TWI275553B - Cassette feeding apparatus - Google Patents

Abstract

A cassette feeding apparatus for feeding a cassette, fed from a station where a unit process has been performed for workpieces stored in the cassette, to a station where a subsequent unit process is to be performed for the workpieces. The cassette feeding apparatus includes a frame skeleton slidably installed on a foundation, and adapted to support the cassette feeding apparatus, a lower plate arranged on the frame skeleton such that the lower plate is vertically movable, vertical movement guide units connected to the lower plate to guide the vertical movement of the lower plate, each of the vertical movement guide units including a guide shaft extending through vertical frames of the frame skeleton, and a ball bush mounted to an upper end of the selected vertical frame such that the ball bush is fitted around the guide shaft, a vertical driver connected to the lower plate such that the vertical driver applies, to the lower plate, a drive force to vertically move the lower plate, an upper plate connected to the lower plate such that the upper plate is rotatable with respect to the lower plate, a turning driver mounted to the lower plate to rotate the upper plate with respect to the lower plate, and a horizontal driver mounted to the frame skeleton to horizontally move the frame skeleton.

Description

1275553 V. Invention description α). BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer cassette transport apparatus, and more particularly to a wafer cassette containing a workpiece to be processed, that is, a workpiece, in a flat-panel display process. , transported to an automated guided vehicle or an automatic pick-and-place machine (P&P). [Prior Art] In the overall process of flat panel displays (FPDs), there are several component processes involved, which are successively executed to produce flat panel displays (FPDs) in a flat panel display (FPD) process. At the same time, in the process of flat panel displays (FPDs), a workpiece, such as a substrate, is placed in a wafer cassette having a rectangular box shape, and after a specific component process is completed, Transfer to a platform to perform the next component process. In order to transport the wafer cassette, a plurality of workpieces are temporarily placed thereon. As described above, the wafer cassette conveying apparatus is a conventionally used technique. The wafer cassette transporting device is slid down and mounted on a frame structure consisting of longitudinal, lateral and vertical frames. Therefore, the wafer cassette transporting device is slid along a pair of roads disposed at the end of the frame. Sliding to transport the wafer cassette from one platform to another to perform the next assembly process. According to FIG. 7, an example of a conventional wafer cassette conveying apparatus is illustrated. As shown in FIG. 7, the wafer cassette conveying apparatus includes a lower layer plate 43 which is provided with a plurality of guide blocks and slides. The ground is combined with the track of a frame, so that the wafer cassette conveying device is assembled; a vertical actuator 40 is disposed on the lower plate 43 according to the transmission motor combined with the vertical actuator 40 Operation to enable this vertical

1275553 V. Invention Description "" ------ ♦ Top... God, set the position between m; and a rotating plate 45, installed in the - rotating rut, the Japanese yen box conveying equipment still contains a setting tmr4, In order to rotate the rotating shaft; to: = horizontal actuator 4 placed on the lower deck 4 3, Shi Chengshi &# ' ̄ ί 〇 伸缩 〇 〇 〇 ' 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一. At the top of 40, a vertical axis of rotation is placed in the horizontal actuator 42 at the top of the upper shaft and moved horizontally. At the same time, according to the current trend of | heat, JTL ^ ^ 曰〆, prostitute into π cited (nu, thousand surface display (FPDS) volume, and thus work; ΐΠ 'ΐ:,) the workpiece volume also increased alarm Conventional wafer box transportation; preparation = vertical = due to the above-mentioned weight-bearing workpiece, this type of use in the transport type of the mobile 垓 bulk / sinking method will be easy to produce spherical spiral machinery because of instability, its operation Conventionally used θ 易 ' * The traditional wafer fab equipment used in the maintenance of the traditional parts, such as a plurality of guides, one or two degrees and a large number of multiple bearings. Moreover, the conventionally used rotary machine μ, a plurality of gears and expensive for using a large number of components. Because of the use of the plurality of gears, the plurality of gears are composed of a plurality of gears, which are composed of a plurality of gears, so that the generation of the particles is also caused by the flaws. Can be avoided. In addition, the 'dry sound is also easy. [Inventive content] · In order to solve the above problems, the object of the present invention is to provide only a cassette conveying device, which includes _ φ ancient ', knowing for ~ wafer type straight type Wafer ^# consumption

