KR20100049226A - Driving apparatus of glass panel conveyance system - Google Patents

Driving apparatus of glass panel conveyance system Download PDF

Info

Publication number
KR20100049226A
KR20100049226A KR1020080108309A KR20080108309A KR20100049226A KR 20100049226 A KR20100049226 A KR 20100049226A KR 1020080108309 A KR1020080108309 A KR 1020080108309A KR 20080108309 A KR20080108309 A KR 20080108309A KR 20100049226 A KR20100049226 A KR 20100049226A
Authority
KR
South Korea
Prior art keywords
glass panel
cassette
motor
gear
rack gear
Prior art date
Application number
KR1020080108309A
Other languages
Korean (ko)
Inventor
박용순
Original Assignee
주식회사 티케이씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 티케이씨 filed Critical 주식회사 티케이씨
Priority to KR1020080108309A priority Critical patent/KR20100049226A/en
Publication of KR20100049226A publication Critical patent/KR20100049226A/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67259Position monitoring, e.g. misposition detection or presence detection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: An apparatus for driving a glass panel conveyor system is provided to stably convey a glass panel by precisely controlling the speed and the location of a glass panel cassette. CONSTITUTION: A clamp(2) fixes a glass panel(1). A passive rack gear(5) is located on the upper side of the glass panel cassette(3). The passive rack gear is engaged with a driving pinion gear(6). A motor timing pulley(7) and a timing belt(8) are installed in a motor(4). Power is applied to the passive rack gear which is engaged with the driving pinion gear. The glass panel cassette is transferred to a horizontal direction.

Description

Driving apparatus for glass panel conveying equipment

The present invention relates to a driving device for a glass panel conveying facility, and more particularly, to a driving device for a glass panel conveying facility having a stable conveying function by excellent driving force transmission and accurate speed and position control during glass panel conveying.

In general, when etching the glass panel for PDP, the surface treatment is mainly performed by using a strong acid solution such as hydrofluoric acid. In this case, a base bath containing an etching solution of a strong acid solution such as hydrofluoric acid, which is very harmful to human body and equipment, After soaking in the bath, the original surface of the glass substrate is exposed.

Conventionally, the equipment for transporting glass panels in etching solution has been a problem of corrosion and frequent failures due to strong acid solution. In other words, the driving part of the transport equipment is often subjected to corrosion by strong acid solution such as hydrofluoric acid. Repetitive movement of glass panels that are immersed in strong acid solution contained in limited base bath and transported by unstable leakage of strong acid solution to the outside causes the driving equipment to be exposed. The problem has been raised.

Accordingly, the present invention has been invented to solve the conventional problems as described above, to provide a driving device of the glass panel conveying equipment is excellent conveying the driving force when conveying the glass panel and stable conveying is possible as the speed and position control is possible. The purpose is.

In order to achieve the above object, the present invention provides a glass panel conveying apparatus for driving a glass panel cassette in which a plurality of glass panels are fixed by clamps and supported by the driving force of a motor, wherein the upper portion of the cassette is provided. A driven rack gear is installed, the driven rack gear meshes with a drive pinion gear, and the drive pinion gear is engaged with a helical gear of a rotating shaft having a motor timing pulley installed in a motor and an axial timing pulley connected by a timing belt. The helical gear and the connecting shaft are connected together to drive.

The driving device of the glass panel conveying equipment according to the present invention as described above is provided with a stable conveying function while being capable of accurate speed and position control while delivering excellent driving force when conveying a cassette supporting the glass panels.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view illustrating a driving apparatus of a glass panel conveying apparatus according to the present invention, which shows a part of a cassette and driving means for fixing a plurality of glass panels 1.

The present invention relates to a driving apparatus of a glass panel conveying apparatus, in which a plurality of glass panels 1 are fixed by clamps 2 and convey the glass panel cassette 3 on which they are supported using the driving force of the motor 4. The driven rack gear 5 is installed on the cassette 3, and the driven rack gear 5 meshes with the drive pinion gear 6, and the drive pinion gear 6 is a motor installed in the motor 4. A rack gear side helical gear 12 and a connecting shaft 13 connected to a helical gear 11 of a rotating shaft 10 having an axial timing pulley 9 connected to a timing pulley 7 and a timing belt 8. It is structured to be connected together and rotate together.

The helical gears 11 of the driving pinion gears 6 are engaged with the helical gears 11 provided at both ends of the rotation shaft 10, respectively, so that the rotation shaft 10 that rotates when the motor 4 is driven. The drive pinion gears 6 engaged with both ends of the rotary shaft 10 also rotate together.

On the other hand, the encoder 15 is installed on one side of the support 14 installed on the upper side of the cassette 3 so as to check the moving range of the position sensor 16 installed on both sides of the upper portion of the cassette 3.

The power transmission process of the present invention made as described above, first, when the motor 14 is driven, the driving force is transmitted to the motor timing pulley (7), through the timing belt (8) to the shaft timing pulley (9) The rotating shaft 10 rotates, and the rack gear side helical gears 12 engaged with the helical gears 11 installed at both ends of the rotating shaft 10 rotate, respectively, so that the drive pinion gears 6 rotate in the same manner. .

Then, power is transmitted to the driven rack gears 5 of the cassette 3 engaged with the drive pinion gear 6 to move the cassette 3 in the horizontal direction.

At this time, the position sensors 16 installed on both sides of the upper portion of the cassette 3 for holding and supporting the glass panels 1 with the clamp 2 are moved when the position moves with the driven rack gear 5. It is possible to accurately control the movement of the cassette 3 by adjusting the driving force of the motor 4 by detecting the exact amount of movement detected by 15).

