can be sequentially laminated on the surface of the substrate by controlling the introduction of gas.
(2) Gradually increasing C in the deposition process of the topmost CrC layer of the composite coating2H2The flow rate of (2) can lead to the gradient increase of the C element in the coating from bottom to top. When the ratio of C/Cr in the coating is larger than the stoichiometric ratio of CrC, excessive C exists in the form of a-C phase, so that the coating has a CrC/a-C two-phase composite structure. The a-C phase can effectively fill CrC crystal boundary, hinder CrC preferential growth and destroy columnar crystal structure, thereby formingThe compact coating structure is beneficial to improving the hardness and the wear resistance of the coating. In addition, the bottom layer part of the CrC layer is mainly made of hard phase CrC, and the amorphous carbon content is low, so that the coating can be ensured to have good bearing capacity; and the surface layer part of the CrC layer is mainly composed of lubricating phase a-C phase, sp in a-C2The C-C is a lamellar graphite structure, has low shear stress, and is easy to form an a-C transfer film on the dual surface in the friction process, so that the friction coefficient of the composite coating is effectively reduced.
(3) The composite coating is provided with a plurality of intermediate layers, a gradient transition structure can be formed, and the structure can effectively relieve the differences of the composition, structure and physical properties between the top CrC layer and the matrix, so that the internal stress is reduced, and the bonding strength of the coating and the matrix is improved. And moreover, the multi-interface among the layers can destroy the columnar growth structure of the coating and block a penetrating channel reaching the matrix along the columnar crystal grain boundary, so that the permeation of a corrosive medium to the coating is effectively blocked, and the medium corrosion resistance of the CrC coating is improved. In addition, when the middle CrN layer and the middle CrCN layer are deposited, C elements and N elements in the coating can form a gradient transition structure by adjusting the gas flow, and the structure can effectively relieve the difference of composition, structure and physical properties between the top CrC layer and the substrate, so that the internal stress is further reduced, and the bonding strength between the coating and the substrate is improved.
(3) Experiments prove that the hardness of the composite coating prepared by the method can reach more than 30GPa, and the wear rate reaches 10-16m3In the order of/N.m. Further, the average friction coefficient in the atmospheric environment may be as low as 0.2 or less.
Drawings
FIG. 1 is a schematic structural diagram of a CrC multilayer gradient composite coating based on 316 stainless steel in example 1 of the present invention;
FIG. 2 is a scanning electron microscope result image of the cross section of a CrC multilayer gradient composite coating using 316 stainless steel as a substrate in example 1 of the invention;
FIG. 3 is a graph showing the glow discharge spectrum results of a CrC multilayer gradient composite coating based on 316 stainless steel in example 1 of the present invention;
FIG. 4 is a wear scar topography after a seawater environment friction experiment of a CrC multilayer gradient composite coating using 316 stainless steel as a substrate in example 1 of the invention;
FIG. 5 is a diagram showing the appearance of a wear scar stripped off the white square area of FIG. 4 under magnification;
fig. 6 is a graph of the EDS test results at the white box area in fig. 5.
Detailed Description
The invention is described in further detail below with reference to the accompanying examples. It is to be noted that the following examples are intended to facilitate the understanding of the present invention, and do not set forth any limitation thereto.
Example 1:
in the embodiment, the CrC multilayer gradient composite coating is prepared on the stainless steel base seal ring in the marine key component, and the preparation method specifically comprises the following steps:
(1) pre-plating treatment
Putting the matrix into petroleum ether, stirring and cleaning for 15 minutes by using ultrasonic waves, removing oil stains on the surface of the matrix, putting the matrix into acetone for ultrasonic cleaning for 15 minutes, then ultrasonically cleaning in absolute ethyl alcohol for 15 minutes, and finally taking out the matrix and drying the matrix by using nitrogen;
(2) bias reverse sputter cleaning
Putting the substrate treated in the step (1) into a multi-arc ion plating cavity, wherein the temperature of the cavity is 350 ℃, and the back bottom is pre-pumped to 4.00 multiplied by 10 in vacuum-3Pa; then, introducing Ar gas with the purity of more than or equal to 99.999 percent into the cavity, wherein the flow of the Ar gas is 100sccm, applying negative bias on the substrate, and continuously bombarding the substrate for 3 minutes under the negative bias of-900V, -1100V and-1200V in sequence;
(3) deposition of a Cr transition layer
Taking metal Cr with the purity of more than or equal to 99.5 percent as a target material, arranging 6 metal Cr targets in a cavity, continuously introducing Ar gas into the cavity, wherein the flow of the Ar gas is 350sccm, and the working pressure is 0.4 Pa; applying a deposition negative bias voltage of-20V to the substrate, applying a current of 60A to a Cr target, depositing at the deposition temperature of 350 ℃ for 10min on the surface of the substrate to obtain a Cr transition layer with the thickness of about 0.2 um;