ΙΕΗ尔1275553 V. INSTRUCTIONS (3) The machine has a simple and reliable structure, so it can effectively achieve the mistakes in the process of conveying less, reliably transport the operation, and greatly reduce the process of transporting the workpiece. The time required, so that productivity can be improved. On the one hand, the present invention provides a wafer cassette transporting apparatus for transporting a wafer cassette, which is subjected to a series of processing processes and stored in a wafer. The workpiece in the box is transported from one platform to another platform, and the workpiece is subjected to a subsequent series of processing processes, which comprises a backbone frame of a rectangular box composed of a plurality of horizontal and vertical frames. The wafer cassette conveying device can be slid into and mounted on a base; the lower layer is disposed on the backbone frame, so the lower layer can be moved in a vertical direction; and the plurality of guides are vertically moved. The guiding device is coupled to the lower plate to guide the lower plate to move in a vertical direction; each of the vertically moving guiding devices includes a guide shaft. The guide shaft can extend along a selected vertical frame; and a spherical sleeve shaft disposed at the top end of the selected vertical frame, so that the spherical sleeve shaft can be circumferentially fixed to the a vertical drive connected to the lower plate, so that the vertical actuator can apply a driving force to the lower plate so that the lower plate can move in a vertical direction; an upper plate, and the lower layer The plate # is connected so that the upper plate can follow the lower plate; a rotary actuator is disposed on the lower plate such that the upper plate can follow the lower plate and a horizontal actuator disposed on the backbone On the frame, dream of the backbone frame in a horizontal direction. The vertical actuator can include a first link with its end suspended

1275553 V. Description of invention (4) f is connected with the lower layer. The second end of the second connection is not connected to the other end of the sample. The :J" 未 未 则 则 悬 悬 悬 悬 框架 框架 frame, while with d "vertical drive The motor is disposed on the operation of the backbone, and therefore, the driving force generated by the motor is rotated to cause the binding plate to perform the operation of the chain rotation by the vertical bar. The device may further include a guide block. Each of them is disposed at the junction of the first link I ^ buckle, the collar and the bearing, and each of them is also provided with a joint of a link, so that the collar and the bearing can be used for the guide ring and the guide block Surrounding each other. The μΪΪΓ actuator may include a horizontal sleeve in which the end of the sacral backbone frame is traversed, and when the horizontal frame disposed at the end of the backbone frame is rotatably supported, Horizontally drive the motor with the 6 mt ' to rotate the horizontal axis, and the roller to fix the corresponding end of the frame to run along the track and to the bottom to support the level / frame ί 纟 ' The 1 rotation of the $ type is set on the Xiao $ horizontal axis mounted on #外^ ^ i, along The orbit is running. At the same time, the guide roller is mounted on the frame of the backbone frame, = : and the vertical direction = the track. 逵, 扭 处 ^ ^ a has a set on the lower layer of the suspected drive The lower deck is the same as: the first-toothed gear is fixedly mounted on the rotating temple of the motor, and a first-gear can be meshed with each other: "on the reverse, 0 makes the second gear and

1275553 V. DESCRIPTION OF THE INVENTION (5) The purpose, technical contents, features and effects achieved by the present invention will be more readily understood by the detailed description of the embodiments and the accompanying drawings. In addition, the other advantages, objects, and features of the invention are set forth in the Detailed Description of the invention. That is, the object and other advantages of the present invention can be understood and achieved by the detailed description, the scope of the invention, and the structure particularly pointed out in the drawings. [Embodiment] A wafer transfer apparatus according to the present invention is shown in Figs. 1 to 6. As shown in FIG. 1 to FIG. 6, the wafer cassette conveying apparatus comprises a two-bone frame 4 which is a rectangular box body combined by a horizontal and a vertical frame to support the wafer cassette. The workpiece in the box transport device. A pair of escrow is disposed on a base at a position opposite to the backbone frame 4 for guiding the wafer cassette transporting device to move horizontally. The wafer cassette transporting device further comprises an upper layer 1; a lower layer 2; a vertical actuator for vertically transporting the wafer carried by the wafer cassette transporting device to take 2 7 (as shown in Fig. 6) Shown); a rotary actuator for transporting the wafer cassette 27; and a horizontal actuator for horizontally transporting the wafer cassette. The guide block 3 is mounted on the surface above the upper layer 1 for guiding the direction in which the wafer cassette on the upper layer 1 is moved. The support block 15 is mounted on the central portion of the lower surface of the lower deck 2 for attaching the lower deck 2 to a linkage comprising 'in the vertical drive.

Page 10 1275553 V. INSTRUCTIONS (6) ^ The linkage includes a pair of links, a first link 13 and a second link 14, respectively. The plurality of guiding devices operating in the vertical direction are respectively connected to the respective corners of the lower deck 2 for guiding the vertical movement of the lower deck 2. Each guiding device operating in a vertical direction comprises a guiding shaft 39 which extends through a connecting vertical frame, and the vertical frame is respectively disposed at an angular position of the lower plate 2; a spherical type A sleeve is fixed to the upper portion of the connected vertical frame; the rotary actuator is also disposed on the surface below the lower plate 2. The operation of the φ vertical actuator causes the lower plate 2 to move in the vertical direction. Therefore, the wafer cassette 27 can be placed on the upper plate 1, and the rotation direction can be switched according to the operation mode of the connection (1 inkage). The operation is a linear movement. In addition, the vertical actuator includes a vertical•f zone motor 1 1 disposed on the backbone frame 4 for generating transmission force to move the lower plate 2 in a vertical direction. One end of the second link (1 inks) 14 of the linkage is fixedly attached to the vertical drive motor 11, so that the second link (1 inks) 14 can be generated according to the vertical drive motor 11 The transmission force is rotated at a predetermined angle, and the other end of the second link (1 inks) 14 is connected to one end of the first cable (1 inks) 13 in a suspension manner; and the first link ( 1 inks) The other end of 1 3 is connected to the lower board 2. As shown in Fig. 4, the collars 36, 37 and 38 and the bearings 30, 31 and 33 are respectively disposed at the junction of the j soap joint, so that the linkage can perform a hinge rotation. Operation. When the second link (links) 1 4

Page 11 1275553 5. Inventive Note (7), when the stomach rotates according to the transmission force generated by the vertical drive motor 11, the first link (丨inks) 13 can be according to the second link (1) Inks) 1 4 is rotated to move in the vertical direction, so that the lower layer 2 can be moved in the vertical direction. At the same time, the lower deck 2 is moved in the vertical direction by the guide shaft 39 of the vertical movement guide and the guide ' of the spherical sleeve 36. A fixing block 12 is disposed on the backbone frame 4 at a position of the vertical drive motor 11 to mainly support the vertical drive motor 1 1 , thereby preventing the vertical drive motor 11 from operating while • Vibration and distortion generated in the round box conveying equipment. The horizontal actuator is used to horizontally transport the wafer cassette 27, the horizontal actuator includes a horizontal drive motor 9, and a horizontal shaft 16 that is coupled to the horizontal drive motor 9, as shown in FIG. Shown. The raft shaft extends in the backbone frame to one end of the backbone frame, and when the horizontal frame provided at the end of the backbone frame is rotatably supported, the f-axis 10 is fixedly mounted on the horizontal axis. 1 6 corresponds to the end, the other pair of rollers 1 η + Ί R ^ U is also arranged in a rotating manner on the horizontal axis b) supported by the horizontal axis, such as the touch, the horizontal drive horse, t ί, The driving force generated by the rollers i^ of the four rollers 10 connected to the track is transmitted to the horizontal position along the track, so that 'through the horizontal axis 16, the roller 1 can be Move in the horizontal direction. Driving the wafer cassette conveying device along the rail " guiding roller device 2, the flat frame, the guiding roller is disposed at the end of the backbone frame 4, the water 5, the 2 1 system is to prevent the Backbone frame 4 along the water

1275553 V. INSTRUCTIONS (8) The horizontal and vertical directions are separated from the obedience. The operation of the rotary actuator causes the upper deck 1 to move in the rotational direction. Therefore, when the wafer cassette 27 is loaded or unloaded from the upper laminate 1, the horizontal positioning of the wafer cassette 27 can be appropriately adjusted. The rotary actuator includes a gear 6 disposed on a surface above the lower plate 2; a gear 7 disposed on a surface below the upper plate 1, so that the gear 7 can mesh with the gear 6; and a lower layer The rotation of the plate 2 drives the motor 8. The rotary drive motor 8 has a rotary shaft extending upward through the lower deck 2, and the rotary shaft of the rotary drive motor 8 is coupled to the gear 6. • Although not shown, a rotating plate may be included in the rotary actuator to enhance the rigidity of the rotary actuator and thus support the weight of the wafer cassette 27. The rotating plate can be inserted between the upper plate 1 and the lower plate and surrounds the gear 7. As shown in Fig. 2, reference numeral 17 represents a wire supporting device for inserting a wire connected to the vertical driving motor 11; and reference numeral 18 represents a vertical operating sensor for sensing the crystal. The vertical movement of the round box conveying device; the reference numeral 20 represents an external encoder gear. As shown in FIG. 3, the reference numeral 2 3 represents a horizontal operation sensor for sensing the horizontal movement of the wafer cassette conveying device; the reference numeral 24 generation IP-weight hammer; and the reference numeral 2 5 Represents a stopper. As shown in Fig. 4, reference numerals 3 2 and 3 5 represent link guide blocks. As shown in Fig. 6, the reference numeral 28 represents an external framework; the symbol 2 9 represents a foundation support.

Page 13 1275553 V. INSTRUCTIONS (9) According to the operation mode of the vehicle (A G V ), the second transmission of the vertical transmission joint 3 is moved in the upward direction. When the wafer is at the position along the horizontal transfer box conveying device, the wheel 6 is rotated when necessary, so that the rotation of the gear 6 is also caused to move, so that the vertical drive reduces the wafer 2 7 It can be transported to be transported to storage. The above-mentioned equipment is provided with the structure of the wafer cassette transport equipment as described above. When the wafer cassette 27 is loaded by the vertical drive motor 1 1 of the upper plate 1 by an automatic guide or a manual transport vehicle (MGV), the operation starts and rotates the links 14 , the second The transmission force generated by the links is transmitted to the first link to move up, thereby causing the lower layer 2 and the upper layer. Therefore, the wafer cassette 27 loaded on the upper layer is lifted by the cassette 2 The horizontal direction of the water of the device drives the rotation to reach the adjustment, so that the upper layer of the box is moved by the motor box 2, and the wafer is moved to the chamber to store a clear plurality of functions. The flat drive moves the horse and the whole gear is 1 2 7 11 7 The action is mounted on the passive horse. When the wafer wheel 7 of the 9-stage wafer wheel 7 starts to run, the vertical position reaches 9, and the crystal rotation stop box can be rotated and flattened to make the tooth, so that the drive horse carries the round box. The operation drives the horse 2 and the rotation, according to the position of the same wheel 6 in this condition, the wafer reaches a rising turn, the conveying device. In this case, the gear 8 can be transported horizontally. The upper gear of the gear 6 can be reversed in the reverse direction. When the wafer is in the state of the wafer 2, the wafer 到达 reaches the state and the tooth is turned. According to the transformation of the meshing 1 . The rotation is automatically described by the round box, and the wafer cassette transmission according to the present invention is 0.

Page 14 1275553 V. INSTRUCTION DESCRIPTION (ίο) That is, the wafer cassette transport apparatus of the present invention can transport a wafer cassette which is larger than the workpiece stored in the wafer cassette because The vertical drive motor operates such that the upper deck is vertically movable in accordance with the vertical telescoping of the joint. In addition, the wafer cassette/cartridge transporting apparatus of the present invention can operate relatively stably compared to conventional conventional equipment, and therefore, the orientation of the wafer cassette can be more easily manipulated. Furthermore, the conventional conventional equipment of the wafer cassette conveying device of the present invention uses a relatively small number of components, so that the maintenance time of the wafer cassette conveying device can be relatively reduced, and the crystal can be manufactured in an inexpensive manner. The round box transports and simplifies the internal components of the wafer cassette transport device structure. In addition, the number of contact positions in the wafer cassette transport device is reduced, so that it can be significantly larger than conventionally used devices. Destroy the formation of low particles. According to the present invention, since the transmission force generated by the vertical actuator is achieved by a linkage, when the transmission force generated by the vertical actuator reduces the height of the structure, it can drive the vertical long stroke. Increase. When the number of contact elements is reduced, it can greatly reduce the occurrence of noise. The above is only the specific embodiments of the present invention and the technical principles and methods of the present invention. The purpose of the present invention is to enable those skilled in the art to implement the contents of the present invention and to implement them, not to limit them. The scope of the present invention is to be construed as being in accordance with the scope of the present invention. All of them should be included in the scope of the patent application of the present invention and incorporated in Chen Ming.

Page 15 1275553 BRIEF DESCRIPTION OF THE DRAWINGS [Brief Description of the Drawings] Fig. 1 is a side elevational view showing the structure of the wafer cassette conveying apparatus of the present invention. Fig. 2 is a plan view showing the wafer cassette conveying apparatus of the present invention. - Figure 3 is a front view showing the wafer cassette conveying apparatus of the present invention. Figure 4 is a plan view showing the vertical drive in the wafer cassette transporting apparatus of the present invention. Fig. 5 is a front view showing the skeleton in the wafer cassette conveying apparatus of the present invention. II6 is a side view showing the installation of the s t a t e in the bone structure of the wafer cassette conveying apparatus of the present invention. Figure 7 is a side elevational view of a conventional wafer cassette transport apparatus. [Main component symbol description] 1 upper plate upper plate 2 lower plate lower plate • 3 guide block gu i de b 1 ocks 4 backbone frame frame skeleton 6 gear gear 7 gear gear _ walking drive motor turning drive motor 9 horizontal drive motor horizontal Drive motor 1 0 roller ro 1 1 ers /11 vertical drive motor vertical drive motor 1 2 fixed block fixi ng b 1 ock

Page 16 1275553 Graphical description 13 first link first link 14 second link second link 15 support block support blocks 1 6 horizontal axis horizontal shaft 1 17 wire branch device electric wire holding unit 18 vertical operation sensor vertical movement Sensor 19 external encoder, gear external encoder gear 21 guide roller unit guide roller units 2 3 horizontal operation sensor horizontal movement sensor H weight we i gh t 25 brake device stopper 2 6 sleeve bush 2 7 crystal B] E box Casse 11 e 2 8 external frame external framework 29 pedestal foundation support • 3 0, 31, 33 bearing bearings 32, 35 fixed block fixed block • 3 6, 37, 38 collar collars 39 guide shaft guide shaft • vertical actuator vertical Driver 41 rotary drive turning driver 42 horizontal drive horizontal driver ~43 lower plate lower plate 4 4 upper plate upper plate

Page 17 1275553 Schematic description 45 rotating plate rotating plate IBBi第18页

Claims (1)

1275553 VI. Patent Application _ ^ 1 · A wafer cassette conveying device for transporting wafer cassettes, transporting workpieces that have been processed in a series of processes and stored in wafer cassettes, from one platform to another a platform for performing a subsequent series of processing processes on the workpiece, the wafer cassette conveying device comprising: a backbone frame, which is a rectangular box composed of a plurality of horizontal and vertical frames, the backbone frame is adapted Supporting the wafer cassette conveying device, the backbone frame is slid down and mounted on a base; the lower layer plate is disposed on the backbone frame, so the lower layer phase plate: under the layer and the bow guide • The number of the re-transportation of the re-transportation is straight to the vertical side, and the vertical can be hanged by the side of the line, one by one, and the axis 45—for the guide, a straight package The guiding guide is placed under the layer to be used as the guiding frame of the connecting frame, and the winding ring of the guiding frame can be selected for the setting type of the ball, because of the extension, the pipe frame and the straight ball End of the hanging If the top is straight, the plate can be lowered, and the plate can be transferred to the plate and the layer can be driven. The direct-moving axis of the transmitter can be transferred to the bottom. , square plate straight layer vertical transporter transfer 451 ϋ 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋 旋The above-mentioned slab is placed under the slab of the slab of the slab. The dry frame and the bone frame are dried; the rotating plate is transferred to the bone, and the flat plate is transferred to the flat water. The 19th page is 1275553. VI. Patent application scope 2. The wafer cassette as described in claim 1 a conveying device, wherein the vertical transmission comprises: a first connecting rod, one end of which is coupled to the end of the lower plate in a hanging manner; and a second connecting rod, one end of which is suspended and the other of the first connecting rod One end is coupled; and a vertical drive motor is disposed in the backbone frame and coupled to the other end of the second link, so that the second link can be driven by the vertical drive motor The rotation of the spring is performed by force, and thus, the first link is driven to perform the operation of hinge rotation so that the lower plate can be vertically moved. 3. The wafer E-box transport apparatus of claim 2, wherein the vertical actuator comprises: a plurality of guide blocks respectively coupled to the first link and the second link; and ' a plurality of collars and a plurality of bearings, wherein the plurality of collars and the plurality of axle bearings are also respectively coupled to the first link and the second link, because the collar and the bearing can each Do not surround and fix the guide block. 4. The wafer cassette conveying apparatus of claim 1, wherein the horizontal actuator comprises: a horizontal axis supported by the horizontal frame mounted at the end of the backbone frame The horizontal axis may extend transversely in the backbone frame to one end of the backbone frame; a horizontal drive motor coupled to the horizontal shaft to swirl the water Page 20 1275553 6. Patent application range flat axis; a pair of rollers fixedly mounted (inlaid) at the corresponding end of the horizontal axis to run along the track and mounted to the base; Provided in a rotating manner on the horizontal frame supported by the horizontal shaft to enable the other pair of rollers to run along the track; and a guiding roller device mounted on the mounting The horizontal frame at the end of the backbone frame is detached from the track in order to prevent the roller from sliding along the horizontal and vertical directions. The wafer cassette conveying apparatus of claim 1, wherein the rotary actuator comprises: " a rotary drive motor mounted on the lower deck and provided with a rotary shaft by a lower plate extending vertically; a first gear fixedly mounted on a rotating shaft of the rotary drive motor; and a second gear fixedly mounted on the upper plate, thereby making the second The gear and the first gear are in mesh with each other. Page 21