Accordingly, the present invention supports a plurality of glass panels (1) in the cassette (3) to prevent the corrosion of the equipment parts because the etching solution made of strong acid does not leak out of the base bath due to the correct operation of the drive device during the glass etching (Glass etching) It has a stable return function while being able to do it.

In addition, the present invention shows a drawing in which two drive devices are installed in a set of conveying equipment, but, of course, the same drive device may be installed in a plurality of units or a single type as needed.

1 is a perspective view showing a driving device of a glass substrate conveying equipment according to the present invention.

-Explanation of symbols for the main parts of the drawings-

1: glass panel, 2: clamp,

3: cassette, 4: motor,

5: driven rack gear, 6: driven pinion gear,

7: motor timing pulley, 8: timing belt,

9: axis timing pulley, 10: axis of rotation,

11: helical gear, 12: rack gear side helical gear,

13: connecting shaft, 14: support,

15: encoder, 16: position sensor.

Claims (2)

In the driving apparatus of the glass panel conveying apparatus, in which several glass panels 1 are fixed by clamps 2 and convey the glass panel cassette 3 on which they are supported using the driving force of the motor 4, A driven rack gear 5 is installed above the cassette 3, and the driven rack gear 5 meshes with the drive pinion gear 6, and the drive pinion gear 6 is a motor timing installed in the motor 4. The rack gear side helical gear 12 and the connecting shaft 13 connected to the helical gear 11 of the rotating shaft 10 having the shaft timing pulley 9 connected to the pulley 7 and the timing belt 8 are integrated. The driving device of the glass panel conveying equipment, characterized in that rotated together. The method of claim 1, An encoder 15 is installed at one side of the support 14 installed at the upper side of the cassette 3 to check the moving range of the position sensors 16 installed at both sides of the upper part of the cassette 3. Driving device for glass panel conveying equipment.
KR1020080108309A 2008-11-03 2008-11-03 Driving apparatus of glass panel conveyance system KR20100049226A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080108309A KR20100049226A (en) 2008-11-03 2008-11-03 Driving apparatus of glass panel conveyance system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080108309A KR20100049226A (en) 2008-11-03 2008-11-03 Driving apparatus of glass panel conveyance system

Publications (1)

Publication Number Publication Date
KR20100049226A true KR20100049226A (en) 2010-05-12

Family

ID=42275710

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080108309A KR20100049226A (en) 2008-11-03 2008-11-03 Driving apparatus of glass panel conveyance system

Country Status (1)

Country Link
KR (1) KR20100049226A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103332456A (en) * 2013-06-25 2013-10-02 浙江三星新材股份有限公司 Operation unit of electronic glass carrying vehicle frame
CN105313190A (en) * 2015-11-10 2016-02-10 东莞市南兴家具装备制造股份有限公司 Cantilever type X-axis driving mechanism of wood combined machining center
CN107200219A (en) * 2016-12-28 2017-09-26 中国建材国际工程集团有限公司 LOW E automatic sheet-fetching centering electrical control gears
CN112360856A (en) * 2020-11-09 2021-02-12 江西立讯智造有限公司 Robot carrying and pressure maintaining jig for Bluetooth headset production

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103332456A (en) * 2013-06-25 2013-10-02 浙江三星新材股份有限公司 Operation unit of electronic glass carrying vehicle frame
CN105313190A (en) * 2015-11-10 2016-02-10 东莞市南兴家具装备制造股份有限公司 Cantilever type X-axis driving mechanism of wood combined machining center
CN107200219A (en) * 2016-12-28 2017-09-26 中国建材国际工程集团有限公司 LOW E automatic sheet-fetching centering electrical control gears
CN112360856A (en) * 2020-11-09 2021-02-12 江西立讯智造有限公司 Robot carrying and pressure maintaining jig for Bluetooth headset production
CN112360856B (en) * 2020-11-09 2022-04-05 江西立讯智造有限公司 Robot carrying and pressure maintaining jig for Bluetooth headset production

Similar Documents

Publication Publication Date Title
KR100936992B1 (en) Apparatus for turning a board
JP6626089B2 (en) External reversing machine system for variable substrate thickness and method of rotating the substrate
JP2007036227A (en) Substrate storage cassette, transfer conveyor, and transfer system employing them
KR20100049226A (en) Driving apparatus of glass panel conveyance system
CN115831838B (en) Silicon wafer handling equipment and method
KR101680993B1 (en) Industrial robot
KR20180035661A (en) Posture changing device
JP2006088235A (en) Substrate transfer-loading robot device
KR20000048000A (en) The work transfer device, the method for maintaining the position of the same and the control device for the same
TWI275553B (en) Cassette feeding apparatus
JP2007160170A (en) Treatment apparatus of substrate
JPH07106402A (en) Platelike material transfer system
KR20160109420A (en) Turnover apparatus for measuring flexible display panel
JP5224612B2 (en) Substrate delivery device and substrate delivery method
JP2022041541A (en) Substrate inversion device and substrate inversion method
WO2012067332A1 (en) Substrate-transfer apparatus and substrate-transfer method using same
JP2009176858A (en) Substrate delivery apparatus
JP5212899B2 (en) Work conveying apparatus and work conveying method
KR101011997B1 (en) Unit for transferring a substrate and apparatus for processing a substrate having the unit
KR20100058706A (en) Apparatus for transferring a substrate
JP2009188078A (en) Work-handling device, component-mounting device, and flat display panel
JP5029325B2 (en) Line tracer
JPH06163673A (en) Substrate processing apparatus
KR20100125583A (en) Apparatus for manufacturing the substrate
CN220251767U (en) Dynamic edge light inspection equipment

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application