TWI276368B - Compacting moisture-sensitive organic materials in making an organic light-emitting device - Google Patents
Compacting moisture-sensitive organic materials in making an organic light-emitting device Download PDFInfo
- Publication number
- TWI276368B TWI276368B TW092114401A TW92114401A TWI276368B TW I276368 B TWI276368 B TW I276368B TW 092114401 A TW092114401 A TW 092114401A TW 92114401 A TW92114401 A TW 92114401A TW I276368 B TWI276368 B TW I276368B
- Authority
- TW
- Taiwan
- Prior art keywords
- organic
- moisture
- pellet
- powder
- sensitive
- Prior art date
Links
- 239000011368 organic material Substances 0.000 title claims abstract description 54
- 239000008188 pellet Substances 0.000 claims abstract description 68
- 239000007787 solid Substances 0.000 claims abstract description 44
- 239000000463 material Substances 0.000 claims abstract description 32
- 239000012044 organic layer Substances 0.000 claims abstract description 23
- 238000001035 drying Methods 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 13
- 125000002524 organometallic group Chemical group 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000002689 soil Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims 2
- 239000000843 powder Substances 0.000 abstract description 61
- 238000000034 method Methods 0.000 abstract description 46
- 239000002274 desiccant Substances 0.000 abstract description 11
- 239000010410 layer Substances 0.000 description 36
- 239000000292 calcium oxide Substances 0.000 description 20
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 238000005056 compaction Methods 0.000 description 11
- 239000002019 doping agent Substances 0.000 description 11
- 239000008187 granular material Substances 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- 238000005240 physical vapour deposition Methods 0.000 description 9
- 230000005525 hole transport Effects 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 6
- OBAJPWYDYFEBTF-UHFFFAOYSA-N 2-tert-butyl-9,10-dinaphthalen-2-ylanthracene Chemical compound C1=CC=CC2=CC(C3=C4C=CC=CC4=C(C=4C=C5C=CC=CC5=CC=4)C4=CC=C(C=C43)C(C)(C)C)=CC=C21 OBAJPWYDYFEBTF-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000004080 punching Methods 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002516 radical scavenger Substances 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000005562 fading Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- -1 p-quinone anions Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GEQBRULPNIVQPP-UHFFFAOYSA-N 2-[3,5-bis(1-phenylbenzimidazol-2-yl)phenyl]-1-phenylbenzimidazole Chemical compound C1=CC=CC=C1N1C2=CC=CC=C2N=C1C1=CC(C=2N(C3=CC=CC=C3N=2)C=2C=CC=CC=2)=CC(C=2N(C3=CC=CC=C3N=2)C=2C=CC=CC=2)=C1 GEQBRULPNIVQPP-UHFFFAOYSA-N 0.000 description 1
- FJNCXZZQNBKEJT-UHFFFAOYSA-N 8beta-hydroxymarrubiin Natural products O1C(=O)C2(C)CCCC3(C)C2C1CC(C)(O)C3(O)CCC=1C=COC=1 FJNCXZZQNBKEJT-UHFFFAOYSA-N 0.000 description 1
- WHAPPNIWDLUVSL-UHFFFAOYSA-N C1c2ccccc2-c2cccc(N(c3ccccc3)c3ccc(cc3)-c3ccc(cc3)N(c3ccccc3)c3cccc-4c3Cc3ccccc-43)c12 Chemical group C1c2ccccc2-c2cccc(N(c3ccccc3)c3ccc(cc3)-c3ccc(cc3)N(c3ccccc3)c3cccc-4c3Cc3ccccc-43)c12 WHAPPNIWDLUVSL-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- DLCRXTYMOCAMIQ-UHFFFAOYSA-N [O].[Sn].[Bi] Chemical group [O].[Sn].[Bi] DLCRXTYMOCAMIQ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 230000009149 molecular binding Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/846—Passivation; Containers; Encapsulations comprising getter material or desiccants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/874—Passivation; Containers; Encapsulations including getter material or desiccant
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
- Drying Of Gases (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/195,947 US6706226B2 (en) | 2002-07-16 | 2002-07-16 | Compacting moisture-sensitive organic materials in making an organic light-emitting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200405762A TW200405762A (en) | 2004-04-01 |