(4) deposition of a gradient transition layer of CrN
Simultaneously introducing Ar and N into the cavity2Setting the initial flow of Ar to be 350sccm and the final flow to be 0sccm, and uniformly reducing the flow in the deposition process; n is a radical of2The initial flow rate was set to 0sccm and the end flow rate was set to 600sccm, which was uniformly increased during the deposition process. Applying negative bias to the substrate to be-20V, applying current to the Cr target to be 60A, depositing at the deposition temperature of 400 ℃, and depositing for 10min on the surface of the Cr layer to obtain a CrN gradient transition layer with the thickness of about 0.2 um;
(5) deposition of a CrCN gradient transition layer
Cutting off Ar inflow and simultaneously introducing N into the cavity2And C2H2；N2The flow rate was set to 600 sccm; c2H2The initial flow rate is set to 0sccm and the end flow rate is set to 100sccm, which is uniformly increased during the deposition process. Applying a deposition negative bias voltage of-20V to the substrate, applying a current of 60A to the Cr target, depositing at 400 ℃ for 30min on the surface of the CrN layer to obtain a CrCN gradient transition layer with the thickness of about 0.5 um;
(6) depositing a CrC gradient top layer
Cutting off N2Flowing in while introducing Ar and C into the cavity2H2. The Ar flow is fixed to be 350 sccm; c2H2The initial flow rate was set to 100sccm and the end flow rate was set to 150sccm, which was uniformly increased during the deposition process. And (3) increasing the current of the Cr target to 60A, keeping the deposition temperature at 400 ℃, applying a-200V bias voltage to the substrate, and depositing a CrC gradient coating on the surface of the CrCN layer for 120 min.
(7) After the coating deposition is finished, cooling to below 200 ℃ in a vacuum environment, and then filling protective gas N into the cavity2And cooling to below 100 ℃ in protective atmosphere, discharging to atmospheric pressure, opening a cavity, discharging, and obtaining the CrC multilayer gradient composite coating on the surface of the matrix.
The cross-section SEM test result of the prepared CrC multilayer gradient composite coating is shown in figure 2, the coating structure is compact, the columnar growth is obviously inhibited, and the coating thickness is about 3.6 microns.
The glow discharge spectrum test result of the prepared CrC multilayer gradient composite coating is shown in figure 3, the contents of Cr, C and N in the coating are in gradient distribution along the depth direction of the coating, and the design is consistent with the multilayer gradient structure design of the invention.
The appearance and component test results of the wear scar of the prepared CrC multilayer gradient composite coating after the friction test in the seawater environment are shown in figures 4-6. As shown in fig. 4 and 5, the wear scar had a slight furrow therein, and the surface of the wear scar was uniform and flat throughout with very few flaking pits, as shown by the white square area in fig. 4. FIG. 5 is a topographical view of a wear scar spallation enlarged from the white box area of FIG. 4. The composition of the white square region inside the exfoliation pit shown in fig. 5 was subjected to energy spectrum analysis, and the EDS test results are shown in fig. 6, and it was found that signals of the intermediate layer N element and the matrix Fe element were not detected except for the Cr and C elements in the top layer, indicating that the exfoliation pit depth was very limited and exfoliation occurred only inside the top CrC layer. Further proves that the design of the gradient components and the multi-interface structure can block the diffusion and the propagation of microcracks in the coating, avoid the formation of penetrating corrosion channels in the coating, prevent seawater from permeating into the matrix and improve the medium corrosion resistance of the coating.
The prepared CrC multilayer gradient composite coating is subjected to the following performance tests:
(1) and pressing the substrate into a test platform at 200 nm of MTS-Nano G to measure the hardness and the elastic modulus of the substrate surface coating by a continuous stiffness method. The test method comprises the following steps: selecting 6 different areas on the surface of the coating, pressing the coating into a fixed depth of 1000nm by a Berkovich diamond pressure head, then unloading the coating to obtain a pressing-unloading curve, calculating to obtain the hardness and the elastic modulus of the coating, and then taking an average value. The coating hardness was tested to be 29 GPa.
(2) And evaluating the frictional wear life of the surface coating of the substrate in the atmospheric environment by adopting a UMT-3 multifunctional frictional wear testing machine. The specific method comprises the following steps: a mode that a coated sealing ring sample and a friction matching pair slide in a reciprocating mode is adopted, the sliding frequency is 5Hz, the load is 5N, the ambient temperature is (19 +/-3) DEG C, the relative humidity is (75 +/-5)%, and phi is YG-6 hard alloy balls with the thickness of 3mm (the components and the mass contents of the YG-6 hard alloy balls are 94% WC and 6% Co, H is approximately equal to 14GPa, and E is approximately equal to 650GPa) are used as the friction matching pair. The average friction coefficient and the wear rate of the surface coating of the substrate are measured and shown in Table 1, the average friction coefficient is 0.14, and the wear rate is 2.3X 10-15m3/N·m。
Example 2:
in this embodiment, the substrate is completely the same as the substrate in embodiment 1, and a CrC multilayer gradient composite coating is prepared on the surface of the substrate, the preparation method specifically includes:
(1) same as in step (1) in example 1;
(2) same as step (2) in example 1;
(3) same as step (3) in example 1;
(4) same as step (4) in example 1;
(5) deposition of a CrCN gradient transition layer
Cutting off Ar inflow and simultaneously introducing N into the cavity2And C2H2。N2The flow rate was set to 600 sccm; c2H2The initial flow rate was set to 0sccm and the end flow rate was set to 70sccm, which was uniformly increased during the deposition process. Applying a deposition negative bias voltage of-20V to the substrate, applying a current of 60A to the Cr target, depositing at 400 ℃ for 30min on the surface of the CrN layer to obtain a CrCN gradient transition layer with the thickness of about 0.5 um;
(6) depositing a CrC gradient top layer
Cutting off N2Flowing in while introducing Ar and C into the cavity2H2. The Ar flow is fixed to be 350 sccm; c2H2The initial flow rate was set to 70sccm and the end flow rate was set to 120sccm, which was uniformly increased during the deposition process. And (3) increasing the current of the Cr target to 60A, keeping the deposition temperature at 400 ℃, applying a-200V bias voltage to the substrate, and depositing a CrC gradient coating on the surface of the CrCN layer for 120 min.
(7) Same as in step (6) in example 1; .
The cross section SEM test result of the prepared CrC multilayer gradient composite coating is similar to that shown in figure 2, the coating structure is compact, the columnar growth is obviously inhibited, and the coating thickness is about 3.6 microns.
The glow discharge spectrum test result of the prepared CrC multilayer gradient composite coating is similar to that shown in figure 3, the contents of Cr, C and N in the coating are in gradient distribution along the depth direction of the coating, and the design is consistent with the multilayer gradient structure design of the invention.
The prepared CrC multilayer gradient composite coating is subjected to the following performance tests:
(1) the hardness test was the same as in test procedure (1) in example 1. The hardness of the coating was tested to 31 GPa.
(2) The frictional wear test was the same as in test step (2) in example 1. The average friction coefficient and the wear rate of the surface coating of the substrate are measured and shown in Table 1, the average friction coefficient is 0.165, and the wear rate is 1.9 multiplied by 10-15m3/N·m。
Example 3:
in this embodiment, the substrate is completely the same as the substrate in embodiment 1, and a CrC multilayer gradient composite coating is prepared on the surface of the substrate, the preparation method specifically includes:
(1) same as in step (1) in example 1;
(2) same as step (2) in example 1;
(3) same as step (3) in example 1;
(4) same as step (4) in example 1;
(5) deposition of a CrCN gradient transition layer
Cutting off Ar inflow and simultaneously introducing N into the cavity2And C2H2。N2The flow rate was set to 600 sccm; c2H2The initial flow rate was set to 0sccm and the final flow rate was set to 50sccm, which was uniformly increased during the deposition process. Applying a deposition negative bias voltage of-20V to the substrate, applying a current of 60A to the Cr target, depositing at 400 ℃ for 30min on the surface of the CrN layer to obtain a CrCN gradient transition layer with the thickness of about 0.5 um;
(6) depositing a CrC gradient top layer
Cutting off N2Flowing in while introducing Ar and C into the cavity2H2. The Ar flow is fixed to be 350 sccm; c2H2The initial flow rate was set to 50sccm and the end flow rate was set to 100sccm, which was uniformly increased during the deposition process. And (3) increasing the current of the Cr target to 60A, keeping the deposition temperature at 400 ℃, applying a-200V bias voltage to the substrate, and depositing a CrC gradient coating on the surface of the CrCN layer for 120 min.
(7) Same as in step (6) in example 1; .
The cross section SEM test result of the prepared CrC multilayer gradient composite coating is similar to that shown in figure 2, the coating structure is compact, the columnar growth is obviously inhibited, and the coating thickness is about 3.6 microns.
The glow discharge spectrum test result of the prepared CrC multilayer gradient composite coating is similar to that shown in figure 3, the contents of Cr, C and N in the coating are in gradient distribution along the depth direction of the coating, and the design is consistent with the multilayer gradient structure design of the invention.
The prepared CrC multilayer gradient composite coating is subjected to the following performance tests:
(1) the hardness test was the same as in test procedure (1) in example 1. The measurement result shows that the hardness of the CrC/a-C composite coating is 34 GPa.
(2) The frictional wear test was the same as in test step (2) in example 1. The average friction coefficient and the wear rate of the surface coating of the substrate are measured and shown in Table 1, the average friction coefficient is 0.192, and the wear rate is 0.91X 10-15m3/N·m。
Table 1: deposition conditions, hardness, average coefficient of friction and wear rate results for CrC multilayer gradient composite coatings of examples 1-3
Figure BDF0000007659210000081
The embodiments described above are intended to illustrate the technical solutions of the present invention in detail, and it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modification, supplement or similar substitution made within the scope of the principles of the present invention should be included in the protection scope of the present invention.

Claims (21)

1. A preparation method of a chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of a matrix is characterized by comprising the following steps: sequentially laminating a Cr layer, a CrN layer, a CrCN layer and a CrC layer from the surface of the matrix to the top;
the preparation method of the chromium carbide multilayer gradient composite coating comprises the following steps: by adopting the multi-arc ion plating technology,placing the substrate with the cleaned surface in a vacuum cavity of a coating device, taking metal Cr as a target material, taking high-purity Ar as a working gas and taking C as2H2And N2Applying negative bias to a substrate for reacting gas, applying target current to a Cr target, and depositing a CrC multilayer gradient composite coating on the surface of the substrate, wherein the method specifically comprises the following steps:
step 1, introducing Ar gas, and depositing a Cr layer on the surface of a substrate;
step 2, continuously introducing Ar gas and N2Depositing a CrN layer on the surface of the Cr layer;
step 3, stopping introducing Ar gas, and continuously introducing N2And is charged with C2H2Depositing a CrCN layer on the surface of the Cr layer;
step 4, stopping introducing N2Continuously introducing C2H2And introducing Ar, and depositing a CrC layer on the surface of the CrCN layer;
in the step 1, the current of the Cr target is 40-80A, the negative bias of the matrix is-20 to-50V, and the deposition time is 10min to 30 min;
in the step 2, the current of the Cr target is 40-80A, the negative bias of the matrix is-20 to-50V, and the deposition time is 10min to 60 min;
in the step 3, the current of the Cr target is 40-80A, the negative bias of the matrix is-20 to-100V, and the deposition time is 10min to 60 min;
in the step 4, the current of the Cr target is 40-80A, the negative bias of the matrix is-50-300V, and the deposition time is 1-3 h;
in the CrC layer, the element ratio of C to Cr is greater than the stoichiometric ratio of CrC, and the CrC layer has a CrC and a-C two-phase composite structure;
the hardness of the chromium carbide multilayer gradient composite coating is above 30GPa, and the wear rate reaches 10-16m3On the order of/N m, the average friction coefficient in the atmospheric environment is less than 0.2.
2. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: the content of the C element gradually increases along the stacking direction.
3. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 2, which is characterized in that: in the CrC layer, the C element content uniformly increases along the lamination direction.
4. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the CrN layer, the content of the N element gradually increases along the stacking direction.
5. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 4, which is characterized in that: in the CrN layer, the content of the N element increases uniformly along the stacking direction.
6. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the CrCN layer, the C element content uniformly increases along the lamination direction.
7. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: the thickness of the CrC layer is 1-10 mu m.
8. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: the thickness of the Cr layer is 100 nm-500 nm; the thickness of the CrN layer is 100 nm-500 nm; the thickness of the CrCN layer is 100 nm-1 mu m.
9. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 1, the flow rate of Ar is kept between 200sccm and 400 sccm.
10. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 1, the heating temperature is 400-450 ℃.
11. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 2, the flow of Ar gas is gradually reduced, and N is2The gas flow rate is gradually increased.
12. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 2, the initial flow rate of Ar gas is 200 sccm-400 sccm, and the final flow rate is 0 sccm; n is a radical of2The initial flow rate of the gas is 0sccm, and the final flow rate is 350sccm to 800 sccm.
13. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 2, in the deposition process, the flow of Ar gas is uniformly reduced, and N is2The gas flow rate is uniformly increased.
14. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 3, N2The gas flow is 350sccm to 800 sccm.
15. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 3, C2H2The gas flow rate is gradually increased.
16. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 3, during the deposition process, C2H2The initial flow rate of the gas is 0sccm, and the final flow rate is 30sccm to 100 sccm.
17. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 3, during the deposition process, C2H2The gas flow rate is uniformly increased.
18. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 4, the flow rate of Ar is kept between 200sccm and 400 sccm.
19. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 4, C2H2The initial flow rate is 50sccm to 100sccm, and the final flow rate is 100sccm to 200 sccm.
20. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 4, during the deposition process, C2H2The gas flow rate is gradually increased.
21. The method for preparing the chromium carbide multilayer gradient composite coating with high hardness, low wear rate and high corrosion resistance on the surface of the substrate according to claim 1, which is characterized by comprising the following steps: in the step 4, during the deposition process, C2H2The gas flow rate is uniformly increased.
CN201610939472.2A 2016-10-25 2016-10-25 Chromium carbide multilayer gradient composite coating on surface of substrate and preparation method thereof Active CN106544631B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610939472.2A CN106544631B (en) 2016-10-25 2016-10-25 Chromium carbide multilayer gradient composite coating on surface of substrate and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610939472.2A CN106544631B (en) 2016-10-25 2016-10-25 Chromium carbide multilayer gradient composite coating on surface of substrate and preparation method thereof

Publications (2)

Publication Number Publication Date
CN106544631A CN106544631A (en) 2017-03-29
CN106544631B true CN106544631B (en) 2020-02-04

Family

ID=58393787

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610939472.2A Active CN106544631B (en) 2016-10-25 2016-10-25 Chromium carbide multilayer gradient composite coating on surface of substrate and preparation method thereof

Country Status (1)

Country Link
CN (1) CN106544631B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106048525B (en) * 2016-07-15 2018-10-30 沈阳大学 A kind of preparation method of the titanium chromium metal nitride composite ganoine film of consecutive variations
CN107217238A (en) * 2017-04-20 2017-09-29 沈阳大学 A kind of preparation method of titanium-aluminum-zirconium nitride plated film carbide drill
CN108286037A (en) * 2017-12-29 2018-07-17 昆山米泰克精密电子组件有限公司 A kind of preparation method of Kato surface insulation nanoscale coating
CN109576662B (en) * 2019-01-25 2020-10-23 广东工业大学 PVD (physical vapor deposition) technology-based bulk cermet/metal/cermet bidirectional nano gradient material and preparation method thereof
CN110387529B (en) * 2019-07-05 2021-08-10 中国人民解放军空军勤务学院 Composite coating for protecting surface of hydraulic valve rod and preparation method thereof
CN111334752B (en) * 2020-02-28 2022-10-28 广东汇成真空科技股份有限公司 Method for preparing CrCN thin film
CN112144063B (en) * 2020-10-29 2023-02-28 南昌科勒有限公司 Coating device with black multilayer film and preparation method thereof
CN114686829A (en) * 2020-12-29 2022-07-01 苏州吉恒纳米科技有限公司 Wear-resistant, fatigue-resistant and repeated impact-resistant coating and production process thereof
CN113278938B (en) * 2021-05-24 2023-06-13 中国科学院宁波材料技术与工程研究所 Chromium coating with high reflectivity and high hardness, and preparation method and application thereof
CN114001142B (en) * 2021-10-26 2024-01-02 东风商用车有限公司 High-load gear with low transmission noise and preparation method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008133542A (en) * 2007-12-07 2008-06-12 Seiko Epson Corp Surface treatment method for ornament, and ornament
CN101748381A (en) * 2009-12-31 2010-06-23 中国地质大学（北京） Method for preparing high-performance doped diamond-like film
CN103710799A (en) * 2012-10-09 2014-04-09 昆山立特纳米电子科技有限公司 Self-lubricating coating steel collar and manufacturing process thereof
CN104451561A (en) * 2014-11-21 2015-03-25 中国科学院宁波材料技术与工程研究所 Method for preparing CrN coating on surface of substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008133542A (en) * 2007-12-07 2008-06-12 Seiko Epson Corp Surface treatment method for ornament, and ornament
CN101748381A (en) * 2009-12-31 2010-06-23 中国地质大学（北京） Method for preparing high-performance doped diamond-like film
CN103710799A (en) * 2012-10-09 2014-04-09 昆山立特纳米电子科技有限公司 Self-lubricating coating steel collar and manufacturing process thereof
CN104451561A (en) * 2014-11-21 2015-03-25 中国科学院宁波材料技术与工程研究所 Method for preparing CrN coating on surface of substrate

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
"Cr/CrN/CrCN/CrC/Cr-DLC梯度膜层的研究";牛仕超等;《中国表面工程》;20070630;第20卷(第3期);第35页 *
"Phase Evolution and Mechanical Properties of Cr-C Coatings Deposited by Reactive Unbalanced Magnetron Sputtering Process";Yu-Sen Yang，et al.;《Advanced Materials Research》;20130514;第690-693卷;第2149、2155、2156、2161页 *
"多弧离子镀制备的CrCN涂层组织及摩擦磨损性能";陈颢等;《中国有色金属学报》;20150228;第25卷(第2期);第424页 *
Yu-Sen Yang，et al.."Phase Evolution and Mechanical Properties of Cr-C Coatings Deposited by Reactive Unbalanced Magnetron Sputtering Process".《Advanced Materials Research》.2013,第690-693卷 *

Also Published As

Publication number Publication date
CN106544631A (en) 2017-03-29

Similar Documents

Publication Publication Date Title
CN106544631B (en) Chromium carbide multilayer gradient composite coating on surface of substrate and preparation method thereof
Ye et al. An analysis on tribological performance of CrCN coatings with different carbon contents in seawater
JP6325455B2 (en) piston ring
Guan et al. Toward high load bearing capacity and corrosion resistance Cr/Cr2N nano-multilayer coatings against seawater attack
Ye et al. Influences of bias voltage on the microstructures and tribological performances of Cr–C–N coatings in seawater
Wang et al. Study on nanocrystalline Cr2O3 films deposited by arc ion plating: II. Mechanical and tribological properties
Ye et al. Structure, mechanical and tribological properties in seawater of multilayer TiSiN/Ni coatings prepared by cathodic arc method
CN108728793B (en) Tough corrosion-resistant CrAlN/Cr2AlC multilayer film coating and preparation method thereof
Chen et al. Characterization of Ta–Si–N coatings prepared using direct current magnetron co-sputtering
CN108690983B (en) Wear-resistant corrosion-resistant Cr/CrAlSiN composite coating, and preparation method and application thereof
CN102634753A (en) Hard coating and preparation method thereof
Yang et al. Microstructure evolution and protective properties of TaN multilayer coatings
WO2019119647A1 (en) Preparation method for fullerene-like carbon layer/graphene-like boron nitride multi-layer composite super-lubricative thin film
JP2008001951A (en) Diamond-like carbon film and method for forming the same
CN111485209A (en) High-entropy alloy/WC hard layer nano multilayer film, and preparation method and application thereof
Zhao et al. Enhanced tribological and corrosion properties of DLC/CrN multilayer films deposited by HPPMS
Li et al. Structure and protective effect of AlN/Al multilayered coatings on NdFeB by magnetron sputtering
US20240093344A1 (en) Hard carbon coatings with improved adhesion strength by means of hipims and method thereof
Zhao et al. Effect of the bias-graded increment on the tribological and electrochemical corrosion properties of DLC films
Niu et al. Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc
CN113235051B (en) Nano biphase high-entropy alloy film and preparation method thereof
Luo et al. Structure, mechanical and tribological properties of thick CrNx coatings deposited by HiPIMS
Shi et al. Effects of the thickness ratio of CrN vs Cr2O3 layer on the properties of double-layered CrN/Cr2O3 coatings deposited by arc ion plating
Fukumoto et al. Effects of bilayer thickness and post-deposition annealing on the mechanical and structural properties of (Ti, Cr, Al) N/(Al, Si) N multilayer coatings
JP2011133018A (en) Piston ring

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20220126

Address after: 315000 A41, building 9, Lane 2, Lane 189, Canghai Road, high tech Zone, Ningbo, Zhejiang

Patentee after: Ningbo Aoshen Technology Co.,Ltd.

Address before: 315201, No. 519, Zhuang Avenue, Zhenhai District, Zhejiang, Ningbo

Patentee before: NINGBO INSTITUTE OF MATERIALS TECHNOLOGY & ENGINEERING, CHINESE ACADEMY OF SCIENCES