| TWI276368B true TWI276368B (en) | 2007-03-11 |
Family
ID=29780174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092114401A TWI276368B (en) | 2002-07-16 | 2003-05-28 | Compacting moisture-sensitive organic materials in making an organic light-emitting device |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6706226B2 (https=) |
| EP (1) | EP1383181A3 (https=) |
| JP (1) | JP4391773B2 (https=) |
| KR (1) | KR20040010192A (https=) |
| TW (1) | TWI276368B (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6767200B2 (en) * | 2001-09-28 | 2004-07-27 | Mcneil-Ppc, Inc. | Systems, methods and apparatuses for manufacturing dosage forms |
| KR100478440B1 (ko) * | 2002-11-07 | 2005-03-23 | 주식회사 컴텍스 | 압착된 유기물을 이용한 유기물 증착용 소스 |
| US7238383B2 (en) * | 2003-03-07 | 2007-07-03 | Eastman Kodak Company | Making and using compacted pellets for OLED displays |
| DE102004024676A1 (de) * | 2004-05-18 | 2005-12-15 | Süd-Chemie AG | Filmförmige sorbenshaltige Zusammensetzungen |
| KR100949819B1 (ko) * | 2008-03-11 | 2010-03-30 | 박진연 | 타블릿 성형 다이 어셈블리 |
| KR102487491B1 (ko) * | 2022-06-13 | 2023-01-12 | 솔루스첨단소재 주식회사 | 유기 전계 발광 소자용 펠릿 및 이를 이용한 유기 전계 발광 소자 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4356429A (en) | 1980-07-17 | 1982-10-26 | Eastman Kodak Company | Organic electroluminescent cell |
| US4447565A (en) * | 1981-12-07 | 1984-05-08 | The United States Of America As Represented By The United States Department Of Energy | Method and composition for molding low density desiccant syntactic foam articles |
| US4539507A (en) | 1983-03-25 | 1985-09-03 | Eastman Kodak Company | Organic electroluminescent devices having improved power conversion efficiencies |
| US4769292A (en) | 1987-03-02 | 1988-09-06 | Eastman Kodak Company | Electroluminescent device with modified thin film luminescent zone |
| JPH0242421A (ja) | 1988-04-18 | 1990-02-13 | Olympus Optical Co Ltd | Ｅｌ薄膜製造方法及び蒸着用ペレット |
| JPH05234677A (ja) * | 1991-12-25 | 1993-09-10 | Nec Kansai Ltd | 薄膜ｅｌ素子の製造方法 |
| JP3031647B2 (ja) * | 1992-02-08 | 2000-04-10 | 日立粉末冶金株式会社 | 粉末材料の押出し成形装置 |
| US5550066A (en) | 1994-12-14 | 1996-08-27 | Eastman Kodak Company | Method of fabricating a TFT-EL pixel |
| US5593788A (en) | 1996-04-25 | 1997-01-14 | Eastman Kodak Company | Organic electroluminescent devices with high operational stability |
| US5645948A (en) | 1996-08-20 | 1997-07-08 | Eastman Kodak Company | Blue organic electroluminescent devices |
| JPH1129857A (ja) * | 1997-07-11 | 1999-02-02 | Mitsubishi Materials Corp | 多結晶ＭｇＯ蒸着材及びその製造方法 |
| JPH1150228A (ja) * | 1997-08-05 | 1999-02-23 | Sumitomo Heavy Ind Ltd | Ｉｔｏタブレットの再製造方法 |
| JP3640512B2 (ja) | 1997-09-24 | 2005-04-20 | 出光興産株式会社 | 蒸着方法および有機エレクトロルミネッセンス素子の製造方法 |
| US5885493A (en) * | 1997-11-04 | 1999-03-23 | Lockheed Martin Energy Research Corporation | Method of drying articles |
| US6020078A (en) | 1998-12-18 | 2000-02-01 | Eastman Kodak Company | Green organic electroluminescent devices |
| JP2000252061A (ja) | 1999-03-03 | 2000-09-14 | Sony Corp | 電界発光素子の製造方法及びその装置、並びに電界発光素子用のペレットの製造方法 |
| US6797314B2 (en) * | 2001-07-03 | 2004-09-28 | Eastman Kodak Company | Method of handling organic material in making an organic light-emitting device |
-
2002
- 2002-07-16 US US10/195,947 patent/US6706226B2/en not_active Expired - Lifetime
-
2003
- 2003-05-28 TW TW092114401A patent/TWI276368B/zh not_active IP Right Cessation
- 2003-06-30 EP EP03077044A patent/EP1383181A3/en not_active Withdrawn
- 2003-07-15 KR KR1020030048270A patent/KR20040010192A/ko not_active Withdrawn
- 2003-07-16 JP JP2003197908A patent/JP4391773B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1383181A3 (en) | 2007-09-19 |
| EP1383181A2 (en) | 2004-01-21 |
| US6706226B2 (en) | 2004-03-16 |
| KR20040010192A (ko) | 2004-01-31 |
| US20040012120A1 (en) | 2004-01-22 |
| TW200405762A (en) | 2004-04-01 |
| JP2004063464A (ja) | 2004-02-26 |
| JP4391773B2 (ja) | 2009-12-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |